KR20110052659A - Electric appliance disassembling method, and electric appliance disassembling device - Google Patents

Abstract

A disassembly method and disassembly apparatus for an electric machine for easily separating a component from a substrate are provided. A method of disassembling an electric device that separates a component fixed on a substrate from a substrate by a bonding material having a melting point lower than that of the member to be joined, or a superheated steam having a temperature above the melting point of the bonding material. Exposed to melt the bonding material and allow the part to be separated from the substrate.

Description

Dismantling method of electric equipment and disassembly device of electric equipment {ELECTRIC APPLIANCE DISASSEMBLING METHOD, AND ELECTRIC APPLIANCE DISASSEMBLING DEVICE}

TECHNICAL FIELD This invention relates to the disassembly method and disassembly apparatus of the electric apparatus which have a component fixed by soldering, wax solder, varnish, etc., on base materials, such as a board | substrate. In particular, it relates to a heating method for decomposing such electric equipment.

For example, an electrical device such as a circuit board mounted on a used mobile phone or a computer, such as a computer (including electronic devices in the present specification and claims) includes precious metals and rare metals (rare metals). Since useful materials of the present invention, components such as reusable chips, coils, and the like are included, it is desired to separate them from the resin part or other metal parts, recover them, and reuse them.

For example, Patent Document 1 discloses a symbol representing information such as an energization time, a manufacturing method, and a decomposition method of a printed circuit board in a recycling method of a printed circuit board for recovering valuable metals such as gold (Au) used in the connecting portion. It is described to perform peeling, such as a circuit pattern, referring. In addition, in order to replace a part of components fixed to a substrate such as a printed board, a method of melting a bonding material such as lead or beeswax of the component and removing the component from the substrate is also known as many known examples.

For example, Patent Document 2 describes a method of using an organic solvent vapor (presumably referred to as saturated steam) as one of the melting means of the bonding material.

Patent Document 3 also describes a method of using a vapor of hydrocarbon fluoride (boiling point of 215 ° C), silicon oil (boiling point of 250 ° C), or a heating liquid as a high boiling point heating medium.

In addition, Patent Document 4 uses a method such as infrared heater, hot air, condensation heat of inert organic solvent, high frequency heating or the like as a means for melting the joining material. An example of using a method of separating a part from a substrate is described.

Patent Literature 5 also discloses a method of blowing a nitrogen gas (300 to 500 ° C) onto a substrate to melt the bonding material, and then separating the component from the substrate by applying ultrasonic vibration.

Patent Document 1: Japanese Patent Application Laid-Open No. 2002-314210 Patent Document 2: Japanese Patent Application Laid-Open No. 9-186450 Patent Document 3: Japanese Patent Application Laid-Open No. 60-244096 Patent Document 4: Japanese Patent Application Laid-Open No. 8-139446 Patent Document 5: Japanese Patent Application Laid-Open No. 61-295696

The disassembly of the electrical equipment as described above is mainly performed by manual or mechanical separation of metal parts or resin parts, or by melting a single piece of equipment in a furnace and performing separation in a molten state. Is adopted.

In addition, there is a limit in the range of the heat utilization concentration because the heating medium of high boiling point is heated and the substrate is immersed in the medium (liquid) or the latent heat of condensation of these saturated steams is used for heating.

In the case of manual or mechanical separation, mechanical forces such as cutting force and peeling force are removed from the substrate by providing various kinds of parts and the like to the parts, so that automation is difficult and workability is very low.

On the other hand, when performing melt recovery, since the metal to be recovered is mixed, the separation operation after melting takes a lot of time, and the separation recovery efficiency is low. In addition, since materials other than the material to be recovered need to be melted, a large amount of energy is used for melting unnecessary materials.

In addition, in the method using heat, toxic gases may be generated due to combustion of resin or oxidation of insulating oil or the like from a condenser, and there is also a problem of oxidative alteration such as separated and recovered metal, which is not preferable.

The present invention was devised to solve the above problems, and an object of the present invention is to provide a disassembly method and an apparatus for disassembling an electric device for easily separating components from a substrate. In particular, it is an object of the present invention to provide a method of heating an electric device for separating a component from a substrate.

The present invention solves the above problems by the following solving means.

The invention described in claim 1 is a method of disassembling an electric device that separates a component fixed on a substrate from the substrate by a bonding material that melts by heating above a melting point, wherein heating the bonding material using superheated steam. It features.

Here, the reason for using superheated steam other than saturated steam is that the melting point of empty lead (used in the tin-copper system), which is widely used in electric boards, is about 240 ° C, so that only the latent heat of condensation of saturated steam melts. This is because it is difficult and superheated steam above the dry steam point where saturated steam is further heated is required.

The invention described in claim 2 is characterized in that the component is fixed on the substrate by a resin material, and the superheated steam is at least substantially atmospheric pressure at a heating point of the component and at a temperature equal to or more than the softening point of the resin material. It is done.

The invention described in claim 3 is characterized in that the superheated steam is treated in a state where the surroundings of the substrate and the component are kept in a low oxygen atmosphere.

In particular, when the atmosphere in which the electric equipment is treated is filled with superheated steam, it is preferable that the oxygen concentration be a low oxygen atmosphere of about 1 / 20th of the air.

The invention described in claim 4 is characterized in that the superheated steam is superheated steam.

Since only the sensible heat of superheated steam, or sensible heat and latent heat of condensation are used, it is possible to heat to a higher temperature region than when only latent heat of condensation is used. The means for obtaining superheated steam is not limited to the heating steam generating means of the present invention.

In addition to the superheated steam, the heating medium may be a superheated steam of a high boiling point heat medium such as hydrogen fluoride hydrocarbon or silicon oil, but it is preferable to use superheated steam from the viewpoint of safety, heating performance and cost.

The invention described in claim 5 is characterized in that the substrate is excited when the substrate and the components fixed on the substrate are exposed to superheated steam.

The invention as set forth in claim 6 is a decomposition apparatus for an electric device that separates a component fixed on a substrate from the substrate by a bonding material that is melted by heating above a melting point, wherein the substrate and the component fixed on the substrate are And a superheated steam generator for introducing superheated steam having a temperature equal to or higher than the melting point of the joining material into the heated vessel.

In the invention described in claim 7, the component is fixed on the substrate by a resin material, and the superheated steam is at least at atmospheric pressure at a heating point of the component and at a temperature equal to or more than the softening point of the resin material. do.

The invention according to claim 8 is characterized in that the inside of the heating vessel has a low oxygen atmosphere by introduction of the superheated steam.

The invention described in claim 9 is characterized in that the superheated steam is superheated steam.

Invention as described in Claim 10 is provided with the excitation means which has the said board | substrate in the vicinity of the said heat container part.

The invention according to claim 11 is characterized in that at least one of a preheating chamber for sequencing the substrate or a precooling chamber for slow cooling the substrate is provided in the heating vessel portion.

The invention described in claim 12 is characterized in that the superheated steam generator is arranged in the preheating chamber.

The invention described in claim 13 is characterized in that a preheating heater is provided in the heating vessel section.

The invention according to claim 14 is provided with an air curtain which prevents leakage of outside air into the heating vessel section at an inlet through which the substrate is introduced, and an outlet through which the substrate is taken out. It features.

The invention described in claim 15 is characterized in that an impact imparting mechanism for applying a mechanical shock to the substrate is provided in the heating vessel portion.

The invention described in claim 16 is characterized in that a superheated steam recovery means is provided in the heating vessel.

The invention as set forth in claim 17 is a method for disassembling an electric device that separates a component fixed on a substrate from the substrate by a bonding material having a melting point lower than that of the member to be joined, and the component and the component fixed on the substrate. Is exposed to superheated steam having a temperature equal to or higher than the melting point of the bonding material to melt the bonding material, and the component is separated from the substrate.

The invention described in claim 18 is an apparatus for disassembling an electric device for separating a component fixed on a substrate from the substrate by a bonding material having a melting point lower than that of the member to be joined, wherein the substrate and the component fixed on the substrate. And a superheated steam generator for introducing superheated steam having a temperature equal to or higher than the melting point of the bonding material into the vessel.

According to the invention described in claim 19, the superheated steam generator includes a first cylindrical body, an introduction pipe through which steam is introduced into the first cylindrical body from one end of the first cylindrical body, and the first cylindrical body. A second cylindrical body inserted into the interior of the second tubular body, the second cylindrical body communicating with the first cylindrical body at an end opposite to the introduction pipe side, and inserted into the second cylindrical body, wherein the first cylindrical body and the second cylinder are connected; A third cylindrical body communicating with the second cylindrical body at an end opposite to the side in which the shaped body communicates, a discharge pipe for discharging superheated steam from the third cylindrical body, and a gas flow passage from the introduction pipe to the discharge pipe And a heating means for heating the steam.

According to the present invention, the following effects can be obtained.

(1) By melting the bonding material with a superheated steam having a temperature equal to or higher than the melting point of the bonding material such as lead or beeswax, for example, components such as electronic parts, electrical parts, and wiring can be easily peeled from the substrate. Electrical equipment can be easily disassembled.

(2) Even when the parts are fixed by resin materials such as varnish, the parts can be easily peeled off by heating and softening the resin materials with superheated steam.

(3) By letting out air by superheated steam and reducing the atmosphere at high temperature and low oxygen, it is possible to suppress the generation of harmful gases due to combustion (oxidation) and carbonization of the resin.

(4) By using superheated steam as superheated steam, 539 kcal / kg of latent heat can be used for heating in the state where the workpiece is 100 ° C. or lower. Thus, for example, the decomposed product is shorter than in the case of using hot air of heated air. It can be heated up and high speed processing is possible. Moreover, even if it leaks from an apparatus, it is not toxic and since it is nonflammable, high safety is obtained.

(5) By having a substrate while exposing the decomposed product to superheated steam, the component which can be easily peeled off can be dropped by gravity and recovered.

BRIEF DESCRIPTION OF THE DRAWINGS It is a figure which shows the structure in 1st Embodiment of the decomposition apparatus of the electric machine to which this invention is applied.
FIG. 2 is a diagram illustrating a superheated steam generator in the decomposition apparatus of the electric machine of FIG. 1.
3 is a cross-sectional view illustrating a III-III cross section of FIG. 2.
FIG. 4 is an enlarged view of part IV of FIG. 2.
It is a figure which shows the structure in 2nd Embodiment of the decomposition apparatus of the electric machine to which this invention is applied.
FIG. 6 is a view for explaining the structure of a shower head in the decomposition apparatus of the electric machine of FIG. 5, FIG. 6A is a plan view, and FIG. 6B is a side view.
FIG. 7 is a block diagram illustrating a superheated steam supply system of the decomposition apparatus of the electric device of FIG. 5.
Fig. 8 is a view showing the structure of the bottom plate of the holder of the disassembly device of the electric machine of Fig. 5, (a) is a plan view, and (b) is a front view.
9 is a view for explaining the loader mechanism of the disassembly apparatus of the electric machine of FIG.
10 is a view for explaining the rotational motion of the link arm of the loader mechanism of FIG.
FIG. 11 is a graph showing the relationship between the processing temperature and the separation yield in the decomposition apparatus of the electric machine of FIG. 5.
FIG. 12 is a graph showing a relationship between heating time and separation yield in the decomposition apparatus of the electric machine of FIG. 5.
FIG. 13 is a graph showing the relationship between the steam flow rate and the separation yield in the decomposition apparatus of the electric machine of FIG.
FIG. 14 is a graph showing the distribution of oxygen concentration in the decomposition apparatus of the electric apparatus of FIG. 5.
15 is a table showing a measurement result of the separation yield of the decomposition apparatus of the electric machine of FIG.

EMBODIMENT OF THE INVENTION Embodiment of the disassembly apparatus (henceforth only a "disassembly apparatus") of the electric apparatus which applied this invention is described based on drawing. This disassembly apparatus disassembles circuit boards (decomposition | disassembly products), such as a mobile telephone and a computer, for example, and performs the disassembly method of the electric apparatus of this invention. In the circuit board, for example, various components such as an IC chip (element), a coil, a capacitor, and the like are fixed on a board such as a printed board. Connection terminals of various components are fixed to the printed board by soldering. The IC chip may also be fixed to the printed board by varnish.

BRIEF DESCRIPTION OF THE DRAWINGS It is a figure which shows the structure of the decomposition | disassembly apparatus of 1st Embodiment of this invention.

The decomposing device includes a boiler (1), a superheated steam generator (2), a shower head (3), a conveyor (4), a vibrator (5), a heating vessel (6), and the like.

The decomposed | disassembled material (electrical apparatus) decomposed | disassembled by a decomposition apparatus is comprised, for example with the board | substrate 7 which is a printed board, and the element 8 soldered to this board | substrate 7, and also fixed by varnish.

The boiler 1 generates saturated steam by heating water supplied from a water supply means not shown.

The superheated steam generator (2) generates superheated steam by reheating the saturated steam supplied from the boiler (1). The superheated steam generator 2 will be described later in detail.

The shower head 3 is installed in the heating vessel 6, and ejects and irradiates the superheated steam generated by the superheated steam generator 2 to the decomposed product passing through the inside. The shower head 3 has a plurality of ejection holes through which superheated steam is ejected.

The conveyor 4 is a belt conveyor disposed through the heating vessel 6, brought into the decomposition product heating vessel 6 carried in the recovery vessel 9, and after conveying the inside of the heating vessel 6 over a predetermined time. It is a conveying apparatus to carry out.

The vibrator 5 is provided in the inside of the conveyor 4 in the heating container 6, and has the upper surface part in which the collection container 9 in the conveyor 4 is loaded. Three vibrators 5 are arranged along the traveling direction (decomposition product conveyance direction) of the conveyor 4 at substantially equal intervals, for example.

The heating container 6 is formed in the box shape which has a substantially rectangular side view shape, a front view shape, and a planar shape, for example. The heating vessel 6 cooperates with the conveyor 4 to form a continuous conveyor furnace. At the time of operation of the decomposition apparatus, the inside of the heating vessel 6 blows out air by the superheated steam blown out from the shower head 3, so that the atmosphere is in a high temperature and low oxygen state.

In the decomposition apparatus of the electric machine of the present embodiment, the temperature of the superheated steam is controlled by the output of the sheath heater 60 of the superheated steam generator 2. In addition, the flow rate of superheated steam is controlled by the output of the boiler 1. The distribution of superheated steam in the heating vessel 6 is determined by the pore position and pore diameter of the shower head 3.

When the decomposition product is exposed to the superheated steam when the decomposition product is conveyed by the conveyor 4 in the state in which the decomposed product is to be collected downward and placed in the recovery container 9, the lead or beeswax material The conductive material (alloy) that fixes the element 8 to the substrate 7 is heated to a high temperature (e.g., about 100 to 1300 ° C) by superheated steam, and is easily melted. do. The varnish is also heated to soften.

Then, when the vibrator 5 has the decomposition product through the conveyor 4 and the recovery container 9, the device 8 is separated from the substrate 7, and the device 8 gravity falls, and the recovery container 9 Is accommodated).

Hereinafter, the configuration of the superheated steam generator 2 will be described in more detail.

2 is a side view including a partial cross section of the superheated steam generator 2. 3 is a cross-sectional view taken along the line III-III of FIG. 2.

The appearance of the superheated steam generator 2 is composed of a supply side end plate 30 to which the saturated steam supply pipe 10 is connected, and a discharge side end plate 40 to which the gas main body 20 and the superheated steam discharge pipe 70 are connected. A diaphragm 50 is disposed inside the superheated steam generator 2, and the superheated steam discharge pipe 70 extends to the vicinity of the closed end of the diaphragm 50 to form a fluid flow path. In order to heat the sheath heater 60 is disposed outside the superheated steam discharge pipe 70 in the inside of the partition 50. The direction of flow of the internal steam of the superheated steam generator 2 is indicated by an arrow in the figure.

Since the steam of high temperature flows inside the superheated steam generator 2, in particular, each member such as the diaphragm 50, which has a strict temperature condition, is made of stainless steel or the like that has undergone a passivation treatment on its surface after high temperature oxidation or electropolishing. Take countermeasures against high temperature corrosion.

The base body 20 is formed in a cylindrical shape. Both ends 21 and 22 of the base body 20 are closed by the supply side end plate 30 and the discharge side end plate 40, respectively. The base body 20 functions as the first cylindrical body according to the present invention. Although the base body 20 is arrange | positioned so that the center axis may be substantially horizontal, for example, this invention is not limited to this.

The supply-side end plate 30 and the discharge-side end plate 40 are flat disks, respectively, and are fitted in a state where their outer circumferential edges are in contact with the inner circumferential surface of the base body 20, and are fixed by welding or the like.

In the central portions of the supply side end plate 30 and the discharge side end plate 40, there are formed openings 31 and 41 into which the saturated steam supply pipe 10 and the superheated steam discharge pipe 70 are inserted and fixed.

The diaphragm 50 is formed in the cylindrical shape whose diameter is smaller than the base body 20. The diaphragm 50 is inserted in the base body 20 so as to be concentric with the base body 20. The diaphragm 50 has the stay 51 which protruded from the outer peripheral surface to the outer diameter side, and is supported by fixing the protruding end of the stay 51 to the inner peripheral surface of the base body 20. As shown in FIG. Both ends 52 and 53 of the clearance 50 are arrange | positioned facing the supply side end plate 30 and the discharge side end plate 40 at intervals, respectively.

The diaphragm 50 functions as the 2nd cylindrical body which this invention says.

An end portion 52 on the supply side end plate 30 side of the pipe 50 is closed by the end plate 54. The end plate 54 is a flat disk-shaped member, which is fixed and sealed by welding the periphery of the pipe 50 to the periphery thereof.

In addition, the heat shield plate 110 is provided at the end portion 52 of the pipe 50. The heat shield plate 110 is a flat member arranged with a gap between the outer surface (the surface on the side of the saturated steam supply pipe 10) of the end plate 54. The heat shielding plate 110 is formed in the shape of a disk having a diameter slightly larger than that of the pipe 50 by, for example, stainless steel. The heat shield plate 110 is arranged in parallel with the end plate 54 and is fixed to the pipe 50 in a state of being lifted from the end plate 54 by a plurality of posts 113 to be described later.

4 is an enlarged view of the vicinity of the heat shield plate 110, FIG. 4A is an enlarged view of part IV of FIG. 1, and FIG. 4B is an bb view of FIG. 4A. to be.

The heat shield plate 110 has a double structure in which a pair of plates 111 and 112 are stacked in a layer shape, and is supported by the pipe 50 by the strut 113.

The plate 111 is formed in a disk shape, and faces the end plate 54 of the partition 50 at intervals, and is disposed in parallel with the end plate 54. In the outer peripheral edge portion of the plate 111, a granular portion 111a granular on the side opposite to the pipe 50 (supply side end plate 30) is formed. In addition, the opening 111b into which the support 113 is inserted is formed in the plate 111.

The plate 112 is formed in a disk shape, opposes the surface portion on the opposite side to the pipe 50 of the plate 111 at intervals, and is disposed in parallel with the plate 111. The outer circumferential edge portion of the plate 112 is joined to the protruding end of the granular portion 111a of the plate 111 by welding or the like. Accordingly, the plates 111 and 112 form a hollow disk-shaped structure.

The strut 113 is an axial member provided over the end plate 54 and the plate 111 of the pipe 50. The struts 113 are distributed at substantially equal intervals in the circumferential direction of the heat shield plate 110, and three, for example, are provided. The disk-shaped flange 113a is fixed to the edge part of the heat shield board 110 side of the support | pillar 113. This flange 113a is accommodated inside the heat shielding plate 110 (between the plate 111 and the plate 112) and is fixed to the surface of the plate 111 side of the plate 111. An end portion of the pillar 50 side of the support 113 is fixed to the end plate 54 by, for example, welding or the like.

The saturated steam supply pipe 10 is a cylindrical pipe in which saturated steam is supplied from the boiler 1. The saturated steam supply pipe 10 is inserted into the gas main body 20 from the opening 31 of the supply side end plate 30. Between the inner circumferential edge of the opening 31 and the outer circumferential surface of the saturated steam supply pipe 10 is welded over the entire circumference, and the opening 31 is thus sealed. The saturated steam supply pipe 10 is disposed substantially concentric with the gas body 20. The end 11 of the saturated steam supply pipe 10 protrudes from the supply side end plate 30 and is disposed to face the heat shield plate 110 at an interval. The saturated steam supply pipe 10 functions as an introduction pipe according to the present invention.

The superheated steam discharge pipe 70 is a cylindrical pipe for discharging the superheated steam which is a heated gas generated in the superheated steam generator 2 to the outside. The superheated steam discharge pipe 70 is inserted into the gas main body 20 from the opening 41 of the discharge side end plate 40, and is inserted into the diaphragm 50 in the gas main body 20. Between the inner circumferential edge of the opening 41 and the outer circumferential surface of the superheated steam discharge pipe 70 is welded over the entire circumference, and the opening 41 is thus sealed. The superheated steam discharge pipe 70 is disposed substantially concentric with the gas body 20 and the partition pipe 50, respectively. The distal end portion 71 of the superheated steam discharge pipe 70 is disposed to face the end plate 54 at intervals in the interior of the partition pipe 50. The distal end portion 71 is a communication portion through which water vapor flowing through the inner circumferential surface of the pipe 50 and the outer circumferential surface of the superheated steam discharge pipe 70 is introduced into the superheated steam discharge pipe 70.

This superheated steam discharge pipe 70 functions as the third cylindrical body and the discharge pipe in the present invention.

The sheath heater 60 is a heating means for reheating the saturated steam supplied from the saturated steam supply pipe 10 to superheat the steam. The sheath heater 60 is introduced into the gas main body 20 from the supply side end plate 30, and from there, the sheath heater 60 passes between the inner circumferential surface of the gas body 20 and the outer circumferential surface of the diaphragm 50. It is arrange | positioned to the edge part (opening edge part 53) on the opposite side to the end plate 54 in linear form. The heat generating portion 61 of the sheath heater 60 enters the inner diameter side of the diaphragm 50 from the opening end of the diaphragm 50, and is wound in a spiral shape on the outer circumferential surface of the superheated steam discharge pipe 70.

The heat generating portion 61 of the sheath heater 60 is supported by the support 100 provided to protrude from the outer circumferential surface of the superheated steam discharge pipe 70.

The support 100 installed in the axial direction on the outer surface of the superheated steam discharge pipe 70 ensures the seismic resistance of the sheath heater 60, and the sheath heater 60 and the superheated steam discharge pipe 70 and the septum 50 It is a seismic and heating structure that prevents damage accidents and is given heat transfer efficiency to the superheated steam flowing in the superheated steam discharge pipe 70 further communicating.

By the above-described configuration, the saturated steam introduced into the gas main body 20 from the saturated steam supply pipe 10 is a single plate adjacent to the heat shield plate 110 disposed for the purpose of cooling avoiding the superheated steam flowing through the partition 50. Preheated in the outer space (S1) in (54), heated in communicating with the inner space (S2), and finally heated in the communicating superheated steam discharge pipe (70), generating a stable quality superheated steam by 1.5 passes can do.

That is, the saturated steam blown into the gas main body 20 from the saturated steam supply pipe 10 collides with the heat shield plate 110 to flow to the outer diameter side, and further collides with the inner circumferential surface of the gas main body 20. In addition, the inside of the outer space S1 between the inner circumferential surface of the base body 20 and the outer circumferential surface of the pipe 50 flows toward the discharge side end plate 40. Water vapor reaching the discharge side end plate 40 is introduced from the open end 53 of the pipe 50 to the inner diameter side of the pipe 50, and the inner circumferential surface of the pipe 50 and the superheated steam discharge pipe 70 are provided. The inner space S2 therebetween flows toward the end 52 and the end plate 54. The water vapor reaching the end portion 52 collides with the end plate 54 and is introduced into the end portion 71 of the superheated steam discharge pipe 70 and discharged to the outside through the superheated steam discharge pipe 70.

In addition, the saturated water vapor is heated by the heat generating portion 61 of the sheath heater 60 and changes from saturated water vapor to superheated steam during the flow as described above. In addition, the condensed water generated by the saturated water vapor being exchanged with the outside air through the gas main body 20 or by each of the low-temperature members immediately after the start of operation is moved by dropping the inner circumferential surface of the gas main body 20, or the like. It is stored in the lower part of the base body 20 below. The condensate is heated during operation of the apparatus and discharged as superheated steam.

In this embodiment, in order to ensure maximum thermal efficiency without reducing the generated superheated steam temperature, the interval between the inlet of the saturated steam supply pipe 10 and the outlet of the superheated steam discharge pipe 70 is maximum. Arranged and installed in the vicinity of the both ends (21, 22) of the gas main body 20, the heat shield plate 110 is disposed in a position facing the flow direction of the saturated steam near the inlet of the saturated steam supply pipe 10, Cooling and temperature reduction of the clearance pipe 50 in which superheated water steam flows is avoided, and the overall thermal efficiency is improved.

Here, in the present embodiment, if the flow rate of the saturated steam supplied from the saturated steam supply pipe 10 is large, the liquid in the superheated steam discharged into the air stream along the water surface of the condensate remaining in the apparatus is discharged as a droplet. It may be mixed in a state. In order to prevent this, the supply amount of saturated steam is set so that the steam stream does not swept the droplets in consideration of the vapor flow rate of the liquid level of the condensate.

According to embodiment described above, the following effects can be acquired.

(1) By melting this lead with superheated steam having a temperature equal to or higher than the melting point of lead, the element 8 can be easily peeled from the substrate 7 and can easily decompose the decomposition product.

(2) Even if the element 8 is fixed by varnish in addition to soldering or the like, the element 8 can be easily peeled off by heating, softening and melting the varnish with superheated steam.

(3) By generating the air in the heating vessel 6 by the superheated steam and setting it to an atmosphere of high temperature and low oxygen, generation of harmful gas due to carbonization such as varnish can be suppressed.

(4) By using superheated steam as the superheated steam, 539 kcal / kg of latent heat can be used for heating in the state where the decomposed product is 100 ° C. or lower, so that, for example, the decomposed product can be heated in a shorter time than in the case of using hot air of heated air. High-speed processing is possible.

(5) By vibrating the conveyor 4 on which the decomposed product is loaded while exposing the decomposed product to the superheated steam, the element 8 can be dropped into the recovery container 9 to be recovered.

Next, with reference to FIG. 5, the decomposition | disassembly apparatus of the electric apparatus which concerns on 2nd Embodiment of this invention is demonstrated.

The decomposition apparatus 200 of this example includes a heating vessel portion (loader portion 210) in which decomposition products are received and heated, a superheated steam generator 250 generating superheated steam, and a superheated steam portion generated in the same apparatus as a heating vessel portion ( A shower head 260 introduced into the interior of the 210 and a conveying means (conveyor) 270 for conveying the decomposed product in the heating vessel 210 are mainly provided.

The heating vessel portion 210 is a horizontal hollow box shape. The inlet 211 of the decomposed product is opened at one side (right side of FIG. 5) of the heating vessel 210, and the outlet 212 of the processed decomposed product is opened at the side (left side of FIG. 5) on the opposite side. Between this inlet 211 and the outlet 212, the conveyor 270 which conveys a decomposition product is arrange | positioned. The conveyor 270 is wound around the sprocket 275 disposed on the upstream side (inlet side) and the driving roller 276 arranged on the downstream side (outlet side), and circulated in the counterclockwise direction in FIG. 5. do. Conveyor 270 is in this example a pair of chain conveyors. Decomposition | disassembly is a board | substrate of several sheets in this example, is accommodated in the box-shaped holder 300, and is conveyed. The holder 300 will be described later.

On the upstream side of the inlet 211 of the heating vessel 210, a roller conveyor 203 for conveying the holder 300 containing the decomposition products to the decomposition device 200 is disposed. The holder 300 is transferred from the roller conveyor 203 to the chain conveyor 270 by the loader mechanism 500. The loader mechanism 500 is mentioned later. On the other hand, the roller conveyor 205 which carries out the holder 300 from the decomposition apparatus 200 is arrange | positioned downstream of the exit 212 of the heating container part 210. As shown in FIG. The holder 300 is transferred from the chain conveyor 270 to the roller conveyor 205 by an unloader mechanism. Since the unloader mechanism is well known, its description is omitted.

The heating vessel part 210 is divided into the preheating chamber 215, the processing chamber 216, and the precooling chamber 217 from the upstream side in the conveying direction by the partitions 210a and 210b.

An ejector 251 is disposed above the preheating chamber 215 and connected to the same apparatus 250 as the superheated steam generator 250. The superheated steam generator 250 may use, for example, the superheated steam generator described with reference to FIGS. 2 to 3. The ejector 251 is connected to a boiler 253 disposed outside the heating vessel section. The boiler 253 heats water supplied from a water supply means not shown to generate saturated steam (100 ° C., about 0.1 MPA). The saturated steam is transferred to the superheated steam generator 250 by the ejector 251 and reheated to generate superheated steam (about 280 ° C., about 0.1 MPA).

Above the processing chamber 216, a shower head 260 for introducing superheated steam generated by the superheated steam generator 250 is provided. As shown in FIG. 6, the shower head 260 has a hollow rectangular parallelepiped main body portion 261 and a superheated steam introduction tube 262 provided to protrude from the center of the upper surface of the main body portion 261. The lower surface of the main body 261 is formed by dispersing a plurality of steam outlets 263. The distribution of the superheated steam can be adjusted by the diameter and the position of the outlet 263. For example, the diameter or position of the outlet 263 is adjusted in accordance with the size or number of decomposition products to form a flow path of steam so as to obtain an appropriate flow rate distribution. The main body 261 is disposed to face the upper path of the conveyor 270.

As shown in FIG. 7, the superheated steam supply pipe 255 extending from the superheated steam generator 250 is connected to the superheated steam introduction pipe 262 of the shower head 260. The superheated steam generated by the superheated steam generator 250 is injected from the superheated steam supply pipe 255 toward the decomposition product conveyed from the chain conveyor 270 through the shower head 260. The temperature sensor 257 is mounted in the processing chamber 216, and the temperature in the same part is detected. The controller 258 controls feedback so that the temperature of the superheated steam generator 250 becomes a predetermined set temperature according to the temperature detected by the temperature sensor 257, and the heating power of the superheated steam generator 250 or the flow rate of the superheated steam. Adjust it.

In addition, a suction header 221 is disposed under the upper path of the conveyor 270 in the processing chamber 216 so as to face the shower head 260. This suction header 211 is connected to the ejector 251. The suction header 221 sucks waste superheated steam which has not been used for heating the decomposed product and sends it to the ejector 251. The waste superheated steam is mixed with saturated steam supplied from the boiler 253 and sent to the superheated steam generator 250 for reuse.

In the lower part of the processing chamber 216, a preheating heater 223 is arranged to sequence the processing chamber 216 before the superheated steam generator 250 is started.

In addition, suction headers 225 and 226 are disposed above the preheating chamber 215 and the precooling chamber 217, respectively. These suction headers 225 and 226 are also connected to the ejector 251. The waste superheated steam existing in these rooms is also drawn from the suction headers 225 and 226, mixed with saturated steam supplied from the boiler 253, and sent to the superheated steam generator 250 for reuse.

The exhaust headers 231 and 241 and the intake headers 232 and 242 are respectively disposed at the inlet 211 and the outlet 212 of the heating vessel 210. The exhaust headers 231 and 241 and the intake headers 232 and 242 are connected in a line including heaters 233 and 243 and blowers 234 and 244 connected in series. At the inlet 211 and the outlet 212, the air heated in the heaters 233, 243 is discharged from the exhaust headers 231, 241 through the line by the blowers 234, 244 and at the same time the intake head 232. , 242). This constitutes an air curtain with heated air between both headers. These air curtains prevent leakage of outside air into the heating vessel 210 and prevent leakage of superheated steam from the inside of the heating vessel 210.

On the upper path of the chain conveyor 270 in the processing chamber 216, impact applying means for applying a mechanical shock to the holder to be conveyed is provided. The impacting means is in this example a block 290 which is triangular in cross-sectional shape and has an inclined surface 290a that slopes upwards from upstream to downstream. The front end of the inclined surface 290a protrudes upward from the conveyance path of the chain conveyor 270. A plurality of blocks 290 (three in the figure) are arranged along the conveyance path.

The bottom wall 210c of the heating vessel 210 is inclined downward from the preheating chamber 215 toward the precooling chamber 217. On the bottom wall of the precooling chamber 217, a drain port 227 through which condensed water is collected is formed. This drain port 227 is connected to the boiler 253, and the recovered condensate is reused.

Next, with reference to FIG. 8, the holder which a decomposition product is accommodated is demonstrated.

Holder 300 has a bottom plate 310 and a cover (not shown). The bottom plate 310 has a double structure of an inner plate 320 and an outer plate 330 having a rectangular planar shape. The width of the outer plate 330 is slightly wider than the inner plate 320. Side plates 331 are formed on the left and right edges of the outer plate 330, and the upper end portions 332 of both side plates 331 are bent inward to be extended upward of the inner plate 320. The inner plate 320 is elastically supported by the spring 335 from the upper end 332 of the side plate 331 of the outer plate 330. As shown in FIG. 8A, the spring 335 extends through the upper end portion 332 and the inner plate 320 of the side plate 331 of the outer plate 330 in the vicinity of the four corners of the bottom plate 310. The pin 336 is fitted to the outside. By such a configuration, the inner plate 320 is elastically supported by the spring 335 with respect to the outer plate 330.

A grip 321 is formed on the upper surface of the inner plate 320 to hold a plurality of substrates (10 sheets in this example) as cantilevers. In this example, the substrate is erected in parallel with the conveying direction. In addition, a plurality of slits 323 are opened on one surface of the inner plate 320.

Guides 339 extending in the conveying direction are fixed to the left and right edges of the lower surface of the outer plate 330. The guide 339 is for guiding each chain so as not to deviate from side to side while the holder 300 is conveyed to the chain conveyor 270. The guide 339 is a plate elongated in the conveying direction, and the traveling direction front end 341 is bent downward. As described later, the front end 341 of the guide 339 is engaged with the chain.

Moreover, the roller 343 which rotates in a conveyance direction is attached to the inner position from the left and right edges of the lower surface of the outer plate 330. These rollers 343 protrude downward from the guides 339.

In addition, a plurality of slits 345 are opened on one surface of the outer plate 330. The position of the slit 345 is arrange | positioned in the transverse direction with respect to the slit 323 of the inner board 320. FIG.

The cover (not shown) covers the four sides of the bottom plate 310, and the upper surface is opened.

Next, the loader mechanism 500 which transfers the holder 300 to the conveyor 270 is demonstrated with reference to FIG. 9, FIG.

The loader mechanism 500 exchanges the holder 300 conveyed from the roller conveyor 203 to the chain conveyor 270. As shown in FIG. 9, the roller conveyor 203 is arrange | positioned so that it may incline downward toward the upstream end of the chain conveyor 270. As shown in FIG. The loader mechanism 500 is arrange | positioned in the downstream end of the both sides of the roller conveyor 203, and is comprised from the link arm 510 and the guide arm 520 connected to this link arm 510. As shown in FIG.

The link arm 510 has a long arm 511 and a short arm 515, as shown in FIG. 10. The center of both arms 510 is rotatably mounted on the base of the roller conveyor 203. A counter weight 512 is attached to the tip of the long arm 511, and the link arm 510 is urged to rotate in a clockwise direction.

Near the center of the short arm 515, a stopper piece 516 standing up from the same arm 515 extends. The link arm 510 has an upper position (indicated by the solid line in FIG. 10) in which the stopper piece 516 protrudes upwards from the conveying surface of the roller conveyor 203 and a lower position in which it retreats downward in the same plane (imaginary line in FIG. 10). Rotational movements (indicated by 想像 線).

The guide arm 520 is rotatably supported by the pin of the roller conveyor 203 by the pin at the center. One end of the guide arm 520 is rotatably mounted on the tip of the short arm 515 of the link arm 510 by a pin 521. When the link arm 510 rotates from the up position to the down position, the guide arm 520 is positioned almost horizontally with the downwardly inclined position (represented by the solid line in FIG. 10) on the side of the chain conveyor 270 (FIG. 10). Rotates between).

The pin 521 connecting the short arm 515 and the guide arm 520 is biased downward by the wire 525 of variable tension.

In addition, as shown in FIGS. 9 and 10, the chain conveyor 270 is equipped with an attachment 271 that stands up from the conveying surface at predetermined intervals. A pin 272 extending in the direction orthogonal to the conveyance direction is placed in the attachment 271. The front end 341 of the guide 339 of the holder 300 engages with this pin 272.

In the unloaded state shown by the solid line in FIG. 10, the link arm 510 is urged to rotate clockwise by the counter weight 512, and the stopper piece 516 of the short arm 515 is moved by the roller conveyor 203. It waits in the upper position which protrudes upward from the conveyance surface of.

When the holder 300 is conveyed by the weight by the roller conveyor 203, the front surface of the holder 300 hits the stopper piece 516 and presses the stopper piece 516 forward. The link arm 510 then begins to rotate counterclockwise against the weight 512. Here, the pin 521 connecting the short arm 515 and the guide arm 520 is applied with a downward force of an appropriate size by the wire 525, so that the link arm 510 rotates smoothly. . As a result, the stopper piece 516 is retracted downward from the carrying surface, and the guide arm 520 rotates in the horizontal position. The holder 300 then advances away from the stopper piece 516, and the tip 541 of the guide 399 is supported by the guide arm 520, as shown by the imaginary line in FIG. 10.

The pin 272 of the attachment 271 of the chain conveyor 270 which circulates and runs at a timing at which the front end 341 of the guide 399 of the holder 300 reaches the tip of the guide arm 520 is guided. 399) to the front end 341. As a result, as shown in FIG. 9, the holder 300 is transferred from the roller conveyor 203 to the chain conveyor 270.

Next, with reference to Fig. 5, the decomposition operation of the decomposition product using this decomposition apparatus will be described.

First, the superheated steam generator 250 generates the superheated steam. As an example, the temperature of superheated steam is about 280 ° C and the pressure is atmospheric pressure (about 0.1 MPA). The generated superheated steam is injected into the process chamber 216 from the shower head 260. As a result, the air in the process chamber 216 is discharged | filled, and it is filled with superheated steam, and it is the atmosphere of high temperature and a low oxygen state. Here, the temperature of the superheated steam decreases to about 270 ° C under the influence of heat radiation loss. In addition, since the atmosphere is released, the pressure is substantially equivalent to atmospheric pressure (about 0.1 MPA). The oxygen concentration in the processing chamber 216 is extremely low, about 1/20 of air.

In addition, the process chamber 216 is heated by the preheat heater 223 before starting the superheated steam generator 250. Thereby, the starting temperature condition of the superheated steam generator 250 is adjusted, and the heat radiation loss from the surface of the apparatus at the time of operation is supplemented.

In addition, in the inlet 211 and the outlet 212 of the heating container part 210, air leakage is prevented by the air curtain, respectively.

In addition, since the superheated steam generator 250 is arranged in the preheating chamber 215, the same chamber 215 is heated by heat generated from the same apparatus 250 or the like. As an example, the preheating chamber 215 is heated to about 100 ° C. On the other hand, the precooling chamber 217 is maintained at 100 degrees C or less.

The conveyor 270 is circulating. Then, the holder 300 in which the decomposition products are stored is transferred from the roller conveyor 203 to the chain conveyor 270 by the loader mechanism 500. The holder 300 transferred to the chain conveyor 270 enters the preheating chamber 215 through the air curtain from the inlet 211 of the heating vessel 210 and is preheated. Thereafter, the decomposed product conveyed to the processing chamber 216 and accommodated in the holder 300 is exposed to the superheated steam ejected from the shower head 260. As a result, the joining member (conductive substance (alloy)) which fixes the component to a substrate such as lead or beeswax becomes a molten state, and the bonding force between the component and the substrate is weakened, so that the component is easily separated from the substrate.

When the holder 300 reaches the block 290, the roller 343 (see FIG. 8B) installed on the bottom surface of the holder 300 sits on the inclined surface 290a of the block 290. Guide 339 is away from pin 272 (see FIG. 10) of chain conveyor 270. Then, soon after, the roller 343 is separated from the front edge of the inclined surface 290a, and the holder 300 falls on the chain conveyor 270, and the guide 339 engages with the chain conveyor 270. Due to this drop, the impact is applied to the holder 300, and the decomposed matter contained in the holder 300 is vibrated. This vibration further weakens the bonding force between the component and the substrate. In addition, in the holder 300 after the fall, the inner plate 320 whose decomposed product is supported by the cantilever vibrates even more as the spring 335 attenuates. In addition, since the decomposition product is supported by the cantilever, it also vibrates in the left-right direction in FIG. 8B with the grip 321 as a point. These vibrations further weaken the bonding force between the component and the substrate.

The holder 300 is vibrated every time it passes through the plurality of blocks 290, and finally the component separates from the substrate. The separated component falls from the substrate and is deposited on the inner plate 320 of the holder 300. On the other hand, the molten bonding member falls downward from the slit 323 of the inner plate 320 and is deposited on the outer plate 330.

Thereafter, the holder 300 is conveyed to the precooling chamber 217 and cooled to a temperature of about 100 ° C. or less. Then, the air is discharged from the heating vessel 210 through the air curtain of the outlet 212 and is transferred from the chain conveyor 270 to the roller conveyor 205 by an unloader mechanism (not shown).

In addition, during operation, superheated steam which is excessively present from the waste superheated steam suction headers 221, 225, and 226 provided in the heating vessel 210 is recovered by the ejector 251 to the superheated steam generator 250. It is becoming. This superheated steam is mixed with saturated steam supplied from the boiler 253 and reused.

In addition, after the operation is completed, the condensate drain generated in the heating vessel 210 is recovered from the drain port 227. This drain is sent to the boiler 253 for reuse.

Next, the experimental results of obtaining the optimum operating conditions (temperature, time, oxygen concentration) of the apparatus will be described with reference to FIGS. 11 to 15.

First, the relationship between the temperature in the process chamber and the separation yield of the decomposed product will be described with reference to the graph of FIG. 11. The vertical axis of the graph represents the separation yield (%), and the horizontal axis represents the temperature (° C) in the processing chamber. The separation yield is the ratio of the number of parts separated to the total number of parts.

Since the melting point of lead as the joining material was at most about 240 ° C, the separation yield when the temperature was 250 ° C or more was determined. As shown in the graph, the separation yield was 70 to 75% when the temperature was around 250 ° C, but a high separation yield of 90% or more was obtained when the temperature was 270 ° C or higher.

As a result, the optimum temperature condition can be set to 270 ° C.

Next, the relationship between the heating time and the separation yield of the decomposed product will be described with reference to the graph of FIG. 12. The vertical axis of the graph represents the separation yield (%), and the horizontal axis represents the heating time (minute). The temperature in the processing chamber was 270 ° C.

As shown in the graph, when the heating time is 3 minutes, the separation yield is about 88%, but when it is 4 minutes or more, it is slightly increased to about 90%.

As a result, the optimum heating time was 5 minutes.

Next, the relationship between the steam flow rate in the processing chamber and the separation yield of the decomposed product will be described with reference to the graph of FIG. 13. The vertical axis of the graph represents the separation yield (%), and the horizontal axis represents the steam flow rate (kg / h).

As shown in the graph, the separation yield is about 80% at a steam flow rate of 6 kg / h, but is about 90% at 8 kg / h or more.

As a result, the steam flow rate was 8 kg / h.

Next, the distribution of oxygen concentration in the processing chamber will be described with reference to the graph of FIG. 14. The vertical axis of the graph is the oxygen concentration (%), and the horizontal axis is the measuring point. The measurement point was made into 20 places in the space of a process chamber.

As shown in the graph, the oxygen concentration is 0.5 to 1.4%, which is very low. For this reason, it is thought that the oxidation effect with respect to a heating object (decomposition product) and the combustibility of an object can be reduced significantly.

Finally, the separation yield in the optimum operating conditions based on the above results is shown.

15 is a table showing experimental results under optimum operating conditions.

As a result of conducting four experiments under the optimum operating conditions (temperature: 270 DEG C, heating time: 5 minutes, steam flow rate: 8 kg / h), a high yield of separation yield of 89 to 92% was obtained.

According to 2nd Embodiment demonstrated above, the following effects can be acquired in addition to the effect obtained by 1st Embodiment.

(1) As a result of determining the optimum operating conditions of the superheated steam generator, a high separation yield of about 90% can be obtained.

(2) Since the treatment can be performed at a high temperature of about 280 ° C. required for melting the bonding member under atmospheric pressure, high pressure resistance measures are unnecessary and safety is high. In addition, since the temperature range of the superheated steam can be freely set in a wide range, the melting temperature range can be widened, so that most of the bonding materials generally used can be melted.

(3) Since high boiling point heat medium or organic solvent is used as the heating means, and superheated steam at atmospheric pressure is used, safety is high and environmental problems are not generated, and running costs are low.

(4) By removing the air by superheated steam and treating the oxygen concentration in a low oxygen concentration atmosphere of about 1 / 20th of the air, generation of organic gas accompanying the thermal decomposition of the component or the resin-based joining member can be suppressed.

(5) Since the preheating chamber is provided in the heating vessel and the superheating steam generator is arranged in the preheating chamber, the inside of the preheating chamber can be heated by the heat generated from the superheating steam generating apparatus, and no other heating source is required.

(6) Since a precooling chamber is installed in the heating vessel section and the decomposed product is cooled to some extent and then taken out, it is possible to prevent the occurrence of odor or accidental contact with the heated decomposed product.

(7) Since the header which sucks lung superheat steam is provided, waste superheat steam can be reused.

(8) Since the condensate drain is collected and reused, it is safe for the environment.

(Variation)

The present invention is not limited to the embodiments described above, and various modifications and changes are possible, and they are also within the technical scope of the present invention.

(1) In the embodiment, the electric device to be disassembled is a printed circuit board on which various parts are mounted by, for example, soldering and varnish, but the electric device to be disassembled is not limited to this.

(2) While the decomposition apparatus of the embodiment emits superheated steam while transporting the decomposition products to the conveyor, the present invention is not limited to this, but can also be applied to performing a discharge treatment.

(3) The superheated steam generator of the embodiment has a triple pipe structure composed of, for example, a gas body, a pipe, and a superheated steam discharge pipe, but the present invention is not limited thereto, and has a multi-pipe structure of four or more. Superheated steam generators are also applicable. In this case, it can be set as the structure which inserted the 1st cylindrical body inside the other cylindrical body, and inserted the other cylindrical body inside the 3rd cylindrical body. In this case, the gas flow path has a configuration of two passes or more. In the present invention, a superheated steam generator other than having such a multi-pipe may be used.

(4) Although the superheated steam generator according to the embodiment applies a sheath heater as the heating means, for example, the heating means is not limited to this, and for example, heating means other than a sheath heater such as IH may be used. .

(5) In the embodiment, steam for melting lead or the like was, for example, water vapor, but the present invention is not particularly limited thereto, and the superheated vapor made of another material may be used to decompose the electric device.

1: boiler 2: superheated steam generator
3: shower head 4: conveyor
5: vibrator 6: heating vessel
7: substrate 8: device
9: recovery vessel 10: saturated steam supply pipe
11: end 20: body
21, 22: end 23: flat portion
24, 25: projection 30: supply side end plate
31: opening 40: discharge side end plate
41: opening 50: clearance
51: stay 52, 53: end
54: veneer 60: sheath heater
61: heating section 70: superheated steam discharge pipe
71: tip 100: support
110: heat shield S1: outer space
S2: Internal space 200: Decomposition device of electrical equipment
210: heating vessel 203: roller conveyor
205: roller conveyor 211: entrance
212: exit 215: preheating chamber
216: treatment chamber 217: precooling chamber
221, 225, 226: suction header 223: preheat heater
227: drain port 231, 241: exhaust header
232, 242: intake header 233, 243: heater
234, 244: Blower 250: Superheated steam generator
251: ejector 253: boiler
255: superheated steam supply pipe 257: temperature sensor
258: controller 260: shower head
261: main body 262: superheated steam introduction tube
263: steam outlet 270: chain conveyor
271: attachment 272: pin
275 sprocket 276 drive roller
290: impact imparting means (block) 300: holder
310: base plate 320: inner plate
321: grip 323: slit
330: outer shell 331: side plate
332: upper part 335: spring
336: Pin 339: Guide
341: shear 343: roller
345: slit 500: loader mechanism
510: link arm 511: long arm
515: short arm 512: counterweight
516: stopper piece 520: guide arm
521: pin 525: wire

Claims (19)

A method of disassembling an electric device that separates a component fixed on a substrate from the substrate by a bonding material that melts by heating above the melting point,
A method for decomposing an electric machine, characterized in that for heating the joining material using superheated steam. The method of claim 1,
The component is fixed on the substrate by a resin-based material,
And said superheated steam is at least substantially atmospheric pressure at the heating location of said component and at a temperature equal to or more than the softening point of said resin-based material. The method according to claim 1 or 2,
And overheating the substrate and the component in a low oxygen atmosphere. The method according to any one of claims 1 to 3,
The superheated steam is a decomposition method of an electric device, characterized in that the superheated steam. The method according to any one of claims 1 to 4,
And dissociating the substrate and the component fixed on the substrate when the substrate is exposed to superheated steam. An apparatus for disassembling an electric device that separates a component fixed on a substrate from a substrate by a bonding material that melts by heating above a melting point,
A heating vessel portion accommodating the substrate and the components fixed on the substrate;
And a superheated steam generator for introducing superheated steam having a temperature equal to or higher than the melting point of the joining material into the heating vessel. The method according to claim 6,
The component is fixed on the substrate by a resin-based material,
The superheated steam is at least atmospheric pressure at a heating point of the component and at a temperature equal to or more than the softening point of the resin-based material. The method according to claim 6 or 7,
The inside of the heating vessel is a decomposition device of an electric machine, characterized in that the low oxygen atmosphere by the introduction of the superheated steam. The method according to any one of claims 6 to 8,
The superheated steam is a decomposition apparatus of an electric machine, characterized in that the superheated steam. 10. The method according to any one of claims 6 to 9,
And a vibrating means having the substrate in the vicinity of the heating vessel. 11. The method according to any one of claims 6 to 10,
And at least one of a preheating chamber for sequencing the substrate or a precooling chamber for slow cooling the substrate in the heating vessel portion. The method of claim 11,
And the superheated steam generator is arranged in the preheating chamber. The method according to any one of claims 6 to 12,
And a preheating heater is installed in the heating vessel.
The method according to any one of claims 6 to 13,
And an air curtain for preventing leakage of outside air to the heating vessel portion is provided at an inlet through which the substrate is introduced and at an outlet through which the substrate is taken out. The method according to any one of claims 6 to 14,
And an impact imparting mechanism for mechanically impacting the substrate in the heating vessel. The method according to any one of claims 6 to 15,
And a superheated steam recovery means is installed in the heating vessel. A method of disassembling an electric device for separating a component fixed on a substrate from the substrate by a bonding material having a melting point lower than that of the member to be joined,
Exposing the substrate and the component fixed on the substrate to superheated steam having a temperature equal to or higher than the melting point of the bonding material to melt the bonding material and separating the component from the substrate. . An apparatus for disassembling an electric device for separating a component fixed on a substrate from the substrate by a bonding material having a melting point lower than that of the member to be joined,
A container portion for receiving the substrate and the components fixed on the substrate;
And a superheated steam generator for introducing superheated steam having a temperature equal to or higher than the melting point of the joining material in the container portion. The method of claim 18,
The superheated steam generator is inserted into a first cylindrical body, an introduction pipe through which steam is introduced into the first cylindrical body from one end of the first cylindrical body, and is inserted into the first cylindrical body. The second cylindrical body communicating with the said 1st cylindrical body at the edge part on the opposite side to a conduit side, and inserted in the said 2nd cylindrical body, On the opposite side to the side which the said 1st cylindrical body and the said 2nd cylindrical body communicated with, A third cylindrical body communicating at the end with the second cylindrical body, a discharge pipe for discharging superheated steam from the third cylindrical body, and a gas flow path from the introduction pipe to the discharge pipe, and heats the steam. Decomposition apparatus of an electric machine, characterized in that it comprises a heating means.

Images