KR20100029651A - 복사압진공펌프 및 전자빔진공펌프 - Google Patents
복사압진공펌프 및 전자빔진공펌프 Download PDFInfo
- Publication number
- KR20100029651A KR20100029651A KR1020080088499A KR20080088499A KR20100029651A KR 20100029651 A KR20100029651 A KR 20100029651A KR 1020080088499 A KR1020080088499 A KR 1020080088499A KR 20080088499 A KR20080088499 A KR 20080088499A KR 20100029651 A KR20100029651 A KR 20100029651A
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- KR
- South Korea
- Prior art keywords
- vacuum pump
- electron beam
- gas particles
- electromagnetic wave
- momentum
- Prior art date
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/046—Combinations of two or more different types of pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
- F04D17/08—Centrifugal pumps
- F04D17/16—Centrifugal pumps for displacing without appreciable compression
- F04D17/168—Pumps specially adapted to produce a vacuum
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
- F05B2210/00—Working fluid
- F05B2210/10—Kind or type
- F05B2210/12—Kind or type gaseous, i.e. compressible
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S417/00—Pumps
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S977/00—Nanotechnology
- Y10S977/84—Manufacture, treatment, or detection of nanostructure
- Y10S977/901—Manufacture, treatment, or detection of nanostructure having step or means utilizing electromagnetic property, e.g. optical, x-ray, electron beamm
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Abstract
Description
Claims (5)
- 원통형이나 사각형 관등 밀폐된 관의 내부 혹은 외부에 가시광 광원이나 레이저 혹은 자외선 및 엑스선 등 전자기파 발생장치를 설치하고 반대 방향에는 가스 입자의 배기가 이루질 수 있는 배출구를 설치하여 진공펌프 챔버 내의 가스 입자가 전자기파 광자의 복사압에 의한 운동량전달 방법으로 배기작용을 가능하게 하는 형태의 진공펌프및 장치.
- 원통형이나 사각형 관등 밀폐된 관의 내부에 열전자방출이 용이한 라인형 필라멘트나 전계효과에 의한 냉전자 방출을 가능하게 하는 면상 혹은 선형 전자발생원을 설치하고 반대 쪽에는 이들 전자를 가속할 수 있는 전극과 배출구를 설치하여 관내 입자에 전자빔의 충돌에 의한 운동량 전달로 배기작용을 가능하게 하는 구조의 전자빔 진공펌프 및 장치
- 진공상태에서 식각이나 증착 등의 가공이 이루어지는 장치에 있어서 가공대상기판(substrate)상에 붙어있는 불필요한 가스 입자 등을 전자기파의 광자에 의한 복사압으로 전체 혹은 국부적인 조사에 의한 운동량을 부여하거나 전자빔을 가속시켜 전자빔에 의한 운동량 전달 방법으로 표면에 붙어 있는 불필요한 입자를 제거 혹은 밀도 조절 등 가공할 수 있도록 만든 장치나 설비. (레이저 절단이나 마킹 등의 장비는 제외한다)
- 복사압진공펌프에 있어서 전자기파소스(1)로부터 방사되는 전자기파가 진공챔버(7) 출구로 부터 유입되는 가스 입자를 역류시키지 않도록 빛(전자기파) 가림막(8)을 설치한 구조의 복사압진공펌프 및 장치
- 전자빔진공펌프에 있어서 전자빔을 가속시키기 위한 배출구 쪽의 양전극(14)을 깔때기 모양으로 하여 잔유 가스 배출 효과를 높인 구조의 전자빔진공펌프 및 장치
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020080088499A KR101008065B1 (ko) | 2008-09-08 | 2008-09-08 | 복사압을 이용한 진공펌프 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020080088499A KR101008065B1 (ko) | 2008-09-08 | 2008-09-08 | 복사압을 이용한 진공펌프 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20100029651A true KR20100029651A (ko) | 2010-03-17 |
KR101008065B1 KR101008065B1 (ko) | 2011-01-13 |
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KR1020080088499A KR101008065B1 (ko) | 2008-09-08 | 2008-09-08 | 복사압을 이용한 진공펌프 |
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KR (1) | KR101008065B1 (ko) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101320237B1 (ko) * | 2011-07-26 | 2013-10-21 | 고병모 | 전자의 운동량전달을 이용한 진공펌프 |
WO2015044182A3 (en) * | 2013-09-25 | 2015-09-24 | Asml Netherlands B.V. | Beam delivery apparatus and method |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56111058A (en) | 1980-01-07 | 1981-09-02 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Vacuum purification device |
JPH07272670A (ja) * | 1994-03-29 | 1995-10-20 | Ebara Corp | 真空ポンプ及びその排気方法 |
JPH11336662A (ja) | 1997-07-16 | 1999-12-07 | Mitsubishi Heavy Ind Ltd | 真空容器および真空容器からの排気方法 |
JP2001126657A (ja) | 1999-10-27 | 2001-05-11 | Jeol Ltd | 電子真空ポンプ |
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2008
- 2008-09-08 KR KR1020080088499A patent/KR101008065B1/ko active IP Right Grant
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101320237B1 (ko) * | 2011-07-26 | 2013-10-21 | 고병모 | 전자의 운동량전달을 이용한 진공펌프 |
WO2015044182A3 (en) * | 2013-09-25 | 2015-09-24 | Asml Netherlands B.V. | Beam delivery apparatus and method |
US10580545B2 (en) | 2013-09-25 | 2020-03-03 | Asml Netherlands B.V. | Beam delivery apparatus and method |
Also Published As
Publication number | Publication date |
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KR101008065B1 (ko) | 2011-01-13 |
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