KR102131282B1 - Door cam type gate valve system and semiconductor processing equipment - Google Patents

Abstract

The present invention relates to a door valve cam type gate valve system and semiconductor substrate processing equipment capable of selectively opening and closing a plurality of chambers, wherein the housing is formed with at least one passage; A door capable of blocking the passage; A door elevating device capable of elevating the door; And a door contact device capable of bringing the door into close contact with the passage, wherein the door contact device includes: a guide cam member for guiding the door being elevated by the door elevating device in the passage direction; And a guide cam adjusting device that adjusts the position or shape of the guide cam member so that the operation of the guide cam member is selectively performed.

Description

Door close cam type gate valve system and semiconductor substrate processing equipment

The present invention relates to a door closet cam type gate valve system and semiconductor substrate processing equipment, and more particularly, to a door closet cam type gate valve system and semiconductor substrate processing equipment capable of selectively opening and closing a plurality of chambers. .

In general, the chamber is an industrial facility facility used to manufacture advanced semiconductor devices, display devices, or other medical devices, such as semiconductor chips, wafers, LCD panels, OLED panels, etc., which require a vacuum or high-clean working environment. A gate valve attached to the chamber serves as an entrance to and from the chamber, and is a type of device that opens a door, moves a semiconductor chip or wafer into the chamber space, and closes the door again to maintain an airtight state in the chamber.

The basic configuration of such a conventional gate valve is, as in Korean Patent Registration No. 10-1252665, a door for opening and closing a passage formed in a housing, that is, a valve body is mounted inside the housing, and the door is driven by a driving cylinder or an actuator. It is a configuration that can selectively open and close the passage of the housing while moving up and down by.

In addition, a bellows pipe is usually installed in the driving device of the gate valve to maintain airtightness inside the chamber and to protect the inside of the chamber from various external contaminants.

However, in the case of a conventional gate valve, when opening and closing a plurality of doors with one driving device, each of the two doors cannot be separately controlled, such as opening both doors or closing both doors.

Therefore, in the related art, when the first chamber or the first chamber of the first chamber and the second chamber in the semiconductor processing equipment fail or need maintenance, the second chamber, which is normally operating, is also forcibly stopped. Since it is necessary to open each of the two chamber doors, time and cost are wasted, and productivity is greatly reduced.

On the other hand, the bellows pipe installed in a conventional gate valve is a component that continuously repeats elongation and contraction as the door moves up and down. As a result, particles were generated, easily damaged, or mechanical properties were deteriorated, thereby preventing air tightness.

Therefore, before the characteristics of the equipment fell, the operation of the equipment had to be stopped and replaced or repaired on a regular basis, and such interruptions resulted in maintenance time and cost, reduced productivity of equipment, and wasted many manpower. .

The idea of the present invention is to solve these problems, and since it is possible to individually control each of the doors with a single driving device, it is possible to continue to work regardless of whether the neighboring chamber is fixed or maintained. The productivity can be greatly improved by reducing the cost and cost, and the airtightness can be easily protected to protect the inside of the chamber from foreign substances, and it is possible to prevent the generation of particles by minimizing abrasive parts such as bellows pipes. Since it can be used semi-permanently using magnetic force, minimizes malfunction or malfunction by using a cam member having an inclined surface, and uses the principle of the wedge to convert the moving direction of the cam member to the moving direction of the rod. It is to provide a gate valve system and a semiconductor substrate processing equipment of the door close cam type that can improve the efficiency of the device by obtaining a large power even with force. However, these problems are exemplary, and the scope of the present invention is not limited thereby.

In order to solve the above problems, the door valve cam type gate valve system according to the spirit of the present invention includes: a housing in which at least one passage is formed; A door capable of blocking the passage; A door elevating device capable of elevating the door; And a door contact device capable of bringing the door into close contact with the passage, wherein the door contact device includes: a guide cam member for guiding the door being elevated by the door elevating device in the passage direction; And a guide cam adjusting device that adjusts the position or shape of the guide cam member so that the operation of the guide cam member is selectively performed.

In addition, according to the present invention, the housing is formed with a first passage connected to the first chamber and a second passage connected to the second chamber, and the door is installed in the first passage and the second passage so that the first A first door and a second door that can be in close contact with the first passage and the second passage, respectively, and the guide cam member of the door contact device, the first corresponding to the first inclined surface formed in the first door Inclined cam portion; And a second inclined cam portion corresponding to a second inclined surface formed in the second door, wherein the guide cam adjusting device of the door contact device includes, in a first mode, the first door and the second door When rising, the first inclined surface of the first door is guided along the first inclined cam portion to close the first door in close contact with the first passage, and the second inclined surface of the second door is the second inclined surface The guide cam member may be rotated at a first angle so as to be guided along the cam portion to close the second door in close contact with the second passage. In the second mode, the first door and the second door When rising, the first door becomes free, and the first passage is opened, and the second inclined surface of the second door is guided along the rotated first inclined cam portion so that the second door is in close contact with the second passage. A rotation shaft capable of rotating the guide cam member at a second angle so that it can be closed; And a rotating device capable of rotating the rotating shaft.

Further, according to the present invention, the difference between the first angle and the second angle is 90 degrees, and when the guide cam member is rotated 90 degrees from the first angle to the second angle, the first inclined cam portion The second inclined cam portion may be formed in a polygonal shape so as to be positioned at a position at the first angle.

Further, according to the present invention, the rotating device may include a rotating handle connected to the rotating shaft and exposed to the outside of the housing.

Further, according to the present invention, the rotating device may include a motor that rotates the rotating shaft.

In addition, according to the present invention, the door lifting device, freely installed in the first direction, the driven member is connected to the door; A drive cam member freely installed in the second direction and formed with at least one inclined surface in contact with the driven member to change the direction of movement; And a driving device capable of moving the driving cam member in the second direction.

In addition, according to the present invention, the drive cam member, the cam body; And an inclined portion in which an inclined surface is formed on an upper surface of the cam body, wherein the driven member is formed on one end of a rod connected to the door and is in roller contact with the inclined surface.

In addition, according to the present invention, the drive cam member, the cam body; And an inclined track groove formed on the left side and the right side of the cam body, respectively, wherein the inclined surface is formed, wherein the driven member is formed at one end of the rod connected to the door, and at least two finger portions A joint block formed in a U shape as a whole to be formed; And rollers formed on the finger portions of the joint block so as to protrude in the direction of the inclined track grooves, and being respectively rolled in contact with the inclined surfaces.

In addition, according to the present invention, the prime mover includes: a driven cart in which a rolling wheel in rolling contact with a floor member is installed on one side, and a first magnetic body is installed on the other side; The first magnetic body and the driving plate is provided with a second magnetic body corresponding to each other by magnetic force; And a driving device capable of reciprocating the driving platform.

In addition, according to the present invention, the first magnetic body is a permanent magnet module in which a plurality of permanent magnets each having an N pole and an S pole are arranged in a line or more so that magnetic forces act on each other, and the second magnetic body is N A plurality of permanent magnets having poles and S poles may be permanent magnet modules arranged in a line or more so that magnetic forces act between the first magnetic body and each other.

Further, according to the present invention, the door may be a single door L motion type or two T motion types.

On the other hand, a semiconductor processing equipment according to the spirit of the present invention for solving the above problems, a chamber capable of processing a semiconductor substrate; And a door-valve cam-type gate valve system capable of opening and closing the chamber, wherein the door-close cam-type gate valve system comprises: a housing in which at least one passage is formed; A door capable of blocking the passage; A door elevating device capable of elevating the door; And a door contact device capable of bringing the door into close contact with the passage, wherein the door contact device includes: a guide cam member for guiding the door being elevated by the door elevating device in the passage direction; And a guide cam adjusting device that adjusts the position or shape of the guide cam member so that the operation of the guide cam member is selectively performed.

According to some embodiments of the present invention made as described above, since each of the doors can be individually controlled even with one driving device, the operation can be continuously performed regardless of whether the neighboring chamber is fixed or maintained. By reducing time and cost, productivity can be greatly improved, and airtightness can be easily protected to protect the inside of the chamber from external debris, as well as minimizing abrasive parts such as bellows pipes to prevent particle generation. Because it can be used semi-permanently using magnetic force, and minimizes malfunction or malfunction by using a cam member having an inclined surface, it is possible to convert the moving direction of the cam member to the moving direction of the rod using the principle of the wedge. It is possible to obtain a large power even with a small force, thereby improving the efficiency of the device. Of course, the scope of the present invention is not limited by these effects.

1 is a conceptual diagram conceptually showing a first door and a second door open state of a door valve cam type gate valve system according to some exemplary embodiments of the present invention.
FIG. 2 is a conceptual diagram conceptually showing the closed state of the first door and the second door of the gate valve system of the door close cam type of FIG. 1.
FIG. 3 is a conceptual diagram conceptually showing a first door open state and a second door closed state of the door close cam type gate valve system of FIG. 1.
FIG. 4 is a perspective view showing the door close cam type gate valve system of FIG. 1.
5 is a conceptual diagram conceptually showing a door open state of a door close cam type gate valve system according to some other embodiments of the present invention.
FIG. 6 is a conceptual diagram conceptually showing a door closed state of the gate valve system of the door close cam type of FIG. 5.
7 is a perspective view illustrating a door lifting device of a door valve cam type gate valve system according to some other embodiments of the present invention.
8 is a conceptual diagram conceptually showing a door open state of the gate valve system of the door close cam type of FIG. 7.
9 is a conceptual diagram conceptually showing a door closed state of the gate valve system of the door close cam type of FIG. 7.
10 is a cross-sectional view illustrating various embodiments of a corresponding method of a first magnetic body and a second magnetic body of the cam-type gate valve system of FIG. 1.
11 is a perspective view showing a cam type gate valve system according to some other embodiments of the present invention.
12 is a perspective view illustrating a cam type gate valve system according to some other embodiments of the present invention.
13 is a perspective view showing a cam body of a gate valve system according to some other embodiments of the present invention.
14 is a conceptual diagram illustrating a gate valve system according to some other embodiments of the present invention.

Hereinafter, various embodiments of the present invention will be described in detail with reference to the accompanying drawings.

The embodiments of the present invention are provided to more fully describe the present invention to those of ordinary skill in the art, and the following examples may be modified in various other forms, and the scope of the present invention is as follows. It is not limited to the Examples. Rather, these embodiments are provided to make the present disclosure more faithful and complete, and to fully convey the spirit of the present invention to those skilled in the art. In addition, the thickness or size of each layer in the drawings is exaggerated for convenience and clarity of explanation.

The terminology used herein is used to describe a specific embodiment and is not intended to limit the present invention. As used herein, singular forms may include plural forms unless the context clearly indicates otherwise. Also, as used herein, “comprise” and/or “comprising” specifies the shapes, numbers, steps, actions, elements, elements and/or the presence of these groups. And does not exclude the presence or addition of one or more other shapes, numbers, actions, elements, elements and/or groups.

Hereinafter, embodiments of the present invention will be described with reference to the drawings schematically showing ideal embodiments of the present invention. In the drawings, deformations of the illustrated shape can be expected, for example, according to manufacturing technology and/or tolerance. Therefore, embodiments of the inventive concept should not be interpreted as being limited to a specific shape of the region shown in this specification, but should include, for example, a change in shape resulting from manufacturing.

Hereinafter, a gate valve system 100, 200, 300, and semiconductor substrate processing equipment 1000 of a door close cam type according to various embodiments of the present invention will be described in detail with reference to the drawings.

1 is a conceptual diagram conceptually showing an open state of a first door 21 and a second door 22 of a gate valve system 100 of a door close cam type according to some embodiments of the present invention; 1 is a conceptual diagram conceptually showing the closed state of the first door 21 and the second door 22 of the door close cam type gate valve system 100, and FIG. 3 is a door close cam type gate valve system of FIG. 1. It is a conceptual diagram conceptually showing the open state of the first door 21 and the closed state of the second door 22 of FIG. 4, and FIG. 4 is a first door of the gate valve system 100 of the door close cam type of FIG. 21) and the second door 22.

First, as shown in Figures 1 to 4, the door close contact cam type gate valve system 100 according to some embodiments of the present invention, the housing 10, the door 20 and the door lifting device 30 and a door contact device 40.

For example, as shown in FIGS. 1 to 4, the housing 10 is a kind of case structure formed as a hollow box as a whole, a high-tech semiconductor device or display such as a semiconductor chip, wafer, LCD panel, OLED panel, etc. It may be a structure in which passages 10a and 10b are formed to allow various objects, such as devices and other medical devices, to enter and exit.

The housing 10 may support the door 20 or the door elevating device 30 described above, and may be a structure having sufficient strength and durability to be connected to various chambers. However, the housing 10 is not limited to the drawings, as conceptually illustrated in the drawings, and a wide variety of housings of various types and shapes may be applied.

In addition, for example, as illustrated in FIGS. 1 to 4, the door 20 is formed in a shape corresponding to the passages 10a and 10b so as to block the passages 10a and 10b. It may be a valve body. Here, the door 20 is conceptually illustrated, and is not limited to the drawings, and various sealing members, various joints, or hinge structures may be additionally installed.

More specifically, for example, as shown in Figures 1 to 4, the housing 10 is a first passage 10a connected to the first chamber CM1 and a second chamber CM2 connected to the agent Two passages (10b) are formed, the door 20 is installed in the first passage (10a) and the second passage (10b), the first passage (10a) and the second passage (10b), respectively It may include a first door 21 and the second door 22 that can be in close contact.

However, the shape or number of the passage or the door is not limited to the drawings and can be installed in a wide variety of shapes or numbers.

For example, in the figure, the door 20 may be of a T motion type of two, as described above, or may be of a L motion type of a single door, although not shown.

In addition, for example, as illustrated in FIGS. 1 to 4, the door elevating device 30 is a device capable of elevating and elevating the door 20, and all of various types of devices can be applied. have. A more detailed description will be given later.

On the other hand, for example, as shown in Figures 1 to 4, the door contact device 40, if the vertical movement of the door 20, the vertical movement of the door 20, the contact direction movement of the door 20 As a horizontal movement, since both vertical and horizontal movements are possible, it can be referred to as "T-Motion" after the shape of the movement.

That is, as shown in Figures 1 to 4, the door contact device 40, the door 20 that is raised and lowered by the door lifting device 30, the passage (10a) (10b) direction The guide cam member 41 and the guide cam adjusting device 42 and the door for adjusting the position or shape of the guide cam member 41 so that the operation of the guide cam member 41 is selectively performed 20) may include a hoistway 43 supporting the door 20 so that it is free to move in the horizontal direction.

More specifically, for example, as shown in Figures 1 to 4, the guide cam member 41 of the door contact device 40, in the first mode, as a whole having a pointed wedge shape in the downward direction, The first inclined cam portion 41a corresponding to the first inclined surface 21a formed in the first door 21 and the second inclined cam portion corresponding to the second inclined surface 22a formed in the second door 22 (41b).

In addition, for example, the guide cam adjusting device 42 of the door contact device 40, in the first mode, when the first door 21 and the second door 22 rise, the first door ( The first inclined surface 21a of 21) is guided along the first inclined cam portion 41a so that the first door 21 is closed in close contact with the first passage 10a, and the second door 22 ) The second inclined surface 22a is guided along the second inclined cam portion 41b so that the second door 22 is in close contact with the second passage 10b so that the guide cam member 41 ) Can be rotated at a first angle K1, and in the second mode, when the first door 21 and the second door 22 rise, the first door 21 becomes free and the first The passage 10a is opened, and the second inclined surface 22a of the second door 22 is guided along the rotated first inclined cam portion 41a so that the second door 22 is the second passage A rotating shaft 421 capable of rotating the guide cam member 41 at a second angle K2 so as to be in close contact with (10b) and a rotating device 422 capable of rotating the rotating shaft 421. It can contain.

In addition, as shown in Figures 1 to 4, the hoistway 43 is a rail is formed so that the first door 21 and the second door 22 can be freely moved in the horizontal direction, the sliding support It is possible to freely support in a wide variety of forms such as, but not limited to, link support, elastic support.

Accordingly, as illustrated in FIG. 2, when the first mode, that is, the first angle K1 is 0 degrees, when the first door 21 and the second door 22 rise, the first door ( The first inclined surface 21a of 21) is guided along the first inclined cam portion 41a so that the first door 21 is closed in close contact with the first passage 10a, and the second door 22 ), the second inclined surface 22a is guided along the second inclined cam portion 41b so that the second door 22 is closed in close contact with the second passage 10b, resulting in the first door 21 ) And the second door 22 may both be closed.

Subsequently, as illustrated in FIG. 3, when the second mode, that is, the second angle K1 is 90 degrees counterclockwise, when the first door 21 and the second door 22 are raised, The first door 21 is freed, and the first passage 10a is opened, and the second inclined surface 22a of the second door 22 is guided along the rotated first inclined cam portion 41a. The second door 22 is closed in close contact with the second passage 10b, and as a result, the first door 21 is opened, and only the second door 22 can be closed.

Of course, although not shown, when the guide cam member 41 rotates 90 degrees clockwise, the first door 21 is closed, and only the second door 22 may be opened.

Here, the difference between the first angle K1 and the second angle K2 is 90 degrees, and the guide cam member 41 is 90 from the first angle K1 to the second angle K2. When rotating, it was illustrated that the first inclined cam portion 41a is formed in a polygonal shape so as to be positioned at a position at the first angle K1 of the second inclined cam portion 41b, for example, The difference between the first angle K1 and the second angle K2 is 180 degrees, and it is also possible that the guide cam member 41 is a curved surface rather than a polyhedron.

In addition, as illustrated in FIG. 4, the rotating device 422 may include a rotating handle that is connected to the rotating shaft 421 and is exposed outside the housing 10.

Therefore, the user can manually open the first door 21 and the second door 22 while holding the rotation handle and rotating or reversing the rotation shaft 421 by 90 degrees.

In addition, for example, as illustrated in FIG. 4, the rotating device 422 may include a motor M that rotates the rotating shaft 422.

Accordingly, the first door 21 and the second door 22 may be automatically opened by the motor while the motor rotates the rotation shaft 421 forward or reverse.

5 is a conceptual diagram conceptually showing a door open state of a door close cam type gate valve system 200 according to some other embodiments of the present invention, and FIG. 6 is a door close cam type gate valve system of FIG. 5 ( 200) is a conceptual diagram conceptually showing the closed state of the door.

5 and 6, for example, the door lifting device 30 is a device that can move the door 20, and in the drawing, the door 20 can be moved up and down. It can be a device.

For example, as shown in FIGS. 5 and 6, the door elevating device 30 is freely installed in the first direction (in the drawing, the elevating direction), and is connected to the door 20 The cam member is formed on the driven member 31 and at least one inclined surface C which is freely installed in the second direction (left and right direction in the drawing) and is in contact with the driven member 31 to change the direction of movement. And a motive device 33 capable of moving the cam member 32 in the second direction.

More specifically, for example, as shown in Figures 5 and 6, the cam member 32, the cam body 321 is formed in a block form as a whole and the inclined surface (C) on the upper surface of the cam body 321 ) May include the inclined portion 322 is formed.

Here, as shown in Figures 5 and 6, the driven member 31 is formed on one end of the rod (R) connected to the door 20, the roller in rolling contact with the inclined surface (C) ( 311).

Therefore, as the driven member 31 is moved up and down according to the left and right movement of the cam member 32, the door 20 may be moved up and down in the direction of the passage 10a, and when the door 20 is moved up and down. , The door 20 may press the passage 10a to close the passage 10a, and when the door 20 is lowered, the door 20 is spaced apart from the passage 10a. The passage 10a can be opened.

On the other hand, for example, as shown in Figures 5 and 6, the prime mover 33 is provided with a rolling wheel (W1) (W2) in rolling contact with the bottom member (B) on one side, the first on the other side The driven cart 331 on which the magnetic body M1 is installed, and the driving table 332 and the driving table 332 on which the first magnetic body M1 and the second magnetic body M2 corresponding to each other by magnetic force are installed, It may include a drive device 333 capable of reciprocating.

More specifically, for example, the driving device 333 may be a pneumatic cylinder device or a hydraulic cylinder device that reciprocates the driving platform 332. These cylinder drive devices, as well as single-acting, double-acting, as well as a piston-driven piston driven thin, cylinder-driven cylinder-driven cylinder devices of a wide variety of methods can all be applied.

Here, for example, the driven cart 331 is installed inside the compartment 334 in which a vacuum environment or a processing environment in which cleanliness is necessary can be formed, and the driving platform 332 and the driving device 333 are It may be installed outside the compartment 334.

In addition, for example, as shown in Figures 5 and 6, the driven bogie 331, the first rolling wheel (W1) is installed in the front, the second rolling wheel (W2) is installed in the rear, the The first magnetic body M1 may be installed between the first rolling wheel W1 and the second rolling wheel W2.

Accordingly, the first rolling wheel W1 and the second rolling wheel W2 allow the first magnetic body M1 to be finely spaced from the bottom member B and supported by rolling, thereby minimizing friction while minimizing friction. The magnetic force with the second magnetic body M2, that is, the attraction force can be maximized.

More specifically, for example, as shown in FIGS. 5 and 6, the first magnetic body M1 is arranged in a line or more such that a plurality of permanent magnets, each having an N pole and an S pole, have magnetic forces acting on each other. Is a permanent magnet module, and the second magnetic body M2 is a permanent magnet module in which a plurality of permanent magnets each having an N pole and an S pole are arranged in a line or more so that magnetic force acts between the first magnetic body M1 and each other. Can be

Therefore, the polarities of the plurality of permanent magnets are alternately arranged so that the attractive force acts, thereby widening the range of the magnetic field exerted by the magnetic force and increasing the strength of the attractive force.

Thus, as illustrated in FIGS. 5 and 6, the operation process of the gate valve system 200 of the door close cam type according to some embodiments of the present invention is described step by step, first, as illustrated in FIG. 5 As described above, the door opening state is a state in which the roller 311 installed on the rod R supporting the door 20 comes into contact with the lower portion of the inclined surface C of the cam member 32 and descends. Can wait. Here, although not shown, it is possible to maintain the descending state of the roller 311 by additionally installing an elastic spring that can act as a restoring force in the direction in which the door 20 descends.

At this time, the driving device 333 is to move the driving platform 332 to the left, thereby causing the second magnetic body M2 to move to the left, and thereby to the left, the first magnetic body M1 by magnetic force. By moving, the driven cart 331 and the cam member 32 may also be left in a state to be moved to the left.

Subsequently, as shown in FIG. 6, in the closed state of the door, the driving device 333 moves the driving platform 332 to the right, so that the second magnetic body M2 is moved to the right, thereby generating the second magnetic force. 1 As the magnetic body M1 is also moved to the right, the driven cart 331 and the cam member 32 may also be moved to the right.

At this time, the roller 311 installed on the rod R supporting the door 20 may be raised in contact with a high portion of the inclined surface along the inclined surface C of the cam member 32. .

Therefore, the door 20 can be closed together with the passage 10a of the housing 10 while being raised together by the rise of the rod R to close the door 20.

Meanwhile, as illustrated in FIGS. 5 to 6, a magnet 60 may be installed in the housing 10 to collect foreign substances generated in the door elevating device 39 described above. Therefore, foreign substances that may be generated in various rollers or wheels can maintain a clean environment inside without adversely affecting the door or chamber.

Therefore, a conventional bellows pipe is unnecessary, and as a result, it is easy to maintain airtightness even when used for a long time to protect the inside of the chamber from foreign substances, and also to minimize abrasive parts to prevent particle generation. It can be used semi-permanently using magnetic force, minimizes malfunction or malfunction using a cam member having an inclined surface, and uses the principle of the wedge, that is, the cam member using a force that converts left and right forward and backward movements into up and down movements. Since the moving direction of 32) can be switched to the moving direction of the rod R, a large power can be obtained with a small force, thereby improving the efficiency of the device.

7 is a perspective view showing a door lifting device of the door close cam type gate valve system 300 according to some other embodiments of the present invention, and FIG. 8 is a door close cam type gate valve system of FIG. 7 ( 300) is a conceptual diagram conceptually showing the open state of the door, and FIG. 9 is a conceptual diagram conceptually showing the closed state of the gate valve system 300 of the door close cam type of FIG.

7 to 9, the cam member 35 of the door close cam type gate valve system 300 according to some other embodiments of the present invention includes a cam body 351 in a block form as a whole, and It may be formed on the left and right surfaces of the cam body 351, respectively, and may include an inclined track groove 352 on which the inclined surfaces C are formed.

In addition, corresponding to this, the driven member 34 is formed on one end of the rod R connected to the door 20, and is formed in a U-shape as a whole so that at least two finger portions 341a are formed. A roller 342 that is formed on the finger portion 341a of the joint block 341 and is in rolling contact with the inclined surface C, respectively, so as to protrude in the direction of the joint block 341 and the inclined track groove 352. It can contain.

Here, as shown in FIG. 7, the rod R may be restricted in movement only in the vertical direction by the guide member G. Various types of bearing members or metal bearing members may be applied to the guide member G.

Therefore, as illustrated in FIGS. 7 and 9, the operation process of the gate valve system 200 of the door close cam type according to some other exemplary embodiments of the present invention is described stepwise, first, as illustrated in FIG. 8. As described above, in the door open state, the roller 342 installed on the rod R supporting the door 20 is constrained to a lower portion of the inclined track groove portion 352 of the cam member 35. You can wait in a lowered state. Here, a separate elastic spring is unnecessary.

At this time, the driving device 333 is to move the driving platform 332 to the left, thereby causing the second magnetic body M2 to move to the left, and thereby to the left, the first magnetic body M1 by magnetic force. By moving, the driven cart 331 and the cam member 32 may also be left in a state to be moved to the left.

Subsequently, as shown in FIG. 9, in the closed state of the door, the driving device 333 moves the driving platform 332 to the right, so that the second magnetic body M2 is moved to the right, thereby applying the magnetic force. 1 As the magnetic body M1 is also moved to the right, the driven cart 331 and the cam member 35 may also be moved to the right.

At this time, the roller 342 installed on the rod R supporting the door 20 may be constrained and elevated with a high portion of the inclined track groove portion 352 of the cam member 35.

Therefore, the door 20 can be closed together with the passage 10a of the housing 10 while being raised together by the rise of the rod R to close the door 20.

Therefore, by constraining the roller 342 to the above-described inclined track groove portion 352, it is possible to stably induce both an upward and downward movement without a separate elastic spring.

On the other hand, the present invention may include a semiconductor substrate processing equipment including the gate valve system 100, 200 and 300 of the door close cam type according to various embodiments of the present invention described above.

For example, such a semiconductor substrate processing equipment includes any one of a chamber capable of processing a semiconductor substrate and a gate valve system 100, 200, 300 of a door close cam type capable of opening and closing the chamber. , The role and configuration of the door contact cam type gate valve system may be the same as those described above. Therefore, detailed description is omitted.

10 is a cross-sectional view illustrating various embodiments of a corresponding method of the first magnetic body M1 and the second magnetic body M2 of the cam-type gate valve system 100 of FIG. 1.

First, as shown in (a) of FIG. 10, when viewed in the cross-sectional direction, the first magnetic body M1 and the second magnetic body M2 are arranged with polarities shifted from each other, and arranged vertically at regular intervals. Can. In addition, various arrangements are possible, for example, as shown in FIG. 10( b), in order to reduce height, the first magnetic body M1 and the second magnetic body M2 are viewed in the cross-sectional direction. The second magnetic body M2 may be disposed left and right between the first magnetic bodies M1 at regular intervals.

In addition, for example, as shown in (c) of FIG. 10, when the first magnetic body M1 and the second magnetic body M2 are viewed in a cross-sectional direction, the second magnetic body M2 is disposed between the second magnetic bodies M2. 1 The magnetic body M2 may be disposed left and right in an inserted form at regular intervals.

In addition, for example, as shown in FIG. 10D, for stable operation, the first magnetic body M1 and the second magnetic body M2 are viewed in the cross-sectional direction, and the second magnetic body M2 It is also possible that the first magnetic body M2 is disposed in a zigzag manner at regular intervals between them.

Accordingly, the corresponding shapes of the magnetic bodies may be arranged in a wide variety of shapes such as up, down, left, and right zigzag.

11 is a perspective view illustrating a cam type gate valve system 500 according to some other embodiments of the present invention.

11, the cam type gate valve system 500 according to some other embodiments of the present invention forms the rod (R) (R) connected to the door 20 in two axes. By doing so, it is possible to enable solid and stable movement of the door 20.

12 is a perspective view illustrating a cam type gate valve system 600 according to some other embodiments of the present invention.

As illustrated in FIG. 12, a cam type gate valve system 600 according to some other embodiments of the present invention includes two rods R and R connected to two doors 20, respectively. Each of the two cam bodies 351 can be individually raised and lowered.

Therefore, the plurality of doors can be individually raised and lowered using the plurality of cam bodies.

13 is a perspective view illustrating a cam body 361 of the gate valve system 700 according to some other embodiments of the present invention.

As shown in FIG. 13, the cam body 361 is in contact with a roller of at least the first rod R1 so as to be connected to the inclined portion 362, and a first peak having a first height H1 A second peak portion 364 may be formed in contact with the roller of the portion 363 and the second rod R2 and having a second height H2.

Accordingly, the door 10 can be moved at different heights and motions, and the movements of the cam body 361, the inclined portion 362, and the peak portions 363 and 364 are precisely controlled. Control. On the other hand, in the drawings, the peaks are suggested to be formed on the upper surface, but are not necessarily limited to the drawings, and the peaks may be modified in various ways such as being formed on the side surface.

14 is a conceptual diagram illustrating a gate valve system according to some other embodiments of the present invention.

As illustrated in FIG. 14, the prime mover 33 may be omitted from the above-described first magnetic body M1 and the second magnetic body M2, and directly connected to the cam body 321. Therefore, the driving device 33 is not necessarily limited to the drawings, and various embodiments may be applied.

On the other hand, the above-described door 20 can be replaceable, and if the door is not genuine when replacing the door using an identification technology such as RFID, the operation of the equipment can be stopped.

The present invention has been described with reference to the embodiments shown in the drawings, but these are merely exemplary, and those skilled in the art will understand that various modifications and equivalent other embodiments are possible therefrom. Therefore, the true technical protection scope of the present invention should be determined by the technical spirit of the appended claims.

10: housing
10a: first passage
10b: second passage
20: door
21: first door
22: second door
21a: first slope
22a: second slope
CM1: 1st chamber
CM2: Second chamber
30: door lift device
31: Follower absent
311: roller
32: cam member
321: cam body
322: slope
C: slope
33: prime mover
331: passive truck
332: drive wheel
333: driving device
R: Rod
341: joint block
341a: Finger section
342: roller
351: cam body
352: Inclined track groove
B: floor member
W1: 1st rolling wheel
W2: 2nd rolling wheel
M1: first magnetic material
M2: second magnetic material
40: door contact device
41: Guide cam member
41a: first inclined cam portion
41b: 2nd inclined cam part
42: Guide cam adjustment device
421: rotating shaft
422: rotating device
43: Platform
M: Motor
60: magnet
100, 200, 300: Door close cam type gate valve system

Claims (12)

A housing in which at least one passage is formed;
A door capable of blocking the passage;
A door elevating device capable of elevating the door; And
A door contact device capable of adhering the door to the passage;
Including,
The door contact device,
A guide cam member for guiding the door, which is raised and lowered by the door lifting device, in the passage direction; And
Includes a guide cam adjustment device for adjusting the position or shape of the guide cam member so that the operation of the guide cam member is selectively made
The door lifting device,
A driven member freely installed in the first direction and connected to the door;
A drive cam member freely installed in the second direction and formed with at least one inclined surface in contact with the driven member to change the direction of movement; And
Includes; a driving device capable of moving the drive cam member in the second direction,
The prime mover,
A driven bogie in which a rolling wheel in rolling contact with a floor member is installed on one side, and a first magnetic body is installed on the other side;
The first magnetic body and the driving plate is provided with a second magnetic body corresponding to each other by magnetic force; And
A driving device capable of reciprocating the driving platform;
The gate valve system of the door close cam type, including. According to claim 1,
The housing is formed with a first passage connected to the first chamber and a second passage connected to the second chamber,
The door includes a first door and a second door that are installed in the first passage and the second passage and can be in close contact with the first passage and the second passage, respectively.
The guide cam member of the door contact device includes: a first inclined cam portion corresponding to a first inclined surface formed in the first door; And a second inclined cam portion corresponding to a second inclined surface formed in the second door.
The guide cam adjusting device of the door contact device,
In the first mode, when the first door and the second door are raised, the first inclined surface of the first door is guided along the first inclined cam portion, so that the first door is in close contact with the first passage and closed. The guide cam member may be rotated at a first angle so that the second inclined surface of the second door is guided along the second inclined cam portion so that the second door is in close contact with the second passage and closed. In the second mode, when the first door and the second door are raised, the first door is freed to open the first passage, and the first inclined cam part in which the second inclined surface of the second door is rotated A rotation shaft that is guided along and rotates the guide cam member at a second angle so that the second door is in close contact with the second passage and closed; And
A rotating device capable of rotating the rotating shaft;
The gate valve system of the door close cam type, including. According to claim 2,
The difference between the first angle and the second angle is 90 degrees,
The guide cam member, when rotated 90 degrees from the first angle to the second angle, is formed in a polygonal shape so that the first inclined cam portion can be positioned at a position at the first angle of the second inclined cam portion The gate valve system of the door close cam type. According to claim 2,
The rotating device is connected to the rotating shaft and is a rotating handle exposed to the outside of the housing, a door close cam type gate valve system. According to claim 2,
The rotating device includes a motor that rotates the rotating shaft, a gate valve system of a door close cam type. delete According to claim 1,
The drive cam member,
Cam body; And
Containing; inclined portion is formed on the upper surface of the cam body;
The driven member,
A roller formed on one end of the rod connected to the door and in rolling contact with the inclined surface;
The gate valve system of the door close cam type, including. According to claim 1,
The drive cam member,
Cam body; And
It is formed on the left side and the right side of the cam body, respectively, the inclined track groove portion is formed on each of the inclined surface; includes,
The driven member,
A joint block formed on one end of the rod connected to the door and formed in a U shape as a whole so that at least two finger portions are formed; And
Rollers formed on the finger portions of the joint block so as to protrude in the direction of the inclined track grooves, respectively being in rolling contact with the inclined surfaces;
The gate valve system of the door close cam type, including. delete According to claim 1,
The first magnetic body is a permanent magnet module in which a plurality of permanent magnets each having an N-pole and an S-pole are arranged in a line or more so that magnetic forces act on each other,
The second magnetic body is a permanent magnet module in which a plurality of permanent magnets each having an N-pole and an S-pole are disposed in a line or more so that magnetic force acts between the first magnetic body and each other. According to claim 1,
The door is a single-door L-motion type or two T-motion type, a door close cam type gate valve system. A chamber capable of processing a semiconductor substrate; And
It includes; a door valve cam type gate valve system capable of opening and closing the chamber;
The door close contact cam type gate valve system,
A housing in which at least one passage is formed;
A door capable of blocking the passage;
A door elevating device capable of elevating the door; And
A door contact device capable of adhering the door to the passage;
Including,
The door contact device,
A guide cam member for guiding the door, which is raised and lowered by the door lifting device, in the passage direction; And
Includes a guide cam adjustment device for adjusting the position or shape of the guide cam member so that the operation of the guide cam member is selectively made
The door lifting device,
A driven member freely installed in the first direction and connected to the door;
A drive cam member freely installed in the second direction and formed with at least one inclined surface in contact with the driven member to change the direction of movement; And
Includes; a driving device capable of moving the drive cam member in the second direction,
The prime mover,
A driven bogie in which a rolling wheel in rolling contact with a floor member is installed on one side, and a first magnetic body is installed on the other side;
The first magnetic body and the driving plate is provided with a second magnetic body corresponding to each other by magnetic force; And
A driving device capable of reciprocating the driving platform;
Including, semiconductor processing equipment.

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