KR20100044450A - 노광장비용 카세트의 위치 정렬장치 - Google Patents
노광장비용 카세트의 위치 정렬장치 Download PDFInfo
- Publication number
- KR20100044450A KR20100044450A KR1020080103589A KR20080103589A KR20100044450A KR 20100044450 A KR20100044450 A KR 20100044450A KR 1020080103589 A KR1020080103589 A KR 1020080103589A KR 20080103589 A KR20080103589 A KR 20080103589A KR 20100044450 A KR20100044450 A KR 20100044450A
- Authority
- KR
- South Korea
- Prior art keywords
- cassette
- glass
- alignment
- alignment block
- exposure
- Prior art date
Links
Images
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70733—Handling masks and workpieces, e.g. exchange of workpiece or mask, transport of workpiece or mask
- G03F7/7075—Handling workpieces outside exposure position, e.g. SMIF box
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
- H01L21/6735—Closed carriers
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
Description
Claims (4)
- 프레임(11)의 내측에 상하 다단으로 글래스(1)가 적재되는 카세트(10)가 구비되고, 상기 카세트(10)에 적재된 글래스(1)를 노광부로 이송하는 글래스이송로봇(20)이 구비된 노광장비에 있어서,상기 카세트(10)의 미세 위치 조정이 이루어지도록 상기 카세트(10)의 하면에 함몰된 위치정렬홈(13)이 형성되고, 상기 카세트(10)의 하부측에서 상,하 방향으로 승강되면서 상기 위치정렬홈(13)에 삽입되어 카세트(10)의 위치가 이동되도록 하는 위치정렬블럭(30)이 구비된 것을 특징으로 하는 노광장비용 카세트의 위치 정렬장치.
- 제 1항에 있어서,상기 위치정렬블럭(30)의 외측면에 경사면(31)이 형성된 것을 특징으로 하는 노광장비용 카세트의 위치 정렬장치.
- 제 2항에 있어서,상기 위치정렬블럭(30)을 평면상의 상,하,좌,우 방향으로 이동시키는 위치조절수단(32)이 더 구비된 것을 특징으로 하는 노광장비용 카세트의 위치 정렬장치.
- 제 1항 내지 제 3항 중 어느 한 항에 있어서,상기 위치정렬블럭(30)의 외측면에 위치정렬블럭(30)의 내측 중심을 향해 함몰된 다수의 함몰부(33)가 형성된 것을 특징으로 하는 노광장비용 카세트의 위치 정렬장치.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020080103589A KR100993220B1 (ko) | 2008-10-22 | 2008-10-22 | 노광장비용 카세트의 위치 정렬장치 |
TW098126459A TW201016574A (en) | 2008-10-22 | 2009-08-05 | Position alignment device for cassette of exposure equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020080103589A KR100993220B1 (ko) | 2008-10-22 | 2008-10-22 | 노광장비용 카세트의 위치 정렬장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20100044450A true KR20100044450A (ko) | 2010-04-30 |
KR100993220B1 KR100993220B1 (ko) | 2010-11-10 |
Family
ID=42219149
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020080103589A KR100993220B1 (ko) | 2008-10-22 | 2008-10-22 | 노광장비용 카세트의 위치 정렬장치 |
Country Status (2)
Country | Link |
---|---|
KR (1) | KR100993220B1 (ko) |
TW (1) | TW201016574A (ko) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11437308B2 (en) | 2019-03-29 | 2022-09-06 | Absolics Inc. | Packaging glass substrate for semiconductor, a packaging substrate for semiconductor, and a semiconductor apparatus |
US11469167B2 (en) | 2019-08-23 | 2022-10-11 | Absolics Inc. | Packaging substrate having electric power transmitting elements on non-circular core via of core vias and semiconductor device comprising the same |
US11652039B2 (en) | 2019-03-12 | 2023-05-16 | Absolics Inc. | Packaging substrate with core layer and cavity structure and semiconductor device comprising the same |
US11967542B2 (en) | 2019-03-12 | 2024-04-23 | Absolics Inc. | Packaging substrate, and semiconductor device comprising same |
US11981501B2 (en) | 2020-03-12 | 2024-05-14 | Absolics Inc. | Loading cassette for substrate including glass and substrate loading method to which same is applied |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101704794B1 (ko) * | 2016-01-19 | 2017-02-08 | (주)리드 | 카세트 자동 변환장치 |
CN205608389U (zh) | 2016-05-11 | 2016-09-28 | 重庆京东方光电科技有限公司 | 一种缓存装置及设有该缓存装置的涂胶显影机 |
-
2008
- 2008-10-22 KR KR1020080103589A patent/KR100993220B1/ko active IP Right Grant
-
2009
- 2009-08-05 TW TW098126459A patent/TW201016574A/zh unknown
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11652039B2 (en) | 2019-03-12 | 2023-05-16 | Absolics Inc. | Packaging substrate with core layer and cavity structure and semiconductor device comprising the same |
US11967542B2 (en) | 2019-03-12 | 2024-04-23 | Absolics Inc. | Packaging substrate, and semiconductor device comprising same |
US11437308B2 (en) | 2019-03-29 | 2022-09-06 | Absolics Inc. | Packaging glass substrate for semiconductor, a packaging substrate for semiconductor, and a semiconductor apparatus |
US11469167B2 (en) | 2019-08-23 | 2022-10-11 | Absolics Inc. | Packaging substrate having electric power transmitting elements on non-circular core via of core vias and semiconductor device comprising the same |
US11728259B2 (en) | 2019-08-23 | 2023-08-15 | Absolics Inc. | Packaging substrate having electric power transmitting elements on non-circular core via of core vias and semiconductor device comprising the same |
US11981501B2 (en) | 2020-03-12 | 2024-05-14 | Absolics Inc. | Loading cassette for substrate including glass and substrate loading method to which same is applied |
Also Published As
Publication number | Publication date |
---|---|
TW201016574A (en) | 2010-05-01 |
KR100993220B1 (ko) | 2010-11-10 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
KR100993220B1 (ko) | 노광장비용 카세트의 위치 정렬장치 | |
TWI587430B (zh) | A conveyance device, a conveying method, an exposure apparatus, and an element manufacturing method | |
JP5639431B2 (ja) | 成膜装置 | |
JP6207997B2 (ja) | パターン形成装置およびパターン形成方法 | |
TW201820408A (zh) | 曝光裝置、平板顯示器的製造方法、元件製造方法以及曝光方法 | |
KR101384440B1 (ko) | 물체의 반출입 방법 및 반출입 장치, 노광 방법 및 노광장치와 디바이스 제조 방법 | |
TWI743614B (zh) | 基板處理裝置及基板處理方法 | |
JP6207843B2 (ja) | アライメント装置およびアライメント方法 | |
TWI739894B (zh) | 物體交換系統、曝光裝置、平面顯示器之製造方法、元件之製造方法、物體移動方法、及曝光方法 | |
TW201827938A (zh) | 搬運裝置、曝光裝置、曝光方法、平板顯示器的製造方法、元件製造方法以及搬運方法 | |
GB2425502A (en) | Conductive ball mounting apparatus | |
JP4942401B2 (ja) | 露光装置及び露光方法 | |
JP2008251944A (ja) | 露光装置 | |
KR101002875B1 (ko) | 레티클 예비정렬 장치 및 그 방법 | |
KR101489055B1 (ko) | 패턴 형성 장치 | |
KR20210138344A (ko) | 비히클의 티칭 장치 및 방법 | |
JP2006066747A (ja) | 基板の位置決め装置及び位置決め方法 | |
WO2023190110A1 (ja) | 搬送装置、露光装置、搬送方法、露光方法、アライメントマーク | |
KR102482946B1 (ko) | 평면 패널 툴에 기판을 신속하게 로딩하기 위한 방법 | |
JP5915698B2 (ja) | 露光装置 | |
JP2005352070A (ja) | 基板交換装置及び露光装置 | |
KR20100044446A (ko) | 노광장비의 레티클 이송용 로봇 | |
JP5392945B2 (ja) | プロキシミティ露光装置、及びプロキシミティ露光装置の負圧室の天板搬送方法 | |
JP5826670B2 (ja) | パターン転写装置 | |
JP2014164109A (ja) | パターン形成装置およびパターン形成方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A201 | Request for examination | ||
E701 | Decision to grant or registration of patent right | ||
GRNT | Written decision to grant | ||
FPAY | Annual fee payment |
Payment date: 20131031 Year of fee payment: 4 |
|
FPAY | Annual fee payment |
Payment date: 20141103 Year of fee payment: 5 |
|
FPAY | Annual fee payment |
Payment date: 20151103 Year of fee payment: 6 |
|
FPAY | Annual fee payment |
Payment date: 20161103 Year of fee payment: 7 |
|
FPAY | Annual fee payment |
Payment date: 20171103 Year of fee payment: 8 |
|
FPAY | Annual fee payment |
Payment date: 20181105 Year of fee payment: 9 |
|
FPAY | Annual fee payment |
Payment date: 20191031 Year of fee payment: 10 |