KR20100110484A - A gate valve - Google Patents

Abstract

PURPOSE: A gate valve for closing and opening a bottom blade is provided to quickly control the operation without equipping a configuration unit such as an actuator and an additional separate anti-corrosion sealing member for fluid passage. CONSTITUTION: A gate valve includes a fluid path(110), a housing(130), a fluid path sealing member(140) and an actuator(150). The fluid passage is connected to the chamber and vacuum pump. The housing has the slider space(120) passing through in the fluid passage through the orthogonal direction. It is inserted between the slider hole and the fluid passage sealing member opens and closes the fluid passage. The actuator transfers the fluid passage sealing member between the slider holes.

Description

A gate valve

The present invention relates to a gate valve, and more particularly to a fluid passage sealing member for opening and closing the fluid passage has an upper blade and a lower blade fixed to the plate spaced above the upper plate by the link and the upper blade A gate for climbing rollers formed on the front end of the gate to climb the stepped stopper formed in the slide space so that the upper blade opens and closes the inlet of the fluid passage and the lower blade opens and closes the outlet of the fluid passage. It is about a valve.

In general, since semiconductors require high precision, high cleanliness and special manufacturing techniques are required. For this reason, the semiconductor device is manufactured in a vacuum state that can completely block the contact of foreign matter contained in the air, and the vacuum working area of the semiconductor manufacturing apparatus and the airtight technology of the semiconductor manufacturing apparatus also have a great influence on the quality of the semiconductor product.

Therefore, the gate valve, which is installed between the chamber in which the semiconductor element integration process is performed and the vacuum pump that sucks air in the chamber, plays an important role because the gate valve that opens and closes the transfer of suction power of the vacuum pump to the chamber plays an important role. Efforts to maintain the same has also emerged as an important problem, in order to solve the problems as described above "gate valve" of Patent No. 10-0717865 is disclosed.

Hereinafter, a conventional gate valve (registered patent No. 10-0717865) will be described with reference to the accompanying drawings.

1A to 1C show a conventional gate valve.

As shown in FIGS. 1A to 1C, the conventional gate valve includes a fluid passage 10 connected between the chamber and the vacuum pump, and a slide space 20 passing through the fluid passage 10 in an orthogonal direction. Is formed in the housing 30, the fluid passage sealing member 40 inserted into the slide space 20 to open and close the fluid passage 10, and the first actuator 50 driving the fluid passage sealing member 40. A second actuator for vertically moving in a direction parallel to the fluid passage 10 and moving the corrosion preventing sealing member 60 to open and close the slide space 20 and moving the corrosion preventing sealing member 60 in a vertical direction; It includes 70, the fluid passage sealing member 40 is coupled to the first actuator 50 is coupled to the upper end of the frame 41 for moving the slide space 20 to open and close the fluid passage (10) It is made of a sealing plate 42 and the like, the anti-corrosion sealing According to the vertical movement of the ash 60, the sealing plate 42 is raised and lowered by a certain distance to completely seal the fluid passage (10).

However, the conventional gate valve as described above, the fluid passage sealing member moved to the fluid passage 10 by moving the slide space 20 by the first actuator 50 in order to completely seal the fluid passage 10. The sealing plate 42 of the 40 is lifted by a predetermined distance by the anti-corrosion sealing member 60 which is lifted and lifted by a separate second actuator 70 or the like so as to be in contact with the inlet side of the fluid passage 10. Since the corrosion prevention sealing member 60 and the second actuator 70, the configuration is very complicated and the manufacturing cost increases.

In addition, the conventional gate valve as described above, in addition to the fluid passage sealing member 40 for the sealing and opening of the fluid passage 10 further includes a corrosion preventing sealing member 60 and the second actuator 70 and the like. Because of the complicated configuration, the opening and closing operation control of the fluid passage 10 is divided into the respective operation control of the components, there is a problem that the semiconductor manufacturing process does not proceed quickly due to the hassle of having to proceed in several steps.

Therefore, an object of the present invention is to have a top blade which is rotated spaced apart in the upper side of the plate by a link and a lower blade fixed to the plate and a stepped stopper formed in the slide space is a roller for climbing formed in the front end of the upper blade It provides a gate valve that can reduce the manufacturing cost and enhance airtightness by simplifying the configuration of the fluid passage sealing member so that the upper blade opens and closes the inlet of the fluid passage and the lower blade opens and closes the outlet of the fluid passage. It is.

In addition, another object of the present invention is to provide a gate valve that allows a rapid operation control through a simple configuration of the fluid passage sealing member for opening and closing the fluid passage to enable the semiconductor manufacturing process to be made quickly.

Meanwhile, the object of the present invention is not limited to the above-mentioned objects, and other objects not mentioned can be clearly understood by those skilled in the art from the following description.

To this end, according to the present invention, a housing having a slide space penetrating the fluid passage connected to the chamber and the vacuum pump in the orthogonal direction, a fluid passage sealing member inserted into the slide space to open and close the fluid passage and the fluid passage sealing member A gate valve comprising an actuator for moving in a slide space, the gate passage sealing member comprising: a plate connected to an actuator to move the slide space; Upper and lower blades provided at upper and lower portions of the plate to open and close the inlet and outlet sides of the fluid passage; And a link connecting the upper blade and the plate so that the upper blade rotates at a predetermined interval on the upper side of the plate.

Here, the slide space on the side of the fluid passage and the first stopper which is supported by one end of the lower blade; It is preferable that a stopper composed of a second stopper on which one end of the plate is held is formed stepped.

In addition, the upper blade is preferably provided with a roller for climbing to climb or descend the first / second stopper.

Therefore, according to the present invention, the upper blade and the lower blade fixed to the plate is rotated spaced apart on the upper side of the plate and the roller for climbing formed on the front end of the upper blade to climb the stepped stopper formed in the slide space Thus, the upper blade opens and closes the inlet of the fluid passage, and the lower blade opens and closes the outlet of the fluid passage, thereby simplifying the configuration of the fluid passage sealing member, thereby reducing the manufacturing cost and enhancing airtightness even with a simple movement operation.

In addition, by enabling the closing and opening of the fluid passage only through the simple movement control of the fluid passage sealing member of the configuration as described above, there is provided a separate portion such as a separate corrosion-resistant sealing member and actuator for opening and closing the fluid passage as in the prior art The control operation can be performed quickly, and thus the semiconductor manufacturing process can be performed quickly.

On the other hand, the effects of the present invention are not limited to the effects mentioned above, and other effects not mentioned can be clearly understood by those skilled in the art from the description of the claims.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

2 to 4 are each a plan view showing a gate valve according to a preferred embodiment of the present invention, a side cross-sectional view showing a state when the fluid passage sealing member of the gate valve and when the fluid passage sealing member of the gate valve is opened 5 and 7 are a perspective view, a plan view, and a side view, respectively, of the fluid passage sealing member in the gate valve of the present invention.

2 to 7, the gate valve according to a preferred embodiment of the present invention, the fluid passage 110 and the fluid passage 110 connected to the chamber (not shown) and the vacuum pump (not shown) A housing 130 having a slide space 120 penetrating in an orthogonal direction, a fluid passage sealing member 140 and a fluid passage sealing member 140 inserted into the slide space 120 to open and close the fluid passage 110 and slide the fluid passage sealing member 140. An actuator 150 is moved within the space 120.

2 to 4, the fluid passage 110, the inlet 111 is connected to the chamber on one side and the outlet 112 is connected to the vacuum pump on the other side is formed, in the chamber An inflowing fluid flows out of the vacuum pump.

2 to 4, the slide space 120 is formed through the fluid passage 110 in the orthogonal direction, the fluid passage sealing member 140 for opening and closing the fluid passage 110 is sliding A stepped stopper 121 is formed at one end of the slide space 120 which is a moving passage and penetrates the fluid passage 110, and an inner wall of the slide space 120 in which the fluid passage sealing member 140 slides. It is preferable that a guide member (not shown) is further provided to allow the fluid passage sealing member 140 to stably slide.

As shown in FIGS. 2 to 7, the fluid passage sealing member 140 is thin to open and close between the inlet 111 and the outlet 112 of the fluid passage 110 while moving the slide space 120. As a plate, the plate 141 connected to the actuator 150, the upper and lower portions of the plate 141 are respectively provided to open and close the inlet 111 side and the outlet 112 side of the fluid passage 110 and The lower blades 142 and 143 and the upper blade 142 and the plate 141 are connected to each other by the upper blade 142 includes a link 144 to be rotated at regular intervals above the plate 141.

The plate 141 is connected to the actuator 150 to move the slide space 120 together with the upper and lower blades 142 and 143. When the upper and lower blades 142 and 143 are positioned in the fluid passage 110, the upper portion And lower blades 142 and 143 to close the fluid passage 110 up and down.

In addition, the plate 141 includes a plurality of driving rollers 141a which are provided on the upper side, the lower side, and the right side of the plate 141 so as to stably slide along the guide member provided on the bottom surface and the inner wall of the slide space 120. .

The lower blade 143 is fixed to the lower portion of the plate 141 through fixing means (not shown), etc., and the outlet portion 112 when the plate 141 is positioned in the fluid passage 110 by moving the slide space 120. Close the inside of the fluid passage (110) side.

The upper blade 142 is rotatably fixed to the upper side of the plate 141 by the link 144, the plate 141 is moved to the slide space 120 when the inlet ( Ride roller 142a for passing the stopper 121 of the slide space 120 when the upper blade 142 is located in the fluid passage 110 on the left side to seal the inside of the fluid passage 110 on the 111 side. Is provided.

Here, the link 144, one end and the other end of the hole (unsign) is connected to the rotating protrusion (unsigned) formed on the lower portion of the upper blade 142 and the upper portion of the plate 141, as shown in FIG. It is preferable to be.

Therefore, the upper blade 142 is spaced apart from the plate 141 by the height of the stopper 121 to the upper portion of the plate 141 by the link 144 as the climbing roller 142a ascends the stopper 121. Rotating and the upper blade 142 is in close contact with the fluid passage 110 on the inlet 111 through which the fluid passage 110 can be completely sealed.

That is, when the plate 141 of the fluid passage sealing member 140 is moved to the fluid passage 110 by moving the slide space 120 by the actuator 150, the stepped stopper of the slide space 120 ( The left end of the lower blade 143 is in contact with the first stopper 121a of the 121 and the left end of the plate 141 is in contact with the second stopper 121b, and the outlet portion is caused by the lower blade 143. The inside of the fluid passage 110 on the side of 112 is closed, and at the same time, the climbing roller 142a provided at the left end of the upper blade 142 ascends the first and second stoppers 121a and 121b. While the upper blade 142 is rotated to the upper side of the plate 141 by the link 144, the inside of the fluid passage 110 on the inlet 111 side is completely sealed.

In addition, the inlet 111 and the outlet 112 of the fluid passage 110 are sealed by the upper blade 142 and the lower blade 143 of the fluid passage sealing member 140, respectively. When the actuator 150 moves from the fluid passage 110 to the slide space 120 on the actuator 150 side, the left side of the plate 141 from the stepped second stopper 121b of the slide space 120 is formed. The upper part of the lower blade 143 is separated from the first stopper 121a and the left side of the lower blade 143 is separated to open the outlet 112 of the fluid passage 110, and at the same time, the upper blade rotated to the upper part of the plate 141. Ascending roller 142a of the 142 descends the second stopper 121b and the first stopper 121a in order to come into contact with the upper portion of the plate 141 and move along the plate 141 to allow the fluid passage ( The inlet 111 of the 110 is to be opened.

Here, when the upper blade 142 is in contact with the upper portion of the plate 141 while the climbing roller 142a passes the first and second stoppers 121a and 121b by the link 144. Is rotated to be spaced apart by the height of the stopper 121 on the upper side of the plate 141, the link 144 maintains an oblique angle when the upper blade 142 is in contact with the upper side of the plate 141 While the upper blade 142 is rotated so as to be spaced apart by a predetermined interval on the upper side of the plate 141 has a vertical angle, the locking member (not shown) to prevent the upper blade 142 is rotated more than the vertical angle Or the link 144 is preferably provided with an elastic member (not shown) for providing a force in the left direction.

In addition, in the slide space 120 corresponding to the right end of the upper blade 142 rotated to the upper side of the plate 141 by the link 144, that is, the opposite direction in which the roller 142a for climbing is provided. In the case that the fluid passage sealing member 140 moves the slide space 120 from the fluid passage 110 to the actuator 150, a locking jaw (not shown) is further formed to hold the right end of the upper blade 142. The right end of the upper blade 142 is caught by the locking jaw so that the upper blade 142 may be in contact with the upper side of the plate 141 by the link 144.

In addition, the lower blade 143 is located below the plate 141 by the lower end of the link 144 when the upper blade 142 is rotated apart from the upper side of the plate 141 through the roller 142a for climbing. A force is generated to face downward so that the fluid passage 110 on the outlet 112 side by the lower blade 143 may also be sealed.

Therefore, according to the fluid passage sealing member 140 as described above, the roller for climbing 142a formed at the front end of the upper blade 142 connected to the link 144 to the plate 141 is formed at one end of the slide space 120 The inlet 111 of the fluid passage 110 is opened and closed by the upper blade 142 through the step of raising or lowering the stopper 121 having a step shape, and at the same time, the lower blade fixed to the plate 141 ( By opening and closing the outlet 112 of the fluid passage 110 by 143, it is possible to open and close the fluid passage 110 through a simple configuration and operation control.

In addition, according to the fluid passage sealing member 140, the fluid passage 110 by the upper blade 142 rotated by the link 144 on the upper side of the plate 141 when the fluid passage 110 is opened. The fluid passage 110 is opened at a predetermined interval according to the sequential descending of the second stopper 121b and the first stopper 121a of the up-rolling roller 142a before the door is completely opened, resulting in a pressure due to sudden opening of the valve. It is possible to prevent damage to the process chamber and the vacuum pump.

On the other hand, the plate 141 of the fluid passage sealing member 140 is slidably connected to the slide space 120 to the actuator 150 through the link member 160, the link member 160 is the first shaft 161 and a second shaft 162, one end of the first shaft 161 is rotatably connected to the plate 141 by a first hinge shaft 163, The second shaft 162 is rotatably connected to the other end of the first shaft 161 and one end of the second shaft 162 by a second hinge shaft 164. In addition, the other end of the second shaft 162 is rotatably connected to the blocking plate 166 by the third hinge shaft 165, and the driving shaft 151 of the actuator 150 by the fourth hinge shaft 167. It is connected rotatably to).

Therefore, when the driving shaft 151 of the actuator 150 moves forward, the link member 160 rotates the second shaft 162 and the first shaft 161 continuously, and as a result, the first shaft ( When the driving shaft 151 is reversed, the plate 141 is advanced by applying a force in a direction in which 161 is advanced, and when the driving shaft 151 is reversed, the second shaft 162 and the first shaft 161 are rotated in the reverse direction. The plate 141 is moved backward by applying a force in a direction in which the first shaft 161 moves backward.

The actuator 150 may control an operation of moving the drive shaft 151 forward and backward, and may be automatic or manual. In the automatic type, the actuator 150 may be a pneumatic type operated by compressed air. The pneumatic actuator includes a compressed air inlet (not shown), a cylinder (not shown), a drive shaft 141, etc., through which compressed air is introduced, but a detailed description thereof will be omitted. Here, the actuator 150 is preferably further provided with a recognition means such as an indicator so that the drive of the actuator can be easily recognized from the outside.

Hereinafter, with reference to the drawings will be described the operation and effect of the gate valve according to a preferred embodiment of the present invention.

8 is an explanatory diagram showing a process when the gate valve of FIG. 2 is closed, and FIG. 9 is an explanatory diagram showing a process when the gate valve of FIG. 2 is opened.

First, the process when the gate valve is closed is as follows.

First, as shown in FIG. 8, the upper blade 142 is formed by the link 144 on the plate 141 of the fluid passage sealing member 140 located in the slide space 120 on the actuator 150 side. The slide space 120 is moved by the actuator 150 such that the plate 141 is positioned at the fluid passage 110 in a state where the lower blade 143 is fixed to the lower portion.

At this time, the left end of the lower blade 143 is in contact with the first stopper 121a of the stopper 121 formed at one end of the slide space 120 and the left end of the plate 141 is in contact with the second stopper 121b. This contact causes the lower blade 143 to seal the inside of the fluid passage 110 on the outlet 112 side.

At the same time, the climbing roller 142a provided at the left end of the upper blade 142 ascends the first and second stoppers 121a and 121b and the upper blade 142 is plated by the link 144. It rotates to the upper side of 141, and thus the inside of the fluid passage 110 on the inlet 111 side is completely sealed.

In addition, the lower blade 143 is located below the plate 141 by the lower end of the link 144 when the upper blade 142 is rotated apart from the upper side of the plate 141 through the roller 142a for climbing. A force is generated to face downward so that the fluid passage 110 at the outlet 112 side by the lower blade 143 is also sealed.

Here, the inlet part 111 and the outlet part 112 contacting the upper blade 142 and the lower blade 143 are preferably further provided with an O-ring member (not shown) for complete sealing. Do.

On the other hand, the process when the gate valve is opened as follows.

First, as shown in FIG. 9, the inlet 111 and the outlet 112 of the fluid passage 110 are respectively formed by the upper blade 142 and the lower blade 143 of the fluid passage sealing member 140. The slide space 120 is moved by the actuator 150 such that the plate 141 is positioned on the actuator 150 side in the closed state.

At this time, the left side of the plate 141 is separated from the second stopper 121b of the stopper 121 stepped at one end of the slide space 120, and at the same time the left side of the lower blade 143 from the first stopper 121a. As the part is separated, the outlet 112 of the fluid passage 110 is opened.

At the same time, the upper roller 142a of the upper blade 142 rotated to the upper portion of the plate 141 descends the second stopper 121b and the first stopper 121a sequentially, and the upper part of the plate 141. In contact with the inlet 111 of the fluid passage 110 is opened.

Here, the upper blade 142 by the locking step of the slide space 120 corresponding to the right end of the upper blade 142 when the second stopper 121b of the climbing roller 142a of the upper blade 142 descends. ) Is brought into contact with the upper side of the plate 141 or the force is transmitted to the link 144 in the left direction by the elastic member instead of forming the locking step so that the upper blade 142 is above the plate 141. Contact with the sides.

Therefore, according to the present invention, the upper blade and the lower blade fixed to the plate is rotated spaced apart in the upper side of the plate and the roller for climbing to form the front end of the upper blade to climb the stepped stopper formed in the slide space Thus, the upper blade opens and closes the inlet of the fluid passage, and the lower blade opens and closes the outlet of the fluid passage, thereby simplifying the configuration of the fluid passage sealing member, thereby reducing the manufacturing cost and enhancing airtightness even with a simple movement operation.

In addition, by enabling the sealing and opening of the fluid passage only through the simple movement control of the fluid passage sealing member of the configuration as described above, there is provided a component such as a corrosion-proof sealing member and a second actuator for opening and closing the fluid passage as in the prior art. The control operation can be performed quickly, and thus the semiconductor manufacturing process can be performed quickly.

While the preferred embodiments of the present invention have been described above with reference to the accompanying drawings, those skilled in the art to which the present invention pertains have various permutations and modifications without departing from the spirit or essential features of the present invention. It is to be understood that the present invention may be practiced in other specific forms, since modifications may be made. It is therefore to be understood that the above-described embodiments are illustrative in all aspects and not restrictive.

1A-1C show a conventional gate valve;

2 to 4 are each a plan view showing a gate valve according to a preferred embodiment of the present invention, a side cross-sectional view showing a state when the fluid passage sealing member of the gate valve and when the fluid passage sealing member of the gate valve is opened Side cross-sectional view showing a state;

5 to 7 are a perspective view, a plan view and a side view showing a fluid passage sealing member in the gate valve of the present invention, respectively;

8 is an explanatory diagram showing a process when the gate valve of FIG. 2 is closed; And

9 is an explanatory diagram illustrating a process when the gate valve of FIG. 2 is opened.

* Drawing reference *

110: fluid passage 120: slide space

121: stopper 121a: first stopper

121b: second stopper 130: housing

140: fluid passage sealing member 141: plate

142: upper blade 142a: roller for climbing

143: lower blade 144: link

150: actuator 160: link member

Claims (8)

In the housing 130 and the slide space 120 having a fluid passage 110 connected to a chamber (not shown) and a vacuum pump (not shown) and a slide space 120 penetrating perpendicularly to the fluid passage 110. In the gate valve comprising a fluid passage sealing member 140 is inserted and opening and closing the fluid passage 110 and an actuator 150 for moving the fluid passage sealing member 140 in the slide space 120, Fluid passage sealing member 140, A plate 141 connected to the actuator 150 to move the slide space 120; Upper and lower blades 142 and 143 provided at upper and lower portions of the plate 141 to open and close the inlet 111 and outlet 112 sides of the fluid passage 110; And Gate valve, characterized in that it comprises a link (144) connecting the upper blade (142) and the plate (141) so that the upper blade (142) is rotated at a predetermined interval above the plate (141). The slide space 120 of claim 1, further comprising: A first stopper 121a on which one end of the lower blade 143 is held and supported; Gate valve, characterized in that the stopper (121) consisting of a second stopper (121b) to which one end of the plate (141) is held. 3. The gate valve according to claim 2, wherein the upper blade (142) is provided with a climbing roller (142a) for climbing or descending the first and second stoppers (121a, 121b). According to claim 3, The upper blade 142 is in contact with the upper portion of the plate 141 while the climbing roller (142a) is ascending the stopper 121 by the plate (144) by the link (144) 141 is rotated to be spaced apart by the height of the stopper 121 on the upper side. The method of claim 4, wherein the link 144 is characterized in that the upper blade 142 includes a locking member (not shown) to prevent the upper blade 142 is rotated more than a predetermined angle to the plate 141. Gate valve. 5. The link 144 has a force against the link 144 in a direction opposite to the rotational direction so as to prevent the upper blade 142 from pivoting the plate 141 over a predetermined angle. Gate member, characterized in that provided with an elastic member (not shown). 5. The locking jaw of claim 4, wherein the slide space 120 is supported by one end of the slide roller 142a of the upper blade 142 of the upper blade 142 which is rotated by the link 144 to the upper side of the plate 141. Not shown) is further formed gate valve. The gate valve of claim 1, wherein the fluid passage (110) contacting the upper blade (142) and the lower blade (143) is provided with an O-ring member (not shown).

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