KR20100010486A - Industrial robot - Google Patents

Abstract

PURPOSE: An industrial robot is provided to minimize the size of a robot although the robot transfers a big object by using multiple small driving motors. CONSTITUTION: An industrial robot(1) comprises hands(3), arms(4), a supporting member(7), a vertical driving machine, a horizontal driving machine, and a rotating machine. An object(2) is loaded into the hands. The supporting member supports the arms. The vertical and horizontal driving machines move the supporting members vertically and horizontally. The rotating machine rotates the supporting member around a central axis. At least one of the vertical and horizontal driving machines and the rotating machine has multiple driving motor.

Description

Industrial Robots {INDUSTRIAL ROBOT}

The present invention relates to an industrial robot for conveying a predetermined conveying object.

Conventionally, the industrial robot which conveys a predetermined | prescribed conveyance object is used widely. As an industrial robot of this kind, an industrial robot is known which includes a hand on which a conveyed object is mounted, an arm for holding the hand, and a ball screw for swinging the arm (for example, For example, refer patent document 1). In the industrial robot described in Patent Document 1, one motor is connected to a ball screw, and the ball screw is driven by one motor.

Moreover, although it is not the industrial robot which conveys a conveyed object, the industrial robot in which the base which mounts the main body part of a robot is movable in the horizontal direction is also known (for example, refer patent document 2). The industrial robot of this patent document 2 is equipped with the rack and pinion for moving a base horizontally, and the one motor for rotating a pinion.

[Patent Document 1] Japanese Patent Application Laid-Open No. 2006-102886

[Patent Document 2] Japanese Patent Application Laid-Open No. 6-106487

Some of the objects to be conveyed by an industrial robot, such as glass substrates for liquid crystal displays, are enlarged each year. With the increase in size of the conveyed object, the industrial robot which conveys the conveyed object to be enlarged tends to be enlarged. In addition, with the increase in the size of the industrial robot, the cost of the industrial robot tends to increase.

Then, the subject of this invention is providing the industrial robot which can be reduced in size and can also reduce cost also when conveying the conveying object which is enlarged in size.

In order to solve the above problems, the industrial robot of the present invention includes a hand on which a conveying object is mounted, an arm to which the hand is connected, a support member for supporting the arm, and an up and down drive mechanism for moving the support member up and down. And / or a horizontal drive mechanism for moving the support member in the horizontal direction and / or a rotation drive mechanism for rotating the support member about a predetermined central axis in the axial direction in the vertical direction, the vertical drive mechanism and / or The horizontal drive mechanism and / or the rotary drive mechanism is characterized by having a plurality of drive motors.

As the size of the conveyed object increases, the total capacity of the drive motor required for the vertical drive mechanism and / or the horizontal drive mechanism and / or the rotary drive mechanism increases. Therefore, when driving the vertical drive mechanism and / or the horizontal drive mechanism and / or the rotary drive mechanism with one drive motor, it is necessary to use a motor with a large body size, and there is a concern that the industrial robot can be enlarged.

In the industrial robot of the present invention, the vertical drive mechanism and / or the horizontal drive mechanism and / or the rotation drive mechanism include a plurality of drive motors. Therefore, even if the total capacity of the drive motor required by the vertical drive mechanism and / or the horizontal drive mechanism and / or the rotary drive mechanism is large, a drive motor with a small build can be used. Moreover, compared with the case of using one drive motor with a large buildup, the degree of freedom of arrangement of the drive motor is increased when a plurality of drive motors with a small buildup are used. Therefore, in the present invention, the industrial robot can be downsized even though the large object to be conveyed is conveyed.

In addition, if the capacity of the drive motor exceeds a predetermined capacity, the price of the drive motor is drastically increased. However, in the present invention, a drive motor with a small capacity can be used, and therefore, even when a plurality of drive motors are used, It is possible to reduce the cost of the robot.

Moreover, in this invention, since the drive motor with a small capacity can be used, the power transmitted from one drive motor becomes small. Therefore, the transmission power to a power transmission mechanism such as a cog wheel for transmitting the power of the drive motor can be reduced, and the configuration of the power transmission mechanism can be simplified. In addition, damage to the power transmission mechanism can be suppressed.

In the present invention, it is preferable that the vertical drive mechanism and / or the horizontal drive mechanism and / or the rotary drive mechanism include a plurality of brake mechanisms for stopping the vertical drive mechanism and / or the horizontal drive mechanism and / or the rotary drive mechanism. In such a configuration, for example, even if one brake mechanism is damaged, the vertical drive mechanism and / or the horizontal drive mechanism and / or the rotary drive mechanism can be stopped by the other brake mechanism. Therefore, even a large conveying object can be conveyed safely. In addition, since it becomes possible to operate a plurality of brake mechanisms in stages, it is possible to prevent sudden braking of the vertical drive mechanism and / or the horizontal drive mechanism and / or the rotary drive mechanism. Therefore, it becomes possible to prevent the fall of the conveyed object from the hand.

In the present invention, the vertical drive mechanism and / or the horizontal drive mechanism and / or the rotary drive mechanism include, for example, the same number of brake mechanisms as the driving motor, and each of the plurality of brake mechanisms each includes a plurality of driving motors. Is connected to. In this case, it becomes possible to stop a some drive motor individually and reliably.

In the present invention, the industrial robot preferably includes a vertical drive mechanism having a plurality of vertical drive motors as a plurality of drive motors. With this configuration, it becomes possible to downsize the vertical drive mechanism and to reduce the cost of the vertical drive mechanism. In addition, the transmission power to the power transmission mechanism for transmitting the power of the up / down driving motor can be reduced. Therefore, the structure of the power transmission mechanism can be simplified, and damage to the power transmission mechanism can be suppressed.

In the present invention, the industrial robot has a columnar member for supporting the support member to be movable in the vertical direction, the vertical drive mechanism is a vertical rack for fixing to the columnar member, the vertical rack and the teeth ( It is preferable to provide the several pinion for up-and-down driving combined.

When driving using a rack and a pinion, since the length of a rack becomes long in the industrial robot which enlarges with the enlargement of a conveyed object, it is necessary to form a rack by joining several rack pieces. Therefore, the joints of rack pieces generate | occur | produce in a rack, and the pitch of the tooth formed in a rack becomes easy to shift | deviate due to the assembly precision of a rack piece in this joint part. As a result, even in the seam of the rack piece, although the teeth of the rack and the teeth of the pinion must be plurally engaged, a situation arises that, for example, only one piece of the teeth of the rack and the teeth of the pinion are engaged in the seam of the rack piece. Can be.

Therefore, if the up-and-down drive mechanism is provided with a plurality of up-and-down drive pinions engaged with the up-and-down drive rack, for example, the teeth of the up-and-down drive rack and the teeth of the up-and-down drive pinion are engaged with each other at the joint of the rack side. Even if a situation arises, it becomes possible to engage the some teeth of the other up-and-down drive pinion and the some teeth of the up-and-down drive rack. Therefore, it becomes possible to prevent excessive stress from occurring in the teeth of the vertical drive rack teeth and the vertical drive pinions located at the joint of the rack piece. As a result, damage to the vertical drive rack and the vertical drive pinion can be prevented even by simplifying the configuration of the vertical drive rack and the vertical drive pinion.

In the present invention, it is preferable that the vertical drive mechanism has the same number of vertical drive pinions as the vertical drive motor, and each of the plurality of vertical drive pinions is connected to each of the plurality of vertical drive motors. If comprised in this way, a vertical drive pinion can be rotated according to the rotation speed of each vertical drive motor. Therefore, even when a plurality of up and down drive pinions are engaged with the up and down drive racks, it is possible to prevent the teeth of the up and down drive pinions and the teeth of the up and down drive racks from joining with more force than necessary. As a result, damage to the up and down drive pinion and the up and down drive rack can be suppressed and the support member can be properly moved with the up and down drive mechanism.

In the present invention, the vertical drive mechanism preferably has a plurality of reducers connected to each of the plurality of vertical drive motors having an output shaft to which the vertical drive pinion is fixed. When comprised in this way, a big power can be transmitted to the vertical drive pinion which meshes with a vertical drive rack by the action of a speed reducer.

In the present invention, the industrial robot preferably includes a horizontal driving mechanism having a plurality of horizontal driving motors as a plurality of driving motors. With this arrangement, it becomes possible to miniaturize the horizontal drive mechanism and to reduce the cost of the horizontal drive mechanism. In addition, the transmission power to the power transmission mechanism for transmitting the power of the horizontal drive motor can be reduced. Therefore, the structure of the power transmission mechanism can be simplified, and damage to the power transmission mechanism can be suppressed.

In the present invention, the industrial robot has a main body portion for supporting the support member, a base member for supporting the body portion to be movable in the horizontal direction, the horizontal drive mechanism is a horizontal drive rack fixed to the base member, horizontal drive It is preferable to have a plurality of horizontal driving pinions to engage with the rack for.

In such a configuration, for example, a plurality of teeth of a horizontal drive pinion and a rack for horizontal drive may occur even when a situation in which the teeth of the horizontal drive rack and the teeth of the horizontal drive pinion are engaged with each other at the joint of the rack piece occurs. It is possible to join a plurality of teeth. Therefore, it is possible to prevent excessive stress from occurring in the teeth of the horizontal drive rack and the teeth of the horizontal drive pinion located at the joint of the rack piece. As a result, damage to the horizontal drive rack and the horizontal drive pinion can be prevented even if the configuration of the horizontal drive rack and the horizontal drive pinion is simplified.

In the present invention, it is preferable that the horizontal drive mechanism has the same number of horizontal drive pinions as the horizontal drive motor, and each of the plurality of horizontal drive pinions is connected to each of the plurality of horizontal drive motors. If comprised in this way, the horizontal drive pinion can be rotated according to the rotation speed of each horizontal drive motor. Therefore, even when a plurality of horizontal drive pinions are engaged with the horizontal drive rack, it is possible to prevent the teeth of the horizontal drive pinion and the teeth of the horizontal drive rack from joining with more force than necessary. As a result, damage to the horizontal drive pinion and the horizontal drive rack can be suppressed, and the support member can be properly moved in the horizontal direction by the horizontal drive mechanism.

In the present invention, the industrial robot is preferably provided with a rotary drive mechanism having a plurality of rotary drive motors as a plurality of drive motors. With such a configuration, it becomes possible to miniaturize the rotary drive mechanism and reduce the cost of the rotary drive mechanism. In addition, the transmission power to the power transmission mechanism for transmitting the power of the rotation driving motor can be reduced. Therefore, the structure of the power transmission mechanism can be simplified, and damage to the power transmission mechanism can be suppressed.

As described above, in the industrial robot according to the present invention, the size of the industrial robot can be reduced and the cost of the industrial robot can be reduced even when carrying a large-sized conveying object.

Preferred Mode for Carrying Out the Invention

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of this invention is described based on drawing.

(Schematic Configuration of Industrial Robot)

1 is a plan view of an industrial robot 1 according to an embodiment of the present invention. 2 is a view showing the industrial robot 1 from the E-E direction of FIG. 3 is a view showing the industrial robot 1 in the F-F direction of FIG.

The industrial robot 1 (hereinafter referred to as "robot 1") of the present embodiment is for transporting the glass substrate 2 for liquid crystal display (hereinafter referred to as "substrate 2") which is the object to be transported. It's a robot. The robot 1 of this form is especially a large size robot suitable for conveyance of the large sized board | substrate 2, for example, conveys the board | substrate 2 of the substantially square shape of about 3m in one side. The object to be conveyed is not limited to the substrate 2 but may be a semiconductor wafer or the like.

As shown in FIGS. 1-3, this robot 1 has two hands 3 on which the board | substrate 2 is mounted, and the two arms which each of the two hands 3 are connected to the front end side ( 4), a main body 5 for supporting the two arms 4, and a base member 6 for supporting the main body 5 so as to be movable in the horizontal direction. The main body 5 supports the proximal ends of the two arms 4 and at the same time a column for supporting the movable member 7 and the support member 7 so as to be movable in the vertical direction. The lower end of the member 8 and the main body 5 is formed, and the base 9 which is horizontally movable with respect to the base member 6 and the lower end of the columnar member 8 are fixed. The pivot member 10 which can turn with respect to the base 9 is provided. In addition, in this form, the columnar member 8 is a main body part which supports the support member 7.

As described above, the robot 1 of this embodiment is a large robot. For example, the height of the robot 1 is about 7 m, and the up-down stroke (movement amount) of the support member 7 is about 5 m. For example, the horizontal stroke of the hand 3 is about 5.5 m.

The hand 3 is provided with the some nail part 12 for mounting the board | substrate 2. As shown in FIG. The base of the hand 3 is rotatably connected to the tip of the arm 4. The arm 4 has two joint parts 13, and is comprised so that it may expand and contract as a whole. In addition, the base end of the arm 4 is fixed to the support member 7.

In this embodiment, the two hands 3 and the two arms 4 are arranged so as to overlap the vertical direction. That is, the robot 1 of this form is a double arm type robot. Moreover, the robot 1 may be a robot of a single arm type having one hand 3 and one arm 4.

In addition, the robot 1 includes an up-and-down drive mechanism 16 (see FIG. 4) for moving the support member 7 and a horizontal drive mechanism 17 (see FIG. 7) for moving the main body 5 in the horizontal direction. ) And a rotary drive mechanism 18 (see FIG. 7) for pivoting the pivot member 10 with respect to the base 9. Hereinafter, the structure of the up-and-down drive mechanism 16, the horizontal drive mechanism 17, and the rotation drive mechanism 18, and the structure of its peripheral part are demonstrated.

(Up and down drive mechanism and its surroundings)

4 is a view showing the support member 7 and the vertical drive mechanism 16 in the F-F direction of FIG. FIG. 5 is a view showing the support member 7, the columnar member 8 and the vertical drive mechanism 16 in the G-G direction of FIG. 4. 6 is a view showing the vertical drive mechanism 16 in the H-H direction of FIG.

As shown in FIG. 5, the vertical drive mechanism 16 is disposed on the side of the columnar member 8 (below the columnar member 8 in FIG. 5). The vertical drive mechanism 16 includes two vertical drive motors 20 and two reduction gears 21 connected to each of the two vertical drive motors 20. As shown in FIG. 4, one vertical driving motor 20, two reduction gears 21, and one vertical driving motor 20 are fixed to the support member 7 in this order from the top. have.

In addition, the vertical drive mechanism 16 engages two pinions (small gears) 22 and two pinions 22 as vertical pins for up and down fixed to the respective output shafts of the two reduction gears 21. A rack 23 as a driving rack is provided. By these two pinions 22 and the rack 23, the support member 7 moves up and down. In addition, the vertical drive mechanism 16 includes two vertical brake mechanisms 24 for stopping the vertical drive mechanism 16 (that is, for stopping the support member 7).

Moreover, the robot 1 is equipped with the guide part 25 for guiding the support member 7 to an up-down direction, as shown in FIG. The guide part 25 is comprised from the guide rail 26 and the guide block 27 engaged with the guide rail 26. As shown in FIG. In addition, the columnar member 8 is formed in the elongate substantially rectangular columnar shape which makes the up-down direction the longitudinal direction, and the support member 7 is formed in the shape of a block.

The vertical drive motor 20 is provided with a speed detection mechanism (not shown) for detecting the rotational speed of the vertical drive motor 20. The speed detecting mechanism is composed of, for example, a slit plate formed in a disk shape, a light emitting element and a light receiving element that are disposed to face each other with the slit plate sandwiched.

As shown in FIG. 6, the pulley 28 is being fixed to the output shaft of the up-down drive motor 20. As shown in FIG. In addition, a pulley 29 having a diameter larger than that of the pulley 28 is fixed to the input shaft of the reducer 21. The belt 30 is attached to the pulleys 28 and 29, and the vertical drive motor 20 and the reduction gear 21 which are arrange | positioned adjacently in the up-down direction are connected by this belt 30. As shown in FIG.

The rack 23 is fixed to the columnar member 8 with the vertical direction being the longitudinal direction (refer FIG. 5). As mentioned above, in this form, the up-down stroke of the support member 7 is long. In other words, the length of the rack 23 is long. Therefore, in this embodiment, the rack 23 is formed by joining a plurality of rack pieces. In addition, the length of one rack piece is longer than the arrangement pitch of the two pinions 22.

As shown in FIG. 6 and the like, the vertical brake mechanism 24 is attached to the input shaft of the reducer 21 so as to be adjacent to the pulley 29. That is, each of the two vertical brake mechanisms 24 is connected to each of the two vertical driving motors 20 through the pulleys 28 and 29 and the belt 30.

The up-and-down brake mechanism 24 is a so-called non-excited brake, and is disposed so as to be movable in the axial direction with respect to the case body in which the coil is housed, the side plate fixed to the case body, and the case body. An armature, a brake disc disposed between the side plate and the armature and fixed to the input shaft of the reducer 21, and a compression coil spring for pressing the armature toward the brake disc are provided. In the vertical brake mechanism 24, when the coil is energized, the armature is attracted to the case body and the brake disc is released. When the energization to the coil is stopped, the brake disc is inserted between the armature and the side plate by the pressing force of the compression coil spring, and the brake 21 is suddenly applied to the reducer 21. In addition, one vertical brake mechanism 24 has a braking force capable of sufficiently stopping the portion moving in the vertical direction, including the substrate 2, the hand 3, the arm 4, the support member 7 and the like. .

The guide rail 26 is being fixed to the columnar member 8 by making the up-down direction the longitudinal direction (refer FIG. 5). In this embodiment, two guide rails 26 are fixed to the columnar member 8. Specifically, the guide rail 26 is fixed to each of the mounting surfaces of the two columnar members 8 parallel to the left and right directions in FIG. 5. In addition, the guide rail 26 arrange | positioned under FIG. 5 is being fixed so that it may adjoin the rack 23. As shown in FIG.

The guide block 27 is fixed to the support member 7. Specifically, the guide block 27 is fixed to the surface orthogonal to the fixed surface (right end surface of FIG. 5) of the arm 4 of the supporting member 7, and the guide block 27 is formed in the vertical direction of FIG. 5. It is engaged with the guide rail 26 from the outside.

In this embodiment, as shown in FIG. 5, the cover member 31 is fixed to the columnar member 8. The cover member 31 is disposed to cover the guide rail 26 in the vertical direction of FIG. 5.

(Horizontal Drive Mechanism and its Peripherals)

FIG. 7 is a diagram for describing an internal configuration of the J part of FIG. 2. 8 is a view for explaining the configuration of the horizontal drive mechanism 17 and the like in the K-K direction of FIG. 9 is a view for explaining the configuration of the horizontal drive mechanism 17 in the L-L direction of FIG.

As shown in FIG. 7, the horizontal drive mechanism 17 is arrange | positioned at the left end side of the base 9 in FIG. This horizontal drive mechanism 17 is provided with two horizontal drive motors 40. As shown in FIG. 8, the two horizontal drive motors 40 are arrange | positioned so that it may adjoin in the left-right direction of FIG. In addition, each of the two horizontal driving motors 40 is fixed to each of the two brackets 52 fixed to the base 9. As shown in FIG. 8 and FIG. 9, each of the two brackets 52 is rotatably held via the bearing 54. The two rotating shafts 53 are arranged to be adjacent to each other in the left and right directions in FIG. 8.

Moreover, the horizontal drive mechanism 17 is a rack as a horizontal drive rack meshing with two pinions 42 as horizontal drive pinions fixed to two lower ends of two rotary shafts 53 and two pinions 42. (43) is provided. By these two pinions 42 and the rack 43, the base 9 moves in the horizontal direction. In addition, the horizontal drive mechanism 17 is provided with two horizontal brake mechanisms 44 for stopping the horizontal drive mechanism 17 (that is, for stopping the base 9).

Moreover, the robot 1 is provided with the guide part 45 for guiding the base 9 in a horizontal direction. The guide part 45 is comprised from the guide rail 46 and the guide block 47 which engages with the guide rail 46. As shown in FIG. Moreover, the base member 6 is equipped with two elongate rail-shaped members 51, as shown in FIG. This rail-shaped member 51 is arrange | positioned in parallel at the predetermined space | interval in the left-right direction of FIG.

The horizontal drive motor 40 is provided with a speed detection mechanism (not shown) for detecting the rotational speed of the horizontal drive motor 40. The speed detecting mechanism is composed of, for example, a slit plate formed in a disk shape, a light emitting element and a light receiving element that are disposed to face each other with the slit plate sandwiched.

As shown in FIG. 9, the pulley 48 is being fixed to the output shaft of the horizontal drive motor 40. As shown in FIG. Moreover, the pulley 49 larger in diameter than the pulley 48 is fixed to the upper end side of the rotating shaft 53. A belt 50 is attached to the pulleys 48 and 49, and the horizontal drive motor 40 and the rotating shaft 53 which are adjacently arranged in the up-down direction of FIG. 8 are connected by this belt 50. As shown in FIG.

The rack 43 is fixed to the upper surface of the rail-shaped member 51 as shown in FIG. In this embodiment, since the movement amount of the base 9 is large, the length of the rack 43 is long. Therefore, the rack 43 is formed by joining several rack pieces.

As shown in FIG. 9, the horizontal brake mechanism 44 is attached to the output shaft of the horizontal drive motor 40 so as to be adjacent to the pulley 48. Like the vertical brake mechanism 24, this horizontal brake mechanism 44 is what is called a non-excited actuation type brake, and is comprised similarly to the vertical brake mechanism 24. As shown in FIG. That is, in the horizontal brake mechanism 44, when the coil is energized, the amateur is attracted to the case body and the brake disc is released. When the energization to the coil is stopped, the brake disc is inserted between the armature and the side plate by the pressing force of the compression coil spring, and the brake is suddenly applied to the horizontal drive motor 40.

The guide rail 46 is being fixed to the upper surface of the rail-shaped member 51 as shown in FIG. In this embodiment, the guide rails 46 are fixed to the upper surfaces of the two rail-like members 51. In addition, the guide rail 46 arrange | positioned at the upper side of FIG. 8 is being fixed so that it may be adjacent to the rack 43. As shown in FIG. As shown in FIG. 7, the guide block 47 is being fixed to the both ends of the base 9 in the left-right direction of FIG. This guide block 47 is engaged with the guide rail 46 from the upper side.

(Configuration of Rotary Drive Mechanism and Its Peripheral Part)

FIG. 10 is a plan view of the pivot member 10 shown in FIG. 1. 11 is a cross-sectional view taken along the line M-M of FIG.

The rotary drive mechanism 18 is arrange | positioned around the central axis CL used as the turning center of the turning member 10, as shown to FIG. 10, FIG. The rotary drive mechanism 18 includes two rotary drive motors 60. As shown in FIG. 10, two rotational driving motors 60 are arranged in point symmetry with respect to the central axis CL, and are fixed to the central portion of the pivot member 10. In addition, the rotary drive mechanism 18 includes a speed reducer 61 fixed to the center of the pivot member 10. In addition, the rotary drive mechanism 18 is provided with one rotary brake mechanism 64 for stopping the rotary drive mechanism 18 (that is, for stopping the pivot member 10). Moreover, the turning member 10 is an elongate block-shaped member, and the lower end of the columnar member 8 is being fixed to one end side (left end side of FIG. 10).

The rotary drive motor 60 is provided with a speed detection mechanism (not shown) for detecting the rotational speed of the rotary drive motor 60. The speed detecting mechanism is composed of, for example, a slit plate formed in a disk shape, a light emitting element and a light receiving element that are disposed to face each other with the slit plate sandwiched.

As shown in FIG. 11, the output cogwheel 68 is fixed to the output shaft of the rotation drive motor 60, and the two output cogwheels 68 and the input cogwheel 69 of the reduction gear 61 and the tooth | gear Are adding up. By the reduction gear 61 which combines these two output gear 68 and the input gear 69, the turning member 10 turns with respect to the base 9. As shown in FIG. That is, the output side of the reduction gear 61 is fixed to the center of the turning member 10, and the turning member 10 is the base 9 by the power of the rotation driving motor 60 transmitted through the reduction gear 61. Turn about.

As shown in FIG. 11, the rotary brake mechanism 64 is being fixed to the upper end of the rotating shaft 73 rotatably held through the bearing 74 at the center part of the turning member 10. As shown in FIG. A cogwheel 70 engaged with the input cogwheel 69 of the reduction gear 61 is fixed to the lower end of the rotating shaft 73. Moreover, the rotary brake mechanism 64 is arrange | positioned in the position which rotated the rotation driving motor 60 by 90 degrees about the center axis CL as shown in FIG.

The rotary brake mechanism 64 is a brake of a so-called excitation-actuated type similarly to the vertical brake mechanism 24, and is configured in the same manner as the vertical brake mechanism 24. That is, in the rotary brake mechanism 64, when the coil is energized, the amateur is attracted to the case body and the brake disc is released. When the energization to the coil is stopped, the brake disc is sandwiched between the armature and the side plate by the pressing force of the compression coil spring, and the brake is suddenly applied to the input gear 69.

(Configuration of Control Unit)

FIG. 12 is a block diagram of the control unit 80 and its related portions of the industrial robot 1 shown in FIG. 1. 12, the structure of the control part 80 which concerns on control of the up-down drive mechanism 16, the horizontal drive mechanism 17, and the rotation drive mechanism 18 is shown.

As shown in FIG. 12, the control part 80 is a structure related to control of the up-and-down drive mechanism 16, the horizontal drive mechanism 17, and the rotation drive mechanism 18, and the two up-and-down drive motors 20 Up and down motor control unit 81 for controlling the two, the horizontal motor control unit 82 for controlling two horizontal driving motors 40, the rotary motor control unit 83 for controlling two rotation driving motors 60 and For controlling the two upper and lower brake mechanisms 24, the vertical brake control unit 84 for controlling the two upper and lower brake mechanisms 24, the horizontal brake control unit 85 for controlling the two horizontal brake mechanisms 44, and the one rotary brake mechanism 64. The rotary brake control part 86 is provided. The control command unit 87 is also connected to the control unit 80.

The up and down motor control unit 81 controls one of the two up and down driving motors 20 by the speed control and the torque control, and torque control the other up and down driving motor 20. Controlled by That is, the up-and-down motor control unit 81 controls feedback of the up-and-down driving motor 20 based on the output from the speed detecting mechanism of the up-and-down driving motor 20 and the up-and-down driving motor 20. Torque control is performed to control the power value of. The other up / down motor 20 is not subjected to feedback control based on the output from the speed detection mechanism of the up / down motor 20. Torque control is performed to control the current value of the vertical drive motor 20.

The horizontal motor control unit 82 controls the horizontal driving motor 40 of one of the two horizontal driving motors 40 by speed control and torque control. In addition, the horizontal motor control unit 82 controls the other horizontal driving motor 40 such as speed control and torque before the other horizontal driving motor 40 stops. Although controlled by the control, at the other time except before the stop of the other horizontal drive motor 40, the other horizontal drive motor 40 is controlled by the torque control. In other words, the horizontal motor control unit 82 has the horizontal drive motor 40 with respect to the other horizontal drive motor 40 at other times except before the stop of the other horizontal drive motor 40. Torque control is performed without performing feedback control based on the output from the speed detection mechanism.

Similarly, the rotation motor control unit 83 controls one of the two rotation driving motors 60 by the speed control and the torque control. In addition, the rotational motor control unit 83 controls the other rotational driving motor 60 with the speed control and the same as that of the one rotational driving motor 60 before the other rotational driving motor 60 stops. Although controlled by torque control, the other rotary drive motor 60 is controlled by torque control at other times except before the stop of the other rotary drive motor 60.

When the stop signal of the support member 7 is input from the control command part 87, the up-and-down brake control part 84 operates two up-down brake mechanisms 24 stepwise. That is, when the stop signal of the support member 7 is input from the control command part 87, the up-and-down brake control part 84 will be different from the operation start timing of one of the up-and-down brake mechanisms 24, and the other up-down brake mechanism 24 may be carried out. The two up and down brake mechanisms 24 are operated so that the start timing of the operation is changed (deviated). Specifically, the up and down brake control unit 84 operates the two up and down brake mechanisms 24 so that the operation start timing of the other up and down brake mechanism 24 is later than the operation start timing of one of the up and down brake mechanisms 24. Let's do it. More specifically, the up / down brake control unit 84 has a timing at which the power supply to the coil of the other up / down brake mechanism 24 is stopped later than the timing at which power supply to the coil of the one up / down brake mechanism 24 is stopped. Power supply to the coils of the two vertical brake mechanisms 24 is stopped.

Similarly, when the stop signal of the base 9 is input from the control command part 87, the horizontal brake control part 85 operates two horizontal brake mechanisms 44 stepwise. That is, when the stop signal of the base 9 is input from the control command part 87, the horizontal brake control part 85 may start the operation start timing of one horizontal brake mechanism 44, and the horizontal brake mechanism 44 of the other. The two horizontal brake mechanisms 44 are operated to change the start timing of the operation. Specifically, the horizontal brake control unit 85 operates the two horizontal brake mechanisms 44 such that the operation start timing of the other horizontal brake mechanism 44 is later than the operation start timing of the one horizontal brake mechanism 44. Let's do it. In addition, the horizontal brake control unit 85 may operate the two horizontal brake mechanisms 44 simultaneously when the stop signal of the base 9 is input from the control command unit 87.

(Main effect of this form)

As described above, in this embodiment, the vertical drive mechanism 16 includes two vertical drive motors 20. Therefore, in order to convey the large board | substrate 2, even if the total capacity of the up-and-down motor 20 required by the up-and-down drive mechanism 16 becomes large, the up-and-down motor 20 which is comparatively small in size can be used. . For example, when the total capacity of the up-and-down motor 20 required by the up-and-down drive mechanism 16 is 10kW, the 5kW up-and-down drive with a relatively small buildup is not used instead of a 10kW up-and-down drive motor with a large buildup. The motor 20 can be used. In addition, compared with the case of using one vertical drive motor having a large physique, the use of two vertical drive motors 20 having a small physique increases the freedom of arrangement of the vertical drive motors 20. Therefore, in this embodiment, the robot can be miniaturized even though the large substrate 2 is transported.

In addition, if the capacity of the up-and-down motor 20 exceeds a predetermined capacity, the price of the up-and-down motor 20 is rapidly high, but in this embodiment, the up-and-down-drive motor 20 having a relatively small capacity can be used. Therefore, even if two up / down driving motors 20 are used, the cost of the robot 1 can be reduced.

Moreover, in this embodiment, since the up-and-down drive motor 20 with a relatively small capacity can be used, the power transmitted from one up-and-down drive motor 20 becomes small. Therefore, the transmission power to the power transmission mechanisms, such as the speed reducer 21, the pinion 22, and the rack 23, which transmits the power of the up-and-down drive motor 20, can be reduced, and the speed reducer 21, the pinion ( 22) and the structure of power transmission mechanisms, such as the rack 23, can be simplified. In addition, damage to power transmission mechanisms such as the speed reducer 21, the pinion 22 and the rack 23 can be suppressed.

In this embodiment, the vertical drive mechanism 16 includes two vertical brake mechanisms 24. Therefore, even if one vertical brake mechanism 24 is damaged, the vertical drive mechanism 16 can be stopped by the other vertical brake mechanism 24, for example. That is, the support member 7 can be stopped to prevent the hand 3 and the arm 4 from falling. Therefore, even the large board | substrate 2 can be conveyed safely. Further, even when one of the upper and lower brake mechanisms 24 is removed at the time of maintenance, the supporting member 7 can be stopped at a predetermined position by the other upper and lower brake mechanisms 24. Therefore, maintenance of the vertical drive mechanism 16 becomes easy.

In addition, in this embodiment, since the two vertical brake mechanisms 24 are operated in stages, rapid braking of the vertical drive mechanism 16 can be prevented. Therefore, the fall of the board | substrate 2 from the hand 3 which may arise because of the sudden stop of the support member 7 can be prevented.

In this embodiment, each of the two vertical brake mechanisms 24 is connected to each of the two vertical driving motors 20 via the pulleys 28 and 29 and the belt 30. Therefore, the up-and-down brake mechanism 20 can stop the two up-and-down driving motors 20 separately and reliably.

In this embodiment, the vertical drive mechanism 16 includes two pinions 22 engaged with the rack 23. Therefore, because the rack 23 is formed by joining a plurality of rack pieces as in this embodiment, the pitches of the teeth of the rack 23 are shifted from the joints of the rack pieces, and the racks 23 are connected at the joints of the rack pieces. Even if the situation where a tooth and only one tooth of one pinion 22 meshes occurs, a plurality of teeth of the other pinion 22 and a plurality of teeth of the rack 23 can be engaged. Therefore, in this embodiment, excessive stress can be prevented from occurring in the teeth of the rack 23 and the teeth of the pinion 22 located at the joint of the rack piece. As a result, damage to the rack 23 and the pinion 22 can be prevented even if the structure of the rack 23 and the pinion 22 is simplified. In particular, in the case of the vertical drive mechanism 16, the teeth of the rack 23 positioned at the joint of the rack piece under the influence of gravity caused by the substrate 2, the hand 3, the arm 4, the support member 7 and the like. And it is highly likely that excessive stress occurs in the teeth of the pinion 22, but in this embodiment, the occurrence of this excessive stress can be prevented.

In this embodiment, each of the two pinions 22 is connected to each of the two up-and-down driving motors 20 through the reduction gear 21 or the like. In this embodiment, the up and down motor control unit 81 controls one of the two up and down driving motors 20 by the speed control and the torque control, and the other up and down driving motor ( 20) is controlled by torque control. Therefore, even when the two pinions 22 are engaged with the rack 23, the teeth of the two pinions 22 and the teeth of the rack 23 can be prevented from being engaged by more than necessary force. As a result, damage to the pinion 22 and the rack 23 can be suppressed, and the support member 7 can be moved up and down appropriately with the up-and-down drive mechanism 16.

In this embodiment, the pinion 22 is fixed to the output shaft of the reducer 21 connected to the up-and-down motor 20. Therefore, a large power can be transmitted to the pinion 22 which meshes with the rack 23 by the action of the reducer 21.

In this embodiment, the horizontal drive mechanism 17 includes two horizontal drive motors 40. Therefore, similarly to the vertical drive mechanism 16, even when the total capacity of the horizontal drive motor 40 required by the horizontal drive mechanism 17 is increased, a horizontal drive motor 40 having a relatively small build size can be used. Further, the degree of freedom in arranging the horizontal drive motor 40 is increased. Therefore, in this embodiment, the robot 1 can be miniaturized even though the large substrate 2 is transported.

In addition, in this embodiment, since the horizontal drive motor 40 having a relatively small capacity can be used, the cost of the robot 1 can be reduced even when two horizontal drive motors 40 are used. . Moreover, in this embodiment, since the horizontal drive motor 40 having a relatively small capacity can be used, the power transmitted from one horizontal drive motor 40 is reduced. Therefore, the transmission power to the power transmission mechanisms such as the pinion 42 and the rack 43 that transmits the power of the horizontal drive motor 40 can be reduced, thereby transmitting the power of the horizontal drive motor 40. The configuration of the power transmission mechanism can be simplified. In addition, damage to the power transmission mechanism that transmits power to the horizontal drive motor 40 can be suppressed.

In this embodiment, the horizontal drive mechanism 17 includes two horizontal brake mechanisms 44. Therefore, for example, even if one horizontal brake mechanism 44 is damaged, the horizontal drive mechanism 17 can be stopped by the other horizontal brake mechanism 44. That is, the main body 5 can be stopped. Therefore, even the large board | substrate 2 can be conveyed safely. In addition, in this embodiment, since the two horizontal brake mechanisms 44 are operated in stages, sudden braking of the horizontal drive mechanism 17 can be prevented. Therefore, the fall of the board | substrate 2 from the hand 3 which may arise because of the sudden stop of the main-body part 5 can be prevented.

In this embodiment, each of the two horizontal brake mechanisms 44 is connected to each output shaft of the two horizontal drive motors 40. Therefore, the horizontal brake mechanism 40 can stop the two horizontal drive motors 40 individually and reliably.

In this embodiment, the horizontal drive mechanism 17 is provided with two pinions 42 which mesh with the rack 43. Therefore, because the rack 43 is formed by joining a plurality of rack pieces as in this embodiment, the pitch of the teeth of the rack 43 is shifted from the joint of the rack pieces, and the rack 43 of the rack 43 is connected at the joint of the rack pieces. Even if a situation arises in which only one tooth of the tooth and one pinion 42 engage, the plurality of teeth of the other pinion 42 and the plurality of teeth of the rack 43 can be engaged. Therefore, excessive stress can be prevented from occurring in the teeth of the rack 43 and the teeth of the pinion 42 located at the joint of the rack piece, and the rack 43 and the pinion 42 can be simplified even if the rack ( 43) and the pinion 42 can be prevented from being damaged. In addition, in the case of the horizontal drive mechanism 17, the teeth and pinions 22 of the rack 23 positioned at the joint of the rack piece immediately after starting the horizontal drive motor 40 or immediately before acceleration or deceleration are stopped. There is a high possibility of excessive stress on the teeth.

In this embodiment, each of the two pinions 42 is connected to the respective output shafts of the two horizontal drive motors 40 via the pulleys 48 and 49 and the belt 50. In this embodiment, the horizontal motor control unit 82 controls one horizontal drive motor 40 of the two horizontal drive motors 40 by speed control and torque control, and the other horizontal drive motor. 40 is controlled by torque control. Therefore, even when the two pinions 42 engage with the rack 43, the teeth of the pinion 42 and the teeth of the rack 43 can be prevented from joining by more than necessary force. As a result, damage to the pinion 42 and the rack 43 can be suppressed, and the main body 5 can be horizontally moved properly by the horizontal drive mechanism 17.

In this embodiment, the rotary drive mechanism 18 includes two rotary drive motors 60. Therefore, similarly to the vertical drive mechanism 16, even when the total capacity of the rotary drive motor 60 required by the rotary drive mechanism 18 is increased, the rotary drive motor 60 having a relatively small size can be used. Moreover, the degree of freedom in arranging the rotation driving motor 60 is increased. Therefore, in this embodiment, the robot 1 can be miniaturized even though the large substrate 2 is transported.

In addition, in this embodiment, since the rotary drive motor 60 having a relatively small capacity can be used, the cost of the robot 1 can be reduced even when two rotary drive motors 60 are used. In addition, in this embodiment, since the rotation drive motor 60 having a relatively small capacity can be used, the power transmitted from one rotation drive motor 60 is reduced. Therefore, the transmission power to the power transmission mechanism, such as the output gear 68 and the reduction gear 61 which transmits the power of the rotation drive motor 60, can be made small, and the power of the rotation drive motor 60 is reduced. It is possible to simplify the configuration of the power transmission mechanism for transmitting the power. In addition, damage to the power transmission mechanism that transmits power to the rotary drive motor 60 can be suppressed.

In this embodiment, the rotation motor control unit 83 controls one of the two rotation driving motors 60 by the speed control and the torque control, and the other rotation driving motor 60. ) Is controlled by torque control. Therefore, even when two output gears 68 engage with the input gear 69 of the reduction gear 61, the teeth of the output gear 68 and the teeth of the input gear 69 are more than necessary. Can be prevented from joining. As a result, damage to the input cogwheel 68 and the output cogwheel 69 can be suppressed, and the turning member 10 can be properly rotated by the rotation drive mechanism 18.

(Other embodiment)

Although the form mentioned above is a preferable form of this invention, it is not limited to this, A various deformation | transformation is possible in the range which does not change the summary of this invention.

In the form mentioned above, the up-and-down drive mechanism 16, the horizontal drive mechanism 17, and the rotation drive mechanism 18 are equipped with two drive motors 20, 40, 60. As shown in FIG. In addition, for example, the vertical drive mechanism 16, the horizontal drive mechanism 17, and / or the rotation drive mechanism 18 may include three or more drive motors 20, 40, and 60.

Moreover, in the above-mentioned aspect, although the up-and-down drive mechanism 16, the horizontal drive mechanism 17, and the rotation drive mechanism 18 are equipped with two drive motors 20, 40, and 60, the up-down drive mechanism ( 16), at least one of the horizontal drive mechanism 17 and the rotary drive mechanism 18 is a drive provided by the other drive mechanism, provided that one drive mechanism includes two drive motors 20, 40, and 60; The motors 20, 40 and 60 may be one.

In the above-described form, the vertical brake mechanism 24 is attached to the input shaft of the reducer 21. In addition, for example, the vertical brake mechanism 24 may be attached to the output shaft of the vertical drive motor 20 or the output shaft of the reduction gear 21. Further, an elongate plate-shaped brake plate having a vertical direction in the longitudinal direction is fixed to the columnar member 8, and a side plate and an armature moving together with the support member are arranged with the brake plate sandwiched. The upper and lower brake mechanisms may be configured. That is, the vertical brake mechanism does not need to be connected to the vertical drive motor 20.

Similarly, although the horizontal brake mechanism 44 is attached to the output shaft of the horizontal drive motor 40, the horizontal brake mechanism 44 may be attached to the rotating shaft 53. As shown in FIG. In addition, the elongated plate-shaped brake plate having the horizontal direction in the longitudinal direction is fixed to the rail-shaped member 51, and the side plate and the amateur which are horizontally moved together with the base 9 are arranged in such a state that the brake plate is fitted. A horizontal brake mechanism may be comprised. That is, the horizontal brake mechanism does not need to be connected to the horizontal drive motor 40.

In the above-described form, the vertical drive mechanism 16 includes two vertical brake mechanisms 24, but the vertical drive mechanism 16 may include three or more vertical brake mechanisms 24. Similarly, the horizontal drive mechanism 17 may be provided with three or more horizontal brake mechanisms 44. If one of the up-and-down drive mechanism 16 or the horizontal drive mechanism 17 includes two brake mechanisms 24 and 44, the brake mechanisms 24 and 44 provided by the other drive mechanism are 1 You may use dogs. Moreover, in the form mentioned above, although the rotary drive mechanism 18 is equipped with one rotary brake mechanism 64, the rotary drive mechanism 18 may be provided with two or more rotary brake mechanisms 64. As shown in FIG.

In the above-mentioned form, the support member 7 is moved up and down by the two pinions 22 and the rack 23. In addition, for example, the support member 7 may be moved up and down by a ball screw and a plurality of nut members screwed to the ball screw. Moreover, the support member 7 may move to an up-down direction by a predetermined link mechanism. Similarly, in the above-described form, the base 9 moves horizontally by the two pinions 42 and the rack 43, but the base 9 is formed by a ball screw and a plurality of nut members screwed to the ball screw. ) May move in the horizontal direction.

In the form mentioned above, the robot 1 is equipped with the up-down drive mechanism 16, the horizontal drive mechanism 17, and the rotation drive mechanism 18. As shown in FIG. In addition, for example, the robot 1 may be provided with only two or one drive mechanisms arbitrarily selected from the vertical drive mechanism 16, the horizontal drive mechanism 17, and the rotation drive mechanism 18. As shown in FIG.

As described above, the present invention can be used for an industrial robot for conveying a predetermined conveying object.

1 is a plan view of an industrial robot according to an embodiment of the present invention.

FIG. 2 is a view illustrating an industrial robot in the E-E direction of FIG. 1.

3 is a view showing an industrial robot in the F-F direction of FIG.

4 is a view showing a supporting member and a vertical driving mechanism in the F-F direction of FIG.

5 is a view showing a supporting member, a columnar member and a vertical drive mechanism in the G-G direction of FIG.

FIG. 6 is a diagram illustrating a vertical drive mechanism in the H-H direction of FIG. 4.

FIG. 7 is a diagram for describing an internal configuration of the J part of FIG. 2.

8 is a view for explaining the configuration of the horizontal drive mechanism and the like in the K-K direction of FIG.

9 is a view for explaining the configuration of the horizontal drive mechanism in the L-L direction of FIG.

FIG. 10 is a plan view of the pivot member shown in FIG. 1. FIG.

11 is a cross-sectional view taken along the line M-M of FIG.

It is a block diagram of the control part of the industrial robot shown in FIG. 1, and its related part.

<Description of the code>

1 Robot (Industrial Robot)

2 boards (return object)

3 hand

4 cancer

6 Base member

7 support member

8 Columnar member (main body)

16 Up and Down Drive Mechanism

17 horizontal drive mechanism

18 rotary drive mechanism

20 Up-and-down motor (drive motor)

21 reducer

22 pinion (up and down drive pinion)

23 rack (rack for vertical drive)

24 Brake mechanism (brake mechanism)

40 Horizontal Drive Motor (Drive Motor)

42 Pinion (Horizontal Pinion)

43 Racks (Horizontal Drive Racks)

44 Horizontal brake mechanism (brake mechanism)

60 Rotary Drive Motor (Drive Motor)

CL center axis

Claims (12)

At the same time having a hand on which the object to be conveyed is mounted, an arm to which the hand is connected, and a support member for supporting the arm, An up-and-down drive mechanism for swinging the support member and / or a horizontal drive mechanism for moving the support member in a horizontal direction and / or a rotation for rotating the support member about a predetermined central axis in an axial direction in the vertical direction With a drive mechanism, At least one of the vertical drive mechanism, the horizontal drive mechanism, the rotary drive mechanism is an industrial robot, characterized in that it comprises a plurality of drive motors. The method according to claim 1, The vertical drive mechanism and / or the horizontal drive mechanism and / or the rotary drive mechanism include a plurality of brake mechanisms for stopping the vertical drive mechanism and / or the horizontal drive mechanism and / or the rotary drive mechanism. Industrial robots. The method according to claim 2, The up-and-down driving mechanism and / or the horizontal driving mechanism and / or the rotation driving mechanism include the same number of brake mechanisms as the driving motor, Each of the plurality of brake mechanisms is connected to each of the plurality of drive motors. The method according to claim 3, An industrial robot, comprising: the up and down drive mechanism having a plurality of up and down drive motors as a plurality of the drive motors. The method according to claim 4, A columnar member for supporting the support member to be movable in a vertical direction; The vertical driving mechanism includes an up and down driving rack fixed to the columnar member, and a plurality of up and down driving pinions engaged with the up and down driving rack. . The method according to claim 5, The vertical drive mechanism has the same number of the vertical drive pinions as the vertical drive motor, And each of the plurality of vertical drive pinions is connected to each of the plurality of vertical drive motors. The method according to claim 5, The up-and-down drive mechanism has an output shaft to which the up-and-down drive pinion is fixed and includes a plurality of reducers connected to each of the plurality of up-and-down drive motors. The method according to claim 3, An industrial robot comprising the horizontal driving mechanism having a plurality of horizontal driving motors as a plurality of the driving motors. The method according to claim 8, A main body for supporting the support member, and a base member for movably supporting the main body in a horizontal direction; The horizontal drive mechanism is an industrial robot, characterized in that it comprises a horizontal drive rack fixed to the base member, and a plurality of horizontal drive pinions to mesh with the horizontal drive rack. The method according to claim 9, The horizontal drive mechanism is provided with the same number of the horizontal drive pinions as the horizontal drive motor, And each of the plurality of horizontal drive pinions is connected to each of the plurality of horizontal drive motors. The method according to any one of claims 1, 4, 8, An industrial robot, comprising: said rotary drive mechanism having a plurality of rotary drive motors as a plurality of said drive motors. The method according to claim 1, At least one of the up and down drive mechanism, the horizontal drive mechanism, and the rotary drive mechanism comprises a drive rack and a plurality of drive pinions to mesh with the drive rack.

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