KR20140029694A - A device and method for adjusting height of floating-type substrate transferring device, and floating-type substrate transferring device and coating apparatus having the same - Google Patents

A device and method for adjusting height of floating-type substrate transferring device, and floating-type substrate transferring device and coating apparatus having the same Download PDF

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Publication number
KR20140029694A
KR20140029694A KR1020120094978A KR20120094978A KR20140029694A KR 20140029694 A KR20140029694 A KR 20140029694A KR 1020120094978 A KR1020120094978 A KR 1020120094978A KR 20120094978 A KR20120094978 A KR 20120094978A KR 20140029694 A KR20140029694 A KR 20140029694A
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South Korea
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substrate
height
floating
pair
coating
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KR1020120094978A
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Korean (ko)
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손희진
이현기
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주식회사 나래나노텍
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Priority to KR1020120094978A priority Critical patent/KR20140029694A/en
Publication of KR20140029694A publication Critical patent/KR20140029694A/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74—Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90—Devices for picking-up and depositing articles or materials
    • B65G47/91—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers
    • B65G47/911—Devices for picking-up and depositing articles or materials incorporating pneumatic, e.g. suction, grippers with air blasts producing partial vacuum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B65G49/065—Transporting devices for sheet glass in a horizontal position supported partially or completely on fluid cushions, e.g. a gas cushion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/04—Arrangements of vacuum systems or suction cups
    • B65G2249/045—Details of suction cups suction cups

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Mechanical Engineering (AREA)
  • Optics & Photonics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Fluid Mechanics (AREA)
  • Chemical & Material Sciences (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Coating Apparatus (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The present invention discloses a height adjusting apparatus and method of a floating substrate transfer apparatus, and a floating substrate transfer apparatus and coating apparatus having the same.
The height adjusting device of the floating substrate transfer apparatus according to an embodiment of the present invention is provided on both sides of the substrate, and the one or more one provided at the bottom of the one or more pair of adsorption pads on which the substrate is mounted by vacuum adsorption. A pair of height adjustment members, wherein the one or more pairs of height adjustment members each comprises: an upper fixing block having an inclined surface; A lower movable block provided with a corresponding inclined surface parallel to the inclined surface and provided to be movable in a horizontal direction; A slant movement guide fixedly mounted on an upper portion of the lower movable block; A moving guide mounted on a lower portion of the lower movable block; A guide rail on which the movement guide is mounted; And a driving member for moving the lower movable block.

Description

A device and method for adjusting height of floating-type substrate transfer device, and floating-type substrate transfer device Coating Apparatus Having the Same}

The present invention relates to a height adjusting apparatus and a method of a floating substrate transfer apparatus, and a floating substrate transfer apparatus and coating apparatus having the same.

More specifically, the present invention is composed of the upper and lower movement guide having the inclined movement guide and relatively move the upper movement guide and the lower movement guide, so that the height of the substrate in real time during the transfer of the substrate in the floating manner Precise and finely adjustable, eliminating the height instability of the substrate due to uneven floating force, and eliminating the need to set (set) the height of each substrate area in advance, greatly reducing the overall tact time and ultimately The present invention relates to a height adjusting device and a method of a floating substrate transfer device in which coating quality of a substrate is significantly improved, and a floating substrate transfer device and a coating device having the same.

In general, in order to manufacture FPD, application of a coating liquid on a glass substrate (hereinafter referred to as "substrate") is required, and for this, a nozzle dispenser or a slit die (hereinafter referred to as "nozzle apparatus") is provided. One coating apparatus is used. Such a coating apparatus performs a coating operation of various coating liquids while positioning a substrate on a stage and moving a nozzle apparatus attached to a gantry in a horizontal direction. Examples of the coating operation of the coating liquid include forming photoresist (PR), black matrix (BM), column space (CS), and the like on the LCD panel substrate when manufacturing the LCD panel. The coating liquid can be applied. In the case of manufacturing a PDP panel, a coating liquid may be applied to form a dielectric, a lower dielectric, and a partition on a PDP panel substrate.

Recently, as a device for applying a coating liquid, a floating substrate transfer apparatus and a coating apparatus for applying a coating liquid to a surface of a substrate while floating and transporting a substrate through spraying, spraying, or suctioning air have been used.

Figure 1a is a schematic view showing a perspective view of a substrate transfer apparatus and a coating apparatus of the prior art floating method according to the prior art, Figure 1b is a substrate transfer apparatus of the conventional method shown in Figure 1a and the same 1 is a schematic front view of a coating apparatus, and FIG. 1C shows a part of an arrangement pattern of an air outlet port and an air inlet port in a loading area, a coating area, and an unloading area of a floating substrate transfer device according to the prior art. Figure is shown. The substrate transfer apparatus of the floating method according to the prior art shown in Figures 1a to 1c and the coating device having the same is, for example, "Matching method and coating device" by Tokyo Electron Co., Ltd. on May 25, 2007 It is disclosed in detail in Korean Patent Application Publication No. 2007-114034, filed with Korean Patent Application No. 2007-50812 under the name of the invention and published on November 29, 2007.

Referring again to FIGS. 1A-1C, the coating apparatus 40 according to the prior art includes a floating substrate transfer apparatus 84. The substrate G is transferred onto the loading region of the stage 76 (M1 region in FIG. 1B) by, for example, a transfer arm (not shown). Thereafter, a plurality of lift pins 86 are lifted by the lift device (not shown) provided under the loading area M1 area of the stage 76 to support the substrate G. Subsequently, when the plurality of lift pins 86 are lowered, the substrate G is provided with a suction pad on the substrate support member 102 provided on the pair of movement guides 98 that are movable on the pair of guide rails 96. 104 is mounted on the vacuum suction method. Only a plurality of air jets 88 are provided on the loading region M1 region. Substrate G bent down by self-weight on the loading area M1 area is floated to a loading floating height Ha in the range of approximately 150 to 250 μm by air ejected through the air ejection opening 88. In one state, it is conveyed by the floating substrate transfer apparatus 84 onto the coating region (M3 region shown in FIG. 1B) (that is, in the X direction) via the first interface region (M2 region). An air inlet 90 connected to a vacuum pumping device (not shown) is partially provided in the first interface region M2. When the substrate G enters the first interface region M2 region, the ejection output of the air ejection opening 88 is partially offset by the suction force of the air intake opening 90, so that the floating height of the substrate G gradually decreases. Enter the coating area (M3 area). In the coating area (M3 area), the number of air inlets 90 is provided more than the first interface area (M2 area), while maintaining the state of the substrate G floating at a coating height Hb of approximately 50 mu m. Feed in the axial direction. In this coating area (M3 area), the nozzle device 78 receives a coating liquid (for example, a resist liquid) through the supply pipe 94 and applies the coating liquid onto the substrate G.

Thereafter, the substrate G coated with the coating liquid is transferred to the second interface region M4 region. Similar to the first interface region M2 region, the second interface region M4 region is partially provided with an air intake port 90 connected to a vacuum pumping device (not shown) (see FIG. 1A). When the substrate G enters the second interface region M4 region, the ejection output of the air ejection opening 88 is partially canceled by the suction force of the air intake opening 90 so that the substrate G is in the range of approximately 150 to 250 μm. With the unloading floating height Ha, the floating height gradually increases. Thereafter, the substrate G enters the unloading region M5 region, and the unloading region M5 region is provided with only a plurality of air jets 88 as with the loading region M1 region. Therefore, the board | substrate G is the board | substrate G in the state which rose to the floating height Hc of the range of about 150-250 micrometers by the air which blows out through the some air ejection opening 88 provided in the unloading area | region M5 area | region. ) Is released from the vacuum adsorption provided from the adsorption pad 104. Thereafter, a plurality of lift pins 86 are raised by a lifting device (not shown) provided below the stage 76 of the unloading area M5 area to raise the substrate G, and then the robot arm (not shown). Is transferred to the next process position.

The floating substrate transfer device 84 and the coating apparatus 40 having the same according to the related art can solve most of the disadvantages of the coating apparatus of the nozzle movement method in that the substrate G is moved in the floating manner. That the advantage is achieved.

FIG. 1D is a schematic cross-sectional view of a substrate transfer apparatus and a coating apparatus of a floating method according to the prior art, and FIG. 1E is a schematic partial cross-sectional view of a substrate transfer apparatus of a floating method according to the prior art.

Referring to FIGS. 1D and 1E together with FIGS. 1A to 1C, the floating substrate transfer apparatus 84 according to the prior art includes a pair of guide rails 96 arranged parallel to both sides of the stage 76. A moving guide 98 movably mounted on each guide rail 96 in an axial direction (X direction), a drive member 100 for linearly moving the moving guide 98 on each guide rail 96, and each A substrate support member 102 extends from the movement guide 98 toward the center of the stage 76 and detachably supports the left and right peripheral portions of the substrate G in a detachable manner. The driving member 100 may be implemented by, for example, a linear motor. Here, the substrate support member 102 supports the plurality of adsorption pads 104, and the plurality of adsorption pads 104, on which the substrate G is mounted on the lower surfaces of the left and right peripheral parts by a vacuum adsorption method. An elastically deformable pad support member 106 is provided to change the height of the suction pad 104. The pad support member 106 independently supports the plurality of suction pads 104. Accordingly, each of the plurality of suction pads 104 and the pad support member 106 can stably hold the substrate G at height positions independent of each other.

In addition, the pad support member 106 is attached to a plate-shaped pad lifting member 108 mounted on the inner surface of the movement guide 98 so as to be liftable. The pad actuator (not shown) mounted to the movement guide 98 lifts the pad lifting member 108 between the original position lower than the floating height position of the substrate G and the floating position corresponding to the floating height of the substrate G. FIG. Move it.

As described above, the floating substrate transfer apparatus 84 according to the related art transfers the substrate G while supporting the substrate G in the floating manner on the flat guide rail 96. At this time, the substrate G passes through the first interface region M2 region as shown in FIG. 1B to a coating height Hb of approximately 50 μm at a loading floating height Ha in the range of approximately 150 to 250 μm. It must descend and rise from the coating height Hb of approximately 50 μm through the second interface region M4 region to the unloading floating height Ha in the range of approximately 150 to 250 μm. In this case, since the guide rail 96 used for the substrate transfer apparatus 84 of the conventional floating method is flat, the loading and unloading floating height Ha and the coating height Hb of the substrate G are adjusted. In order to maintain precisely, the number of the plurality of air ejection openings 88 and the plurality of air intake openings 90 are different from each other in the first and second interface regions M2 and M4 and the coating region M3. It is necessary to precisely control the ejection power and the suction force provided by the air ejection port 88 and the plurality of air intake port (90).

However, in the above-described prior art, the number of the plurality of air ejection openings 88 and the plurality of air intake openings 90 in order to keep the loading and unloading floating height Ha and the coating height Hb of the substrate G constant It is quite difficult to adjust them differently, or to control each of the plurality of air blowers 88 and the plurality of air inlets 90 to provide a constant discharge power and suction force.

In particular, the intensity of the power output and suction power provided by the plurality of air blowing holes 88 and the plurality of air intake holes 90 should be set and controlled differently according to the sizes of different substrates G. In this case, each of the air supply device (not shown) connected to supply air to the plurality of air ejection ports 88 and the vacuum pumping device (not shown) connected to suck air from the plurality of air intake ports 90 are each precisely. Control. However, precise control of the air supply device (not shown) and the vacuum pumping device (not shown), respectively, are quite difficult and require considerable time.

Further, in the prior art, the loading and unloading float height and the coating height of the substrate G are controlled by the difference of the float force (air power output-air suction force) of the air. Therefore, it is very difficult to keep the height constant as the substrate G is transported according to the difference in the floating force of the air, so that the coating liquid is not applied to a predetermined thickness and staining occurs.

In addition, in the related art, by using a pad actuator (not shown), the plurality of pad support members 106 are elevated along the inner surface of the movement guide 98 to raise the height of the plurality of suction pads 104 of the substrate G. It is possible to independently adjust between the original position lower than the lift height position and the lift position corresponding to the lift height of the substrate G, but once the heights of the plurality of suction pads 104 are set (set), the movement guide 98 and Since the height of the some adsorption pad 104 cannot be changed, height adjustment of the board | substrate G is impossible while the board | substrate G is conveyed by the board | substrate conveying apparatus 84. FIG.

As described above, in the prior art, in order to initially set (set) the height of the substrate G such that the plurality of suction pads 104 and the pad support member 106 have height positions that are independent of each other, a considerable setting (setting) is performed. Time is required, and in particular, it is impossible to change the height of the substrate G during the transfer of the substrate G.

In addition, in the prior art, the height of the substrate G cannot be kept constant due to the difference in the floating force of air during the transfer of the substrate G, and the height of the substrate G is also impossible to be adjusted. The likelihood of defects increases.

Therefore, a new method for solving the above-mentioned problems is required.

Republic of Korea Patent Publication No. 2007-114034

The present invention is to solve the above-mentioned problems of the prior art, the movement guide is composed of the upper and lower movement guide having an inclined state, and the upper movement guide and the lower movement guide relative to move, the substrate is transferred in a floating manner During the process, the height of the substrate can be precisely and finely adjusted in real time, the height instability of the substrate is eliminated due to uneven floating force, and the total process time is not necessary because there is no need to set (set) the height of each substrate in advance. The present invention provides a height adjusting device and a method of a floating substrate transfer apparatus, and a floating substrate transfer apparatus and a coating apparatus having the same.

One or more height adjustment devices of the floating substrate transfer apparatus according to the first aspect of the present invention are provided on both sides of the substrate, and the substrate is provided under the one or more pair of suction pads which are mounted in a vacuum suction method. A pair of height adjustment members, wherein the one or more pairs of height adjustment members each comprises: an upper fixing block having an inclined surface; A lower movable block provided with a corresponding inclined surface parallel to the inclined surface and provided to be movable in a horizontal direction; A slant movement guide fixedly mounted on an upper portion of the lower movable block; A moving guide mounted on a lower portion of the lower movable block; A guide rail on which the movement guide is mounted; And a driving member for moving the lower movable block.

The height adjusting device of the floating substrate transfer apparatus according to the second aspect of the present invention is provided on both sides of the substrate, and the height adjustment of the plurality of pairs provided in the lower portion of the plurality of pairs of the adsorption pads on which the substrate is mounted in a vacuum suction method. And a plurality of pairs of height adjustment members each adjusting the substrate to a loading float height on the loading area on the stage, adjusting the substrate to a coating height on the coating area of the stage, and an unloading area of the stage. On the substrate is characterized in that to adjust the unloading floating height.

According to a third aspect of the present invention, there is provided a method of adjusting a height of a substrate transfer apparatus in a floating manner, a) provided in a lower portion of an upper fixing block having an inclined surface and horizontally moving a lower movable block having a corresponding inclined surface parallel to the inclined surface. Moving to; And b) the upper fixing block is raised or lowered in the vertical direction according to the horizontal movement of the lower movable block.

According to a fourth aspect of the present invention, there is provided a method of adjusting a height of a floating substrate transfer apparatus, a) adjusting a substrate to a loading floating height on a loading area on a stage by using a plurality of height adjusting members provided under the substrate transfer apparatus. Making; b) sequentially adjusting the plurality of height adjusting members to the coating height such that the substrate maintains the coating height as the substrate moves onto the coating area of the stage; And c) sequentially adjusting the plurality of height adjusting members to the unloading flotation height such that the substrate maintains the unloading flotation height while the substrate moves onto the unloading area of the stage. do.

The following advantages are achieved in the height adjusting device and method of the floating substrate transfer apparatus of the present invention, and the substrate transfer apparatus and the coating apparatus of the floating manner having the same.

1. The height of the board can be precisely and finely adjusted in real time even during the transfer of the board in the floating method.

2. The height instability of the substrate due to uneven floating force is eliminated, and it is possible to maintain a constant height.

3. Since there is no need to set (set) the height of each substrate in advance, the overall tact time is greatly reduced.

4. The coating quality of the substrate is significantly improved.

Further advantages of the present invention can be clearly understood from the following description with reference to the accompanying drawings, in which like or similar reference numerals denote like elements.

Figure 1a is a schematic view showing a perspective view of a substrate transfer apparatus of the floating method and a coating apparatus having the same according to the prior art.
FIG. 1B schematically illustrates a front view of a substrate transfer apparatus of a floating method according to the related art shown in FIG. 1A and a coating apparatus having the same.
FIG. 1C is a view illustrating a part of an arrangement pattern of air ejection openings and air intake openings in a loading region, a coating region, and an unloading region of a floating substrate transfer apparatus according to the related art.
Figure 1d is a schematic cross-sectional view of the substrate transfer apparatus and coating apparatus of the floating method according to the prior art.
Figure 1e is a schematic partial cross-sectional view of the substrate transfer apparatus of the floating method according to the prior art.
2A is a view schematically illustrating a height adjusting device, a floating substrate transfer device, and a substrate coating device of a floating substrate transfer device according to an embodiment of the present invention.
2B and 2C are diagrams for explaining a method of adjusting a height of a substrate by using a height adjusting device of a floating substrate transfer apparatus according to an embodiment of the present invention.
2d to 2f is a loading area, coating area using a floating substrate transfer device having a height adjustment device according to an embodiment of the present invention. And a diagram schematically illustrating a method of adjusting a height during transport of a substrate on an unloading area.
3A is a flowchart illustrating a height adjusting method of a substrate transfer apparatus in a floating manner according to a first embodiment of the present invention.
3B is a flowchart illustrating a height adjustment method of the substrate transfer apparatus of the floating method according to the second embodiment of the present invention.

Hereinafter, the present invention will be described in detail with reference to embodiments and drawings.

Figure 2a is a view schematically showing a height adjusting device, a floating substrate transfer device, and a substrate coating apparatus of the floating substrate transfer apparatus according to an embodiment of the present invention, Figures 2b and 2c are respectively present invention A diagram for describing a method of adjusting a height of a substrate using a floating substrate transfer apparatus according to an exemplary embodiment.

2A to 2C, the height adjusting device 200 of the floating substrate transfer apparatus 284 according to an embodiment of the present invention is provided on both sides of the substrate G, and the substrate G is One or more pairs of height adjustment members 210 provided below the one or more pairs of adsorption pads 204 which are mounted in a vacuum adsorption manner, wherein each of the one or more pairs of height adjustment members 210 is respectively provided. An upper fixing block 212a having an inclined surface Sa; A lower movable block 212b having a corresponding inclined surface Sb parallel to the inclined surface Sa and provided to be movable in a horizontal direction; An inclined movement guide 214 fixedly mounted on an upper portion of the lower movable block 212b; A movement guide 216 mounted below the lower movable block 212b; A guide rail 218 to which the moving guide 216 is mounted; And a driving member M for moving the lower movable block 212b.

In addition, the floating substrate transfer apparatus 284 according to an embodiment of the present invention is provided on both sides of the substrate G, and the one or more pairs of adsorption pads on which the substrate G is mounted in a vacuum adsorption method ( 204); One or more pairs of height adjustment members 210 provided below the one or more pairs of suction pads 204; A pair of second guide rails 296 disposed parallel to both sides of the stage 276 for floating the substrate G; A pair of second moving guides 298 movably mounted on the pair of second guide rails 296; And a pair of second driving members (not shown) for linearly moving the pair of second moving guides 298 on the pair of second guide rails 296, wherein the one or more pairs The height adjusting member 210 is each implemented as a pair of height adjusting members 210 of the height adjusting device 200 of the substrate transfer device 284 of the floating method according to an embodiment of the present invention described above.

In addition, the floating substrate coating apparatus 240 according to an embodiment of the present invention provides a loading region LR, a coating region CR, and an unloading region UR, and floats the substrate G. Stage 276; A substrate transfer device (284) for transferring the substrate (G) from the loading region (LR) to the unloading region (UR) via the coating region (CR); A nozzle device 278 provided on the coating area CR and applying a coating liquid on the substrate G; A gantry (not shown) to which the nozzle device 278 is mounted; And a frame (not shown) on which the stage 276 is mounted, wherein the substrate transfer device 284 is provided at both sides of the substrate G, and the substrate G is mounted in a vacuum suction method. One or more pairs of adsorption pads 204; One or more pairs of height adjustment members 210 provided below the one or more pairs of suction pads 204; A pair of second guide rails 296 disposed parallel to both sides of the stage 276 for floating the substrate G; A pair of second moving guides 298 movably mounted on the pair of second guide rails 296; And a pair of second driving members (not shown) for linearly moving the pair of second moving guides 298 on the pair of second guide rails 296. Here, the one or more pairs of height adjusting members 210 are each a pair of height adjusting members of the height adjusting device 200 of the substrate transfer device 284 of the floating method according to an embodiment of the present invention described above ( 210 is implemented.

In addition, the stage 276 may be implemented as one stage 276 including the loading region LR, the coating region CR, and the unloading region UR of the substrate G, or the loading region LR; The coating region CR may be divided into first to third stages 276a, 278b, and 276c corresponding to the unloading region UR.

The floating substrate transfer apparatus 284 and the substrate coating apparatus 240 according to an embodiment of the present invention described above are each a height adjusting device of the substrate transfer apparatus 284 of the float type according to an embodiment of the present invention. It should be noted that 200 is used substantially the same as the prior art floating substrate transfer apparatus 84 and substrate coating apparatus 40 shown in FIGS. 1A-1E.

Therefore, hereinafter, the height adjusting device 200 of the floating substrate transfer apparatus according to an embodiment of the present invention will be described in detail.

2A to 2C again, the height adjusting device 200 of the floating substrate transfer device 284 according to an embodiment of the present invention is provided on both sides of the substrate G, the substrate (G) One or more pairs of height adjustment members 210 are provided below the one or more pairs of adsorption pads 204 mounted in this vacuum adsorption method. In FIG. 2A, one or more pairs of height adjustment members 210 are exemplarily illustrated as two, but one skilled in the art will fully understand that one or more pairs of height adjustment members 210 may be three or more. (For example, in FIGS. 2D-2F described below, one or more pairs of height adjustment members 210 are exemplarily illustrated as four).

The one or more pairs of height adjusting members 210 described above include upper fixing blocks 212a each having an inclined surface Sa. The upper fixing block 212a is provided in a fixed state with the suction pad 204 at the bottom of the suction pad 204.

In addition, a lower movable block 212b is provided below the upper fixing block 212a. This lower movable block 212b has a corresponding inclined surface Sb parallel to the inclined surface Sa of the upper fixing block 212a. Further, the inclined movement guide 214 is fixedly mounted on the upper portion of the lower movable block 212b, and the movement guide 216 is attached to the lower portion of the lower movable block 212b. The movement guide 216 is mounted on the guide rail 218.

In addition, the lower movable block 212b is provided with a driving member M, and the movement guide 216 mounted to the lower movable block 212b by the driving member M moves horizontally on the guide rail 218. Ultimately, the lower movable block 212b is movable in the horizontal direction.

Hereinafter, a method of adjusting the height of the substrate G by using the height adjusting device 200 of the floating substrate transfer device 284 according to an embodiment of the present invention will be described in detail.

First, referring to FIG. 2B, one of the height adjusting members of a pair of height adjusting members 210 used in the height adjusting device 200 of the floating substrate transfer device 284 according to one embodiment of the present invention. Only 210 is shown. When the lower movable block 212b is moved in the moving direction (X direction) of the substrate G by using the driving member M of the height adjusting member 210, the lower movable block 212b is moved by + x. . Accordingly, the upper fixing block 212a moves along the inclined movement guide 214 provided on the upper portion of the lower movable block 212b. At this time, since the upper fixing block 212a remains fixed, the upper fixing block 212a rises by z in the upper direction.

Meanwhile, referring to FIG. 2C, when the lower movable block 212b is moved in a direction opposite to the movement direction of the substrate G (-X direction) using the driving member M, the lower movable block 212b is-. Move by x Accordingly, the upper fixing block 212a moves along the inclined movement guide 214 provided on the upper portion of the lower movable block 212b. At this time, since the upper fixing block 212a remains fixed, the upper fixing block 212a descends by z in the lower direction.

As described above, when the lower movable block 212b moves horizontally along the substrate G moving direction or the opposite direction, the upper fixing block 212a moves up or down along the vertical direction. That is, in one embodiment of the present invention, the horizontal movement of the lower movable block 212b is converted to the vertical movement of the upper fixing block 212a to adjust the height of the substrate G. In this case, the height z in the vertical direction of the upper fixing block 212a and the horizontal moving distance x in the lower movable block 212b are given by z = xtanθ, where θ is an inclined surface Sa or It is the inclination angle of the corresponding inclined surface Sb. Therefore, since θ is predetermined, when the desired height z of the upper fixing block 212a is determined, the horizontal moving distance x of the lower movable block 212b necessary for it is determined.

More specifically, for example, when the inclination angle θ = 10 °, in order to increase the height of the substrate G by 5 μm, the height z of the upper fixing block 212a may be increased by 5 μm. For this, tan? = Tan10? 0.176, so that at 5 占 퐉 = x 占 0.176, x? 28.409 占 퐉 is obtained. Therefore, when the horizontal moving distance x of the lower movable block 212b is moved approximately 28.409 µm in the traveling direction of the substrate G (that is, in the X direction), the height of the substrate G increases by 5 µm. When the horizontal moving distance x of the lower movable block 212b is moved approximately 28.409 µm in the direction opposite to the traveling direction of the substrate G (that is, the -X direction), the height of the substrate G decreases by 5 µm. In this manner, the height of the substrate G can be adjusted by using the height adjusting device 200 of the floating substrate transfer device 284 according to an embodiment of the present invention.

In the height adjusting device 200 of the substrate transfer device 284 of the floating method according to an embodiment of the present invention described above, the height of the substrate G in real time using one or more pairs of height adjusting members 210. The fine tuning operation is described in detail.

In the height adjusting device 200 of the substrate transfer apparatus 284 of the floating method according to the embodiment of the present invention shown in FIGS. 2B and 2C described above, the inclined surface Sa and the corresponding inclined surface Sb are the substrates G. FIG. Although the traveling direction (i.e., the X direction) of FIG. 1 is exemplarily shown to have a low inclination, those skilled in the art will know that the inclined surface Sa and the corresponding inclined surface Sb have a traveling direction (i.e., the X direction) of the substrate G. It will be appreciated that it may have a high slope as shown in FIG. 2A.

On the other hand, the height adjusting device 200 of the floating substrate transfer device 284 according to an embodiment of the present invention, for example, the stage 276 is approximately 150 in the loading region (LR) of the substrate (G) Substrate G corresponding to a loading flotation height in the range of from 250 μm, a coating height of approximately 50 μm in the coating area CR, and an unloading injury height in the range of approximately 150 to 250 μm in the unloading area UR. The same may be applied to adjusting the height of the.

More specifically, Figures 2d to 2f is a loading area, coating area using a floating substrate transfer apparatus having a height adjustment device according to an embodiment of the present invention. And a diagram schematically illustrating a method of adjusting a height during transport of a substrate on an unloading area.

2D to 2F, the floating substrate transfer device 284 according to an embodiment of the present invention includes a height adjustment device 200 having a plurality of height adjustment members. In the embodiment shown in FIGS. 2D-2F, the height adjustment device 200 is exemplarily illustrated as having first to fourth height adjustment members 210a, 210b, 210c, and 210d, but a person skilled in the art will appreciate that It will be fully understood that the number of height adjusting members may be increased or decreased. In this case, the first to fourth height adjusting members 210a, 210b, 210c, and 210d constituting the height adjusting device 200 are shown only in front of FIGS. It will be fully understood that the same height adjusting member as the first to fourth height adjusting members 210a, 210b, 210c, and 210d should be present on the rear surface. That is, it should be noted that the height adjusting device 200 is actually implemented by a pair of first to fourth height adjusting members 210a, 210b, 210c, and 210d.

In addition, in the exemplary embodiment illustrated in FIGS. 2D to 2F, the stage 276 may include first to first corresponding to the loading region LR, the coating region CR, and the unloading region UR of the substrate G. Although illustratively illustrated as being divided into three stages 276a, 278b, 276c, the stage 276 is a loading region LR, a coating region CR, and an unloading region UR of the substrate G. Obviously, it may be implemented in one stage 276 that includes.

2D to 2F, in the floating substrate transfer apparatus 284 according to an embodiment of the present invention, for example, the loading floating height of the substrate G is 200 μm, the coating height is 50 μm, And the first to fourth height adjusting members 210a, 210b, 210c constituting the height adjusting device 200 in the loading region LR of the first stage 276a when the unloading floating height is set to 200 μm, respectively. All of the 210d adjusts the height of the substrate G such that the substrate G is located at a loading height of 200 μm (see FIG. 2D).

After that, while the substrate G is transferred to the coating area CR by the substrate transfer device 284, the height of the front end portion of the substrate G must be lowered to a coating height of 50 μm, for example, to adjust the first height. The member 210a lowers the height of the substrate G to 50 μm, and the second height adjusting member 210b lowers the height of the substrate G to 100 μm, for example, and adjusts the third and fourth heights. The members 210c and 210d maintain the height of the substrate G at 200 mu m (see Fig. 2E).

Thereafter, when the front end portion of the substrate G enters the unloading region UR through the coating region CR by the substrate transfer device 284, for example, the first height adjusting member 210a is the substrate G. The height of the substrate is raised to 100 μm, the second height adjusting member 210b lowers the height of the substrate G to 50 μm, for example, and the third height adjusting member 210c increases the height of the substrate G. The height is lowered to 100 μm, and the fourth height adjusting member 210 d maintains the height of the substrate G at 200 μm.

After that, when the rear end of the substrate G is positioned in the coating area CR by the substrate transfer device 284, for example, the first and second height adjusting members 210a and 210b are formed of the substrate G. The height is raised to 200 μm, the third height adjustment member 210b raises the height of the substrate G to 100 μm, for example, and the fourth height adjustment member 210c increases the height of the substrate G to 50. It is lowered to 탆 (see FIG. 2F).

In the above-described manner, in the substrate transfer apparatus 284 of the present invention, the loading region LR and the coating region CR on the stage 276 using the height adjusting apparatus 200 having the plurality of height adjusting members 210. ) And the height of the substrate G in response to the floating height of the predetermined substrate G in the unloading region UR, it is possible to adjust the height of the substrate G as described with reference to FIGS. 1A to 1C. Precise control of the flotation force can solve the problem.

Also, as described above with reference to FIGS. 2A-2C, even when the height of the substrate G does not coincide with the predetermined height at any position on the stage 276, in detail with reference to FIGS. 2A-2C. As described above, it is possible to finely adjust the height of the substrate G in real time using one or more height adjusting members of the first to fourth height adjusting members 210a, 210b, 210c, and 210d.

3A is a flowchart illustrating a height adjusting method of a substrate transfer apparatus in a floating manner according to a first embodiment of the present invention.

Referring to FIG. 3A together with FIGS. 2A to 2C, the height adjusting method 300 of the floating substrate transfer apparatus according to the first embodiment of the present invention may include a) an upper fixing block 212a having an inclined surface Sa. Moving (310) the lower movable block (212b) provided in the lower portion of the lower movable block (212b) having a corresponding inclined surface (Sb) parallel to the inclined surface (Sa); And b) the upper fixing block 212a is raised or lowered in the vertical direction in response to the horizontal movement of the lower movable block 212b.

In the height adjusting method 300 of the floating substrate transfer apparatus according to the first embodiment of the present invention, the height z in the vertical direction of the upper fixing block 212a and the lower movable block 212b are The horizontal moving distance x is given by z = xtanθ, where θ is the inclination angle of the inclined plane Sa or the corresponding inclined plane Sb.

3B is a flowchart illustrating a height adjustment method of the substrate transfer apparatus of the floating method according to the second embodiment of the present invention.

Referring to FIG. 3B together with FIGS. 2D to 2F, a height adjusting method 301 of a floating substrate transfer apparatus according to a second embodiment of the present invention may include a) a lower portion of the substrate transfer apparatus 284. Adjusting the substrate G to a loading floating height on the loading region LR on the stage 276 using the plurality of height adjusting members; b) sequentially adjusting the plurality of height adjusting members to the coating height such that the substrate G maintains the coating height while the substrate G moves onto the coating area CR of the stage 276. 322; And c) the unloading floating height of the plurality of height adjusting members so that the substrate G maintains the unloading floating height while the substrate G moves on the unloading area UR of the stage 276. Step 332 to adjust sequentially.

In the height adjusting method 301 of the floating substrate transfer apparatus according to the second embodiment of the present invention, when the height of the substrate G does not coincide with a predetermined height at an arbitrary position on the stage 276. One or more height adjusting members of the plurality of height adjusting members may be used to finely adjust the height of the substrate G in real time.

Various modifications may be made by those skilled in the art without departing from the spirit and scope of the invention as defined by the following claims. It is not. Accordingly, the scope of the present invention should not be limited by the above-described exemplary embodiments, but should be determined only in accordance with the following claims and their equivalents.

40,240: coating apparatus 76,276,276a, 276b, 276c: stage
78,278: nozzle apparatus 84,284: substrate transfer apparatus
86: lift pin 88: air outlet 90: air intake
94: supply pipe 96,218,296: guide rail
98,216,298: Moving guide 100, M: drive member
102: substrate support member 104, 204: suction pad
106: pad support member 108: pad lifting member
200: height adjusting device 210,210a, 210b, 210c, 210d: height adjusting member
212a: upper fixed block 212b: lower movable block
214: tilt shift guide

Claims (15)

In the height adjusting device of the substrate transfer device of the floating method,
One or more pairs of height adjustment members provided on both sides of the substrate and provided below the one or more pairs of adsorption pads on which the substrate is mounted by vacuum adsorption;
The one or more pair of height adjustment members are each
An upper fixing block having an inclined surface;
A lower movable block provided with a corresponding inclined surface parallel to the inclined surface and provided to be movable in a horizontal direction;
A slant movement guide fixedly mounted on an upper portion of the lower movable block;
A moving guide mounted on a lower portion of the lower movable block;
A guide rail on which the movement guide is mounted; And
A driving member for moving the lower movable block,
Height adjustment device of the substrate transfer apparatus of the floating method comprising a. The method of claim 1,
The height z in the vertical direction of the upper fixing block and the horizontal moving distance x in the lower movable block are given by z = xtanθ,
Θ is the inclination angle of the inclined surface or the corresponding inclined surface
Height adjusting device of the floating substrate transfer device. 3. The method according to claim 1 or 2,
The one or more pairs of height adjustment members is a height adjustment device of the floating substrate transfer apparatus for finely adjusting the height of the substrate in real time. In the height adjusting device of the substrate transfer device of the floating method,
A plurality of pairs of height adjusting members provided on both sides of the substrate and provided below the plurality of pairs of adsorption pads on which the substrate is mounted in a vacuum adsorption manner,
The pair of height adjustment members are each
On the loading area on the stage the substrate is adjusted to the loading float height,
On the coating area of the stage, the substrate is adjusted to the coating height,
On the unloading area of the stage to adjust the substrate to the unloading floating height
Height adjusting device of the floating substrate transfer device. 5. The method of claim 4,
The pair of height adjustment members are each
An upper fixing block having an inclined surface;
A lower movable block provided with a corresponding inclined surface parallel to the inclined surface and provided to be movable in a horizontal direction;
A slant movement guide fixedly mounted on an upper portion of the lower movable block;
A moving guide mounted on a lower portion of the lower movable block;
A guide rail on which the movement guide is mounted; And
A driving member for moving the lower movable block,
Height adjustment device of the substrate transfer apparatus of the floating method comprising a. The method according to claim 4 or 5,
The height adjusting device of the floating substrate transfer apparatus of the plurality of pairs of height adjustment member to finely adjust the height of the substrate in real time. In the floating substrate transfer apparatus,
At least one pair of adsorption pads provided on both sides of the substrate, the substrate being mounted in a vacuum adsorption manner;
At least one pair of height adjustment members provided below the at least one pair of suction pads;
A pair of second guide rails disposed parallel to both sides of the stage to float the substrate;
A pair of second moving guides movably mounted on the pair of second guide rails; And
A pair of second drive members for linearly moving the pair of second moving guides on the pair of second guide rails
Floating substrate transfer apparatus comprising a. 8. The method of claim 7,
The one or more pair of height adjustment members are each
An upper fixing block having an inclined surface;
A lower movable block provided with a corresponding inclined surface parallel to the inclined surface and provided to be movable in a horizontal direction;
A slant movement guide fixedly mounted on an upper portion of the lower movable block;
A moving guide mounted on a lower portion of the lower movable block;
A guide rail on which the movement guide is mounted; And
A driving member for moving the lower movable block,
Height adjustment device of the substrate transfer apparatus of the floating method comprising a. In the floating substrate transfer apparatus,
A plurality of pairs of adsorption pads provided on both sides of the substrate and on which the substrate is mounted in a vacuum adsorption manner;
A plurality of pairs of height adjusting members provided under the plurality of pairs of suction pads;
A pair of second guide rails disposed parallel to both sides of the stage to float the substrate;
A pair of second moving guides movably mounted on the pair of second guide rails; And
A pair of second drive members for linearly moving the pair of second moving guides on the pair of second guide rails
Lt; / RTI >
The pair of height adjustment members are each
On the loading area on the stage the substrate is adjusted to the loading float height,
On the coating area of the stage, the substrate is adjusted to the coating height,
On the unloading area of the stage to adjust the substrate to the unloading floating height
Floating substrate transfer device. In the floating substrate coating apparatus,
A stage providing a loading region, a coating region, and an unloading region to float the substrate;
A substrate transfer apparatus for transferring the substrate from the loading region to the unloading region via the coating region;
A nozzle device provided on the coating area and applying a coating liquid on the substrate;
A gantry on which the nozzle device is mounted; And
Frame on which the stage is mounted
≪ / RTI >
The substrate transfer device
At least one pair of adsorption pads provided on both sides of said substrate, said substrate being mounted in a vacuum adsorption manner;
At least one pair of height adjustment members provided below the at least one pair of suction pads;
A pair of second guide rails disposed parallel to both sides of the stage to float the substrate;
A pair of second moving guides movably mounted on the pair of second guide rails; And
A pair of second drive members for linearly moving the pair of second moving guides on the pair of second guide rails
≪ / RTI > In the floating substrate coating apparatus,
A stage providing a loading region, a coating region, and an unloading region to float the substrate;
A substrate transfer apparatus for transferring the substrate from the loading region to the unloading region via the coating region;
A nozzle device provided on the coating area and applying a coating liquid on the substrate;
A gantry on which the nozzle device is mounted; And
Frame on which the stage is mounted
≪ / RTI >
The substrate transfer device
A plurality of pairs of adsorption pads provided on both sides of the substrate, the substrate being mounted in a vacuum adsorption method;
A plurality of pairs of height adjusting members provided under the plurality of pairs of suction pads;
A pair of second guide rails disposed parallel to both sides of the stage to float the substrate;
A pair of second moving guides movably mounted on the pair of second guide rails; And
A pair of second drive members for linearly moving the pair of second moving guides on the pair of second guide rails
Including;
The pair of height adjustment members are each
On the loading area on the stage the substrate is adjusted to the loading float height,
On the coating area of the stage, the substrate is adjusted to the coating height,
On the unloading area of the stage to adjust the substrate to the unloading floating height
Coating apparatus. In the height adjustment method of the substrate transfer apparatus of the floating method,
a) moving a lower movable block provided in a lower portion of an upper fixing block having an inclined surface and having a corresponding inclined surface parallel to the inclined surface in a horizontal direction; And
b) ascending or descending the upper fixing block in the vertical direction according to the horizontal movement of the lower movable block;
Height adjustment method of the substrate transfer apparatus of the floating method comprising a. 13. The method of claim 12,
The height z in the vertical direction of the upper fixing block and the horizontal moving distance x in the lower movable block are given by z = xtanθ,
Θ is the inclination angle of the inclined surface or the corresponding inclined surface
How to adjust the height of the floating substrate transfer device. In the height adjustment method of the substrate transfer apparatus of the floating method,
a) adjusting the substrate to a loading floating height on the loading area on the stage using a plurality of height adjusting members provided below the substrate transfer device;
b) sequentially adjusting the plurality of height adjusting members to the coating height such that the substrate maintains the coating height as the substrate moves onto the coating area of the stage; And
c) sequentially adjusting the plurality of height adjusting members to the unloading flotation height such that the substrate maintains the unloading flotation height while the substrate is moved onto the unloading area of the stage.
Height adjustment method of the substrate transfer apparatus of the floating method comprising a. 15. The method of claim 14,
Floating substrate that finely adjusts the height of the substrate in real time using one or more height adjusting members of the plurality of height adjusting members when the height of the substrate does not match a predetermined height at any position on the stage. How to adjust the height of the feeder.
KR1020120094978A 2012-08-29 2012-08-29 A device and method for adjusting height of floating-type substrate transferring device, and floating-type substrate transferring device and coating apparatus having the same KR20140029694A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112309931A (en) * 2019-07-29 2021-02-02 Bns株式会社 Travel rail having travel and guide functions and pallet transfer system using the same
JP2021150351A (en) * 2020-03-17 2021-09-27 東レエンジニアリング株式会社 Substrate floating transport device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112309931A (en) * 2019-07-29 2021-02-02 Bns株式会社 Travel rail having travel and guide functions and pallet transfer system using the same
CN112309931B (en) * 2019-07-29 2024-03-22 Bns株式会社 Travel rail having travel and guide functions and pallet transfer system using the same
JP2021150351A (en) * 2020-03-17 2021-09-27 東レエンジニアリング株式会社 Substrate floating transport device

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