KR20110131157A - 기판 처리 장치 - Google Patents

기판 처리 장치 Download PDF

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Publication number
KR20110131157A
KR20110131157A KR1020110109965A KR20110109965A KR20110131157A KR 20110131157 A KR20110131157 A KR 20110131157A KR 1020110109965 A KR1020110109965 A KR 1020110109965A KR 20110109965 A KR20110109965 A KR 20110109965A KR 20110131157 A KR20110131157 A KR 20110131157A
Authority
KR
South Korea
Prior art keywords
electrode
wafer
substrate
outer electrode
periphery
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
KR1020110109965A
Other languages
English (en)
Korean (ko)
Inventor
히로유키 나카야마
마사노부 혼다
겐지 마스자와
마나부 이와타
Original Assignee
도쿄엘렉트론가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 도쿄엘렉트론가부시키가이샤 filed Critical 도쿄엘렉트론가부시키가이샤
Publication of KR20110131157A publication Critical patent/KR20110131157A/ko
Ceased legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32137—Radio frequency generated discharge controlling of the discharge by modulation of energy
    • H01J37/32155—Frequency modulation
    • H01J37/32165—Plural frequencies
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32091—Radio frequency generated discharge the radio frequency energy being capacitively coupled to the plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32541—Shape
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00—Etching of wafers, substrates or parts of devices
    • H10P50/20—Dry etching; Plasma etching; Reactive-ion etching
    • H10P50/24—Dry etching; Plasma etching; Reactive-ion etching of semiconductor materials
    • H10P50/242—Dry etching; Plasma etching; Reactive-ion etching of semiconductor materials of Group IV materials

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Drying Of Semiconductors (AREA)
  • Plasma Technology (AREA)
  • Chemical Vapour Deposition (AREA)
KR1020110109965A 2008-03-27 2011-10-26 기판 처리 장치 Ceased KR20110131157A (ko)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2008083046A JP5348919B2 (ja) 2008-03-27 2008-03-27 電極構造及び基板処理装置
JPJP-P-2008-083046 2008-03-27

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
KR1020090024901A Division KR101117922B1 (ko) 2008-03-27 2009-03-24 전극 구조체 및 기판 처리 장치

Publications (1)

Publication Number Publication Date
KR20110131157A true KR20110131157A (ko) 2011-12-06

Family

ID=41115344

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020110109965A Ceased KR20110131157A (ko) 2008-03-27 2011-10-26 기판 처리 장치

Country Status (5)

Country Link
US (1) US20090242133A1 (https=)
JP (1) JP5348919B2 (https=)
KR (1) KR20110131157A (https=)
CN (1) CN101546700B (https=)
TW (1) TWI475610B (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210149391A (ko) * 2020-06-02 2021-12-09 세메스 주식회사 기판 처리 장치 및 기판 처리 방법

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5102706B2 (ja) * 2008-06-23 2012-12-19 東京エレクトロン株式会社 バッフル板及び基板処理装置
CN101740298B (zh) * 2008-11-07 2012-07-25 东京毅力科创株式会社 等离子体处理装置及其构成部件
US20110206833A1 (en) * 2010-02-22 2011-08-25 Lam Research Corporation Extension electrode of plasma bevel etching apparatus and method of manufacture thereof
US9543123B2 (en) 2011-03-31 2017-01-10 Tokyo Electronics Limited Plasma processing apparatus and plasma generation antenna
JP2015053384A (ja) * 2013-09-06 2015-03-19 東京エレクトロン株式会社 プラズマ処理方法及びプラズマ処理装置
JP6339866B2 (ja) * 2014-06-05 2018-06-06 東京エレクトロン株式会社 プラズマ処理装置およびクリーニング方法
US20160289827A1 (en) * 2015-03-31 2016-10-06 Lam Research Corporation Plasma processing systems and structures having sloped confinement rings
KR101938306B1 (ko) * 2016-04-18 2019-01-14 최상준 건식 에칭장치의 제어방법
US10242845B2 (en) * 2017-01-17 2019-03-26 Lam Research Corporation Near-substrate supplemental plasma density generation with low bias voltage within inductively coupled plasma processing chamber
JP7489896B2 (ja) 2020-10-22 2024-05-24 東京エレクトロン株式会社 プラズマ処理装置
JP7626548B2 (ja) * 2021-06-28 2025-02-04 東京エレクトロン株式会社 消耗部材、プラズマ処理装置及び消耗部材の製造方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5472565A (en) * 1993-11-17 1995-12-05 Lam Research Corporation Topology induced plasma enhancement for etched uniformity improvement
TW299559B (https=) * 1994-04-20 1997-03-01 Tokyo Electron Co Ltd
JP3814176B2 (ja) * 2001-10-02 2006-08-23 キヤノンアネルバ株式会社 プラズマ処理装置
US7740737B2 (en) * 2004-06-21 2010-06-22 Tokyo Electron Limited Plasma processing apparatus and method
US7988816B2 (en) * 2004-06-21 2011-08-02 Tokyo Electron Limited Plasma processing apparatus and method
JP4672456B2 (ja) * 2004-06-21 2011-04-20 東京エレクトロン株式会社 プラズマ処理装置
US7993489B2 (en) * 2005-03-31 2011-08-09 Tokyo Electron Limited Capacitive coupling plasma processing apparatus and method for using the same
JP4704088B2 (ja) * 2005-03-31 2011-06-15 東京エレクトロン株式会社 プラズマ処理装置
US8789493B2 (en) * 2006-02-13 2014-07-29 Lam Research Corporation Sealed elastomer bonded Si electrodes and the like for reduced particle contamination in dielectric etch
US7829469B2 (en) * 2006-12-11 2010-11-09 Tokyo Electron Limited Method and system for uniformity control in ballistic electron beam enhanced plasma processing system
JP5231038B2 (ja) * 2008-02-18 2013-07-10 東京エレクトロン株式会社 プラズマ処理装置およびプラズマ処理方法、ならびに記憶媒体
JP2009239012A (ja) * 2008-03-27 2009-10-15 Tokyo Electron Ltd プラズマ処理装置及びプラズマエッチング方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210149391A (ko) * 2020-06-02 2021-12-09 세메스 주식회사 기판 처리 장치 및 기판 처리 방법

Also Published As

Publication number Publication date
US20090242133A1 (en) 2009-10-01
JP5348919B2 (ja) 2013-11-20
CN101546700B (zh) 2011-04-13
TWI475610B (zh) 2015-03-01
TW201001530A (en) 2010-01-01
JP2009239014A (ja) 2009-10-15
CN101546700A (zh) 2009-09-30

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