WO2005068123A1 - Reflow furnace - Google Patents

Reflow furnace Download PDF

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Publication number
WO2005068123A1
WO2005068123A1 PCT/JP2005/000004 JP2005000004W WO2005068123A1 WO 2005068123 A1 WO2005068123 A1 WO 2005068123A1 JP 2005000004 W JP2005000004 W JP 2005000004W WO 2005068123 A1 WO2005068123 A1 WO 2005068123A1
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WO
WIPO (PCT)
Prior art keywords
reflow furnace
flux
filter
fume
furnace
Prior art date
Application number
PCT/JP2005/000004
Other languages
French (fr)
Japanese (ja)
Inventor
Issaku Sato
Original Assignee
Senju Metal Industry Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Senju Metal Industry Co., Ltd. filed Critical Senju Metal Industry Co., Ltd.
Priority to JP2005516999A priority Critical patent/JP4665763B2/en
Publication of WO2005068123A1 publication Critical patent/WO2005068123A1/en

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K1/00Soldering, e.g. brazing, or unsoldering
    • B23K1/008Soldering within a furnace

Definitions

  • the present invention relates to a reflow furnace for soldering a printed board and a surface mount component with a solder paste.
  • Solder paste used for soldering in a reflow furnace is a viscous soldering material composed of powder solder and paste-like flux.
  • SMD surface mounted device
  • a reflow furnace for soldering a printed circuit board includes a preheating zone, a main heating zone, and a cooling zone in order from the entrance to the exit, and the conveying device travels along these zones. ing.
  • the printed circuit board passes through the preheating zone, the main heating zone, and the cooling zone while being transported by the transport device, and is subjected to soldering.
  • the solvent contained in the solder paste is evaporated by heating the printed circuit board to 100 to 150 ° C, and the solvent is heated by the high-temperature heating in the main heating zone in the next process.
  • the printed board or SMD can be alleviated against heat shock caused by high-temperature heating, and the activation of the flux can be activated. Remove things and dirt to clean
  • the temperature is equal to or higher than the melting temperature of the powder solder in the solder paste. Then, the solder paste powder solder applied to the printed circuit board is melted, and the solder spreads between the soldered part of the printed board and the SMD electrode.
  • the cooling zone blows cold air to the printed circuit board heated to a high temperature in the main heating zone to solidify the molten solder so that the soldered portion does not collapse due to vibration or impact. Cools quickly to eliminate thermal effects
  • an activator is an essential component in the solder paste flux.
  • the activator has a function of reducing and removing the oxide to clean even if the soldered portion of the printed circuit board or the SMD electrode is heated at a high temperature and oxidized during soldering.
  • the higher the caloric content the better the solderability and the less defects.
  • the flux residue adhering to the soldered part absorbs moisture and becomes an electrolyte, corroding the soldered part and lowering the insulation resistance. . For this reason, printed circuit boards used for communication equipment and computers that require reliability have been washed and removed of flux residues after soldering using solder paste.
  • the non-cleaning solder paste has a small amount of added activator, when soldering is performed in an atmospheric reflow oven where oxygen is present, oxides of the soldered portion that have been oxidized during heating are completely returned. Cannot be removed. Therefore, the non-cleaning solder paste cannot sufficiently reduce the oxidized powder solder that can be removed by force if soldering failure occurs, and generates fine solder balls. If soldering is performed in a reflow furnace in an inert atmosphere without oxygen even in a non-cleaning solder paste while applying force, the soldered portion will not be oxidized during heating, resulting in poor soldering and small solder balls. Soldering without generation is possible.
  • the inert atmosphere reflow furnace has been widely used in the electronic equipment industry.
  • an inert gas flows into a furnace from a gas cylinder or an inert gas generator installed outside, but a new inert gas always flows in the furnace.
  • the running cost increases due to the large consumption of the inert gas. Therefore, the inert gas in the furnace is purified and reused. Purification of the inert gas is to remove solvent vapor and flux fume generated from the solder paste during soldering.
  • Patent Document 1 JP-A 1-305594
  • Patent Document 2 JP-A No. 4-13474
  • Patent Document 3 JP-A-4-46667
  • Patent Document 4 JP-A-4-251661
  • Patent Document 5 JP-A-5-50218
  • Patent Document 6 JP-A-9-307224
  • Patent Document 7 JP-A-10-335807
  • Patent Document 8 Japanese Utility Model Publication No. 5-93079
  • An object of the present invention is to provide a reflow furnace capable of efficiently removing flux 'fumes from the gas force inside the furnace led out of the furnace.
  • the present inventors have found that flux 'fume is liquid at the time of dew condensation, paper absorbs and cleans liquid, and flux' fume adheres to the wall surface of the slot when passing through the slot.
  • the present invention has been completed by focusing on the easiness of the method.
  • the present invention relates to a flux and a fume removal apparatus for extracting a flux 'fume generated in a reflow furnace together with an inert gas to a pipe outside the reflow furnace and installing the flux' fume removal apparatus outside the reflow furnace.
  • a reflow furnace for returning inert gas to the reflow furnace again a block filter made of paper having a large number of long holes is formed in a part of the filter of the removing device.
  • a reflow furnace characterized by being installed so as to face the flow direction.
  • the flux fume is cooled while the gas passes through the long holes, and the flux fume is condensed and adheres to the long holes.
  • Flatus fumes are liquid when condensed, but the filter is made of V or paper, which easily penetrates the liquid, so the liquid flux fume instantly soaks into the paper filter. Therefore, most of the flux-fume-containing gas that has passed through the removal device is removed by the filter.
  • the paper filter the liquid flux Fume fumes continuously permeate, so that the permeation effect lasts for a long time.
  • Paper filters can be incinerated, and the substances that have permeated the replaced used filters are pine resin, thixotropic agents, solvents, etc. in the flux, so there is no pollution problem when incinerated. . Therefore, the post-processing of the used paper filter becomes very easy.
  • the elongated hole is directed in the gas flow direction.
  • a slot is oriented in the direction of gas flow when the slot is inclined or bent so that it can easily flow from the inlet to the outlet. It is parallel or zigzag.
  • the long hole is formed in a zigzag shape, the length of the long hole becomes longer, so that the flux fume is more easily attached.
  • the block-shaped filter may be divided into a plurality of pieces in the long hole direction and stacked.
  • the position of the long hole shifts in the stacking part, so that the gas flow velocity changes abruptly at that part, and the flux and fume tend to adhere to the part where the gas flow velocity changes suddenly, and the flux ⁇ The fume removal rate is improved.
  • FIG. 1 is a front cross-sectional view of the reflow furnace of the present invention
  • FIG. 2 is a plan view illustrating a suction portion of the flux fume in the reflow furnace
  • FIG. 3 is a cross-sectional view taken along line A--A of FIG. 2
  • FIG. 5 is a front sectional view of the filter
  • FIG. 6 is a plan view of a filter used in the present invention
  • FIG. 7 is a plan view of another filter used in the present invention
  • FIG. 8 is a front sectional view of a filter used in the present invention
  • FIG. 9 is a front sectional view of another filter used in the present invention.
  • a tunnel 2 is formed in the longitudinal direction.
  • a preheating zone 5 a main heating zone 6, and a cooling zone 7 are sequentially formed with the inlet 3 side force and the outlet 4 side force. I'm in love.
  • Hot air blowout type heaters 8 are installed in the upper and lower portions of the preheating zone 5 and the main heating zone 6, and coolers 9 and 9 are installed in the upper and lower portions of the cooling zone 7.
  • a pair of conveyors 10, 10 travels from the entrance 3 to the exit 4. ing.
  • the conveyor 10 runs on rails 11.
  • a large number of pins 12 project from the pair of transport conveyors 10 in opposite directions, and a printed circuit board P is placed on the pins and transported in the tunnel 2.
  • An inert gas supply port 13... Is provided in the hot air blowout type heater 8 and an appropriate portion of the cooler 9, and the inert gas supply port is connected to an inert gas supply source (not shown) outside the reflow furnace.
  • an inert gas supply source not shown outside the reflow furnace.
  • it is connected to a nitrogen gas cylinder or a nitrogen gas tank.
  • a square suction pipe 14 is attached along the rail 11 of the conveyor! /
  • the suction pipe has a plurality of suction ports 15 formed on the inside, that is, on the side of the printed circuit board to be conveyed.
  • Outlet pipes 16 and 16 are connected to both ends of the suction pipe 14, and the outlet pipes are connected to a removing device 17 that removes the flux fume.
  • the flux / fume removing device 17 is composed of a filter part 18 and an aggregating part 19, and the filter part 18 and the aggregating part 19 are connected by a removing nove 20.
  • the filter part 18 has a filter placed inside, and absorbs and removes most of the flux 'fume sucked from the suction pipe 14 by the filter.
  • the aggregating section 19 is provided with a blower (not shown) and water-cooled fins inside. The blower sucks the gas through the suction pipe 14, the outlet pipe 16, the filter part 18, and the removal pipe 20, and contacts the flux fume that cannot be adsorbed and removed by the filter part 18 to the water-cooled fins. Here, they are collected by aggregation and adhesion.
  • the filter part 18 has a box shape, and a door 21 that can be opened and closed is installed on the front surface thereof.
  • the above-mentioned lead pipe 16 is connected to the upper part of the filter part 18, and the removal pipe 20 is connected to the lower part of the lateral surface.
  • a cradle 22 having a shelf on the lower side is erected, and three paper block filters 23 are stacked and mounted on the cradle. !
  • a number of long holes 24 through which gas can pass are penetrated inside the block-shaped filter 23.
  • the long hole 24 is open in the direction of gas flow, that is, in the direction of the removal pipe 20 from the outlet nove 16 through which gas flows when stored in the filter part 18.
  • the shape of the long hole is not limited, but is, for example, a corrugated shape, a cylinder, a honeycomb, or the like.
  • Figure 6 shows corrugated paper 25 sandwiched between many papers.
  • the formed elongated hole 24 is inserted from the upper part to the lower part.
  • Fig. 7 shows the paper formed continuously with a cylindrical paper cylinder 26, and the slot 24 is also inserted from the upper part to the lower part.
  • the long holes 24 of the block-shaped filter 23 are parallel to the gas flow direction as shown in FIG. 8, or zigzag in the gas flow direction as shown in FIG. And so on.
  • Outflow pipes 27, 27 are connected to the outlet of the aggregating section 19, and the outflow pipes are connected to blowout nozzles 28, which are installed at the upper and lower portions of the inlet 3 and the outlet 4 of the tunnel 2.
  • the printed circuit board P is placed on the conveyor 10 from the entrance 3 and is carried into the tunnel 2.
  • the printed circuit board P is heated by the hot air blowout type heater 8 in the pre-heating zone 5, where the solvent in the solder paste is evaporated, and pre-heating is performed to protect the printed circuit board and electronic components from heat shock. .
  • the solvent evaporated here is sucked into the suction port 15 opened near the conveyor 10 as shown by arrows in FIGS.
  • the printed circuit board P preheated in the preheating zone 5 is then conveyed to the main heating zone 6, where it is heated to a high temperature to melt the powder solder in the solder paste and wet the soldered portion. spread. At this time, rosin, activator, thixotropic agent and the like in the solder paste become flux 'fumes, and the flux' fumes are also sucked into the suction port 15 opened near the conveyor 10.
  • the vaporized solvent or flux fume sucked into the suction port 15 also enters the filter part 18 of the removing device through the outlet pipe 16 and the suction pipe 14. Since the block-shaped filter 23 accommodated in the filter part 18 has a large number of long holes 24, the flux 'fume passes through these many long holes. In the process of passing through the elongated hole, the flux fume is cooled on the wall surface of the elongated hole 24 and forms dew condensation, and adheres to the wall surface. At this time, since the block filter is made of paper, dew condensation on the wall surface of the long hole instantly permeates the wall surface of the long hole.
  • the flux fume that passes through the long hole of the block filter is condensed one after another and is removed by seeping into the block filter. It is. Filters with a large amount of flux fumes are removed from a part of the filter and discarded or incinerated.
  • the flux / fume that could not be completely removed by a part of the filter is transferred to the aggregation section 19 by the removal pipe 20, where it contacts the water-cooled fins, aggregates, and is completely removed.
  • the flux 'fume adhering to the water-cooled fins is collected in the lower container and disposed as waste.
  • the inert gas from which the flux / fume has been almost removed by the removal device is returned to the reflow furnace 1 from the outflow pipe 27.
  • FIG. 1 is a front sectional view of the reflow furnace of the present invention.
  • FIG. 6 is a plan view of a filter used in the present invention.
  • FIG. 7 is a plan view of another filter used in the present invention.
  • FIG. 8 is a front sectional view of a filter used in the present invention.
  • FIG. 9 is a front sectional view of another filter used in the present invention.
  • the reflow furnace of the present invention can be applied to any heater such as a far-infrared irradiation type and a laser-irradiation type in addition to a hot air blowing type heater.

Abstract

[PROBLEMS] In a conventional reflow furnace in which flux fume produced in the furnace is led to the outside for purification, the flux fume is not sufficiently removed, and the flux fume remains in an inert gas circulated in the furnace. As a consequence, in such a conventional reflow furnace, flux fume tends to adhere to a furnace wall, and the adhered flux fume sometimes drops to soil a printed circuit board. [MEANS FOR SOLVING PROBLEMS] In a reflow furnace of the invention, flux fume produced in the furnace is led to the outside, and almost the entire flux fume is removed at a filter section as a removing device. In the filter section is installed a paper block-like filter having a large number of long holes, and the long holes are oriented in the direction of flow of the flux fume.

Description

リフロー炉  Reflow furnace
技術分野  Technical field
[0001] 本発明は、プリント基板と表面実装部品をソルダペーストではんだ付けするリフロー 炉に関する。  The present invention relates to a reflow furnace for soldering a printed board and a surface mount component with a solder paste.
背景技術  Background art
[0002] リフロー炉でのはんだ付けに用いるソルダペーストは、粉末はんだとペースト状フラ ックスからなる粘調性のあるはんだ付け材料である。このソルダペーストを用いてプリ ント基板と表面実装部品(Surface Mounted Device : SMD)のはんだ付けを行う場合、 プリント基板のはんだ付け部と同一箇所に穴が穿設されたメタルマスクを、穴とはん だ付け部が一致するようにしてプリント基板の上に載置した後、メタルマスクの上にソ ルダペーストを置き、該ソルダペーストをスキージーで搔いて、ソルダペーストをメタル マスクの穴の中に充填する。そしてメタルマスクをプリント基板力 上方に移動させる と、ソルダペーストがプリント基板のはんだ付け部に印刷塗布される。その後、プリント 基板の塗布部に所定の SMDを搭載してから、該プリント基板をリフロー炉の搬送装置 でリフロー炉内に搬送して、はんだ付けを行う。  [0002] Solder paste used for soldering in a reflow furnace is a viscous soldering material composed of powder solder and paste-like flux. When soldering a printed circuit board and a surface mounted device (SMD) using this solder paste, a metal mask with holes drilled in the same place as the soldered part of the printed circuit board is used. After placing the solder paste on the printed circuit board so that the soldered parts match, place the solder paste on the metal mask, apply the solder paste with a squeegee, and fill the holes in the metal mask with the solder paste. I do. Then, when the metal mask is moved upward on the printed circuit board, the solder paste is printed on the soldered portion of the printed circuit board. After that, a predetermined SMD is mounted on the application part of the printed circuit board, and the printed circuit board is transferred into the reflow furnace by a transfer device of the reflow furnace, and soldering is performed.
[0003] プリント基板のはんだ付けを行うリフロー炉は、入口から出口方向に向力つて順次、 予備加熱ゾーン、本加熱ゾーン、冷却ゾーンとなっており、これらのゾーンに沿って 搬送装置が走行している。プリント基板は、搬送装置で搬送されながら、予備加熱ゾ ーン、本加熱ゾーン、冷却ゾーンを通過してはんだ付けがなされる。  [0003] A reflow furnace for soldering a printed circuit board includes a preheating zone, a main heating zone, and a cooling zone in order from the entrance to the exit, and the conveying device travels along these zones. ing. The printed circuit board passes through the preheating zone, the main heating zone, and the cooling zone while being transported by the transport device, and is subjected to soldering.
[0004] リフロー炉の予備加熱ゾーンは、プリント基板を 100— 150°Cに加熱することによりソ ルダペースト中に含まれている溶剤を蒸発させるとともに、次工程の本加熱ゾーンで の高温加熱で溶剤が突沸するのを防!、だり、プリント基板や SMDを高温加熱でのヒ ートショックに対して緩和させたり、さらにはフラックスの活性作用を活発にさせて、は んだ付け部や SMDの電極に付着していた酸ィ匕物や汚れを除去して清浄にしたりする  [0004] In the preheating zone of the reflow oven, the solvent contained in the solder paste is evaporated by heating the printed circuit board to 100 to 150 ° C, and the solvent is heated by the high-temperature heating in the main heating zone in the next process. To prevent bumping! In addition, the printed board or SMD can be alleviated against heat shock caused by high-temperature heating, and the activation of the flux can be activated. Remove things and dirt to clean
[0005] 本加熱ゾーンは、温度がソルダペースト中の粉末はんだの溶融温度以上となって おり、プリント基板に塗布されたソルダペーストの粉末はんだを溶融させて、プリント基 板のはんだ付け部と SMDの電極間にはんだを行きわたらせる。 [0005] In this heating zone, the temperature is equal to or higher than the melting temperature of the powder solder in the solder paste. Then, the solder paste powder solder applied to the printed circuit board is melted, and the solder spreads between the soldered part of the printed board and the SMD electrode.
[0006] 冷却ゾーンは、本加熱ゾーンで高温に加熱されたプリント基板に冷風を吹き付ける ことにより、溶融したはんだを固化させて振動や衝撃ではんだ付け部が崩れないよう にし、またプリント基板や SMDを急速に冷やして熱力 受ける影響をなくすようにする [0006] The cooling zone blows cold air to the printed circuit board heated to a high temperature in the main heating zone to solidify the molten solder so that the soldered portion does not collapse due to vibration or impact. Cools quickly to eliminate thermal effects
[0007] ところでソルダペーストのフラックスには、活性剤が不可欠な成分である。活性剤は 、はんだ付け時にプリント基板のはんだ付け部や SMDの電極が高温加熱されて酸 化されても、該酸化物を還元除去して清浄化する作用を有しており、活性剤の添カロ 量が多いほど、はんだ付け性が良好となって不良が少なくなる。しかしながら活性剤 の添加量が多いソルダペーストではんだ付けを行うと、はんだ付け後、はんだ付け部 に付着したフラックス残渣が吸湿して電解質となり、はんだ付け部を腐食させたり絶 縁抵抗を下げたりする。そのため信頼性が要求される通信機器やコンピュータ一等 に使用するプリント基板は、ソルダペーストを用いてのはんだ付け後にフラックス残渣 を洗浄除去することが行われて 、た。このフラックス残渣の洗浄にはトリクレンゃフロ ン、アルコール等の洗浄液が使われていた力 これらの洗浄液は地球を取り巻くォゾ ン層を破壊する原因となったり、地球温暖化の原因となったりすることから使用が規 制されている。そのため現在では、はんだ付け後に洗浄の必要のないソルダペースト 、即ち無洗浄ソルダペーストが使用されるようになってきた。この無洗浄ソルダペース トとは、活性剤の添加量が少なぐはんだ付け後のフラックス残渣も非常に少ないた め洗浄しなくても腐食や絶縁抵抗の低下等という問題が発生しないものである。 [0007] By the way, an activator is an essential component in the solder paste flux. The activator has a function of reducing and removing the oxide to clean even if the soldered portion of the printed circuit board or the SMD electrode is heated at a high temperature and oxidized during soldering. The higher the caloric content, the better the solderability and the less defects. However, when soldering with solder paste containing a large amount of activator, after soldering, the flux residue adhering to the soldered part absorbs moisture and becomes an electrolyte, corroding the soldered part and lowering the insulation resistance. . For this reason, printed circuit boards used for communication equipment and computers that require reliability have been washed and removed of flux residues after soldering using solder paste. Cleaning fluids such as trichlene, alcohol, etc. were used to clean this flux residue. These cleaning fluids may cause damage to the ozone layer surrounding the earth and cause global warming. Therefore, use is regulated. Therefore, a solder paste which does not need to be cleaned after soldering, that is, a non-cleaned solder paste has been used at present. This non-cleaning solder paste does not cause problems such as corrosion and a decrease in insulation resistance without cleaning because the amount of the active agent added is small and the flux residue after soldering is very small.
[0008] 無洗浄ソルダペーストは、活性剤の添カ卩量が少な 、ため、酸素の存在する大気リフ ロー炉ではんだ付けを行うと、加熱時に酸化したはんだ付け部の酸化物を完全に還 元除去できない。従って、無洗浄ソルダペーストは、はんだ付け不良を発生させるば 力りでなぐ酸ィ匕した粉末はんだを充分に還元させることができず微小はんだボール を発生させてしまう。し力しながら無洗浄ソルダペーストでも酸素の存在しな 、不活性 雰囲気のリフロー炉ではんだ付けを行うと、加熱時にはんだ付け部が酸ィ匕されな 、た め、はんだ付け不良や微小はんだボール発生のないはんだ付けが可能となる。従つ て最近、電子機器業界では不活性雰囲気リフロー炉が多く使用されるようになってき た。 [0008] Since the non-cleaning solder paste has a small amount of added activator, when soldering is performed in an atmospheric reflow oven where oxygen is present, oxides of the soldered portion that have been oxidized during heating are completely returned. Cannot be removed. Therefore, the non-cleaning solder paste cannot sufficiently reduce the oxidized powder solder that can be removed by force if soldering failure occurs, and generates fine solder balls. If soldering is performed in a reflow furnace in an inert atmosphere without oxygen even in a non-cleaning solder paste while applying force, the soldered portion will not be oxidized during heating, resulting in poor soldering and small solder balls. Soldering without generation is possible. Follow Recently, the inert atmosphere reflow furnace has been widely used in the electronic equipment industry.
[0009] 不活性雰囲気リフロー炉は、炉内の酸素濃度をできるだけ低くした方がはんだ付け 不良に対して有効である。そこで不活性雰囲気リフロー炉では、外部から空気が侵 入しないように出入り口にラビリンスのような工夫を凝らしたり、炉内の熱風の乱を抑 えて外部から空気が侵入しな 、ようにしたりして 、る。  [0009] In an inert atmosphere reflow furnace, it is effective to reduce the oxygen concentration in the furnace as much as possible to prevent defective soldering. Therefore, in an inert atmosphere reflow furnace, a device such as a labyrinth is devised at the entrance and exit to prevent air from entering from outside, and the disturbance of hot air inside the furnace is suppressed to prevent air from entering from outside. RU
[0010] 一般に、不活性雰囲気リフロー炉は、外部に設置されたガスボンベや不活性ガス 発生装置等から炉内に不活性ガスを流入させるが、常に新しい不活性ガスを流入さ せて 、たのでは不活性ガスの消費量が多くなつてランニングコストが高くなる。そこで 炉内の不活性ガスを浄ィ匕して再使用することがなされている。不活性ガスの浄化とは 、はんだ付け時にソルダペーストから発生する溶剤の蒸気やフラックス 'フュームを除 去することである。  [0010] Generally, in an inert atmosphere reflow furnace, an inert gas flows into a furnace from a gas cylinder or an inert gas generator installed outside, but a new inert gas always flows in the furnace. In this case, the running cost increases due to the large consumption of the inert gas. Therefore, the inert gas in the furnace is purified and reused. Purification of the inert gas is to remove solvent vapor and flux fume generated from the solder paste during soldering.
[0011] つまりソルダペーストをリフロー炉で加熱すると、予備加熱ゾーンではソルダペース ト中の溶剤が蒸発し、本加熱ゾーンではフラックスが高温加熱されるためフラックスが 分解してフラックス ·フュームとなる。このように蒸発した溶剤やフラックス ·フューム(以 下、代表してフラックス 'フュームという)がリフロー炉内の構成部分に付着すると、そこ で結露し、さらにそれが固化する。そして長い間に固化したフラックス 'フュームが堆 積すると、それがはんだ付け時にプリント基板の上に落下して高価なプリント基板や [0011] That is, when the solder paste is heated in the reflow furnace, the solvent in the solder paste evaporates in the preheating zone, and the flux is heated to a high temperature in the main heating zone, so that the flux is decomposed into flux fume. When the evaporated solvent or flux fume (hereinafter referred to as flux fume) adheres to the components in the reflow furnace, it condenses there and further solidifies. When flux 'fume which solidifies for a long time accumulates, it falls onto the printed circuit board during soldering,
SMDを汚したり、搬送装置の円滑な走行を妨げたりする。そのため従来から、フラック ス ·フューム除去装置を設置したリフロー炉が多数提案されて 、た。(参照:特許文献 1—8) Dirty SMD or hinders smooth running of transport equipment. Therefore, a number of reflow furnaces equipped with a flux and fume removing device have been proposed. (Reference: Patent Documents 1-8)
特許文献 1:特開平 1-305594号公報  Patent Document 1: JP-A 1-305594
特許文献 2:特開平 4-13474号公報  Patent Document 2: JP-A No. 4-13474
特許文献 3:特開平 4-46667号公報  Patent Document 3: JP-A-4-46667
特許文献 4 :特開平 4-251661号公報  Patent Document 4: JP-A-4-251661
特許文献 5:特開平 5-50218号公報  Patent Document 5: JP-A-5-50218
特許文献 6:特開平 9-307224号公報  Patent Document 6: JP-A-9-307224
特許文献 7:特開平 10-335807号公報 特許文献 8:実開平 5-93079号公報 Patent Document 7: JP-A-10-335807 Patent Document 8: Japanese Utility Model Publication No. 5-93079
発明の開示  Disclosure of the invention
発明が解決しょうとする課題  Problems to be solved by the invention
[0012] ところで従来のフラックス ·フューム除去装置を設置したリフロー炉では、フラックス · フュームを完全に除去することが困難であり、フラックス 'フューム除去装置を通過し た気体がリフロー炉に環流するパイプ中に付着したり、リフロー炉に環流した気体中 のフラックス 'フューム濃度が高くなつてリフロー炉の炉壁や冷却ゾーンに付着したり してしまうことがあった。本発明は、炉外に導出された炉内の気体力もフラックス 'フユ ームを効率よく除去できるリフロー炉を提供することにある。 [0012] However, in a conventional reflow furnace equipped with a flux / fume removing device, it is difficult to completely remove the flux / fume, and the gas that has passed through the flux / fume removing device is recirculated to the pipe through which the gas flows to the reflow furnace. The flux or fume concentration in the gas recirculated to the reflow furnace may adhere to the furnace wall or cooling zone of the reflow furnace. An object of the present invention is to provide a reflow furnace capable of efficiently removing flux 'fumes from the gas force inside the furnace led out of the furnace.
課題を解決するための手段  Means for solving the problem
[0013] 本発明者らは、フラックス 'フュームが結露した時点では、液状であること、紙は液体 を吸い取りしゃすいこと、そしてフラックス 'フュームは長穴内を通過するときに長穴の 壁面に付着しやすいこと、などに着目して本発明を完成した。  [0013] The present inventors have found that flux 'fume is liquid at the time of dew condensation, paper absorbs and cleans liquid, and flux' fume adheres to the wall surface of the slot when passing through the slot. The present invention has been completed by focusing on the easiness of the method.
[0014] 本発明は、リフロー炉内で発生したフラックス 'フュームを不活性ガスとともにリフロ ー炉の外部にパイプで導出し、リフロー炉の外部に設置されたフラックス 'フューム除 去装置でフラックス ·フュームを除去して力 不活性ガスを再度リフロー炉内に戻すリ フロー炉において、前記除去装置のフィルタ一部には多数の長穴を有する紙製のブ ロック状フィルターが長穴をフラックス ·フュームの流動方向に向力うようにして設置さ れて 、ることを特徴とするリフロー炉である。  [0014] The present invention relates to a flux and a fume removal apparatus for extracting a flux 'fume generated in a reflow furnace together with an inert gas to a pipe outside the reflow furnace and installing the flux' fume removal apparatus outside the reflow furnace. In a reflow furnace for returning inert gas to the reflow furnace again, a block filter made of paper having a large number of long holes is formed in a part of the filter of the removing device. A reflow furnace characterized by being installed so as to face the flow direction.
発明の効果  The invention's effect
[0015] 本発明のリフロー炉は、炉内の気体を多数の長穴内に通過させるため、気体が長 穴を通過するうちにフラックス 'フュームが冷やされ、結露して長穴に付着する。フラッ タス ·フュームは結露したときには液状であるが、フィルターは液体が染み込みやす V、紙でできて 、るため、液状となったフラックス ·フュームは瞬時に紙製のフィルター に染み込んでいく。従って、除去装置を通過したフラックス 'フューム含有の気体は、 ほとんどがフィルターで除去される。し力も、紙製フィルタ一は、液状となったフラック ス 'フュームが続けて染み込んでいくため、染み込み効果が長期間持続する。しかし ながら、紙製フィルターでも吸い込み量には限度があり、染み込み状態が悪くなる。 そのときには新しいフィルターに交換するだけでよぐ交換の手間が非常に簡単に行 える。紙製フィルタ一は焼却が可能であり、交換した使用済みのフィルターに染み込 んだ物質がフラックス中の松脂、チキソ剤、溶剤等であるため、焼却処分をしても何ら 公害問題を起こさない。従って、使用済みの紙製フィルタ一は、後処理も非常に容易 となる。 [0015] In the reflow furnace of the present invention, since the gas in the furnace passes through many long holes, the flux fume is cooled while the gas passes through the long holes, and the flux fume is condensed and adheres to the long holes. Flatus fumes are liquid when condensed, but the filter is made of V or paper, which easily penetrates the liquid, so the liquid flux fume instantly soaks into the paper filter. Therefore, most of the flux-fume-containing gas that has passed through the removal device is removed by the filter. As for the paper filter, the liquid flux Fume fumes continuously permeate, so that the permeation effect lasts for a long time. However However, even a paper filter has a limit on the amount of suction, and the state of permeation deteriorates. At that time, it is very easy to change the filter just by replacing it with a new filter. Paper filters can be incinerated, and the substances that have permeated the replaced used filters are pine resin, thixotropic agents, solvents, etc. in the flux, so there is no pollution problem when incinerated. . Therefore, the post-processing of the used paper filter becomes very easy.
発明を実施するための最良の形態  BEST MODE FOR CARRYING OUT THE INVENTION
[0016] 本発明に使用するフィルタ一は、長穴が気体の流動方向に向力うようにしてある。  [0016] In the filter used in the present invention, the elongated hole is directed in the gas flow direction.
長穴が気体の流動方向に向力うとは、長穴が傾斜したり屈曲したりして 、ても入口か ら出口に向かう方向に容易に流動できる状態であり、長穴を気体の流動方向に対し て平行にしたり、ジグザグ状にしたりする。長穴をジグザク状にすると長穴の長さがさ らに長くなつて、それだけフラックス 'フュームが付着しやすくなる。  A slot is oriented in the direction of gas flow when the slot is inclined or bent so that it can easily flow from the inlet to the outlet. It is parallel or zigzag. When the long hole is formed in a zigzag shape, the length of the long hole becomes longer, so that the flux fume is more easily attached.
[0017] ブロック状のフィルタ一は、長穴方向に複数個に分割して積み重ねたものにしても よい。フィルターを積み重ねると積み重ね部分で長穴の位置がずれるため、その部 分で気体の流動速度が急に変わり、気体の流速が急に変わった部分にはフラックス · フュームが付着しやすくなつて、フラックス ·フュームの除去率が向上する。  [0017] The block-shaped filter may be divided into a plurality of pieces in the long hole direction and stacked. When filters are stacked, the position of the long hole shifts in the stacking part, so that the gas flow velocity changes abruptly at that part, and the flux and fume tend to adhere to the part where the gas flow velocity changes suddenly, and the flux · The fume removal rate is improved.
実施例  Example
[0018] 以下図面に基づいて本発明を説明する。図 1は本発明リフロー炉の正面断面図、 図 2はリフロー炉内のフラックス 'フュームの吸引部分を説明する平面図、図 3は図 2 の A— A線断面図、図 4はフラックス.フューム除去装置のうちのフィルタ一部の一部 断面図、図 5は同正面断面図、図 6は本発明に使用するフィルターの平面図、図 7は 本発明に使用する別のフィルターの平面図、図 8は本発明に使用するフィルターの 正面断面図、図 9は本発明に使用する別のフィルターの正面断面図である。  Hereinafter, the present invention will be described with reference to the drawings. 1 is a front cross-sectional view of the reflow furnace of the present invention, FIG. 2 is a plan view illustrating a suction portion of the flux fume in the reflow furnace, FIG. 3 is a cross-sectional view taken along line A--A of FIG. 2, and FIG. FIG. 5 is a front sectional view of the filter, FIG. 6 is a plan view of a filter used in the present invention, FIG. 7 is a plan view of another filter used in the present invention, FIG. 8 is a front sectional view of a filter used in the present invention, and FIG. 9 is a front sectional view of another filter used in the present invention.
[0019] リフロー炉 1は、長手方向にトンネル 2が形成されており、該トンネル内には入口 3側 力も出口 4側に向力つて順次予備加熱ゾーン 5、本加熱ゾーン 6、冷却ゾーン 7となつ ている。予備加熱ゾーン 5と本加熱ゾーン 6の上下部には熱風吹き出し型ヒーター 8 …が設置されており、冷却ゾーン 7の上下部には冷却機 9、 9が設置されている。  [0019] In the reflow furnace 1, a tunnel 2 is formed in the longitudinal direction. In the tunnel, a preheating zone 5, a main heating zone 6, and a cooling zone 7 are sequentially formed with the inlet 3 side force and the outlet 4 side force. I'm in love. Hot air blowout type heaters 8 are installed in the upper and lower portions of the preheating zone 5 and the main heating zone 6, and coolers 9 and 9 are installed in the upper and lower portions of the cooling zone 7.
[0020] トンネル 2内には入口 3から出口 4に向かって一対の搬送コンベア 10、 10が走行し ている。搬送コンベア 10は、レール 11の上を走行するようになっている。一対の搬送 コンベア 10、 10には相対向する方向に多数のピン 12· ··が突設されており、該ピン上 にプリント基板 Pを載置してトンネル 2内を搬送するものである。 [0020] In the tunnel 2, a pair of conveyors 10, 10 travels from the entrance 3 to the exit 4. ing. The conveyor 10 runs on rails 11. A large number of pins 12 project from the pair of transport conveyors 10 in opposite directions, and a printed circuit board P is placed on the pins and transported in the tunnel 2.
[0021] 熱風吹き出し型ヒーター 8内や冷却機 9の適宜箇所には不活性ガス供給口 13…が 取り付けられており、該不活性ガス供給口は、リフロー炉外の図示しない不活性ガス 供給源、例えば窒素ガスボンベや窒素ガスタンク等に接続されて 、る。  An inert gas supply port 13... Is provided in the hot air blowout type heater 8 and an appropriate portion of the cooler 9, and the inert gas supply port is connected to an inert gas supply source (not shown) outside the reflow furnace. For example, it is connected to a nitrogen gas cylinder or a nitrogen gas tank.
[0022] 角状の吸!、込みパイプ 14が搬送コンベアのレール 11に沿って取り付けられて!/、る 。該吸い込みパイプには、内側、即ち搬送するプリント基板側に複数の吸引口 15· ·· が形成されている。吸い込みパイプ 14の両端には、導出パイプ 16、 16が接続されて おり、該導出パイプはフラックス 'フュームを除去する除去装置 17に接続されている。  [0022] A square suction pipe 14 is attached along the rail 11 of the conveyor! / The suction pipe has a plurality of suction ports 15 formed on the inside, that is, on the side of the printed circuit board to be conveyed. Outlet pipes 16 and 16 are connected to both ends of the suction pipe 14, and the outlet pipes are connected to a removing device 17 that removes the flux fume.
[0023] フラックス 'フュームの除去装置 17とは、フィルタ一部 18と凝集部 19から構成されて おり、フィルタ一部 18と凝集部 19とは除去ノイブ 20で接続されている。フィルタ一部 18とは内部にフィルターが置かれていて、吸引パイプ 14から吸引された大部分のフ ラックス 'フュームをフィルターで吸着除去するものである。そして凝集部 19とは、図 示しないブロワ一が設置され、内部に水冷フィンが置かれている。ブロワ一が吸引パ ィプ 14、導出パイプ 16、フィルタ一部 18、除去パイプ 20を通して気体を吸引し、フィ ルター部 18で吸着除去できな力つたフラックス 'フュームを水冷フィンに接触させるこ とにより、ここで凝集付着させて回収するものである。  The flux / fume removing device 17 is composed of a filter part 18 and an aggregating part 19, and the filter part 18 and the aggregating part 19 are connected by a removing nove 20. The filter part 18 has a filter placed inside, and absorbs and removes most of the flux 'fume sucked from the suction pipe 14 by the filter. The aggregating section 19 is provided with a blower (not shown) and water-cooled fins inside. The blower sucks the gas through the suction pipe 14, the outlet pipe 16, the filter part 18, and the removal pipe 20, and contacts the flux fume that cannot be adsorbed and removed by the filter part 18 to the water-cooled fins. Here, they are collected by aggregation and adhesion.
[0024] フィルタ一部 18は、箱状となっており、その前面には開閉自在な扉 21が設置され ている。またフィルタ一部 18の上部には前述導出パイプ 16が接続され、横面の下部 には除去パイプ 20が接続されている。フィルタ一部 18の内部には、下方に周囲が棚 となった受け台 22が架設されていて、該受け台上には 3個の紙製のブロック状フィル ター 23が積み重ねて載置されて!、る。  [0024] The filter part 18 has a box shape, and a door 21 that can be opened and closed is installed on the front surface thereof. The above-mentioned lead pipe 16 is connected to the upper part of the filter part 18, and the removal pipe 20 is connected to the lower part of the lateral surface. Inside the filter part 18, a cradle 22 having a shelf on the lower side is erected, and three paper block filters 23 are stacked and mounted on the cradle. !
[0025] 図 6— 9に示すようにブロック状フィルター 23の内部には気体を通過させることがで きる多数の長穴 24…が揷通している。長穴 24は気体の流通方向、即ちフィルタ一部 18に収納したときに気体が流通する導出ノイブ 16から除去パイプ 20方向に向かつ てあいている。該長穴の形状は、限定されるものではないが、例えば波形、円筒、ハ 二カム等である。図 6は、多数の紙間に波形紙 25が挟み込まれたもので波形紙 25で 形成された長穴 24が上部から下部まで挿通したものである。また図 7は、紙を円筒状 の筒紙 26で連続形成したもので、長穴 24は、やはり上部から下部まで挿通している As shown in FIGS. 6-9, a number of long holes 24 through which gas can pass are penetrated inside the block-shaped filter 23. The long hole 24 is open in the direction of gas flow, that is, in the direction of the removal pipe 20 from the outlet nove 16 through which gas flows when stored in the filter part 18. The shape of the long hole is not limited, but is, for example, a corrugated shape, a cylinder, a honeycomb, or the like. Figure 6 shows corrugated paper 25 sandwiched between many papers. The formed elongated hole 24 is inserted from the upper part to the lower part. Fig. 7 shows the paper formed continuously with a cylindrical paper cylinder 26, and the slot 24 is also inserted from the upper part to the lower part.
[0026] ブロック状フィルター 23の長穴 24は、図 8に示すように気体の流通方向に向かって 平行して 、るものや、図 9に示すように気体の流通方向に向かってジグザグ状となつ ているもの等である。 The long holes 24 of the block-shaped filter 23 are parallel to the gas flow direction as shown in FIG. 8, or zigzag in the gas flow direction as shown in FIG. And so on.
[0027] 凝集部 19の流出口には流出パイプ 27、 27が接続されており、該流出パイプはトン ネル 2の入口 3と出口 4の上下部に設置された吹き出しノズル 28· · .に接続されて!、る  [0027] Outflow pipes 27, 27 are connected to the outlet of the aggregating section 19, and the outflow pipes are connected to blowout nozzles 28, which are installed at the upper and lower portions of the inlet 3 and the outlet 4 of the tunnel 2. Been!
[0028] ここで上記構造を有するリフロー炉での稼働状態について説明する。プリント基板 P を入口 3から搬送コンベア 10に載置し、トンネル 2内に搬入する。プリント基板 Pは、 予備加熱ゾーン 5の熱風吹き出し型ヒーター 8で加熱され、ここではソルダペースト中 の溶剤が蒸発させられるとともに、プリント基板や電子部品をヒートショック力 守るた めの予備加熱がなされる。ここで蒸発した溶剤は、図 2、 3の矢印に示すように搬送コ ンベア 10の近傍で開口している吸引口 15に吸い込まれる。 Here, an operation state of the reflow furnace having the above structure will be described. The printed circuit board P is placed on the conveyor 10 from the entrance 3 and is carried into the tunnel 2. The printed circuit board P is heated by the hot air blowout type heater 8 in the pre-heating zone 5, where the solvent in the solder paste is evaporated, and pre-heating is performed to protect the printed circuit board and electronic components from heat shock. . The solvent evaporated here is sucked into the suction port 15 opened near the conveyor 10 as shown by arrows in FIGS.
[0029] 予備加熱ゾーン 5で予備加熱されたプリント基板 Pは、次に本加熱ゾーン 6に搬送さ れ、ここで高温に加熱されてソルダペースト中の粉末はんだが溶融し、はんだ付け部 に濡れ広がる。このときソルダペースト中の松脂、活性剤、チキソ剤等がフラックス'フ ユームとなり、該フラックス 'フュームも搬送コンベア 10の近傍で開口している吸引口 1 5に吸い込まれる。 [0029] The printed circuit board P preheated in the preheating zone 5 is then conveyed to the main heating zone 6, where it is heated to a high temperature to melt the powder solder in the solder paste and wet the soldered portion. spread. At this time, rosin, activator, thixotropic agent and the like in the solder paste become flux 'fumes, and the flux' fumes are also sucked into the suction port 15 opened near the conveyor 10.
[0030] 吸引口 15に吸い込まれた気化状態の溶剤やフラックス 'フュームは、吸引パイプ 14 力も導出パイプ 16を通って除去装置のフィルタ一部 18に入る。フィルタ一部 18に収 納されたブロック状フィルター 23には、多数の長穴 24· ··があいているため、フラック ス 'フュームはこれら多数の長穴内を通過する。この長穴内を通過する過程でフラック ス 'フュームは、長穴 24の壁面で冷やされて結露し、該壁面に付着する。このときブ ロック状フィルタ一は紙製であるため、長穴の壁面で結露したものは、瞬時に長穴の 壁面に染み込んでいく。このようにしてブロック状フィルターの長穴内を通過するフラ ックス 'フュームは、結露したものが次々とブロック状フィルターに染み込んで除去さ れる。フラックス 'フュームが大量に付着したフィルタ一は、フィルタ一部から取り出し て、廃棄や焼却処分する。 The vaporized solvent or flux fume sucked into the suction port 15 also enters the filter part 18 of the removing device through the outlet pipe 16 and the suction pipe 14. Since the block-shaped filter 23 accommodated in the filter part 18 has a large number of long holes 24, the flux 'fume passes through these many long holes. In the process of passing through the elongated hole, the flux fume is cooled on the wall surface of the elongated hole 24 and forms dew condensation, and adheres to the wall surface. At this time, since the block filter is made of paper, dew condensation on the wall surface of the long hole instantly permeates the wall surface of the long hole. In this way, the flux fume that passes through the long hole of the block filter is condensed one after another and is removed by seeping into the block filter. It is. Filters with a large amount of flux fumes are removed from a part of the filter and discarded or incinerated.
[0031] そしてフィルタ一部で完全に除去できなかったフラックス ·フュームは除去パイプ 20 で凝集部 19に移され、ここで水冷フィンに接触して凝集し、さらに完全に除去される 。凝集部では水冷フィンに付着したフラックス 'フュームは下部の容器に回収して産 廃として処分する。除去装置でフラックス ·フュームがほとんど除去された不活性ガス は、流出パイプ 27からリフロー炉 1に環流される。  [0031] The flux / fume that could not be completely removed by a part of the filter is transferred to the aggregation section 19 by the removal pipe 20, where it contacts the water-cooled fins, aggregates, and is completely removed. In the agglomeration section, the flux 'fume adhering to the water-cooled fins is collected in the lower container and disposed as waste. The inert gas from which the flux / fume has been almost removed by the removal device is returned to the reflow furnace 1 from the outflow pipe 27.
図面の簡単な説明  Brief Description of Drawings
[0032] [図 1]本発明リフロー炉の正面断面図 FIG. 1 is a front sectional view of the reflow furnace of the present invention.
[図 2]リフロー炉内のフラックス 'フュームの吸引部分を説明する平面図  [Figure 2] Plan view for explaining the suction part of the flux 'fume in the reflow furnace
[図 3]図 2の A— A線断面図  [Figure 3] A-A sectional view of Figure 2
[図 4]フラックス ·フューム除去装置のうちのフィルタ一部の一部断面図  [Figure 4] Partial cross-sectional view of a part of the filter in the flux and fume removing device
[図 5]フラックス ·フューム除去装置のうちのフィルタ一部の正面断面図  [Figure 5] Front sectional view of a part of the filter in the flux and fume removing device
[図 6]本発明に使用するフィルターの平面図  FIG. 6 is a plan view of a filter used in the present invention.
[図 7]本発明に使用する別のフィルターの平面図  FIG. 7 is a plan view of another filter used in the present invention.
[図 8]本発明に使用するフィルターの正面断面図  FIG. 8 is a front sectional view of a filter used in the present invention.
[図 9]本発明に使用する別のフィルターの正面断面図  FIG. 9 is a front sectional view of another filter used in the present invention.
符号の説明  Explanation of symbols
[0033] 1 リフロー炉 [0033] 1 reflow furnace
16 導出パイプ  16 Derivation pipe
17 除去装置  17 Removal device
18 フイノレター部  18 Fino letter section
19 凝集部  19 Agglomeration part
23 フイノレター  23 Huino Letter
24 長穴  24 Slot
産業上の利用可能性  Industrial applicability
[0034] 本発明のリフロー炉は、ヒーターが熱風吹き出し型以外にも、遠赤外線照射型、レ 一ザ一照射型等、如何なるものにでも適応可能である。 [0034] The reflow furnace of the present invention can be applied to any heater such as a far-infrared irradiation type and a laser-irradiation type in addition to a hot air blowing type heater.

Claims

請求の範囲 The scope of the claims
[1] リフロー炉内で発生したフラックス 'フュームを不活性ガスとともにリフロー炉の外部に ノイブで導出し、リフロー炉の外部に設置されたフラックス 'フューム除去装置でフラ ックス ·フュームを除去して力 不活性ガスを再度リフロー炉内に戻すリフロー炉にお いて、前記除去装置のフィルタ一部には多数の長穴を有する紙製のブロック状フィル ターが長穴をフラックス ·フュームの流動方向に向かうようにして設置されて 、ることを 特徴とするリフロー炉。  [1] Flux generated in the reflow furnace is discharged to the outside of the reflow furnace together with inert gas by a nove, and flux and fume removal equipment installed outside the reflow furnace removes flux and fumes. In the reflow furnace for returning the inert gas to the inside of the reflow furnace again, a paper block filter having a large number of long holes is formed in a part of the filter of the removing device in the flow direction of the flux fume through the long holes. A reflow furnace characterized by being installed as described above.
[2] 前記フィルタ一は、長穴が気体の流動方向に対して平行であることを特徴とする請求 項 1記載のリフロー炉。  2. The reflow furnace according to claim 1, wherein the filter has an elongated hole parallel to a flowing direction of gas.
[3] 前記フィルタ一は、長穴が気体の流動方向に対してジグザグ状となって 、ることを特 徴とする請求項 1記載のリフロー炉。  3. The reflow furnace according to claim 1, wherein the filter has an elongated hole formed in a zigzag shape in a gas flow direction.
[4] 前記フィルタ一は、長穴方向に複数個に分割してあることを特徴とする請求項 1記載 のリフロー炉。 [4] The reflow furnace according to claim 1, wherein the filter is divided into a plurality of pieces in a long hole direction.
1/6 1/6
Figure imgf000012_0001
替え用紙 (規則 26)
Figure imgf000013_0001
Figure imgf000012_0001
Replacement forms (Rule 26)
Figure imgf000013_0001
Figure imgf000014_0001
Figure imgf000014_0001
画 l700000/S00Zdf/X3d eZT890/S00l OAV  Image l700000 / S00Zdf / X3d eZT890 / S00l OAV
9/ε 9 / ε
Figure imgf000015_0001
Figure imgf000015_0001
[s面  [S side
1-00000/S00Zdf/13d ε 890/S00Z OAV 1-00000 / S00Zdf / 13d ε 890 / S00Z OAV
9/ャ 5/6 9 / 5/6
WO 2005/068123 PCT/JP2005/000004
Figure imgf000016_0001
WO 2005/068123 PCT / JP2005 / 000004
Figure imgf000016_0001
Figure imgf000016_0002
Figure imgf000017_0001
Figure imgf000016_0002
Figure imgf000017_0001
PCT/JP2005/000004 2004-01-16 2005-01-05 Reflow furnace WO2005068123A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2005516999A JP4665763B2 (en) 2004-01-16 2005-01-05 Inert atmosphere reflow furnace

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JP2004-008627 2004-01-16
JP2004008627 2004-01-16

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007160322A (en) * 2005-12-12 2007-06-28 Senju Metal Ind Co Ltd Method for removing fume in reflow furnace, and reflow furnace
CN108174528A (en) * 2018-01-04 2018-06-15 深圳市劲拓自动化设备股份有限公司 A kind of vertical reflow ovens
US11865645B2 (en) * 2020-11-12 2024-01-09 Senju Metal Industry Co., Ltd. Soldering apparatus

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5795220U (en) * 1980-12-03 1982-06-11
JPH0777346A (en) * 1993-09-08 1995-03-20 Nippon Dennetsu Keiki Kk Fume discharging device in soldering device
JP2003126640A (en) * 2001-10-29 2003-05-07 Toray Ind Inc Parallel flow air filter

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11261209A (en) * 1998-03-10 1999-09-24 Aisan Ind Co Ltd Wave soldering device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5795220U (en) * 1980-12-03 1982-06-11
JPH0777346A (en) * 1993-09-08 1995-03-20 Nippon Dennetsu Keiki Kk Fume discharging device in soldering device
JP2003126640A (en) * 2001-10-29 2003-05-07 Toray Ind Inc Parallel flow air filter

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007160322A (en) * 2005-12-12 2007-06-28 Senju Metal Ind Co Ltd Method for removing fume in reflow furnace, and reflow furnace
CN108174528A (en) * 2018-01-04 2018-06-15 深圳市劲拓自动化设备股份有限公司 A kind of vertical reflow ovens
US11865645B2 (en) * 2020-11-12 2024-01-09 Senju Metal Industry Co., Ltd. Soldering apparatus

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