KR101832723B1 - Vacuum Gate Valve - Google Patents

Vacuum Gate Valve Download PDF

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Publication number
KR101832723B1
KR101832723B1 KR1020160005258A KR20160005258A KR101832723B1 KR 101832723 B1 KR101832723 B1 KR 101832723B1 KR 1020160005258 A KR1020160005258 A KR 1020160005258A KR 20160005258 A KR20160005258 A KR 20160005258A KR 101832723 B1 KR101832723 B1 KR 101832723B1
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KR
South Korea
Prior art keywords
door
inlet
chamber
gate valve
counterweight
Prior art date
Application number
KR1020160005258A
Other languages
Korean (ko)
Other versions
KR20170085745A (en
Inventor
김종엽
한태원
Original Assignee
주식회사 썸백
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 주식회사 썸백 filed Critical 주식회사 썸백
Priority to KR1020160005258A priority Critical patent/KR101832723B1/en
Publication of KR20170085745A publication Critical patent/KR20170085745A/en
Application granted granted Critical
Publication of KR101832723B1 publication Critical patent/KR101832723B1/en

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K27/00—Construction of housing; Use of materials therefor
    • F16K27/04—Construction of housing; Use of materials therefor of sliding valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F16K3/314—Forms or constructions of slides; Attachment of the slide to the spindle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/04—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor
    • F16K31/047—Actuating devices; Operating means; Releasing devices electric; magnetic using a motor characterised by mechanical means between the motor and the valve, e.g. lost motion means reducing backlash, clutches, brakes or return means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Details Of Valves (AREA)
  • Sliding Valves (AREA)

Abstract

The vacuum gate valve of the present invention includes a door that lifts and closes an opening of a chamber; A motor installed at an upper end of the inlet, a shaft connected to the motor, and a sprocket installed on the shaft; A chain coupled to the sprocket and having one side connected to the door; And the lower central portion of the chamber is passed through the other side of the chain so as not to interfere with the entry and exit of the workpiece into the inlet of the chamber when the door is opened A counterweight; A first coupling part provided on a side surface of the door and a second coupling part provided along a side surface of the inlet part and engaged with the first coupling part to guide the door up and down while moving the door toward the inlet part when the door is lowered, A first sliding part made up of a side sliding part made of a door part and an inclined sliding part contacting the lower end of the door when the door is lowered and moving the door toward the entrance part; A second sliding portion for guiding the upward and downward movement of the counterweight; And a control unit.

Description

Vacuum Gate Valve

The present invention relates to a vacuum gate valve, and more particularly to a vacuum gate valve for opening / closing a chamber of a vacuum heat treatment furnace or an inlet portion of a vacuum chamber.

In order to heat the surfaces of machine parts and the like, a high-temperature vacuum heat treatment furnace is used in order to heat the inside of the chamber to a vacuum state and then heat the workpiece by spraying an inert gas or the like. A vacuum gate valve is used to open / close an inlet portion of a workpiece in and out of a chamber in a high-temperature vacuum heat treatment furnace. A vacuum gate valve is used to close the inlet of the vacuum chamber even when a vacuum atmosphere is required for etching, vapor deposition, and sputtering of LCD substrates or semiconductor wafers.

The vacuum gate valve normally opens / closes the inlet portion 30 by moving the door 20 vertically by the cylinder 10 as shown in FIG. 1, and after the chamber is closed, the door 20 is moved toward the inlet portion 30 side A pressing structure is provided.

In order to push the door 20 to the inlet side, it is necessary to vertically move the door 20 as shown in FIG. 1 and horizontally move the door 20 together with the operating rod 21 to the inlet side, There is a method in which the door 20 presses the inlet 30 by rotating one operating rod 21 and a method in which the vertically moved door 20 is extended toward the inlet 30 as shown in FIG.

Such prior art techniques are suitable for small chambers for processing small articles such as light machine parts or LCD substrates / semiconductor wafers. In the case of large chambers, it is necessary to use a large and heavy door with a diameter of more than 2 meters, The drive unit to be driven must also have a large capacity and it is difficult to control the vacuum gate valve quickly and stably.

KR 10-0960030 B, May 28, 2010, Figures 1a-1c KR 10-1389767 B, 2014.4.29., Drawing 5 KR 10-20140085333 A, July 7, 2014, Figures 2a-2c

It is an object of the present invention to provide a vacuum gate valve that can be used in a large vacuum chamber and does not require a large force to drive the door and can be quickly and stably controlled.

The vacuum gate valve of the present invention
A door that moves up and down to open and close the inlet of the chamber;
A motor installed at an upper end of the inlet, a shaft connected to the motor, and a sprocket installed on the shaft;
A chain coupled to the sprocket and having one side connected to the door;
And the lower central portion of the chamber is passed through the other side of the chain so as not to interfere with the entry and exit of the workpiece into the inlet of the chamber when the door is opened A counterweight;
A first coupling part provided on a side surface of the door and a second coupling part provided along a side surface of the inlet part and engaged with the first coupling part to guide the door up and down while moving the door toward the inlet part when the door is lowered, A first sliding part made up of a side sliding part made of a door part and an inclined sliding part contacting the lower end of the door when the door is lowered and moving the door toward the entrance part;
A second sliding portion for guiding the upward and downward movement of the counterweight;

And a control unit.

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According to the vacuum gate valve of the present invention, the vacuum gate valve is applicable to a large-sized chamber, and does not require a large force to drive the door, and can perform a quick and stable operation.

FIGS. 1 to 3 illustrate a conventional vacuum gate valve; FIG.
Fig. 4 is a view of the vacuum gate valve of the present invention in a form in which an opening is opened. Fig.
Figure 5 is a view of the vacuum gate valve of the present invention in the form of a closed inlet;

Hereinafter, the present invention will be described in more detail with reference to the drawings in accordance with embodiments thereof.

Figures 4 and 5 show one embodiment of the vacuum gate valve of the present invention in a side view (Figure 4 (a)) of an opening showing the opening (Figure 4) and an opening (Figure 5) 5 (a)) and a front view (Figs. 4 (b) and 5 (b)). The side view is viewed from the line indicated by the line A-A in the front view, and the front view is viewed from the line indicated by the line B-B of the side view.

A door 20 is provided around the inlet 30 for closing or opening the inlet 30 of the chamber (not shown) in which the vacuum is to be formed.

A motor 40 and a shaft 60 connected to the motor 40 and provided with a sprocket 50 are provided at the upper end of the inlet 30. The sprocket 50 is engaged with the chain 70 to transmit the driving force of the motor 40 to the chain 70. One side of the chain 70 is connected to the upper end of the door 20 and the counterweight 80 is connected to the other side of the chain 70.

The door 20 and the counterweight 80 are provided on both sides of the sprocket 50 or the shaft 60. The motor 40 rotates the sprocket 50 even if the weight of the door 20 is heavy, And the door 20 can be operated to quickly open and close the inlet portion 30 because the driving force of the door 20 is not so strong.

The counterweight 80 preferably has a shape so as not to interfere with the entry and exit of workpieces through the inlet portion 30 when the door 20 is opened. In the present embodiment, as shown in FIGS. 4 and 5, the lower central portion is formed as a through-hole.

The vacuum gate valve of this embodiment is provided with a first sliding portion for guiding the door 20 to move up and down and to move the door 20 toward the inlet portion 30 when the door 20 is lowered.

In this embodiment, the first sliding portion is divided into a side sliding portion 92 and an inclined sliding portion 94.

The side sliding portion 92 includes a first engaging portion 92-1 provided on the side surface of the door 20 and a second engaging portion 92-1 provided along the side surface of the inlet portion 30, And a second engaging portion 92-2 for guiding the door 20 up and down while moving the door 20 toward the entrance portion 30 when the door 20 is lowered.

The inclined sliding portion 94 contacts the lower end of the door 20 when the door 20 descends to move the door 20 toward the entrance portion 30 side.

In the present embodiment, the side sliding portion 92 has a groove shape in which the first engaging portion 92-1 is protruded and the second engaging portion 92-2 is guided by sandwiching the first engaging portion 92-1. But it can also be done in the opposite manner.

Since the door 20 is brought into close contact with the entrance portion 30 by the first sliding portion and the door 20 is brought into close contact with the entrance portion 30 when negative pressure is generated in the chamber for vacuuming, 92 and the inclined sliding portion 94, the door 20 can be closed by closing the inlet portion 30 to create a vacuum atmosphere in the chamber.

The counterweight 80 is also preferably guided up and down by the second sliding portion 85. The second sliding portion 85 can prevent the counterweight 80 from vibrating due to vibrations caused by the operation of the device and collide with a wall or the like constituting the device. The second sliding portion 85 may be constructed in a similar structure as those of the first sliding portion 92 as long as the structure of the side sliding portion 92 is understood.

The operating relationship of the above components is as follows.

The door 20 disposed adjacent to the inlet 30 of the chamber requiring a vacuum is raised and lowered by the chain 70. The chain 70 is coupled to a sprocket 50 provided on a shaft 60 rotated by a motor 40 to move up and down the door 20. The opposite end of the chain connected to the door 20 is provided with a counter weight 80 are connected. The door 20 and the counterweight 80 cancel the weight of each other so that the shaft 60 provided with the door 20 and the counterweight 80 on both sides and the motor 40 for rotating the sprocket 50 are provided on both sides, The driving force of the motor 40 does not need to be large, and the door 20 can be quickly moved up and down according to the rotation of the motor 40. [

When the motor (40) is rotated to close the door (20), the door (20) descends downward along the first sliding portion, and the counterweight (80) naturally ascends. The second engaging portion 92-2 constituting the side sliding portion 92 of the first sliding portion has a groove formed in the vicinity of the lower end thereof toward the inlet portion 30 so that when the door 20 is lowered, (30).

The door 20 is brought into contact with the inclined sliding portion 94 of the first sliding portion when the lowering of the door 20 is completed and the door 20 is slid downward toward the inlet portion 30, The closing operation of the door 20 is completed.

Since the process of opening the door is the reverse of the process of closing, the description is omitted.

10: cylinder 20: door 21: working rod 30:
40: motor 50: sprocket 60: shaft 70: chain 80: counterweight
85: second sliding portion 92: side sliding portion 94: inclined sliding portion

Claims (3)

A door that moves up and down to open and close the inlet of the chamber;
A motor installed at an upper end of the inlet, a shaft connected to the motor, and a sprocket installed on the shaft;
A chain coupled to the sprocket and having one side connected to the door;
And the lower central portion of the chamber is passed through the other side of the chain so as not to interfere with the entry and exit of the workpiece into the inlet of the chamber when the door is opened A counterweight;
A first coupling part provided on a side surface of the door and a second coupling part provided along a side surface of the inlet part and engaged with the first coupling part to guide the door up and down while moving the door toward the inlet part when the door is lowered, A first sliding part made up of a side sliding part made of a door part and an inclined sliding part contacting the lower end of the door when the door is lowered and moving the door toward the entrance part;
A second sliding portion for guiding the upward and downward movement of the counterweight;
The vacuum gate valve comprising: delete delete
KR1020160005258A 2016-01-15 2016-01-15 Vacuum Gate Valve KR101832723B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020160005258A KR101832723B1 (en) 2016-01-15 2016-01-15 Vacuum Gate Valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020160005258A KR101832723B1 (en) 2016-01-15 2016-01-15 Vacuum Gate Valve

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Publication Number Publication Date
KR20170085745A KR20170085745A (en) 2017-07-25
KR101832723B1 true KR101832723B1 (en) 2018-02-27

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102325469B1 (en) 2021-05-18 2021-11-15 (주)사이언스프로버 Vacuum gate valve
NL2030241B1 (en) * 2021-12-22 2023-06-29 Rheavita Bv Device and method for freeze-drying liquid-containing composition

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108775409B (en) * 2018-08-31 2024-06-04 郑州光大阀门制造有限公司 Counterweight type flue gate valve with good sealing performance

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR200411339Y1 (en) * 2005-07-21 2006-03-15 한국기계연구원 Structure for opening and closing door of chamber
JP4385391B2 (en) * 2000-03-21 2009-12-16 三浦工業株式会社 Closed container door opening and closing device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4385391B2 (en) * 2000-03-21 2009-12-16 三浦工業株式会社 Closed container door opening and closing device
KR200411339Y1 (en) * 2005-07-21 2006-03-15 한국기계연구원 Structure for opening and closing door of chamber

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102325469B1 (en) 2021-05-18 2021-11-15 (주)사이언스프로버 Vacuum gate valve
NL2030241B1 (en) * 2021-12-22 2023-06-29 Rheavita Bv Device and method for freeze-drying liquid-containing composition

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KR20170085745A (en) 2017-07-25

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