CN103506238A - Cleaning device and cleaning method - Google Patents
Cleaning device and cleaning method Download PDFInfo
- Publication number
- CN103506238A CN103506238A CN201310244298.6A CN201310244298A CN103506238A CN 103506238 A CN103506238 A CN 103506238A CN 201310244298 A CN201310244298 A CN 201310244298A CN 103506238 A CN103506238 A CN 103506238A
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- CN
- China
- Prior art keywords
- cleaning solution
- labial surface
- washing
- solution supply
- ultrasonic vibration
- Prior art date
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0254—Coating heads with slot-shaped outlet
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
- B05B15/50—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter
- B05B15/55—Arrangements for cleaning; Arrangements for preventing deposits, drying-out or blockage; Arrangements for detecting improper discharge caused by the presence of foreign matter using cleaning fluids
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B11/00—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/06—Cleaning involving contact with liquid using perforated drums in which the article or material is placed
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B2201/00—Indexing scheme associated with B06B1/0207 for details covered by B06B1/0207 but not provided for in any of its subgroups
- B06B2201/70—Specific application
- B06B2201/71—Cleaning in a tank
Abstract
The invention provides a cleaning device and a cleaning method which can forcefully remove adhesive matter on a mouth and is low in cost. The cleaning device (4) comprising a cleaning unit (5), and a cleaning solution supply mouth (14) which supplies a cleaning solution for cleaning a mouth surface (23), the mouth surface is cleaned through a moving device (6) while the cleaning unit and the cleaning solution supply mouth move towards a long dimension direction of the mouth surface, the cleaning unit comprises an ultrasonic vibrating part (11) on which an ultrasonic vibrator (15) is mounted and opposite grooves are formed (13), by enabling the opposite grooves to approach the mouth surface, and supplying the cleaning solution from the cleaning solution supply mouth to a gap between the opposite grooves and the mouth surface, a dipping part (19) is formed, under such a state, partial cleaning of the mouth surface is performed by generating ultrasonic wave vibration by the ultrasonic wave vibrating part, and by enabling the cleaning unit and the cleaning solution supply mouth to move towards the long dimension direction, the mouth surface is cleaned along the long dimension direction..
Description
Technical field
The present invention relates to the wash mill to washing for discharge the lip of the tube head of coating fluid to substrate.
Background technology
The upper substrate that is formed with pixel, circuit pattern etc. that uses such as the flat-panel monitors such as liquid crystal display, solar battery panel, such substrate is that the photoetching technique by carrying out after painting erosion resistant agent liquid (coating fluid) is for example manufactured.And as coating fluid being coated on to the device of substrate, known having has the apparatus for coating of tube head, is formed with slit in its tube head inside.In addition, in the bottom of this tube head, be formed with the protuberance that is referred to as lip, at the front opening of this lip, have above-mentioned slit.By this apparatus for coating, the opening from lip front end when tube head is moved horizontally with respect to substrate is discharged coating fluid, can on substrate surface, form the film of coating fluid.
If long-time continuous is carried out the coating operation by this apparatus for coating, the solidfied material of coating fluid or sneak in the adhesion that is referred to as foreign matter of coating fluid and adhere to lip front end and form on the face etc. of lip, these adhesions affect the discharge of coating fluid, have the misgivings that coating defects occurs.
In following patent documentation 1, record the apparatus for coating with cleaning part, this cleaning part is used for cleaning and removing this adhesion.This cleaning part has the shape of closing with lips, and consists of macromolecule resin, by this cleaning part long dimensional directions of labiad under the state with lip butt is moved, thus the adhesion wiping of lip is got rid of.
In addition, in following patent documentation 2, record the apparatus for coating that comprises wash mill, this wash mill is used for washing removal adhesion.This wash mill is the groove that accumulates cleaning solution, and this groove has ultrasonic oscillator.In addition, lip is immersed under the state of the cleaning solution in groove, by making cleaning solution produce ultrasonic vibration, lip is carried out to ultrasonic washing, can remove forcefully adhesion.
Prior art document
Patent documentation
Unexamined Patent 9-187710 communique
Patent 2011-153903 communique
Summary of the invention
But can there is the problem that can not remove adhesion completely in the cleaning part of recording in above-mentioned patent documentation 1.Particularly, when the amount of adhesion is many, exists and overflowed above cleaning part by the adhesion of wiping, exist on lip with the residual worry of cross rib shape.In addition, when adhesion is strongly adhered, the worry of adhesion can not be only removed in existence fully with wiping action.
There is the problem that cost is high in the wash mill of recording in above-mentioned patent documentation 2 in addition.Particularly, in order to carry out forcefully ultrasonic washing to being submerged in the whole lip of wash mill, need on wash mill, configure a plurality of ultrasonic oscillators, so the cost of wash mill itself uprises.In addition, because the size of wash mill is more than tube head size, therefore the size of the configuration apparatus for coating by wash mill significantly increases, so the manufacturing cost of apparatus for coating also can increase.
The present invention makes in view of the above problems, and its object is to provide a kind of wash mill and washing methods, can remove forcefully the adhesion adhering on lip, and can form cheap structure.
In order to solve above-mentioned problem, wash mill of the present invention, is characterized in that, comprise: washing unit, comprise subtend groove, the labial surface of the outlet that it forms with the long dimensional directions that is formed with the tube head that has along apparatus for coating is relative and put, and described washing unit and this labial surface are approaching, cleaning solution supply port, it is supplied with for washing the cleaning solution of described labial surface, mobile device, described washing unit and described cleaning solution supply port are moved to described long dimensional directions, and, by described mobile device, described washing unit and described cleaning solution supply port when moving, described long dimensional directions are washed to described labial surface, wherein, described washing unit comprises ultrasonic vibration portion, in described ultrasonic vibration portion, ultrasonic oscillator is installed, and be formed with described subtend groove, by described subtend groove and described labial surface are approached, and to the gap forming between described subtend groove and described labial surface, supply with cleaning solution from described cleaning solution supply port, form thus described labial surface and be submerged in the state in cleaning solution, and by described ultrasonic oscillator, make described ultrasonic vibration portion produce ultrasonic vibration under this state, carry out thus the part washing to described labial surface, and then by described washing unit and described cleaning solution supply port are moved to described long dimensional directions, described labial surface is washed along described long dimensional directions thus.
According to above-mentioned wash mill, form the state that labial surface is submerged in cleaning solution, and by making ultrasonic vibration portion produce ultrasonic vibration, labial surface is washed under this state, labial surface, by ultrasonic washing, therefore can be removed the adhesion adhering on labial surface forcefully thus.In addition, by its structure being made to the structure of the part washing of carrying out labial surface, can make to wash unit small-sized, therefore can reduce the quantity of ultrasonic oscillator, can form structure cheaply.In addition, by making to wash unit and cleaning solution supply port, to long dimensional directions, move to make labial surface to be washed along long dimensional directions, even also can wash whole labial surface while using thus the washing unit of above-mentioned miniaturization.
In addition, preferably, as the subtend face of the described subtend groove of and face that put relative with described labial surface, be the face parallel with described labial surface.
Like this, can make the gap integral body of subtend groove and labial surface diminish, therefore can form the state that labial surface is immersed in cleaning solution by enough cleaning solution flows still less, and, can more effectively to this cleaning solution, give the ultrasonic vibration of washing unit.In addition, utilize the surface tension of the cleaning solution that the gap smaller by subtend groove and labial surface produces, after the root that was communicated with the lip that labial surface forms can cover with cleaning solution, wash and also can become easy.
In addition, preferably, described washing unit comprises the cleaning solution supply unit with described cleaning solution supply port, and described cleaning solution supply unit is connected with the part that is equivalent to the node of oscillations of described ultrasonic oscillator.
Like this, in ultrasonic vibration portion without the Drilling operation that carries out implementing for cleaning solution supply port is set, therefore easily make ultrasonic vibration portion produce regulation vibration, and, because the pipe arrangement that can prevent from being connected with cleaning solution supply port etc. produces ultrasonic vibration, therefore can prevent that pipe arrangement etc. is impaired.
In addition, preferably, between described ultrasonic vibration portion and described cleaning solution supply unit, be provided with vibration shielding part, its Vibration propagation that shields described ultrasonic vibration portion is to described cleaning solution supply unit.
Like this, can further prevent that the pipe arrangement that is connected with cleaning solution supply port etc. from producing ultrasonic vibration.
In addition, in order to solve above-mentioned problem, washing methods of the present invention, it is characterized in that, by following wash mill, labial surface is washed, described wash mill comprises: washing unit, comprises the ultrasonic vibration portion that is formed with subtend groove, the labial surface of the outlet that described subtend groove forms with the long dimensional directions that is formed with the tube head that has along apparatus for coating is relative and put, and described washing unit and this labial surface approaching; Cleaning solution supply port, it is supplied with for washing the cleaning solution of described labial surface; Mobile device, makes described washing unit and described cleaning solution supply port move to described long dimensional directions; Wherein, by described subtend groove and described labial surface are approached, from described cleaning solution supply port, to the gap forming between described subtend groove and described labial surface, supply with cleaning solution, form thus described labial surface and be submerged in the state in cleaning solution, and under this state by making described ultrasonic vibration portion produce ultrasonic vibration, carry out thus the part washing to described labial surface, and then by described washing unit and described cleaning solution supply port are moved to described long dimensional directions, along described long dimensional directions, described labial surface is washed thus.
According to above-mentioned washing methods, form the state that labial surface is submerged in cleaning solution, and by making ultrasonic vibration portion produce ultrasonic vibration, labial surface is washed under this state, labial surface, by ultrasonic washing, therefore can be removed the adhesion adhering on labial surface forcefully thus.In addition, by its structure being made to the structure of the part washing of carrying out labial surface, unit small-sized can be made to wash, therefore structure cheaply can be formed.In addition, by making to wash unit and cleaning solution supply port, to long dimensional directions, move along long dimensional directions labial surface is washed, even also can wash whole labial surface while using thus the washing unit of above-mentioned miniaturization.
In addition, preferably, by the surface tension of the cleaning solution that produces between described subtend groove and described labial surface, form and be communicated with the state that the root of the lip that described labial surface forms can cover with cleaning solution, to described labial surface, carry out ultrasonic washing.
Like this, the root that can connect lip can carry out ultrasonic washing, and further can wash in the mode of residual adhesion not.
According to wash mill of the present invention and washing methods, can enough cheap structures remove forcefully the adhesion adhering on lip.
Accompanying drawing explanation
Fig. 1 is the approximate three-dimensional map of apparatus for coating;
Fig. 2 is the approximate three-dimensional map of the wash mill of an embodiment of the invention;
Fig. 3 is front view and the sectional view of the wash mill of present embodiment;
Fig. 4 washs the skeleton diagram of the state of lip for representing the wash mill of present embodiment;
Fig. 5 is the example of the wash mill of present embodiment;
Fig. 6 is the skeleton diagram of the wash mill of another embodiment;
Fig. 7 is the skeleton diagram of the wash mill of another embodiment.
Drawing reference numeral explanation
1 apparatus for coating
2 coating parts
3 delivery section
4 wash mills
5 washing unit
6 mobile devices
7 oscillators
8 clearing apparatus
9 air-blast devices
11 ultrasonic vibration portions
12 cleaning solution supply units
13 subtend grooves
13a subtend face
13b subtend face
14 cleaning solution supply ports
15 ultrasonic oscillators
16 vibration assigning unit
17 ultrasonic oscillator shells
18 connecting portions
19 dipping portions
21 tube heads
22 lips
23 labial surfaces
23a labial surface
23b labial surface
24 outlets
31 adhesions
32 residual adhesions
33 residual cleaning solutions
34 pads
35 ribs
D gap
W substrate
The specific embodiment
Accompanying drawings embodiments of the present invention.
Fig. 1 is the skeleton diagram that utilizes the apparatus for coating of wash mill of the present invention.Apparatus for coating 1 comprises: coating part 2, is coated on coating fluid on substrate W; Delivery section 3, for delivery of substrate W; Wash mill 4 of the present invention, for washing labial surface 23 described later.
As shown in Fig. 3 (a) of explanation in the back, lip 22 has from tube head 21 to downwards with the outstanding shape of mouth shape of point point, and this lip 22 has the labial surface 23 (the labial surface 23a shown in Fig. 3 (a) and labial surface 23b) of two inclinations.
The same with above-mentioned slit, labial surface 23 also, using the vertical direction of the throughput direction with substrate W as long dimensional directions, is formed with outlet 24 between these labial surfaces 23, and it is as the peristome of above-mentioned slit.At this, the coating fluid that never illustrated coating liquid supplying device is supplied to coating part 2 is by discharging from described outlet 24 after above-mentioned slit.
Therefore, when passing through the below of delivery section 3 described substrate W process coating part 2 with fixing speed conveying substrate W, from described outlet 24, discharge coating fluids, on substrate W, form coated film thus.
In addition, in the following description, using the throughput direction of substrate W as X-direction, using direction vertical with X-direction on horizontal plane, be the long dimensional directions of labial surface 23 as Y direction, with X-direction and Y direction all vertical direction as Z-direction, describe.
Fig. 2 is the stereogram of the wash mill 4 of an embodiment of the invention.Wash mill 4 comprises washing unit 5 and mobile device 6, by washing unit 5, to labial surface 23, approach, when the approaching 4 pairs of labial surfaces 23 of part wash mill in this washing unit 5 wash, mobile device 6 makes to wash unit 5 to long dimensional directions (Y direction) movement of labial surface 23, and labial surface 23 is washed along long dimensional directions thus.
In addition, on washing unit 5, ultrasonic oscillator 15 described later is installed, this ultrasonic oscillator 15 is that the signal of the oscillator 7 by being electrically connected to this ultrasonic oscillator 15 produces vibration, apply ultrasonic vibration thus, and then labial surface 23 is by ultrasonic washing to being used for washing the cleaning solution of labial surface 23.
Fig. 3 is front view and the sectional view of the wash mill 4 of present embodiment, and Fig. 3 (a) is the front view of wash mill 4, and Fig. 3 (b) is the A-A direction sectional view of Fig. 3 (a).
Wash in the present embodiment unit 5 and there is ultrasonic vibration portion 11 and cleaning solution supply unit 12.Ultrasonic vibration portion 11 can produce ultrasonic vibration, and cleaning solution supply unit 12 has cleaning solution supply port 14.In this structure, when labial surface 23 is washed, in washing unit 5, under the approaching state of labial surface 23, from cleaning solution supply port 14, to labial surface 23, supply with cleaning solution, meanwhile ultrasonic vibration portion 11 produces ultrasonic vibration, thus cleaning solution is applied to ultrasonic vibration, labial surface 23 is carried out to ultrasonic washing.
In addition, ultrasonic vibration portion 11 and cleaning solution supply unit 12 are supported by oscillator shell described later, form thus whole washing unit.
As described later, described subtend groove 13 has the shape that comprises subtend face 13a and subtend face 13b in the present embodiment, and described subtend face 13a is the face parallel with labial surface 23a, and described subtend face 3b is the face parallel with labial surface 23b.
In addition, ultrasonic oscillator 15 is installed in ultrasonic vibration portion 11, by the vibration of this ultrasonic oscillator 15, ultrasonic vibration portion 11 produces ultrasonic vibration.
On this ultrasonic oscillator 15 end, be provided with for the vibration assigning unit 16 of vibration object (being ultrasonic vibration portion 11 in the present embodiment) is installed, be installed on the object of this vibration assigning unit 16 along with ultrasonic vibration is carried out in the vibration of ultrasonic oscillator 15.
In addition, ultrasonic oscillator 15 is accommodated in oscillator shell 17, just vibrates assigning unit 16 outstanding from oscillator shell 17.In addition, oscillator shell 17 is connected by connecting portion 18 with ultrasonic oscillator 15.
At this, conventionally when object vibrates with assigned frequency generation, exist and be equivalent to the antinode part of vibration and the node part of vibrating, maximum at the amplitude of the antinode partial vibration that is equivalent to vibrate.In addition, at the amplitude that is equivalent to the node partial vibration of vibration, become zero, that is, do not vibrate.Also there is the antinode of vibration and the node of vibration in the ultrasonic oscillator 15 of present embodiment, even when ultrasonic oscillator 15 vibrates with assigned frequency, in the node part of vibration, does not also vibrate completely.
To this, in the present embodiment, above-mentioned connecting portion 18 is installed in the node part of vibration of ultrasonic oscillator 15.That is, though ultrasonic oscillator 15 vibrations, but vibration can not propagate on connecting portion 18 and oscillator shell 17.And, by this oscillator shell 17, being installed on external equipment, vibration can not propagate into this external equipment thus, and this external equipment will support oscillator shell 17 and ultrasonic oscillator 15, can only allow and vibrate the object generation ultrasonic vibration of installing in assigning unit 16.
In addition, this oscillator shell 17 is installed on mobile device 6 in the present embodiment, so mobile device 6 can be carried washing unit 5 under the impact that is not subject to ultrasonic oscillator 15 vibrations.If ultrasonic vibrations propagate is to oscillator shell 17, mobile device 6 has the misgivings that produce explosion on mobile device 6 when being subject to the impact of this vibration and carrying out small double vibrations repeatedly.Corresponding with it, in the present embodiment because oscillator shell 17 does not vibrate, therefore can prevent the generation of this explosion.
In addition, the length of the Y direction of the Length Ratio labial surface 23 of the Y direction of ultrasonic vibration portion 11 is short, and its length is made the size of the degree that ultrasonic vibration portion 11 can propagate the vibration producing by ultrasonic oscillator 15 cmpletely.
At this, if be provided with the sink that can take in whole lip 22, and when impregnated in the labial surface 23 of this sink and carry out ultrasonic washing, for whole labial surface 23 is carried out to ultrasonic washing forcefully, need in Y direction, prepare and configure a plurality of ultrasonic oscillators 15.In addition, when a plurality of ultrasonic oscillators 15 are so arranged side by side, in order to prevent that these ultrasonic oscillators 15 from occurring generation of vibration impact or situation affected by vibration and destroyed each other, the configuration space of ultrasonic oscillator 15 need to be done to large or restriction output.
To this, be only provided with in the present embodiment a ultrasonic oscillator 15 and formation wash mill 4.Thus, not only can save for preparing the cost of the ultrasonic oscillator 15 of requirement, and need not limit output, therefore can strengthen washing force by the ultrasonic oscillator 15 of high output is set.
Cleaning solution supply unit 12 is the modules with cleaning solution supply port 14, and described cleaning solution supply port 14 is openings of supplying with cleaning solution, and described cleaning solution supply unit 12 clips on the both sides that ultrasonic vibration portion 11 is arranged on X-direction.In addition, the cleaning solution that never illustrated washing lotion box is supplied with by pipe arrangement is discharged from cleaning solution supply port 14, cleaning solution is supplied between ultrasonic vibration portion 11 and labial surface 23 thus.
This cleaning solution supply unit 12 is installed on oscillator shell 17.That is, cleaning solution supply unit 12 is partly connected with the node that is equivalent to the vibration of ultrasonic oscillator 15 with connecting portion 18 by oscillator shell 17.By like this, as previously described, even if ultrasonic oscillator 15 vibrates, but vibrate, can not propagate on connecting portion 18 and oscillator shell 17, so cleaning solution supply unit 12 can not vibrate yet.
In addition, its form is the form that oscillator shell 17 supports ultrasonic vibration portion 11 and cleaning solution supply unit 12 thus, and washing unit 5 becomes one.
At this, if during cleaning solution supply unit 12 vibration, have this Vibration propagation to the pipe arrangement being connected with cleaning solution supply port 14 and the impaired misgivings of described pipe arrangement.To this, by making cleaning solution supply unit 12 be connected with it and not vibrate with the node of oscillations place that is equivalent to ultrasonic oscillator 15, can prevent the impaired of such pipe arrangement thus.
In addition, between the cleaning solution supply unit 12 being arranged side by side and ultrasonic vibration portion 11, be provided with gap in X-direction.By such gap is set, the vibration of ultrasonic vibration portion 11 can not propagate on cleaning solution supply unit 12.If, when cleaning solution supply unit 12 is close to ultrasonic vibration portion 11, have not only vibration and can propagate on cleaning solution supply unit 12, and the resonant frequency by cleaning solution supply unit 12 ultrasonic vibration portions 11 changes etc. the action of the ultrasonic vibration of ultrasonic vibration portion 11 is produced to dysgenic worry.To this, can prevent described worry by gap is set as mentioned above.
Cleaning solution supply port 14 is openends of the pipe installed on the cleaning solution supply unit 12 of ultrasonic vibration Bu11 both sides as shown in Fig. 3 (a) in the present embodiment, in X-direction towards the direction of labial surface 23.In addition, can also be, on cleaning solution supply unit 12, through hole is set, using its openend as cleaning solution supply port 14.In addition, in the present embodiment, cleaning solution supply port 14 is provided with side by side a plurality of in Y direction.
These cleaning solution supply ports 14 are connected by pipe arrangement with not shown washing lotion box, and the cleaning solution of supplying with from this washing lotion box is discharged from each cleaning solution supply port 14.
In addition, cleaning solution supply port 14 is arranged in and discharged cleaning solution can be supplied to the height of the subtend groove 13 of ultrasonic vibration portion 11.In addition, although washing unit 5 also needs cleaning solution supply port 14 and cleaning solution supply unit 12 not to disturb tube head 21 when labial surface 23 approaches, if also can have problems but cleaning solution supply port 14 position is too high, therefore in the present embodiment cleaning solution supply port 14 is arranged on the position of the 1mm degree above that exceeds ultrasonic vibration portion 11.
In addition, cleaning solution is used degassed cleaning solution, does not have the situation of degassed cleaning solution to compare with use, can access strong washing force as described later.
In addition, as previously described, washing unit 5 is arranged on this mobile device 6 by oscillator shell 17.Thus, mobile device 6 in the situation that be not subject to this ultrasonic oscillator 15 vibration impact can by washing unit 5 move, can prevent the explosion of above-mentioned straight-line motion mechanism.
In addition, although not shown, except mobile device 6, the Z direction drive unit that washing unit 5 is moved to Z direction can also be set.By this Z direction drive unit is set, when labial surface 23 is washed, washing unit 5 is moved upward and approaches to labial surface 23, when operation in addition of the washings such as coating of implementing substrate W, washing unit 5 moved downwards and leave from labial surface 23, can prevent from thus washing the interference of unit 5 and labial surface 23.
In addition, this Z direction drive unit is arranged between washing unit 5 and mobile device 6, can according to only by washing unit 5 up and down mobile mode arrange, also can according to by washing unit 5 together with mobile device 6 up and down mobile mode arrange.
In addition, such Z direction drive unit can be set, change into mobile device 6 is arranged in the following manner,, during operation beyond implementing washing, till washing unit 5 retreats to top and do not have labial surface 23 position along Y direction, when washing, till washing unit 5 moves to the below of labial surface 23 along Y direction, be thus washing unit 5 and the approaching state of labial surface 23.
Fig. 4 represents the state washing by having 4 pairs of labial surfaces 23 of wash mill of the structure shown in above.
When 4 pairs of labial surfaces 23 of wash mill wash, first, washing unit 5 approaches to labial surface 23, be labial surface 23 be accommodated in subtend groove 13 and and subtend groove 13 between there is the state of gap d.Washing unit 5 can be to wash as described above unit 5 to move or can also be to move to Y direction to Z-direction to the approaching method of labial surface 23.
In this state, cleaning solution is supplied with from the cleaning solution supply port 14 of the Chun22 both sides of X-direction, and cleaning solution enters into formation dipping portion 19 in this gap d thus.Thus, be the state that labial surface 23 parts in dipping portion 19 are immersed in cleaning solution.
In addition, by the vibration of ultrasonic oscillator 15, make ultrasonic vibration portion 11 produce ultrasonic vibration.Thus, ultrasonic vibration can propagate on the cleaning solution that forms dipping portion 19, thereby this cleaning solution carries out ultrasonic washing to labial surface 23, so this compares and can remove more forcefully the adhesion on labial surface 23 with the method that only cleaning solution is sprayed onto to labial surface 23.
In addition, also can be by the quantity delivered of the width of gap d and cleaning solution be adjusted to suitable value, between subtend groove 13 and labial surface 23, there is the surface tension of cleaning solution, form the state that the root connect as shown in Figure 4 lip 22 (with respect to the root of the lip 22 of tube head 21) can cover with cleaning solution.
In sink mode as shown in patent documentation 2, can only wash the part of the labial surface 23 that is immersed in sink, but according to present embodiment, dipping portion 19 can be remained by utilize surface tension to make the state till cleaning solution is filled up to the top that exceeds subtend Cao13 upper end always, and under this state, carry out ultrasonic washing, can wash into thus the state that no longer remains adhesion.
In addition, if apply ultrasonic vibration in cleaning solution, can there is cleaning solution splash phenomena, but owing to having apart from d between labial surface 23 and subtend groove 13, therefore produce the cleaning solution splashing and be difficult to be attached on tube head 21.
In addition, when washing unit 5 carries out above-mentioned ultrasonic washing, by mobile device 6 washing unit 5, to Y direction, move, labial surface 23 is washed along long dimensional directions thus.
In addition, in the present embodiment, subtend groove 13 has the shape that comprises subtend face 13a and subtend face 13b, and subtend face 13a is the face parallel with labial surface 23a, and subtend face 13b is the face parallel with labial surface 23b.Thus, easily make the gap integral body between subtend groove 13 and labial surface 23 diminish, therefore can form dipping portion 19 by enough cleaning solution flows still less, and, can more effectively to forming the cleaning solution of dipping portion 19, give the ultrasonic vibration from ultrasonic vibration portion 11, therefore can access the washing force of strong ultrasonic washing.
At this, in present embodiment, the ultrasonic vibration Bu11 end of Y direction does not have the shape of blocking cleaning solution.Therefore the cleaning solution that, flow into gap d flows out from the ultrasonic vibration Bu11 end of Y direction immediately.
When therefore, labial surface 23 is washed in present embodiment, cleaning solution is supplied with constantly cleaning solution from cleaning solution supply port 14 when flow out constantly ultrasonic vibration Bu11 end.
Like this, even if cleaning solution flows out immediately, but pass through adjusting with respect to the amount of the cleaning solution of supplying with from cleaning solution supply port 14 in the unit interval of the discharge of the cleaning solution in the unit interval, can guarantee dipping portion 19.In addition, the root that the surface tension by cleaning solution connects lip 22 can cover with cleaning solution.
And, in the state that cleaning solution flows out immediately like this, by supplying with cleaning solution from cleaning solution supply port 14, forming dipping portion 19, dipping portion 19 is all the time by just forming from cleaning solution supply port 14 cleaning solution that supply with, that almost do not contact with extraneous gas thus.
At this, in the mode of washing as shown in patent documentation 2, even if carried out fully degassedly, but because absorbing air, cleaning solution can not get sufficient degasifying effect during supplying with a large amount of cleaning solutions before supplying with cleaning solution.In addition, when air is dissolved in cleaning solution, this dissolved air hinders the generation of the cavitation in ultrasonic washing liquid, so washing force dies down.
In addition, as present embodiment, because dipping portion 19 is formed by the cleaning solution contacting with extraneous gas hardly as mentioned above all the time, therefore can with abundant degassed cleaning solution, carry out ultrasonic washing always, thereby can keep strong washing force.
In addition, the adhesion of removing from labial surface 23 can not be trapped in ultrasonic vibration portion 11 yet, from ultrasonic vibration portion 11, flow out immediately, so dipping portion 19 forms by clean cleaning solution all the time, thereby can prevent that the washing force causing because cleaning solution is contaminated from declining.
In addition, although have the worry that ultrasonic vibration portion 11 generates heat by ultrasonic vibration, the sustainable supply by cleaning solution and continue to flow out, also possesses the effect of cooling ultrasonic vibration portion 11 thus.
At this, the width of gap d need to reach the width that cleaning solution is easily entered, in meeting the scope of required width, gap d width is made narrow, not only can reduce the quantity delivered that forms the required cleaning solution of dipping portion 19, but also the vibration of ultrasonic vibration portion 11 can be propagated on the cleaning solution of dipping portion 19 effectively, can carry out forcefully ultrasonic washing to labial surface 23.This gap d 1mm degree preferably in the present embodiment.
Then, Fig. 5 represents the example of the wash mill 4 of present embodiment.
As mentioned above, by carrying out ultrasonic washing with 4 pairs of labial surfaces of wash mill 23, can remove forcefully the adhesion on labial surface 23.In addition can also be, by the parts that make to be formed by resin, contact with existing clearing apparatus 8 combination of wiping the adhesion on its labial surface 23 away with labial surface 23, after first getting rid of most of adhesion with this clearing apparatus, then with wash mill 4, carry out the adhesion of wash residual.By like this, the amount of the adhesion that should remove with wash mill 4 is compared with the amount of the cleaning solution using in wash mill 4 not to be needed too much, can effectively remove adhesion.
In addition, with wash mill 4, wash after sometimes cleaning solution can remain on labial surface 23.Therefore, air-blast device 9 can also be set, by this air-blast device 9, blow and remove this cleaning solution.
Air-blast device 9 is the devices for example with the inflatable mouth for blowing, and the gas that never illustrated gas supply source is supplied with is blown towards labial surface 23 from this inflatable mouth.
When these wash mills 4, clearing apparatus 8 and air-blast device 9 are used together, these devices are for example all arranged on the mobile device 6 that wash mill 4 has, and to Y direction, move together.In addition, by the configuration in the following manner of these devices, that is, during adhesion on removing labial surface 23, these devices move to a direction, and cleaning part 8 is first by the each several part of labial surface 23, and and then wash mill 4 passes through, and finally air-blast device 9 passes through.
By like this, when adhesion has adhesion 31 on labial surface 23, remove in the following order adhesion 31.
First, by clearing apparatus 8 by these adhesion 31 wipings.At this, adhesion 31 can be wiped the below of falling labial surface 23 conventionally, and when adhesion is more than 31, adhesion 31 can spill into the top of clearing apparatus 8, thus the residual adhesion 32 of residual rib shape.In addition, the adhesion 31 that cannot wipe away because of other reasons also can be residual as residual adhesion 32.
Then, form under the state that labial surface 23 parts are immersed in cleaning solution, by wash mill 4, it is carried out to ultrasonic washing, remove forcefully thus residual adhesion 32.Removed residual adhesion 32 flows to the below of labial surface 23 together with cleaning solution.By these clearing apparatus 8 and wash mill 4 adhesions 31 and residual adhesion 32, be removed, but the cleaning solution using in ultrasonic washing can remain on labial surface 23 as residual cleaning solution 33.
Finally, by air-blast device 9, to labial surface 23, blow, thus residual cleaning solution 33 is blown off.Adhesion 31 itself is to be difficult to get rid of by the mode that air blast is blown, after but wash mill 4 passes through, because residual residual cleaning solution 33 only on labial surface 23, if the mode of therefore blowing with air blast is removed this residual cleaning solution 33, adhesion 31 and cleaning solution can not remain on labial surface 23.
And, by make wash mill 4, clearing apparatus 8 and air-blast device 9 one in the same way Y direction move the removal that whole labial surface 23 is carried out to above-mentioned adhesion 31 and move, can the adhesion on whole labial surface 23 31 be removed clean thus.
Then, Fig. 6 represents the wash mill of another embodiment.
Fig. 6 (a) is for being provided with the example of pad 34 between ultrasonic vibration portion 11 and cleaning solution supply unit 12.In the embodiment shown in Fig. 3 (a), owing to thering is gap between ultrasonic vibration portion 11 and cleaning solution supply unit 12, therefore cleaning solution Hui Conggai gap falls, and the amount that is therefore supplied to the cleaning solution between ultrasonic vibration portion 11 and labial surface 23 tails off a little.To this, in Fig. 6 (a), with pad 34, block gap, cleaning solution is supplied to more effectively in ultrasonic vibration portion 11 and labial surface 23 gap thus.
But preferably the vibration of ultrasonic vibration portion 11 does not propagate into cleaning solution supply unit 12 as previously described in this case, and further preferably cleaning solution supply unit 12 does not exert an influence to the vibration characteristics of ultrasonic vibration portion 11.
Therefore, pad 34 is necessary that " the vibration shielding part " that as ultrasonic vibration portion 11 and cleaning solution supply unit 12, be independent of each other works in this case.Therefore, pad 34 the low material of rigidity such as handy sponge form.
In addition, between ultrasonic vibration portion 11 and cleaning solution supply unit 12, arrange in the embodiment of gapped Fig. 3 (a), can as this vibration shielding part, work in Shuo Gai gap.
In addition, when gap not being set and do not use pad 34 yet and ultrasonic vibration portion 11 is directly connected with cleaning solution supply unit 12 between ultrasonic vibration portion 11 and cleaning solution supply unit 12, for the vibration of ultrasonic vibration portion 11 can not propagated on the pipe arrangement of supplying with cleaning solution, and the vibration characteristics of 12 pairs of ultrasonic vibration portions 11 of cleaning solution supply unit is not exerted an influence, cleaning solution supply unit 12 is necessary to be formed by the low material of the rigidity such as resin, so that cleaning solution supply unit 12 self works as vibration shielding part.
Fig. 6 (b) for directly arranging the example of cleaning solution supply port 14 in ultrasonic vibration portion 11.By such mode, cleaning solution can be supplied in ultrasonic vibration portion 11 and labial surface 23 gap more effectively.
In this case, owing to cleaning solution being supplied with to the pipe arrangement of use, be directly connected in ultrasonic vibration portion 11, therefore be necessary to take by the low countermeasures such as pipe arrangement of rigidity, to prevent that the impaired situation of vibration pipe arrangement by propagating from ultrasonic vibration portion 11 from occurring as far as possible, by such structure, other cleaning solution supply unit 12 needn't be set, therefore can simplify the structure of wash mill 4.
Then, Fig. 7 represents the wash mill of another embodiment of relevant subtend groove 13 shapes.
As previously described, in the embodiment shown in Fig. 3 (a), subtend groove 13 has the shape that comprises the subtend face 13a parallel with labial surface 23a and the subtend face 13b parallel with labial surface 23b, but as the same with the shape of the subtend groove 13 shown in Fig. 7 (b) in Fig. 7 (a), even if do not comprise the face parallel with labial surface 23, so long as can form dipping portion 18 between ultrasonic vibration portion 11 and labial surface 23, also can realize object of the present invention, subtend groove 13 need not necessarily comprise the face parallel with labial surface 23.
But, by as the embodiment of Fig. 3 (a), as previously described, washing unit 5 can make subtend groove 13 and labial surface 23 gap integral body diminish when labial surface 23 approaches, therefore the flow of the enough cleaning solutions still less of energy forms dipping portion 19, and, the ultrasonic vibration producing from ultrasonic vibration portion 11 is assigned to the cleaning solution that forms dipping portion 19 more effectively, therefore can access the washing force of strong ultrasonic washing.
In addition, can also be, as shown in Fig. 7 (c), on the both ends of the Y direction of ultrasonic vibration portion 11, rib 35 is set, cleaning solution is easily accumulated in the subtend groove 13 of being clamped by this rib 35.But it is not in this case, the adhesion of washing off from labial surface 23 due to the excessive height of rib 35 can remain in subtend groove 13, therefore preferred.
By wash mill described above and washing methods, can enough cheap structures remove forcefully the adhesion adhering on labial surface.
Claims (6)
1. a wash mill, is characterized in that, comprising:
Washing unit, comprises subtend groove, and it is relative with the labial surface of outlet of long dimensional directions formation that is formed with the tube head that has along apparatus for coating and put, and described washing unit and this labial surface are approaching;
Cleaning solution supply port, it is supplied with for washing the cleaning solution of described labial surface;
Mobile device, makes described washing unit and described cleaning solution supply port move to described long dimensional directions;
And, by described mobile device, described washing unit and described cleaning solution supply port when moving, described long dimensional directions are washed to described labial surface, wherein,
Described washing unit comprises ultrasonic vibration portion, in described ultrasonic vibration portion, ultrasonic oscillator is installed, and is formed with described subtend groove,
By described subtend groove and described labial surface are approached, and to the gap forming between described subtend groove and described labial surface, supply with cleaning solution from described cleaning solution supply port, form thus described labial surface and be submerged in the state in cleaning solution, and by described ultrasonic oscillator, make described ultrasonic vibration portion produce ultrasonic vibration under this state, carry out thus the part washing to described labial surface, and then by described washing unit and described cleaning solution supply port are moved to described long dimensional directions, described labial surface is washed along described long dimensional directions thus.
2. wash mill according to claim 1, is characterized in that, as the subtend face of the described subtend groove of and face that put relative with described labial surface, is the face parallel with described labial surface.
3. wash mill according to claim 1 and 2, is characterized in that, described washing unit comprises the cleaning solution supply unit with described cleaning solution supply port, and described cleaning solution supply unit is connected with the part that is equivalent to the node of oscillations of described ultrasonic oscillator.
4. wash mill according to claim 3, is characterized in that, between described ultrasonic vibration portion and described cleaning solution supply unit, is provided with vibration shielding part, and its Vibration propagation that shields described ultrasonic vibration portion is to described cleaning solution supply unit.
5. a washing methods, is characterized in that, by following wash mill, labial surface is washed, and described wash mill comprises:
Washing unit, comprises the ultrasonic vibration portion that is formed with subtend groove, and described subtend groove is relative with the labial surface of outlet of long dimensional directions formation that is formed with the tube head that has along apparatus for coating and put, and described washing unit and this labial surface approaching;
Cleaning solution supply port, it is supplied with for washing the cleaning solution of described labial surface;
Mobile device, makes described washing unit and described cleaning solution supply port move to described long dimensional directions; Wherein,
By described subtend groove and described labial surface are approached, and to the gap forming between described subtend groove and described labial surface, supply with cleaning solution from described cleaning solution supply port, form thus described labial surface and be submerged in the state in cleaning solution, and under this state by making described ultrasonic vibration portion produce ultrasonic vibration, carry out thus the part washing to described labial surface, and then by described washing unit and described cleaning solution supply port are moved to described long dimensional directions, along described long dimensional directions, described labial surface is washed thus.
6. washing methods according to claim 5, it is characterized in that, by the surface tension of the cleaning solution that produces between described subtend groove and described labial surface, form and be communicated with the state that the root of the lip that described labial surface forms all covers with cleaning solution, and described labial surface is carried out to ultrasonic washing.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
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| JP2012-139074 | 2012-06-20 | ||
| JP2012139074A JP5701822B2 (en) | 2012-06-20 | 2012-06-20 | Cleaning apparatus and cleaning method |
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| CN103506238A true CN103506238A (en) | 2014-01-15 |
| CN103506238B CN103506238B (en) | 2017-05-24 |
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| CN201310244298.6A Active CN103506238B (en) | 2012-06-20 | 2013-06-19 | Cleaning device and cleaning method |
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| Country | Link |
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| JP (1) | JP5701822B2 (en) |
| KR (1) | KR101429483B1 (en) |
| CN (1) | CN103506238B (en) |
| TW (1) | TW201400203A (en) |
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| WO2017190606A1 (en) * | 2016-05-04 | 2017-11-09 | 京东方科技集团股份有限公司 | Transfer plate cleaning equipment and cleaning method therefor |
| IT201800002124A1 (en) * | 2018-01-29 | 2019-07-29 | Corob Spa | CLEANING DEVICE AND RELATIVE METHOD |
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| JP6763843B2 (en) * | 2017-10-25 | 2020-09-30 | 株式会社カイジョー | Ultrasonic cleaning equipment and ultrasonic cleaning system |
| US20210237115A1 (en) * | 2018-05-11 | 2021-08-05 | Honda Motor Co., Ltd. | Coating nozzle cleaning method and device |
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| TW201400203A (en) | 2014-01-01 |
| JP5701822B2 (en) | 2015-04-15 |
| KR20130142867A (en) | 2013-12-30 |
| TWI559994B (en) | 2016-12-01 |
| CN103506238B (en) | 2017-05-24 |
| KR101429483B1 (en) | 2014-08-12 |
| JP2014000553A (en) | 2014-01-09 |
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