KR101419355B1 - Loading and exchanging system of large mask frame and method thereof - Google Patents

Abstract

A system for loading and replacing a large mask frame is disclosed. According to an embodiment of the present invention, there is provided a system for loading and replacing a large mask frame, comprising: a deposition chamber unit into which a glass to be deposited is introduced; A mask stocker chamber unit connected to the deposition chamber unit, the mask stocker chamber unit being loaded with a mask frame used for deposition of glass; And a mask carrier unit which is loaded on the mask stocker chamber unit in such a manner that the mask frame is stacked on the mask stocker chamber chamber unit and is moved from the mask stocker chamber unit to the deposition chamber unit to supply the mask frame to the mask stocker chamber unit.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a loading and replacing system for a large mask frame,

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a system and method for loading and replacing a large mask frame, and more particularly to a system for loading and replacing a large mask frame capable of loading a large mask into a glass in which a series of deposition processes are performed, ≪ / RTI >

2. Description of the Related Art Generally, OLED manufacturing processes in display panels include a pattern forming process, an organic thin film deposition process, a sealing process, and a laminating process in which an organic thin film is deposited on a glass plate and a glass plate is sealed.

The double deposition process is a method of attaching the organic layer thin film to the surface of a glass. In this method, a fine pattern is formed by evaporating an organic compound of a substance to be used for deposition in a vacuum container, to be.

In this deposition process, a carrier capable of moving to a next process by attaching a glass is used. In the carrier, a portion in contact with the glass is composed of an electrostatic chuck (ESC). The electrostatic chuck is an apparatus for attaching a glass using an electrostatic force. When the distance from the glass to the glass is about 2 mm, the glass may be stably stuck.

The deposition process for the glass is to perform a series of deposition several times. In the state where the deposition surface of the glass is arranged to face downward, the deposition gas generated from the deposition source provided on the lower side is deposited on the deposition surface of the glass located above Based deposition method.

A mask frame having a pattern for forming a fine pattern may be disposed on the bottom surface of such a glass. That is, when the carrier is carried into the deposition chamber in which the deposition process is carried out, the mask frame is loaded on the mask cassette and then transferred to the deposition chamber by the carrier robot and placed under the glass.

In recent years, with the development of technology, the production of large-area panels has increased the size of the glass considerably. As a result, the mask frame, which is disposed under the glass and provides the deposition pattern, is also inevitably enlarged and heavy.

Accordingly, when the mask frame is expected to be large in size and heavy load so as to be difficult to be loaded on the glass side by the transport robot in the deposition process line, it is difficult to bear the load of the mask frame by the transport robot, Is difficult.

In addition, when a carrier robot capable of withstanding a large-sized and high-load mask frame is manufactured and used, it is not easy to provide a vacuum work space as much as the work space occupied by the carrier robot in the deposition process line, As the probability of occurrence of errors and failures increases, there is also a risk of carrying operations and maintenance of failures.

Korean Patent Application Publication No. 10-2001-0034990

SUMMARY OF THE INVENTION Accordingly, it is an object of the present invention to provide a system and method for loading and replacing a large mask frame in which a large-sized and heavy-loaded mask frame can be replaced and supplied smoothly, .

According to an aspect of the present invention, there is provided a deposition apparatus including: a deposition chamber unit into which a glass to be deposited is introduced; A mask stocker chamber unit connected to the deposition chamber unit, the mask stocker chamber unit being loaded with a mask frame used for deposition of the glass; And a mask carrier unit that is mounted on the mask stocker chamber unit so that the mask frame is stacked on the mask stocker chamber unit and is guided from the mask stocker chamber unit to the deposition chamber unit and supplies the mask frame to the deposition chamber unit. A loading and replacement system of the mask frame can be provided.

The system for loading and replacing a mask frame according to an aspect of the present invention may further include a carrier movement guide arranged from the mask stocker chamber unit to the deposition chamber unit to guide movement of the mask carrier unit.

The system for loading and replacing a mask frame according to an aspect of the present invention may further include a linear motor unit for enabling movement of the mask carrier unit according to the carrier movement guide.

The linear motor unit includes: a linear fixed magnet installed in the mask carrier unit; And a linear electromagnet installed in a movement path of the mask carrier unit corresponding to the linear fixed magnet.

Wherein the linear electromagnet is disposed at a predetermined interval along the movement path of the mask carrier unit; And a linear motor coil installed in the linear motor body to generate an electromagnetic force capable of moving the linear fixed magnet.

The carrier movement guide may include a support roller disposed along a movement path of the mask carrier unit, and the mask carrier unit may include a support jaw supported and guided by the support roller.

The mask stocker chamber unit is connected to the deposition chamber unit to supply the mask frame in a direction crossing the direction of movement of the glass, and a gate valve may be installed between the deposition chamber unit and the mask stocker chamber unit .

Wherein the mask stocker chamber unit includes two mask carrier units capable of loading a mask frame already used in the pair of glasses when the glass is carried in pairs in the deposition chamber unit, Two other mask carrier units loaded with the mask frame to be placed can be loaded.

Wherein the mask stocker chamber unit comprises: a stocker vacuum chamber connected to the gate valve and to which the mask carrier unit is loaded; And a carrier lifter disposed under the stocker vacuum chamber and capable of lifting the mask carrier unit adjacent to the gate valve.

The deposition chamber unit may include a deposition chamber in which the glass is introduced and evaporation is performed; A cooling plate installed in the deposition chamber and on which the mask frame is loaded; And a mask lifter for unloading the mask frame from the mask carrier unit and loading the mask frame onto the cooling plate.

The mask carrier unit may be provided with a lifter groove to support the upper end of the mask lifter.

Wherein the carrier lifter comprises: a carrier lifting / lowering body installed to be movable up and down in the stocker vacuum chamber, the carrier lifting body being loaded with the mask carrier unit; A carrier lifting rod that is vertically installed at a lower portion of the stocker vacuum chamber to lift up the carrier lifting body; A lifting base to which the carrier lifting rod is supported and coupled; A lifting bellows coupled to the lifting base to enclose the carrier lifting rod and coupled to a bottom surface of the stocker vacuum chamber; A ball screw coupled to the lifting base and lifting the lifting base; And a driving motor for driving the ball screw.

According to another aspect of the present invention, there is provided a method of manufacturing a deposition chamber, including: loading a glass into a deposition chamber unit; Moving the mask carrier unit up in the mask stocker chamber unit to the deposition chamber unit; The mask carrier unit unloads the mask frame already disposed in the glass and returns to the mask stocker chamber unit; Moving another mask carrier unit in which the new mask frame is loaded in the mask stocker chamber unit to the deposition chamber unit; And loading and unloading a new mask frame from the another mask carrier unit and loading the same onto a cooling plate opposed to the glass.

Wherein the mask carrier unit comprises: a linear fixed magnet provided in the mask carrier unit; and a linear electromagnet provided in the movement path of the mask carrier unit from the mask stocker chamber unit to the deposition chamber unit corresponding to the linear fixed magnet Can be moved.

The mask frame may be inserted into the deposition chamber unit in a direction crossing the movement direction of the glass.

According to an aspect of the present invention, a large mask frame is loaded on a mask carrier unit that is loaded in a mask stocker chamber unit and guided from the mask stocker chamber unit to a deposition chamber unit, and is transported to a deposition chamber unit, A large mask frame capable of stably carrying out a process for depositing a large-sized glass by smoothly supplying and replacing a large-sized and heavy-duty mask frame in a glass deposition process line can be arranged so as to form a vapor deposition pattern in a glass A loading and replacing system of the present invention and a method thereof.

In addition, according to another aspect of the present invention, it is not necessary to provide a transfer robot capable of withstanding a mask frame of a large size and a high load, and the installation space of the deposition process line for transferring the mask frame and the work space are reduced, A linear moving magnet provided on the moving path of the mask carrier unit and a linear fixed magnet mounted on the mask carrier unit and capable of easily providing a work space and having a carrier moving guide disposed from the mask stocker chamber unit to the deposition chamber unit, The unit can stably move the mask carrier unit from the mask stocker chamber unit to the deposition chamber unit, so that the probability of errors and failures due to high-load operations can be significantly reduced.

1 is a schematic plan view showing an arrangement of a loading and replacement system for a large mask frame according to an embodiment of the present invention.
2 is a schematic right side view of 1;
Figure 3 is a schematic front view of the mask stocker chamber unit of Figure 1;
Fig. 4 is a detailed view of a mask lift disposed in the mask stocker chamber unit of Fig. 3;
5 is a schematic plan view showing a state in which a mask carrier unit is loaded into the deposition chamber unit of FIG. 1 and the carrier lifter is disposed in the lifter groove.
FIG. 6 is a cross-sectional view showing a state in which the mask carrier unit is loaded into the deposition chamber unit of FIG. 1;
7 is a state diagram showing a process in which the mask frame 6 is loaded from the mask carrier unit to the cooling plate.

In order to fully understand the present invention, operational advantages of the present invention, and objects achieved by the practice of the present invention, reference should be made to the accompanying drawings and the accompanying drawings which illustrate preferred embodiments of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. Like reference symbols in the drawings denote like elements. The following glasses are indicated by the reference numeral "G" and the mask frame is indicated by the reference symbol "M ".

1 is a schematic plan view showing an arrangement of a loading and replacement system of a large mask frame according to an embodiment of the present invention, Fig. 2 is a schematic right side view of 1, and Fig. 3 is a cross- Fig. 4 is a detailed view of a mask lift disposed in the mask stocker chamber unit of Fig. 3, Fig. 5 is a view showing a state in which the mask carrier unit is carried into the deposition chamber unit of Fig. 1 and the carrier lifter is placed in the lifter groove FIG. 6 is a cross-sectional view showing a state in which the mask carrier unit is loaded into the deposition chamber unit of FIG. 1, and FIG. 7 is a view showing a process of loading the mask frame of 6 from the mask carrier unit to the cooling plate State diagram.

1 to 3, a system for loading and replacing a large mask frame according to an embodiment of the present invention includes a deposition chamber unit 100 in which a glass to be deposited is carried, a deposition chamber unit 100 A mask stocker chamber unit 110 mounted on the mask stocker chamber unit 110 so that the mask frame is stacked on the mask stocker chamber unit 110, And a mask carrier unit 115 linearly guided from the mask chamber unit 110 to the deposition chamber unit 100 to supply the mask frame to the mask stocker chamber unit 110.

The deposition chamber unit 100 and the mask stocker chamber unit 110 according to the present embodiment are connected to a vacuum exhaust system and are placed in a high vacuum state before the deposition process for the glass proceeds. , The mask frame may be disposed from the mask carrier unit 115 to the upper portion of the glass so that the deposition process can proceed.

The glass according to the present embodiment has a large area and weight of 8 generations or more, and the mask frame disposed thereon may also have a weight of about one ton. Accordingly, the mask frame can be supplied to the deposition chamber unit 100 from the mask stocker chamber unit 110 by being loaded on a transporting carriage such as the mask carrier unit 115 because the supply of the mask frame by the transport robot is difficult. The mask carrier unit 115 can be moved by the linear motor unit 145 as will be described later and the linear motor unit 145 can flexibly control the mechanical operation accompanying the traveling movement of the mask carrier unit 115 And a controller to which such a program is applied.

The large mask frame loading and replacing system according to this embodiment is a system in which a large mask frame is loaded on a mask carrier unit 115 which is guided and moved from the mask stocker chamber unit 110 to the deposition chamber unit 100, The mask frame can be replaced by a large-sized and high-load mask frame in the glass deposition process line and can be smoothly supplied and enlarged in the glass deposition process line since it can be arranged to form a deposition pattern in the glass carried to the unit 100 and carried into the deposition chamber unit 100 It is not necessary to provide a transfer robot capable of withstanding a mask frame of a large size and a high load, so that the deposition space for transferring the mask frame and the space of the work space are reduced, State workspace can be easily provided.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The general components according to one embodiment of the present invention will be described in detail with reference to FIGS. 1 to 7. FIG.

First, the mask stocker chamber unit 110 according to the present embodiment is connected to the deposition chamber unit 100 so as to supply the mask frame in a direction crossing the moving direction of the glass, and the deposition chamber unit 100 and the mask stocker chamber 100 A gate valve 120, which can be opened and closed, may be installed between the unit 110. The mask frame can be supplied in a direction crossing the moving direction of the glass through the gate valve 120 and along the deposition process line.

The deposition processing system according to the present embodiment assumes the manner in which the glass is supplied from the left to the right of the deposition chamber unit 100 and supplies the mask frame to the mask stocker chamber unit 110 in such a cross direction The deposition chamber unit 100 may be installed at a position behind the deposition chamber unit 100.

According to the present embodiment, when the glass is carried in pairs in the deposition chamber unit 100, the mask stocker chamber unit 110 is provided with two mask carrier units (hereinafter referred to as " 116 and two other mask carrier units 117 on which a mask frame to be placed in a pair of glasses is loaded.

First, a pair of mask carrier units 116 are supplied to the deposition chamber unit 100 and can be returned to the mask stocker chamber unit 110 by unloading the mask frame already used for the deposition process of the glass, A pair of mask frames may be supplied to the deposition chamber unit 100 by another pair of mask carrier units 117 so that the next deposition process can proceed.

According to the present embodiment, the mask stocker chamber unit 110 is further provided with one mask carrier unit 118, which is connected to the deposition chamber unit 100 and the mask stocker chamber unit < RTI ID = 0.0 > 110 may be used when an error occurs in loading or unloading a mask frame. Accordingly, a total of five mask carrier units 116, 117, and 118 can be loaded in the mask stocker chamber unit 110 according to the present embodiment.

This mask stocker chamber unit 110 is capable of providing a vacuum in the loading space of the mask carrier unit 115 since the plurality of mask carrier units 115 are loaded, To a position where it can be moved to the main body 100.

That is, the mask stocker chamber unit 110 according to the present embodiment includes a stocker vacuum chamber 122 connected to the gate valve 120 and to which the mask carrier unit 115 is loaded, And a carrier lifter 125 capable of lifting and lowering the mask carrier unit 115 corresponding to the gate valve 120.

Among them, the carrier lifter 125 according to the present embodiment includes a carrier lifting body 126 which is mounted on the stocker vacuum chamber 122 so as to be able to move up and down and on which the mask carrier unit 115 is mounted, A carrier lifting rod 127 which is vertically installed on the carrier lifting main body 126 so as to lift the carrier lifting main body 126, a lifting base 128 to which the carrier lifting rod 127 is supported and coupled, A lifting bellows 129 coupled to the bottom of the stocker vacuum chamber 122 by being coupled to the lifting base 128 and a ball screw 130 coupled to the lifting base 128 to elevate the lifting base 128, And a driving motor 131 for driving the ball screw 130.

The carrier lifter 125 according to the present embodiment is configured such that the ball screw 130 is rotated by the drive pulley 132 and the drive belt 133 driven by the drive motor 131 and the operation of the ball screw 130 The lifting base 128 can be moved up and down by the lifting base 128. The carrier lifting body 127 is moved up and down in accordance with the up and down movement of the lifting base 128 to move the carrier lifting body 126 And the mask carrier unit 115 mounted on the carrier lifting body 126 can be disposed at the level of the gate valve 120 of the stocker vacuum chamber 122. [

The deposition chamber unit 100 according to the present embodiment includes a glass deposition chamber 136 in which a glass is introduced and deposition is performed, a cooling plate 136 installed in the glass deposition chamber 136 and loaded with a mask frame, And a mask lifter 137 for unloading the mask frame from the mask carrier unit 115 and loading the mask frame onto the cooling plate 136. Such a mask lifter 137 can be configured to be raised and lowered with components similar to the carrier lifter 125 described above.

The cooling plate 136 is disposed under the glass to support and cool the mask frame. The cooling plate 136 can be disposed on the bottom surface of the mask frame so as to support the mask frame.

The mask lifter 137 also ascends through the lifter groove 138 of the mask carrier unit 115 inside the glass deposition chamber 135 as will be described later to transfer the mask frame carried by the mask carrier unit 115 It can be unloaded from the mask carrier unit 115 at the same time as it is supported, then lowered again to be loaded onto the cooling plate 136.

At this time, the mask carrier unit 115 can be returned to the stocker vacuum chamber 122 when the mask frame is unloaded by the mask lifter 137.

The mask lifter 137 according to the present embodiment is provided with a mask lifter 137 for passing the mask lifter 137 to the mask carrier unit 115 according to the present embodiment so that the mask frame can be unloaded from the mask carrier unit 115, A lifter groove 138 may be provided. The lifter grooves 138 are disposed at the outer periphery of the mask carrier unit 115, and can be arranged in two pairs of mutually opposed faces.

Although not shown, when the mask frame is supported by the mask lifter 137, the mask carrier unit 115 is not interfered by the mask lifter 137 so that it can be moved below the mask lifter 137 and returned.

Hereinafter, the specific components of the mask carrier unit 115 that can be moved from the mask stocker chamber unit 110 to the deposition chamber unit 100 according to the present embodiment will be described.

First, a mask frame loading and replacing system according to an embodiment of the present invention is arranged from the mask stocker chamber unit 110 to the deposition chamber unit 100 so as to move the mask carrier unit 115 by the linear motor system And guide carrier moving guide 140 for guiding.

The carrier movement guide 140 according to the present embodiment is disposed along the dotted line D from the inside of the mask stocker chamber unit 110 to the inside of the deposition chamber unit 100 as shown in FIG. It is possible to have a mechanical rolling rail structure capable of guiding the roller-type mask carrier unit 115 as shown in Fig.

Such a carrier moving guide 140 can be a structure capable of smoothly guiding the movement of the mask carrier unit 115 in a straight line. That is, the carrier movement guide 140 may adopt a structure that does not generate foreign substances that affect the mask frame and the glass when the mask carrier unit 115 is guided.

The movement of the mask carrier unit 115 in accordance with the carrier movement guides 140 can be performed by a linear motor unit 145 which can provide linear movement without causing the operating elements to be spaced apart from each other by friction, have.

That is, the system for loading and replacing the large mask frame according to one embodiment of the present invention may further include a linear motor unit 145 that enables movement of the mask carrier unit 115 according to the carrier movement guide 140 .

The linear motor unit 145 may be separately installed so that the permanent magnet and the electromagnet constituting the linear motor are not one set but can move the mask carrier unit 115.

The linear motor unit 145 includes a linear fixed magnet 146 which is installed in the mask carrier unit 115 and in which the polarities of the permanent magnets are alternately arranged and a mask carrier unit 115 which corresponds to the linear fixed magnet 146, And a linear electromagnet 147 installed in the movement path of the linear electromagnet 147.

The linear fixed magnet 146 of the linear motor unit 145 according to the present embodiment is installed in each of the mask carrier units 115 so that the mask carrier unit 115 is raised to the level where the linear electromagnet 147 is installed It is possible to move the mask carrier unit 115 by receiving the electromagnetic force of the linear electromagnet 147. [

 On the other hand, the linear electromagnet 147 is provided along the dotted line D at the level of the gate valve 120 to which the mask carrier unit 115 can be moved, and the mask carrier lifted up to the level of the gate valve 120 Can act on the linear fixed magnet 146 of the unit 115 to move the mask carrier unit 115 to the deposition chamber unit 100.

The system for loading and replacing the large mask frame according to the present embodiment is provided with a linear fixed magnet 146 (not shown) installed by each mask carrier unit 115 for movement of the mask carrier unit 115 according to the carrier movement guide 140 And a linear electromagnet 147 at a constant interval to the movement path level of the mask carrier unit 115 to move the mask carrier unit 115 between the mask stocker chamber unit 110 and the deposition chamber unit 100 .

According to the present embodiment, the linear fixed magnet 146 and the linear electromagnet 147 correspond to the permanent magnet and the electromagnet of the linear motor. The linear fixed magnet 146 and the linear electromagnet 147 are moved in such a manner that the linear electromagnet 147 can move along the linear fixed magnet 146 A linear motor system in which the mutual polarity of the motor can be changed.

The linear electromagnet 147 according to this embodiment includes a linear motor main body 149 disposed at regular intervals along the movement path of the mask carrier unit 115 and a linear fixed magnet And a linear motor coil 151 for generating an electromagnetic force capable of moving the linear motor 151. [

The linear motor main body 149 is a linear frame provided with a linear motor coil 151 built therein and can be installed at predetermined intervals from the inside of the mask stocker chamber unit 110 to the inside of the deposition chamber unit 100 .

The gap between the linear motor main bodies 149 is shorter than the length of one linear fixed magnet 146. Namely, one linear fixed magnet 146 is disposed between the linear motor magnets 146 And can be moved along the linear motor coil 151 arranged at a predetermined interval by being provided with the electromagnetic force by being hung on the motor coil 151 so that the mask carrier unit 115 can be moved.

As described above, the mask carrier unit 115 can be moved along the carrier movement guide 140 by receiving the electromagnetic force of the linear motor coil 151 attached to the linear fixed magnet 146. To this end, the carrier movement guide 140 includes a support roller 152 disposed along the movement path of the mask carrier unit 115, and the mask carrier unit 115 is supported by the support roller 152 And may include a support jaw 153. This support roller 152 is rotatably coupled to a roller body 155 rigidly mounted on the wall from the interior of the mask stocker chamber unit 110 to the interior of the deposition chamber unit 100, And can be disposed inside the linear motor main body 149.

The carrier moving guide 140 disposed from the mask stocker chamber unit 110 to the deposition chamber unit 100 and the linear electromagnet 147 installed in the movement path of the mask carrier unit 115 ) To the mask carrier unit 115 from the mask stocker chamber unit 110 to the deposition chamber unit 100 by a linear motor unit 145 including a linear fixed magnet 146 mounted on the mask carrier unit 115 The mask frame can be stably moved. Therefore, the probability of occurrence of an error and a failure due to a heavy load operation of the mask frame can be significantly reduced.

On the other hand, according to this embodiment, the linear fixed magnet 146 and the linear electromagnet 147 can be elements that can provide a magnetic force capable of sufficiently moving the large mask frame without causing friction.

Therefore, the scope of the present invention is not limited by the linear motor unit 145, and other elements satisfying such conditions, for example, a superconductor or an atmospheric pressure box, The mask carrier unit 115 can be pulled.

In addition, according to the present embodiment, the alignment unit 160 can be provided on the deposition chamber unit 100, which can arrange the glass on the mask frame.

Hereinafter, a method of loading and replacing a large mask frame by a loading and replacement system according to an embodiment of the present invention will be described.

A method of loading and replacing a large mask frame according to an embodiment of the present invention includes loading a glass into a deposition chamber unit 100 and transferring the mask carrier unit 115 from the mask holder chamber unit 110 Moving to a deposition chamber unit (100); unloading the mask frame already placed in the glass by the mask carrier unit (115) and returning to the mask stocker chamber unit (110); and moving the mask stocker chamber unit , Another mask carrier unit 115 on which a new mask frame is loaded is moved up to the deposition chamber unit 100, and a new mask frame is unloaded from another mask carrier unit 115, To the cooling plate (136).

As described above, the mask carrier unit 115 according to the present embodiment includes the linear fixed magnet 146 installed in the mask carrier unit 115 and the mask stocker chamber unit 110 corresponding to the linear fixed magnet 146, Can be moved by the linear electromagnet 147 installed in the movement path of the mask carrier unit 115 from the deposition chamber unit 100 to the deposition chamber unit 100. Thus, the mask carrier unit 116 can be moved in the direction The mask frame can be supplied by the other mask carrier unit 116 and the deposition process of the glass can proceed smoothly.

Accordingly, in the method of loading and replacing the large mask frame according to the embodiment of the present invention, it is possible to smoothly perform the deposition process of the glass by feeding a pair of large mask frames to the deposition chamber unit 100, Can be loaded on the mask stocker chamber unit 110 again to prepare the next process.

It will be apparent to those skilled in the art that various modifications and variations can be made in the present invention without departing from the spirit or scope of the invention. Accordingly, such modifications or variations are intended to fall within the scope of the appended claims.

G: Glass M: Mask frame
100: deposition chamber unit 110: mask stocker chamber unit
115: mask carrier unit 120: gate valve
122: stocker vacuum chamber 125: carrier lifter
126: carrier lifting body 127: carrier lifting rod
128: lifting base 129: lifting bellows
130: ball screw 131: drive motor
132: drive pulley 133: drive belt
135: Glass deposition chamber 136: Cooling plate
137: mask lifter 138: lifter groove
140: Carrier movement guide 145: Linear motor unit
146: Linear fixed magnet 147: Linear electromagnet
149: Linear motor main body 151: Linear motor coil
152: support roller 153: support jaw
155: roller body 160: aligning unit

Claims (15)

A deposition chamber unit into which a glass to be deposited is introduced;
A mask stocker chamber unit connected to the deposition chamber unit, the mask stocker chamber unit being loaded with a mask frame used for deposition of the glass; And
A mask carrier unit which is loaded with the mask frame so as to be able to be lifted up and down in the mask stocker chamber unit, wherein the mask carrier unit is guided from the mask stocker chamber unit to the deposition chamber unit and supplies the mask frame to the deposition chamber unit;
A carrier movement guide disposed from the mask stocker chamber unit to the deposition chamber unit to guide movement of the mask carrier unit; And
And a linear motor unit capable of moving the mask carrier unit according to the carrier movement guide,
The linear motor unit includes:
A linear fixed magnet mounted on the mask carrier unit; And
And a linear electromagnet installed in a movement path of the mask carrier unit corresponding to the linear fixed magnet. delete delete delete The method according to claim 1,
Wherein the linear electromagnet comprises:
A linear motor main body disposed at predetermined intervals along the movement path of the mask carrier unit; And
And a linear motor coil installed in the linear motor body to generate an electromagnetic force capable of moving the linear fixed magnet. The method according to claim 1,
Wherein the carrier movement guide includes a support roller disposed along a movement path of the mask carrier unit,
Wherein the mask carrier unit includes a support jaw supported and guided by the support rollers. The method according to claim 1,
The mask stocker chamber unit is connected to the deposition chamber unit to supply the mask frame in a direction crossing the movement direction of the glass, and a gate valve is provided between the deposition chamber unit and the mask stocker chamber unit A system for loading and replacing large mask frames. 8. The method of claim 7,
When the glass is carried in pairs into the deposition chamber unit,
Two mask carrier units capable of loading a mask frame already used in said pair of glasses, and
And the other two mask carrier units on which the mask frame to be placed in the pair of glasses is loaded are loaded. 8. The method of claim 7,
Wherein the mask stocker chamber unit comprises:
A stocker vacuum chamber connected to the gate valve and to which the mask carrier unit is loaded; And
And a carrier lifter installed at a lower portion of the stocker vacuum chamber to raise the mask carrier unit adjacent to the gate valve. 8. The method of claim 7,
The deposition chamber unit includes:
A deposition chamber in which the glass is carried and deposition is performed;
A cooling plate installed in the deposition chamber and on which the mask frame is loaded; And
And a mask lifter for unloading the mask frame from the mask carrier unit and loading the mask frame onto the cooling plate. 11. The method of claim 10,
Wherein the mask carrier unit is provided with a lifter groove for supporting the upper end of the mask lifter to pass therethrough. 10. The method of claim 9,
Wherein the carrier lifter comprises:
A carrier lifting / lowering body which is installed in the stocker vacuum chamber so as to be able to move up and down and on which the mask carrier unit is mounted;
A carrier lifting rod that is vertically installed at a lower portion of the stocker vacuum chamber to lift up the carrier lifting body;
A lifting base to which the carrier lifting rod is supported and coupled;
A lifting bellows coupled to the lifting base to enclose the carrier lifting rod and coupled to a bottom surface of the stocker vacuum chamber;
A ball screw coupled to the lifting base and lifting the lifting base; And
And a drive motor for driving the ball screw. Bringing the glass into the deposition chamber unit;
Moving the mask carrier unit up in the mask stocker chamber unit to the deposition chamber unit;
The mask carrier unit unloads the mask frame already disposed in the glass and returns to the mask stocker chamber unit;
Moving another mask carrier unit in which the new mask frame is loaded in the mask stocker chamber unit to the deposition chamber unit; And
Unloading a new mask frame from the other mask carrier unit and loading it onto a cooling plate opposite the glass,
Wherein the mask carrier unit comprises:
A linear fixed magnet installed in the mask carrier unit and a linear electromagnet provided in a movement path of the mask carrier unit from the mask stocker chamber unit to the deposition chamber unit corresponding to the linear fixed magnet. How to load and replace large mask frames. delete 14. The method of claim 13,
Wherein the mask frame is charged into the deposition chamber unit in a direction crossing the movement direction of the glass.

Images