KR20110045701A - Tilted transfering system of substrate - Google Patents

Tilted transfering system of substrate Download PDF

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Publication number
KR20110045701A
KR20110045701A KR1020090102382A KR20090102382A KR20110045701A KR 20110045701 A KR20110045701 A KR 20110045701A KR 1020090102382 A KR1020090102382 A KR 1020090102382A KR 20090102382 A KR20090102382 A KR 20090102382A KR 20110045701 A KR20110045701 A KR 20110045701A
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KR
South Korea
Prior art keywords
substrate
transfer
unit
rollers
feed
Prior art date
Application number
KR1020090102382A
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Korean (ko)
Inventor
임석택
Original Assignee
주식회사 케이씨텍
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Publication date
Application filed by 주식회사 케이씨텍 filed Critical 주식회사 케이씨텍
Priority to KR1020090102382A priority Critical patent/KR20110045701A/en
Publication of KR20110045701A publication Critical patent/KR20110045701A/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67715—Changing the direction of the conveying path

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Power Engineering (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

PURPOSE: A tilt transferring system of a substrate is provided to eliminate a process of making a substrate in a horizontal state to switch the transfer direction of the substrate, thereby reducing time for transferring and processing the substrate. CONSTITUTION: A first substrate transferring unit(100) transfers a substrate in a first transfer direction. A first substrate direction switching unit(200) switches the transfer direction of the substrate in the second transfer direction vertical to the first transfer direction. A second substrate transferring unit(300) is made of a plurality of transferring rollers. A second substrate direction switching unit(400) switches the transfer direction of the substrate in the third transfer direction vertical to the second transfer direction. A third substrate transfer unit(500) is installed on the second substrate direction switching unit to transfer the substrate in the third transfer direction.

Description

TILTED TRANSFERING SYSTEM OF SUBSTRATE}

The present invention relates to an inclined transfer system of a substrate, and more particularly to an inclined transfer system of a substrate for reducing the time required for processing the substrate by switching the transfer direction in the inclined state of the glass substrate.

In general, a large-area substrate for manufacturing a large-area flat panel display is repeatedly cleaned, deposited, photographed, or etched to form device patterns according to the type of the flat panel display.

In this process, the large area substrate should be transferred between the process equipment spaced apart from each other, and it is necessary to change the transfer direction of the large area substrate according to the type or structure of the process equipment.

Due to the necessity of the above, an apparatus for converting and transferring a transfer direction of the substrate to a predetermined angle in a state where the large-area substrate is loaded thereon has been developed and used.

1 is a plan view schematically showing a conventional substrate transfer system.

A conventional substrate transfer system includes a first substrate transfer unit 10 and a first substrate transfer unit 10 for transferring a substrate in an inclined state at a predetermined angle (for example, 5 °) for processing of the substrate. The substrate transferred from the first substrate direction converting unit 20, the substrate transferred from the first substrate direction converting unit 20 for transferring to the second substrate transfer unit 30 The second substrate transfer unit 30 for transferring in the horizontal state, the second substrate direction for transferring the substrate transferred from the second substrate transfer unit 30 to the third substrate transfer unit 50 after making the inclined state The switching unit 40 and the third substrate transfer unit 50 for transferring the substrate transferred from the second substrate direction changing unit 40 in an inclined state at a predetermined angle for substrate processing, It consists of a substrate transfer structure of the form 'c'. The first substrate redirection unit 20 and the second substrate redirection unit 40 have the same structure and are symmetrically installed with the second substrate transfer unit 30 interposed therebetween.

2 is a front view showing a state in which the substrate is inclined in the first substrate redirection unit, Figure 3 is a front view showing a state in which the substrate is horizontal in the first substrate redirection unit.

As illustrated in FIG. 2, the substrate G transferred by the first substrate transfer unit 10 is in contact with an upper portion of the outer circumferential surface of the first transfer roller 21 of the first substrate redirection unit 20. Is in. In this state, when the cylinder 23 is driven to lift the second feed roller 22 upward, the substrate G is in a horizontal state. In this state, when the second transfer roller 22 is rotated, the substrate G is transferred to the second substrate transfer unit 30.

In this case, it takes a considerable time to drive the cylinder 23 to lift the second feed roller 22 to a horizontal state, which is a factor that makes the substrate processing process inefficient.

The present invention has been made to solve the above problems, the inclined transfer system of the substrate that can reduce the time required to transfer and process the substrate by allowing the substrate to switch the transfer direction while maintaining the inclined state as it is The purpose is to provide.

An inclined transfer system of a substrate of the present invention for solving the above problems comprises: a first substrate transfer unit 100 which is transferred in a first transfer direction in an inclined state of a substrate; A first substrate direction switching unit (200) for changing the transfer direction of the substrate in a second transfer direction perpendicular to the first transfer direction while maintaining the inclination angle of the substrate transferred from the first substrate transfer unit (100); A second substrate transfer unit 300 connected to the substrate transfer line on an extension line of the substrate transfer line formed by the first substrate redirection unit 200; It is installed to be symmetrical with the first substrate redirection unit 200 with the second substrate transfer unit 300 therebetween to transfer the substrate in the third transfer direction perpendicular to the second transfer direction. A second substrate redirection unit 400 for switching; A third substrate transfer connected to the second substrate redirection unit 400 so that the first transfer direction, the second transfer direction, and the third transfer direction form a 'c' shape to inclined the substrate in the third transfer direction; It comprises a unit 500.

According to the present invention, by eliminating the process of making the substrate in a horizontal state in order to switch the transfer direction of the substrate to be transferred in an inclined state, it is possible to reduce the time required for transferring and processing the substrate, thereby improving the efficiency of the process. have.

Hereinafter, the configuration and operation of the preferred embodiment of the present invention will be described in detail with reference to the accompanying drawings.

Figure 4 is a plan view showing a tilt transfer system of the substrate according to the present invention.

The present invention, the first substrate transfer unit 100 for tilting the substrate (G) in the first transfer direction, the transfer direction of the substrate (G) in the second transfer direction perpendicular to the first transfer direction A second substrate transfer unit 300 connected to the first substrate direction change unit 200 and the first substrate direction change unit 200 and having feed rollers installed in the second transfer direction, and the second substrate transfer unit ( A second substrate direction converting unit 400 and the second substrate direction converting unit 400 for converting the substrate G transferred from 300 into a third conveying direction perpendicular to the second conveying direction; And a third substrate transfer unit 500 connected to the substrate G to inclined the substrate G in the third transfer direction.

In the process of transferring the substrate G by the first substrate transfer unit 100, a process such as etching of the substrate G may be performed. In this section, the substrate G is conveyed in the first conveying direction (right arrow) by the conveying rollers in an inclined state.

The first substrate redirection unit 200 converts the transfer direction of the substrate G by 90 degrees while maintaining the inclination angle of the substrate G transferred from the first substrate transfer unit 100. Conventionally, in this portion, the substrate G is in a horizontal state. However, in the present invention, since it is not necessary, the transfer time of the substrate G is shortened.

In the second substrate transfer unit 300, the substrate G is transferred in the second transfer direction (up arrow).

The second substrate redirection unit 400 converts the transfer direction of the substrate G by 90 degrees while maintaining the inclination angle of the substrate G transferred from the second substrate transfer unit 300.

In the third substrate transfer unit 500, the substrate G is transferred in the third transfer direction (left arrow). In this section, a process such as washing may proceed.

Figure 5 is a front schematic view showing a tilt transfer system of the substrate according to an embodiment of the present invention.

Referring to FIG. 5, the first substrate redirection unit 200, the second substrate transfer unit 300, and the second substrate redirection unit 400 are illustrated.

The first substrate redirection unit 200 may include the first transfer rollers 210 and the first transfer rollers 210 which rotate to cross the substrate G in the first transfer direction. It is provided with a second conveying rollers 220 for transporting the substrate (G) in the second conveying direction, the second conveying rollers 220 is made of a cylinder 230 for raising and lowering while maintaining the inclination angle . The second feed rollers 220 and the cylinder 230 are connected by a connecting member 240. The connecting member 240 is simply represented in the drawings, but those skilled in the art can be implemented in other shapes.

The second substrate transfer unit 300 is composed of a plurality of feed rollers (310). The substrate transfer line formed by the inlet-side transfer rollers 310a and 310b of the transfer rollers 310 is on an extension line of the inclined substrate transfer line formed in the first substrate redirection unit 200. In addition, the substrate transfer line formed by the transfer rollers 310c and 310b on the outlet side of the transfer rollers 310 is on an extension line of the inclined substrate transfer line formed in the second substrate redirection unit 400. Here, the "substrate transfer line" means a line connecting the outer peripheral surface of the transfer rollers to contact the upper end. The feed rollers 310 are arranged to be bent upward in the center.

The second substrate redirection unit 400 includes third transfer rollers 410 that rotate to incline the substrate G in the second transfer direction, and the rotation direction is perpendicular to the third transfer rollers 410. And a fourth feed rollers 420 for transferring the substrate G in the third transfer direction, and a cylinder 430 for lifting and lowering the third transfer rollers 410 while maintaining the inclination angle. . The third feed rollers 410 and the cylinder 430 are connected by a connecting member 440. The connection member 440 is simply represented in the drawings, but those skilled in the art can be implemented in other shapes.

6 is a front schematic view showing a tilt transfer system of a substrate according to another embodiment of the present invention.

In this embodiment, there is a difference in the second substrate transfer unit 300 'compared with the embodiment shown in FIG.

The second substrate transfer unit 300 'is composed of a plurality of feed rollers 310'. The feed rollers 310 'are arranged such that the substrate transfer line is horizontal.

In this case, the inlet-side feed roller 310a 'and the outlet-side feed roller 310d' of the second substrate transfer unit 300 'may be installed at a somewhat lower position than the other feed rollers 310'.

As such, when the transfer rollers 310 ′ are arranged horizontally, the substrate G may pass through the second substrate transfer unit 300 ′ to have a predetermined substrate treatment.

7 and 8 are operation state diagrams showing the substrate transfer process by the first substrate direction switching unit and the second substrate transfer unit in the inclined transfer system of the substrate shown in Figure 5, Figures 9 and 10 are shown in FIG. The operation state diagram showing the substrate transfer process by the second substrate transfer unit and the second substrate direction switching unit in the inclined transfer system of the substrate.

First, referring to FIG. 7, the substrate G transferred by the first substrate transfer unit 100 enters into the first substrate redirection unit 200 and stops on the first transfer rollers 210. . In this case, the board | substrate G maintains the inclined state.

In this state, as shown in FIG. 8, the second feed rollers 220 are elevated by about 10 mm in the vertical direction with respect to the substrate G by driving the cylinder 230. The reason for raising and lowering the substrate G is to transfer the substrate G without being influenced by the first transfer rollers 210 when the substrate G is transferred in the second transfer direction.

When the substrate G is lifted by the second transfer rollers 220, the second transfer rollers 220 are rotated to transfer the substrate G to the second substrate transfer unit 300.

In this case, it is preferable that the substrate transfer line of the first substrate redirection unit 200 and the substrate transfer line of the second substrate transfer unit 300 are on an extension line.

In this way, when the transfer direction of the substrate G is changed while transferring, the time required for transferring the substrate G is reduced as compared with the case where the conventional substrate G is horizontal.

The substrate G is transferred to the second substrate redirection unit 400 by the rotation of the transfer rollers 310 in the second substrate transfer unit 300, and as shown in FIG. The three feed rollers 410 is stopped on the top.

In this state, when the third feed rollers 410 are lowered by operating the cylinder 430, the substrate G is placed on the fourth feed rollers 420.

Thereafter, when the fourth feed rollers 420 are rotated, the substrate G is transferred to the third substrate transfer unit 500.

11 and 12 are operating state diagrams showing a process of transferring the substrate in the inclined transfer system of the substrate to which the first substrate redirection unit according to the second embodiment of the present invention.

The first substrate redirection unit 200 ′ of the present exemplary embodiment includes first transfer rollers 210 ′ that rotate to transfer the substrate G in the first transfer direction, and the first transfer rollers 210 ′. The second conveying rollers 220 'and the first conveying rollers 210' for transferring the substrate G in the second conveying direction and installed so as to be perpendicular to the rotational direction are moved up and down while maintaining the inclination angle. Cylinder 230 '.

In the exemplary embodiment shown in FIGS. 5 to 8, the second feed rollers 220 are lifted up and down, but in the present embodiment, the first feed rollers 210 ′ are lifted up and down. The cylinder 230 'may consist of one or two.

The substrate G transferred to the first substrate redirection unit 200 ′ is mounted on the first transfer rollers 210 ′ as shown in FIG. 11. In this state, when the first feed rollers 210 'are lowered by the operation of the cylinder 230', as shown in FIG. 12, the substrate G is placed on the second feed rollers 220 '. do. Then, when the second transfer rollers 220 'are rotated, the substrate G is transferred to the second substrate transfer unit 300 in the inclined state along the second transfer direction.

13 and 14 are operation state diagrams showing a process of transferring the substrate in the inclined transfer system of the substrate to which the second substrate redirection unit according to the second embodiment of the present invention.

The second substrate redirection unit 400 ′ of the present embodiment includes third transfer rollers 410 ′ that rotate to transfer the substrate G in the second transfer direction, and the third transfer rollers 410 ′. Fourth feed rollers 420 'which are installed so that the rotation direction is orthogonal to transfer the substrate in the third transfer direction, and a cylinder 430' which raises and lowers the fourth feed rollers 420 'while maintaining the inclination angle. ).

As shown in FIG. 13, the substrate G transferred through the second substrate transfer unit 300 is transferred to the second substrate redirection unit 400 'and placed on the third transfer rollers 410'. have. In this state, when the fourth feed rollers 420 'are lifted upward while maintaining the inclination angle, as shown in FIG. 14, the substrate G is the fourth feed roller. On the field 420 '. Thereafter, when the fourth feed rollers 420 'are rotated, the substrate G is transferred to the third substrate transfer unit 500 in the inclined state along the third transfer direction.

As described above, the embodiments of the present invention have been described by way of example only, and those skilled in the art to which the present invention pertains may make various modifications and changes without departing from the spirit of the present invention. I can understand that.

1 is a plan view schematically showing a conventional substrate transfer system,

2 is a front view showing a state in which the substrate is inclined in the first substrate redirection unit;

3 is a front view showing a state in which the substrate is horizontal in the first substrate redirection unit,

4 is a plan view showing an inclined transfer system of a substrate according to the present invention;

5 is a front schematic view showing an inclined transfer system of a substrate according to an embodiment of the present invention;

6 is a front schematic view showing an inclined transfer system of a substrate according to another embodiment of the present invention;

7 and 8 are operation state diagram showing the substrate transfer process by the first substrate direction switching unit and the second substrate transfer unit in the inclined transfer system of the substrate shown in FIG.

9 and 10 are operation state diagram showing the substrate transfer process by the second substrate transfer unit and the second substrate redirection unit in the inclined transfer system of the substrate shown in Figure 5,

11 and 12 are operation state diagram showing a process of transferring the substrate in the inclined transfer system of the substrate to which the first substrate redirection unit according to the second embodiment of the present invention,

13 and 14 are operation state diagram showing a process of transferring the substrate in the inclined transfer system of the substrate to which the second substrate redirection unit according to the second embodiment of the present invention.

Explanation of symbols on the main parts of the drawings

100: first substrate transfer unit 200: first substrate direction switching unit

210,210 ': first feed rollers 220,220': second feed rollers

230,230 ': Cylinder 300: 2nd substrate transfer unit

400: second substrate turning unit 410, 410 ': third feed rollers

420,420 ': 4th feed rollers 430,430': cylinder

500: third substrate transfer unit

Claims (9)

A first substrate transfer unit 100 for tilting the substrate in the first transfer direction; A first substrate direction switching unit 200 for changing the transfer direction of the substrate in the second transfer direction perpendicular to the first transfer direction while maintaining the inclination angle of the substrate transferred from the first substrate transfer unit 100 ; The feed roller is formed of a plurality of feed rollers, the feed roller is installed on the inlet side of the inclined substrate transfer line formed in the first substrate direction switching unit 200 and the feed roller is installed on the outlet side to be symmetrical with the inlet side 2 substrate transfer unit 300; A second substrate direction converting unit (400) for changing a conveying direction in a third conveying direction perpendicular to the second conveying direction in an inclined state of the substrate conveyed from the second substrate conveying unit (300); A third substrate transfer unit 500 connected to the second substrate direction conversion unit 400 to incline and transfer the substrate in a third transfer direction; Inclined transfer system of the substrate comprising a. The method of claim 1, Feed rollers 310 of the second substrate transfer unit 300 is inclined transfer system of the substrate, characterized in that the center portion is arranged to be bent upward. The method of claim 1, Feed rollers 310 of the second substrate transfer unit 300 is inclined transfer system of the substrate, characterized in that arranged to be horizontal. The method of claim 3, The substrate is inclined transfer system, characterized in that the substrate treatment is performed in the process of passing through the second substrate transfer unit (300). The method of claim 1, The first substrate redirection unit 200 is provided so that the first feed rollers 210 and the first feed rollers 210 rotate in a direction perpendicular to the first feed rollers 210 to rotate so that the substrate is transferred in the first feed direction. It characterized in that it comprises a second conveying rollers 220 for transporting the substrate in the second conveying direction, the cylinder 230 for raising and lowering the second conveying rollers 220 while maintaining the inclination angle Inclined feed system of substrate. The method of claim 1, The second substrate redirection unit 400 is installed so that the third feed rollers 410 rotate so that the substrate is inclinedly transferred in the second transfer direction, and the rotation direction is perpendicular to the third feed rollers 410. And fourth cylinder rollers 420 for transferring the substrate in the third transfer direction, and a cylinder 430 for elevating the third transfer rollers 410 while maintaining the inclination angle. Inclined feed system of substrate. The method of claim 1, The first substrate redirection unit 200 ′ includes a first transfer roller 210 ′ that rotates to transfer the substrate in the first transfer direction, and a rotation direction perpendicular to the first transfer rollers 210 ′. The second conveying rollers 220 'which are installed to convey the substrate in the second conveying direction and the cylinder 230' which lowers and lowers the first conveying rollers 210 'while maintaining the inclination angle. Inclined transfer system of the substrate comprising a. The method of claim 1, The second substrate redirection unit 400 ′ includes a third transfer roller 410 ′ that rotates to transfer the substrate in the second transfer direction, and a rotation direction perpendicular to the third transfer rollers 410 ′. And a fourth feed rollers 420 'for transferring the substrate in the third transfer direction and a cylinder 430' for raising and lowering the fourth feed rollers 420 'while maintaining the inclination angle. Inclined transfer system of the substrate comprising a. The method according to any one of claims 5 to 8, And said first substrate redirection unit (200,200 ') and said second substrate redirection unit (400,400') are installed symmetrically to each other.
KR1020090102382A 2009-10-27 2009-10-27 Tilted transfering system of substrate KR20110045701A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10315233B2 (en) 2012-07-27 2019-06-11 Boe Technology Group Co., Ltd. Flexible substrate treatment device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10315233B2 (en) 2012-07-27 2019-06-11 Boe Technology Group Co., Ltd. Flexible substrate treatment device

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