WO2010026822A1 - Electric appliance disassembling method, and electric appliance disassembling device - Google Patents

Abstract

Provided are an electric appliance disassembling method for separating parts easily from a board, and a disassembling device.  This method separates the parts, which are fixed on the board by a jointing material having a lower melting point than that of a member to be jointed, from that board.  The board and the parts fixed on the board are exposed to superheated steam having a temperature at or higher than the melting point of the jointing material, so that the jointing material is melted to separate the parts from the board.

Description

Disassembling method for electric equipment and disassembling apparatus for electric equipment

The present invention relates to a disassembling method and a disassembling apparatus for an electric device having components fixed by soldering, brazing, varnishing or the like on a base material such as a substrate. In particular, the present invention relates to a heating method for disassembling such an electric device.

For example, electric devices such as circuit boards (including electronic devices in this specification, claims, etc.) mounted on information communication devices such as used mobile phones and computers include noble metals and rare metals. Therefore, it is desired to separate these from the resin part and other metal parts and collect them for reuse.

For example, in Patent Document 1, in a recycling method of a printed circuit board for recovering valuable metals such as gold (Au) used for connection parts, symbols indicating information such as energization time, manufacturing method, and disassembling method of the printed circuit board The circuit pattern and the like are peeled off with reference to FIG. In addition, in order to replace some parts fixed to a substrate such as a printed board, a method for removing the parts from the substrate by melting a bonding material such as solder or solder of the parts is known as a well-known example. It has been.

For example, Patent Document 2 describes a method of using an organic solvent vapor (considered as saturated vapor) as one of the means for melting the bonding material.
Patent Document 3 describes a method of using a boiling hydrocarbon (boiling point 215 ° C.), a silicone oil (boiling point 250 ° C.) vapor, or a heating liquid as a high boiling point heating medium.

Patent Document 4 uses a method such as an infrared heater, hot air, heat of condensation of an inert organic solvent, and high-frequency heating as means for melting the bonding material. After melting the bonding material, impact, vibration, shearing is performed. An example of using a method of separating a component from a substrate by adding a s.

Further, Patent Document 5 describes a method of separating a component from a substrate by injecting high-temperature nitrogen gas (300 to 500 ° C.) onto the substrate, melting the bonding material, and then applying ultrasonic vibration. Yes.

JP 2002-314210 A JP-A-9-186450 JP 60-244096 Gazette Japanese Patent Laid-Open No. 8-139446 JP 61-295696 A

The dismantling of the electrical equipment as described above employs a method of mainly manually or mechanically separating the metal part and the resin part, and a method of melting a set of equipment in a furnace and separating it in a molten state. Yes.
In addition, since a high-boiling heat medium is heated and the substrate is immersed in the medium (liquid) or the condensation latent heat of those saturated vapors is used for heating, there is a limit in the range of heating utilization concentration.
Further, when separating manually or mechanically, a mechanical force such as a cutting force or a peeling force is applied to a component having various shapes to remove it from the substrate, so that automation is difficult and workability is very low.
On the other hand, when performing melt recovery, since the metals to be recovered are mixed, a lot of labor is required for the separation work after melting, and the separation and recovery efficiency is low. In addition, since it is necessary to melt materials other than the material to be collected, a lot of energy is used to dissolve unnecessary materials.
Also, the method using heat is not preferable because resin or the like may burn or toxic gas may be generated due to oxidation of insulating oil or the like from the capacitor.

The present invention has been developed to solve the above-described problems, and an object of the present invention is to provide a method and an apparatus for disassembling an electric device that easily separates a component from a substrate. In particular, it is an object of the present invention to provide a method for heating an electric device for separating a component from a substrate.

The present invention solves the above-described problems by the following means.
The invention according to claim 1 is a method for disassembling an electrical device in which a component fixed on a substrate is separated from the substrate by a bonding material that melts when heated to a melting point or higher, and the bonding material is heated with superheated steam. It is characterized by using and heating.

Here, the reason for using superheated steam instead of saturated steam is that Kyochang solder (in the case of tin-copper system), which is frequently used in electric boards, has a maximum melting point of about 240 ° C., so the condensation latent heat of saturated steam This is because it is difficult to melt by itself, and superheated steam above the dry steam point obtained by further heating saturated steam is necessary.

According to a second aspect of the present invention, the component is fixed on the substrate with a resin-based material, and the superheated steam is substantially at atmospheric pressure at least at a heating position of the component, and the resin-based material is softened. The temperature is higher than the point.

The invention according to claim 3 is characterized in that processing is performed in a state in which the periphery of the substrate and the component is maintained in a low oxygen atmosphere by the superheated steam.

In particular, when the atmosphere in which the electrical equipment is processed is filled with superheated steam, it is preferable to use a low oxygen atmosphere with an oxygen concentration of about 1/20 that of air.

The invention according to claim 4 is characterized in that the superheated steam is superheated steam.
Since only the sensible heat of the superheated steam or the sensible heat and the latent heat of condensation is used, it can be heated to a higher temperature region than when only the latent heat of condensation is used. The means for obtaining superheated steam is not limited to the heated steam generating means of the present invention.
In addition to the superheated steam, for example, superheated steam of a high boiling point heat medium such as fluorinated hydrocarbon or silicone oil can be used as the heating medium. This is preferable in terms of cost.

The invention according to claim 5 is characterized in that the substrate is vibrated when the substrate and components fixed on the substrate are exposed to superheated steam.

The invention described in claim 6 is an apparatus for decomposing an electric device for separating a component fixed on a substrate from a substrate by a bonding material that melts by heating to a temperature equal to or higher than the melting point. The heating container part which accommodates the said fixed component, and the superheated steam generator which introduces the superheated steam which has the temperature more than melting | fusing point of the said joining material in the said heating container part, It is characterized by the above-mentioned.

According to a seventh aspect of the present invention, the component is fixed on the substrate by a resin material, and the superheated steam is at least atmospheric pressure at a heating location of the component, and is equal to or higher than a softening point of the resin material. It is characterized by temperature.

The invention described in claim 8 is characterized in that the inside of the heating container is made into a low oxygen atmosphere by introducing the superheated steam.
The invention according to claim 9 is characterized in that the superheated steam is superheated steam.
The invention described in claim 10 is characterized in that a vibration means for vibrating the substrate is provided in the vicinity of the heating container portion.

The invention according to claim 11 is characterized in that at least one of a preheating chamber for gradually heating the substrate or a precooling chamber for gradually cooling the substrate is provided in the heating container portion.

The invention according to claim 12 is characterized in that the superheated steam generator is arranged in the preheating chamber.
The invention described in claim 13 is characterized in that a preheating heater is installed in the heating container portion.
According to the fourteenth aspect of the present invention, an air curtain for preventing leakage of outside air to the heating container part is provided at the inlet of the heating container part and the outlet from which the substrate is carried out. It is provided.

The invention described in claim 15 is characterized in that an impact applying mechanism for applying a mechanical impact to the substrate is provided in the heating container portion.
The invention described in claim 16 is characterized in that superheated steam recovery means is provided in the heating container portion.

The invention according to claim 17 is a method of disassembling an electric device for separating a component fixed on a substrate by a bonding material having a melting point lower than that of a member to be bonded, from the substrate, and the substrate and the substrate. The fixed component is exposed to superheated steam having a temperature equal to or higher than the melting point of the bonding material to melt the bonding material, and the component is separated from the substrate.

The invention according to claim 18 is an apparatus for decomposing an electric device for separating a component fixed on a substrate by a bonding material having a melting point lower than that of a member to be bonded, from the substrate, and the substrate and the substrate. And a superheated steam generator for introducing superheated steam having a temperature equal to or higher than the melting point of the bonding material into the container.

According to a nineteenth aspect of the present invention, the superheated steam generator is configured to introduce a first cylindrical body and steam from one end of the first cylindrical body into the first cylindrical body. A second tubular body that is inserted into the first tubular body and communicates with the first tubular body at an end opposite to the introduction conduit, and the second tubular body. A third cylinder that is inserted into the cylindrical body and communicates with the second cylindrical body at an end opposite to the side where the first cylindrical body and the second cylindrical body communicate with each other. And a discharge pipe that discharges superheated steam from the third cylindrical body, and a heating unit that is provided in a gas flow path from the introduction pipe to the discharge pipe and that heats the steam. It is characterized by providing.

According to the present invention, the following effects can be obtained.
(1) For example, electronic parts, electrical parts, wiring parts and the like can be easily separated from the substrate by melting the joining material with superheated steam having a temperature equal to or higher than the melting point of the joining material such as solder or solder. Thus, the electric device can be easily disassembled.
(2) Even when the component is hardened with a resin material such as varnish, the component can be easily peeled by heating and softening the resin material with superheated steam.
(3) By expelling air with superheated steam and creating a high-temperature, low-oxygen reducing atmosphere, generation of harmful gases due to resin combustion (oxidation) and carbonization can be suppressed.
(4) By using superheated steam as superheated steam, 539 kcal / kg of latent heat can be used for heating when the work is at a temperature of 100 ° C. or lower. For example, the work can be carried out in a shorter time than when using hot air of heated air. The temperature can be raised and high-speed processing is possible. Furthermore, when it leaks from the apparatus, it is not toxic and is nonflammable, so that high safety can be obtained.
(5) By oscillating the substrate while exposing the workpiece to superheated steam, the easily peelable parts can be dropped by gravity and collected.

It is a figure which shows the structure in 1st Embodiment of the decomposition | disassembly apparatus of the electric equipment to which this invention is applied. It is a figure which shows the superheated steam generator in the decomposition | disassembly apparatus of the electric equipment of FIG. FIG. 3 is a cross-sectional view showing a III-III cross section of FIG. 2. It is the IV section enlarged view of FIG. It is a figure which shows the structure in 2nd Embodiment of the decomposition | disassembly apparatus of the electric equipment to which this invention is applied. 6A and 6B are diagrams illustrating the structure of a shower head in the electric apparatus disassembling apparatus of FIG. 5, in which FIG. 6A is a plan view and FIG. 6B is a side view. It is a block diagram explaining the superheated steam supply system of the decomposition | disassembly apparatus of the electric equipment of FIG. It is a figure which shows the structure of the baseplate of the holder of the decomposition | disassembly apparatus of the electric equipment of FIG. 5, Comprising: Fig.8 (a) is a top view, FIG.8 (b) is a front view. It is a figure explaining the loader mechanism of the decomposition | disassembly apparatus of the electric equipment of FIG. It is a figure explaining rotation operation | movement of the link arm of the loader mechanism of FIG. It is a graph which shows the relationship between process temperature and the separation yield in the decomposition | disassembly apparatus of the electric equipment of FIG. It is a graph which shows the relationship between the heating time and the separation yield in the decomposition | disassembly apparatus of the electric equipment of FIG. It is a graph which shows the relationship between a vapor | steam flow rate and a separation yield in the decomposition | disassembly apparatus of the electric equipment of FIG. It is a graph which shows distribution of the oxygen concentration in the decomposition | disassembly apparatus of the electric equipment of FIG. It is a table | surface which shows the measurement result of the separation yield of the decomposition | disassembly apparatus of the electric equipment of FIG.

An embodiment of an electric apparatus disassembling apparatus (hereinafter simply referred to as “decomposing apparatus”) to which the present invention is applied will be described with reference to the drawings. This disassembling apparatus is for disassembling a circuit board (work) such as a mobile phone or a computer, and executes the disassembling method for an electric device of the present invention. Some circuit boards have various components such as IC chips (elements), coils, capacitors, and wirings fixed on a board such as a printed circuit board. Connection terminals of various components are fixed to the printed circuit board by soldering. Some IC chips are also fixed to the printed circuit board by varnish.

FIG. 1 is a diagram illustrating a configuration of a disassembling apparatus according to a first embodiment of the present invention.
The decomposition apparatus includes a boiler 1, a superheated steam generator 2, a shower head 3, a conveyor 4, a vibrator 5, a heating container 6, and the like.
A workpiece (electrical device) to be disassembled by the disassembling apparatus includes, for example, a substrate 7 that is a printed circuit board, and an element 8 that is soldered to the substrate 7 and further hardened with varnish.

The boiler 1 heats water supplied from a water supply means (not shown) to generate saturated water vapor.

The superheated steam generator 2 generates superheated steam by reheating saturated steam supplied from the boiler 1. The superheated steam generator 2 will be described in detail later.

The shower head 3 is provided in the heating vessel 6, and jets and irradiates the superheated steam generated by the superheated steam generator 2 to the work passing through the inside of the heating container 6. The shower head 3 has a plurality of ejection holes through which superheated steam is ejected.

The conveyor 4 is a belt conveyor disposed through the heating container 6, and loads the work placed on the recovery container 9 into the heating container 6, transports the heating container 6 over a predetermined time, and then carries it out. It is a transport device.

The vibrator 5 is provided inside the conveyor 4 in the heating container 6 and vibrates the upper surface portion on which the collection container 9 in the conveyor 4 is placed. For example, three vibrators 5 are arranged at almost equal intervals along the traveling direction (workpiece conveying direction) of the conveyor 4.

The heating container 6 is formed in a box shape having, for example, a substantially rectangular side view shape, front view shape, and planar shape. The heating container 6 forms a continuous conveyor furnace in cooperation with the conveyor 4. During the operation of the decomposition apparatus, the inside of the heating container 6 is purged of air by superheated steam ejected from the shower head 3 to create a high temperature and low oxygen atmosphere.

In the disassembling apparatus for electrical equipment according to the present embodiment, the temperature of the superheated steam is controlled by the output of the sheathed heater 60 of the superheated steam generator 2. Further, the flow rate of the superheated steam is controlled by the output of the boiler 1. The distribution of superheated steam in the heating container 6 is determined by the hole position and hole diameter of the shower head 3.

When the work is exposed to superheated steam when the work 8 is conveyed by the conveyor 4 in the state where the work 8 is placed on the recovery container 9 with the element 8 to be recovered facing down, solder, brazing material, etc. The conductive substance (alloy) fixing the element 8 to the substrate 7 is raised in temperature by superheated steam (for example, about 100 to 1300 ° C.) and becomes molten and easily peeled off. The varnish is also heated and softened.
When the workpiece is vibrated through the conveyor 4 and the collection container 9 by the vibrator 5, the element 8 is separated from the substrate 7, and the element 8 falls by gravity and is accommodated in the collection container 9.

Hereinafter, the configuration of the superheated steam generator 2 will be described in more detail.
FIG. 2 is a side view including a partial cross section of the superheated steam generator 2. 3 is a cross-sectional view taken along the line III-III in FIG.
The appearance of the superheated steam generator 2 includes a supply-side end plate 30 to which the saturated steam supply pipe 10 is connected, a container body 20 and a discharge-side end plate 40 to which the superheated steam discharge pipe 70 is connected. In the superheated steam generator 2, a separation pipe 50 is disposed, and the superheated steam discharge pipe 70 is extended to the vicinity of the closed end of the separation pipe 50 to form a fluid flow path, and then the fluid is efficiently heated. In addition, a sheathed heater 60 is disposed inside the separation pipe 50 and outside the superheated steam discharge pipe 70. The direction of steam flow in the superheated steam generator 2 is indicated by arrows in the figure.

Since high-temperature steam flows inside the superheated steam generator 2, each member such as the diaphragm 50 whose temperature conditions are particularly severe is made of stainless steel whose surface is passivated after high-temperature oxidation treatment or electrolytic polishing. Take measures against high temperature corrosion.

The container body 20 is formed in a cylindrical shape. Both end portions 21 and 22 of the container body 20 are closed by a supply-side end plate 30 and a discharge-side end plate 40, respectively. The container body 20 functions as the first cylindrical body referred to in the present invention. For example, the main body 20 is arranged so that its central axis is substantially horizontal, but the present invention is not limited to this.
The supply-side end plate 30 and the discharge-side end plate 40 are each a flat disk and are fitted with their outer peripheral edges in contact with the inner peripheral surface of the main body 20 and are fixed by welding or the like.
Openings 31 and 41 into which the saturated steam supply pipe 10 and the superheated steam discharge pipe 70 are inserted and fixed are formed in the central portions of the supply side end plate 30 and the discharge side end plate 40, respectively.

The diaphragm 50 is formed in a cylindrical shape having a smaller diameter than the main body 20. The diaphragm 50 is inserted into the main body 20 so as to be concentric with the main body 20. The diaphragm 50 has a stay 51 protruding from the outer peripheral surface to the outer diameter side, and is supported by fixing the protruding end portion of the stay 51 to the inner peripheral surface of the main body 20. Both end portions 52 and 53 of the separation tube 50 are arranged to face the supply side end plate 30 and the discharge side end plate 40 with a space therebetween.
The diaphragm 50 functions as a second cylindrical body referred to in the present invention.

An end 52 on the supply side end plate 30 side of the diaphragm 50 is closed by an end plate 54. The end plate 54 is a flat disk-shaped member, and its periphery is fixed and sealed by being welded to the diaphragm 50.
A heat shield plate 110 is provided at the end 52 of the separation tube 50. The heat shield plate 110 is a flat plate-like member arranged with a gap between the outer surface of the end plate 54 (surface on the saturated steam supply pipe 10 side). The heat shield plate 110 is formed in a disk shape having a diameter slightly larger than that of the diaphragm 50 by, for example, stainless steel. The heat shield plate 110 is arranged in parallel with the end plate 54 and is fixed to the separation tube 50 in a state of being floated from the end plate 54 by a plurality of support columns 113 described later.

4 is an enlarged view of the vicinity of the heat shield plate 110, FIG. 4 (a) is an enlarged view of a portion IV in FIG. 1, and FIG. 4 (b) is a view taken along the line bb in FIG. .
The heat shield plate 110 has a double structure in which a pair of plates 111 and 112 are stacked in layers, and is supported on the diaphragm 50 by a support column 113.
The plate 111 is formed in a disc shape, faces the end plate 54 of the separation tube 50 with a space therebetween, and is arranged in parallel with the end plate 54. On the outer peripheral edge portion of the plate 111, an upright portion 111a raised on the side opposite to the separation tube 50 (on the supply end plate 30 side) is formed. Further, the plate 111 has an opening 111b into which the support 113 is inserted.
The plate 112 is formed in a disk shape, is opposed to the surface portion of the plate 111 opposite to the separation tube 50 with a space therebetween, and is disposed in parallel with the plate 111. The outer peripheral edge portion of the plate 112 is joined to the protruding end portion of the rising portion 111a of the plate 111 by welding or the like. Thus, the plates 111 and 112 form a hollow disk-like structure.
The support column 113 is a shaft-like member provided on the end plate 54 and the plate 111 of the separation tube 50. For example, three support columns 113 are provided in the circumferential direction of the heat shield plate 110 so as to be distributed at substantially equal intervals. A disc-shaped flange 113a is fixed to the end of the support 113 on the heat shield plate 110 side. The flange 113a is housed inside the heat shield plate 110 (between the plates 111 and 112), and is fixed to the surface of the plate 111 on the plate 112 side. The end of the column 113 on the side of the separation tube 50 is fixed to the end plate 54 by, for example, welding.

The saturated steam supply pipe 10 is a cylindrical pipe line to which saturated steam is supplied from the boiler 1. The saturated water vapor supply pipe 10 is inserted into the main body 20 through the opening 31 of the supply side end plate 30. A space between the inner peripheral edge of the opening 31 and the outer peripheral surface of the saturated water vapor supply pipe 10 is welded over the entire circumference, thereby sealing the opening 31. The saturated water vapor supply pipe 10 is disposed substantially concentrically with the main body 20. The end portion 11 of the saturated water vapor supply pipe 10 protrudes from the supply-side end plate 30 and is disposed to face the heat shield plate 110 with a space therebetween. The saturated water vapor supply pipe 10 functions as an introduction pipe line according to the present invention.

The superheated steam discharge pipe 70 is a cylindrical pipe that discharges the superheated steam, which is a heated gas generated in the superheated steam generator 2, to the outside. The superheated steam discharge pipe 70 is inserted into the main body 20 through the opening 41 of the discharge side end plate 40, and is further inserted into the partition 50 within the main body 20. A space between the inner peripheral edge of the opening 41 and the outer peripheral surface of the superheated steam discharge pipe 70 is welded over the entire circumference, thereby sealing the opening 41. The superheated steam discharge pipe 70 is disposed substantially concentrically with the main body 20 and the diaphragm 50. The distal end 71 of the superheated steam discharge pipe 70 is disposed inside the separation pipe 50 so as to face the end plate 54 with a space therebetween. The tip 71 is a communication part through which water vapor flowing between the inner peripheral surface of the separation pipe 50 and the outer peripheral surface of the superheated steam discharge pipe 70 is introduced into the superheated steam discharge pipe 70.
The superheated steam discharge pipe 70 functions as a third cylindrical body and a discharge pipe in the present invention.

The sheathed heater 60 is a heating unit that reheats the saturated water vapor supplied from the saturated water vapor supply pipe 10 to form superheated steam. The sheathed heater 60 is introduced into the main body 20 from the supply side end plate 30, and passes through the space between the inner peripheral surface of the main body 20 and the outer peripheral surface of the septum 50, and is opposite to the end plate 54 of the septum 50. A side end (opening end) 53 is arranged linearly. The heat generating portion 61 of the sheathed heater 60 is drawn into the inner diameter side of the separation pipe 50 from the opening end portion of the separation pipe 50 and is spirally wound around the outer peripheral surface of the superheated steam discharge pipe 70.
The heat generating portion 61 of the sheathed heater 60 is supported by a support 100 that protrudes from the outer peripheral surface of the superheated steam discharge pipe 70.
The support 100 attached in the axial direction on the outer surface of the superheated steam discharge pipe 70 ensures the vibration resistance of the sheathed heater 60, prevents accidents of damage to the sheathed heater 60, the superheated steam discharge pipe 70, and the separation pipe 50, and further communicates. This is a vibration proof and heating structure provided with heat transfer efficiency to the superheated steam flowing in the superheated steam discharge pipe 70.

With the above-described configuration, the saturated steam introduced from the saturated steam supply pipe 10 into the main body 20 is an end plate adjacent to the heat shield plate 110 disposed for the purpose of avoiding cooling of superheated steam flowing in the partition 50. 54, preheated in the outer space S1, heated in the communicating inner space S2, and finally heated in the communicating superheated steam discharge pipe 70, so that stable quality superheated steam by 1.5 passes can be generated.

That is, the saturated steam blown from the saturated steam supply pipe 10 into the container body 20 collides with the heat shield plate 110 and flows to the outer diameter side, and further collides with the inner peripheral surface of the container body 20, It flows in the outer space S <b> 1 between the inner peripheral surface of the main body 20 and the outer peripheral surface of the separation tube 50 toward the discharge side end plate 40. The water vapor that has reached the vicinity of the discharge side end plate 40 flows into the inner diameter side of the separation pipe 50 from the open end 53 of the separation pipe 50, and between the inner peripheral surface of the separation pipe 50 and the superheated steam discharge pipe 70. Flows in the inner space S <b> 2 toward the end 52 and the end plate 54. The steam that has reached the vicinity of the end 52 collides with the end plate 54 and is introduced into the end 71 of the superheated steam discharge pipe 70, and is discharged to the outside through the superheated steam discharge pipe 70.

In the middle of flowing as described above, the saturated steam is heated by the heat generating portion 61 of the sheathed heater 60 and changes from saturated steam to superheated steam. Further, the condensed water generated when the saturated water vapor is cooled by the low-temperature members immediately after the heat exchange with the outside air via the main body 20 or immediately after the operation starts is dropped along the inner peripheral surface of the main body 20 and the like. And stored in the lower part of the main body 20. The condensed water is heated during operation of the apparatus and discharged as superheated steam.

In the present embodiment, in order to ensure the maximum thermal efficiency without reducing the generated superheated steam temperature, the container is arranged so that the distance between the inlet of the saturated steam supply pipe 10 and the outlet of the superheated steam discharge pipe 70 is maximized. A heat shield plate 110 is disposed in the vicinity of both ends 21 and 22 of the body main body 20 and in the vicinity of the inlet of the saturated steam supply pipe 10 at a position facing the flow direction of the saturated steam, so that the superheated steam flows inward. The cooling of the pipe 50 is avoided and the overall thermal efficiency is improved.

Here, in this embodiment, when the flow rate of the saturated water vapor supplied from the saturated water vapor supply pipe 10 is large, the condensed water is entrained as a droplet in the air flow along the surface of the condensed water staying in the apparatus and discharged. It may be mixed in superheated steam in a liquid state. In order to prevent this, the supply amount of saturated water vapor is set so that the water vapor stream does not entrain droplets in consideration of the vapor flow velocity on the liquid surface of the condensed water.

According to the embodiment described above, the following effects can be obtained.
(1) By melting the solder with superheated steam having a temperature equal to or higher than the melting point of the solder, the element 8 can be easily peeled from the substrate 7 and the workpiece can be easily disassembled.
(2) Even if the element 8 is further hardened by varnish in addition to soldering or the like, the element 8 can be easily peeled off by heating, softening and melting the varnish with superheated steam. .
(3) The generation of harmful gas due to carbonization of varnish and the like can be suppressed by expelling the air in the heating container 6 with superheated steam and creating an atmosphere of high temperature and low oxygen.
(4) By using superheated steam as superheated steam, 539 kcal / kg of latent heat can be used for heating when the work is at a temperature of 100 ° C. or lower. The temperature can be raised and high speed processing is possible.
(5) When the conveyor 4 on which the workpiece is placed is vibrated by the vibrator 5 while exposing the workpiece to superheated steam, the element 8 can be dropped into the collection container 9 and collected.

Next, with reference to FIG. 5, an electric apparatus disassembling apparatus according to the second embodiment of the present invention will be described.
The decomposition apparatus 200 of this example includes a heating container part (loader part) 210 that accommodates and heats a workpiece, a superheated steam generator 250 that generates superheated steam, and a superheated steam generated in the apparatus as a heating container part 210. A shower head 260 to be introduced into the interior of the heating container section 210 and a transport means (conveyor) 270 for transporting the workpiece within the heating container section 210.

The heating vessel part 210 is a hollow box having a long side. A work inlet 211 is opened on one side surface (right side in FIG. 5) of the heating container 210, and a processed work outlet 212 is opened on the opposite side surface (left side in FIG. 5). ing. Between the entrance 211 and the exit 212, a conveyor 270 that conveys the workpiece is disposed. The conveyor 270 is wound between a sprocket 275 disposed on the upstream side (inlet side) and a drive roller 276 disposed on the downstream side (exit side), and circulates in a counterclockwise direction in FIG. . The conveyor 270 is a pair of chain conveyors in this example. In this example, the work is a plurality of substrates and is accommodated in the box-shaped holder 300 and conveyed. The holder 300 will be described later.

A roller conveyor 203 is disposed upstream of the inlet 211 of the heating container section 210 to convey the holder 300 containing the workpiece to the disassembling apparatus 200. The holder 300 is transferred from the roller conveyor 203 to the chain conveyor 270 by the loader mechanism 500. The loader mechanism 500 will be described later. On the other hand, a roller conveyor 205 that carries the holder 300 out of the disassembling apparatus 200 is disposed downstream of the outlet 212 of the heating container section 210. The holder 300 is transferred from the chain conveyor 270 to the roller conveyor 205 by an unloader mechanism. Since the unloader mechanism is publicly known, the description thereof is omitted.

The heating container section 210 is divided into a preheating chamber 215, a processing chamber 216, and a precooling chamber 217 in order from the upstream side in the transport direction by partition walls 210a and 210b.

The superheated steam generator 250 and an ejector 251 connected to the device 250 are disposed above the preheating chamber 215. As the superheated steam generator 250, for example, the superheated steam generator described with reference to FIGS. 2 to 3 can be used. A boiler 253 arranged outside the heating container is connected to the ejector 251. The boiler 253 heats water supplied from a water supply means (not shown) to generate saturated water vapor (100 ° C., about 0.1 MPa). This saturated water vapor is sent to the superheated steam generator 250 by the ejector 251 and reheated to generate superheated steam (about 280 ° C., about 0.1 MPA).

Above the processing chamber 216, a shower head 260 for introducing superheated steam generated by the superheated steam generator 250 is provided. As shown in FIG. 6, the shower head 260 includes a hollow flat rectangular parallelepiped main body portion 261 and a superheated steam introduction pipe 262 provided so as to protrude from the center of the upper surface of the main body portion 261. A plurality of steam outlets 263 are formed on the lower surface of the main body 261 in a dispersed manner. The distribution of superheated steam can be adjusted by the diameter and position of the discharge port 263. For example, the diameter and position of the discharge port 263 are adjusted according to the size and number of workpieces, and the steam flow path is formed so as to obtain an appropriate flow rate distribution. The main body 261 is arranged facing the upper path of the conveyor 270.

As shown in FIG. 7, a superheated steam supply pipe 255 extending from the superheated steam generator 250 is connected to the superheated steam introduction pipe 262 of the shower head 260. The superheated steam generated by the superheated steam generator 250 is jetted from the superheated steam supply pipe 255 to the work conveyed by the chain conveyor 270 via the shower head 260. A temperature sensor 257 is attached in the processing chamber 216, and detects the temperature inside the processing chamber 216. The controller 258 performs feedback control so that the temperature of the superheated steam generator 250 becomes a predetermined set temperature according to the temperature detected by the temperature sensor 257, and adjusts the heating power of the superheated steam generator 250 and the flow rate of the superheated steam. To do.

Further, a suction header 221 is disposed below the upper path of the conveyor 270 in the processing chamber 216 so as to face the shower head 260. The suction header 211 is connected to the ejector 251. The suction header 221 sucks waste superheated steam that has not been used for heating the workpiece and sends it to the ejector 251. This waste superheated steam is mixed with saturated steam supplied from the boiler 253, sent to the superheated steam generator 250, and reused.

Furthermore, a preheating heater 223 that gradually heats the processing chamber 216 before starting the superheated steam generator 250 is disposed below the processing chamber 216.

Note that suction headers 225 and 226 are also arranged above the preheating chamber 215 and the precooling chamber 217, respectively. These suction headers 225 and 226 are also connected to the ejector 251. Waste superheated steam existing in these chambers is also sucked from the suction headers 225 and 226, mixed with saturated steam supplied from the boiler 253, sent to the superheated steam generator 250, and reused.

Opposite exhaust headers 231 and 241 and intake headers 232 and 242 are arranged at the inlet 211 and the outlet 212 of the heating container section 210, respectively. The exhaust headers 231 and 241 and the intake headers 232 and 242 are connected by a line including heaters 233 and 243 and blowers 234 and 244 connected in series. At the inlet 211 and the outlet 212, the air heated by the heaters 233 and 243 is discharged from the exhaust headers 231 and 241 through the lines by the blowers 234 and 244, and is simultaneously sucked by the intake heads 232 and 242. Thereby, the air curtain by the air heated between both headers is comprised. These air curtains prevent outside air from leaking into the heating container section 210 and prevent leakage of superheated steam from the heating container section 210.

In the upper path of the chain conveyor 270 in the processing chamber 216, there is provided impact applying means for applying a mechanical impact to the conveyed holder. In this example, the impact applying means is a block 290 having a triangular cross section, and has an inclined surface 290a inclined upward from the upstream toward the downstream. The front end of the inclined surface 290a protrudes upward from the conveyance path of the chain conveyor 270. A plurality (three in the figure) of blocks 290 are arranged along the transport path.

The bottom wall 210c of the heating vessel section 210 is inclined downward from the preheating chamber 215 toward the precooling chamber 217. A drain port 227 for collecting condensed water is formed in the bottom wall of the precooling chamber 217. The drainage port 227 is connected to the boiler 253, and the collected condensed water is reused.

Next, with reference to FIG. 8, the holder in which a workpiece | work is accommodated is demonstrated.
The holder 300 includes a bottom plate 310 and a cover (not shown). The bottom plate 310 has a double structure of an inner plate 320 and an outer plate 330 having a rectangular planar shape. The width of the outer plate 330 is slightly wider than the inner plate 320. Side plates 331 rise from the left and right edges of the outer plate 330, and upper end portions 332 of both side plates 331 are bent inward so as to protrude above the inner plate 320. The inner plate 320 is suspended and elastically supported by a spring 335 from an upper end portion 332 of the side plate 331 of the outer plate 330. As shown in FIG. 8A, the spring 335 is externally fitted to a pin 336 extending through the upper end portion 332 of the side plate 331 of the outer plate 330 and the inner plate 320 in the vicinity of the four corners of the bottom plate 310. . With such a configuration, the inner plate 320 is elastically supported by the spring 335 with respect to the outer plate 330.

On the upper surface of the inner plate 320, a grip 321 for holding a plurality of (in this example, 10) substrates in a cantilever manner is formed. In this example, the substrate is erected in parallel with the transport direction. In addition, a large number of slits 323 are opened on one surface of the inner plate 320.

Guides 339 extending in the transport direction are fixed to the left and right edges of the lower surface of the outer plate 330. The guide 339 engages with each chain while the holder 300 is transported by the chain conveyor 270, and guides the guide 339 so that it does not shift from side to side. The guide 339 is a plate that is long in the conveyance direction, and the front end 341 in the traveling direction is bent downward. The front end 341 of the guide 339 engages the chain as will be described later.

A roller 343 that rotates in the transport direction is attached to a position on the lower surface of the outer plate 330 that is inward from the left and right edges. These rollers 343 protrude below the guide 339.
In addition, a large number of slits 345 are formed on one surface of the outer plate 330. The position of the slit 345 is shifted in the lateral direction with respect to the slit 323 of the inner plate 320.

The cover (not shown) covers the four sides of the bottom plate 310 and has an upper surface opened.

Next, the loader mechanism 500 that delivers the holder 300 to the conveyor 270 will be described with reference to FIGS.
The loader mechanism 500 delivers the holder 300 conveyed by the roller conveyor 203 to the chain conveyor 270. As shown in FIG. 9, the roller conveyor 203 is disposed so as to be inclined downward toward the upstream end of the chain conveyor 270. The loader mechanism 500 is disposed at the downstream end on both sides of the roller conveyor 203 and includes a link arm 510 and a guide arm 520 connected to the link arm 510.

As shown in FIG. 10, the link arm 510 has a long arm 511 and a short arm 515. The center of both arms 510 is rotatably attached to the base of the roller conveyor 203. A counterweight 512 is attached to the distal end of the long arm 511 and biases the link arm 510 to rotate clockwise.
A stopper piece 516 standing upright from the arm 515 extends in the vicinity of the center of the short arm 515. The link arm 510 has an upper position (indicated by a solid line in FIG. 10) in which the stopper piece 516 protrudes upward from the conveyance surface of the roller conveyor 203, and a lower position (indicated by an imaginary line in FIG. 10) in which the stopper piece 516 is retracted below the same surface. Rotate between.

The guide arm 520 is rotatably supported by a pin on the base of the roller conveyor 203 at a substantially central position. One end of the guide arm 520 is rotatably attached to the tip of the short arm 515 of the link arm 510 by a pin 521. When the link arm 510 is rotated from the upper position to the lower position, the guide arm 520 is tilted downward (shown by a solid line in FIG. 10) toward the chain conveyor 270 side, and a substantially horizontal position (in an imaginary line in FIG. 10). Rotate between

The pin 521 connecting the short arm 515 and the guide arm 520 is urged downward by a wire 525 with variable tension.

In addition, as shown in FIGS. 9 and 10, attachments 271 standing upright from the conveyance surface are attached to the chain conveyor 270 at predetermined intervals. The attachment 271 is provided with a pin 272 extending in a direction orthogonal to the transport direction. The front end 341 of the guide 339 of the holder 300 is engaged with the pin 272.

In the unloaded state shown by the solid line in FIG. 10, the link arm 510 is urged to rotate clockwise by the counterweight 512, and the stopper piece 516 of the short arm 515 is moved upward from the conveying surface of the roller conveyor 203. Waiting in the upper position sticking out.
When the holder 300 is conveyed by its own weight on the roller conveyor 203, the front surface of the holder 300 hits the stopper piece 516 and pushes the stopper piece 516 forward. Then, the link arm 510 starts to rotate counterclockwise against the weight 512 against the urging force. Here, an appropriate downward biasing force is applied to the pin 521 connecting the short arm 515 and the guide arm 520 by the wire 525, so the link arm 510 rotates smoothly. As a result, the stopper piece 516 is retracted downward from the conveyance surface, and the guide arm 520 is rotated to the horizontal position. Then, the holder 300 moves away from the stopper piece 516, and the tip 541 of the guide 399 is supported by the guide arm 520 as indicated by the imaginary line in FIG.

Then, at the timing when the front end 341 of the guide 399 of the holder 300 reaches the front end of the guide arm 520, the pin 272 of the attachment 271 of the circulating chain conveyor 270 engages with the front end 341 of the guide 399. As a result, as shown in FIG. 9, the holder 300 is transferred from the roller conveyor 203 to the chain conveyor 270.

Next, a workpiece disassembling operation using the disassembling apparatus will be described with reference to FIG.
First, superheated steam is generated by the superheated steam generator 250. As an example, the temperature of the superheated steam is about 280 ° C., and the pressure is atmospheric pressure (about 0.1 MPA). The generated superheated steam is jetted from the shower head 260 into the processing chamber 216. As a result, the inside of the processing chamber 216 is purged with air and filled with superheated steam, and has a high temperature and low oxygen atmosphere. Here, the temperature of the superheated steam is reduced to about 270 ° C. due to the influence of heat dissipation loss. Further, since it is released to the atmosphere, the pressure is substantially equal to the atmospheric pressure (about 0.1 MPA). The oxygen concentration in the processing chamber 216 is as low as about 1/20 of air.
The processing chamber 216 is heated by the preheater 223 before the superheated steam generator 250 is activated. As a result, the start-up temperature condition of the superheated steam generator 250 is adjusted, and the heat loss from the surface of the apparatus during operation is compensated.

In addition, at the inlet 211 and the outlet 212 of the heating container part 210, leakage of outside air is prevented by an air curtain.

Further, since the superheated steam generator 250 is disposed in the preheating chamber 215, the chamber 215 is heated by heat generated from the device 250 or the like. As an example, the preheating chamber 215 is heated to about 100 ° C. On the other hand, the precooling chamber 217 is maintained at 100 ° C. or lower.

The conveyor 270 is circulating. Then, the holder 300 in which the workpiece is accommodated is transferred from the roller conveyor 203 to the chain conveyor 270 by the loader mechanism 500. The holder 300 transferred to the chain conveyor 270 is preheated from the inlet 211 of the heating container section 210 through the air curtain and into the preheating chamber 215. Thereafter, the work that is transferred to the processing chamber 216 and accommodated in the holder 300 is exposed to superheated steam ejected from the shower head 260. As a result, the bonding member (conductive substance (alloy)) that fixes the component to the substrate, such as solder or brazing material, is in a molten state, the bonding force between the component and the substrate is weakened, and is easily separated from the substrate. .

When the holder 300 reaches the block 290, a roller 343 (see FIG. 8B) provided on the lower surface of the holder 300 rides on the slope 290a of the block 290, and the guide 339 is a pin 272 of the chain conveyor 270 (see FIG. 10). ) Eventually, the roller 343 moves away from the front edge of the slope 290a, the holder 300 falls on the chain conveyor 270, and the guide 339 engages with the chain conveyor 270. Due to this drop, an impact is applied to the holder 300, and the work housed in the holder 300 receives vibration. This vibration further weakens the bonding force between the component and the substrate. In addition, after the fall, in the holder 300, the inner plate 320 on which the workpiece is supported in a cantilever manner is further vibrated according to the attenuation of the spring 335. Further, since the workpiece is supported in a cantilever manner, the workpiece vibrates in the left-right direction in FIG. 8B with the grip 321 as a fulcrum. These vibrations further weaken the bonding force between the component and the board.

The holder 300 receives vibration every time it passes through the plurality of blocks 290, and finally the component is separated from the substrate. The separated parts fall from the substrate and accumulate on the inner plate 320 of the holder 300. On the other hand, the molten joining member falls downward from the slit 323 of the inner plate 320 and accumulates on the outer plate 330.

Thereafter, the holder 300 is conveyed to the pre-cooling chamber 217 and cooled to a temperature of about 100 ° C. or lower. And it is carried out from the heating container part 210 through the air curtain of the exit 212, and is transferred from the chain conveyor 270 to the roller conveyor 205 by an unloader mechanism (not shown).

Further, always during operation, excessive superheated steam is recovered in the superheated steam generator 250 by the ejector 251 from the waste superheated steam suction headers 221, 225, and 226 installed in the heating container unit 210. This superheated steam is mixed with saturated steam supplied from the boiler 253 and reused.
Further, after the operation is completed, the condensed drain generated in the heating container unit 210 is recovered from the drain port 227. This drain is sent to the boiler 253 and reused.

Next, experimental results for obtaining the optimum operating conditions (temperature, time, oxygen concentration) of the apparatus will be described with reference to FIGS.
First, the relationship between the temperature in the processing chamber and the workpiece separation yield will be described with reference to the graph of FIG. The vertical axis of the graph indicates the separation yield (%), and the horizontal axis indicates the temperature (° C.) in the processing chamber. The separation yield is the ratio of the number of separated parts to the total number of parts.
Since the melting point of the solder as the joining material is about 240 ° C. at the maximum, the separation yield when the temperature is 250 ° C. or higher was determined. As shown in the graph, when the temperature is around 250 ° C., the separation yield is 70 to 75%, but when the temperature is 270 ° C. or higher, a high separation yield of 90% or higher can be obtained.
As a result, the optimum temperature condition can be set to 270 ° C.

Next, the relationship between the heating time and the workpiece separation yield will be described with reference to the graph of FIG. The vertical axis of the graph represents the separation yield (%), and the horizontal axis represents the heating time (minutes). The temperature in the processing chamber was 270 ° C.
As shown in the graph, when the heating time is 3 minutes, the separation yield is about 88%, but when it is 4 minutes or more, it is slightly increased to about 90%.
As a result, the optimum heating time was 5 minutes.

Next, the relationship between the steam flow rate in the processing chamber and the workpiece separation yield will be described with reference to the graph of FIG. The vertical axis of the graph represents the separation yield (%), and the horizontal axis represents the steam flow rate (kg / h).
As shown in the graph, the separation yield is about 80% when the steam flow rate is 6 kg / h, but about 90% when the steam flow rate is 8 kg / h or more.
As a result, the steam flow rate was 8 kg / h.

Next, the oxygen concentration distribution in the processing chamber will be described with reference to the graph of FIG. The vertical axis of the graph is the oxygen concentration (%), and the horizontal axis is the measurement point. The measurement points were 20 places in the space of the processing chamber.
As shown in the graph, the oxygen concentration is 0.5 to 1.4%, which is very low. For this reason, it is thought that the oxidation effect with respect to a heating target object (workpiece | work) and the combustibility of a target object can be reduced significantly.

Finally, the separation yield under optimum operating conditions based on the above results is shown.
FIG. 15 is a table showing experimental results under optimum operating conditions.
As a result of four experiments conducted under optimum operating conditions (temperature: 270 ° C., heating time: 5 minutes, steam flow rate: 8 kg / h), a high separation yield of 89 to 92% was obtained.

According to the second embodiment described above, the following effects can be obtained in addition to the effects obtained in the first embodiment.
(1) As a result of obtaining the optimum operating conditions of the superheated steam generator, a high separation yield of about 90% can be obtained.
(2) Since it can be processed at a high temperature of about 280 ° C. necessary for melting the joining member under atmospheric pressure, no high-pressure resistance measures are required and safety is high. Further, since the temperature range of the superheated steam can be freely set in a wide range, the melting temperature range can be widened, so that most of the commonly used bonding materials can be melted.
(3) Since a high boiling point heating medium or organic solvent is not used as the heating means, and superheated steam at atmospheric pressure is used, safety is high, environmental problems do not occur, and running costs are low.
(4) Exclude air with superheated steam and process in a low oxygen concentration atmosphere where the oxygen concentration is about 1/20 of that of air, so it is possible to suppress the generation of organic gas associated with thermal decomposition of parts and resin-based joining members .

(5) Since the preheating chamber is provided in the heating container and the superheated steam generator is disposed in the preheated chamber, the preheated chamber can be heated by the heat generated from the superheated steam generator, and no other heating source is required.
(6) Since a pre-cooling chamber is provided in the heating container and the workpiece is cooled to a certain extent before being carried out, it is possible to prevent accidents such as generation of odors or touching the heated workpiece.
(7) Since the header for sucking the waste superheated steam is provided, the waste superheated steam can be reused.
(8) Since the condensed drain is recovered and reused, it is safe in terms of environment.

(Modification)
The present invention is not limited to the embodiments described above, and various modifications and changes are possible, and these are also within the technical scope of the present invention.
(1) In the embodiment, the electric device to be disassembled is a printed board on which various components are mounted by, for example, soldering and varnish, but the electric device to be disassembled according to the present invention is not limited to this.
(2) Although the disassembling apparatus of the embodiment sprays superheated steam while conveying the workpiece on the conveyor, the present invention is not limited to this, and can also be applied to an apparatus that performs badge type processing.
(3) The superheated steam generator of the embodiment has, for example, a triple pipe structure including a main body, a separation pipe, and a superheated steam discharge pipe. A superheated steam generator having a multi-tube structure can also be applied. In this case, the first cylindrical body can be inserted into another cylindrical body, or another cylindrical body can be inserted into the third cylindrical body. In this case, the gas flow path has a configuration of two or more passes. In the present invention, a superheated steam generator other than the one having such a multiple tube may be used.
(4) In the superheated steam generator of the embodiment, for example, a sheathed heater is applied as the heating means, but the heating means is not limited to this, and for example, a heating means other than the sheathed heater such as IH may be used. Good.
(5) In the embodiment, the steam for melting the solder or the like is, for example, water vapor. However, the present invention is not particularly limited to this, and the electrical equipment is decomposed using superheated steam made of other substances. Also good.

DESCRIPTION OF SYMBOLS 1 Boiler 2 Superheated steam generator 3 Shower head 4 Conveyor 5 Vibrator 6 Heating container 7 Substrate 8 Element 9 Recovery container 10 Saturated steam supply pipe 11 End part 20 Main body 21 and 22 End part 23 Flat part 24, 25 Protrusion part 30 Supply side end plate 31 Opening 40 Discharge side end plate 41 Opening 50 Separation pipe 51 Stay 52, 53 End part 54 End plate 60 Sheath heater 61 Heating part 70 Superheated steam discharge pipe 71 Tip part 100 Support 110 Heat shield plate S1 Outer space S2 Inner space 200 Disassembling apparatus for electric equipment 210 Heating container section 203 Roller conveyor 205 Roller conveyor 211 Inlet 212 Outlet 215 Heating chamber 216 Processing chamber 217 Precooling chamber 221, 225, 226 Suction header 223 Preheating heater 227 Drain port 231, 241 Exhaust header 232, 242 Intake header 233, 243 Heater 234, 244 Air blower 250 Superheated steam generator 251 Ejector 253 Boiler 255 Superheated steam supply pipe 257 Temperature sensor 258 Controller 260 Shower head 261 Main body part 262 Superheated steam introduction pipe 263 Steam outlet 270 Chain conveyor 271 Attachment 272 Pin 275 Sprocket 276 Drive roller 290 Impact applying means (block)
300 Holder 310 Bottom plate 320 Inner plate 321 Grip 323 Slit 330 Outer plate 331 Side plate 332 Upper end 335 Spring 336 Pin 339 Guide 341 Front end 343 Roller 345 Slit 500 Loader mechanism 510 Link arm 511 Long arm 515 Short arm 512 Counter weight 5 Counter Guide arm 521 pin 525 wire

Claims (19)

1. A method of disassembling an electrical device that separates a component fixed on a substrate by a bonding material that melts by heating to a melting point or higher, from the substrate,
   A method for disassembling an electric device, wherein the bonding material is heated using superheated steam.
2. The component is fixed on the substrate by a resin material,
   2. The method for decomposing an electric device according to claim 1, wherein the superheated steam is substantially at atmospheric pressure at least at a heating portion of the component and has a temperature equal to or higher than a softening point of the resin material.
3. The method for disassembling an electric device according to claim 1 or 2, wherein the substrate and the component are treated with the superheated steam in a low oxygen atmosphere.
4. The method of disassembling an electric device according to any one of claims 1 to 3, wherein the superheated steam is superheated steam.
5. The decomposition of the electric device according to any one of claims 1 to 4, wherein the substrate is vibrated when the substrate and a component fixed on the substrate are exposed to superheated steam. Method.
6. An apparatus for decomposing an electric device for separating a component fixed on a substrate by a bonding material that is melted by heating to a melting point or higher, from the substrate,
   A heating container portion for accommodating the substrate and the component fixed on the substrate;
   A superheated steam generator for introducing superheated steam having a temperature equal to or higher than the melting point of the bonding material into the heating container part;
   An apparatus for disassembling electrical equipment, comprising:
7. The component is fixed on the substrate by a resin material,
   The apparatus for decomposing an electric device according to claim 6, wherein the superheated steam is at an atmospheric pressure at least at a heating portion of the component and at a temperature equal to or higher than a softening point of the resin material.
8. The apparatus for disassembling an electric device according to claim 6 or 7, wherein the inside of the heating container is made into a low oxygen atmosphere by introducing the superheated steam.
9. The apparatus for disassembling an electric device according to any one of claims 6 to 8, wherein the superheated steam is superheated steam.
10. The apparatus for disassembling an electric device according to any one of claims 6 to 9, further comprising a vibrating unit that vibrates the substrate in the vicinity of the heating container.
11. In the heating container portion, at least one of a preheating chamber for gradually heating the substrate or a precooling chamber for gradually cooling the substrate is provided,
    The apparatus for disassembling an electric device according to any one of claims 6 to 10, wherein
12. The apparatus for disassembling an electric device according to claim 11, wherein the superheated steam generator is disposed in the preheating chamber.
13. The preheating heater is installed in the said heating container part, The decomposition | disassembly apparatus of the electrical equipment of any one of Claim 6-12 characterized by the above-mentioned.
14. An air curtain for preventing leakage of outside air to the heating container part is provided at an inlet of the heating container part to which the substrate is introduced and an outlet from which the substrate is carried out. The apparatus for disassembling an electric device according to any one of claims 6 to 13.
15. The apparatus for disassembling an electric device according to any one of claims 6 to 14, wherein an impact applying mechanism for applying a mechanical impact to the substrate is provided in the heating container portion.
16. The apparatus for disassembling an electric device according to any one of claims 6 to 15, wherein superheated steam recovery means is provided in the heating container section.
17. A method for disassembling an electric device for separating a component fixed on a substrate by a bonding material having a melting point lower than that of a member to be bonded, from the substrate,
    An electrical apparatus comprising: separating the component from the substrate by exposing the substrate and the component fixed on the substrate to superheated steam having a temperature equal to or higher than a melting point of the bonding material to melt the bonding material. Disassembly method.
18. An apparatus for decomposing an electric device for separating a component fixed on a substrate by a bonding material having a melting point lower than that of a member to be bonded from the substrate,
    A container portion for accommodating the substrate and the component fixed on the substrate;
    A superheated steam generator for introducing superheated steam having a temperature equal to or higher than the melting point of the bonding material into the container portion.
19. The superheated steam generator includes a first cylindrical body, an introduction pipe for introducing steam into the first cylindrical body from one end of the first cylindrical body, and the first cylinder. A second cylindrical body that is inserted into the cylindrical body, communicates with the first cylindrical body at an end opposite to the introduction pipe line, and is inserted into the second cylindrical body; A third cylindrical body communicating with the second cylindrical body at an end opposite to a side where the first cylindrical body and the second cylindrical body communicate with each other; and the third cylinder 19. A discharge pipe for discharging superheated steam from the state body, and a heating means provided in a gas flow path from the introduction pipe to the discharge pipe for heating the steam. The disassembly apparatus of the electric equipment as described in.

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