KR20120037999A - 기판홀더 시스템, 기판접합장치 및 디바이스의 제조방법 - Google Patents
기판홀더 시스템, 기판접합장치 및 디바이스의 제조방법 Download PDFInfo
- Publication number
- KR20120037999A KR20120037999A KR1020127004356A KR20127004356A KR20120037999A KR 20120037999 A KR20120037999 A KR 20120037999A KR 1020127004356 A KR1020127004356 A KR 1020127004356A KR 20127004356 A KR20127004356 A KR 20127004356A KR 20120037999 A KR20120037999 A KR 20120037999A
- Authority
- KR
- South Korea
- Prior art keywords
- substrate
- substrate holder
- board
- coupling member
- holder
- Prior art date
Links
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/185—Joining of semiconductor bodies for junction formation
- H01L21/187—Joining of semiconductor bodies for junction formation by direct bonding
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
- H01L21/6833—Details of electrostatic chucks
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
- Y10T156/10—Methods of surface bonding and/or assembly therefor
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
- Y10T156/17—Surface bonding means and/or assemblymeans with work feeding or handling means
- Y10T156/1702—For plural parts or plural areas of single part
- Y10T156/1744—Means bringing discrete articles into assembled relationship
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Packaging Frangible Articles (AREA)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JPJP-P-2009-170513 | 2009-07-21 | ||
JP2009170513 | 2009-07-21 | ||
JPJP-P-2009-253438 | 2009-11-04 | ||
JP2009253438 | 2009-11-04 |
Publications (1)
Publication Number | Publication Date |
---|---|
KR20120037999A true KR20120037999A (ko) | 2012-04-20 |
Family
ID=43498934
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020127004356A KR20120037999A (ko) | 2009-07-21 | 2010-07-21 | 기판홀더 시스템, 기판접합장치 및 디바이스의 제조방법 |
Country Status (8)
Country | Link |
---|---|
US (1) | US9054140B2 (ja) |
EP (1) | EP2458628A4 (ja) |
JP (1) | JP5810914B2 (ja) |
KR (1) | KR20120037999A (ja) |
CN (1) | CN102498559B (ja) |
IN (1) | IN2012DN01481A (ja) |
TW (1) | TW201131689A (ja) |
WO (1) | WO2011010452A1 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20150136482A (ko) * | 2013-03-27 | 2015-12-07 | 에베 그룹 에. 탈너 게엠베하 | 기판 스택을 취급하기 위한 장치 및 방법과 보유 장치 |
KR20170096938A (ko) * | 2014-12-18 | 2017-08-25 | 에베 그룹 에. 탈너 게엠베하 | 기질을 접합시키기 위한 방법 |
KR20190093708A (ko) * | 2014-02-03 | 2019-08-09 | 에베 그룹 에. 탈너 게엠베하 | 기질을 결합하기 위한 방법 및 장치 |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102011115498A1 (de) * | 2011-10-11 | 2012-12-20 | Carl Zeiss Smt Gmbh | Lagervorrichtung zur Lagerung eines Substrats und mikrolithographische Projektionsbelichtungsanlage mit einer solchen Lagervorrichtung |
US10121760B2 (en) | 2013-11-01 | 2018-11-06 | Nikon Corporation | Wafer bonding system and method |
JP6378942B2 (ja) | 2014-06-12 | 2018-08-22 | 東京エレクトロン株式会社 | 載置台及びプラズマ処理装置 |
US10964562B2 (en) | 2016-09-29 | 2021-03-30 | Ev Group E. Thallner Gmbh | Device and method for bonding of two substrates |
JP6516889B2 (ja) * | 2018-01-29 | 2019-05-22 | エーファウ・グループ・エー・タルナー・ゲーエムベーハー | 基板スタックを取り扱うための、収容システム及び装置及び方法 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4038599A (en) | 1974-12-30 | 1977-07-26 | International Business Machines Corporation | High density wafer contacting and test system |
JP2673239B2 (ja) * | 1988-11-07 | 1997-11-05 | 東京エレクトロン株式会社 | 処理装置 |
US5133491A (en) * | 1990-12-20 | 1992-07-28 | Die Tech, Inc. | Substrate breaker |
JP3296108B2 (ja) * | 1994-08-08 | 2002-06-24 | 神鋼電機株式会社 | 電子基板用コンテナ |
JPH11261000A (ja) | 1998-03-13 | 1999-09-24 | Japan Science & Technology Corp | 3次元半導体集積回路装置の製造方法 |
JP3693972B2 (ja) * | 2002-03-19 | 2005-09-14 | 富士通株式会社 | 貼合せ基板製造装置及び基板貼合せ方法 |
US7040525B2 (en) * | 2002-03-20 | 2006-05-09 | Lg.Philips Lcd Co., Ltd. | Stage structure in bonding machine and method for controlling the same |
CN1325981C (zh) * | 2002-03-20 | 2007-07-11 | Lg.菲利浦Lcd株式会社 | 粘合机中的工作台结构及其控制方法 |
KR20040073087A (ko) * | 2003-02-13 | 2004-08-19 | 삼성전자주식회사 | 웨이퍼 홀더 |
JP4626160B2 (ja) * | 2004-03-04 | 2011-02-02 | 株式会社ニコン | ウェハ重ね合わせ方法及びウェハ重ね合わせ装置 |
JP4465225B2 (ja) * | 2004-05-28 | 2010-05-19 | 有限会社都波岐精工 | 基板接合装置、基板接合方法および記録ディスク製造方法 |
JP4548239B2 (ja) * | 2005-06-21 | 2010-09-22 | パナソニック株式会社 | 基板接合方法および基板接合装置 |
JP4107316B2 (ja) | 2005-09-02 | 2008-06-25 | 株式会社日立プラントテクノロジー | 基板貼合装置 |
JP2007115978A (ja) | 2005-10-21 | 2007-05-10 | Nikon Corp | 加圧装置及び半導体装置の製造方法 |
US7245350B2 (en) * | 2005-11-11 | 2007-07-17 | Canon Kabushiki Kaisha | Exposure apparatus |
JP2008087847A (ja) * | 2006-10-05 | 2008-04-17 | Clean Surface Gijutsu:Kk | 基板収納ケース |
JP2008140986A (ja) * | 2006-12-01 | 2008-06-19 | Murata Mach Ltd | 枚葉搬送用トレイ |
TWI471971B (zh) * | 2007-10-30 | 2015-02-01 | 尼康股份有限公司 | Substrate holding member, substrate bonding apparatus, laminated substrate manufacturing apparatus, substrate bonding method, laminated substrate manufacturing method, and laminated semiconductor device manufacturing method |
-
2010
- 2010-07-20 TW TW099123776A patent/TW201131689A/zh unknown
- 2010-07-21 JP JP2011523552A patent/JP5810914B2/ja active Active
- 2010-07-21 KR KR1020127004356A patent/KR20120037999A/ko not_active Application Discontinuation
- 2010-07-21 WO PCT/JP2010/004659 patent/WO2011010452A1/ja active Application Filing
- 2010-07-21 IN IN1481DEN2012 patent/IN2012DN01481A/en unknown
- 2010-07-21 CN CN201080041652.XA patent/CN102498559B/zh active Active
- 2010-07-21 EP EP10802073.6A patent/EP2458628A4/en not_active Withdrawn
-
2012
- 2012-01-20 US US13/354,570 patent/US9054140B2/en active Active
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20150136482A (ko) * | 2013-03-27 | 2015-12-07 | 에베 그룹 에. 탈너 게엠베하 | 기판 스택을 취급하기 위한 장치 및 방법과 보유 장치 |
KR20190093708A (ko) * | 2014-02-03 | 2019-08-09 | 에베 그룹 에. 탈너 게엠베하 | 기질을 결합하기 위한 방법 및 장치 |
KR20200138415A (ko) * | 2014-02-03 | 2020-12-09 | 에베 그룹 에. 탈너 게엠베하 | 기질을 결합하기 위한 방법 및 장치 |
KR20170096938A (ko) * | 2014-12-18 | 2017-08-25 | 에베 그룹 에. 탈너 게엠베하 | 기질을 접합시키기 위한 방법 |
Also Published As
Publication number | Publication date |
---|---|
IN2012DN01481A (ja) | 2015-06-05 |
CN102498559A (zh) | 2012-06-13 |
US9054140B2 (en) | 2015-06-09 |
JPWO2011010452A1 (ja) | 2012-12-27 |
EP2458628A4 (en) | 2016-12-21 |
CN102498559B (zh) | 2016-03-02 |
US20120205024A1 (en) | 2012-08-16 |
JP5810914B2 (ja) | 2015-11-11 |
EP2458628A1 (en) | 2012-05-30 |
TW201131689A (en) | 2011-09-16 |
WO2011010452A1 (ja) | 2011-01-27 |
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Legal Events
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E902 | Notification of reason for refusal | ||
E601 | Decision to refuse application |