KR20100039962A - A vision inspection apparatus of a dual camera - Google Patents

Abstract

PURPOSE: A vision inspection apparatus with a dual camera is provided to obtain two images with one process by arranging two image capture units on an identical vertical line to a lighting unit. CONSTITUTION: A lighting unit(10) is installed on the upper side of the vertical line of a space between conveyer belts(50). The lighting unit radiates light on the surface of a transferring target. A first image capture unit(20) receives the light which transmits the target and obtains a first image. A second image capture unit(30) receives the light which is reflected from the surface of the target and obtains a second image. The lighting unit, the first image capture unit and the second image capture unit are arranged on an identical vertical line.

Description

Vision inspection apparatus of a dual camera

The present invention improves the inspection of appearance defects by combining images acquired through two processes of transmitting and reflecting light to a measurement object (PCB, module IC of semiconductor and semiconductor wafer), so that it is mutually on the same vertical line as the lighting unit. The present invention relates to a dual camera vision inspection apparatus, in which two image acquisition units in opposite directions are disposed to acquire two images in one process to inspect the appearance of a measurement object.

In general, components such as semiconductor wafers, PCBs, SSDs, and module ICs of semiconductors are important components, and the reliability of the products is very important, so they are shipped to the product through strict quality inspection.

The semiconductor module IC on the semiconductor wafer, PCB, SSD and cassette is inspected by a vision inspection device, and the inspected measurement object is classified into good or bad according to the inspection result.

Here, the vision inspection device is a device for photographing a surface image of a measurement object with a camera and comparing the image with an image of a normal state to determine whether the inspection object is defective.

In other words, the measurement object produced through the manufacturing process of the vision inspection device is expensive, so the reliability of the product is also very important, so only the product determined to be good is shipped through strict quality inspection, and the measurement object determined to be defective is corrected. Or discard the whole thing.

In this case, the vision inspection apparatus undergoes a process of acquiring an image by reflecting the surface of the object to be measured and a process of obtaining an image by transmitting the object to be measured in order to read the appearance (surface) defect of the object.

This is to perform a precise reading by comparing and analyzing a visual image obtained by reflecting a surface to a measurement object and an IR (Infrared Ray) image obtained by transmitting the measurement object.

Hereinafter, a conventional vision inspection apparatus for acquiring a surface image of a measurement object and determining whether there is a defect will be briefly described.

Figure 2a is a block diagram of a conventional vision inspection apparatus, Figure 2b is an operation of Figure 2a.

As shown in FIG. 2A, the conventional vision inspection apparatus 9 is largely composed of a first inspection unit for acquiring an image through light reflected on the surface of the measurement object conveyed by the conveyor belt 5. (1) and a second inspection section (3) for acquiring an image through the light transmitted through the measurement object in the space between the conveyor belt (5) and the Kenvey belt (5).

In this case, the first inspection unit 1 is an RGB (Red, Green, Blue) light (1a) disposed on the upper portion of the conveyor belt 5, and the light reflected on the measurement object is disposed on the RGB illumination (1a) And a first image acquisition unit 1b for receiving and acquiring an image.

In addition, the second inspection unit 3 is a structure disposed between the conveyor belt 5 and the conveyor belt 5 having no optical interference in order to transmit light to the measurement object.

The second inspection unit 3 includes IR (Infrared Ray) illumination 3a disposed under the conveyor belt 5 and a second image acquisition unit 3b disposed above the conveyor belt 5. It is composed.

That is, the conventional vision inspection apparatus 9 obtains a red image or a blue image or a green image or a three-color RGB image through the first inspection unit 1 to measure the object to be transferred to the conveyor belt 5 as shown in FIG. Infrared image was acquired in the section of the second inspection unit (3) to accurately read the measurement object to classify the defect.

However, such a conventional vision inspection apparatus has a problem in that the maintenance cost is increased because the size of the device is increased and the two inspection units are operated because two inspection units must be installed in two lines.

The present invention has been made in view of the above problems, and an object of the present invention is to obtain an image acquired through two processes of transmitting and reflecting light to a measurement target (PCB, module IC of semiconductor and semiconductor wafer). Dual camera vision that improves inspection of appearance defects by combining and acquires two images in one process by arranging image acquisition parts in opposite directions on the same vertical line with lighting unit respectively. An inspection apparatus is provided.

In addition, an object of the present invention is to combine the R, G, B LED and IR LED in one lighting unit, and to arrange the image acquisition unit on the same vertical line on the same vertical line around each lighting unit at a time (R, The present invention provides a dual camera vision inspection apparatus having a structure capable of simultaneously acquiring G, B) images and infrared (IR) images.

Further, an object of the present invention, in the vision inspection apparatus for inspecting the appearance defects of the measurement targets (semiconductor module IC and semiconductor wafer) continuously moved through a plurality of conveyor belts,

An illumination unit installed on an upper portion of the space between the conveyor belt and the conveyor belt to irradiate light onto the surface of the measurement object moving in the corresponding section; and receiving light transmitted through the measurement object among the light emitted from the illumination unit to receive an image. And a second image acquisition unit configured to receive an image obtained by receiving light reflected from a surface of a measurement object among the light emitted from the illumination unit and acquiring an image. An inspection apparatus is provided.

According to the dual camera vision inspection apparatus according to the present invention, there is an advantage that two images can be obtained in one process by arranging two image acquisition units on the same vertical line as the illumination unit.

Therefore, the size and size of the vision inspection apparatus can be miniaturized, and since only one line is operated, the maintenance cost is very reduced.

Hereinafter, the dual camera vision inspection apparatus according to the present invention will be described in detail together with the accompanying drawings.

Figure 1a is a block diagram of a dual camera vision inspection apparatus according to the present invention.

As shown in FIG. 1A, the present invention improves inspection of appearance defects by combining images acquired through two processes of transmitting and reflecting light to a measurement object (PCB, module IC of semiconductor and semiconductor wafer). The present invention relates to a dual camera vision inspection apparatus 100 which arranges an image acquisition unit in mutually opposite directions on the same vertical line as an illumination unit, and acquires two images in one process to inspect the appearance of a measurement object.

The dual camera vision inspection apparatus 100 is largely composed of three parts, which are the lighting unit 10 and the first image acquisition unit 20 and the second in a direction opposite to each other in the same vertical line with the lighting unit 10. It is composed of an image acquisition unit 30.

The lighting unit 10, the first image acquisition unit 20 and the second image acquisition unit 30 are installed on a vertical line between the conveyor belt 50 and the conveyor belt 50 to eliminate the non-region inspection area. Structure.

In this case, the first image acquisition unit 20 is disposed below the measurement object to capture the image of the light passing through the measurement object, and the second image acquisition unit 30 captures the light reflected on the object. It is disposed on the upper portion of the lighting unit 10 to be.

The lighting unit is installed on the vertical upper portion of the space between the conveyor belt 50 and the conveyor belt 50 to function to irradiate light to the surface of the measurement object moving in the corresponding section.

The lighting unit 10 has a dome shape, and an opening 11 is formed on the upper surface to allow the image reflected from the measurement object to proceed to the second image acquisition unit 30.

And the inner side of the lighting unit 10 is composed of a plurality of LED, which is a red LED 12, blue LED 14, green LED 13 and the infrared LED 15 is mixed.

At this time, the red LED 12 has a predetermined inclination angle and is disposed on the lowest surface to supply illumination from the side of the measurement object.

When the red LED 12 is irradiated with red light on a side that does not form the same axis as the measurement object and the photographing direction, light is diffusely reflected at a portion where a defect occurs, and the second image acquisition unit 30 reflects the diffusely reflected light. If you shoot through the video will appear dark to know the poor state of the lead frame.

The blue LED 14 also functions as the red LED 12 and is disposed on the inner upper surface of the lighting unit to supply vertical illumination to the measurement object. The green LED 13 is disposed between the blue LED 14 and the red LED 12.

In addition, the infrared ray (IR) LED 15 is a structure disposed between the red LED 12, the blue LED 14, and the green LED 13, and passes through the measurement object to convey the conveyor belt 50. ) And the IR image is captured by the second image acquisition unit 30 via the space between the conveyor belt 50.

Hereinafter will be described with the accompanying drawings for the operation of the imaging of the dual camera vision inspection apparatus according to the present invention.

1B is an operation diagram of FIG. 1.

As shown in FIG. 1B, the measurement object transferred through the conveyor belt 50 passes through a section between the conveyor belt 50 and the conveyor belt 50.

Then, four different lights are irradiated to the measurement object through the red LED 12, the blue LED 14, the green LED 13, and the infrared LED 15 through the lighting unit 10.

At this time, the light irradiated from the red LED 12, the blue LED 14 and the green LED 13 is reflected on the surface of the measurement object and through the opening 11 of the lighting unit 10, the second image acquisition unit 30 Is taken as a color image. The color image may be separated into red, blue, and green color images, and a single color color image may be taken by only lighting a single color LED.

On the other hand, the illumination unit 10 and the second image acquisition unit 30 has a structure further provided with an infrared cut filter 40 to block some infrared rays reflected from the surface of the measurement object.

At the same time, the light irradiated through the infrared LED 15 passes through the measurement object and the IR image is photographed through the second image acquisition unit 30 through the space between the conveyor belt 50 and the conveyor belt 50.

Thus, by arranging two image acquisition units 20 and 30 on the same vertical line as the illumination unit 10, a structure capable of acquiring two different images in one process (one scan) is provided.

Although the invention has been described in connection with the preferred embodiments mentioned above, other various modifications and variations may be made without departing from the spirit and scope of the invention. Accordingly, it is intended that the appended claims cover such modifications and variations as fall within the true scope of the invention.

1A is a configuration diagram of a dual camera vision inspection apparatus according to the present invention;

1B is an operation diagram of FIG. 1,

Figure 2a is a block diagram of a conventional vision inspection device,

FIG. 2B is an operational view of FIG. 2A;

<Description of the symbols for the main parts of the drawings>

1: first inspection unit 1a: RGB illumination

1b: first image acquisition unit

3: 2nd inspection part 3a: IR illumination

3b: second image acquisition unit

5: conveyor

7: measuring object

9: conventional vision inspection device

10: lighting unit 11: opening

12: red LED

13: green LED

14: blue LED

15: Infrared LED

20: first image acquisition unit

30: second image acquisition unit

40: infrared cut filter

50: conveyor belt

100: dual camera vision inspection device of the present invention

Claims (5)

In the vision inspection apparatus for inspecting the appearance defects of the measurement object (module IC and semiconductor wafer of the semiconductor) continuously moved through a plurality of conveyor belt, An illumination unit 10 installed on an upper portion of a vertical line of the space between the conveyor belt 50 and the conveyor belt 50 to irradiate light to the surface of the measurement object moving in the corresponding section; A first image acquisition unit 20 which receives an image of light transmitted from the illumination unit 10 and passes through a measurement object to acquire an image; And a second image acquisition unit (30) which receives an image reflected from the surface of the measurement object among the light emitted from the illumination unit (10) to obtain an image. The method of claim 1, The illumination unit 10, the first image acquisition unit 20 and the second image acquisition unit 30 are arranged on the same vertical line, the first image acquisition unit 20 is disposed below the measurement object, Dual camera vision inspection device, characterized in that the first image acquisition unit 20 is disposed above the lighting unit (10). The method of claim 1, The illumination unit 10 is a dual camera vision inspection device, characterized in that the red LED (12), blue LED (14), green LED (13) and infrared LED (15) is mixed. The method of claim 3, The red LED 12 is disposed on the lowest surface to supply illumination from the side of the measurement object, and the blue LED 14 is disposed on the upper surface of the illumination unit 10 to supply illumination from the upper part of the measurement object. Dual green camera vision inspection, characterized in that the green LED 13 is disposed between the blue LED 14 and the red LED 12, the infrared LED 15 is disposed throughout the mixture. Device. The method of claim 1, The dual camera vision inspection apparatus, wherein the illumination unit 10 and the second image acquisition unit 30 are further provided with an infrared cut-off filter 40 to block some infrared rays reflected from the surface of the measurement object.

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