KR20230029540A - Gate valve - Google Patents

Abstract

The present invention is configured to prevent a sealing ring formed in a sealing blade from being exposed to fluid in a process of allowing the fluid such as process gas or cleaning gas to pass an inlet, a fluid flow passage, and an outlet, thereby preventing deformation of the sealing ring or damage to the sealing ring to increase a replacement period and secure airtight sealability.

Description

Gate valve {Gate valve}

The present invention relates to a gate valve, and includes a valve block (100) having an inlet (110) formed at the top, an outlet (120) formed at the bottom, and a fluid flow path (130) formed therein; and the valve Doedoe coupled to the rear side of the block 100, a pair of first piston rods (210, 210`) formed, each of the first piston rods (210, 210`) a vertical cylinder in which the tip is exposed to the upper side ( 200); and a horizontal cylinder 300 coupled to the rear side of the vertical cylinder 200 and having a second piston rod 310 formed on the front side; and, the first piston rods 210 and 210` A pair of guide rails (400, 400`) coupled to each other; and a pair of moving blocks (500, 500`) coupled to each of the guide rails (400, 400`); and, the moving block (500, 500`) coupled to the vertical cylinder 200, the elevating plate 600 ascends or descends depending on whether the cylinder 200 is driven; and, in the state located on the upper side of the elevating plate 600, A horizontal moving seat 700 that is connected to the second piston rod 310 and moves the elevating plate 600 forward or backward depending on whether the horizontal cylinder 300 is driven; and, of the elevating plate 600 A valve rod 800 coupled to the front; And it relates to a gate valve, characterized in that composed of a sealing blade 900 coupled to the front side of the valve rod 800 and in contact with the inlet 110, and having a sealing ring 910 formed on the upper side. .

In general, since semiconductors require process density, high cleanliness and special manufacturing technology are required.

For this reason, semiconductor devices are manufactured in a vacuum state that can most completely block the contact of foreign substances contained in the air, and the vacuum working area of the semiconductor manufacturing equipment and the air sealing technology also have a great influence on the quality of the semiconductor product.

Gate valves of various shapes are installed in the process section for manufacturing the semiconductor as described above to perform a function of transferring or blocking the gas passing through the cleaning module between chambers.

In the gate valve as described above, in a state in which the inlet or outlet is coupled between the process chamber and the process chamber, the outlet or the inlet are coupled to each other, and the blade, which is a sealing member, opens and closes the inlet according to the driving of the cylinder, to the outlet. Operates to pass or block gas.

These gate valves are manufactured and published in various forms, among which, “Gate valve for automatic vacuum pressure adjustment and automatic vacuum pressure adjustment method using the same (Korean Patent Document No. 10-1553354)” of Patent Document 1 below has been posted. there is.

“Gate valve for automatic vacuum pressure control and automatic vacuum pressure control method using the same” of Patent Document 1 shows the vacuum pressure value by the vacuum gauge 106 for checking the vacuum pressure of the vacuum chamber 102 by the opening and closing operation unit 16. The control unit 108 receives the received vacuum pressure and compares it with a preset vacuum pressure to calculate an operation control signal. A drive gear 24 that is connected and moves linearly, a driven gear 26 that rotates in engagement with the linear motion of the drive gear 2 4, and a rotating shaft housing 36 that is fixedly installed with the driven gear 26 and rotates And, an operating bar 28 that swings by the rotation of the rotary shaft housing 36, and an opening and closing disk that is linked to the operating bar 28 and opens and closes the fluid passage 6 step by step while reciprocating up and down ( 32), and a plurality of conveying rollers 34 are installed on one side of the opening and closing disk 32 to guide movement in up, down, left and right based on the traveling direction of the opening and closing disk 32, but the opening and closing disk ( 32), two transfer rollers 34 are installed at each corner so that the installation direction is orthogonal, and the opening and closing disk 32 of the opening and closing operation unit 16 is coupled to the body 2 so that it can perform linear motion. It consists of a cover plate 20 forming an operating space, and has the advantage of simplifying and miniaturizing the machine configuration to reduce cost and maintenance costs and shorten the time for adjusting the vacuum pressure.

However, the "gate valve for automatic vacuum pressure control and automatic vacuum pressure control method using the same" of Patent Document 1 is formed on the sealing member in the process of moving fluid such as process gas (NF _3, etc.) with the fluid passage open. There is a problem in that the replacement cycle of the O-shaped ring is shortened by causing deformation and damage to the O-shaped ring, and the life of the valve is shortened because the sealing force is reduced.

Patent Document 1: Korean Registered Patent Document No. 10-1553354

The present invention has been made to solve the above-described problems, and an object of the present invention is to prevent the sealing ring formed on the sealing blade from being exposed to the fluid while the fluid such as process gas or cleaning gas passes through the inlet, fluid flow path, and outlet. It is to provide a gate valve capable of preventing the sealing ring from being deformed or damaged, increasing the replacement cycle, and ensuring tight sealing.

In order to solve the above problems, the gate valve according to the present invention is a valve block in which an inlet 110 is formed on the upper part, an outlet 120 is formed on the lower part, and a fluid flow path 130 is formed on the inside. (100); and coupled to the rear side of the valve block 100, a pair of first piston rods (210, 210') are formed, and the front end of each of the first piston rods (210, 210') A vertical cylinder 200 exposed to the upper side; and a horizontal cylinder 300 coupled to the rear side of the vertical cylinder 200 and having a second piston rod 310 formed on the front side; and, the first A pair of guide rails (400, 400') each coupled to the piston rods (210, 210'); and a pair of moving blocks (500, 500) each coupled to the guide rails (400, 400') `); And, the elevating plate 600 coupled to the moving block 500, 500` and ascending or descending depending on whether the vertical cylinder 200 is driven; and, of the elevating plate 600 A horizontal moving seat 700 connected to the second piston rod 310 in a state located on the upper side and moving the elevating plate 600 forward or backward depending on whether the horizontal cylinder 300 is driven; and, A valve rod 800 coupled to the front of the elevating plate 600; And it is coupled to the front side of the valve rod 800 and is in contact with the inlet 110, characterized in that it consists of a sealing blade 900 having a sealing ring 910 formed on the upper side.

In addition, the inner upper part of the valve block 100 has an inner groove 140 so that the sealing blade 900 moves backward and rises in the state where the inlet 110 is open so that the upper portion of the sealing blade 900 is located. characterized by the formation of

In addition, at the front end of the inner groove 140, a fluid entry limiting jaw 141 is prevented from entering the sealing blade 900 located in the inner groove 140, the fluid flowing in from the open inlet 110. ) is characterized in that it is formed.

In addition, a plurality of movement guide holes 610 are formed on the upper part of the elevating plate 600, and the front surface of the elevating plate 600 has an insertion hole 620 into which the end of the valve rod 800 is inserted. is formed, and a plurality of guide pins 710 are formed at the lower part of the horizontal movement sheet 700, each inserted into the movement guide hole 610 to guide the ascending and descending movement of the elevating plate 600. to be characterized

In addition, the upper center of the vertical cylinder 200 is recessed in a “U” shape so that the lifting plate 600 and the valve rod 800 can be moved downward by the driving of the vertical cylinder 200. It is characterized in that the downward movement guide groove 220 is formed.

As described above, according to the present invention, the durability and reliability are secured by preventing the sealing ring from being deformed or damaged, and the cost reduction due to the increased replacement cycle and the life span of the valve can be extended through close sealing. there is.

1 is a perspective view showing the overall appearance of a gate valve according to a preferred embodiment of the present invention
Figure 2 is an exploded perspective view showing an exploded state of the gate valve according to a preferred embodiment of the present invention
Figure 3 is a cross-sectional perspective view showing the appearance of the inner groove and the fluid entry limiting jaw formed inside the valve block of the configuration of the gate valve according to a preferred embodiment of the present invention
Figure 4 is an internal perspective view showing the inside of the gate valve according to a preferred embodiment of the present invention
Figure 5 is an embodiment showing the appearance of the elevating plate is lowered through the vertical cylinder of the configuration of the gate valve according to a preferred embodiment of the present invention
6 to 9 are an embodiment showing a process of closing the inlet through the gate valve according to a preferred embodiment of the present invention

Hereinafter, with reference to the accompanying drawings, the gate valve 1 according to an embodiment of the present invention will be described in detail. First of all, it should be noted that among the drawings, the same components or parts are indicated by the same reference numerals as much as possible. In describing the present invention, detailed descriptions of related well-known functions or configurations are omitted in order not to obscure the gist of the present invention.

Referring to FIG. 1 or 2, the gate valve 1 according to an embodiment of the present invention is largely composed of a valve block 100, a vertical cylinder 200, a horizontal cylinder 300, and guide rails 400 and 400`. ), moving blocks (500, 500`), elevating plate (600), horizontally moving seat (700), valve rod (800) and sealing blade (900).

First, the valve block 100 will be described. As shown in FIG. 1 or 2, the valve block 100 is a component through which fluid such as process gas or cleaning gas is moved, and the upper part of the valve block 100 has an inlet 110 through which fluid flows, In the lower part, an outlet 120 through which the fluid is discharged, and a space formed between the inlet 110 and the outlet 130 to guide the movement of the fluid from the inlet 110 to the outlet 130. (130) is formed.

On the other hand, in the present invention, as shown in FIG. 3, it is characterized in that the inner upper part of the valve block 100 is formed with a recessed inner groove 140, whereby the inlet 110 is opened. The sealing blade 900 moves backward and then rises by the driving force of each of the vertical cylinder 200 and the horizontal cylinder 300, which will be described later, so that the upper portion of the sealing blade 900 is seated in the inner groove 140, so that the fluid does not flow directly to the sealing blade 900, preventing the sealing blade 900 from being chemically affected by the fluid.

In addition, a fluid entry limiting jaw 141 protruding downward is configured at the tip of the inner groove 140, so that the fluid flowing in from the open inlet 110 is positioned in the inner groove 140. By preventing entry into the sealing blade 900, the sealing ring 910 formed on the sealing blade 900 is protected from fluid, ensuring durability and reliability of the sealing ring 910, and reducing costs by increasing the replacement cycle. And the effect of increasing the efficiency of maintenance occurs.

Next, the vertical cylinder 200 will be described. As shown in FIGS. 2, 4 or 5, the vertical cylinder 200 is coupled to the rear side of the valve block 100 to allow the valve rod 800 and the sealing blade 900 to rise or fall. A pair of first piston rods 210 and 210' are formed on both sides of the upper portion of the vertical cylinder 200 as a component that provides a driving force. At this time, the front end of each of the first piston rods 210 and 210' is exposed to the upper side and coupled to guide rails 400 and 4000' to be described later, respectively.

On the other hand, since a U-shaped downward movement guide groove 220 is recessed in the upper center of the vertical cylinder 200, the elevation plate 600 and the valve are driven by the vertical cylinder 200. When the rod 800 moves down, it provides a space that can be descended.

Next, the horizontal cylinder 300 will be described. As shown in FIGS. 2, 4 or 5, the horizontal cylinder 300 is coupled to the rear side of the vertical cylinder 200 to move the valve rod 800 and the sealing blade 900 forward or backward. As a component that provides a driving force, a second piston rod 310 is formed on the front side of the horizontal cylinder 300 and coupled to a horizontally movable seat 700 to be described later.

On the other hand, the second piston rod 310 pushes the horizontally movable seat 700 when moving forward and pulls the horizontally movable seat 700 when moving backward. At this time, the upper side of the vertical cylinder 200 It passes through the formed downward movement guide groove 220 .

Next, the guide rails 400 and 400' will be described. As shown in FIGS. 2, 4 or 5, the guide rails 400 and 400' are coupled to the first piston rods 210 and 210', respectively, depending on whether the vertical cylinder 200 is driven. It ascends or descends, and is combined with the moving blocks 500, 500' to be described later to guide the accurate horizontal movement of the moving blocks 500, 500'.

Next, the movement blocks 500 and 500' will be described. As shown in FIGS. 2, 4 or 5, the moving blocks 500 and 500` are coupled to the guide rails 400 and 400`, respectively, and are coupled to the elevating plate 600 so as to It serves to guide the horizontal movement of the lowering plate 600.

Next, the elevating plate 600 will be described. As shown in FIGS. 2, 4 or 5, the elevating plate 600 is coupled to the moving blocks 500 and 500` and moves up and down depending on whether the vertical cylinder 200 is driven. As a component for vertically moving the valve rod 800 and the sealing blade 900, a plurality of movement guide holes 610 are formed on the upper part of the elevating plate 600 to insert a guide pin 710 to be described later. do.

In addition, a plurality of insertion holes 620 are formed on the front surface of the elevating plate 600 and coupled to the end of the valve rod 800, thereby connecting the elevating plate 600 and the valve rod 800. give.

Next, the horizontally moving seat 700 will be described. As shown in FIGS. 2, 4 or 5, the horizontal movable seat 700 is connected to the second piston rod 310 in a state located on the upper side of the elevating plate 600 to move the horizontal cylinder. As a component that moves the elevating plate 600 forward or backward depending on whether the 300 is driven, a plurality of guide pins 710 are formed at the lower part of the horizontally movable seat 700 to move the movement guide hole 610 ) are inserted into each.

Due to this, when the elevating plate 600 ascends or descends, the horizontally movable seat 700 moves only the elevating plate 600 along the guide pin 710 in a fixed position state. will do

Next, the valve rod 800 will be described. As shown in FIGS. 2, 4 or 5, the valve rod 800 is coupled to the front surface of the elevating plate 600 and serves to guide the horizontal and vertical movement of the sealing blade 900.

On the other hand, it is preferable that the bellows 810 is formed on the outer circumferential surface of the valve rod 800 so that the valve rod 800 is not affected by chemical damage from the fluid.

Next, the sealing blade 900 will be described. As shown in FIGS. 2, 4 or 5, the sealing blade 900 is coupled to the front side of the valve rod 800, and the driving force and moving direction of the vertical cylinder 200 and the horizontal cylinder 300 As a component that opens or closes the inlet 110 according to the above, a sealing ring 910 made of an elastic material is formed on the top of the sealing blade 900 for tight sealing.

Hereinafter, a process of closing an inlet through a gate valve according to a preferred embodiment of the present invention will be described with reference to FIGS. 6 to 9 .

First, as shown in FIG. 6 , the sealing blade 900 is located in the inner groove 140 when the inlet 110 is open.

Then, as shown in FIG. 7, the elevating plate 600 is lowered along the guide pin 710 by the vertical cylinder 200, and thus the valve rod 800 is lowered, The sealing blade 900 located in the inner groove 140 also descends and separates from the inner groove 140 .

Next, as shown in FIG. 8, when the horizontally movable seat 700 moves forward by the horizontal cylinder 300, the elevating plate 600 connected to the horizontally movable seat 700 also moves forward. , Accordingly, the valve rod 800 and the sealing blade 900 also move forward. At this time, the forward distance is preferably moved until the central axis of the sealing blade 900 and the central axis of the inlet 110 are on the same line.

Next, as shown in FIG. 9, by the vertical cylinder 200 again, the elevating plate 600 rises along the guide pin 710, and accordingly the valve rod 800 rises. And, the sealing blade 900 located in the fluid flow path 130 rises to close the inlet 110. That is, from the open state of the inlet 110 to the closed state, the sealing blade 900 moves by U motion.

On the other hand, the process of returning to the open state from the closed state of the inlet 11 proceeds in the reverse order of the above order.

Optimal embodiments have been disclosed in the drawings and specifications. Although specific terms have been used herein, they are only used for the purpose of describing the present invention and are not used to limit the scope of the present invention described in the claims or defining the meaning. Therefore, those skilled in the art will understand that various modifications and equivalent other embodiments are possible therefrom. Therefore, the true technical scope of protection of the present invention should be determined by the technical spirit of the appended claims.

1: Gate valve
100: valve block 110: inlet
120: outlet 130: fluid flow path
140: inner groove 141: fluid entry limiting jaw
200: vertical cylinder 210, 210`: first piston rod
220: downward movement guide groove 230: cover
300: horizontal cylinder 310: second piston rod
400, 400`: guide rail
500, 500`: moving block
600: elevating plate 610, 610`: moving guide hole
620: insertion hole
700: horizontal moving seat 710, 710`: guide pin
720: pressure plate
800: valve rod 810: bellows
900: sealing blade 910: sealing ring

Claims (5)

A valve block 100 having an inlet 110 formed at the top, an outlet 120 formed at the bottom, and a fluid passage 130 formed therein;
It is coupled to the rear side of the valve block 100, a pair of first piston rods 210 and 210` are formed, and the front end of each of the first piston rods 210 and 210` is vertically exposed to the upper side. cylinder 200;
A horizontal cylinder 300 coupled to the rear side of the vertical cylinder 200 and having a second piston rod 310 formed on the front side;
a pair of guide rails 400 and 400' respectively coupled to the first piston rods 210 and 210';
a pair of moving blocks 500 and 500' respectively coupled to the guide rails 400 and 400';
an elevating plate 600 coupled to the moving blocks 500 and 500` and moving up and down depending on whether the vertical cylinder 200 is driven;
In a state located on the upper side of the elevating plate 600, it is connected to the second piston rod 310 and moves the elevating plate 600 forward or backward depending on whether the horizontal cylinder 300 is driven. a moving seat 700;
A valve rod 800 coupled to the front of the elevating plate 600; and
The gate valve (1), characterized in that it is composed of a sealing blade (900) coupled to the front side of the valve rod (800) and in contact with the inlet (110) and having a sealing ring (910) formed on the upper side. According to claim 1,
An inner groove 140 is formed on the inner upper portion of the valve block 100 so that the sealing blade 900 moves backward and then rises to position the upper portion of the sealing blade 900 when the inlet 110 is open. Gate valve (1), characterized in that. According to claim 2,
At the front end of the inner groove 140, a fluid entry limiting jaw 141 is provided to prevent the fluid flowing from the inlet 110, which is opened, from entering the sealing blade 900 located in the inner groove 140. A gate valve (1), characterized in that formed. According to claim 1,
A plurality of movement guide holes 610 are formed on the upper part of the elevating plate 600,
An insertion hole 620 into which the end of the valve rod 800 is inserted is formed on the front surface of the elevating plate 600,
A gate characterized in that a plurality of guide pins 710 are formed at the lower part of the horizontal movement seat 700 to be inserted into the movement guide holes 610 and guide the ascending and descending movement of the elevating plate 600 valve (1). According to claim 1,
The upper center of the vertical cylinder 200 is recessed in a “U” shape so that the lifting plate 600 and the valve rod 800, which are lowered by the driving of the vertical cylinder 200, can be moved downward. Gate valve (1), characterized in that the downward movement guide groove 220 is configured.

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