KR20130135335A - 하전 입자 빔 렌즈 및 이를 사용한 노광 장치 - Google Patents

하전 입자 빔 렌즈 및 이를 사용한 노광 장치 Download PDF

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Publication number
KR20130135335A
KR20130135335A KR1020137026268A KR20137026268A KR20130135335A KR 20130135335 A KR20130135335 A KR 20130135335A KR 1020137026268 A KR1020137026268 A KR 1020137026268A KR 20137026268 A KR20137026268 A KR 20137026268A KR 20130135335 A KR20130135335 A KR 20130135335A
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KR
South Korea
Prior art keywords
region
charged particle
particle beam
opening
section
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Ceased
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KR1020137026268A
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English (en)
Korean (ko)
Inventor
다카히사 가토
유타카 세토모토
Original Assignee
캐논 가부시끼가이샤
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Application filed by 캐논 가부시끼가이샤 filed Critical 캐논 가부시끼가이샤
Publication of KR20130135335A publication Critical patent/KR20130135335A/ko
Ceased legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/10—Lenses
    • H01J37/12—Lenses electrostatic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/04—Means for controlling the discharge
    • H01J2237/049—Focusing means
    • H01J2237/0492—Lens systems
    • H01J2237/04924—Lens systems electrostatic
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/10—Lenses
    • H01J2237/12—Lenses electrostatic
    • H01J2237/1205—Microlenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/10—Lenses
    • H01J2237/12—Lenses electrostatic
    • H01J2237/1207—Einzel lenses
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/30—Electron or ion beam tubes for processing objects
    • H01J2237/317—Processing objects on a microscale
    • H01J2237/3175—Lithography
    • H01J2237/31774—Multi-beam

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
KR1020137026268A 2011-03-15 2012-03-14 하전 입자 빔 렌즈 및 이를 사용한 노광 장치 Ceased KR20130135335A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2011-056813 2011-03-15
JP2011056813A JP2012195096A (ja) 2011-03-15 2011-03-15 荷電粒子線レンズおよびそれを用いた露光装置
PCT/JP2012/001773 WO2012124319A1 (en) 2011-03-15 2012-03-14 Charged particle beam lens and exposure apparatus using the same

Publications (1)

Publication Number Publication Date
KR20130135335A true KR20130135335A (ko) 2013-12-10

Family

ID=45932473

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020137026268A Ceased KR20130135335A (ko) 2011-03-15 2012-03-14 하전 입자 빔 렌즈 및 이를 사용한 노광 장치

Country Status (4)

Country Link
US (1) US20140151570A1 (enExample)
JP (1) JP2012195096A (enExample)
KR (1) KR20130135335A (enExample)
WO (1) WO2012124319A1 (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6720861B2 (ja) 2016-12-28 2020-07-08 株式会社ニューフレアテクノロジー マルチビーム用アパーチャセット及びマルチ荷電粒子ビーム描画装置
WO2021156198A1 (en) 2020-02-04 2021-08-12 Carl Zeiss Multisem Gmbh Multi-beam digital scan and image acquisition
TW202220012A (zh) 2020-09-30 2022-05-16 德商卡爾蔡司多重掃描電子顯微鏡有限公司 在可調工作距離附近具快速自動對焦之多重粒子束顯微鏡及相關方法

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* Cited by examiner, † Cited by third party
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US6741016B2 (en) * 2001-06-14 2004-05-25 Hewlett-Packard Development Company, L.P. Focusing lens for electron emitter with shield layer
KR100496643B1 (ko) * 2003-10-25 2005-06-20 한국전자통신연구원 마이크로칼럼 전자빔 장치의 자체정렬 적층 금속 박막전자빔 렌즈 및 그 제작방법
US7045794B1 (en) * 2004-06-18 2006-05-16 Novelx, Inc. Stacked lens structure and method of use thereof for preventing electrical breakdown
JP4625317B2 (ja) * 2004-12-03 2011-02-02 ナガヤマ アイピー ホールディングス リミテッド ライアビリティ カンパニー 位相差電子顕微鏡用位相板及びその製造方法並びに位相差電子顕微鏡
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JP5159035B2 (ja) 2005-10-28 2013-03-06 キヤノン株式会社 レンズアレイ及び該レンズアレイを含む荷電粒子線露光装置
EP2126955A1 (en) * 2007-01-25 2009-12-02 NFAB Limited Improved particle beam generator
TWI479530B (zh) * 2008-10-01 2015-04-01 Mapper Lithography Ip Bv 靜電透鏡結構、靜電透鏡陣列、帶電粒子的子束微影系統以及製造絕緣結構的方法
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JP2012195097A (ja) * 2011-03-15 2012-10-11 Canon Inc 荷電粒子線レンズおよびそれを用いた露光装置
JP5669636B2 (ja) * 2011-03-15 2015-02-12 キヤノン株式会社 荷電粒子線レンズおよびそれを用いた露光装置
JP5744579B2 (ja) * 2011-03-15 2015-07-08 キヤノン株式会社 荷電粒子線レンズおよびそれを用いた露光装置
JP5886663B2 (ja) * 2012-03-21 2016-03-16 株式会社日立ハイテクノロジーズ 電子線応用装置およびレンズアレイ
JP2013239667A (ja) * 2012-05-17 2013-11-28 Canon Inc 荷電粒子線静電レンズにおける電極とその製造方法、荷電粒子線静電レンズ、及び荷電粒子線露光装置

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Publication number Publication date
WO2012124319A1 (en) 2012-09-20
JP2012195096A (ja) 2012-10-11
US20140151570A1 (en) 2014-06-05

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