KR20100081470A - Thin film formation apparatus - Google Patents

Abstract

PURPOSE: A thin film pattern forming device, which improves the electrical characteristic of chips and increases reliability and yield are provided to control the dispersing of pattern formed on a sheet. CONSTITUTION: A thin film pattern forming device comprises a cooling drum, a mask(130) and a conveyor belt(150). The cooling drum cools the sheet in order to mold the thin film pattern in the sheet. A mask comprises the mask pattern corresponding to the thin film pattern evaporated on the sheet. The mask is arranged so that in the conveyor belt, the mask pattern expose. The conveyor belt is arranged so that mask move to the cooling drum. The mask comprises the insertion part(134) which is perpendicularly projected.

Description

Thin film pattern forming apparatus {THIN FILM FORMATION APPARATUS}

The present invention relates to a thin film pattern forming apparatus, and more particularly, to a thin film pattern forming apparatus for forming a desired thin film pattern on a sheet traveling between rolls.

As digital electronic products become smaller and more versatile, various passive components are also becoming smaller and lighter with more upgraded functions.

In particular, capacitors are used in a large amount of portable small electronics such as camera phones, DMB phones, navigation, and the like, ultra-thin and high lamination, high capacity, high functionality is required, and the method of forming an electrode pattern on the capacitor is screen printing The method is used a lot.

However, the existing screen printing method has a limitation in realizing high capacity within the same chip size. Various methods have been attempted to overcome these limitations, and one such attempt is a roll to roll process.

Here, the roll-to-roll process is a method of forming a thin film Ni electrode on a sheet using a roll-type mask having an electrode pattern engraved in a vacuum chamber. The roll-to-roll process has been actively studied in order to implement a display or a device on a flexible substrate because it has better mass productivity than a conventional batch type process.

However, in such a roll-to-roll process, the roll-shaped mask rotates along the conveying path, and the mask proceeding through the conveying roll is conveyed by swinging from side to side in the conveying path, and the mask is bent or its shape is deformed. Is generated.

Due to this problem, the electrode pattern may not be printed on the sheet correctly through the mask, and the electrode pattern may be smeared, which may have a bad effect on the electrical property defect and reliability of the chip.

The present invention is to solve the above-described problems of the prior art, the purpose of which is to prevent the spreading of the pattern formed on the sheet because the transfer belt to the mask prevents meandering and deformation, through which the electrical characteristics of the chip To provide a thin film pattern forming apparatus that improves the performance and obtains high reliability and yield.

The thin film pattern forming apparatus according to the present invention includes a cooling drum for cooling the sheet to form a thin film pattern on the sheet; A mask having a mask pattern corresponding to the pattern of the thin film to be deposited on the sheet; And a transfer belt disposed to expose the mask pattern and to move the mask to the cooling drum.

In addition, the mask of the thin film pattern forming apparatus according to the present invention may include an insertion portion protrudingly formed, and the transfer belt may include a binding groove for binding the insertion portion.

In addition, the thin film pattern forming apparatus according to the present invention may further include a fixing cap covering an end portion of the insertion portion inserted to penetrate the binding groove.

In addition, the apparatus for forming a thin film pattern according to the present invention may further include a transfer part including a plurality of rollers for transferring the transfer belt, and the transfer part may include an accommodation groove for accommodating the fixing cap of the insertion part. Can be.

In addition, the transfer belt of the thin film pattern forming apparatus according to the present invention may include an insertion part protrudingly formed, and the mask may include a binding groove for engaging with the insertion part.

In addition, the thickness of the transfer belt of the thin film pattern forming apparatus according to the present invention may be characterized in that it is formed thicker than the mask.

In addition, the apparatus for forming a thin film pattern according to the present invention may further include an inner conveying roll for advancing the mask toward the rotating drum, and an outer conveying roll for advancing the mask from the rotating drum to the outside. have.

In addition, the inner conveying roll and the outer conveying roll of the thin film pattern forming apparatus according to the present invention is formed to correspond to the width of the conveying belt, characterized in that it comprises a receiving portion for providing a receiving space for receiving the conveying belt can do.

The thin film pattern forming apparatus according to the present invention includes a transfer belt to which a mask is attached to prevent meandering and deformation during transfer, thereby preventing spreading of a pattern formed on a sheet, thereby improving electrical characteristics of a chip and Reliability and yield can be obtained.

The thin film pattern forming apparatus according to the present invention will be described in more detail with reference to FIGS. 1 to 5. Hereinafter, with reference to the drawings will be described in detail a specific embodiment of the present invention.

However, the spirit of the present invention is not limited to the embodiments presented, and those skilled in the art who understand the spirit of the present invention may deteriorate other inventions or the present invention by adding, modifying, or deleting other elements within the scope of the same idea. Other embodiments that fall within the scope of the inventive concept may be readily proposed, but they will also be included within the scope of the inventive concept.

1 is a view for explaining a thin film pattern forming apparatus according to an embodiment of the present invention, Figure 2 is a partial perspective view for explaining the mask and the transfer belt in the thin film pattern forming apparatus according to an embodiment of the present invention, 3 is a partial perspective view illustrating the binding of the mask and the conveyance belt in the thin film pattern forming apparatus according to an embodiment of the present invention, and FIG. 4 is a cross-sectional view taken along line AA of the conveyance belt of FIG. 3.

1 to 4, the thin film pattern forming apparatus includes a cooling drum 110, a source placing unit 120, a mask 130, a transfer unit 140, and a transfer belt 150.

The cooling drum 110 is located in a film formation space for forming a thin film pattern on the sheet S to be transported along the transport path and cools the sheet.

At this time, the cooling drum 110 is rotatable, since the cooling liquid flows inside the cooling drum 110, the temperature of the cooling drum 110 is lowered by the cooling liquid, and the cooling drum 110 is located outside the sheet S. The sheet S is cooled by direct contact with

The cooling drum 110 is disposed between the inner conveying roll 142 of the conveying part 140 and the outer conveying roll 144 which advances the mask 130 to be conveyed outwardly from the cooling drum 110, and the position thereof is a source. The position corresponding to the placement unit 120.

The main surface of the cooling drum 110 may be made of an elastic material. Thus, the elastic material portion may be reduced in thickness by pressing, and when the pressure is released, the elastic material portion has a restoring force to its original state. However, the shape of the cooling drum is not limited to this.

In addition, the cooling drum 110 is preferably formed in a cylindrical shape, such a shape has the effect of smoothly moving the sheet (S) along the transport path during rotation.

In the present embodiment, the thin film pattern forming apparatus may be usefully used in an MLCC manufacturing process or a process for manufacturing a flexible device. At this time, the sheet (S) is a dielectric green sheet, the deposition source may be characterized in that the electrode material of silver (Ag) or nickel (Ni). However, the present invention is not limited thereto, and the sheet may use a flexible substrate.

The source placement unit 120 includes means for evaporating the deposition source M such that a thin film is formed on the surface of the sheet, such as an electron beam.

In addition, the evaporation source evaporated from the source placing unit 120 toward the cooling drum 110 may be further included, and after the deposition is completed, the shutter may further include a shutter for blocking the path so as not to face the cooling drum 110.

The thin film deposition is not limited to the deposition using an electron beam (e-beam), the thin film deposition by applying one of the group consisting of thermal deposition, sputtering, ion beam deposition (Ion-Beam Deposition) and pulse laser deposition (Pulse Laser Deposition) can do.

The transfer unit 140 includes a plurality of rollers 141, and the plurality of rollers 141 are mounted in the vacuum chamber 170 to transfer the sheet and the mask 130. In this case, the sheet is positioned to be in close contact with the mask 130, and a thin film for being deposited through the pattern of the mask 130 is formed on the contact surface with the mask 130.

And, the transfer unit 140 is an inner transfer roll 142 for advancing the mask 130 toward the cooling drum 110, and an external transfer roll for advancing the mask 130 to be transferred to the outside from the cooling drum 110 ( 144). The inner feed roll 142 and the outer feed roll 144 are preferably formed the same as each other.

Referring to FIG. 2, a mask pattern 132 may be formed in a center of the mask 130, and the pattern may be variously set according to a designer's intention.

In addition, insertion portions 134 protruding toward the transfer belt 150 are formed at both sides of the mask 130. The insertion part 134 is formed in a cylindrical shape and is coupled to the binding groove 156 provided in the transfer belt 150, and through this structure, the mask 130 is fixed to the transfer belt 150.

However, the structure for fixing the mask 130 to the transfer belt 150 is not limited thereto, and various fixing structures may be applied according to the intention of the designer. In addition, instead of the insertion portion 134 is formed around the mask 130, a groove is formed, it is possible to have a structure in which a corresponding projection is formed around the transfer belt to bind to each other. The shape of the mask 130 is also not limited to the cylindrical shape.

At this time, as shown in Figure 3, the fixing cap 160 is assembled to the end of the insertion portion 134 after the insertion portion 134 is inserted into the binding groove 156, the insertion portion 134 to the outside It serves to prevent detachment.

The fixing cap 160 is provided with a groove for accommodating the insertion portion 134 therein, and may be fixed to an end portion of the insertion portion 134 using an adhesive or the like. However, the method of fixing the fixing cap 160 to the end of the insertion portion 134 is not limited thereto.

In addition, as shown in FIG. 4, the transfer belt 150 has an opening hole 152 formed at the center thereof, and the opening hole 152 has a width slightly larger than that of the electrode pattern 132 of the mask 130. It is preferable to be.

In addition, the thickness of the transfer belt 150 is preferably formed to be relatively thicker than the thickness of the mask 130. For example, when the thickness of the mask 130 is 0.1mm, the thickness of the transfer belt 150 may be designed to be between 0.3mm and 0.5mm. However, the thickness of the transfer belt 150 is not limited thereto and may be variously designed according to the intention of the designer.

If the thickness of the mask 130 is thick, the deposition source evaporated toward the cooling drum 110 is printed on the side of the pattern 132 of the mask 130 so that it is not accurately printed on the sheet. Therefore, the thickness of the mask 130 is preferably formed as thin as possible.

At this time, since the mask 130 should be thin in thickness, the mask 130 may be bent inwardly or its shape may be deformed by a force generated from the outside during transportation. Accordingly, when the pattern is closed, a pattern bleeding may occur. Since the transfer belt 150 equipped with the mask 130 is relatively thick, the transfer belt 150 may support external force during transfer, thereby preventing the deformation and the like.

Therefore, in this embodiment, the mask 130 is provided with a transfer belt 150 to prevent meandering and deformation during transfer, thereby preventing spreading of the pattern formed on the sheet, thereby improving the electrical characteristics of the chip. Can be improved and high reliability and yield can be obtained.

In addition, a binding groove 156 for fastening the insertion portion 134 of the mask 130 to the transfer belt 150 is provided at a position corresponding to the insertion portion 134, and the mask 130 in the opening hole 152. A step 154 is formed to partially support the bottom surface of the mask 130 when the mask 130 is mounted so that the pattern 132 of FIG.

5 is a cross-sectional view for describing a transfer unit in a thin film pattern forming apparatus according to an embodiment of the present invention.

5, the inner conveying roll 142 is provided with an accommodating part 146 that is an accommodating space for accommodating the conveying belt 150 so that the mask 130 and the conveying belt 150 do not protrude outward. The portion 146 is preferably a space formed inwardly by the thickness of the mask 130 and the transfer belt 150.

However, the accommodation portion 146 is not limited thereto, and it is also possible to form an accommodation space deeper than the thickness of the transfer belt 150 to which the mask 130 is coupled.

In addition, the receiving portion 146 of the inner feed roll 142 is formed with a receiving groove 148 for accommodating the fixing cap 160 at a position corresponding to the fixing cap 160. Therefore, since the inner feed roll 142 is rotated while receiving the fixed cap 160 mounted to protect the insertion portion 134 in the receiving groove 148 when the inner conveying roll 142 is conveyed by the projecting shape of the conveying belt 150 To prevent rotation of the roll 142. In addition, the outer feed roll 144 may be formed in the same manner as the inner feed roll 142.

Therefore, through this configuration, the mask 130 and the conveyance belt 150 can be smoothly conveyed through the conveyance unit 130, and are provided with a conveyance belt 150 to which the mask 130 is attached. Since deformation | transformation is prevented, the bleeding of the pattern formed in a sheet can be suppressed.

1 is a view for explaining a thin film pattern forming apparatus according to an embodiment of the present invention.

2 is a partial perspective view illustrating a mask and a transfer belt in a thin film pattern forming apparatus according to an embodiment of the present invention.

3 is a partial perspective view for explaining the binding of the mask and the transfer belt in the thin film pattern forming apparatus according to an embodiment of the present invention.

4 is a cross-sectional view taken along line A-A for explaining the transfer belt of FIG. 3.

5 is a cross-sectional view for describing a transfer unit in a thin film pattern forming apparatus according to an embodiment of the present invention.

Explanation of symbols on the main parts of the drawings

110 .... cooling drum 120 .... sauce trough

130 ... mask 140 ...

150 .... conveying belt

Claims (8)

A cooling drum cooling the sheet to form a thin film pattern on the sheet; A mask having a mask pattern corresponding to the thin film pattern to be deposited on the sheet; And A conveying belt, on which the mask is disposed to expose the mask pattern, the conveying belt moving to the cooling drum; Thin film pattern forming apparatus comprising a. The method of claim 1, And the mask includes an insertion portion protruding from the mask, and the transfer belt includes a binding groove for binding the insertion portion. The method of claim 2, And a fixing cap covering an end portion of the insertion portion inserted to penetrate the binding groove. The method of claim 3, Thin film pattern forming apparatus further comprises a conveying portion including a plurality of rollers for conveying the conveying belt, the conveying portion includes a receiving groove for receiving the fixing cap protruding from the conveying belt to be conveyed . The method of claim 1, The transfer belt may include an insertion portion protruding from the mask, and the mask may include a binding groove for engaging with the insertion portion. The method of claim 1, The thickness of the transfer belt is a thin film pattern forming apparatus, characterized in that formed thicker than the mask. The method of claim 1, And an outer conveying roll for advancing the mask toward the rotating drum, and an outer conveying roll for advancing the mask from the rotating drum to the outside. The method of claim 7, wherein The inner conveying roll and the outer conveying roll, And a receiving portion formed to correspond to the width of the transfer belt and providing an accommodation space for accommodating the transfer belt.

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