KR20110053183A - Ultraviolet ray radiating apparatus - Google Patents

Abstract

PURPOSE: An ultraviolet ray radiating apparatus is provided to uniformly radiating ultraviolet ray to a larger space. CONSTITUTION: An ultraviolet ray radiating apparatus comprises a tube shape ultraviolet ray lamp(100) with ultraviolet ray transmittance property and a parabolic shape reflection plate(19). The reflection plate is placed facing the ultraviolet ray lamp. The reflection plate satisfies two conditions of 82mm to 88mm curvature diameter(R) and 227mm to 300mm opening width(W).

Description

UV irradiation apparatus {ULTRAVIOLET RAY RADIATING APPARATUS}

TECHNICAL FIELD This invention relates to the ultraviolet illuminator apparatus which irradiates an ultraviolet-ray to the panel (to-be-processed substrate) in the middle of manufacture for example for manufacture of a liquid crystal panel.

In manufacture of a liquid crystal panel, ultraviolet-ray is irradiated from an ultraviolet irradiation device, cooling a to-be-processed board | substrate which sealed the liquid crystal body and the polymer body which has photoreactivity inside. The ultraviolet irradiation device is provided with a filter which suppresses the transmission of ultraviolet rays having a wavelength of 340 nm or less, and forms an opposing portion by reacting the polymer body inside the substrate to be treated by ultraviolet irradiation through this (for example, JP2008-). 116672 (KOKAI)).

In the above technique, it is important to form an alignment film in which the liquid crystal body is oriented in a predetermined direction with good controllability for high quality production of the liquid crystal panel. The rubbing method, which rubs the film with cloth, has generally been used. However, when the rubbing method is used, there are problems such as dust falling and contamination, or damage to the semiconductor element on the substrate to be processed by static electricity.

Therefore, as a technique to replace the rubbing method, a technique is formed in which a photoreactive material is formed on a substrate, and irradiated with ultraviolet light to chemically react the photoreactive material to have an orientation function. In this case, when intensity imbalance arises in the ultraviolet-ray irradiated to a liquid crystal panel (processing board | substrate), there exists a problem that an orientation film cannot be formed uniformly uniformly.

Therefore, examples of the ultraviolet irradiation device for reducing the intensity imbalance of ultraviolet rays include those disclosed in JPH8-225992 (KOKAI), WO2006 / 094220, JPH6-260295 (KOKAI) and the like. These devices use the reflecting plate which reflects an ultraviolet-ray toward the direction of a to-be-processed board | substrate for improvement of an intensity | strength imbalance, and it mentions in the literature that it is desirable to perform the constant process which makes the reflecting surface light-diffusing. However, even if it has the surface processing technique described in these documents, there exists a limit to reduction of intensity imbalance, and especially the ultraviolet irradiation apparatus which has small intensity imbalance is calculated | required further for the manufacture use of liquid crystal panels.

An object of the present invention is to provide an ultraviolet irradiation device capable of irradiating ultraviolet rays of uniform intensity over a larger area.

In order to solve the above problems, an ultraviolet irradiation device of one embodiment of the present invention is drawn on a plane perpendicular to the axis of the ultraviolet lamp, which is disposed in a tubular shape with a material having ultraviolet permeability, and disposed opposite to the ultraviolet lamp. Has a reflecting plate having a diffuse reflecting surface formed to have a parabolic shape in cross section, wherein the parabolic shape of the reflecting plate is at least 82 mm and 88 mm as the minimum radius of curvature R, and 227 mm or more and 300 mm as the opening width W; It is characterized by satisfy | filling at least one of two conditions which consist of the following 2nd conditions.

According to this invention, the ultraviolet irradiation device which can irradiate an ultraviolet-ray of uniform intensity over a larger area can be provided.

BRIEF DESCRIPTION OF THE DRAWINGS The longitudinal cross-sectional view which shows the basic structure of the ultraviolet irradiation device which is one Embodiment of this invention,
2 is a longitudinal cross-sectional view in the direction of the arrow in the A-Aa position shown in FIG. 1;
3 is a configuration diagram showing in detail the ultraviolet lamp shown in FIG.
4 is a graph illustrating a comparison of intensity spectral distributions of an iron-based metal halide lamp and a thallium-based metal halide lamp;
5 is a perspective view for explaining an example of the shape of the reflecting surface of the reflecting plate shown in FIG. 1;
FIG. 6 is an explanatory view showing an enlarged view of an area surface indicated by an arrow A of the reflecting plate shown in FIG. 5;
7A and 7B are explanatory views showing comparison of the ultraviolet reflection form of the reflecting plate of the comparative example and the reflecting plate shown in FIG. 5;
8 is a graph showing the intensity distribution of the ultraviolet irradiation surface by the ultraviolet irradiation device shown in FIG. 1 in comparison with the comparative example;
9 is a layout view (sectional view) further explaining the positional relationship between the ultraviolet lamp and the reflecting plate of the ultraviolet irradiation device according to the embodiment;
10 is a table showing the results of measuring the uniformity of the intensity of the ultraviolet irradiation surface when the minimum curvature radius R and the opening width W of the reflecting plate of the ultraviolet irradiation device as an embodiment were respectively measured;
FIG. 11 is a graph drawn when the aperture width W of the reflector of the table shown in FIG. 10 is 230 mm;
12 is a graph drawn when the minimum radius of curvature R of the reflector of the table shown in FIG. 10 is 85 mm;
13 is a longitudinal sectional view showing the configuration of an ultraviolet irradiation device according to another embodiment of the present invention;
14 is a longitudinal cross-sectional view in the direction of the arrow in the B-Ba position shown in FIG. 9;
15 is a partially enlarged view of the longitudinal cross-sectional view shown in FIG. 14 and FIG.
It is a longitudinal cross-sectional view which shows schematically the structure of the ultraviolet irradiation device which is another embodiment of this invention.

(Description of Example)

Although embodiments of the present invention have been described with reference to the drawings, these drawings are provided for illustrative purposes only and do not limit the invention in any circumstances.

EMBODIMENT OF THE INVENTION Hereinafter, the form for implementing this invention is demonstrated in detail, referring drawings.

1 to 3 are for explaining the ultraviolet irradiation device which is one Embodiment of this invention, FIG. 1 is a longitudinal cross-sectional view which shows the basic structure, FIG. 2 is a longitudinal cross section of the arrow direction of the A-Aa position shown in FIG. FIG. 3 is a diagram illustrating in detail the ultraviolet lamp shown in FIG. 1.

As shown in FIG. 1, FIG. 2, this ultraviolet irradiation device is provided with four ultraviolet lamps 100 and the cooling unit 200, for example.

The ultraviolet lamp 100 has a light emitting tube 12 having an airtight discharge space 11 formed in a tubular shape made of quartz glass having ultraviolet permeability as shown in FIG. A pair of electrodes 13a and 13b of, for example, tungsten material is disposed inside the axial ends of the light emitting tube 12. The light emitting tube 12 is, for example, a single tube having an outer diameter? Of 27.5 mm, a thickness m of 1.5 mm, and a light emitting length L of about 1800 mm.

The electrodes 13a and 13b are welded to the ends of the metal foils 15a and 15b through the inner leads 14a and 14b, respectively. One end of an outer lead (not shown) is welded to the other ends of the metal foils 15a and 15b. The part of metal foil 15a, 15b heats and seals the light emitting tube 12 between inner leads 14a, 14b and an outer lead.

The metal foils 15a and 15b may be any material having a coefficient of thermal expansion close to that of the quartz glass forming the light emitting tube 12, but a thin plate of molybdenum is used as the material suitable for this condition. The other end of the outer lead, one end of which is connected to the metal foils 15a, 15b, is electrically connected to the lead wires 17a, 17b, for example, electrically sealed in the ceramic sockets 16a, 16b. 17a and 17b are connected to a power supply circuit not shown.

The discharge space 11 includes 1 selected from the group consisting of mercury, halogen and iron, tin, indium, bismuth, thallium and manganese, which are metals for emitting ultraviolet light, in addition to a sufficient amount of rare gas that is a rare gas for maintaining arc discharge. Species or more are sealed. Thereby, ultraviolet-ray with a wavelength of 300-400 nm can be emitted. In addition, although technically, it usually has a wavelength of 380 nm and it becomes the boundary of an ultraviolet light and a visible light in many cases, In this application, since it shows one continuous wavelength range, it expresses conveniently as "ultraviolet wavelength of 300-400 nm of wavelengths" etc. for convenience.

FIG. 4 is a graph showing the intensity spectral distributions of the iron-based metal halide lamps sealed with iron and the thallium-based thallium-based metal halide lamps among the light emitting metals. As apparent from FIG. 4, it can be seen that ultraviolet rays having a wavelength of 300 to 400 nm are obtained by these lamps.

Referring again to FIGS. 1 and 2, reference numeral 18 denotes a cooling block made of aluminum. As for the cooling block 18, the reflecting plate 19 which opposes the upper accompaniment surface of the ultraviolet lamp 100 is in contact with one surface side, and the some cooling fin 181 is integrally formed in the other surface side. The reflecting plate 19 is made of, for example, a SUS (stainless steel) material or an aluminum material.

In addition, a member (not shown) having high thermal conductivity may be disposed between the rear surface of the reflecting plate 19 and the cooling block 18 to further transfer heat of the reflecting plate 19 to the cooling block 18. According to this, more effective cooling can be realized.

As shown in FIG. 5, in this embodiment, the reflecting plate 19 has a reflecting surface shape (cross section is parabolic) in cross section along a function type of, for example, Y = (1/170) · X ² . The reflecting plate 19 is disposed to face the UV lamp 100 at regular intervals such that a cross section drawn on a plane orthogonal to the axis of the UV lamp 100 becomes a parabola shape. The reflective surface is a diffuse reflective surface. An example of the surface state is explained, but it is the state shown in FIG. FIG. 6 is an explanatory view showing an enlarged view of the region surface indicated by arrow A of the reflecting plate shown in FIG. 5. That is, the small reflecting surface 61 is combined along the curved surface of the surface to form a surface in which incident light is diffused. As a result, as shown in FIG. 7B, ultraviolet light incident on the reflector 19 is diffused and reflected. 7A and 7B are explanatory views showing comparison of the ultraviolet reflection form of the reflecting plate of the comparative example and the reflecting plate shown in FIG. 5. The reflecting plate 19 having the reflecting surface 61 having such a diffusion function can be formed, for example, by press working with a mold. Moreover, it can also be obtained by the surface of the enbossing process.

In the case where an aluminum material is used as the reflecting plate 19, the following method can also be adopted as another method for imparting ultraviolet diffusivity to the surface thereof. As one of them, for example, an aluminum material having a surface subjected to mirror processing once is subjected to hammertone finish or stockco finish on its surface to form irregular irregularities. Alternatively, the surface structure may be formed in accordance with a predetermined pattern, for example, a honeycomb shape, instead of irregular irregularities.

As another reflecting plate 19, a dichroic mirror having a metal oxide deposition layer formed on a glass surface in multiple layers, i.e., diffusing reflectivity to ultraviolet rays, may be used. As another example of the reflecting plate 19, a reflecting plate obtained by depositing or binding a substance having ultraviolet reflectivity such as barium sulfate to a coarse particle diameter on a glass surface or a metal surface may be used.

Referring back to FIGS. 1 and 2, the fins 181 may be easily deprived of heat generated by the ultraviolet lamp 10 and may not increase the temperature of the ultraviolet lamp 100 by more than a predetermined level. The lamp house 21 which can accommodate the ultraviolet lamp 100 and the reflecting plate 19 is formed below the cooling block 18.

As shown in FIGS. 1 and 2, the wall of the lamp house 21 facing the ultraviolet lamp 11 is provided with a window 23 through which ultraviolet rays emitted from the ultraviolet lamp 100 pass. The window portion 23 is provided with, for example, a short wavelength side light cut filter 24 for cutting ultraviolet rays having a wavelength of 320 nm or less and a long wavelength side light cut filter 25 for cutting visible light and infrared rays having a wavelength of 400 nm or more.

When the ultraviolet lamp 100 is discharged and turned on, the short wavelength side optical cut filter 24 and the long wavelength side optical cut filter 25 are transmitted, and ultraviolet rays having a wavelength of 320 to 400 nm are irradiated to the liquid crystal panel (the substrate to be processed). As a result, a chemical reaction of the photoreactive substance with ultraviolet rays occurs to form an alignment layer.

The cover 26 is disposed above the cooling block 18 as a part of the cooling structure covering the cooling block 18 along the lamp axis direction of the ultraviolet lamp 11. The suction port 27 is formed in one end of the cover 26 in the longitudinal direction, and the vent hole 28 is formed in the other end. And the cylindrical exhaust cylinder 29 is attached so that the ventilation hole 28 may communicate.

One of the high frequency output terminals of the high frequency lighting device 300 is connected to one electrode 13a of the ultraviolet lamp 100 via the feed line 30a, the lead wire 17a, and the like, and the other electrode of the ultraviolet lamp 100 is connected. The other side of the high frequency output terminal of the high frequency lighting device 300 is connected to the 13b via the feed line 30b, the lead wire 17b, and the like. When the high frequency lighting device 300 is powered on, a high frequency voltage is applied between the electrode 13a and the electrode 13b, thereby generating ultraviolet rays in the discharge space 11.

FIG. 8 shows the intensity distribution of the ultraviolet irradiation surface by the ultraviolet irradiation device shown in FIG. 1 in comparison with the comparative example. Here, the "measurement point" which is a horizontal axis of FIG. 8 shows the position on the straight line Z (refer FIG. 5) orthogonal to the longitudinal direction of the reflecting plate 19 adhering on the plane which opposes the reflecting plate 19 here.

As shown in Fig. 8, in this embodiment, in comparison with the comparative example, the average intensity is obtained over the entire area of the measurement point due to the action of the light diffusing function of the surface of the reflector 19.

Therefore, the ultraviolet irradiation device of this embodiment can uniformly irradiate the ultraviolet-ray to the liquid crystal panel (to-be-processed substrate) which is an irradiated object, and can contribute to the yield improvement of liquid crystal panel manufacture.

9 is a layout view (cross-sectional view) which further demonstrates the positional relationship of the ultraviolet lamp 100 and the reflecting plate 19 of the ultraviolet irradiation device as an embodiment. Hereinafter, the preferable arrangement relationship of the ultraviolet lamp 100 and the reflecting plate 19 is demonstrated.

As shown in Fig. 9, the reflecting plate 19 is symmetrically spread on both wings with the parabolic center axis as the center, and the width between the two wings is defined as the opening width W. In the case of the reflecting plate 19, since the cross sections in the vertical direction of the ground are the same, the center of the parabola is defined as the parabola center axis extending in the vertical direction of the ground. The maximum size of the parabola shown in the up-down direction projected on the plane orthogonal to the direction of the opening width W is defined as the height H. Parabola exhibits a minimum radius of curvature (R) at the center of the parabola. In general, parabolas are defined as focal points. The focus is defined as the point at which the reflected light of the parallel light concentrates at one point when parallel light including the light ray in the normal direction to the center of the parabola is incident on the reflected light 19. In the case of the reflecting plate 19, since each cross section in the vertical direction to the ground is the same, the focus can be defined as a focal axis extending in the vertical direction to the ground. The light emitting tube axis of the ultraviolet lamp 100 is positioned to be parallel to at least both of these axes in a plane including the parabolic center axis and the focal axis as shown.

FIG. 10: is a table which shows the result of having measured the uniformity of the intensity | strength of the ultraviolet irradiation surface at the time of changing the minimum curvature radius R and the opening width W of the reflecting plate 19 of the ultraviolet irradiation device as an embodiment, respectively. The leveling agent is a numerical value of the degree of intensity imbalance in the ultraviolet irradiation surface by a predetermined calculation formula. The lower the value [%], the better the leveling system, and the higher the number [%], the lower leveling system. Here, the homogeneity is calculated by the calculation formula of (maximum intensity-minimum intensity) / (maximum intensity + minimum intensity) using the maximum intensity and minimum intensity in an ultraviolet irradiation surface. In addition, the reflecting plate 19 here uses the thing whose surface was enbossed.

In this measurement, in addition to the minimum curvature radius R and the opening width W, the ultraviolet lamp 100 is placed at a position whose central axis is 55 mm from the parabola central axis. In addition, the diameter of the ultraviolet lamp 100 is 70 mm. Further, when the opening width W of the parabola is defined, and the minimum radius of curvature R is defined, the height H of the parabola is determined uniquely.

As shown in Fig. 10, the uniformity of strength is best when the minimum radius of curvature R is 85 mm and the opening width W is 230 mm. That is, under this condition, the distance from the parabola central axis to the focal axis is 42.5 mm, and the height H of the parabola is 80 mm. Since the distance from the parabola central axis to the focal axis is 42.5 mm, the central axis of the ultraviolet lamp 100 is located on the side away from the parabola central axis of the reflector 19 rather than the parabola-shaped focal axis of the reflector 19 and the reflector 19 It is arrange | positioned so that it may be located inside the height of the parabola shape of (). In the case of the deviation from this condition, for example, when the light emitting tube axis is located on the parabola center axis side rather than the focal axis, the distance between the reflecting plate 19 and the lamp 100 is closer, so that the thermal deformation of the reflecting plate 19 is likely to occur. It is thought that the homogeneity system may be worsened by this effect. In addition, when the light is off the other side, that is, the light emitting axis is located outside the height of the parabolic shape, it is likely that the reflected light is easily blocked by the lamp 100, and the light utilization efficiency is lowered. .

FIG. 11 is a graph selected when the opening width W of the reflection plate of the table shown in FIG. 10 is 230 mm. 12 is a graph drawn when the minimum radius of curvature R of the reflecting plate of the table shown in FIG. 10 is 85 mm. In Fig. 12, measurements are made up to W = 300 mm, because they can no longer be made larger due to the spatial constraints of the device.

As can be seen from FIG. 10 to FIG. 12, in order to keep the uniformity of strength close to the minimum, the first condition is 82 mm or more and 88 mm or less as the minimum curvature radius R of the parabola, and 227 mm or more as the opening width W of the parabola. It turns out that it is good to satisfy at least one of the two conditions which consist of 2nd conditions of 300 mm or less. It is especially good if both conditions are satisfied.

In addition, in the measurement shown in FIG. 10, the surface of which the surface was enbossed was used as the reflecting plate 19. However, the result was also obtained when the reflecting plate having the mirror surface before such enbossing was used for comparison. . As a result, it was found that the uniformity of strength deteriorated by about 4%. Therefore, the reflecting plate 19 provides light diffusivity to the reflecting plate 19 and defines the value of the minimum curvature radius R or the opening width W of the parabola as described above in the reflecting plate 19 so that the reflecting plate has a particularly high uniformity. You can do

13-15 is for demonstrating the ultraviolet irradiation device which is another embodiment of this invention, FIG. 13: is a longitudinal cross-sectional view which shows the basic structure, FIG. 14 is the arrow direction of the B-Ba position shown in FIG. 15 is a partially enlarged view of the longitudinal cross-sectional view shown in FIG. 14. In the drawings, the same components as those shown in the drawings already described are given the same reference numerals.

In this embodiment, in order to maintain the ultraviolet lamp 100 below predetermined temperature (for example, 850 degreeC), the cooling system is made into water cooling. This embodiment also demonstrates below as a structure provided with four ultraviolet lamps 100 similarly to embodiment demonstrated with reference to FIG. 1, FIG. Each of these four ultraviolet lamps 100 is accompanied with a cooling unit 300.

The ultraviolet lamp 100 and the cooling unit 300 are held at predetermined intervals by the spacers 91a and 91b mounted between the sockets 16a and 16b of the ultraviolet lamp 100.

The cooling unit 300 has an inner tube 31 made of a material having ultraviolet permeability such as cylindrical quartz glass and an outer shell 32 provided outside thereof, and has a double tube structure. The ultraviolet lamp 100 is included in the inner tube 31.

The inner tube 31 of the cooling unit 300 has an inner diameter d1 of 32 mm, an outer diameter d2 of 36 mm, for example, and the exterior 32 has an inner diameter d3 of 66 mm, The outer diameter d4 is 70 mm, for example.

In the cooling unit 300, cooling liquids 34 such as water may be circulated from the outside by using the connection tubes 33a and 33b provided at both ends of the outer circumference thereof. That is, the cooling liquid 34 with a low temperature is supplied from the connection pipe 33a side, by which the cooling liquid 34 moves while cooling the ultraviolet lamp 100, and the warmed cooling liquid 34 is connected to the connection pipe 33b. ) Is recovered. The warmed and recovered cooling liquid 34 is cooled by a cooling device (not shown) and supplied again to the connecting pipe 33a side.

On each of the outer surfaces of the external appearance 32, the long wavelength side optical cut filter 93 which cuts visible light and infrared rays is formed. In some cases, the short wavelength side optical cut filter 92 may be formed to overlap unnecessary ultraviolet rays.

Above the illustration of the cooling unit 300, a reflecting plate 94 having a reflecting surface having ultraviolet diffusivity is disposed. The reflecting plate 94 has the same configuration as that described with reference to FIGS. 5, 6, and 7B, for example.

When the ultraviolet lamp 100 is discharged and lit, the long-wavelength-side optical cut filter 93 is transmitted, and ultraviolet rays having a wavelength of 320 to 400 nm are irradiated to the liquid crystal panel (substrates) to be irradiated. As a result, a chemical reaction of the photoreactive substance with ultraviolet rays occurs to form an alignment layer.

Ultraviolet rays having a wavelength of 320 to 400 nm not only irradiate the irradiated object directly from the ultraviolet lamp 100, but also reach the irradiated object by being diffusely reflected by the reflector 94. As described above, the intensity of the irradiated object by the ultraviolet rays applied in this way is such that the leveling agent shown in FIG. 8 has a high distribution. Therefore, the alignment layer may be uniformly formed with good controllability by applying to the liquid crystal panel manufacturing process.

The ultraviolet irradiation device of this embodiment can also make uniform ultraviolet irradiation with respect to the liquid crystal panel (to-be-processed substrate) which is an irradiated object, and can contribute to the yield improvement of liquid crystal panel manufacture. In this embodiment, since the cooling unit 300 using the cooling liquid 34 is used, the cooling capability is high, and therefore, the ultraviolet lamp 300 can be easily maintained below a predetermined temperature (for example, 850 ° C). For example, the advantage is large in terms of device life and the like.

Subsequently, FIG. 16 is a longitudinal sectional view schematically showing a configuration of an ultraviolet irradiation device as another embodiment of the present invention. In the drawings, the same or equivalent components as those shown in the drawings already described are denoted by the same reference numerals. The description is omitted unless there is anything else to add.

As shown in FIG. 16, in this ultraviolet irradiation device, eight ultraviolet lamps 400 are arrange | positioned in parallel in the figure transverse direction, and each reflecting plate 410 is accompanied. The filter 420 is provided in the position which opposes the ultraviolet-ray lamp 400 on the opposite side to the reflecting plate 410. Then, the side opposite to the ultraviolet lamp 400 through the filter 420 is the ultraviolet irradiation surface on which the irradiated object is placed. The illustrated transverse width of this irradiation surface is 1890 mm, for example, and can be used for large liquid crystal panel manufacture by this.

Thus, even the ultraviolet irradiation device which requires especially large irradiation surface can irradiate the ultraviolet-ray of uniform intensity by application of the technique similar to the technique demonstrated by said embodiment.

The ultraviolet lamp of each embodiment described above is not limited to the long arc metal halide lamp demonstrated, It may be ultraviolet lamps, such as a flash lamp, a dielectric barrier discharge lamp, and an electrodeless lamp.

The present invention is not limited to the specific forms illustrated and illustrated herein, and is understood as including all modifications falling within the scope of the following claims.

100: ultraviolet lamp 200,300: cooling unit
11 discharge space 12 light emitting tube
13a, 13b: electrode 14a, 14b: inner lead
15a, 15b: metal foil 16a, 16b: socket
17a, 17b: lead wire 18: cooling block
181: pin 19, 94: reflector
21: Lamp House 23: Window
24: Short wavelength side optical cut filter 25, 93: Long wavelength side optical cut filter
26 cover 27 suction port
28: vent 29: exhaust vent
30a, 30b: feed line 61: reflective surface
31: Interior 32: Exterior
33a, 33b: Connection pipe 34: Cooling liquid

Claims (5)

UV lamp formed in tubular shape with a material having ultraviolet transmission,
A reflecting plate having a diffuse reflecting surface formed so as to have a parabolic shape in cross-section drawn in a plane orthogonal to the axis of the ultraviolet lamp disposed opposite the ultraviolet lamp,
The parabolic shape of the reflecting plate satisfies at least one of two conditions consisting of a first condition of 82 mm or more and 88 mm or less as a minimum radius of curvature R and a second condition of 227 mm or more and 300 mm or less as an opening width W. UV irradiation device. The method of claim 1,
The ultraviolet lamp is disposed such that the axis of the ultraviolet lamp is located at a side away from the parabola central axis of the reflecting plate than the parabola focusing axis of the reflecting plate and located inside the height of the parabola shape of the reflecting plate. Ultraviolet irradiation device characterized in that. The method according to claim 1 or 2,
And a cooling unit provided on the side opposite to the side of the reflecting plate that faces the ultraviolet lamp. The method according to claim 1 or 2,
And a double tube structured water-cooled cooling unit provided to cover the ultraviolet lamp. The method according to claim 1 or 2,
The short wavelength side optical cut filter which cuts the light of shorter wavelength than the said ultraviolet ray provided in the space between the said ultraviolet lamp and the said irradiation plate from the said ultraviolet-ray to irradiate an irradiated object to the said irradiated object, and the light of longer wavelength than the said ultraviolet-ray The ultraviolet irradiation device characterized by further comprising the long wavelength side optical cut filter which cuts into pieces.

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