KR20130142867A - Cleaning device and cleaning method - Google Patents

Abstract

Provided are a cleaning device and a cleaning method capable of forcefully removing a fixated material fixated on a lip with a low price. A cleaning device (40) comprises a cleaning unit (5) and a cleaning solution supply unit (14) for supplying a cleaning solution to clean a lip surface (23) and cleans the lip surface (23) while moving the cleaning unit (5) and the cleaning solution supply unit (14) to the long side direction of the lip surface (23) by a movement means (6), and a cleaning unit (5), to which a ultrasonic vibrator (15) is attached, includes a ultrasonic vibrating unit (11) having a facing groove (13), forms a retting unit (19) by moving the facing groove (13) and the lip surface to be close to each other and supplying the cleaning solution to a gap between the facing groove and the lip surface from the cleaning solution supply unit (14), cleans part of the lip surface (23) by performing ultrasonic vibration of the ultrasonic vibrating unit (11), and cleans the lip surface (23) to the long side direction by moving the cleaning unit (5) and the cleaning solution supply unit (14) to the long side direction.

Description

[0001] CLEANING DEVICE AND CLEANING METHOD [0002]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cleaning apparatus for cleaning a lip of a molten metal for discharging a coating liquid onto a substrate.

A substrate on which pixels, circuit patterns, and the like are formed is used for a flat panel display such as a liquid crystal display, a solar cell panel, and the like. Such a substrate is formed by, for example, photolithography in which a resist solution (coating liquid) Technology is being used. As a device for applying a coating liquid to a substrate, there is known a coating device having a slit in which a slit is formed. Further, a protrusion called a lip is formed in the lower part of the opening, and the slit is opened at the tip of the lip. According to this coating apparatus, a film of the coating liquid can be formed on the surface of the substrate by discharging the coating liquid from the opening of the lip tip while horizontally moving the plunger against the substrate.

When the coating operation by this coating apparatus is continuously performed for a long time, there is a case where the fixture of the coating liquid or the foreign matter mixed with the coating liquid adheres to the surface of the lip and the surface on which the lip is formed, May affect the discharge of the coating liquid, which may cause coating defects.

A coating device having a cleaning member for cleaning and removing the fixture is shown in Patent Document 1 below. The cleaning member has a shape conforming to the lip and is made of a polymer resin. By moving the cleaning member in the longitudinal direction of the lip while abutting the lip against the lip, And scrape off.

Also, in Patent Document 2 below, there is shown a coating apparatus provided with a cleaning device for cleaning and removing a fixture. This cleaning apparatus is a tank in which a cleaning liquid is stored, and this tank has an ultrasonic vibrator. By ultrasonic vibration of the cleaning liquid in a state in which the lip is immersed (immersed) in the cleaning liquid in the bath, the lip can be ultrasonically cleaned to strongly remove the fixture.

Japanese Patent Application Laid-Open No. 9-187710 Japanese Patent Application No. 2011-153903

However, the cleaning member described in Patent Document 1 has a problem that it is impossible to remove the fixture completely. Specifically, in the case where the amount of the fixture is large, there is a fear that the scraped fixture overflows above the cleaning member and remains in the ribs in the form of a horizontal line. Further, when the fixture is strongly solidified, there is a fear that the fixture can not be sufficiently removed only by the scraping operation.

Further, the cleaning apparatus described in Patent Document 2 has a problem that the cost becomes high. Specifically, in order to strongly ultrasonically clean the entire lip immersed in the cleaning device, it is necessary to arrange a plurality of ultrasonic vibrators in the cleaning device, so that the cost of the cleaning device itself becomes high. Further, since the size of the cleaning device is larger than the size of the detaching device, the size of the coating device is greatly increased by the arrangement of the cleaning device, and the manufacturing cost of the coating device is also increased.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a cleaning device and a cleaning method that can strongly remove a fixture adhering to a lip and can be configured at low cost.

In order to solve the above-described problems, the cleaning apparatus of the present invention comprises: a cleaning unit having an opposite groove facing a lip surface forming a discharge port formed along a longitudinal direction of a nipping portion of a coating device, the cleaning unit being close to the lip surface; A cleaning liquid supply port for supplying a cleaning liquid to be cleaned and a moving means for moving the cleaning unit and the cleaning liquid supply port in the longitudinal direction while moving the cleaning unit and the cleaning liquid supply port in the longitudinal direction by the moving means And a cleaning unit for cleaning the lip surface, wherein the cleaning unit is provided with an ultrasonic vibrator having an ultrasonic vibrator mounted thereon and the opposed grooves formed, and the opposed grooves and the lip surface are brought close to each other, By supplying the cleaning liquid from the cleaning liquid supply port to the formed gap And forming a state in which the lip surface is immersed in the cleaning liquid, and in this state, partial cleaning of the lip surface is performed by ultrasonically vibrating the ultrasonic vibration unit by the ultrasonic vibrator. The lip surface is washed in the longitudinal direction by moving in the longitudinal direction.

According to the above-described cleaning device, the lip surface is ultrasonically cleaned by forming a state in which the lip surface is immersed in the cleaning liquid and cleaning the lip surface by ultrasonic vibrating the ultrasonic vibrator in this state. Therefore, Can be strongly removed. Further, since the cleaning unit can be downsized by partially cleaning the lip surface, the number of ultrasonic vibrators can be reduced and the cost can be reduced. In addition, by cleaning the lip surface in the longitudinal direction by moving the cleaning unit and the cleaning liquid supply port in the longitudinal direction, it is also possible to clean the entire lip surface even when using the above-described miniaturized cleaning unit.

Moreover, the opposing surface which is a surface which opposes the said lip surface of the said opposing groove | channel should just have a surface parallel to the said lip surface.

By doing so, the gap between the opposing groove and the lip surface can be made small as a whole, so that the state in which the lip surface is immersed in the cleaning liquid is formed at a smaller flow rate of the cleaning liquid, and the ultrasonic vibration of the cleaning unit is efficiently And the like. Further, by using the surface tension of the cleaning liquid, which is caused by a reduction in the gap between the opposing groove and the lip surface, it is also easy to cover the root of the lip formed with the lip surface with the cleaning liquid and clean it.

Moreover, the said washing | cleaning unit should just have a washing | cleaning liquid supply part provided with the said washing | cleaning liquid supply port, and the said washing | cleaning liquid supply part should just be connected to the location corresponding to the node of the vibration of the said ultrasonic vibrator.

By doing in this way, it becomes unnecessary to perform a perforation process on an ultrasonic vibration part in order to provide a washing | cleaning liquid supply port, and it becomes easy to make a predetermined vibration to an ultrasonic vibration part, and also the piping connected to a washing | cleaning liquid supply port Since the back can be prevented from ultrasonic vibration, damage to the pipe and the like can be prevented.

It is only necessary to provide a vibration blocking portion between the ultrasonic vibration portion and the cleaning liquid supply portion to prevent transmission of vibration of the ultrasonic vibration portion to the cleaning liquid supply portion.

By doing in this way, the ultrasonic wave can be prevented from the piping connected to the washing | cleaning liquid supply port etc. further.

Moreover, in order to solve the said subject, the washing | cleaning method of this invention has the ultrasonic vibration part in which the opposing groove | channel opposing the lip surface which forms the ejection opening formed along the longitudinal direction of the mold which a coating apparatus has, and wash | cleans close to the said lip surface It is a washing | cleaning method which wash | cleans the said lip surface by the washing | cleaning apparatus which has a unit, the washing | cleaning liquid supply port which supplies the washing | cleaning liquid which wash | cleans the said lip surface, and the moving means which moves the said washing | cleaning unit and the said washing | cleaning liquid supply port to the said longitudinal direction, The lip surface is immersed in the cleaning liquid by supplying the cleaning liquid from the cleaning liquid supply port to a gap formed between the groove and the lip surface in proximity with the groove and the lip surface, and the ultrasonic vibration in this state. Partial washing of the lip surface by ultrasonic vibration of the portion, Furthermore, the said lip surface is wash | cleaned in the said longitudinal direction by moving the said washing | cleaning unit and the said washing | cleaning liquid supply port in the said longitudinal direction. It is characterized by the above-mentioned.

According to the above cleaning method, the lip surface is ultrasonically cleaned by forming a state in which the lip surface is immersed in the cleaning liquid and cleaning the lip surface by ultrasonic vibrating the ultrasonic vibrator in this state. Therefore, Can be strongly removed. Further, since the cleaning unit can be downsized by constituting a part of the lip surface to be cleaned, the cost can be reduced. Further, by cleaning the lip surface in the longitudinal direction by moving the cleaning unit and the rinse solution supply port in the longitudinal direction, it is also possible to clean the whole lip surface even when using the above-mentioned miniaturized cleaning unit.

The surface tension of the cleaning liquid generated between the opposing grooves and the lip surface may form a state of covering the root of the lip formed by the lip surface with the cleaning liquid to ultrasonically clean the lip surface.

By doing so, the ultrasonic cleaning can be carried out up to the origin of the lip, and it is possible to clean so that the fixture does not remain.

According to the cleaning device and the cleaning method of the present invention, it is possible to strongly remove the fixture adhering to the lip with a low-cost construction.

1 is a schematic view of a coating device and is a perspective view.
2 is a schematic view of a cleaning apparatus according to an embodiment of the present invention, and is a perspective view.
3 is a front view and a cross-sectional view of the cleaning apparatus of this embodiment.
4 is a schematic view showing a state in which the cleaning apparatus of this embodiment cleans the lip.
5 is an example of use of the cleaning apparatus of the present embodiment.
6 is a schematic view of a cleaning apparatus in another embodiment.
7 is a schematic view of a cleaning apparatus in another embodiment.

Embodiments related to the present invention will be described with reference to the drawings.

1 is a schematic view of a coating apparatus using the cleaning apparatus of the present invention. The application device 1 is provided with an application section 2 for applying a coating liquid to a substrate W, a transport section 3 for transporting the substrate W, and a lip surface 23 And a cleaning device 4 for cleaning.

The application section 2 has a nest 21 and the nest 21 has therein a slit in which the direction perpendicular to the transport direction of the substrate W by the transport section 3 is a longitudinal direction. In addition, the nipping 21 has a lip 22 at the bottom.

As shown in Fig. 3A, the lip 22 has a shape protruding in a beak-like shape that becomes sharp toward the end from the neck 21 toward the bottom (lower side), and the lip 22 has a shape of 2 Has a lip surface 23 (lip surface 23a and lip surface 23b shown in Fig. 3 (a)).

The lip surface 23 has a longitudinal direction perpendicular to the conveying direction of the substrate W like the slit. A discharge port 24, which is an opening of the slit, is formed between the lip surfaces 23. Here, the coating liquid supplied from the coating liquid supply device (not shown) to the coating portion 2 is discharged from the discharge port 24 through the slit.

The substrate W is conveyed at a predetermined speed by the carry section 3 to discharge the coating liquid from the discharge port 24 when the substrate W passes under the application section 2, A coating film is formed on the substrate W.

The cleaning device 4 cleans the lip surface 23 during the period until the application to the substrate W is finished and the next application to the substrate W is started, Thereby preventing the coating liquid and the foreign matter from sticking to each other.

In the following description, it is assumed that the transport direction of the substrate W is the X-axis direction, the direction perpendicular to the X-axis direction, that is, the longitudinal direction of the lip surface 23 is the Y- The direction orthogonal to the Z-axis direction will be described.

Fig. 2 is a perspective view of the cleaning device 4 in the embodiment of the present invention. The cleaning device 4 is provided with a cleaning unit 5 and a moving means 6. The cleaning unit 5 is brought close to the lip surface 23 and the cleaning device 5, The moving means 6 moves the cleaning unit 5 in the longitudinal direction (Y-axis direction) of the lip surface 23 while cleaning the lip surface 23 of the lip surface 23 while cleaning the lip surface 23, Lt; / RTI >

An ultrasonic oscillator 15 to be described later is attached to the cleaning unit 5. The ultrasonic oscillator 15 vibrates due to a signal from the oscillator 7 electrically connected to the ultrasonic oscillator 15 , Ultrasonic vibration is applied to the cleaning liquid for cleaning the lip surface 23, and the lip surface 23 is ultrasonically cleaned.

Fig. 3 is a front view and a cross-sectional view of the cleaning device 4 of the present embodiment. Fig. 3 (a) is a front view of the cleaning device 4 and Fig. 3 (b) is an AA sectional view of Fig. .

The cleaning unit 5 has an ultrasonic vibration section 11 and a cleaning liquid supply section 12 in the present embodiment. The ultrasonic vibration section 11 is capable of ultrasonic vibration, and the cleaning liquid supply section 12 has a cleaning liquid supply port 14. In this configuration, the cleaning liquid is supplied from the cleaning liquid supply port 14 toward the lip surface 23 while the cleaning unit 5 is close to the lip surface 23 at the time of cleaning the lip surface 23, Is subjected to ultrasonic vibration, ultrasonic vibration is applied to the cleaning liquid, and the lip surface 23 is ultrasonically cleaned.

The ultrasonic vibration section 11 and the cleaning liquid supply section 12 are supported by a vibrator cover 17 to be described later to form an integral cleaning unit 5.

The ultrasonic vibration section 11 is a metal block and opposes the lip surface 23 from below when cleaning the lip surface 23. An opposing groove 13 corresponding to the shape of the lip surface 23 is provided at a portion of the ultrasonic vibration section 11 opposite to the lip surface 23. When the lip surface 23 is to be cleaned, The lips 22 are arranged close to the lip surface 23 so that the lips 22 enter the opposed grooves 13 with a predetermined clearance therebetween.

The shape of the opposing groove 13 has a shape having an opposing face 13a and an opposing face 13b which are planes parallel to the lip face 23a and the lip face 23b in this embodiment as described later.

An ultrasonic vibrator 15 is attached to the ultrasonic vibration section 11. The ultrasonic vibration section 11 is ultrasonically vibrated by the oscillation of the ultrasonic vibrator 15. [

The ultrasonic transducer 15 excites an object based on an oscillation signal from an electrically connected oscillator 7 and has a Langevin type oscillator having an electrode and a piezo element, for example . In the Langevin type oscillator, the piezo element is oscillated by applying a drive voltage to the electrode by the oscillator 7, and oscillates at a predetermined amplitude and frequency.

At the end of the ultrasonic transducer 15 is provided a vibrating part 16 for mounting an object to be vibrated (ultrasonic vibration part 11 in the present embodiment) 16 are ultrasonically vibrated in accordance with the oscillation of the ultrasonic vibrator 15.

The ultrasonic vibrator 15 is housed in the vibrator cover 17 and only the vibrator 16 protrudes from the vibrator cover 17. [ The vibrator cover 17 is connected to the ultrasonic transducer 15 through a connecting portion 18. [

Generally, when an object vibrates at a constant frequency, there is a portion corresponding to a vibration and a portion corresponding to a node, and the amplitude of vibration is maximized at a portion corresponding to the vibration. In addition, the amplitude is zero at the portion corresponding to the node. That is, it does not vibrate. The ultrasonic transducer 15 in this embodiment also has vibrations and nodes, and even if the ultrasonic transducer 15 oscillates at a predetermined frequency, it does not vibrate at all at the node of the vibration.

On the other hand, in the present embodiment, the connecting portion 18 is attached to the node of the vibration of the ultrasonic vibrator 15. That is, even when the ultrasonic vibrator 15 oscillates, the vibration does not propagate to the connecting portion 18 and the vibrator cover 17. When the vibrator cover 17 is attached to the external device, the external device supports the vibrator cover 17 and the ultrasonic vibrator 15 without oscillating the external device, 16 can be ultrasonically vibrated.

In this embodiment, since the vibrator cover 17 is attached to the moving means 6, the moving means 6 can move the cleaning unit 5 without being influenced by the oscillation of the ultrasonic vibrator 15 It is possible to carry it. If the ultrasonic vibration is transmitted to the vibrator cover 17 and the moving means 6 repeats a minute reciprocating motion due to the ultrasonic vibration, the moving means 6 is stuck There is a concern. On the other hand, in the present embodiment, since the vibrator cover 17 does not vibrate, it is possible to prevent the vibration.

The length in the Y-axis direction of the ultrasonic vibration section 11 is shorter than the length in the Y-axis direction of the lip surface 23 and the ultrasonic vibration section 11 can sufficiently propagate the vibration by the ultrasonic vibrator 15 The size is about.

In order to ultrasonically clean the whole of the lip surface 23 when ultrasonic cleaning is performed on the lip surface 23 immersed in the cleaning tank and a cleaning tank capable of accommodating the entire lip 22 is provided, It is necessary to arrange and place the ultrasonic transducer 15 in the Y-axis direction. When the plurality of ultrasonic transducers 15 are arranged side by side in this manner, in order to prevent the ultrasonic transducers 15 from mutually influencing the vibration or being destroyed by vibration, the arrangement of the ultrasonic transducers 15 It was necessary to increase the interval or limit the output.

On the other hand, in the present embodiment, only one ultrasonic vibrator 15 is provided to constitute the cleaning device 4. [ In this way, the cost for preparing the required number of ultrasonic transducers 15 is suppressed, and the output is not restricted, so that the ultrasonic vibrator 15 having a high output power can be provided to make the cleaning force strong .

The cleaning liquid supply unit 12 is a block having a cleaning liquid supply port 14 that is an opening for supplying a cleaning liquid and is provided on both sides in the X axis direction with the ultrasonic vibration unit 11 interposed therebetween. Then, a cleaning liquid is supplied between the ultrasonic vibration section 11 and the lip surface 23 by discharging the cleaning liquid sent from the cleaning liquid tank (not shown) through the piping from the cleaning liquid supply port 14. [

The cleaning liquid supply portion 12 is attached to the vibrator cover 17. That is, the cleaning liquid supply unit 12 is connected to a position corresponding to a node of the vibration of the ultrasonic vibrator 15 through the vibrator cover 17 and the connection unit 18. By doing so, even if the ultrasonic vibrator 15 oscillates as described above, vibration does not propagate to the connecting portion 18 and the vibrator cover 17, and the cleaning liquid supply portion 12 does not vibrate.

In this way, the vibrator cover 17 supports the ultrasonic vibration section 11 and the cleaning liquid supply section 12, and the cleaning unit 5 is integrated.

Here, if the cleaning liquid supply unit 12 vibrates, this vibration propagates to the piping connected to the cleaning liquid supply port 14, which may cause damage to the piping. On the contrary, it is possible to prevent such piping from being damaged by being connected to a position corresponding to a node of the vibration of the ultrasonic vibrator 15 so that the cleaning liquid supply unit 12 does not vibrate.

In addition, a clearance is provided between the cleaning liquid supply portion 12 and the ultrasonic vibration portion 11 arranged in the X-axis direction. By providing the gaps as described above, the vibration of the ultrasonic vibration section 11 is prevented from propagating to the cleaning liquid supply section 12. In the case where the cleaning liquid supply unit 12 is in close contact with the ultrasonic vibration unit 11, not only the vibration is transmitted to the cleaning liquid supply unit 12 but also the vibration frequency of the ultrasonic vibration unit 11 There is a possibility that the operation of ultrasonic vibration of the ultrasonic vibration section 11 may be adversely affected. On the other hand, by providing a clearance as described above, this concern can be prevented.

The cleaning liquid supply port 14 is an opening end of a pipe attached to the cleaning liquid supply portion 12 on both sides of the ultrasonic vibration portion 11 as shown in Fig. And is directed toward the lip surface 23 with respect to the X-axis direction. In addition, a through hole may be provided in the cleaning liquid supply portion 12, and the opening end of the cleaning liquid supply portion 14 may be provided. Further, in the present embodiment, a plurality of cleaning liquid supply ports 14 are provided side by side in the Y axis direction.

The cleaning liquid supply port 14 is connected to a cleaning liquid tank (not shown) through a pipe, and the cleaning liquid sent from the cleaning liquid tank is discharged from each cleaning liquid supply port 14. [

The cleaning liquid supply port 14 is provided at such a height as to enable the discharged cleaning liquid to be supplied to the opposing grooves 13 of the ultrasonic vibration section 11. It is also necessary to prevent the cleaning liquid supply port 14 and the cleaning liquid supply portion 12 from interfering with the detents 21 when the cleaning unit 5 is close to the lip surface 23 and the position of the cleaning liquid supply port 14 The cleaning liquid supply port 14 is provided 1 mm above the upper surface of the ultrasonic vibration section 11 in this embodiment.

In addition, by using the cleaning liquid which has been degassed, a strong cleaning force as described later can be obtained as compared with the case of using a cleaning liquid which has not been degassed.

The moving means 6 is a linear motion unit having a moving axis in the Y-axis direction, and moves the cleaning unit 5 in the Y-axis direction. Any moving mechanism such as a ball screw or a linear stage may be used as the moving means 6, and it may be suitably selected in consideration of a target value of the degree of movement (accuracy) of the cleaning unit 5 and the like.

Further, as described above, the cleaning unit 5 is attached to the moving means 6 via the vibrator cover 17. Thereby, the moving means 6 can move the cleaning unit 5 without being influenced by the oscillation of the ultrasonic vibrator 15, and it is possible to prevent the sticking of the linearly moving mechanism.

In addition to the moving means 6, a Z-direction driving device for moving the cleaning unit 5 in the Z direction may be provided, though not shown. When the lip surface 23 is cleaned, the cleaning unit 5 is moved upward to come close to the lip surface 23, and a process other than cleaning such as application to the substrate W is performed The cleaning unit 5 can be moved downward and separated from the lip surface 23 to avoid interference between the cleaning unit 5 and the lip surface 23. [

It is also possible to provide the Z direction drive device between the cleaning unit 5 and the moving means 6 so that only the cleaning unit 5 moves up and down, (6) may be installed to vertically move together.

When the process other than the cleaning process is being performed, the cleaning unit 5 is retracted in the Y-axis direction to the position where the lip surface 23 is not present above the Z-direction drive device, The cleaning unit 5 moves to the lower side of the lip surface 23 in the Y axis direction so that the cleaning unit 5 and the lip surface 23 come close to each other. It may be installed.

FIG. 4 shows a state in which the lip surface 23 is cleaned by the cleaning device 4 having the above-described configuration.

When the cleaning device 4 cleans the lip surface 23, the cleaning unit 5 is first brought close to the lip surface 23 and the lip surface 23 is set in the opposed groove 13 with the gap d do. The method in which the cleaning unit 5 approaches the lip surface 23 may be such that the cleaning unit 5 moves in the Z-axis direction as described above, and moves in the Y-axis direction.

In this state, the cleaning liquid is supplied from the cleaning liquid supply ports 14 on both sides of the lip 22 in the X-axis direction, so that the cleaning liquid enters the gap d to form the dipped portion 19. Thus, in the dipping section 19, the lip surface 23 is locally immersed in the cleaning liquid.

Then, the oscillation of the ultrasonic vibrator 15 causes the ultrasonic vibration section 11 to undergo ultrasonic vibration. Ultrasonic vibration is applied to the cleaning liquid forming the dipping section 19 and the cleaning liquid is ultrasonically cleaned by the cleaning liquid so that the lipid surface 23 is more strongly adhered to the lip surface 23 than the method of simply spraying the cleaning liquid onto the lip surface 23. [ It is possible to remove the adhered material.

By adjusting the width of the gap d and the supply amount of the cleaning liquid to an appropriate value, surface tension of the cleaning liquid is generated between the opposing groove 13 and the lip surface 23, and as shown in Fig. 4, 22 (the base of the lip 22 with respect to the nest 21) with the cleaning liquid.

In the washing tank system as shown in Patent Document 2, the lip surface 23 is not cleaned only in a region immersed in the cleaning tank. According to this embodiment, by using the surface tension, the upper end It is possible to perform ultrasonic cleaning by holding the dipped portion 19 in a state of being filled with the cleaning liquid even further upward than that of the dipping portion 19,

Further, when the ultrasonic vibration is applied to the cleaning liquid, a phenomenon of splashing of the cleaning liquid occurs. However, the splash cleaning liquid is hardly attached to the nipping 21 by the separation of the lip surface 23 and the opposing groove 13 by the distance d.

The cleaning unit 5 moves in the Y-axis direction by the moving means 6 while the cleaning unit 5 performs the ultrasonic cleaning as described above, whereby the lip surface 23 is cleaned in the longitudinal direction.

In the present embodiment, the opposite groove 13 has a shape having an opposing face 13a and an opposing face 13b, which are planes parallel to the lip face 23a and the lip face 23b. This makes it easier to reduce the gap between the opposing groove 13 and the lip surface 23 as a whole so that the dipping portion 19 can be formed with a smaller flow rate of the cleaning liquid and the damping portion It is possible to efficiently apply the ultrasonic vibration from the ultrasonic vibration section 11 to the cleaning liquid forming the ultrasonic cleaning section 19, thereby obtaining a strong ultrasonic cleaning cleaning force.

Here, in the present embodiment, the end portion of the ultrasonic vibration portion 11 in the Y-axis direction does not have a shape for blocking the cleaning liquid. Therefore, the cleaning liquid which has entered the gap d immediately flows out from the end of the ultrasonic vibration section 11 in the Y-axis direction.

Therefore, when cleaning the lip surface 23 in the present embodiment, the cleaning liquid is continuously supplied from the cleaning liquid supply port 14 while continuously flowing out from the end of the ultrasonic vibration section 11.

By doing so, the amount of the cleaning liquid supplied from the cleaning liquid supply port 14 per unit time is controlled with respect to the amount of the cleaning liquid discharged per unit time, even when the cleaning liquid immediately flows out, thereby securing the dipped portion 19 It is possible. It is also possible to cover the source of the lip 22 with the cleaning liquid by the surface tension of the cleaning liquid.

By supplying the cleaning liquid from the cleaning liquid supply port 14 and forming the dipped portion 19 in the state where the cleaning liquid immediately flows out as described above, the dipped portion 19 is always supplied from the cleaning liquid supply port 14 And is formed of a cleaning liquid which is not in contact with the outside air.

In the washing tank system as shown in Patent Document 2, even when the washing liquid is thoroughly degassed before supplying the washing liquid, the washing liquid absorbs air while the washing liquid is supplied in a large amount, and sufficient deaeration effect can not be obtained. When air is dissolved in the cleaning liquid, the dissolved air deteriorates the generation of cavitation in the ultrasonic cleaning liquid, so that the cleaning power is weakened.

On the other hand, as in the present embodiment, since the dipping portion 19 is always formed of the cleaning liquid which is not in contact with the outside air at all times, the ultrasonic cleaning can be always performed with the cleaning liquid sufficiently deaerated, It is possible.

Since the fixed object removed from the lip surface 23 also flows out from the ultrasonic vibration section 11 immediately without staying on the ultrasonic vibration section 11, the damping section 19 is always formed with a clean cleaning liquid, It is possible to prevent the deterioration of the washing power due to losing.

The ultrasonic vibration section 11 may generate heat by ultrasonic vibration. However, the ultrasonic vibration section 11 also has an effect of cooling the ultrasonic vibration section 11 by continuously supplying and discharging the cleaning liquid.

Here, the clearance d needs to be a width at which the cleaning liquid can easily enter, and a narrow gap d within the range of filling the clearance d can reduce the supply amount of the cleaning liquid necessary for forming the dipping section 19, The vibration of the eccentric portion 11 can be efficiently propagated to the cleaning liquid of the dipping portion 19 and the lip surface 23 can be strongly ultrasonically cleaned. In this embodiment, the gap d of about 1 mm was optimum.

Next, Fig. 5 shows an example of use of the cleaning device 4 of the present embodiment.

By the ultrasonic cleaning of the lip surface 23 by the cleaning device 4 as described above, it is possible to strongly remove the adhered matter of the lip surface 23. In addition to this, in combination with a conventional cleaning device 8 for abutting a member made of a resin to the lip surface 23 to scrape off the fixture, most of the fixture is removed from the cleaning device, (4). By doing so, it is possible to efficiently remove the fixture without excessively comparing the amount of fixture to be cleaned by the cleaning device 4 with the amount of the cleaning solution used in the cleaning device 4. [

Further, after cleaning with the cleaning device 4, the cleaning liquid may remain on the lip surface 23 in some cases. Therefore, it is also possible to further provide a blow device 9 for blowing gas to remove the cleaning liquid.

The blowing device 9 has, for example, an ejection port through which a gas is ejected, and ejects a gas supplied from a gas supply source (not shown) from the ejection port toward the lip surface 23.

When the cleaning device 4, the cleaning device 8 and the blowing device 9 are used together, they are mounted together with the moving means 6 of the cleaning device 4, for example, Move. When the fixture of the lip surface 23 is to be removed, these are moved in one direction and each part of the lip surface 23 passes firstly through the cleaning device 8 and then through the cleaning device 4 And finally, the blowing device 9 is passed through.

By doing so, when the fixture 31 is adhered to the lip surface 23, the fixture 31 is removed in the following procedure.

First, the fixture 31 is scraped off by the cleaning device 8. In this case, normally, the fixture 31 is scraped down to the lip surface 23, but when the fixture 31 is large, the fixture 31 overflows the cleaning device 8, The remaining fixture 32 remains. In addition, the fixture 31, which could not be scratched due to other reasons, remains as the remaining fixture 32.

Next, the state in which the lip surface 23 is locally immersed in the cleaning liquid is formed by the cleaning device 4, and ultrasonic cleaning is carried out to strongly remove the remaining fixture 32. The removed remaining fixture 32 is washed off along the lip surface 23 together with the cleaning liquid. By this cleaning device 8 and the cleaning device 4, the fixture 31 and the remaining fixture 32 are removed, but the cleaning solution used for the ultrasonic cleaning remains on the lip surface 23 as the remaining cleaning solution 33 .

Finally, the blowing device 9 blows gas to the lip surface 23 to blow off the remaining cleaning liquid 33. [ It is difficult to remove by the blow while the state of the fixture 31 is maintained. However, after passing through the cleaning device 4, only the remaining cleaning liquid 33 remains on the lip surface 23, , The fixture 31 and the cleaning liquid do not remain on the lip surface 23.

By moving the cleaning device 4, the cleaning device 8 and the blow device 9 together in the Y-axis direction to perform the removal operation of the fixture 31 with respect to the entire lip surface 23, It is possible to cleanly remove the fixture 31 of the entire lip surface 23.

Next, a cleaning apparatus in another embodiment is shown in Fig.

6 (a) shows an example in which a spacer 34 is provided between the ultrasonic vibration section 11 and the cleaning liquid supply section 12. As shown in Fig. In the embodiment shown in Fig. 3 (a), since the gap is provided between the ultrasonic vibration section 11 and the cleaning liquid supply section 12, the cleaning liquid is separated from the gap and the ultrasonic vibration section 11, the lip surface 23, The amount of cleaning liquid supplied to the clearance of the cleaning liquid is slightly reduced. On the other hand, in FIG. 6 (a), the gap is blocked by the spacer 34, thereby supplying the cleaning liquid to the clearance between the ultrasonic vibration portion 11 and the lip surface 23 more efficiently.

In this case, it is not preferable that the vibration of the ultrasonic vibration section 11 propagates to the cleaning liquid supply section 12 as described above. Further, the cleaning liquid supply section 12 influences the vibration characteristics of the ultrasonic vibration section 11 It is also not desirable.

Therefore, in this case, the spacer 34 also needs to function as a " vibration blocking portion " which prevents the ultrasonic vibration portion 11 and the cleaning liquid supply portion 12 from mutually influencing the vibration. Therefore, it is preferable that the spacers 34 are formed of a material having low rigidity such as a sponge.

In the embodiment of Fig. 3 (a) in which a gap is provided between the ultrasonic vibration section 11 and the cleaning liquid supply section 12, it can be said that the gap functions as the vibration isolation section.

When a gap is not provided between the ultrasonic vibration section 11 and the cleaning liquid supply section 12 and the ultrasonic vibration section 11 and the cleaning liquid supply section 12 are directly connected without using the spacer 34 In order to prevent the vibration of the ultrasonic vibration section 11 from being transmitted to the piping for supplying the cleaning liquid and to prevent the cleaning liquid supply section 12 from affecting the vibration characteristics of the ultrasonic vibration section 11, The cleaning liquid supply unit 12 needs to be formed of a material having a low rigidity such as a resin.

Fig. 6 (b) shows an example in which the cleaning liquid supply port 14 is provided directly in the ultrasonic vibration section 11. Fig. By adopting this form, it is possible to more efficiently supply the cleaning liquid to the gap between the ultrasonic vibration section 11 and the lip surface 23.

In this case, since the piping for supplying the cleaning liquid is directly connected to the ultrasonic vibration section 11, it is possible to prevent the piping from being damaged by the oscillation propagated from the ultrasonic vibration section 11, It is also possible to simplify the structure of the cleaning device 4 without providing the separate cleaning liquid supply part 12. [

Next, Fig. 7 shows a cleaning apparatus in another embodiment relating to the shape of the opposing groove 13. As shown in Fig.

As described above, in the embodiment shown in Fig. 3 (a), the opposing groove 13 is in the shape having the opposing face 13a and the opposing face 13b parallel to the lip face 23a and the lip face 23b The ultrasonic vibration section 11 and the lip face 23 (see FIG. 7 (a) and FIG. 7 (b) 23, it is possible to realize the object of the present invention, and it is not necessarily required that the counter grooves 13 have a surface parallel to the lip surface 23 .

3 (a), the clearance between the opposing groove 13 and the lip face 23 is made small as a whole when the cleaning unit 5 is close to the lip face 23 as described above It is possible to form the dipping section 19 with a smaller flow rate of the cleaning liquid and to efficiently apply the ultrasonic vibration from the ultrasonic vibration section 11 to the cleaning liquid forming the damping section 19 It is possible to obtain a cleaning power of a strong ultrasonic cleaning.

7 (c), ribs 35 are provided at both ends in the X-axis direction of the ultrasonic vibration section 11, and the cleaning liquid can be easily stored in the opposing grooves 13 caught by the ribs 35 It is also acceptable. However, in this case, it is not preferable that the fixture washed away from the lip surface 23 remains in the opposite groove 13 due to the height of the rib 35 being too high.

With the cleaning device and the cleaning method as described above, it is possible to strongly remove the fixture adhered to the lip with a low-cost construction.

1: Coating device 2: Coating part
3: Carrier 4: Cleaning device
5: Cleaning unit 6: Moving means
7: Oscillator 8: Cleaning device
9: blow device 11: ultrasonic vibration part
12: cleaning liquid supply unit 13: opposed groove
13a: facing surface 13b: facing surface
14: Cleaning liquid supply port 15: Ultrasonic vibrator
16: vibration mount 17: ultrasonic vibrator cover
18: connection part 19:
21: detention 22: lip
23: Lip surface 23a: Lip surface
23b: lip surface 24: discharge port
31: Fixture 32: Remaining fixture
33: Residual cleaning liquid 34: Spacer
35: rib d: clearance
W: substrate

Claims (6)

A cleaning unit having an opposite groove facing a lip surface forming a discharge port formed along a longitudinal direction of a mouth of the applicator,
A cleaning liquid supply port for supplying a cleaning liquid for cleaning the lip surface,
The cleaning unit and the cleaning liquid supply port are moved in the longitudinal direction,
And a cleaning device for cleaning the lip surface while moving the cleaning unit and the cleaning liquid supply port in the longitudinal direction by the moving unit,
The cleaning unit includes an ultrasonic vibrator having an ultrasonic vibrator mounted thereon and an opposing groove formed therein,
The lip surface is immersed in the cleaning liquid by bringing the opposite groove and the lip surface into close proximity and supplying the cleaning liquid from the cleaning liquid supply port to a gap formed between the opposing groove and the lip surface. In this state, partial cleaning of the lip surface is performed by ultrasonically vibrating the ultrasonic vibration unit by the ultrasonic vibrator, and further, the lip surface is moved by moving the cleaning unit and the cleaning liquid supply port in the longitudinal direction. The cleaning apparatus, characterized in that the cleaning in the longitudinal direction. The method of claim 1,
Wherein the opposing face, which is a face opposing the lip face of the opposite groove, has a plane parallel to the lip face. 3. The method according to claim 1 or 2,
The said washing | cleaning unit has the washing | cleaning liquid supply part provided with the said washing | cleaning liquid supply port, The said washing | cleaning liquid supply part is connected to the location corresponding to the node of the vibration of the said ultrasonic vibrator, The washing | cleaning apparatus characterized by the above-mentioned. The method of claim 3,
Wherein a vibration blocking portion is provided between the ultrasonic vibration portion and the cleaning liquid supply portion so as to prevent transmission of vibration of the ultrasonic vibration portion to the cleaning liquid supply portion. A cleaning unit having an ultrasonic vibration portion having an opposing groove formed opposite to a lip surface forming a discharge port formed along a longitudinal direction of a nipping portion of a coating device,
A cleaning liquid supply port for supplying a cleaning liquid for cleaning the lip surface,
The cleaning unit and the cleaning liquid supply port are moved in the longitudinal direction,
And a cleaning device for cleaning the lip surface,
And a cleaning liquid is supplied from the cleaning liquid supply port to a gap formed by the opposing groove and the lip face to bring the lip face into a state in which the lip face is immersed in the cleaning liquid, Characterized in that the ultrasonic vibrator is ultrasonically vibrated to partially clean the lip surface and further to move the cleaning unit and the cleaning liquid supply port in the longitudinal direction to clean the lip surface in the longitudinal direction, Way. The method of claim 5,
Wherein a surface of the lip formed by the lip surface is covered with a cleaning liquid by surface tension of a cleaning liquid generated between the opposed grooves and the lip surface, and the lip surface is ultrasonically cleaned.

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