JPS60168579A - Lifter mechanism - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a lifter mechanism used in various apparatuses in which contamination with dust and other impurities is extremely disliked, and particularly to a lifter mechanism used in glass substrate cleaning apparatuses.

In conventionally known equipment for cleaning glass substrates used in the manufacture of integrated circuits, reticles, wafers, etc., a lifter mechanism that lifts and lowers glass substrates in a cleaning tank to a cleaning position is connected to a drive unit and a machine. Since the parts are connected to each other, the two parts are airtightly sealed to prevent impurities generated from rubbing or other mechanical contact between the parts from entering the cleaning tank.

Further, in the conventionally known cleaning device having such a configuration,
It is necessary to extend the lifter body that lifts and lowers the glass substrate into the cleaning apparatus from the lifter mechanism side. Therefore, the seal portion that seals between the lifter mechanism and the cleaning tank is It was necessary to seal the inside of the part so that it could be inserted, which was extremely problematic in terms of cost and accuracy.

Furthermore, in the cleaning device having the above configuration, it is difficult to completely seal the glass substrate, and therefore, the pure water sprayed and retained in the cleaning tank to clean the glass substrate may leak into the lifter mechanism. In addition, impurities that are extended into the cleaning tank or caused by rubbing between the lid member and the seal part enter the cleaning tank, and the impurities float in the pure water and adhere to the glass substrate. There were many cases where I ended up doing it.

However, the glass substrate cannot be used even if a slight amount of impurity adheres to it, and for this reason, when using a conventionally known cleaning device that is likely to have the above-mentioned impurity attached. requires detailed inspection in the post-process after cleaning, and since the inspection is generally performed by humans, inspection errors are likely to occur and a large amount of time is consumed in inspection man-hours.

For this reason, it has long been desired to provide a cleaning device that is free from the possibility of generating impurities.

In view of the drawbacks of the prior art, the present invention mainly provides a lifter mechanism used in the cleaning device, in which the driving portion is moved outside the device, and the main body of the lid mechanism is moved inside the device in accordance with the movement of the driving portion. The object of the present invention is to provide a lifter mechanism for a car that can raise and lower the vehicle while the two parts are completely isolated.

As a result, it is possible to provide a cleaning device that does not require a seal between the lifter mechanism body and the cleaning tank, which eliminates the risk of water leakage, reduces the number of parts, and significantly reduces costs. Since there are no factors that cause impurities such as friction between the main body and the sealing member, there is no possibility that impurities will enter the cleaning device.

In addition, since almost no impurities are generated, it is possible to omit a detailed inspection process in the post-cleaning process, making it possible to provide an extremely efficient glass substrate cleaning apparatus.

The characteristics of the present invention are as follows: a lift passageway opened in the main body of the device; a lifter body disposed within the passageway; Accordingly, the lifter main body is configured to have a driving part held hollow in the passage, and to move the driving part up and down along the lifting passage, so that the lifter main body follows and goes up and down.

The present invention will be described in detail below based on the drawings.

1 and 2 show a glass substrate cleaning apparatus according to an embodiment of the present invention, including a cleaning tank A that continuously scrubs both surfaces of untreated glass substrates one by one, and an interior of the cleaning tank A. The cleaning tank A is configured with a litter mechanism B disposed below the cleaning tank A for raising and lowering the glass substrate l placed on the cleaning tank A.

The cleaning tank A has an open upper surface, and has a pure water outlet 2 and a passage pipe attachment 03 bored in the lower surface, and a cassette mounting base on which the cassette 4 is placed above the installation opening 3 in the cleaning tank A. 5
, a guide roller 6 that regulates the ascending position of the glass substrate 1, and a brush body 7 that scrubs both sides of the glass substrate 1.
A pure water injection mechanism 8 for showering pure water onto the glass substrate l is provided, respectively.

The cassette 4 is configured so that a plurality of glass substrates 1 can be held horizontally and vertically by holding members (not shown) disposed on both side wall surfaces, and both upper and lower ends are opened, and when the lifter main body 20 (described later) is lifted, the cassette 4 is opened. The glass substrate 1 is configured to be extrudable upward.

The cassette mounting base 5 for mounting and fixing the cassette 4 is configured to move in the horizontal direction each time the glass substrate 1 is raised and lowered, so that the unprocessed glass substrate 1 is always located on the vertical extension line of the lifter main body 20. . Further, the cassette mounting base 5 is opened on a vertical extension line of the lifter main body 20, so that the lifter main body 20 can be inserted therethrough.

The guide roller 6 is disposed on a vertical extension line of the lifter main body 20, and when the lifter main body 20 rises, the cassette 4
The structure is such that the glass substrate 1 that has come off further is raised to the spray rinse position while being positioned.

A pair of brush bodies 7 are disposed approximately at the center of the guide roller 6 on both the left and right sides of the guide roller 6, with brush surfaces 7a facing each other, and the rotation of the brush bodies 7 scrubs both sides of the glass substrate 1. Washed.

A pure water spraying mechanism 8 is disposed diagonally above the guide roller 6, with a spout 8a facing the guide roller 6, and performs pre-cleaning by showering the glass substrate l housed in the cassette 4. Glass substrate after cleaning with brush body 7!
The structure is such that spray rinsing is performed after

Further, a pure water discharge pipe 9 formed of a PVC pipe is attached to the pure water discharge port 2 at the bottom of the cleaning tank A, and the discharge pipe 8 is suspended downward from the discharge port 2 and has an appropriate length. A drain valve 10 is installed in the middle of the horizontal conduit 9a, and an on-off (flow rate adjustment) valve (not shown) is attached to the terminal end of the horizontal conduit 9a.

An elevating passage pipe 11 is connected on a vertical line connecting the attachment port 3 bored at the bottom of the cleaning tank A and the horizontal pipe line 9a on the outlet side of the drain valve IO.

The lifting passage pipe 11 is formed of a cylindrical non-magnetic pipe such as a stainless steel pipe or a PvC pipe, and its length is small enough to allow the glass substrate 1 to reach the spray rinse position by lifting and lowering the lifter main body 20. Form to a certain length. .

The lifter main body 20 is disposed inside the passage pipe 11, and the drive section 30 of the lifter main body 20 is disposed outside the passage pipe 11.

The lifter main body 20 includes a cylindrical internal magnet 21 formed to be slightly smaller than the inner diameter of the passage pipe 11 and configured to fit loosely within the passage pipe 11, and a cylindrical internal magnet 21 extending vertically from the upper surface of the internal magnet 21. Two circular lifter rods 2
2 and more.

The internal magnet 21 is made of a permanent magnet, and the tip of the lifter rod 22 extends into the cleaning tank A, and is housed in the cassette 4 by raising and lowering the lifter rod 22. The glass substrate 1 is configured to be able to rise to the spray rinse position (the position shown by the imaginary line in the figure) and return to the original cassette 4.

Further, a ring-shaped stopper member 25 is disposed near the horizontal pipe line 9a on the lower inner wall surface of the passage pipe 11, and the ring-shaped stopper member 25 prevents the lifter body 20 from falling and positions it at an appropriate position. We aim to On the other hand, on the upper surface of the bottom of the cleaning tank A above the passage pipe 11, a guide plate 23 having a gap 23a through which pure water in the cleaning tank A can flow down is disposed in the passage pipe 11. 23 has a guide hole 23b drilled through which the lifter main body 20 can be inserted, and by inserting the lifter rod 22 into the guide hole 23b, the lifter rod 22 can move through the passage pipe 1 without causing lateral vibration.
It is configured so that the inside of the room can be raised and lowered.

On the other hand, the lifter mechanism driving section 30
A cylindrical external magnet (/') 31 having an inner diameter slightly larger than the outer diameter and arranged around the passage pipe 11; and a rack rail 32 disposed parallel to the passage pipe 11. It is composed of a linear head motor 33 that meshes with the linear head motor 33.

The external magnet 31 is formed of a permanent magnet or an electromagnet with a polarity opposite to that of the internal magnet 21, and is connected to the linear 1. It is fixed to the motor 33.

The rack rail 32 is arranged parallel to the passage pipe 11 and over almost the entire length of the passage pipe 11 via mounting plates 34 and 35 fixed to both the upper and lower ends of the passage pipe 11. ,)
Ru.

Further, a vertical shaft 36 disposed between the remounting plates 34 and 35 on the sides of the rack rail 32 has a detection body 37 movable up and down attached thereto, which adjusts the vertical distance of the linear rad motor 33. In correspondence with the proximity sensor 38 attached to the fixed plate 38 on the side of the linear torad motor 33, the reciprocating distance of the linear torad motor 33 can be adjusted.

The linear gear motor 33 includes a linear head 3.3a that meshes with the rack rail 32 and a drive motor 33b, and rotates the drive motor 33b in the forward or reverse direction in response to a signal from the proximity sensor 38.
It is configured to be able to reciprocate on the top.

As a result, the internal magnet 21 disposed inside the lifting passage pipe ll is held in a hollow state without contacting the inner wall surface of the passage pipe 11 by the magnetic force of the external magnet 31,
In addition, as the linear head motor 33 moves up and down, the external magnet 31 fixed to the linear head motor 33 moves up and down, and the internal magnet 21 moves up and down following the up and down movement of the external magnet 31. becomes.

Next, the operation of this embodiment will be explained.

In the cleaning tank A, when the cassette 4 containing the untreated glass substrate 1 is placed and fixed on the cassette mount 5, the pure water injection mechanism 8 constantly showers the glass substrate 1 with water,
Pre-cleaning is performed.

After pre-cleaning, by rotating the near head motor 33 in the forward direction, the external magnet 31 rises along the rack rail 32, and the internal magnet 21 of the lid main body 20, which is magnetically held by the external magnet 31, rise,
As a result, the lifter rod 22 held in position by the guide hole of the guide plate pushes the glass substrate 1 housed in the cassette 4 upward, and pushes it upward along the guide roller 6.

After scrubbing the glass substrate 1 while passing through the rotating brush body 7, the glass substrate 1 rises further and is spray rinsed with pure water spouted from the pure water spout 8a. It is done.

After spray rinsing is completed, the linear gear motor 33 reversely rotates according to the signal from the proximity sensor 38, and the external magnet 31 moves down along the rack rail 32, and the internal magnet 21 and the internal magnet 21, which are magnetically held by the external magnet 31, The glass substrate 1 is connected to the internal magnet 21 and has a lid rod 22 placed on the lifter rod 22.
is lowered until it is stored in the cassette 4.

Next, the cassette mounting base 5 is attached to the next untreated glass substrate 1.
Move until it reaches the vertical extension line of the lid body 20,
Glass substrate 1 is cleaned in the same manner as described above.

After this is repeated and all the glass substrates 1 housed in the cassette 4 have been cleaned, the cassette mounting base 5 is moved to the set position and the cassette 4 is replaced.

On the other hand, the pure water that is injected from the pure water spout 8a and stagnant at the bottom of the cleaning tank A passes through the gap 23a of the guide plate 23 between the lifting passage pipe 11 and the lifter main body 20, and then flows from the horizontal pipe 9a. It is discharged to the outside. As a result, even if impurities are generated due to the lifting and lowering of the lifting mechanism and the lid main body 20, they are discharged to the outside together with the pure water, and there is no possibility that the impurities will stay in the cleaning tank A or flow back.

As is clear from the description of the embodiments, according to the elevating mechanism according to the present invention, the lifter main body is disposed in the elevating passage communicating with the device main body (cleaning tank) and is completely isolated from the outside. , Pure water used for cleaning never leaks outside, and since the lift passage where the lifter body is installed and the equipment body (cleaning tank) are in communication, both can be kept airtight. There is no need for sealing, and sealing members and the like are no longer necessary, and the structure can be simplified. .

In addition, the internal magnet of the lifter main body is held by only the magnetic force of the external magnet of the drive part and the guide hole of the guide plate provided at the bottom of the equipment main body (cleaning tank), without contacting the inner wall surface of the lifting passage. , there is almost no generation of impurities such as dust, and even if impurities occur, there is communication between the equipment body (cleaning tank) and the lifting passage, so the pure water stagnant in the equipment body (cleaning tank) can be removed. By configuring it to flow down, the impurities can be completely discharged.

It has various effects such as

[Brief explanation of drawings]

1 and 2 show a glass substrate cleaning apparatus according to an embodiment of the present invention, with FIG. 1 being a front view and FIG. 2 being a side view.

Claims (1)

[Claims] A lifting passage opened in the device main body, a lid body disposed within the passage, and a drive unit disposed outside the lifting passage and holding the lifter body hollow in the passage by magnetic force. A lifter mechanism, characterized in that the lifter body is moved up and down by moving the drive section up and down along the lifting path.