KR20140128256A - Probe needle module - Google Patents

Abstract

Disclosed is a probe needle module. The probe needle module is configured to transmit a test signal of a tester device to a device under test (DUT) in order to perform electricity testing. The probe needle module includes a board, a holder and at least one probe needle row. The holder is disposed on the board. The at least one probe needle row is aligned in a first direction. Each of the at least one probe needle row has a plurality of needle groups in a second direction. Each of the probe needle groups includes a plurality of probe needles. Each of the probe needles includes a contact portion and a cantilever portion. One end of the cantilever portion is connected to the board, and the other end of the cantilever portion is connected to the contact portion. There is an included angle between the contact portion and the cantilever portion.

Description

Probe Needle Module {PROBE NEEDLE MODULE}

The present invention relates to a probe needle module. More particularly, the present invention relates to a probe needle module wherein the probe needle is angled.

When inspecting a semiconductor chip, the tester must contact the probe card with a DUT (such as a chip) to obtain test data of the DUT through signal transmission and electrical signal analysis. The probe card generally includes a plurality of precision probe needles formed by a mutual arrangement. Each probe needle generally corresponds to a particular electrical node on the chip that ensures transmission of the test signal from the tester when the probe is in contact with the corresponding electrical node on the DUT. In addition, the purpose of measuring the electrical characteristics of the DUT can be achieved by including control and analysis procedures of the probe card and the tester.

However, since the electrical components are designed to be more precise and smaller in size, the electrical node density on the chip is higher. Thus, the density of the probe needles and the number of layers required also increase accordingly. Please refer to Figs. 1A and 1B. Figures 1A and 1B illustrate a multi-layer probe needle structure of a conventional probe needle module, respectively. In Fig. 1A, the chip 100 has electrical nodes 100a and 100b. The probe needle module has a first probe needle row and a second probe needle row. The first probe needle row has a plurality of probe needles 12-1 and 12-2, and the second probe needle row also has a plurality of probe needles 12-3 and 12-4. Each probe needle is in contact with electrical nodes 100a and 100b by way of end 12b. And there is an angle formed between the contact portion 12e and the cantilever portion 12d of each probe needle. The relationship between each of the included angles of the probe needle is specified below. For probe needles in the same probe needle row, the included angle of the probe needle is different. For example, for the second probe needle row, the subtractive angle [theta] ₁ of the probe needle 12-3 is smaller than the subtractive angle [theta] ₂ of the probe needle 12-4, while for the second probe needle row, The subtended angle? ₁ of the needle 12-1 is smaller than the subtended angle? ₂ of the probe needle 12-2. Moreover, for corresponding probe needles of other probe needle rows, the included angles are the same. For example, the inclined angle of the probe needle 12-1 in the first probe needle row and the inclined angle of the probe needle 12-3 in the second probe needle row are? ₁ , and the probe needle 12-2 And the subtended angle of the probe needle 12-4 in the second probe needle row is? ₂ . In Fig. 1B, the included angles for each probe needle are the same, but the length of the contact portion of each probe needle is different.

The present invention provides a probe needle module. The probe needle module has a structure of at least one probe needle row. A plurality of groups of probe needles are disposed in each probe needle row and each of the probe needle groups has a plurality of probe needles. Electrical tests on the chip can be performed with a distribution of electrical nodes of high density and small pitch through an angular difference configuration between the angles of inclination of the probe needles with the same length of the contact portions of neighboring probe needle groups in each probe needle row .

The probe needle module is configured to transmit a test signal of the tester to a device under test (DUT) to perform an electrical test. The tester is on the upper side. The DUT is on the lower side. The probe needle module includes a substrate, a holder, and at least one probe needle row. The holder is disposed on the substrate. The probe needle rows are aligned along the first direction. Each of the probe needle rows has a plurality of probe needle groups along a second direction. Each of the probe needle groups includes a plurality of probe needles. Each probe needle has a contact portion and a cantilever portion. One end of the cantilever portion is connected to the substrate, while the other end of the cantilever portion is connected to the contact portion. There is an angle of inclination between the contact portion and the cantilever portion. The cantilevered portion of each of the probe needles of the probe needle rows is disposed in the holder and forms a plurality of needle layers from the lower side to the upper side. The probe needles form at least two subsets. Each of the subsets includes at least two probe needles each disposed on at least two needle layers. The length of the contact portion of the probe needle of the same needle layer is the same. The error range of the contact portion having the same length is 0 or more and 1 mil or less. The lengths of the contact portions of the probe needles of the other needle layers are different. The subtended angles of the probe needles of different subsets in the same needle layer are different. At least two probe needles of each of the two subsets are disposed in at least two of the same needle layers.

An aspect of the present invention provides a probe needle module. The probe needle module is configured to transmit a test signal of the tester to a device under test (DUT) to perform an electrical test. The tester is on the upper side. The DUT is on the lower side. The probe includes a substrate, a holder, and at least one probe needle row. The holder is disposed on the substrate. The probe needle rows are aligned along the first direction. Each of the probe needle rows has a plurality of probe needle groups along a second direction. Each of the probe needle groups includes a plurality of probe needles. Each of the probe needles has a contact portion and a cantilever portion. One end of the cantilever portion is connected to the substrate, while the other end of the cantilever portion is connected to the contact portion. There is an angle of inclination between the contact portion and the cantilever portion. The cantilevered portions of the probe needles of each of the probe needle rows are disposed in the holder and form a plurality of needle layers from the lower side to the upper side. The probe needles form at least two subsets. Each subset includes at least four probe needles disposed on at least four needle layers, respectively. The four probe needles of at least four probe needle layers are arranged in a first needle layer, a second needle layer, a third needle layer, and a fourth needle layer, which are short to long in accordance with the length of the contact portion of the probe needle . The length of the contact portion of the probe needle of the same needle layer is the same. The error range of the contact portion of the same length is 0 mil or more and 1 mil or less. The lengths of the contact portions of the probe needles of the other needle layers are different. The probe needles in each of the subsets are sequentially arranged in a first needle layer, a third needle layer, a second needle layer, and a fourth needle layer. At least four probe needles in each of at least two subsets are disposed in four identical needle layers. The subtended angles of the probe needles of the other subset in the same needle layer are different.

It is to be understood that both the foregoing general description and the following detailed description are exemplary and are intended to provide further explanation of the invention as claimed in the appended claims.

Are included in the scope of the present invention.

BRIEF DESCRIPTION OF THE DRAWINGS The accompanying drawings are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification. The drawings illustrate embodiments of the invention and, together with the description, serve to explain the principles of the invention.
In the drawings,
FIGS. 1A and 1B are views showing multi-layer probe needle structures of a conventional probe needle module, respectively.
2 is a side view and a partial cross-sectional view of a probe needle module according to an embodiment of the present invention.
FIG. 3A is a three-dimensional view showing an enlarged view of a partial region in FIG.
FIG. 3B is a plan view of a contact portion of each probe needle shown in FIG. 3A.
3C is a cross-sectional view of four probe needle groups 210-240 in the holder direction X shown in FIG.
FIG. 3D is a view showing the length error of the contact portion of the probe needle.
3E is a side view of the group of probe needles in Fig. 3A in a second direction Y. Fig.
Figure 3f is a side view of the two probe needle groups of Figure 3a in a second direction (Y).
3G is a diagram illustrating the offset relationship of neighboring probe needle rows.
4A is a view showing a probe needle module according to another embodiment of the present invention.
Fig. 4B is a cross-sectional view of each probe needle group in the holder direction X shown in Fig. 4A. Fig.
5A is a view showing a probe needle module according to another embodiment of the present invention.
FIG. 5B is a cross-sectional view of each probe needle group in the holder direction X shown in FIG. 5A.
6 is a view showing a layout of a probe needle module according to another embodiment of the present invention.

Reference will now be made in detail to embodiments of the invention, examples of which are illustrated in the accompanying drawings. Wherever possible, the same reference numbers will be used throughout the drawings and description to refer to the same or like parts.

See FIG. 2 is a side view and a partial cross-sectional view of a probe needle module according to an embodiment of the present invention. The probe needle module 2 is configured to transmit a test signal of the tester 4 (such as chip 9 shown in Figure 2) to a device under test (DUT) to perform an electrical test. In the following description for this embodiment, the direction in which the tester unit 4 is located is the upper side 95 and the direction in which the DUT is located is the lower side 96, as defined for the third direction Z. [ to be. The probe needle module includes a substrate 20 and a plurality of probe needle rows 21-24. The substrate 20 has a through hole 200. The through hole 200 has an edge 201. The substrate 20 has an outer structure 202. Four probe needle rows 21-24 are disposed in the outer structure 202 of the substrate 20 and the edge 201 of the through hole 200, respectively. In the present embodiment, to reinforce the probe needle rows 21-24, the substrate 20 further includes a holder 26, which provides a support for the probe needle rows 21-24. Moreover, the ends of the probe needles behind the illustrated holder 26 are soldered according to the electrical node layout of the substrate 20 and need not necessarily be arranged in a manner consistent with that shown in Fig. Thus, the position of the end of the probe needle connected to the substrate 20 is determined according to actual needs and is not limited to the embodiment shown in Fig.

Please refer to FIG. FIG. 3A is a three-dimensional view showing an enlarged view of the partial area 3 in FIG. The probe needles of the probe needles 21-24 are in electrical contact with the electrical nodes 90 of the chip 9 to test the electrical characteristics of the chip 9. [ For electrical nodes in the same row, the pitch between neighboring electrical nodes 90 is less than 40 占 퐉. In the illustrated embodiment of the invention, the chip is not limited to an integrated circuit (LCD driver IC) of a liquid crystal display driver. A plurality of probe needle rows 21-24 extend from the first side 91 of the chip 9 to the second side 92 of the chip 9 in a sequential manner along the first direction X Respectively. Each of the probe needle rows 21-24 has a plurality of groups of probe needles in a second direction Y and groups of probe needles extend from the third surface 93 of the second direction 9 toward the fourth face 94 of the second housing. For example, the probe needle row 21 has a plurality of probe needle groups 210 along the second direction Y, and the probe needle row 22 has a plurality of probe needle groups along the second direction Y, The probe needle row 23 has a plurality of probe needle groups 230 along the second direction Y and the probe needle row 24 has a plurality of probe needle rows 24 along the second direction Y, There are probe needle groups 240.

Each of the probe needle groups 210, 220, 230, and 240 has a plurality of probe needles. The probe needles of each of the probe needle groups 210, 220, 230, and 240 are grouped into at least two subsets, such as 210a and 210b, 220a and 220b, 230a and 230b, 240a and 240b in this embodiment. Each subset has at least two probe needles. In the present embodiment, two probe needles, for example, for the first probe needle row 21, the subset 210a is the probe needles 25a and 25b, and the subset 210b is the probe needle 25a 'And 25b'. For the second probe needle row 22, the subset 220a has probe needles 25c and 25d and the subset 220b has probe needles 25c 'and 25d'. For the third probe needle row 23, the subset 230a has probe needles 25e and 25f, and the subset 230b has probe needles 25e 'and 25f'. For the fourth probe needle row 24, the subset 240a has probe needles 25g and 25h and the subset 240b has probe needles 25g 'and 25h'. Each probe needle (e.g., probe needle 25a) has a contact portion 250 and a cantilever portion 251. One end of the cantilever portion 251 is connected to the substrate 20 while the other end of the cantilever portion 251 extends toward the through hole 200 and is connected to the contact portion 250. There is an angle? Between the contact portion 250 and the cantilever portion 251. [ The inclined angle? Is defined as a subtended angle? Between the center line of the contact portion 250 and the center line of the cantilever portion 251.

See FIG. The cantilevered portion of each of the probe needles of the probe needle rows is disposed in the holder 26 and forms a plurality of needle layers from the lower side 26 to the upper side 95. The angles of subtraction of the probe needles of different subsets in the same needle layer are different. For each subset, the lengths of the contacts of the probe needles of the same corresponding needle layers are the same, and the lengths of the contacts of the probe needles of the other needle layers are different. Taking FIG. 3A and FIG. 3B as an example, each subset 210a and 210b, 220a and 220b, 230a and 230b, 240a and 240b has two needle layers. For example, in the subset 210a of the first probe needle group 210, the probe needle 25a belongs to the probe needle of the first needle layer and the probe needle 25b belongs to the probe needle of the second needle layer . In the subset 210b of the probe needle group 210, the probe needle 25a 'belongs to the probe needle of the first layer and the probe needle 25b' belongs to the probe needle of the second layer. Other probes can be analyzed with this concept. Probe needles 25a and 25a 'or 25b and 25b' of the same needle layer have contact segments 250 of equal length.

3A, 3B and 3C. FIG. 3B is a plan view of a contact portion of each probe needle shown in FIG. 3A. 3C is a cross-sectional view of four probe needle groups 210-240 in the direction X of the holder 26 shown in FIG. In Fig. 3B, the rectangular areas indicate the positions of the contact portions of the probe needles and are used to describe the relationship between the probe needles. The subset 210a of each probe needle group 210 of the first probe needle row 21 is connected to the probe needle 25a of the first needle layer by way of the first probe needle row 21, And a probe needle 25b of a second needle layer. The neighboring subset 210b has a probe needle 25a 'of the first needle layer and a probe needle 25b' of the second needle layer. The probe needles 25a and 25a 'belonging to the first needle layer have contact portions 250 of the same length. The probe needles 25b and 25b 'belonging to the second needle layer also have contact portions 250 of the same length. At least two probe needles of each of the two subsets in each probe needle row are disposed on at least two of the same needle layers.

A level difference may be allowed when describing something of the same length in the illustrated embodiment of the invention. For example, as shown in FIG. 3D, there is a level difference? D between the contact portions 250 of the probe needles 25a and 25a 'of the first needle layer. The absolute value of the level difference [Delta] d is greater than 0 and less than 1 mil (mil is 1/1000 of an inch). 3A and 3B, on the other hand. In this embodiment, the contact portions 250 of the probe needles 25b and 25b 'of the second needle layer are each longer than the contact portions 250 of the probe needles 25a and 25a' of the first needle layer.

Probe needle rows 22-24 also include subset units 220a and 220b sequentially arranged from the third side 93 toward the fourth side 94 in a second direction Y, ) And (240a and 240b). The contact portions 250 of the probe needles used by the sub-set of needle layers in the corresponding probe needle groups of neighboring probe needle rows are of different lengths. More specifically, as shown in FIG. 3C, the needle layers used by the two neighboring probe needle rows are different. A subset 220a of each probe needle group 220 of the second probe needle row 22 similar to the setup of each of the probe tips of the first probe-needle row described above is connected to the probe needle 25c of the first needle layer, And the probe needle 25d 'of the second needle layer, while the neighboring subset 220b includes the probe needle 25c' of the first needle layer and the probe needle 25d 'of the second needle layer. The subset 230a of each probe needle group 230 of the third probe needle row 23 includes the probe needle 25e of the first needle layer and the probe needle 25f of the second needle layer, The set 230b has a probe needle 25e 'of the first needle layer and a probe needle 25f' of the second needle layer. The subset 240a of each probe needle group 240 of the fourth probe needle row 24 includes the probe needles 25g of the first needle layer and the probe needles 25h of the second needle layer, The set 240b includes a probe needle 25g 'of the first needle layer and a probe needle 25h' of the second needle layer. For the probe needle group 220, the probe needles 25c and 25c 'of the first needle layer have contact portions 250 of the same length. For the probe needle group 230, the probe needles 25e and 25e 'of the first needle layer have contact portions 250 of the same length. For the probe needle group 240, the probe needles 25g and 25g 'of the first needle layer have contact portions 250 of the same length. The probe needles belong to the first needle layer in the subset. It is particularly noteworthy that the first needle layer of each of the probe needle groups 220,230, 240 is another needle layer. On the other hand, the probe needles 25d and 25d 'of the second needle layer of the probe needle group 220, the probe needles 25f and 25f' of the second needle layer of the probe needle group 230, The probe needles 25h and 25h 'of the second needle layer of the first needle layer 240 each have the contact portion 250 of the same length. The probe needle belongs to the second needle layer in the subset. It is particularly noteworthy that the second needle layer of each of the probe needle groups 220,230, 240 is another needle layer.

Furthermore, for each subset in this embodiment, the probe needles 25b and 25b 'of the second needle layer, the probe needles 25d and 25d', the probe needles 25f and 25f ', and the probe needles 25h and 25d' The length of the contact portion 250 of the first needle layer 25a and the probe needle 25h and the probe needle 25g and 25g 'of the first needle layer, the probe needles 25c and 25c', the probe needles 25e and 25e ' ') Of the contact portion 250, respectively. This relationship can be further expressed as:

L _25a = L _{25a '} < L _25b = L _25b' ;

L _25c = L _{25c '} < L _25d = L _25d' ;

_L25e = _{L25e '} < _L25f = _L25f' ;

L _25g = L _{25g '} < L _25h = L _25h' .

The expression may also indicate that the included angle of the probe needle in the same needle layer of neighboring subsets of each of the probe needle groups in the same probe needle row gradually increases along the second direction (Y).

The mark "L" indicates the length of the contact portion 250, and the number of the lower right corner corresponds to the number of probe needles as shown in Fig. 3B. See Figures 3c and 3b. The relationship between the lengths of the contacts 250 of each probe needle can be expressed as:

L _25a = L _{25a '} <L _25b = L _25b' < _25c = L _{25c '} <L _25d = L _25d' <L _25e = L _{25e '} <L _25f = L _25f' <L _25g = L _{25g '} <L _25h = L _25h' .

In the illustrated embodiment, the probe needles of each of the probe needle groups 210, 220, 230, 240 of the probe needle rows 21-24 are corresponding and are not offset in the first direction X and the second direction Y, do.

The features of the subtended angle of the present invention will be described below. The included angle feature of the probe needle contact 250 and the cantilever portion 251 in the layout of the present invention is such that for adjacent probe needle groups of each of the probe needle rows 21-24 in the second direction Y, The angles of inclination of the probe needles of the same needle layer in the set have an angular difference, which means that the angles of inclination of the angle of inclination of the probe needles with the same length of contact are different. In an embodiment, the absolute value of this angular difference is greater than 2 degrees. For example, in the first probe needle row 21 of FIG. 3, the inclined angle of the probe needle 25a 'of the first needle layer is greater than the inclined angle of the probe needle 25a of the first needle layer, The inclined angle of the probe needle 25b 'of the second needle layer is larger than the inclined angle of the probe needle 25b of the second needle layer. Similarly, the same rules apply to the fourth probe needle row in the second probe needle row. In summary, the relationship of the included angles of the probe needles can be expressed as:

θ _{25 a '} ≥ θ _25a + 2 °; θ _{25 b '} ≥ θ _25b + 2 °.

Moreover, for the same subset, the included angle of the probe needle of the second needle layer is greater than the included angle of the probe needle of the first needle layer. For example, for a subset (210a), the second included angle of the probe needle (25b) of the needle layer is greater than the included angle of the probe needle (25a) of the first needle layer, the relationship between the included angle of the probe needle is θ _25b> θ _25a . &_Lt; / RTI &gt;

Furthermore, in each of the probe needle groups of the same probe needle row, the probe needle having the largest inclined angle in the needle layer near the lower side and the probe needle having the smallest inclined angle in the needle layer near the upper side in the neighboring needle layer , The absolute value of the angular difference between the largest inclined angle and the smallest inclined angle is more than 1 degree. 3E illustrates a side view of probe needle group 210 in FIG. 3A in a second direction Y, with two subsets 210a and 210b of probe needle group 210 as an example, as shown in FIG. 3E. Fig. In Figure 3E, the centerline of the probe needle represents each probe needle in the probe needle group 210. See also Figures 3C and 3E. In the probe needle group 210, two neighboring subsets 210a and 210b use two neighboring needle layers (first needle layer and second needle layer) together. The first needle layer of the probe needle group 210 is a needle layer close to the lower side 96. The second needle layer of the probe needle group 210 is a needle layer close to the top side 95. The probe needles between two neighboring subsets 210a and 210b are probe needles 25b of subset 210a and probe needles 25a 'of subset 210b. The probe needle 25a 'has the largest inclined angle of the first needle layer of the probe needle group 210 and the probe needle 25b has the smallest inclined angle of the second needle layer of the probe needle group 210. [ There is an angle difference between the probe needles 25a 'and 25b. In one embodiment, the absolute value of this angular difference is 1 degree or more, the relationship between the included angle of the probe needles may be expressed as _{θ 25b ≥ θ 25 a '+} 1 °.

In summary, the relationship between the included angle of the probe needle group 210 of the probe needle row 21 can be expressed as _{θ 25 b '> θ 25b>} θ 25 a'> θ 25a. Likewise, the same rule applies to each of the probe needle groups 220-240 of probe needle rows 22-24.

Furthermore, for the corresponding probe needle groups of the other probe needle rows, the needle layers used in the neighboring probe needle rows are different, which means that the length of the contact portion differs in magnitude from the subtended angle. Referring to Figs. 2, 3A, and 3C, the arrangement of the needle layers using the probe needle rows as a unit will be described. Generally, the needle layer of the probe needle row 24 is higher than the needle layer of the probe needle row 23. For the direction from the lower side 96 to the upper side 95, the order is the probe needle rows 21, 22, 23, 24. The upper needle layer and the lower needle layer, which are adjacent to each other and correspond to the two neighboring probe needle rows 21 and 22, 22 and 23, or 23 and 24, and the probe needle having the largest subtracted angle in the lower needle layer, For the smallest probe needle with a subtracted angle, the absolute value of the angular difference between the largest subtracted angle and the smallest subtracted angle is one degree or more. As shown in Figure 3F, for example, for probe needle rows 21 and 22, for the corresponding probe needle groups 210-220 of the other probe needle rows, probe needle group 210 (probe needle 25a And a second needle layer (in which the probe needles 25b and 25b 'are disposed) and the probe needle group 220 (in which the probe needles 25c and 25c' are disposed) ) And a second needle layer (in which the probe needles 25d and 25d 'are disposed). As described above, for the upper needle layer and the lower needle layer adjacent to each other of the two neighboring probe needle rows 21 and 22, the upper needle layer corresponds to the first needle layer of the probe needle group 220 The lower needle layer corresponds to the second needle layer of the probe needle group 210. There is an angle difference between the probe needle 25c having the smallest inclined angle in the upper needle layer and the probe needle 25b 'having the largest inclined angle in the lower needle layer. In one embodiment, the absolute value of such angular difference of the subtracted angle is greater than or equal to one degree.

In summary, the relationship of the included angles of the probe needles can be expressed as θ _25c ≥ θ _{25 b '} + 1 °. Likewise, the same rules apply to the probe needle group 220-230 or 230-240.

The embodiments are embodiments in which the probe needles are aligned and aligned with each other without offset. Moreover, as shown in FIG. 3G, for the probe needle rows of the other rows in this embodiment, the probe needles of the probe needle groups have a pitch in the Y direction, and neighbor probe needle rows are offset from each other. For example, in the first probe needle row 21 and the second probe needle row 22, the probe needles 25a and 25c of the probe needle groups 210a and 220a are arranged in a pitch D, so that the first probe needle row 21 and the second probe needle row 22 are offset from each other. Only two probe needle rows 21 and 22 are shown in Figure 3g, but the invention is not so limited. For example, the alignment of the four probe needle rows as shown in Fig. 3B may also be arranged in a manner as shown in Fig. 3G.

In summary, the probe needle module may have at least three probe needle rows, while a subset of each probe needle group may be placed in each of the two neighbor needle layers with two probe needles. Alternatively, a subset of each probe needle group may be placed in each of the three neighboring needle layers, with three probe needles (see another embodiment as shown in Figs. 4A and 4B). Other setups may be used depending on actual needs. All features of the probe needle module having at least three probe needle rows are judged by the technical features or the above mentioned rules.

4A and 4B. 4A is a view showing a probe needle module according to another embodiment of the present invention. As shown in Fig. 4A, the rectangular areas indicate the positions of the contact portions of the probe needles and are used to describe the relationship between the probe needles. 4B is a cross-sectional view of each probe needle group in the direction X of the holder 26 shown in FIG. A total of three probe needle rows 21a, 22a and 23a are used in this embodiment. Each probe needle row 21a, 22a, 23a has a plurality of probe needle groups 211-231. Each probe needle group 211-213 has two subsets, which are 211a and 211b, 221a and 221b, 231a and 231b, respectively. In this embodiment, each subset has three probe needles each disposed in three neighboring needle layers. The subset 211a of the probe needle groups 211 of the first probe needle row 21a is connected to the probe needle 25i of the first needle layer, the probe needle 25j of the second needle layer, And a needle 25k. The neighboring subset 211b includes a probe needle 25i 'of a first needle layer, a probe needle 25j' of a second needle layer, and a probe needle 25k 'of a third needle layer. The contact portions of the probe needles 25i and 25i 'of the first needle layer of the probe needle group 211 are the same length. The contact portions of the probe needles 25j and 25j 'of the second needle layer of the probe needle group 211 are also the same length. The contact portions of the probe needles 25k and 25k 'of the third needle layer of the probe needle group 211 are also the same length. In addition, in this embodiment, the contact portions of the probe needles 25j and 25j 'of the second needle layer of the probe needle group 211 are connected to the probe needles 25i and 25i' of the first needle layer of the probe needle group 211, Respectively. The contact portions of the probe needles 25k and 25k 'of the third needle layer of the probe needle group 211 are shorter than the contact portions of the probe needles 25j and 25j' of the second needle layer of the probe needle group 211 long. The first probe needle rows 21a are arranged in a sequence from the third surface 93 to the fourth surface 94 in the second direction Y to form the probe needles 211 in the subset 211a and 211b ) Units.

A subset 221a of probe needle groups 221 of the second probe needle row 22a similar to the setup of each of the probe needles of the first probe needle row 21a as described above, The probe needle 251 of the second needle layer and the probe needle 25n of the third needle layer while the neighboring subset 221b comprises the probe needle 251 'of the first needle layer, A probe needle 25m 'of a second needle layer, and a probe needle 25n' of a third needle layer. The subset 231a of the probe needle group 231 of the third probe needle row 23a is formed by the probe needle 25o of the first needle layer, the probe needle 25p of the second needle layer, While the neighboring subset 231b includes a probe needle 25o 'of the first needle layer, a probe needle 25p' of the second needle layer, and a probe needle 25p 'of the third needle layer 25q '. The probe needles 251 and 251 'of the first needle layer of the probe needle group 221 have the same length of contacts. The probe needles 25o and 25o 'of the first needle layer of the probe needle group 231 have contact portions of the same length. The probe needles 25m, 25m 'of the second needle layer of the probe needle group 221 have contact portions of the same length. The probe needles 25p and 25p 'of the second needle layer of the probe needle group 231 have contact portions of the same length. The probe needles 25n and 25n 'of the third needle layer of the probe needle group 221 have contact portions of the same length. The probe needles 25q and 25q 'of the third needle layer of the probe needle group 231 have contact portions of the same length.

The length order of the contact portions with respect to the probe needles in each of the needle layers of the probe needle group 221 is set such that the length of the contact portion of the third needle layer of the probe needle group 221 with respect to the probe needles 25n and 25n ' 25m 'of the second needle layer of the probe group 221 is longer than the length of the contact portion of the second needle layer of the probe needle 221 with respect to the probe needles 25m and 25m' Is longer than the length of the contact portion of the first needle layer with respect to the probe needles 25l, 25l '. The length order of the contact portions with respect to the probe needles in each of the needle layers of the probe needle group 231 is set such that the length of the contact portion of the third needle layer of the probe needle group 231 with respect to the probe needles 25q and 25q ' (25p, 25p ') of the second needle layer of the second needle layer of the probe group 231 is longer than the length of the contact portion of the second needle layer of the probe needle 231 with respect to the probe needles 25p, 25p' Is longer than the length of the contact portion of the first needle layer with respect to the probe needle (25o, 25o '). The length of the contact portion of the probe needle is increased in the first direction X from the first surface 91 toward the second surface 92. [ The length of the contact portion of the probe needle is increased from the third surface 93 toward the fourth surface 94 in the second direction Y. [ Furthermore, for the probe needle rows 22a-23a, the subsets 221a and 221b and 231a and 231b are arranged in the second direction Y from the third surface 93 toward the fourth surface 94, Respectively. In the illustrated embodiment, the probe needles of the probe needle rows 21a-23a are corresponding and aligned with one another in the first direction X and the second direction Y without offset.

In summary, the relationship between the lengths of the contacts of each probe needle, as shown in Figures 4A and 4B, can be expressed as:

L _25i = L _{25i '} <L _25j = L _25j' <L _25k = L _{25k '}

L _25l = L _{25l '} < L _25m = L _25m'< L _25n = L _{25n '}

L _25o = L _{25o '} < L _25p = L _25p'< L _25q = L _25q .

The representation may also indicate that the subtended angle of the probe needle in the same needle layer of neighboring subsets of each of the probe needle groups in the same probe needle row gradually increases along the second direction Y. [ The mark "L" indicates the length of the contact portion 250, and the number of the lower right corner corresponds to the number of probe needles as shown in Fig. 4A.

Furthermore, in other probe needle rows, for the probe needle group, the needle layers used in neighboring probe needle rows are different, which means that the length of the contact portion is different from the included angle. Referring to Figures 4A and 4B, the arrangement of the needle layers using the probe needle rows as a unit is described. Generally, the needle layer of the probe needle row 23a is higher than the needle layer of the probe needle row 22a. For the direction from the lower side 96 to the upper side 95, the order is the probe needle rows 21a, 22a, 23a.

In summary, the relationship between the lengths of the contacts for each probe needle, as shown in Figures 4A and 4B, can be expressed as: &lt; RTI ID = 0.0 &gt;

_{L 25i = L 25i '<L} 25j = L 25j'<L 25k = L 25k <L 25l = L 25l '<L 25m = L 25m'<L 25n = L 25n <L 25o = L 25o '<L 25p = L _{25p '} < L _25q = L _25q .

The features of the subtended angle of this embodiment will be described below. The absolute value of the angular difference between the angles of inclination of the two probe needles of the same needle layer for neighboring subsets in each probe needle group of the same needle row is greater than 2 degrees. 4A and 4B, when the probe needle group 211 of the probe needle row 21a is taken as an example, the inclined angle of the probe needle 25i 'is larger than the inclined angle of the probe needle 25i, The car is more than 2 degrees. The inclined angle of the probe needle 25j 'is larger than the inclined angle of the probe needle 25j, and the angle difference of the inclined angle is more than 2 degrees. The inclined angle of the probe needle 25k 'is larger than the inclined angle of the probe needle 25k, and the angle difference of the inclined angle is more than 2 degrees. The same rule applies to the angular relationship of the needle layers of probe needle rows 22a and 23a. In summary, the relationship between the included angles of the probe needles can be expressed as:

θ _{25 i '} ≥ θ _25i + 2 °; θ _{25 j '} ≥ θ _25j + 2 °; θ _{25 k '} ≥ θ _25k + 2 °.

Moreover, for the same subset, the included angle of the probe needle in the third needle layer is greater than the included angle of the probe needle in the second needle layer. The inclined angle of the probe needle in the second needle layer is larger than the inclined angle of the probe needle in the first needle layer. For example, with respect to the subset 211a, the inclined angle of the probe needle 25k in the third needle layer is larger than the inclined angle of the probe needle 25j in the second needle layer, and the inclined angle of the probe needle 25j in the second needle layer Is larger than the inclined angle of the probe needle 25i in the first needle layer. The relationship between the included angles of the probe needles can be expressed as:

θ _25k > θ _25j > θ _25i .

Furthermore, for the probe needles having the largest subtractive angles in the needle layer nearest to the lower side and the smallest subtractive angle in the needle layers near the upper side in the neighboring needle layers of the probe needle groups in the same probe needle row, The absolute value of the angular difference between the subtended angle and the smallest subtended angle is more than 1 degree. Taking two subsets 211a and 211b of the probe needle group 211 as an example, two neighboring subsets 211a and 211b of the probe needle group 211, as shown in Figures 4a and 4b, Three neighboring needle layers (first needle layer, second needle layer, and third needle layer) are used together. The first needle layer of the probe needle group 211 is a needle layer close to the lower side. The third needle layer of the probe needle group 211 is a needle layer close to the top side (the definition of the top side and bottom side of this embodiment is the same as the top side 95 and bottom side 96 shown in Fig. 2) . The second needle layer of the probe needle group 211 is between the first needle layer and the third needle layer of the probe needle group 211. The two needle layers of the probe needle group 211 (the first needle layer is adjacent to the second needle layer and the second needle layer is adjacent to the third needle layer) and the probe needle group 211 The first needle layer and the second needle layer of the probe needle group 211 are arranged such that the probe needle 25i 'having the largest inclined angle in the first needle layer of the probe needle group 211 and the second needle layer of the probe needle group 211 There is an angle difference between the probe needles 25j having the smallest subtractive angle. In one embodiment, the absolute value of this angular difference is greater than or equal to one degree. For example, in the second needle layer and the third needle layer, the angle formed by the third needle layer of the probe needle group 211 and the probe needle 25j 'having the largest inclined angle in the second needle layer of the probe needle group 211 There is an angle difference between the smallest probe needles 25k. In one embodiment, the absolute value of this angular difference is greater than or equal to one degree. In summary, the relationship between the included angles of the probe needles can be expressed as:

θ _25j ≥ θ _{25 i '} + 1 °; θ _25k ≥ θ _{25 j '} + 1 °.

Trick between the included angle of the probe needles of the probe needle group 211 of the probe needle row (21a) is _{θ 25 k '> θ 25k>} θ 25 j'> θ 25j> θ 25 i '> can be expressed by θ _25i . Likewise, the same rule applies to each of the probe needle groups 221-231 of probe needle rows 22a-23a. Relationship between the included angle of the probe needles of the probe needle group 221 of the probe needle line (22a) may be expressed as _{θ 25 n '> θ 25n>} θ 25 m'> θ 25m> θ 25 l '> θ 25l . Relationship between the included angle of the probe needles of the probe needle group 231 of the probe needle line (23a) may be expressed as _{θ 25 q '> θ 25q>} θ 25 p'> θ 25p> θ 25 o '> θ 25o .

Moreover, the needle layers used by the two neighboring probe needle rows 21a and 22a, or 22a and 23a are different. With respect to the probe needle having the smallest inclined angle in the upper needle layer and the upper needle layer and the upper needle layer having the largest inclined angle in the lower needle layer and the probe needle corresponding to the two adjacent probe needle rows, The absolute value of the angular difference between the subtended angle and the smallest subtended angle is more than 1 degree. As shown in Figs. 4A and 4B, the corresponding probe needle groups 211-221 of the other probe needle rows, the upper needle layer adjacent to each other of two adjacent probe needle rows 21a and 21b, For the needle layer, the upper needle layer corresponds to the first needle layer of the probe needle group 221 and the lower needle layer corresponds to the third needle layer of the probe needle group 211. There is an angular difference between the probe needle 251 having the smallest inclined angle in the upper needle layer and the probe needle 25k 'having the largest inclined angle in the lower needle layer. In one embodiment, the absolute value of such angular difference of the subtracted angle is one or more.

In summary, the relationship between the _inclination angles of the probe needles can be expressed as θ _25l ≥ θ _{25 k '} + 1 °. Similarly, the same rules apply to the probe needle group 221-231, and the relationship between the included angles of the probe needles can be expressed as θ _25o ≥ θ _{25 n '} + 1 °.

The illustrated probe needles shown in FIG. 4A are aligned with each other without an offset, but in another embodiment, may be similar to the embodiment shown in FIG. 3G as described above. A pitch between the probe needles can be arranged between the probe needles in the second direction Y so that the pitch of the probe needle rows is offset.

5A and 5B. 5A is a view showing a probe needle module according to another embodiment of the present invention. The rectangular area shown in FIG. 5A represents the position of the contact portion of the probe needles and is used to describe the relationship between the probe needles. 5B is a cross-sectional view of each group of probe needles in the direction X of the holder 26 shown in Fig. 5A. A total of two probe needle rows 21b and 22b are used in this embodiment. Each probe needle row 21b and 22b has a plurality of probe needle groups 212-222. Each probe needle group 212-222 has two subsets 212a-212b and 222a-222b. In this embodiment, each subset has four probe needles each disposed in four neighboring needle layers. The four probe needle layers are arranged in order from the shortest to the longest in accordance with the length of the contact portion of the probe needle, in the order of the first needle layer, the second needle layer, the third needle layer and the fourth needle layer. Probe needles of the same needle layer have the same length of contacts. The length of the contact portion of the probe needle of the other needle layer is different. Each subset of probe needles is sequentially arranged with a first needle layer, a third needle layer, a second needle layer, and a fourth needle layer.

As shown in Figs. 5A and 5B, the first probe needle row 21b is used to describe this relationship between the contact and the needle layer. The probe needle 25r of the first needle layer, the probe needle 25s of the third needle layer, the probe needle 25t of the second needle layer and the probe needle 25u of the fourth needle layer are connected to the first probe needle row 21b in the subset 212a. The probe needle 25r 'of the first needle layer, the probe needle 25s' of the third needle layer, the probe needle 25t 'of the second needle layer, and the probe needle 25u' Subset 212b. Each subset 212a or 212b in a sequential arrangement mode of probe needles and needle layers from a third surface 93 to a fourth surface 94 in a second direction Y with respect to the first probe needle row 21b, Are the same as those of the probe needle 25r (25r ') of the first needle layer, the probe needle 25s (25s') of the third needle layer, the probe needle 25t (25t') of the second needle layer, Needle 25u (25u '). The probe needles 25r and 25r 'of the first needle layer have the same length of contact. The probe needles 25s and 25s' of the third needle layer have the same length of contact. The probe needles 25t and 25t 'of the second needle layer have the same length of contact. The probe needles 25u and 25u 'of the fourth needle layer have the same length of contact. In this embodiment, the contact portions of the probe needles 25t and 25t 'of the second needle layer of the probe needle group 212 are connected to the contact portions of the probe needles 25r and 25r' of the first needle layer of the probe needle group 212 Respectively. The contact portions of the probe needles 25s and 25s 'of the third needle layer of the probe needle group 212 are longer than the contact portions of the probe needles 25t and 25t' of the second needle layer of the probe needle group 212 long. The contact portions of the probe needles 25u and 25u 'of the fourth needle layer of the probe needle group 212 are longer than the contact portions of the probe needles 25s and 25s' of the third needle layer of the probe needle group 212 long. Likewise, the same rule is applied to the probe needle group 222. Moreover, in this embodiment, the relationship of the lengths of the contacts of each subset is: the length of the contact portion of the probe needle increases from the first face 91 to the second face 92 in the first direction X. [

A subset 222a of second probe needle rows 22b similar to the setup of each of the probe needles of the first probe needle row 21b as described above is connected to the probe needle 25v of the first needle layer, The probe needle 25w of the second needle layer and the probe needle 25y of the fourth needle layer while the neighboring subset 222b comprises the probe needle 25b of the first needle layer 25v 'of the second needle layer, a probe needle 25w' of the third needle layer, a probe needle 25x 'of the second needle layer, and a probe needle 25y' of the fourth needle layer. The probe needles 25v and 25v 'of the first needle layer of the probe needle group 222 have the same length of the contact portion. The probe needles 25w and 25w 'of the third needle layer of the probe needle group 222 have the same length of contact. The probe needles 25x and 25x 'of the second needle layer of the probe needle group 222 have the same length of the contact. The probe needles 25y and 25y 'of the fourth needle layer of the probe needle group 222 have the same length of the contact portion.

The order of the length of the contact portions of the probe needles of each of the needle layers of the probe needle group 222 is such that the length of the contact portion of the probe needles 25y and 25y 'of the fourth needle layer of the probe needle group 222, And the length of the contact portion of the probe needles 25w and 25w 'of the third needle layer is longer than the length of the contact portions of the probe needles 25w and 25w' of the third needle layer of the probe needle group 222, Is longer than the length of the contact portion of the probe needle (25x, 25x ') of the second needle layer. The length of the contact portion of the probe needle 25x, 25x 'of the second needle layer is longer than the length of the contact portion of the probe needle 25v, 25v' of the first needle layer of the probe needle group 222. [ The length of the contact portion of the probe needle increases from the first surface 91 to the second surface 92 in the first direction X. [ The sequential arrangement mode of the probe needle and the needle layer from the third surface 93 to the fourth surface 94 in the second direction Y is defined as follows: the probe needle 25v (25v ') of the first needle layer, The probe needle 25w (25w '), the probe needle 25x (25x') of the second needle layer, and the probe needle 25y (25y ') of the fourth needle layer. Furthermore, for probe needle row 22b, subsets 222a and 222b are grouped into a probe needle group &lt; RTI ID = 0.0 &gt; . In the illustrated embodiment, the probe needles of the probe needle rows 21b-22b are corresponding and aligned with one another in the first direction X and the second direction Y without offset.

In summary, the relationship between the lengths of the contacts for the probe needles as shown in Figures 5A and 5B can be expressed as: &lt; RTI ID = 0.0 &gt;

L _25r = L _{25r '} < L _25t = L _25t'< L _25s = L _{25s '} < L _25u = L _25u' ;

L _25v = L _{25v '} <L _25x = L _25x' <L _25w = L _{25w '} <L _25y = L _25y' .

The representation may also indicate that the subtended angle of the probe needle in the same needle layer of neighboring subsets of each of the probe needle groups in the same probe needle row gradually increases along the second direction Y. [ The mark "L" indicates the length of the contact portion 250, and the number of the lower right corner corresponds to the number of the probe needles as shown in Figs. 5A and 5B.

Moreover, for the corresponding groups of probe needles in the other probe needle rows, the needle layers used by the neighbor probe needle rows are different, which means that the size of the included angle and the length of the contact are different. Referring to Figures 5A and 5B, the alignment of the needle layer using a probe needle row as a unit is described. Overall, the needle layer of the probe needle row 22b is above the needle layer of the probe needle row 21b. For the lower side 96 to upper side 95 direction, the order is probe needle rows 21b and 22b.

In summary, the relationship between the lengths of the contacts for each probe needle, as shown in Figures 5A and 5B, can be expressed as:

_{L 25r = L 25r '<L} 25t = L 25t'<L 25s = L 25s'<L 25u = L 25u '<L 25v = L 25v'<L 25x = L 25x '<L 25w = L 25w'<L _{25 y} = L _{25 y '} .

Specifically illustrated, the probe needles in each subset of this embodiment are sequentially arranged in a first needle layer, a third needle layer, a second needle layer, and a fourth needle layer. This is because the pitch between the two probe needles can be reduced to achieve the purpose of a sophisticated pitch. Thus, the needle alignment mode is slightly different from other embodiments as illustrated herein.

The features of the subtended angle of this embodiment will be described below. The absolute value of the angular difference between the angles of inclination of the two probes of the same needle layer for the neighboring sheaves in each probe needle group of the same probe needle row is greater than 2 degrees. 5A and 5B, the inclined angle of the probe needle 25r 'is larger than the inclined angle of the probe needle 25r, and the angle difference of the inclined angle is equal to or greater than 2 degrees. The inclined angle of the probe needle 25s' is larger than the inclined angle of the probe needle 25s, and the angle difference of the inclined angle is more than 2 degrees. The inclined angle of the probe needle 25t 'is larger than the inclined angle of the probe needle 25t, and the angle difference of the inclined angle is more than 2 degrees. The inclined angle of the probe needle 25u 'is larger than the inclined angle of the probe needle 25u, and the angle difference of the inclined angle is more than 2 degrees. The same rule applies to the angular relationship of the needle layers of the probe needle row 22b. In summary, the relationship between the included angles of the probe needles can be expressed as: [theta] _{25 r '} &gt; [theta] _25r + 2 [deg.]; θ _{25 s'} ≥ θ _25s + 2 °; θ _{25 t '} ≥ θ _25t + 2 °; θ _{25 u '} ≥ θ _25u + 2 °.

Moreover, for the same subset, the included angle of the probe needle in the fourth needle layer is greater than the included angle of the probe needle in the third needle layer. The included angle of the probe needle in the third needle layer is greater than the included angle of the probe needle in the second needle layer. The included angle of the probe needle in the second needle layer is greater than the included angle of the probe needle in the first needle layer. For example, with respect to the subset 212a, the inclined angle of the probe needle 25u of the fourth needle layer is larger than the inclined angle of the probe needle 25s of the third needle layer, and the inclined angle of the probe needle 25s of the third needle layer Is larger than the inclined angle of the probe needle 25t of the second needle layer and the inclined angle of the probe needle 25t of the second needle layer is larger than the inclined angle of the probe needle 25r of the first needle layer. The relationship between the _inclination angles of the probe needles can be expressed as θ _25u > θ _25s > θ _25t > θ _25r .

The relationship between the inclination angles of the probe needles of the probe needle group 212 of the probe needle row 21b is θ_{25 u '} > θ_25u > θ_{25 s'} > θ_25s > θ_{25 t '} > θ_25t > θ_{25 r '} > θ_25r. &Lt; / RTI &gt; Likewise, the same rules apply to each probe needle group 222 of probe needle row 22b. The relationship between the inclination angles of the probe needles of the probe needle group 222 of the probe needle row 22b is θ_{25 y '} > θ_25y > θ_{25 w '} > θ_25w > θ_{25 x '} > θ_25x > θ_{25 v '} > θ_25v. &Lt; / RTI &gt;

Further, in each of the probe needle groups of the same probe needle row, for the probe needle having the largest subtractive angle in the needle layer nearest to the lower side in the adjacent probe needle layers and the probe needle having the smallest subtractive angle in the needle layer close to the upper side, The absolute value of the angular difference between the large inclined angle and the smallest inclined angle is more than 1 degree. As an example of two subsets 212a and 212b of the probe needle group 212, two neighboring subsets 212a and 212b of the probe needle group 212, as shown in Figures 5a and 5b, (Neighboring needle layers, first needle layer, second needle layer, third needle layer, and fourth needle layer). The first needle layer of the probe needle group 212 is a needle layer close to the lower side. The fourth needle layer of the probe needle group 212 is a needle layer close to the top side (the definition of the top side and the bottom side of the present embodiment is the upper side 95 and the bottom side 96, same). The two needle layers of the probe needle group 212 (the first needle layer is adjacent to the second needle layer, the second needle layer is adjacent to the third needle layer, and the third needle layer is the fourth needle And the first needle layer and the second needle layer of the probe needle group 212 are taken as an example, the probe needle 25r having the greatest inclined angle in the first needle layer of the probe needle group 212 And the probe needle 25t having the smallest inclination angle in the second needle layer of the probe needle group 212. [ In one embodiment, the absolute value of this angular difference is greater than or equal to one degree. For example, in the second needle layer and the third needle layer, the probe needle (25t ') having the largest inclined angle in the second needle layer of the probe needle group (212) There is an angular difference between the probe needles 25s having a small inclined angle, and in one embodiment, the absolute value of this angular difference is greater than or equal to one degree. In summary, the relationship between the included angles of the probe needles can be expressed as:

θ _{25 t '} ≥ θ _{25 r'} + 1 °; θ _25s ≥ θ _{25 t '} + 1 °; θ _25u ≥ θ _{25 s'} + 1 °.

Moreover, the needle layers used by the two neighboring probe needle rows 21b and 22b are different. For the probe needles corresponding to the two probe needle rows and adjacent to each other, the probe needle having the largest subtent angle in the lower needle layer and the probe needle having the smallest subtent angle in the upper needle layer, and the smallest inclined angle and the smallest The absolute value of the angular difference between the inclined angles is 1 degree or more. As shown in FIGS. 5A and 5B, the adjacent probe needle groups 212-222 of the other probe needle rows, the upper needle layer and the lower needle layer adjacent to each other of the two neighboring probe needle rows 21b and 22b, The upper needle layer corresponds to the first needle layer of the probe needle group 222 and the lower needle layer corresponds to the fourth needle layer of the probe needle group 212. [ There is an angular difference between the probe needle 25v having the smallest inclined angle in the upper needle layer and the probe needle 25u 'having the largest inclined angle in the lower needle layer. In one embodiment, the absolute value of such angular difference of the subtracted angle is greater than or equal to one degree. In summary, the relationship between the _inclination angles of the probe needles can be expressed as θ _25v ≥ θ _{25 v '} + 1 °.

The illustrated probe needles shown in FIG. 5A are aligned with each other without offset, but in another embodiment, may be similar to the embodiment as shown in FIG. 3G described above. The pitch between the probe needles can be arranged between the probe needle rows in the second direction Y so that the pitches of the probe needle rows are arranged offset.

The embodiment described above is an embodiment having a plurality of probe needle rows. However, according to the description of the relationship between the included angles of the probes of the present invention, in another embodiment, there can only be a probe needle row which also has a plurality of probe needle groups. A subset of each probe needle group may be placed with 2, 3, 4, 6, or 8 probe needles according to actual needs. In addition, the illustrated first and second directions, as illustrated in FIG. 3A, are not confined to the first direction X and the second direction Y that are coplanar and mutually orthogonal. See Figure 6 for another embodiment. 6 is a diagram illustrating the layout of a probe needle module according to another embodiment of the present invention, which is a combination of radial and circumferential coplanar directions. In this embodiment, for the layout of the probe needles, the first direction is the circumferential direction (?) And the second direction is the radial direction (r). Under the coordinate system defined by the circumferential direction [theta] and the radial direction r, the embodiment of Figure 6 also has four probe needle rows 21-24, each probe needle row having a plurality of probe needle groups have. For example, in the first probe needle row 21, the first probe needle row 21 has a plurality of probe needle groups 210. Each probe needle group 210 has two subsets 210a and 210b. Each subset has a probe needle 25a of the first needle layer and a probe needle 25b of the second needle layer. The other probe needle rows 22-24 are also arranged in a manner according to the first needle row as described above. Since the relationship between the inclination angles of the probe needles is also as described above, the description related thereto will be omitted.

Although the present invention has been described in considerable detail with reference to certain embodiments, other embodiments are possible. Accordingly, the scope and spirit of the claims should not be limited to the description of the embodiments included herein.

It will be apparent to those skilled in the art that various changes and modifications can be made to the structure of the present invention without departing from the spirit and scope of the present invention. In view of the foregoing, it is intended that the present invention cover the modifications and variations of this invention provided they fall within the scope of the following claims and their equivalents.

2: Probe needle module
4: Tester
9: Chip
26: Holder
20: substrate
21-24: Probe Needle
90: electrical node
91: first side
92: second side
93: Third Side
94: fourth side
95: Upper side
96: Lower side
200: Through hole
201: Edge
202: External structure
210-240: Probe needle group
210a and 210b, 220a and 220b, 230a and 230b, 240a and 240b:
250:
251: Cantilever portion
L: Length of contact
θ:

Claims (10)

A probe needle module configured to transmit a test signal of a tester on an upper side to a DUT (DUT) on the lower side to perform an electrical test,
Board;
A holder disposed on the substrate; And
At least one probe needle row aligned along a first direction,
Each probe needle row includes a plurality of probe needle groups along a second direction,
Each of the probe needle groups comprises:
Each of the probe needles having a contact portion and a cantilever portion, one end of the cantilever portion being connected to the substrate, the other end of the cantilever portion being connected to the contact portion, the contact portion being interposed between the contact portion and the cantilever portion, The cantilever portion of each probe needle is disposed in a holder and comprises a plurality of needle layers from the lower side to the upper side, the probe needles forming at least two subsets, each subset comprising at least two The probe needle of the same needle layer has the same length, the error range of the contact portion of the same length is 0 degrees or more and 1 mil or less, the length of the contact portion of the probe needle of the other needle layers is different, The subtended angles of the probe needles of the other subset in the same needle layer are different, Each of the at least two probe needles being disposed in at least two of the same needle layers. The method according to claim 1,
The probe needle module further comprising at least three probe needle rows, each subset of probe needle groups having two probe needles each disposed on two neighboring needle layers. The method according to claim 1,
The probe needle module further comprising at least three probe needle rows and each subset of probe needle groups having three probe needles each disposed in three neighboring needle layers. A probe needle module configured to transmit a test signal of a tester on an upper side to a DUT (DUT) on the lower side to perform an electrical test,
Board;
A holder disposed on the substrate; And
At least one probe needle row aligned along a first direction,
Each probe needle row includes a plurality of probe needle groups along a second direction,
Each of the probe needle groups comprises:
Each of the probe needles having a contact portion and a cantilever portion, one end of the cantilever portion being connected to the substrate, the other end of the cantilever portion being connected to the contact portion, the contact portion being interposed between the contact portion and the cantilever portion, The cantilevered portion of each probe needle being disposed in a holder and forming a plurality of needle layers from a lower side to an upper side, the probe needles forming at least two subsets, each subset comprising at least four Four probe needles of at least four needle layers are arranged in order from the short length to the long length along the length of the contact portion of the probe needle in order of the first needle layer, the second needle layer, the third needle layer , And a fourth needle layer, the lengths of the contact portions of the probe needles of the same needle layer being the same, The error range of the tip is greater than or equal to 0 degrees and less than or equal to 1 mil and the length of the contact portion of the probe needle of the other needle layers is different and in each subset the probe needle comprises a first needle layer, a third needle layer, A fourth needle layer, at least four probe needles of each of the at least two subsets are disposed in four identical needle layers, and wherein the subtended angles of the probe needles of the other sub- module. The method according to claim 1 or 4,
Wherein the absolute value of the angular difference between the subtended angles of the two probes in the same needle layer of a neighboring subset of each of the probe needle groups of the same probe needle row is greater than or equal to 2 degrees. The method according to claim 1 or 4,
In the two neighboring needle layers of each of the probe needle groups of the same probe needle row, for the probe needle having the largest subtractive angle in the needle layer near the lower side and the probe needle having the smallest subtractive angle in the needle layer close to the upper side, A probe needle module in which the absolute value of the angular difference between a large inclined angle and the smallest inclined angle is at least 1 degree. The method according to claim 1 or 4,
Further comprising two neighboring probe needle rows, wherein the needle layers used in the two probe needle rows are different. The method according to claim 1 or 4,
Wherein the needle layers used by the probe needle rows are different and the two neighboring probe needle rows are each an adjacent upper needle layer and a lower needle layer, The absolute value of the angular difference between the greatest inclined angle and the smallest inclined angle is at least 1 degree with respect to the probe needle having the greatest subtractive angle and the probe needle having the smallest subtractive angle at the needle layer close to the top side. The method according to claim 1 or 4,
Wherein in the same probe needle row, the subtended angles of the probe needles in the same needle layer of neighboring subsets of each of the probe needle groups gradually increase along a second direction. The method according to claim 1 or 4,
Wherein the first direction and the second direction are combinations of mutually orthogonal orientations or combinations of radial and circumferential coplanar directions.

Images