KR20120008657A - an elevating device for panel the vacuum chamber - Google Patents

an elevating device for panel the vacuum chamber Download PDF

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KR20120008657A
KR20120008657A KR1020100069561A KR20100069561A KR20120008657A KR 20120008657 A KR20120008657 A KR 20120008657A KR 1020100069561 A KR1020100069561 A KR 1020100069561A KR 20100069561 A KR20100069561 A KR 20100069561A KR 20120008657 A KR20120008657 A KR 20120008657A
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vacuum chamber
feed
draw
magnet
actuator
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KR1020100069561A
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Korean (ko)
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KR101274461B1 (en
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노우철
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노우철
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67709—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using magnetic elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16H—GEARING
    • F16H49/00—Other gearings
    • F16H49/005—Magnetic gearings with physical contact between gears
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S414/00—Material or article handling
    • Y10S414/135—Associated with semiconductor wafer handling
    • Y10S414/139—Associated with semiconductor wafer handling including wafer charging or discharging means for vacuum chamber

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

PURPOSE: A panel transferring device for a vacuum chamber is provided to accurately lift and drop a driving device by preventing a horizontal failure phenomenon of a panel or particles. CONSTITUTION: A plurality of feed through units(300) are combined with a vacuum chamber. A driving unit(500) is connected to the feed through unit and simultaneously operates each feed through unit. A plurality of first and second magnets are installed in the inner and outer sides of a rod and forms a magnetic field to apply an attractive force. A hollow through body(350) includes a connection unit to be connected to the vacuum chamber. A fixed block slides in the outer side of the through body and mounts a first magnet. A second magnet corresponding to the first magnet is fixed to an actuator.

Description

진공챔버용 패널 이송장치{an elevating device for panel the vacuum chamber}An elevating device for panel the vacuum chamber

본 발명은 진공상태에서의 작업을 위해 진공을 유지하면서 다수의 패널이 적층토록 되는 진공챔버에 복수의 피드드로우유니트를 밀봉결합한 후 상기 피드드로우유니트는 구동수단에 연결되어 동시에 승하강토록 설치되므로써 구동수단에 전원의 공급시 피드드로우유니트에 구비되면서 자기장의 상호 동작에 의해 구동되는 지지바가 패널을 승하강하도록 설치되는 진공챔버용 패널 이송장치에 관한 것이다.According to the present invention, after a plurality of feed draw units are hermetically coupled to a vacuum chamber in which a plurality of panels are stacked while maintaining a vacuum for operation in a vacuum state, the feed draw units are connected to a driving means to be driven up and down at the same time. It relates to a panel conveying apparatus for a vacuum chamber provided in the feed draw unit when the power supply to the means and the support bar driven by the mutual operation of the magnetic field is installed to raise and lower the panel.

일반적으로, 피드 드로우(feed through)는 최근 방사선 장치 및 인공위성 등에 필요한 부품의 초정밀 부품 제작에 사용되는 것으로서 고온?고진공 이종접합 분야에서 적용된다.In general, the feed through (feed through) is used in the manufacture of ultra-precision parts of the components required for radiation devices and satellites in recent years, is applied in the field of high temperature and high vacuum heterojunction.

그리고, 상기 피드 드로우는 반도체(LCD) 산업 및 진공산업에서 진공 내 물체를 이송 또 는 동력 전달하는데 필요한 장치로서 파티클의 발생 없이 진공기밀을 유지하면서 대기압에서의 동력전달을 가능토록 설치된다.In addition, the feed draw is a device required to transfer or power an object in a vacuum in the semiconductor (LCD) industry and the vacuum industry, and is installed to enable power transmission at atmospheric pressure while maintaining a vacuum tightness without generating particles.

이와 같은 피드드로우에서 진공의 동력전달 방식에 사용되는 기술로서 비접촉식의 밀봉 실로서는 자성 유체 실의 기술이 알려져 있으며, 이와 같은 비접촉식 유체실의 방법으로 특허 제628488호에 자성체로 이루어진 축과 자성 유체 실 사이를 자성 유체에 의해서 밀봉하는 자성유체실의 구성이 개시되어 있다.As a technique used for the power transmission method of vacuum in such a feed draw, a technique of a magnetic fluid seal is known as a non-contact sealing seal. As a method of such a non-contact fluid seal, a shaft made of a magnetic body and a magnetic fluid seal are disclosed in Patent No. 624888. Disclosed is a configuration of a magnetic fluid chamber that seals the gaps with magnetic fluid.

또한, 진공챔버 내측에서 피드 드로우하는 방식과 관련되어 파티클 등의 발생을 최소화 하면서 스테이지를 구동하도록 하는 기술이 특허 제731910호에 개시되어 있어 진공챔버 내측에서 전자석에 의해 파티클의 생성없이 스테이지를 구동하는 구성이 개시되어 있다.In addition, the technique for driving the stage while minimizing the generation of particles, etc. in connection with the method of the feed draw inside the vacuum chamber is disclosed in Patent No. 731910 to drive the stage without the generation of particles by the electromagnet inside the vacuum chamber The configuration is disclosed.

그러나, 상기와 같은 종래의 피드 드로우에 관련된 기술은, 자성유체에 의해 실 작업을 수행하여 외부에서 작용되는 진공도에 따라 축과 자성유체실 사이에 틈새가 발생될 우려가 있다.However, in the related art of the conventional draw draw, there is a possibility that a gap is generated between the shaft and the magnetic fluid chamber according to the degree of vacuum applied from the outside by performing the sealing operation by the magnetic fluid.

또한, 전자석을 이용한 피드 드로우 역시 진공챔버 내측에 구동전원을 공급하기 위한 케이블이 각각 투입토록 되어 진공유지가 힘들게 되는 단점이 있는 것이다.In addition, the feed draw using the electromagnet also has a disadvantage in that it is difficult to maintain the vacuum because the cables for supplying the driving power to the inside of the vacuum chamber, respectively.

상기와 같은 종래의 문제점들을 개선하기 위한 본 발명의 목적은, 편마모로 인한 지지불량을 방지할 수 있도록 하고, 파티클의 생성없이 구동장치의 동작이 가능토록 하며, 액튜에이터가 일정한 스트로크를 정확하게 왕복 이동할 수 있도록 하고, 파티클의 생성이나 패널의 수평불량현상을 방지토록 하여 이에 따른 패널의 가공불량을 방지할 수 있도록 하며, 구동장치의 승,하강 동작이 정확하게 이루어 질 수 있도록 하는 진공챔버용 패널 이송장치를 제공하는 데 있다.An object of the present invention for improving the conventional problems as described above, to prevent the support failure due to uneven wear, to allow the operation of the drive device without generating particles, the actuator can accurately reciprocate a certain stroke The panel conveying device for the vacuum chamber to prevent the generation of particles or the horizontal failure of the panel to prevent the processing defects of the panel according to, and to ensure that the operation of the drive device up and down accurately To provide.

본 발명은 상기 목적을 달성하기 위하여, 진공상태에서의 작업을 위해 진공을 유지하면서 다수의 패널이 적층토록 되는 진공챔버에 복수의 피드드로우유니트를 밀봉결합한 후 상기 피드드로우유니트는 구동수단에 연결되어 동시에 승하강토록 설치되어 구동수단에 전원의 공급시 피드드로우유니트에 구비되면서 자기장의 상호 동작에 의해 구동되는 지지바가 패널을 승하강하도록 설치되는 진공챔버용 패널 이송장치를 제공한다.In order to achieve the above object, the feed draw unit is connected to a driving means after sealingly coupling a plurality of feed draw units to a vacuum chamber in which a plurality of panels are stacked while maintaining a vacuum for working in a vacuum state. At the same time it is provided to raise and lower at the same time is provided in the feed draw unit when the power supply to the drive means provides a panel conveying apparatus for the vacuum chamber is installed to raise and lower the support bar driven by the mutual action of the magnetic field.

그리고, 본 발명의 피드드로우유니트는, 진공챔버에 연결토록 연결부가 구비되는 중공상의 드로우몸체, 상기 드로우몸체의 외경에 슬라이딩토록 설치되면서 제1마그네트가 장착되는 고정블럭, 상기 제1마그네트와 대응되는 제2마그네트가 고정되면서 위치결정부시를 통하여 일단이 지지되는 액튜에이터, 상기 드로우몸체의 일단을 밀봉토록 설치되는 커버부재의 조립구조로 이루어진 진공챔버용 패널 이송장치를 제공한다.In addition, the feed draw unit of the present invention, a hollow draw body having a connecting portion to be connected to the vacuum chamber, a fixed block to which the first magnet is mounted while being installed so as to slide on the outer diameter of the draw body, the first magnet corresponding to the Provided is a panel conveying apparatus for a vacuum chamber comprising an assembly structure of an actuator, one end of which is supported by a positioning bush while the second magnet is fixed, and a cover member which is installed to seal one end of the draw body.

더하여, 본 발명의 제1,2마그네트는, 자장형성편을 개재하여 일정간격 이격설치되면서 그 양단에 액튜에니터 및 고정블럭에 지지되는 스토퍼가 각각 장착되는 구성으로 이루어 진 진공챔버용 패널 이송장치를 제공한다.In addition, the first and second magnets of the present invention, the vacuum chamber panel transfer device consisting of a stopper which is supported by the actuator and the fixed block is installed at both ends while being spaced apart at regular intervals through the magnetic field forming piece. To provide.

또한, 본 발명의 액튜에이터는, 내경측이 일정길이를 갖도록 절삭되는 이송홀이 형성되어 이에 대응되는 가이드바가 커버부재의 일측에 연결되는 구성으로 이루어 진 진공챔버용 패널 이송장치를 제공한다.In addition, the actuator of the present invention provides a panel conveying apparatus for a vacuum chamber made of a configuration in which a conveying hole is formed so that the inner diameter is cut to have a predetermined length and a guide bar corresponding thereto is connected to one side of the cover member.

계속하여, 본 발명의 구동수단은 구동모터와 이에 연결되는 스크류바 및 상기 스크류바가 치합되면서 복수의 고정블럭이 각각 지지되는 이송플레이트로서 이루어진 진공챔버용 패널 이송장치를 제공한다.Subsequently, the driving means of the present invention provides a panel conveying apparatus for a vacuum chamber made of a driving motor, a screw bar connected thereto, and a conveying plate on which a plurality of fixed blocks are supported while the screw bars are engaged.

이상과 같이 본 발명에 의하면, 편마모로 인한 지지불량을 방지하고, 파티클의 생성없이 구동장치의 동작이 가능하며, 지지바가 일정한 스트로크를 정확하게 이동하고, 파티클이나 패널의 수평불량현상을 방지토록 하여 이에 따른 패널의 가공불량을 방지하며, 구동장치의 승하강 동작이 정확하게 이루어 지는 효과가 있는 것이다.According to the present invention as described above, it is possible to prevent the support failure due to uneven wear, the operation of the drive device without the generation of particles, the support bar to move a certain stroke accurately, to prevent the horizontal failure of particles or panels It prevents the processing failure of the panel according to, and the effect of the lifting operation of the drive device is made accurately.

도1은 본 발명에 따른 피드드로우유니트가 장착된 진공챔버를 도시한 측면도이다.
도2는 본 발명에 따른 피드드로우유니트를 도시한 사시도이다.
도3은 본 발명에 따른 피드드로우유니트를 도시한 부분단면도이다.
도4는 본 발명에 따른 피드드로우유니트를 도시한 단면도이다.
도5는 본 발명의 다른 실시예에 따른 피드드로우유니트를 도시한 단면도이다.1 is a side view showing a vacuum chamber equipped with a feed draw unit according to the present invention.
2 is a perspective view showing a feed draw unit according to the present invention.
3 is a partial cross-sectional view showing a feed draw unit according to the present invention.
4 is a cross-sectional view showing a feed draw unit according to the present invention.
5 is a cross-sectional view showing a feed draw unit according to another embodiment of the present invention.

이하, 첨부된 도면에 의거하여 본 발명의 실시예를 상세하게 설명하면 다음과 같다.Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

도1은 본 발명에 따른 피드드로우유니트가 장착된 진공챔버를 도시한 측면도이다고, 도2는 본 발명에 따른 피드드로우유니트를 도시한 사시도이며, 도3은 본 발명에 따른 피드드로우유니트를 도시한 부분단면도이고, 도4는 본 발명에 따른 피드드로우유니트를 도시한 단면도이며, 도5는 본 발명의 다른 실시예에 따른 피드드로우유니트를 도시한 단면도이다.1 is a side view showing a vacuum chamber equipped with a feed draw unit according to the present invention, Figure 2 is a perspective view showing a feed draw unit according to the present invention, Figure 3 shows a feed draw unit according to the present invention 4 is a cross-sectional view showing a feed draw unit according to the present invention, Figure 5 is a cross-sectional view showing a feed draw unit according to another embodiment of the present invention.

본 발명은, 진공상태에서의 작업을 위해 진공을 유지하면서 다수의 패널이 적층토록 되는 진공챔버(100)에 복수의 피드드로우유니트(300)를 밀봉결합한 후 상기 피드드로우유니트(300)는 구동수단(500)에 연결되어 구동수단의 동작시 각각의 피드르로우유니트(300)가 동시에 동작토록 설치된다.According to the present invention, after the plurality of feed draw units 300 are hermetically coupled to the vacuum chamber 100 in which a plurality of panels are stacked while maintaining a vacuum for operation in a vacuum state, the feed draw units 300 are driven. It is connected to the 500, each feed roller unit 300 is installed to operate at the same time during the operation of the drive means.

이때, 상기 피드드로우유니트(300)는, 환봉의 내외경측에 각각 설치되어 상호 대응되는 인력을 작용토록 자기장을 형성되는 복수의 제1,2마그네트(311)(313)가 각각 설치된다. At this time, the feed draw unit 300 is provided on the inner and outer diameter side of the round bar, respectively, a plurality of first and second magnets (311, 313) are formed to form a magnetic field to act corresponding to each other.

상기 피드드로우유니트(300)는, 진공챔버(100)에 연결토록 연결부(320)가 구비되는 중공상의 드로우몸체(350), 상기 드로우몸체(350)의 외경에 슬라이딩토록 설치되면서 제1마그네트(311)가 장착되는 고정블럭(310), 상기 제1마그네트(311)와 대응되는 제2마그네트(313)가 고정되면서 위치결정부시(375)를 통하여 일단이 지지되는 액튜에이터(370), 상기 드로우몸체(350)의 일단을 밀봉토록 설치되는 커버부재(390)의 조립구조로 이루어진다.The feed draw unit 300, the hollow draw body 350, which is provided with a connecting portion 320 to be connected to the vacuum chamber 100, the first magnet 311 while being installed to slide on the outer diameter of the draw body 350 The fixed block 310 is mounted, the second magnet 313 corresponding to the first magnet 311, the actuator 370, one end is supported through the positioning bush 375, the draw body ( It consists of an assembly structure of the cover member 390 is installed to seal one end of the 350.

이때, 상기 제1,2마그네트는, 자장형성편(340)을 개재하여 일정간격 이격설치되면서 그 양단에 액튜에니터 및 고정블럭에 지지되는 스토퍼(360)가 각각 장착된다.In this case, the first and second magnets are installed at regular intervals through the magnetic field forming piece 340 and the stoppers 360 supported by the actuator and the fixed block are mounted at both ends thereof.

그리고, 상기 마그네트와 그 일측에 개재되는 자장형성편은 액튜에이터 또는 고정블럭에 각각 장착될 때 드로우몸체(350)의 내경 또는 외경측에서 마찰이 방지토록 설치된다.In addition, the magnet and the magnetic field forming pieces interposed on one side of the magnet are installed to prevent friction at the inner or outer diameter side of the draw body 350 when mounted on the actuator or the fixed block, respectively.

한편, 상기 액튜에이터(370)는, 내경측이 일정길이를 갖도록 절삭되는 이송홀(373)이 형성되어 이에 대응되는 가이드바(395)가 커버부재(390)의 일측에 연결된다.On the other hand, the actuator 370, a feed hole 373 is formed so that the inner diameter is cut to have a predetermined length is formed so that the corresponding guide bar 395 is connected to one side of the cover member 390.

이때, 상기 이송홀(373)의 일측에 액튜에이터(370)를 관통하는 관통홈(373a)이 더 구비된다.In this case, a through hole 373a penetrating the actuator 370 is further provided at one side of the transfer hole 373.

계속하여, 상기 구동수단(500)은, 구동모터(510)와 이에 연결되는 스크류(530)바 및 상기 스크류바가 치합되면서 복수의 고정블럭(310)이 각각 지지되는 이송플레이트(550)로서 이루어진다.Subsequently, the driving means 500 includes a driving motor 510, a screw 530 bar connected thereto, and a transfer plate 550 on which the plurality of fixed blocks 310 are supported as the screw bars are engaged.

상기와 같은 구성으로 이루어진 본 발명의 동작을 설명한다.The operation of the present invention having the above configuration will be described.

도1 내지 도5에서 도시한 바와같이 본 발명은, 진공챔버(100)의 내측에 진공을 형성하여 그 내측에 적층되는 패널(P)에 고온?고진공 상태에서 접합 등의 다양한 작업을 수행하게 된다.As shown in FIGS. 1 to 5, the present invention forms a vacuum inside the vacuum chamber 100 and performs various operations such as bonding in a high temperature and high vacuum state to the panel P stacked inside the vacuum chamber 100. .

이때, 상기 진공챔버(100)에 연결되는 피드드로우유니트(300)는 플랜지 등이 구비되어 실러를 개재한 후 볼트 등으로 연결되는 연결부(320)를 통하여 진공챔버(100)에 연결하면 진공의 형성이 가능하여 그 연결부에서 기밀이 유지되므로써 정확한 진공도의 형성이 가능토록 된다.At this time, the feed draw unit 300 connected to the vacuum chamber 100 is provided with a flange, and the like, through the sealer and connected to the vacuum chamber 100 through a connection part 320 connected by a bolt or the like to form a vacuum. This allows the formation of an accurate vacuum degree by keeping the airtight at the connection portion.

즉, 상기 피드드로우 유니트(300)는 일단이 진공챔버(100)의 내측에 삽입된 후 밀봉되는 중공의 파이프 형상이면서 그 단부에 커버부재(390)가 결합되는 구성으로 진공도의 형성이 용이하게 된다.That is, the feed draw unit 300 has a hollow pipe shape, one end of which is inserted into the vacuum chamber 100 and then sealed, and the cover member 390 is coupled to the end thereof, thereby easily forming a vacuum degree. .

더하여, 상기 피드드로우 유니트(300)는, 진공챔버(100)의 내측에 노출되는 중공상 파이프 상단에 유동홀(359)이 형성되어 액튜에이터(370)의 승하강시 이에 따른 유체압력에 의해 발생되는 이동간의 간섭을 최소화 된다. In addition, the feed draw unit 300, the flow hole 359 is formed in the upper end of the hollow pipe exposed to the inside of the vacuum chamber 100, the movement generated by the fluid pressure according to the lifting and lowering of the actuator 370 Interference is minimized.

그리고, 상기 진공챔버(100)는 그 내측에 적재되는 복수의 패널 하부가 각각의 피드드로우유니트(300)에서 돌출되는 액튜에이터(370)에 의해 지지되어 수평상태로 지지토록 되고, 상기 피드드로우유니트(300)에 연결되는 구동수단의 동작시 각각의 액튜에이터(370)가 동시에 상승하거나 하강하는 구성으로 패널(P)을 승하강 시킨다.In addition, the vacuum chamber 100 is supported by an actuator 370 protruding from each feed draw unit 300 by a plurality of lower panels mounted therein so as to be supported in a horizontal state, and the feed draw unit ( During the operation of the driving means connected to 300, each actuator 370 is raised or lowered in a configuration in which the actuators 370 simultaneously raise or lower.

이때, 상기 구동수단(500)은, 구동모터(510)와 이에 연결되는 스크류(530)바 및 상기 스크류바가 치합되면서 복수의 고정블럭(310)이 각각 지지되는 이송플레이트(550)로서 이루어져 이송플레이트에 각각 지지되는 고정블럭(310)이 각각 상승할 때 상기 고정블럭과 인력이 작용토록 설치되어 액튜에이터의 상승이 가능토록 된다.At this time, the driving means 500, the drive motor 510 and the screw 530 connected to the bar and the screw bar is engaged with the conveying plate 550 is a plurality of fixed blocks 310 are supported, respectively. When the fixed blocks 310 respectively supported on the ascending, the fixed block and the attraction force is installed so that the actuator can be raised.

더하여, 상기 피드드로우유니트(300)는, 환봉의 내외경측에 각각 설치되어 상호 대응되는 인력을 작용시키도록 자기장이 형성되는 복수의 제1,2마그네트(311)(313)가 각각 설치되는 구성으로 드로우몸체(350)의 내경 및 외경측에 각각 위치하는 제1,2마그네트 사이의 인력에 의해 어느 하나의 마그네트 즉 제2마그네트(313)가 구동수단에 의해 이동할 때 액튜에이터(370)를 동작시키는 제1마그네트 역시 이동토록 된다.In addition, the feed draw unit 300 has a configuration in which a plurality of first and second magnets 311 and 313, each of which is installed at each of the inner and outer diameter sides of the round bar and has a magnetic field formed so as to apply a corresponding attraction force, are respectively installed. An actuator for operating the actuator 370 when any one of the magnets, ie, the second magnet 313, is moved by the driving means due to the attraction force between the first and second magnets located on the inner and outer diameters of the draw body 350, respectively. One magnet will also be moved.

이때, 상기 피드드로우유니트(300)는, 진공챔버(100)에 연결토록 연결부(320)가 구비되는 중공상의 드로우몸체(350), 상기 드로우몸체(350)의 외경에 슬라이딩토록 설치되면서 제1마그네트(311)가 장착되는 고정블럭(310), 상기 제1마그네트(311)와 대응되는 제2마그네트(313)가 고정되면서 위치결정부시(375)를 통하여 일단이 지지되는 액튜에이터(370), 상기 드로우몸체(350)의 일단을 밀봉토록 설치되는 커버부재(390)의 조립구조로 이루어져 마그네트가 각각 드로우몸체(350)에 마찰되지 않는 상태에서 동작토록 설치된다.At this time, the feed draw unit 300, the hollow draw body 350 is provided with a connecting portion 320 to be connected to the vacuum chamber 100, the first magnet while being installed so as to slide on the outer diameter of the draw body 350 Actuator 370, one end of which is supported by the positioning bush 375 while the fixed block 310 on which the 311 is mounted, the second magnet 313 corresponding to the first magnet 311 is fixed, and the draw Consists of an assembly structure of the cover member 390 to seal one end of the body 350 is installed so as to operate in a state that the magnet is not rubbed to the draw body 350, respectively.

이때, 상기 제1,2마그네트는, 자장형성편(340)을 개재하여 일정간격 이격설치되면서 그 양단에 액튜에니터 및 고정블럭에 지지되는 스토퍼(360)가 각각 장착되는 구성으로 마그네트를 액튜에이터 및 고정블럭에서 견고하게 지지토록 한다.In this case, the first and second magnets are installed at a predetermined interval through the magnetic field forming piece 340, and the actuator and the stopper 360 supported by the fixing block are mounted on both ends thereof, respectively. Make sure that it is firmly supported by the stationary block.

한편, 상기 액튜에이터(370)는, 내경측이 일정길이를 갖도록 절삭되는 이송홀(373)이 형성되어 이에 대응되는 가이드바(395)가 커버부재(390)의 일측에 연결되는 구성으로 액튜에이터가 가이드바 및 위치결정부시(375)를 통하여 상하단이 지지되어 편심에 의한 동작 불량을 방지하게 된다.On the other hand, the actuator 370, the actuator is guided in the configuration that the inner hole side is formed so that the cutting hole 373 is cut to have a predetermined length and the corresponding guide bar 395 is connected to one side of the cover member 390 The upper and lower ends of the bar and the positioning bush 375 are supported to prevent a malfunction due to the eccentricity.

이때, 상기 이송홀(373)의 일측에 액튜에이터(370)를 관통하는 관통홈(373a)이 더 구비되어 가이드바(395)의 상승시 액튜에이터(370)의 이송홀(373)에서의 이송불량을 방지토록 한다.In this case, a through hole 373a penetrating the actuator 370 is further provided at one side of the transfer hole 373 so that the transfer failure of the actuator 370 in the transfer hole 373 when the guide bar 395 is raised. Prevent it.

더하여, 상기 스토퍼(360)가 드로우몸체에 밀착되어 이동될 때 마그네트 및 자장형성편(340)은 드로우몸체에서 이격토록 되어 인력이 작용하면서 이동은 용이하게 되고, 상기 고정블럭 역시 동일한 구성으로 드로우 몸체를 중심으로 이동이 자유롭게 된다.In addition, when the stopper 360 is moved in close contact with the draw body, the magnet and the magnetic field forming piece 340 are spaced apart from the draw body to facilitate movement while the fixed block acts as well, and the fixing block also has the same configuration as the draw body. It is free to move around.

이상과 같은 구성을 통하여 마그네트의 인력에 의해 상호 동작토록 되는 액튜에이터 및 고정블럭을 진공챔버에 밀봉결합되는 드로우몸체의 내경 및 외경측에 설치하는 구성으로 파티클의 생성없이 진공챔버 내측의 패널을 용이하게 승하강시킬 수 있도록 되는 것이다.Through the above configuration, the actuator and the fixed block which are mutually operated by the attraction force of the magnet are installed on the inner and outer diameter sides of the draw body which are sealed to the vacuum chamber to facilitate the panel inside the vacuum chamber without generating particles. It will be able to raise and lower.

100...진공챔버 300...피드드로우 유니트
320...연결부 350...드로우몸체
360...스토퍼 375...위치결정부시
390...커버부재 500...구동수단
550...이송플레이트100 ... vacuum chamber 300 ... feed draw unit
320 ... Connection 350 ... Draw Body
360 ... stopper 375 ... positioning bushing
390 ... cover member 500 ... driving means
550 ... Transfer Plate

Claims (4)

진공챔버(100)에 복수의 피드드로우유니트(300)를 밀봉결합한 후 상기 피드드로우유니트(300)는 구동수단(500)에 연결되어 구동수단의 동작시 각각의 피드르로우유니트(300)가 동시에 동작토록 설치되고,
상기 피드드로우유니트(300)는,
a)환봉의 내외경측에 각각 설치되어 상호 대응되는 인력을 작용토록 자기장을 형성되는 복수의 제1,2마그네트(311)(313)가 각각 설치되며,
b)진공챔버(100)에 연결토록 연결부(320)가 구비되는 중공상의 드로우몸체(350), 상기 드로우몸체(350)의 외경에 슬라이딩토록 설치되면서 제1마그네트(311)가 장착되는 고정블럭(310), 상기 제1마그네트(311)와 대응되는 제2마그네트(313)가 고정되면서 위치결정부시(375)를 통하여 일단이 지지되는 액튜에이터(370), 상기 드로우몸체(350)의 일단을 밀봉토록 설치되는 커버부재(390)의 조립구조로 이루어지는 진공챔버용 패널 이송장치After the plurality of feed draw units 300 are hermetically coupled to the vacuum chamber 100, the feed draw units 300 are connected to the driving means 500 so that each feed draw unit 300 is operated at the same time. Installed to operate,
The feed draw unit 300,
a) a plurality of first and second magnets (311, 313) are respectively provided on the inner and outer diameter side of the round bar to form a magnetic field to act on the corresponding attraction force, respectively;
b) a hollow draw body 350 provided with a connection part 320 to be connected to the vacuum chamber 100, and a fixed block to which the first magnet 311 is mounted while slidingly installed at an outer diameter of the draw body 350 ( 310, the actuator 370, one end of which is supported by the positioning bush 375 while the second magnet 313 corresponding to the first magnet 311 is fixed, and one end of the draw body 350 are sealed. Panel conveying device for the vacuum chamber consisting of the assembly structure of the cover member 390 is installed 제1항에 있어서, 상기 제1,2마그네트는, 자장형성편(340)을 개재하여 일정간격 이격설치되면서 그 양단에 액튜에니터 및 고정블럭에 지지되는 스토퍼(360)가 각각 장착되는 것을 특징으로 하는 진공챔버용 패널 이송장치According to claim 1, wherein the first and second magnets, the stopper 360 is supported by the actuator and the fixed block is installed at both ends while being spaced apart at regular intervals through the magnetic field forming piece 340, respectively. Panel conveying device for vacuum chamber 제1항에 있어서, 상기 액튜에이터(370)는, 내경측이 일정길이를 갖도록 절삭되면서 관통홈(373a)이 연결되는 이송홀(373)이 형성되면서 상기 이송홀에는 이에 대응토록 커버부재(390)의 일측에 연결되는 가이드바(395)가 더 장착되는 것을 특징으로 하는 진공챔버용 패널 이송장치The method of claim 1, wherein the actuator 370, the inner diameter side is cut to have a predetermined length while the through hole 373a is connected to the transfer hole 373 is formed while the transfer hole corresponding to the cover member 390 Guide bar (395) connected to one side of the vacuum chamber panel transport apparatus, characterized in that is further mounted 제1항에 있어서, 상기 구동수단(500)은, 구동모터(510)와 이에 연결되는 스크류(530)바 및 상기 스크류바가 치합되면서 복수의 고정블럭(310)이 각각 지지되는 이송플레이트(550)로서 이루어지는 것을 특징으로 하는 진공챔버용 패널 이송장치The transfer plate 550 of claim 1, wherein the driving means 500 includes a driving motor 510, a screw 530 bar connected to the driving motor, and a plurality of fixed blocks 310 supported by the screw bars. Panel conveying apparatus for a vacuum chamber, characterized in that made as
KR1020100069561A 2010-07-19 2010-07-19 an elevating device for panel the vacuum chamber KR101274461B1 (en)

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