KR20110005699A - Tools and methods for processing microelectronic workpices using process chamber designs that easily transition between open and closed modes of operation - Google Patents

Abstract

The present invention relates to a tool and a method using the same, and the tool may operate in any one of an operating mode and a closed operation mode. The tool can easily switch between open and closed mode of operation on demand. In accordance with the present invention, environmentally controlled passage (s) connect the perimeter with one or more process chambers. The ability to amplify the air upstream of the process chamber (s) allows the flow of air to be introduced into the process chamber (s) on demand. Alternatively, the fluid passage is easily closed by simply operating the valve to shut off the exhaust to the surroundings through these passages. Another flow of non-ambient fluid may be introduced into the process chamber (s) via a passage that is at least partially common to the passage used to introduce ambient air. In another aspect, the gap (s) between the movable elements are at least sealed with a flowing gas curtain without relying only on direct physical contact for sealing.

Description

TOOLS AND METHODS FOR PROCESSING MICROELECTRONIC WORKPICES USING PROCESS CHAMBER DESIGNS THAT EASILY TRANSITION BETWEEN OPEN AND CLOSED MODES OF OPERATION}

The present application claims serial number 61 / dated May 9, 2008, titled Tools and Methods for Processing Microelectronic Workpieces Using Process Chamber Designs That Easily Change between Open and Closed Operating Modes. It enjoys the benefit of 127,129 US provisional patents.

The present invention is directed to a tool used to treat a microelectronic substrate using one or more processing fluids, including liquids and / or gases. In particular, the present invention relates to a tool having an improved process chamber design that can be blocked or connected to the periphery of the process chamber in response to demands using an amplification supply technique connecting to the surroundings.

The microelectronics industry relies on several different processes to manufacture microelectronic devices. Many treatments involve processing sequences that bring different kinds of processing fluid into contact with the workpiece, according to a preferred method. These fluids may be liquids, gases or combinations thereof. The solid floats, dissolves, or floats in the gas without moving in the liquid.

A unique tool for processing microelectronic workpieces is the assignee's pending US Patent Publication No. US-2007 / 0022948-A1 (hereinafter referred to as pending application number 1); Assignee's pending US patent serial no. 11 / head titled Nozzle Device and Barrier Structure for Tools Used to Process Microelectronic Workpieces Using One or More Process Fluids, filed March 15, 2006 under the name of Coline. 376,996 (Attorney No. FSI0166US, published as US-2007-0245954-A1, corresponding to WO 2006/10755) (hereinafter referred to as Mooring Application No. 2); Positive, pending U.S. patent application Ser. No. 11 / head titled Nozzle Device and Barrier Structure for Tools Used to Process Microelectronic Workpieces Using One or More Processing Fluids, filed in the name of Colin, dated June 20, 2007 820,709 (Representative Document FSI0202 / US, US-2008-0008834-A1, hereinafter referred to as pending application number 3); and microelectronic workpieces using one or more treatment fluids of Decraker on August 7, 2007 US Provisional Application Serial No. 60 / 936,840 entitled Barrier Plates for Tools Used to Process Eases and Rinsing Methods for Venturi Suppression Systems, all of which are hereby incorporated by reference. Include.

The common pending US patent application No. 1 treatment part includes a duct structure for selectively opening and closing the duct passage of Hana.

For example, as this structure moves relatively apart, the duct passages open and the size between the structures expands.

If these structures move relatively together, the ducts between these structures are choked and reduced in size. In a preferred embodiment, depending on how the movable duct structure is located, multiple ducts in the same space may occupy a volume that is at least as large as that occupied by a single duct.

Due to the nested nature of the structure of the duct, the duct system is very compact. This duct is used to contain various processing fluids, including liquids and / or gases, for recycling, disposal and other treatments. Different processing fluids are restored in different independent ducts to minimize cross contamination and / or use a unique capture protocol for other fluids.

These common pending US patents have the ability to decompose processing materials in a number of ways, such as novel spray nozzle / spray ratios, center dispenses, and shower heads.

In a preferred embodiment, the bottom of the barrier structure is formed to form a tapered flow channel over the work piece. This approach offers several advantages. The tapered flow channel is warm to facilitate the outflow of the radial flow from the center of the workpiece while recycling the recycle zone. In addition, the taper serves to smoothly increase the speed of the flow fluid reaching the outer edge of the workpiece.

In addition, the angle of the bottom surface serves to discharge the liquid on the front side to the outer peripheral side. On this outer circumferential surface, the liquid is collected and removed by intake, as disclosed in the assignee's common pending application no.

This taper configuration serves to accelerate the recycling of particles into the work piece. In addition to these advantages, further improvements are still required.

In particular, it is preferable to use the tools described in the assignee's common pending applications Nos. 1 to 4 to perform the treatment in an environmentally isolated treatment chamber.

This may be desirable only if a controlled atmosphere is desired. Experiments have shown that the controlled atmosphere is an atmosphere with low or even non oxygen content. This reduction or removal of oxygen serves to prevent corrosion of the material on the microelectronic workpiece during the manufacturing process which may damage the oxidation. An embodiment of this tool uses a shutter around the showerhead and the suction element to seal the suction into the treatment of ambient air. However, more ambient air than desired can enter the process chamber from conventional showerhead and air intake designs, even when the shutter is closed. In addition, the air includes an annular gap between the barrier plate and the surrounding baffle element. In addition, ambient air may enter the process chamber through this gap.

According to one option, this gap can be eliminated by designing the tool in a manner that closes the gap by direct physical contact of the device to provide the desired sealing. Contact between moving device (s) is undesirable for at least two reasons. First, contaminants tend to be generated by the force necessary to produce a good seal around the premise of the gap. Secondly, it is desirable for the controller to use a stamper motor to control the movement of the device by tracking the motorstep and hence these devices at any time.

However, the force required to establish a good seal around the entire gap tends to cause the controller to lose the counter of the motor stem.

If the stamper motor count is lost, the ability to know and control the motion of the device can be impaired. When the shutter mentioned above is operated using a stamper motor, the same effect is obtained. Clearly, the ability to handle in isolation from the surroundings is very desirable. However, it is not always desirable to have a process chamber that operates only in a completely isolated state.

Many manufacturing techniques involve a series of processes that include both closed (ie, blocked air) and open (ie, connected to sources of ambient air) modes.

The manufacturing equipment may obtain a separate precision tool operating in the closed or open mode. These tools are expensive and require a lot of investment.

Most tools require the most significant facility space. Therefore, it is desirable to provide a tool which can effectively operate in any one of the opening and closing modes of operation while easily changing the closed mode and the open mode as required.

The present invention relates to a tool design and a technique using the same, wherein the tool operates in a closed operating mode and an open operating mode. In accordance with the present invention, environmentally controlled passage (s) connect the perimeter to one or more process chambers. Due to the ability of air amplification upstream from the process chamber (s), a substantial flow of air is introduced into the process chamber (s) through these passages as required. Alternatively, a simple actuation of the valve to shut off the exhaust of ambient air through these passages easily closes the fluid passage. Next, another flow of non-ambient fluid is introduced into the process chamber (s) via a passage that is at least partially common with the passage used for introducing the ambient feed.

In another technique, the treatment takes place in either controlled atmosphere and / or ambient air.

In another technique, the gap (s) between the movable elements are at least sealed by a gas curtain rather than relying directly on physical contact for sealing. Thereby, stamper motors are used to operate the movement of these elements in a reliable and controllable manner, while minimizing particle generation and reducing the risk of false stepper motor counts. For example, this technique can be used to seal the annular gap between the baffle plate and the barrier plate of the tool disclosed in Assignee's pending application Nos. 1-4. Exemplary applications of this technology for sealing the gap between the baffle plate and the barrier plate are further described below.

In one aspect, the present invention relates to a system for processing a microelectronic workpiece. The system includes a process chamber containing a work piece and a fluid passageway fluidly connecting the ambient air and the process chamber, the system comprising a first state in which an amplified flow of ambient air is introduced into the process chamber through the fluid passageway; Wherein the amplified flow of ambient air is at least partially generated by the flow of pressurized fluid flowing into the fluid passage through an orifice upstream from the process chamber, wherein the system further provides that at least a portion of the process chamber and fluid passages are blocked from ambient air. And a non-ambient gas having a reduced oxygen content relative to ambient air is allowed to flow through the fluid passage into the process chamber.

In another aspect, the present invention relates to a system for processing a microelectronic workpiece. The system includes a processing chamber accommodating a work piece; And a fluid passageway fluidly connecting the ambient air and the process chamber. The system includes a first state in which an amplified flow of ambient air is introduced into the process chamber through a fluid passageway, wherein the amplified flow of ambient air is at least in part by the flow of pressurized fluid flowing through the orifice downstream of the process chamber into the fluid passageway. The system also includes a second state in which at least a portion of the process chamber and fluid passageway are isolated from the surroundings and non-ambient gases having reduced oxygen content to ambient air flow through the fluid passageway into the process chamber.

In another aspect, the present invention relates to a system for processing a microelectronic workpiece. The system includes a processing chamber accommodating a work piece;

A fluid passageway fluidly connecting ambient air to the process chamber. The fluid passage includes a venturi formed in a fluid passage located in such a manner that the gas flow through the venturi defines a boundary of at least a portion of the processing chamber, and an orifice disposed upstream from the venturi and fluidly connected to a source of pressurized gas. The orifice is such that the pressurized gas is significantly higher than the ambient air such that the orifice is configured and the flow of pressurized gas through the orifice to amplify suction of ambient air into the fluid passage through the venturi into the process chamber,

The fluid passageway includes a source of non-ambient gas fluidly connected to the process chamber in such a way that non-ambient gas is introduced into the process chamber through the venturi of the fluid passageway when at least a portion of the process chamber and the fluid passage block the surroundings.

In another aspect, the present invention relates to a method of treating a microelectronic workpiece.

A method of processing a chromonic workpiece comprises placing a workpiece in a processing chamber;

Using a low flow of pressurized gas through the orifice to produce an amplified flow of ambient air;

Introducing an air amplified flow into the process chamber;

While the amplified air is introduced into the process chamber, processing the work piece.

In another aspect, the present invention relates to a system for processing a microelectronic workpiece,

A processing chamber for receiving a work piece, the processing chamber including a boundary for blocking the work piece and ambient air. Part of the boundary comprises a curtain of flowing gas;

 A movable cover positioned over the workpiece to define a boundary of at least a portion of the processing chamber, the cover having a first state in which the cover covers a first position during processing of the workpiece housed in the processing chamber and the cover being chamber A second state in a second position to allow for discharge to the cover, wherein the cover optionally includes at least one inlet port through which at least one treatment fluid is introduced into the treatment chamber.

When the cover is in the first position such that the gap is between the cover and the one or more boundary members during the workpiece processing, the one or more boundary members adjacent the gerber but having an edge spaced with the cover;

While the cover is in the first state, it is provided with a curtain of flowing gas defining a boundary to the gap to block the processing chamber and ambient air during at least some of the processing.

In another aspect, the present invention relates to a system for processing a microelectronic workpiece,

A processing chamber accommodating a work piece having an outer surface;

A movable cover positioned over the work piece and having an outer circumferential surface, the cover including one or more inlets through which at least one processing fluid is introduced into the processing chamber;

A circumferential surface of the cover during the portion of the workpiece's processing, such that the gap is between the cover and the movable boundary, forming a portion of the exhaust duct having an inlet adjacent the outer circumferential surface of the workpiece; Has an inner circumferential surface adjacent to but spaced;

 During part of the treatment a curtain is formed which flows a gas defining a boundary along the gap to block the process chamber and ambient air.

The above-mentioned advantages of the present invention and the method of performing the same will become more apparent and the present invention will be readily understood by those skilled in the art by referring to the following embodiments of the present invention in conjunction with the accompanying drawings.
1 is a schematic diagram of a single wafer processing tool in accordance with the principles of the present invention;
FIG. 2 is a perspective view of a collar and barrier plate assembly for the tool shown in FIG. 1. FIG.
3 is a perspective view of an associated tubing utilized in the collar of the suction assembly and the tool of FIG.
4 is a bottom perspective view of the suction assembly and associated tubing shown in FIG. 3;
5 is a top perspective view of the base member of the suction assembly of FIG.
6 is a bottom perspective view of the base member of the suction assembly of FIG.
7 is a top view of the suction assembly of FIG. 3.
8 is a cross-sectional view of the suction assembly of line AA of FIG. 7.
9 is a perspective view of a tubing clamp and tubing used to tool the rinsing fluid to the rinsing member of the suction assembly.
10 is a perspective view of the clamp shown in FIG.
11 is a top perspective view of the rinsing member included in the suction assembly of FIG. 3.
12 is a bottom perspective view of the rinsing member of FIG. 11.
FIG. 13 is a top perspective view of the showerhead assembly of FIG. 13. FIG.
FIG. 14 is a top perspective view of the base of the showerhead assembly of FIG. 13. FIG.
15 is a top view of the base of the showerhead assembly of FIG.
FIG. 16 is a top perspective view of the amplified gas distribution system used in the tool of FIG. 1. FIG.
FIG. 17 is a bottom perspective view of the amplified gas distribution system utilized in the tool of FIG. 1. FIG.
FIG. 18 is a perspective view of the menipoold used in the expanded gas distribution system of FIG. 16. FIG.
FIG. 19 is a cross-sectional view of the menipoold of FIG. 18 showing a fluid flow passage through the menipoold. FIG.
FIG. 20 is another cross-sectional view of the menipoold of FIG. 18 showing a fluid flow passage through the menipoold. FIG.
21 is a cross sectional view of the air amplifier used in the amplified gas distribution system of FIG.
Fig. 22 is a top perspective view of a ring-shaped gas generating member provided on the baffle member.
FIG. 23 is a close-up perspective view of the cross-section of a portion of the assembly shown in FIG. 22. FIG.
24 is a top perspective view of the baffle member of FIG. 22;
Fig. 25 is a bottom perspective view of the ring-shaped member of Fig. 22.
Fig. 26 is a close-up perspective view of the part of the ring-shaped member of Fig. 22.
FIG. 27 is a schematic diagram illustrating a hybrid technique for sealing the gap between the baffle barrier plate and adjacent baffle members using both gas flow and physical contact to set up the seal.
FIG. 28 is a top view of the ring-shaped member shown in FIG. 27 to seal the gap.
FIG. 29 is a bottom perspective view of the ring-shaped member shown in FIG. 27. FIG.
30 is a perspective view of a portion of the ring shaped member of FIG. 27 shown in cross-sectional view.

Example

The embodiments of the invention described below are not intended to be limited to the details set forth in the following detailed description. Moreover, the present embodiments have been selected and described to enable those skilled in the art to understand the principles and practice of the present invention. Although the present invention described certain improvements to the unique single wafer processing system described in the assignee's common pending application cited in the present invention (an example obtainable from FSI International Inc. of ORION), The principles of the present invention can of course be applied to other microelectronic processing systems.

The principles of the invention relate to a tool for processing workpieces one by one or in a batch. 1 is a schematic diagram of a tool 10 incorporating the principles of the present invention.

The 'closed mode' of operation means that the ambient atmosphere outside the processing chamber and the environmentally controlled fluid passages of the tool 10 and the controlled control environment are blocked so that the processing of one or more workpieces is used in the processing chamber of the tool 10. it means.

One kind of this controlled environment is an environment having an inert atmosphere with reduced oxygen content to the environment during treatment, to reduce corrosion of the susceptible material to the work piece (s). In other applications, the treatment may occur at reduced oxygen where oxygen is preferably excluded as appropriate.

The 'open mode' of operation means that it occurs in the presence of ambient air in or in the processing chamber.

In the practice of the present invention, at least a portion or, preferably, most of the ambient air is supplied through environmentally controlled passage (s) using air amplification techniques. The simple action of opening or closing these passages and the operation of the air amplification hardware allows the introduction of ambient air into or away from the process chamber as desired.

The physical positioning of the outer chamber boundary should not change itself to accommodate the transition between open and closed chamber modes to maintain high process uniformity. Additional ambient air may pass through one or more (described) gaps or other orifices, even if the gap is blocked by gas curtains, physical closures, physical barriers, or boundaries to prevent ambient air from entering the process chamber through the holes. May enter the process chamber.

To illustrate, tool 10 may be housed in tool 10 at any time with a single work piece 12, and liquid (s), gas (es) and / or other processing media may be provided with work piece 12. A type that receives one or more treatments in contact with.

In the microelectronics industry, for example, the tool 10 is called a single wafer processing tool.

Workpiece 12 typically includes a semiconductor wafer or other microelectronic substrate during fabrication.

As shown schematically in FIG. 1, the tool 10 comprises a base portion 14 and a barrier / distribution portion 16 as the main assembly. In practical use, the base portion 14 and the barrier / distribution portion 16 may be installed in a framework (not shown) and surrounded in a housing (not shown) of the tool 10. This installation consists of via screws, bolts, rivets, adhesives, welding, clamps, brackets, and combinations thereof. Preferably, the base 14 and the dispensing 16 are installed independently or removable to facilitate service, maintenance, upgrades and / or replacement.

The base portion 14 and the barrier / distribution portion 16 form a processing chamber 18 in which the work piece 12 is disposed during processing. Base portion 14 and / or barrier / dispensing portion 16 include one or more features or capabilities for placing workpiece 12 in process chamber 18 or rotating the workpiece from process chamber. These features and capabilities can include doors (not shown) that can be opened and closed to provide the desired discharge. Alternatively, either or both of the base portion 14 and the barrier / distribution portion 16 may move relative to each other to provide an outlet. The state movement can occur in the illustrated embodiment by raising and lowering the barrier / distribution portion 16 with the base portion 14 secured to a surrounding framework (not shown). In embodiments where the base portion 14 comprises one or more moving baffle members as described in the assignee's common pending applications Nos. 1 and 2, the baffle members are raised and lowered for this discharge.

The base portion comprises a housing 20, a chuck 22, a motor 22, a rear dispensing head 26 and annular baffle members 34, 36 and 38. The work piece 12 is supported by the chuck 22 in the processing chamber 18. The chuck 22 can be fixed or movable around the central axis. For illustration purposes, this figure shows an embodiment of a tool 10 in which the chuck 22 is rotationally driven by a motor 22 such that the work piece 12 spins about an axis during processing. In the embodiment where the work piece 12 spins by the rotating chuck 12, this spin serves to evenly spray the processing material onto the work piece 12.

The chuck 22 can secure the work piece 12 in a number of ways by conventional techniques. Preferably, chuck 22 includes an edge fixation structure (not shown) that secures the workpiece such that a gap 28 exists between workpiece 12 and chuck 22. This fixation distributes treatment chemicals containing wash water to the top or bottom of the work piece 12.

Optionally, the tool 10 includes dispensing structure (s) for treating the bottom of the workpiece piece 12. The illustrated rear dispensing mechanism is shown by a circular dispensing head 26 through which one or more process chemicals are dispensed to the bottom of the work piece 12. The treatment chemical is supplied to the rear dispensing head 26 via the shaft 30 passing through the central bore 22 of the chuck 22. In the embodiment where the chuck 22 rotates, there is a gap between the shaft 30 and the central bore 32 so that the shaft 30 and the central bore 32 do not contact when the chuck 22 rotates. do. The rear dispensing head 26 is connected to one or more sources (not shown) of processing material for dispensing on demand.

The housing 20 surrounding the process chamber 18 includes a base fan 33 and movable baffle members 34, 36 and 38. The baffle members 34, 36 and 38 include a movable boundary that includes at least a portion of the discharge ducts 42, 44. Ducts 42 and 44 are used to capture various processing fluids for recycling, discarding, and other processing. Different processing fluids may be found in different independent ducts to minimize cross contamination or use unique capture protocols for different fluids. Each of the ducts 42 and 44 has inlets 41 and 44 adjacent to the outer periphery of the work piece 12. Each of the ducts 42 and 44 has outlets 44 and 46 through which the material (s) are discharged.

Adjacent baffle members move closer to each other or away from each other to choke or open the corresponding duct passageway. For example, when adjacent baffle members are relatively separated from each other, the duct opens between the baffles and expands between the structures. As these structures move relative together, the ducts between them are choked and reduced in size. For illustration, the discharge duct between the upper baffle member 34 and the middle baffle member 36 is opened, while the lower discharge duct 42 between the middle baffle member 36 and the bottom baffle member 38 is choked. do.

For illustration, the tool 10 includes three movable and overlapping baffle members 34, 36, 38, with two outlet ducts 42 and 44 between them. However, embodiments of the present invention may include more or less baffle members and correspondingly more discharge ducts.

There is a gap 48 between the base couple 14 and the barrier / distribution portion 16. When the tool 10 is in closed mode operation, i.e., oxygen from the surroundings or other sources is exhausted from the processing chamber 18 during the work piece 12 processing, the tool 10 enters the processing chamber 18 through the gap 48. It is desirable to block or remove the gap 48 to prevent entry.

The principle of the present invention is to sufficiently seal the gap 48 by using a curtain 50 through which the gas blown out of the member 52 flows to form a boundary along the gap 48 so that the process chamber 18 and the outside of the process chamber are closed. Isolate with the environment. For some reason, the boundary in the form of curtain 50, which is desirable to block the process chamber 18 and the environment, is set according to the tool during at least some of the treatment. Pressurized gases, such as nitrogen, carbon dioxide, argon, and combinations thereof, supplied to the member 52 from a suitable source (not shown) via suitable piping (not shown) form the conton 50. Is used.

In a preferred embodiment, the base portion 202 is in the form of the “treatment portion” described in the assignee's pending patent numbers 1 and 2. In this embodiment, the member 52 generates an annular curtain 50 of gas between the baffle member, preferably the upper baffle member 34 and between the inner rim of the baffle member and the outer periphery of the adjacent barrier plate structure. It is located to Representative embodiments of the present invention having such a structure are described in detail below.

As schematically shown in FIG. 1, an exemplary embodiment of the barrier / distribution portion 16 includes a collar 54 installed in the center of the barrier plate 56. The barrier / distribution portion 16 is similar to the “distribution assembly 554 of the assignee's pending applications 1-4, and is thus coupled to the“ movable member 526 ”and described in these pending applications. However, due to the nature of the collar 54 and the environmentally controlled fluid passages associated with the collar 54, the barrier / distribution portion 16 of the present invention is more environmentally controlled. And a fluid passageway that is more easily removable with the environment on demand.

A preferred embodiment of barrier plate 56 is described as “barrier 102” in assignee's pending application third. According to a preferred embodiment, barrier plate 56 is annular in shape and includes a bottom 262. The bottom surface 52 of the barrier plate 56 has one or more properties of collecting or removing the liquid present.

As described in the third party's pending application, suction techniques and features can be used to remove the liquid. To this end, the tube 70 draws fluid from the bottom 58 of the barrier plate 56. According to the assignee's pending applications 1 and 2, the position of the barrier plate 56 relative to the work piece 12 is controlled via the z axis movement of the movable support fold 526.

Preferably, bottom 58 of barrier plate 56 is formed of work piece 12 to form a taping flow channel 64 between work piece 12 and bottom face 58 of barrier plate 56. It is angled downward in the radial outward direction from the central axis 62 relative to the base plane. The tapered configuration of the channel 64 serves to promote the radial gap outwards from the center of the work piece 12 while minimizing the recirculation area. This taper also serves to increase this velocity by gently hunting the velocity of the flow fluid reaching the outer edge of the work piece 12. This reduces the liquid splash effect.

The angle of the bottom surface 58 does not allow the collected liquid to fall below the work piece 12, but rather to quickly process the liquid on the bottom surface 58 with respect to the outer peripheral surface to be sucked.

The tapered configuration reduces the recycle of particles to the work piece 12. This tapered configuration also promotes chemical regeneration efficiency by better fluid suppression. In addition, for embodiments of this feature, the annular barrier plate 56 includes a lid or cover of the processing chamber 18 to provide a protected environment for workpiece processing and to include material dispensed into the processing chamber 18. Function of. However, in many embodiments, since the barrier plate 56 is movable up and down, the annular barrier plate 56 helps to form the process chamber 18, i.e., helps to establish the gap 48. Instead of making direct physical contact with other barriers, they are located close to each other. This minimizes particle generation that can occur due to such contact.

This also minimizes the risk of the controller losing track of the stepper motor, which may occur during the movement of the barrier plate 56.

Angled bottom 58 may be one or more linear (conical), parabolic, polygonal, or the like. For illustration, the bottom 58 hunting linearly toward the work piece 12 in a radially outward direction.

The barrier / distribution portion includes one or more independent mechanisms for distributing the processing material to the processing chamber 18. For example, the illustrated implementation includes one or more, preferably two or more, more preferably three or more different types of dispensing capabilities. In one capacity, one or more process fluids may be drawn below the workpiece 12, generally in a radius of the workpiece 12, such that the full surface coverage is obtained by rotation of the workpiece 12 under spraying. Thus, a spraying dispensing structure is included. In a preferred embodiment,

This capability is achieved by a dispensing structure such as a spray bar installed in the barrier plate 56 and the suction assembly 200. An embodiment of a spray bar and a method of confining the spray bar to the barrier / distribution structure is described in the assignee's pending application 3 as the “spray bar 178”.

Another dispensing capability includes a dispensing structure that distributes the treatment chemical to the center of the workpiece 12. As the work piece 12 spins, the material distributed centrally is distributed to the surface of the work piece. In a preferred embodiment, this capability is provided by a central dispensing nozzle assembly mounted to the intake assembly 200. A preferred embodiment of such a nozzle is described in the assignee's pending application No. 3 as "central in-nozzle assembly 518". Installation of this unit is similar to that described in this pending application and further described below.

In addition, the showerhead dispensing member 360 installed and supported in the intake assembly 200 provides another method of introducing gas and / or vapor into the process chamber 18, including process material, typically entrained material. do. The showerhead distribution member distributes this one or more flows to the corresponding venturi-like passages in the downstream intake assembly 200. One or more flows from the venturi shaped passages are distributed downstream of the process chamber. The venturi characteristics of the venturi shaped passages of the intake assembly serve to improve control of flow in the process chamber and prevent backflow into the annularly controlled fluid passages extending upstream of the collar 54.

The distribution element of the barrier / distribution portion 16 is coupled to one or more sources (not shown) of provided treatment material via suitable supply lines. These materials can be dispensed or mixed as desired.

Because the tool 10 is very flexible in processing, a wide variety of processing can be used. Small examples of representative treatment materials are gases, liquids, ie, nitrogen, carbon dioxide, clean dry air, steam, argon, HF gas, water soluble HF, water soluble isopropyl alcohol or other alcohols and / or surfactants. Material (s), deionized water, aqueous solution of ammonium hydroxide, aqueous solution of antioxidant and / or desiccant and precursor (sulfur trioxide (SO ₃ ), sulfur peroxide (H ₂ SO ₄ ), ammonium persulfate (H ₂ S ₂ O ₈ ) Fluoric sulfuric acid (HSO ₃ F) and chloro sulfuric acid (HSO ₃ Cl), aqueous solution of nitric acid, aqueous solution of phosphoric acid, aqueous solution of hydrogen chloride, oxidizing agent, ie hydrogen peroxide and / or ozone gas, water soluble ozone, surfactant, organic acid and solvent, Chelating agents, deoxygenating agents, and combinations thereof.

The amplifying gas distribution site 462 is located upstream of the collar 54 and is fluidly coupled to the showerhead distribution member 360. For illustration, amplification gas distribution site 462 is fluidly coupled to collar 54 via supply lines 444 and 448. This supply line serves to supply the unique showerhead member in the showerhead distribution member 360. In other embodiments, if some supply line is desired, it can be used. Amplifying gas distribution site 462 includes air amplifier 498, valve 520 and manifold 466 as main components. Menipools 464 include an inlet 468 for receiving the amplified flow of air and one or more unique inlets for receiving the flow of ambient gas. For illustrative purposes, the unique inlet 472 supplies an inert gas such as nitric acid, carbon dioxide, etc. to the manifold.

The air amplifier 498 includes an inlet 504 for receiving a pressurized gas stream and an air inlet 504 for receiving a supply of ambient air. The flow of pressurized gas to the air amplifier 408 draws the flow of air from the environment. When the valve 520 is open, a flow of ambient air flows to the manifold 464. Here, air flows through the showerhead distribution member 360 via supply lines 444 and 448.

When the valve 520 is closed (although it is preferable to stop the flow of the pressurized gas to the inlet 504), depending on whether the flow of the pressurized gas to the inlet 504 of the air amplifier 498 is stopped, Environmentally controlled fluid passages extending through the manifold 464, the supply lines 444 and 448, the showerhead distribution member 360 and the intake assembly 200 are isolated from the surroundings.

One or more non-ambient gases, for example a flow of inert gas, such as nitrogen, etching gas, etc., are opened through the supply lines 444 and 446 to the fluid passage via the supply lines 444 and 446 by opening the valve 66. Is introduced.

Where it is desirable to further block the process chamber 18 and surroundings to exclude oxygen, a member 54 is used to create a barrier across the gap 48 to generate a curtain of gas 50.

1 and 2 to 26 incorporate the principles of the present invention. Representative view of an improvement of the barrier / distribution portion of the assignee's pending applications Nos. 1 to 4. A description of the improvements to the barrier / distribution portion described in pending application number 4 is as follows. Improvements in the air intake and showerhead of the present invention that form the collar 54 allow gas flow passages through these elements to be further blocked to the environment.

In particular, environmentally directed gas may surround at least a portion of the amplification gas distribution site 462, supply lines 444 and 448, a showerhead distribution member 360 and a passage portion extending through the intake assembly 200. The controlled fluid passage (s) are sealed very effectively with the surroundings. The shutter used in the prior art embodiment for the showerhead and intake assembly embodiments of the prior art shown in pending applications Nos. 1 to 4 is no longer needed. Improved shutoff by fluid passage technology makes it easier for the tool 10 to switch between a closed mode and an open mode of operation.

Moreover, the amplification element described in detail below can, if desired, be highly refined in a clean room that encloses a large amount of air from the surroundings (the surroundings associated with it, or in some cases even cleaner than the surrounding clean room). May be a source of ambient air, such as highly purified air in the region, another purified source of air, or other ambient source). The showerhead supplies air to the process chamber via a passageway containing an air intake structure. Upstream from the inlet and / or showerhead structure. As a result, the showerhead structure has been refined to handle large flows of ambient air supplied by the air amplification element and to minimize turbulence due to such flows, without inadequate pressure drop.

Elements of the collar 54 are shown in detail in Figures 2-10. The suction assembly includes an upper member 202, a foundation member 256, and a rinsing member 324 clamped between the upper member 202 and the foundation member 256.

The upper member 202 includes a body 204, an upper flange 246, a bottom flange 2400, a wall 210 and a wall 220. The annular body 204 has a lower cut outer wall surface 206. The outer wall is cut down to reduce weight and provide easy access to the assembly hardware The gentle shape of the inner wall 25 is the intake assembly 200. The flow of the gas through the gas is more gentle. The walls 210 and 220 fill the inner space of the upper member 202 with the central through hole 230, the first D-shaped hole 232 and the second D-shape. Subdivided into holes 234. The central through hole 230 is a portion of the barrier that is blocked from the fluid passage through the D-shaped holes 232 and 234, with the introduction of nasal tubes, wires, optical fibers, sensors and other tool elements. D-shaped holes 232 and 234 form inlet regions 310 and 318 of venturi shaped passages 308 and 316. The gas is then introduced into the process chamber 18 with good control characteristics through this venturi-shaped passageway.The walls 210 and 220 reinforce and support the upper member 202. The walls 210 and 202 ) Supports the showerhead dispensing member 360 when the suction assembly 200 and the showerhead dispensing member 360 are assembled.

Top surfaces 2140 and 224 of walls 210 and 220 and top surface 248 of upper flange 246 include threaded holes 212 and 222. This uses screws (not shown). To provide a fastening method for installing the showerhead dispensing member 366 in the suction assembly 360. The use of screws facilitates disassembly during maintenance and repair. Of course, in connection with the fastening of the present invention, When screws are used, other assembly techniques may be used, for example rivets, glues, welding, bolts, clamps, tapes, combinations of dies.

An annular rabbit is formed on the outer circumference of the bottom of the body 204. The rabbits 224, 226, and 226 include a pocket for clamping the lifting member 3240 when the suction assembly 220 is assembled, and the end wall 254 of the central through hole 230 is a lifting member. And cut region 250 secured to piping connection 338 of 324. End wall 254 is also used to secure retaining clamp 342 to end wall 254, as further described below. And a threaded hole 354. The clamp 342 then secures the pipe supply lines 356 and 358 to the pipe connection 338.

The bottom flange 240 extends radially outward from the bottom of the upper member 202, and the upper flange 246 extends radially outward from the top of the end member. Flanges 240 and 246 reinforce body 204 and also secure upper member 204 to other elements. To this end, the bottom flange 204 includes holes to secure the top member 204 to the base member 254 using a suitable fastener (not shown). Similarly, on the upper surface of the upper flange, the upper member includes holes for securing to the showerhead dispensing member 360 and / or the framework (not shown) of the tool 10.

The upper member 202 may be formed of various materials that are hydrogen or hydrophilic. In certain embodiments, it is desirable to manufacture the upper member 202 from a hydrogenous material, such as a fluoropolymer. In an exemplary embodiment, polytatrafluoroethylene is a suitable material.

Foundation member 256 includes a body 258, an upper flange 296, a bottom flange 302, a wall 266, a wall 268, and a recessed bottom 270. The body includes a cut outer wall surface 262 and a smooth inner wall surface 262. Outer wall 262 is chamfered to reduce weight and to facilitate access to assembly hard fairs. The inner wall surface 262 has a gentle shape to moisten the gas flow through the suction assembly 200. The inner wall surface 262 is shaped to include a thick wall portion 264 in the middle between the top and bottom of the base member 256. Thick wall portion 264 provides throat areas 314 and 322 of venturi passages 308 and 316.

The upper flange 296 extends outward from the top of the base member body 258 and is typically annular. Upper flange 296 includes a hole 300 that connects the foundation member to the upper member 202 using a suitable fastener. The top surface 298 of the upper flange 296 is flat as shown to fit the shape of the bottom flange 240 of the upper member 202 attached thereto. However, the flanges 296 and 240 may have an uneven engagement shape. For example, gloves, protrusions, reliefs or other characteristics may be provided for engagement during assembly. Optionally, a gasket (not shown) may be provided between the flange 296 and the flange 240 to secure the fluid seal.

The bottom flange 302 extends outwardly to the bottom end of the body 258 and is also annular. The bottom flange 302 uses suitable fasteners having the characteristics as described in the assignee's pending application Nos. 1-4. A through hole 306 secures the suction assembly to the barrier plate 56 shown in FIG. 1. A barrier plate with integrated spray bar characteristics as shown in the assignee's pending application number 3 is preferred. Certain embodiments of highly preferred barrier plates with integrated spray bar bar properties are included in the ORION tool available from FSI International Inc.

Walls 266 and 268 extend from one side of body 258. When the suction assembly 200 is assembled, these walls 266 and 268 are arranged under and alongside the walls 210 and 220 of the upper member 202. As a result, the walls 266 and 268 have a central hole 282 that parallels the interior volume of the foundation member 256 with the central through hole 230, and a D-shaped hole 288 that is parallel with the D-shaped hole 232. And the D-shaped holes 290 parallel to the D-shaped fins 234. D-shaped holes 288 and 232 define a first venturi shaped passage 308 through suction assembly 200 and D-shaped holes 290 and 238 are second venturi through suction assembly 200. The passage 316 is formed. The first venturi shaped passage 308 extends from the inlet 310 to the outlet 312, and the passage 308 includes a throat area 314 restricted to the flare inlets 310 and 312. Similarly, the second venturi-like passage 316 extends from the inlet 318 to the outlet 320 and defines a throat area 322 in which the passage 316 is restricted to the flare inlet 318 and the outlet 320. Include.

Each venturi shaped passageway 308 and 316 introduces gas into the process chamber 18 with good suppression capability with or without a entrained structure. In use, one or more gases, such as air, clean dry air, steam, nitrogen, carbon dioxide, argon, isopropyl alcohol vapor, combinations thereof, and the like, may pass through the inlet assembly 200 via the inlets 310 and 318. It is supposed to enter. One or more gases exit the process chamber 18 through outlets 312 and 320. The venturi-shaped passages 308 and 316 serve as a suppression system with the treatment material, which may be liquid, solid, or gas, preferably contained in the processing chamber that requires a hole for introducing the processing gas. In other words, at a sufficient flow amount through the venturi region, the fluid tends to flow in one direction through the minimal countercurrent venturi. In conclusion, even though the fluid passage through the air inlet 200 is blocked by a physical solid barrier, it serves as a boundary that constrains the fluid material in the processing chamber.

For example, during a typical process, make-up air or other gas is introduced into the venturi shaped passages 308 and 316. Incoming air or gas is accelerated as it passes through throat area 314 of passages 308 and 316. Significantly high velocity air or gas moves through the throat areas 3140 and 322 to the process chamber to prevent fumes or other processing fluids from flowing back to the inlet assembly 200. Alternatively, the throat limit or In air intake passages lacking sufficient height, treatment chamber fumes may escape and, due to the loss of such treatment materials, may cause stability problems, contamination, and reduced treatment capacity.

In one exemplary operating condition, total haze and stamp suppression can be achieved using about 10 to about 50 cfm inlet air. In this test, the workpiece is spun on the chuck at 250 rpm with 1 liter of deionized water sprayed at 65 ° C. In the illustrative example, the width of each of the venturi throats is 1.007 inches, while the width of the inlet and outlet corresponding to each is 1.44 inches. The venturi-shaped passageway is 3 inches long. In the open mode, the flow of air can be set using air amplification with or without introducing exhaust into the process chamber.

In the closed mode, exhaust is introduced to establish this flow. Being parallel to the central through hole 230, the central hole 282 is blocked from the fluid passages 308 and 316 of the inlet assembly 24, whereby piping, wires, optical fibers, sensors and other tools are introduced. The other part of the passage 307 is formed.

Hole 284 in endwall 286 provides an escape for center hole 282 to allow the device to enter and exit the bottom of center hole 282 near floor 270.

For example, the tube 70 is led down through the central hole 307 and then exits to the air structure of the barrier plate to which the suction assembly 200 is attached. Optionally, as shown in the figure, although it is desirable to provide a rinse supply line, the supply lines 356 and 358 for supplying the rinsing fluid to the rinsing member 324 are supplied through the holes 284. If such a hole 284 is not used, it is preferable to plug the hole with a movable plug.

Walls 266 and 268 serve as well as other functions. Walls 266 and 268 coincident with walls 210 and 220 of upper member 202 support showerhead dispensing member 360. Walls 266 and 268 reinforce and reinforce foundation member 256. It is firmly fixed to the bottom surface of the upper member 202 to clamp the rinsing member 324 in a position when it is fixed together with the upper surface 298 of the upper flange 296.

4, 6, and 8, the floor 270 is recessed under the foundation member 256. When the suction assembly 200 is installed in the barrier plate 56 of FIG. 1, it is fixed across the distribution element to form a pocket for receiving it. To this end, the bottom 270 is provided with holes 272 and 274 fixed over the piping connections connecting the supply line (not shown) to the splitter bar (not shown) integrated in the barrier wall 56 of FIG. It includes. Hole 278 accommodates piping connections to a central dispensing nozzle assembly (not shown), as described in assignee's pending application Nos. 1-4, while hole 276 provides a decentral distribution to floor 270. Accepts mountings such as nozzle assemblies. The hole 276 serves to attach the suction assembly 200 to the dispensing bar. Attachment through a hole 306 formed in the bottom flange 302 of the foundation member 256 allows the glove 323 to have a gasket (not shown) that provides a fluid tight seal between the suction assembly 200 and the barrier structure. I support it.

During the rinsing operation using a rinsing liquid such as DI (deionized material), it is preferable that the base member 256 is made of a hydrophilic material for uniform wetting of the base member 256. Examples of suitable hydrophilic materials can be obtained by spinning polyylphene sulfides (PPS), typically hydrophobic materials, in appropriate amounts to ionize radiation such as ultraviolet radiation, electron beam radiation.

This PPS is usually pale yellow. Appropriate amount of radiation does not change the physical properties of the PPS, but changes the color of the PPS to be yellowish brown. Often, the color change is a visual indicator that makes the surface hydrophilic. A simple empirical test can be made by injecting water into the treatment material to prevent water from foaming.

In some embodiments, color changes are observed and this surface still remains hydrophobic. This material can be treated several times with ionization energy until the surface becomes hydrophilic. The rinsing member 324 is shown in detail in FIGS. 11 and 12. In the preferred embodiment, the rinsing member 324 shown is the same as the " ringing member 14 " described in pending application no. The rinsing member 3240 includes a ring forming body that has a fixed size within the rabbits 216, 226, and 244 when the upper member 202 and the base member 256 are fastened together. 328 and 330 extend from one side of the ring-shaped body to the other. The rinsing member 324 corresponds to the venturi passages 308 and 316 and the central passage 337 in the assembled inlet assembly 200. Forming holes 332, 336, and 338. The rinsing member 324 is primarily expected to dispense water into the rinsing liquid and may be made of hydrophilic and / or hydrophobic materials.

The elements of the suction assembly 200 are assembled to make the sealed structure effective, and such gasket materials or seals may be used in suitable interfaces and such materials and techniques are known.

The rinsing member 324 includes a fluid dispensing arrangement for introducing a liquid or other liquid into the rinsing member 324, the fluid being controllably distributed to the rinsing member 324 to barrier with the venturi passages 308 and 316. Rinse the base member wall that forms the bottom face of the plate 56.

To this end, fluid is introduced to the rinsing member 324 via the tubing connection 328. For dispensing, the ring shaped body 326 includes an array 329 of dispensing nozzles provided in each portion of the ring shaped body 326. The nozzles in each array 329 are directed to distribute the fluid directly or indirectly to the inner wall of the base member 58. Additional arrays 331 and 333 of dispensing nozzles are preferably provided for each arm 328 and 330. These nozzles are directed to distribute the fluid directly or indirectly to the faces of walls 266 and 268. Further details regarding the internal structure (eg fluid passage), nozzle orientation, nozzle pattern and rinsing member are disclosed in the assignee's pending application No. 4.

To introduce fluid into the rinsing member 114. Supply pipes 356 and 358 are connected to pipe connection 338 by flare fittings using retaining clamps 342. Retention clamp 342 includes a hole 344, each hole having a small end and a large end, as described in the cited assignee's pending application.

The large end is secured to the piping connection 338, while the small end receives the feed rods 356 and 358. Fastening hole 350 includes a female thread that secures retaining clamp 342 securely to end wall 286 of foundation member 256 through hole 252 with good fixation to piping connection 328. do. Contour 352 provides space for the fastening hardware used for this. Coupling device 354 formed on top of supply conduits 356 and 358 allows connection of supply conduits 356 and 358 to upstream piping (not shown).

Ionide DI is a suitable rinsing liquid used for rinsing member 324. Ionide (DI) can be cold and supplied around or hot. It has been found that it is appropriate to use ionization (DI) at ambient temperature (about 19 ° C.-26 ° C.).

The use of dual feed lines 356 and 350 to supply rinsing fluid to the rinsing member 324 is a preferred choice. Depending on the desired rinsing action, if one tube provides a significantly higher and more violent flow of rinsing liquid, it can be used while the other tube can be used to provide a lower or less violent flow of rinsing liquid.

Both flows can be introduced at the same time even in the case of large flows. In a representative embodiment, ionized water (DI) introduced at a flow rate of 5 liters per minute through one tube is suitable for high flow rates, while ionized water (DI) introduced at a flow rate of 2 liters per minute through the other tubes has a low flow rate. I found it suitable for.

Using appropriate flow control techniques, it is possible to adjust the flow through each of the tubes 356 and 358. In either form, a valve (not shown) may be set to open and close to allow the flow through a particular supply line to open or shut off.

 This has the advantage of being very simple to do. In this opening and closing method, as illustrated, the use of two or more feed lines provides good control over the amount of leasing flow. The flow may be adjusted such that the amount of flow through the one or more feed lines is adjusted at any level or closed within the desired range. Using several techniques, a single supply line is sufficient to provide good control over the rinse flow introduced to the rinsing member 324.

The rinsing member 324 provides a good rinsing action. It is desirable for this nozzle to be close to the surface being wet so that the rinsing fluid is distributed to the surface being wet while minimizing bounces or drops that may cause contamination of the work piece. In a preferred embodiment, the nozzle is preferably inclined towards the surface being wetted and has a member configuration as described in the assignee's pending application No. 4, and is very close to the target surface. Usually 0.1 mm-20 mm, more preferably 0.1 mm-5 mm even 1 mm from the target surface.

This configuration promotes a gentle flow of fluid to the surface being wet. Dispensing conditions are selected such that splashing and spraying are prevented to prevent the amount of fluid generated when it comes into contact with the target surface. In more preferred dispensing conditions, the dispensed stream exits the target surface and sprays when the stream reaches the target surface. Fluid spray wets the stream as much as possible. For example, wetting of the entire surface is most preferred.

The nozzle pattern is chosen to provide minimal overlap of adjacent flows when spraying occurs. Wetting of the entire surface through the branching flow is preferably accomplished until it flows into the throat regions 314 and 322 of the venturi shaped passages 308 and 318.

Achieving the full surface coverage at this stage enables a more gentle and sheeting flow of liquid to the bottom surface of the barrier structure fluidly connected to the venturi surface. The gas flow accelerating through the stream regions 314 and 321 further promotes the spraying and sneak of the fluid flow to the bottom face of the barrier structure.

When it is distributed to the hydrophilic surface of the venturi passageway wall, the effective range and excellent planar action of the hydrophilic surface are observed with very little bounce or splash formation. As the rinse liquid moves from the venturi passageway to the adjacent hydrophilic bottom of the barrier plate, a facet flow that causes the rinse liquid to flow gently and uniformly covers the lower hydrophilic surface of the barrier plate. When the rinse liquid flows down the outer side of the barrier plate, it is preferable to use an exhaust procedure to collect the rinse liquid, as disclosed in the assignee's pending application No. 3. This exhaust occurs during rinsing or at the end of the rinsing.

The position of the rinsing member 324 indicates that the rinsing liquid is surrounded by the surfaces forming the venturi passages 308 and 316 over the throats 314 and 322. By introducing liquid from the nozzles above the passages 308 and 316 and by being located proximate the walls of the passages 308 and 316, the nozzle structure is in ultramini with fluid flow moving through the inlet passage. Crash. If the nozzle catches moisture, water droplets tend to flow below the surface, rather than falling below the processing chamber where contamination of the work piece may be most dangerous.

Because they are located above the throat areas 314 and 322, the nozzle structure is outside the suppression boundaries provided by these throats. This serves to prevent contamination of the nozzle structure. This also allows the rinse to reach all surfaces to treat residual residue. A further advantage is that it is easy to form branched fluid streams that can achieve good surface wetting. If the nozzle is located below the throat area, the angle included in the branch nozzle pattern requires tighter tolerances to be more important and efficient. Several features and advantages associated with the rinsing member and the row arrays belonging to the rinsing member greatly reduce particle contamination.

In an embodiment in which a rinsing operation is performed using the rinsing member 324, the hydrophilic portion of the venturi passage below the rinsing member 324 and the hydrophilic lower surface of the barrier plate are fluidly distributed before introducing the work piece into the process chamber. As a result, bounce and splash that can cause particle contamination are substantially prevented. This preliminary rinse also ensures that the hydrophilic surface is thoroughly rinsed and evenly wetted. Before introducing the workpiece, the hydrophilic surface is dried, if desired, but it is convenient to wet the surface and shorten the cycle. Since the wet surfaces are hydrophilic, discrete droplets tend not to form on these surfaces, and the workpiece can be loaded and treated with ultra mini contamination.

Rinsing of the venturi and barrier passages can be done before the chemical treatment step. In addition, rinsing can be done between these chemical treatment steps. The nozzle of the rinsing member 324 can be evacuated to again absorb residual liquid at the end of the rinse dispensing to prevent the drop of water droplets.

Initial wetting of the hydrophilic surface requires more rinse liquid than maintaining the flow at set up. Thus, the rinse liquid delivery can be altered to recognize this effect. For example, after wetting is established, rinse water is introduced in a smaller flow. This flow can be reduced in a pulsed manner by opening and closing the valve. The pearl frequency and duration can be selected to maintain the desired flow rate profile while reducing the overall consumption of the rinsing liquid. In addition, pulsing the rinsing liquid may result in better wetting and cleaning the affinity surface by the variation of each flow pulse.

The showerhead distribution member 360 is provided on the top surface 248 of the upper flange 246 and the top surfaces of the walls 210 and 220 of the suction assembly 200. Showerhead dispensing member 360 is shown in detail in FIGS. 1, 2 and 13-15. In order to form a fluid tight seal in the venturi-like passages 308 and 316, a gasket (not shown) is located in the globe 236 at the top of the suction assembly 200. Showerhead dispensing member 360 has a feature that includes an additional portion of an environmentally controlled fluid passage upstream from corresponding venturi passages 308 and 316.

The showerhead distribution member 360 is useful for establishing a more uniform flow of one or more gases and / or vapors in the process chamber 18. For illustration purposes, the showerhead dispensing member 360 is fed to two sources 444 and 448 that may be connected to the same and / or independent sources to simultaneously dispense two different treatment materials to the process 18. . Of course, other embodiments may include one feed feed or three or more feed feeds. In the illustrated embodiment, feed ducts 444 and 448 are connected to amplified gas distribution sites 462, as described in more detail in Are.

The showerhead distribution member 360 includes a bottom 362 and a cover 412. Bottom 362 includes a panel 364 having an upper surface 366. Rim 368 protrudes downstream from the outer periphery of panel 364 to reinforce and strengthen bottom 362. The side wall 376 includes a first recessed bottom 370 positioned below the panel 364 and a passage portion extending through the showerhead distribution member 360. The bottom portion 408 of the first interior chamber of the showerhead distribution member 368 constituting a portion of the controlled flow passage is controlled. The elongated hole 372 opens in the first venturi passage 308 downstream of the suction assembly 200. The glove 374 holds the gasket 378 to provide a fluid tight seal between the bottom 362 and the cover 412. Part of the sidewall 376 is a wave to maximize the capacity of the chamber portion 408, leaving a space on the top surface 360 to the hole 402 used to fasten the bottom 362 to the cover 412. It has a shape.

Similarly, the sidewalls interconnect panel 364 with a second recessed bottom 380 located below panel 364. The recessed bottom 380 and sidewall 400 form the bottom chamber portion 410 of the second inner chamber of the showerhead distribution member 360 that forms part of another environmentally controlled fluid passageway. Elongated hole 382 is provided in recessed bottom 380. The elongated hole 382 opens in the second venturi passage 316 downstream of the suction assembly 280.

The very large size of the elongated holes 372 and 382 allows the showerhead distribution member 360 to have a very large volume of amplified air and / or other gas supplied from the upstream amplified gas distribution site 462. Easy to handle. Glove 384 supports gasket 388 to provide a fluid tight seal between bottom 362 and cover 412. A portion of the sidewall 400 leaves space in the upper space 366 for the hole 402 used to fasten the bottom 362 to the cover 412 to maximize the capacity of the bottom chamber portion 410. Has a wave contour. An additional hole 463 in the periphery of the panel 364 is used for the fastener to assemble the cover 3120 and the bottom 362 of the showerhead dispensing member 360. Another around the perimeter of the panel 364 Additional holes 404 are used for the fasteners to secure the showerhead dispensing member 360 to the suction assembly 200. The holes 403 and 405 are respectively formed on the outer edge of the cover 412 (cover). It is positioned side by side with corresponding holes 455 and 457 formed on the outer edge of 412.

The panel has a straight central hole 390 sized to be fixed and arranged side by side over the base central through hole 230 of the suction assembly 200. The central hole 390 provides a portion of the simplified passage 307 that directs exhaust, electricity, and other elements through the showerhead distribution assembly 360. The barbelled sidewall 392, which defines the boundary of the central hole 390, includes a contour 406 having space to use fasteners in the hole 404 to install the showerhead distribution member 360 in the suction assembly. .

The cover 412 includes an annular ring 418 and a circular panel 414 extending from the periphery of the panel 414 that reinforces and reinforces the cover 412. The first raised cover area 420 is positioned above the first recessed bottom 370 and forms the top 422 of the first chamber inside the showerhead distribution member 360. The first raised cover area 420 includes a contour 424 with space for using the fasteners in the holes 450 and holes 4020 when assembling the bottom 362 and the cover 412. Second The raised cover area 426 is positioned above the second recessed bottom 380 to form the top 428 of the second chamber inside the showerhead distribution member 360.

The second raised cover area 426 includes a contour 430 that makes room for use of the fasteners in the holes 454 and 455 when assembling the bottom 362 and the cover 4120. Center hole 452 ) Serves over the central hole 390 of the bottom 362 to provide a portion of the simplified passage 307 that guides the exhaust and other components through the center of the showerhead distribution member 360.

One or more treatment materials, generally gas and / or vapor, are supplied to the showerhead distribution member 360 via the fluid inlet members 432 and / or 438. One or more of these fluid (s) enter the inlet 436 of the fluid inlet member 432 and flow through the conduit 434 to the downstream chamber of the showerhead distribution member 360. Similarly, one or more of these fluids enters the inlet 442 of the fluid inlet member 438 and flows downstream of the showerhead distribution member 360 via the conduit 440.

The first supply line 444 is connected to the first fluid inlet member 432 by suitable hardware 446 (see FIG. 2) and the second supply line 448 is connected by suitable hardware 450 (see FIG. 2). Is connected to the second fluid inlet member 438,

In use, a flow of one or more process fluids, in particular one or more gas (es), is supplied to the showerhead dispensing member 360 via the first and / or second feed conduits 444 and 448. The treatment fluid supplied to each tube may be the same or different. The processing fluid is introduced into the corresponding chamber of the showerhead dispensing member 360 via conduits 434 and 440. The pressure of the processing fluid (s) in the chamber is equalized such that the flow through elongated holes 372 and 382 is uniform. Preferably, the pressure differential of the fluid (s) in the showerhead chamber is preferably lower than the pressure drop through the holes 372 and 382 in accordance with the prior art to facilitate this uniform flow. When dispensed through the elongated holes 372 and 382, the dispensing fluid (s) typically flows through the venturi shaped passages 308 and 316 toward the process chamber.

1 and 16 to 21, the amplified gas distribution site 462 is upstream from the showerhead distribution member 360. The showerhead distribution member 360 is fluidly connected to the gas distribution site 462 amplified by piping including first and second supply lines 444 and 448. If desired, the amplified gas distribution site 462 controllably connects the process chamber 18 to at least one source of ambient air and ambient air of a fluid independent of ambient air, such as gas, vapor, and combinations thereof. . Examples of other gases and vapors include nitrogen, argon, carbon dioxide and combinations thereof.

In a preferred embodiment, the amplified gas distribution site 462 is in fluid communication with the ambient air source of the robot compartment associated with the tool 10. This is refined to a very high degree even if this air is higher than around the clean room outside the tool 10. The amplified gas distribution site 462 thereby sucks ambient air from the particle free environment for purification of the microelectronic work piece. Additionally, it is easy to place the site 462 relatively adjacent to the process (es) connected by this site. Of course, the amplified gas distribution site 462, where the appropriate source of ambient air is substantially accessible, may be located at other locations, preferably. Representative candidate locations include other compartments of the tool 10, ambient clean room, other tools in this local clean room or even centrifugal tool or clean room. When the air intake of the air amplifier 498 is fixed with a suitable purifying element, the air amplifier 498 enters into the air amplifier 498 through such a element, and at least partially purifies the fluid to other sources of ambient air that can be purified. Connected. For illustration purposes, the amplified gas distribution site 462 is connected to a nitrogen source independent of ambient air. Although process chamber 18 is operated by a single air amplifier 498, one or more air amplifiers operate one or more process chambers in other embodiments.

In more detail, the amplified gas distribution site 462 is a valve 520 located between the manifold 464 and the air amplifier 498. Manipoold 464 and air amplifier 498. Menipoold 464 allows the menipoold 464 to receive fluid from a plurality of sources and direct the fluid to one or more downstream locations, such as supply lines 444 and 448, showerhead distribution members ( 362, body 466 having a disassembly feature in suction assembly 200 and process chamber 18. In order to accommodate the supply of amplified air from the air amplifier 498, the body 466 is formed by the amplified air channel 470, the junction and branched outlet channels 478, and the first and second outlets 480. An amplified air outlet 468 fluidly coupled to 482.

In order to accommodate the independent supply of nitrogen gas from a nitrogen source (not shown), the body 466 is connected to the first and second outlets 480 by a pressurized gas channel 474, a junction and branched outlet channel 478. And a pressurized gas inlet 472 fluidly connected to 482, wherein the first and second supply lines 484 and 488 are fluidly connected to the manifold 464 to the showerhead distribution member 360. The first and second feed conduits 484 and 488 may be the same as or different from the first and second feed conduits 444 and 448. First and second feed ducts 484 and 488 are secured to manifold 464 using suitable hardware 492 and 494. Mounting tube 496 is used to mount the amplified gas distribution site 462 in a desired location, such as a housing, a framework, or the like.

Air amplifier 498 provides manifold 464 and processing chamber 18 to an amplified flow of air as desired. An air amplifier is a device that uses a very low flow of pressurized gas to generate a significant amount of flow of very low pressure gas. In most cases, the low pressure gas is ambient air. An air heavy aerator draws energy from a small volume of pressurized gas to generate a high velocity, high volume, and low pressure output air flow. Amplification ratios in the range of 1 to 75: 1 can be achieved in commercially available units. In the present invention, it has been found that an amplification ratio in the range of 1 or more to about 25: 1, preferably in the range of 2 or more to about 10: 1.

The air amplifier 498 includes a body 502, an inlet 502, a source of pressurized gas such as nitrogen (not shown), an amplified air outlet 506, and a mounting tab 508. In use, pressurized gas is introduced into the pressurized gas inlet 504. Because of the internal structure of the air amplifier, the pressurized gas draws a large amount of ambient air through the air inlet 502 while pushing the ambient air downstream of the front face to the manifold 464.

21 shows additional features of the air amplifier 498 and how to operate the air amplifier 498. The body 500 of the air amplifier 498 includes a main body member 501, an adjustable core 510, and a rungnut 512. Pressurized gas flows from the compressed gas inlet 504 into the annular chamber 514. The flow of pressurized gas is drawn by the annular gap 516. This speeds up the velocity flow connected to the so-called Coanda profile and directs the flow to the manifold 464. This creates a low pressure region at the air intake 502. This draws a large amount of ambient air from the environment and creates a large volume, high speed output flow through the amplified air outlet 506.

A particularly preferred embodiment of the air amplifier is a model number 40001 adjustable air amplifier, commercially available from NEX, except that the stainless steel locking nut provided in the commercially available unit has been replaced with the locking nut manufactured by PVDF. . This PVDF nut is replaced to protect stainless steel from chemical exposure. In other embodiments, additional elements of the air amplifier or even the entire air amplifier may be made of PVDF, PTFE and / or other inert material (s).

The use of an air amplifier 498 in this regard provides a number of advantages. First, the air amplifier 498 is easy to connect or block the process chamber 18 to the ambient air according to the tool by a simple operation of the valve 520 to open or block access to the air amplifier 498. The change between the open and close modes of operation is very quick by this valve actuation and the air amplifier 498 can draw substantial flow of ambient air as desired. In particular, such a design makes it easy to pull from the surroundings to the closed chamber design.

Another advantage relates to the positioning of the air amplifier upstream from the process chamber 18. By including the air flow from the upstream position, the tool provides greater control over the flow rate of ambient air to the chamber 18 than just occurs because the air flow pulls the exhaust downstream from the process chamber 18. Have The uniformity of the flow introduced into the process chamber 18 only by downstream exhaust is very large due to various factors in the process chamber, for example, the rpm at which the chuck spins, the rate at which the process medium is introduced into the process chamber, the size of the spin wafer, and the like. In contrast, the flow generated by the upstream air amplifier is blocked by factors in the downstream processing chamber, making it more uniform. Only when downstream exhaust is used, the consistency of the process deteriorates. Of course, when using an air amplifier, downstream exhaust can still be introduced. However, such exhaust can be slowed down because it can be used in many embodiments that do not empty the chamber or supply ambient air to the chamber.

In another advantage, the air amplifier can generate air flow without moving the air amplifier element necessary to initiate or maintain the generated flow. This minimizes the risk of generating particles associated with hardware with moving elements. This is particularly desirable with regard to microelectronic production, where it is more important to minimize particle contamination.

 Valve 520 allows belt body 522, an amplified flow of air to flow from air amplifier 498 to manifold 464, and conduit area 524 that is opened or choked through valve actuation, amplified air Includes an inlet 526 through which valve 520 enters, an outlet 528 through which amplified air escapes valve 520 to manifold 464, and a mounting tab 508. Preferably, valve 520 is normally closed so that in the event of a power failure, exposure of downstream processing chamber 18 to surrounding vias is blocked.

1 and 22 to 26 show in detail how the curtain 50 of the flowing gas sets the barrier along the gap between the process chamber cover in the form of barrier plate 56 and the adjacent movable barrier in the form of baffle member 34. As shown in these figures, the gap 48 exists between the outer periphery of the barrier plate 56 and the inner rim 68 of the baffle member 34. When operating in a closed operating mode, such as the treatment of workpiece 12, which excludes oxygen from ambient or other sources from the processing chamber 18, it prevents oxygen from entering the processing chamber 18 through this gap 48. It is desirable to block this gap 48.

The baffle member 34 includes an annular baffle plate 536, an upper surface 538, a bottom surface 540, an inner periphery 68, an inner sidewall flange 544 and an outer sidewall flange 550. Flanges 554 and 550 are tapered attachments 548 with glove 546 and 552 to snap to corresponding baffle hoods (not shown) of the type shown in Applicant's pending applications Nos. 1 and 2 And 554. The baffle member 34 may move up and down to open or choke the exhaust duct 40 of FIG. 1. Up-and-down movement of the baffle member 34 can perform dripping of the wafer 12. The gap 48 is between the inner rim 68 of the baffle member 34 and the sidewall 560 of the barrier plate 56. As a typical example, the gap is about 1/16 inch (about 1.6 mm) wide.

The gas injector ring-shaped member 52 is installed in place on the upper surface 538 of the baffle member 34 to inject the annular curtain 50 of gas onto the side wall 560 of the barrier plate 56. The member 52 includes a panel 566 and a rim 568 protruding downward from the panel 566 to reinforce and strengthen the ring 52.

The gas inlet nozzle 570 is threaded into the inlet hole 572. A source (not shown) of a suitable pressurized gas, such as nitrogen, is fluidly coupled to the nozzle by tubing (not shown) or suitable tubing. Pressurized gas is introduced into the member 52 through the nozzle 570. Gas is introduced into the body 52 through the ring 52. Gas is distributed around the plenum 58 between the ring 52 and the baffle plate 539.

The gas then sprays radially into the face of the side wall 560 of the barrier plate 56 through the annular nozzle 585 near the inner ring 68 of the baffle member 34. Fastener 588 is secured through hole 574 to secure ring-shaped member 52 to threaded hole 574 of baffle member 34. As shown, the threaded hole 574 taps halfway through the baffle plate 536, but they are only partially tapped through the baffle plate 536. In another positioning adjustment, the aperture 578 is tapped over the inner sidewall flange 544 to provide a deeper depth for seating the fastener 588.

Spacer 576 in the fastener position maintains the volume of plenum 586 when supporting panel 566 and driving fastener 588.

The standoff 584 in the mouse of the annular nozzle 586 maintains the nozzle width uniformity. In a typical embodiment, the nozzle width is about 5/1000 inches. The top surface of the baffle plate 536 is stepped down to the plenum region to create a larger volume in the plenum 580. The shoulder 590 of the baffle plate 536 positions the mounting member 52.

The figures show how the gas curtain itself can be used to create a seal along the gap between two independently moving elements. In the case of the above figure, the moving elements are barrier plate 56 and member 52. Alternatively, FIGS. 27-30 illustrate a method of using a physically bonded gas curtain to create an effective seal between the moving elements. Sealing technology is a hybrid in that the gas uses a physical method to achieve sealing. The advantage of this hybrid technology is that manufacturing tolerances between moving elements are alleviated and the physical sealing properties are improved in one or more areas.

In particular, FIGS. 27-30 illustrate a method of achieving a hybrid sealing technique with respect to a moving element comprising a barrier plate 700 and a movable baffle member 702. Representative embodiments of barrier plate 700 and movable baffle member 702 are described in assignee's mooring witness applications Nos. 1-4. Barrier plate 700 includes an annular body 704 (shown schematically in FIG. 27) having an upper surface 706 and a lower surface 708.

As part of the distribution system incorporated into the barrier plate 700, an annular through hole 710 is formed in the upper surface 706 adjacent the outer periphery 712 of the annular body 704. The exhaust channel 714 extends between the ports 716 located on the bottom surface 708 of the annular body 704 to the corresponding port 718 that opens into the through hole 710. The sealing ring 720 is fastened to the annular body 704 relative to the through hole 710 to seal the upper opening of the through hole 710. Seal ring 720 may be secured to annular body 714 in a convenient manner. For example, the sealing ring includes an array of devices that are secured to the through hole 710 by fasteners 724 that engage threaded bores on the upper surface 706 of the annular body 704. .

Seal ring 720 has a notch (not shown) through the ring that forms the stage to make room for the spray bar element, as disclosed in Assignee's pending applications Nos. 1-4, and is annular in shape. In addition, the sealing ring 720 is provided with a discharge hole (not shown) that provides discharge to the piping element for accessing the through hole 710. As a result, vacuum is attracted to the through hole 710. The vacuum causes suction into the through hole 710 from the bottom face 708 through the exhaust channel 174. Preferably, radial suction keeps the bottom of the barrier 700 clean or dry and prevents defects on the workpiece that may result from splashes or particles.

The annular member is physically attached to the barrier plate 700 and establishes a hybrid seal along the gap 732 between the barrier plate 700 and the baffle member 702. Member 730 includes a ring-shaped panel 734 and a rim 736 extending downward from panel 734. Panel 734 includes a number of very large holes 738 that serve as through holes that allow the exhaust pipe to recess in barrier plate 700. Very small holes 740 are used to secure member 730 to barrier plate 700 using fasteners 724. The cutting region 742 provides space for the member 730 to secure to the spray bar and related elements, as disclosed in the assignee's pending applications No. 1 to 4, in particular, the assignee's pending application No. 3.

Rim 736 includes an outer side 744, a bottom side 746 and an inner side 748. The bottom face is angled to match the inclination of the base baffle member 702. However, when the gap 732 is sealed, the bottom surface 746 preferably does not directly contact the surface of the base baffle member 702. More preferably, bottom surface 746 is separated from baffle member 702 by a small gap 752 having a thickness in a range from about 0.0005 to about 0.01 inches, more preferably from about 0.0002 to about 0.005 inches. do. Bottom face 764 has an annular glove 749 that receives a compressible gasket 750. When the gap 732 is sealed, the gasket 750 is preferably in direct contact with the baffle member 702 and is at least partially compressed to some extent while still maintaining the gap 752. Compression of the gasket 750 makes a good physical seal on the elements. In an exemplary alternative, the movable baffle member 702 can move up and / or the barrier plate 700 can be moved down to make the desired compression of the gasket 750.

When member 730 is secured to barrier plate 700, inner surface 748 abuts barrier plate 700 and sealing ring 720. Gaskets (not shown) in the glove 754 allow for good sealing of the interface.

At least one and preferably multiple gas introduction channels 756 extend through rim 736. In general, the use of about 2 to about 10 of these channels spaced substantially equally with respect to member 730 may be appropriate. In one embodiment, it was found appropriate to use four such channels. Gas is introduced into channel 756 of inlet 758 and escapes through outlet 760. The process chamber is typically directed to the baffle member 702 rather than the gap 732 such that gas is blown directly down into the process chamber below the barrier plate 700. The volume of the gap 752 between the member 730 and the baffle member 702 acts as a plenum droop to establish a gas barrier that distributes gas and increases the sealing of the gap 732.

The use of hybrid technology improves the sealing of the gap 732, as can be seen in experiments of treating copper surfaces with acid chemicals. In the experiments, this chemical is used to treat the copper surface of the tool in which the gap between the barrier plate and the adjacent baffle member is sealed using a ring-shaped member, as shown in FIGS. 27 to 30. If the seal in the gap 732 is described using only physical contact, then the copper loss is high compared to the seal using physical contact and gas flow.

The use of gas and physical sealing techniques reduces copper loss from about 16% to 20%. Because copper metals tend to be more resistant to chipping than copper oxides, and because copper tends to oxidize the presence of oxygen more, much copper loss during the same chemical treatment is more when there are more movement losses. There is a tendency to indicate that oxygen is present. Since gas purification increases the separation of the process chamber with ambient oxygen, it is believed that a decrease in copper occurs.

Many modifications and variations are possible without departing from the spirit of the invention.

Claims (11)

A system for processing a microelectronic workpiece, the system comprising a process chamber containing a workpiece and a fluid passageway fluidly connecting the ambient air and the process chamber, wherein the system amplifies the flow of ambient air in the fluid passageway. A first state introduced into the process chamber, wherein the amplified flow of ambient air is at least partially generated by the flow of pressurized fluid flowing through the orifice upstream from the process chamber into the fluid passage; At least a portion of the process chamber and fluid passageway is isolated from ambient air, and a non-ambient gas having a reduced oxygen content to the ambient air is adapted to flow through the fluid passageway to the process chamber. The method of claim 1,
The fluid passageway comprises a venturi where an amplified flow of air is introduced into the process chamber. The method of claim 1,
Further comprising an air amplifier connected to the fluid passage,
The air amplifier includes a first inlet through which pressurized gas flow is introduced into the air amplifier and an outlet through which the amplified air flows into the process chamber in an effective manner such that the amplified flow of ambient air is sucked into the air amplifier through the first inlet. System characterized in that provided. The method of claim 1,
Wherein the amplified air is purified before being aspirated into the fluid passage. The method of claim 1,
If desired, further comprising a menipool receiving a flow of air or gas amplified from the non-around source. The method of claim 1,
And wherein the amplification ratio of the amplified air flow to the flow of pressurized fluid ranges from 1 to 25: 1. The method of claim 1,
And wherein the amplification ratio of the amplified air flow to the flow of pressurized fluid ranges from one or more to about 25: 1. The method of claim 2,
The fluid passageway is located upstream from the venturi and also includes an orifice fitted in a fluid passageway fluidly connected to the source of the subscription gas. The pressurized gas is higher in pressure than the ambient air so that the orifice is configured and the flow of the pressurized gas through the orifice into the fluid passage amplifies suction of ambient air into the fluid passage flowing through the venturi to the process chamber. The passageway is closed to isolate the processing chamber and part of the fluid passageway from the outside air. The method of claim 2,
And a source of non-ambient gas is fluidly connected to the process chamber in such a way that when the process chamber and a portion of the fluid passage are isolated from the surroundings, non-ambient gas is introduced into the process chamber through the venturi of the fluid passage. In the method of processing a microelectronic work piece,
a) placing the workpiece in the processing chamber;
b) using a low flow of pressurized gas through the orifice to produce an amplified flow of ambient air;
c) introducing an air amplified stream into the process chamber;
d) processing the workpiece while the amplified air is introduced into the process chamber. In a system for processing a microelectronic work piece,
a) a processing chamber accommodating a work piece having an outer surface;
b) having a movable cover positioned over the work piece and having an outer circumferential surface, the cover comprising one or more inlets through which at least one treatment fluid is introduced into the process chamber;
c) having a movable boundary forming a portion of an exhaust duct having an inlet adjacent to the outer circumferential surface of the workpiece, the movable boundary during the portion of the processing of the workpiece, such that the gap is between the cover and the movable boundary. An inner circumferential surface adjacent to the outer circumferential surface of the cover but spaced therein;
d) forming a curtain for flowing a boundary defining gas along the gap to intercept the process chamber and ambient air during a portion of the process.

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