KR20130018069A - Light emitting device - Google Patents
Light emitting device Download PDFInfo
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- KR20130018069A KR20130018069A KR1020110080908A KR20110080908A KR20130018069A KR 20130018069 A KR20130018069 A KR 20130018069A KR 1020110080908 A KR1020110080908 A KR 1020110080908A KR 20110080908 A KR20110080908 A KR 20110080908A KR 20130018069 A KR20130018069 A KR 20130018069A
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- light emitting
- emitting device
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/04—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction
- H01L33/06—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction within the light emitting region, e.g. quantum confinement structure or tunnel barrier
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/36—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the electrodes
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Led Devices (AREA)
Abstract
Embodiments relate to a light emitting device, a method of manufacturing a light emitting device, a light emitting device package, and an illumination system.
A light emitting device according to an embodiment includes a first conductive semiconductor layer; An active layer formed on the first conductivity type semiconductor layer including a quantum well and a quantum wall; And a second conductivity type semiconductor layer on the active layer, wherein the quantum well of the active layer is In p Ga 1 - p N quantum well (where 0 <p <1); And In y Al z Ga (1-yz) N quantum wells (where 0 <y <1, 0 <z <1) and 0 <y + z <1).
Description
Embodiments relate to a light emitting device, a method of manufacturing the light emitting device, a light emitting device package and an illumination system.
A light emitting device is a device that converts electrical energy into light energy, and various colors can be realized by adjusting the composition ratio of the compound semiconductor.
The light emitting device according to the prior art includes an N-type GaN layer and a P-type GaN layer and an active layer therebetween, and the quantum wells (MQW) constituting the active layer are InGaN quantum wells and GaN quantum barriers. ), And electrons injected into the active layer through the N-type GaN layer and holes injected into the active layer through the P-type GaN layer are bound to the InGaN quantum well and are coupled to each other to generate light.
The efficiency of the light emitting device can be maximized by improving the IQE (internal quantum efficiency) and EQE (external quantum efficiency).
According to the prior art, research is being conducted on the optimization of the multi-quantum well (MQW) and the hole injection efficiency to improve the internal quantum efficiency in the epitaxial growth of the light emitting device.
On the other hand, as the size of horizontal chips decreases, the reliability improvement and the internal quantum efficiency droop have been raised.
For example, GaN and InN, which are nitride semiconductor materials, have the same crystallographic orientation on hetero-bulk substrates, and when grown in a thin film form, their lattice constant difference is about 10%. For example, the plane lattice constant of InN is about 10% larger than the plane lattice constant of GaN.
Therefore, the quantum well formed by mixing GaN and InN in a ratio has an InGaN composition, and the lattice constant of the InGaN quantum well is larger than GaN constituting the quantum wall. Therefore, the InGaN quantum well is severely subjected to compressive stress in the active layer of the InGaN quantum well / GaN quantum wall structure formed on the N-type GaN substrate.
Severe compressive stresses acting on InGaN quantum wells generate a large internal field, creating a piezo electric field and modifying the energy band structure of the InGaN quantum wells.
As a result, electrons and holes in a conventional rectangular-potential quantum well are spatially separated to reduce recombination efficiency, resulting in a QCSE (quantum-confined Stark effect) phenomenon in which the self-luminous rate is significantly lowered. .
In addition, according to the related art, a droop phenomenon in which luminous efficiency decreases as the current increases, thereby causing a problem in that the luminous efficiency decreases as the current increases.
Embodiments provide a high efficiency light emitting device, a method of manufacturing a light emitting device, a light emitting device package, and an illumination system.
In addition, the embodiment is to provide a light emitting device, a method of manufacturing a light emitting device, a light emitting device package and an illumination system with improved reliability.
In addition, the embodiment is to provide a high output light emitting device, a method of manufacturing a light emitting device, a light emitting device package and an illumination system that can improve the droop phenomenon.
A light emitting device according to an embodiment includes a first conductive semiconductor layer; An active layer formed on the first conductivity type semiconductor layer including a quantum well and a quantum wall; And a second conductivity type semiconductor layer on the active layer, wherein the quantum well of the active layer is In p Ga 1 - p N quantum well (where 0 <p <1); And In y Al z Ga (1-yz) N quantum wells (where 0 <y <1, 0 <z <1) and 0 <y + z <1).
In addition, the light emitting device according to the embodiment includes a first conductivity type semiconductor layer; An active layer disposed on the first conductivity type semiconductor layer and having quantum wells and quantum walls repeatedly stacked; A last quantum wall disposed on the active layer and having an energy bandgap larger than the quantum wall and a thickness thicker than the quantum wall; And a second conductivity type semiconductor layer disposed on the last quantum wall, wherein the quantum well has a step with the first quantum well on the first quantum well and the first quantum well. And a second quantum well having a smaller energy bandgap and having a thickness thicker than that of the first quantum well.
According to the embodiment, it is possible to provide a light emitting device having high efficiency, a manufacturing method of the light emitting device, a light emitting device package and an illumination system.
In addition, the embodiment can provide a light emitting device, a manufacturing method of the light emitting device, a light emitting device package and an illumination system with improved reliability.
In addition, the embodiment can provide a high output light emitting device, a manufacturing method of the light emitting device, a light emitting device package, and an illumination system in which the droop phenomenon is improved.
1 is a cross-sectional view of a light emitting device according to an embodiment.
2 to 4 are cross-sectional views of the active layer in the light emitting device according to the embodiment.
5 and 6 are views illustrating internal quantum efficiency (IQE) results in the light emitting device according to the embodiment.
7 is an exemplary diagram illustrating a band diagram of a quantum well of a light emitting device according to an embodiment, and a comparative example of recombination efficiency of electrons and holes according to the related art and an embodiment.
8 is an IV curve of a light emitting device according to the prior art and the embodiment.
9 is a cross-sectional view of a light emitting device package according to the embodiment.
10 is a perspective view of a lighting unit according to an embodiment.
11 is a perspective view of a backlight unit according to an embodiment.
In the description of the embodiments, it is to be understood that each layer (film), area, pattern or structure may be referred to as being "on" or "under" the substrate, each layer Quot; on "and" under "are intended to include both" directly "or" indirectly " do. Also, the criteria for top, bottom, or bottom of each layer will be described with reference to the drawings.
The thickness and size of each layer in the drawings are exaggerated, omitted, or schematically shown for convenience and clarity of explanation. In addition, the size of each component does not necessarily reflect the actual size.
(Example)
1 is a cross-sectional view of a
The
The first conductivity
The
The
1 illustrates a horizontal light emitting device, but the embodiment is not limited thereto and may be applied to a vertical light emitting device. For example, the
The first conductivity
The
The second conductive
In an exemplary embodiment, the first
Embodiments provide a high efficiency light emitting device, a method of manufacturing a light emitting device, a light emitting device package, and an illumination system.
In addition, the embodiment is to provide a high output light emitting device, a method of manufacturing a light emitting device, a light emitting device package and an illumination system with improved droop phenomenon.
To this end, the embodiment can optimize the structure of the active layer to minimize the grid mismatch between the quantum well and the quantum wall to improve the reliability and improve the internal quantum efficiency.
2 is a cross-sectional view of the
In an exemplary embodiment, the
According to the first embodiment, the In y Al z Ga (1-yz) N quantum well 114Wa is disposed on the In x Ga 1 - x
According to an embodiment In p Ga 1 - p N quantum well (114Wb) and In y Al z Ga (1-yz) N quantum between In x Ga 1 - x N quantum wall (0 <x <1) (114B) Improves reliability and internal quantum efficiency (IQE) by minimizing misfit dislocation by forming two-step quantum wells of wells 114Wa to reduce the crystal lattice difference between quantum wells and quantum walls can do.
For example, according to the embodiment, In y Al z Ga (1-yz) N
In an embodiment the composition of the In the In y Al z Ga (1- yz) N quantum well (114Wa) (y) is a In p Ga 1 - smaller than the composition of In (p) of the p N quantum well (114Wb) Can be.
For example, the composition y of the In y Al z Ga (1-yz) N quantum well 114Wa is set in a range of about 10% to 20%, thereby reducing the crystal lattice difference between the quantum well and the quantum wall. By reducing the occurrence of misfit dislocation, the reliability and internal quantum efficiency (IQE) can be improved.
According to the embodiment In y Al z Ga (1- yz) N quantum well (114Wa) Composition (y) a In p Ga 1 of In - smaller than the composition (p) of the In of the p N quantum well (114Wb) set Accordingly, reliability and internal quantum efficiency (IQE) can be improved by reducing the crystal lattice difference between the quantum walls contacting the In y Al z Ga (1-yz) N quantum well 114Wa.
Example said In y Al z Ga (1- yz) in N quantum well (114Wa) is a In p Ga 1 - and also improve the reliability and the internal quantum efficiency (IQE) being formed to be thinner than the p N quantum well (114Wb) At the same time, by not forming too thick, it is possible to prevent the performance degradation of the quantum well by Al. For example, the In y Al z Ga (1-yz) N quantum well 114Wa may be formed to a thickness of about 4 kV to about 6 kW, and the In p Ga 1 - p N quantum well 114Wb may be about It may be formed to a thickness of 25Å to about 35Å, but is not limited thereto.
FIG. 5 is a diagram illustrating an internal quantum efficiency (IQE) result in the light emitting device according to the embodiment. In FIG. 5, the composition y of In y Al z Ga (1-yz) N
Referring to FIG. 5, a two-step quantum well of In p Ga 1 - p N quantum well 114 Wb and In y Al z Ga (1-yz) N
2, the both walls of the
According to the embodiment, by providing a quantum wall including indium (In), the internal quantum efficiency (IQE) can be improved, and the droop phenomenon can be remarkably improved.
In an embodiment, the In x Ga 1 - x
In an embodiment, the In x Ga 1 - x
The In x Ga 1 - x N quantum wall (114B) in the last corresponding to the nearest i.e., the last quantum wall on the P-type semiconductor layer In x Ga 1 - x N quantum wall (114BL) is different from the In x Ga 1 - x N can be formed thicker than the quantum wall (114B).
The In x Ga 1 - x
6 is a diagram illustrating an internal quantum efficiency (IQE) result in the light emitting device according to the embodiment. In FIG. 6, the In x Ga 1 - x
6 is in between the two walls In p Ga 1 - in the case of forming a two-phase (two step) quantum well p N quantum well (114Wb) and In y Al z Ga (1- yz) N quantum well (114Wa) and This effect is obtained when In x Ga 1 - x
3 is a cross-sectional view of the
The second embodiment can employ the technical features of the first embodiment.
For example, according to the second embodiment, the In y Al z Ga (1-yz) N quantum well 114W is disposed on the In x Ga 1-x
The second embodiment is the In p Ga 1 - may further include the 2 In y Al z Ga (1 -yz) N quantum well (114Wc) disposed on the p N quantum well (114Wb).
According to the second embodiment, in the case where the active layer has a multi-quantum well structure, In p Ga 1 - p N quantum well 114 Wb is In y Al z Ga (1-yz) N quantum well 114 Wa and the second In y Al z Intervening between Ga (1-yz) N quantum wells 114Wc may further improve internal quantum efficiency and reliability.
4 is a cross-sectional view of the
The third embodiment can employ the technical features of the first embodiment.
For example, the quantum well (114W) of the active layer (114C) in the third embodiment In p Ga 1 - p N quantum well (where, 0 <p <1) ( 114Wb) and the In p Ga 1 - p The In y Al z Ga (1-yz) N quantum well (0 <y <1, 0 <z <1) 114Wa may be included on the N quantum well 114Wb.
According to the third embodiment, the In p Ga 1 - p N quantum well 114Wb is disposed on the In x Ga 1 - x
According to the third embodiment, the In y Al z Ga (1-yz) N quantum well 114Wa is in contact with the In x Ga 1-x N
7 is an exemplary diagram illustrating a band diagram of a quantum well of a light emitting device according to an embodiment, and a comparative example of recombination efficiency of electrons and holes according to the prior art and the embodiment.
For example, FIG. 7A illustrates four light emitting devices having four quantum wells in a direction from a first
According to the prior art, InGaN quantum wells are severely subjected to compressive stress in an active layer of an InGaN quantum well / GaN quantum wall structure formed on an N-type GaN substrate.
Severe compressive stresses acting on InGaN quantum wells generate a large internal field, creating a piezo electric field and modifying the energy band structure of the InGaN quantum wells.
As a result, electrons and holes in a conventional rectangular-potential quantum well are spatially separated to reduce recombination efficiency, resulting in a QCSE (quantum-confined Stark effect) phenomenon in which the self-luminous rate is significantly lowered. .
According to the light emitting device according to the embodiment, the lattice mismatch between the quantum well and the quantum wall can be minimized by optimizing the active layer quantum well and the quantum wall structure, thereby eliminating the piezo-electric field between the quantum well and the quantum wall. have.
Accordingly, in the embodiment, the band diagram A3 of the quantum well may recover a square-potential quantum well band diagram.
7 (b) is a comparative example of recombination efficiency (B4) of electrons and holes according to the related art and electron and hole recombination efficiency (A4) according to the embodiment.
In FIG. 7, the prior art is an example in which an InGaN quantum well / GaN quantum wall is provided as an active layer, and the active layer of the embodiment in FIG. 7 is In x Ga 1 - x
According to the light emitting device according to the embodiment, the lattice mismatch between the quantum well and the quantum wall can be minimized by optimizing the active layer quantum well and the quantum wall structure, thereby eliminating the piezo-electric field between the quantum well and the quantum wall. have.
According to the embodiment, the recombination efficiency (A4) of the electrons and holes may be increased by about 100% or more compared to the recombination efficiency (B4) of the prior art.
For example, as shown in FIG. 7B, the energy band level of the last well QW4 is restored, thereby significantly improving luminous efficiency and reliability in the last well, which is a main light emitting region.
8 is an exemplary view showing an I-V curve B5 of a light emitting device according to the related art and an I-V curve A5 of a light emitting device according to an embodiment.
In FIG. 8, the prior art is an example in which an InGaN quantum well / GaN quantum wall is provided as an active layer, and the active layer of the embodiment in FIG. 8 is In x Ga 1 - x
It can be seen that the rated voltage VFa according to the embodiment is remarkably improved compared to the rated voltage VFb according to the prior art.
According to the embodiment, it is possible to provide a light emitting device having high efficiency, a manufacturing method of the light emitting device, a light emitting device package and an illumination system.
In addition, the embodiment can provide a high output light emitting device, a manufacturing method of the light emitting device, a light emitting device package, and an illumination system in which the droop phenomenon is improved.
Embodiments provide a high efficiency light emitting device, a method of manufacturing a light emitting device, a light emitting device package, and an illumination system.
To this end, the embodiment forms a
The current spreading
Thereafter, an electron injection layer (not shown) may be formed on the current spreading
In addition, the embodiment may form the
The
In addition, as the
In addition, in the embodiment, an
According to the embodiment, the
In addition, the
The
According to the embodiment, it is possible to provide a high efficiency light emitting device, a method of manufacturing a light emitting device, a light emitting device package, and an illumination system, including a current diffusion layer, an electron injection layer, a strain control layer, or an electron blocking layer.
An embodiment may include a
The
According to the embodiment, it is possible to provide a light emitting device having high efficiency, a manufacturing method of the light emitting device, a light emitting device package and an illumination system.
In addition, the embodiment can provide a light emitting device, a manufacturing method of the light emitting device, a light emitting device package and an illumination system with improved reliability.
In addition, the embodiment can provide a high output light emitting device, a manufacturing method of the light emitting device, a light emitting device package, and an illumination system in which the droop phenomenon is improved.
9 is a view illustrating a light emitting
The light emitting
The
The
The
The
The
The
A plurality of light emitting device packages according to the embodiment may be arranged on a substrate, and a light guide plate, a prism sheet, a diffusion sheet, a fluorescent sheet, or the like, which is an optical member, may be disposed on a path of light emitted from the light emitting device package. The light emitting device package, the substrate, and the optical member may function as a backlight unit or function as a lighting unit. For example, the lighting system may include a backlight unit, a lighting unit, a pointing device, a lamp, and a streetlight.
10 is a
In the embodiment, the
The
The light emitting
The
In addition, the
The at least one light emitting
The light emitting
The
11 is an exploded
The
The
The light emitting
The light emitting
The
The plurality of light emitting device packages 200 may be mounted on the
The
The
The
According to the embodiment, it is possible to provide a light emitting device having high efficiency, a manufacturing method of the light emitting device, a light emitting device package and an illumination system.
In addition, the embodiment can provide a light emitting device, a manufacturing method of the light emitting device, a light emitting device package and an illumination system with improved reliability.
In addition, the embodiment can provide a high output light emitting device, a manufacturing method of the light emitting device, a light emitting device package, and an illumination system in which the droop phenomenon is improved.
The features, structures, effects and the like described in the embodiments are included in at least one embodiment and are not necessarily limited to only one embodiment. Furthermore, the features, structures, effects, and the like illustrated in each embodiment may be combined or modified with respect to other embodiments by those skilled in the art to which the embodiments belong. Accordingly, the contents of such combinations and modifications should be construed as being included in the scope of the embodiments.
While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention. It can be seen that the modification and application of branches are possible. For example, each component specifically shown in the embodiments can be modified and implemented. It is to be understood that the present invention may be embodied in many other specific forms without departing from the spirit or essential characteristics thereof.
Claims (11)
An active layer formed on the first conductivity type semiconductor layer including a quantum well and a quantum wall; And
A second conductivity type semiconductor layer on the active layer;
The quantum well of the active layer,
In p Ga 1 - p N quantum well (where, 0 <p <1); And
A light emitting device comprising In y Al z Ga (1-yz) N quantum wells (where 0 <y <1, 0 <z <1) and 0 <y + z <1).
The quantum wall of the active layer,
A light emitting device comprising In x Ga 1 - x N quantum walls (0 <x <1).
The In y Al z Ga (1-yz) N quantum well is disposed on the In x Ga 1 - x N quantum wall,
The In p Ga 1 - p N quantum well is disposed on the In y Al z Ga (1-yz) N quantum well.
A light emitting device further comprising a second In y Al z Ga (1-yz) N quantum well disposed on the In p Ga 1 - p N quantum well.
The In p Ga 1 - p N quantum well is disposed on the In x Ga 1 - x N quantum wall,
The In y Al z Ga (1-yz) N quantum well is disposed on the In p Ga 1 - p N quantum well.
Said In y Al z Ga (1- yz) N composition (y) of the In of the quantum well is a In p Ga 1 - a small light emitting element than the composition (p) of p N of the quantum well In.
The composition (y) of In of the In y Al z Ga (1-yz) N quantum well is in a range of 10% to 20%.
The In y Al z Ga (1-yz) N quantum well
A light emitting device formed thinner than In p Ga 1 - p N quantum wells.
The In x (In) of the In x Ga 1 - x N quantum wall (x) is in the range of 0.5% to 10% light emitting device.
The In x Ga 1 - x N quantum wall includes a last In x Ga 1 - x N quantum wall,
The Lat's In x Ga 1 - x N quantum wall is the In x Ga 1 - x N thick light-emitting device than the quantum wall.
An active layer disposed on the first conductivity type semiconductor layer and having quantum wells and quantum walls repeatedly stacked;
A last quantum wall disposed on the active layer and having an energy bandgap larger than the quantum wall and a thickness thicker than the quantum wall; And
A second conductivity type semiconductor layer disposed on the last quantum wall;
The quantum well is a second quantum having a smaller energy bandgap than the first quantum well and having a thickness thicker than the first quantum well so as to have a step with the first quantum well on the first quantum well and the first quantum well. Light emitting device comprising a well.
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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US9412900B2 (en) | 2014-08-21 | 2016-08-09 | AICT (Advanced Institutes of Convergence Technology) | Green-light emitting device including quaternary quantum well on vicinal c-plane |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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US9412900B2 (en) | 2014-08-21 | 2016-08-09 | AICT (Advanced Institutes of Convergence Technology) | Green-light emitting device including quaternary quantum well on vicinal c-plane |
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