KR20090021158A - Device for mounting electronic part - Google Patents

Device for mounting electronic part Download PDF

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Publication number
KR20090021158A
KR20090021158A KR1020087029514A KR20087029514A KR20090021158A KR 20090021158 A KR20090021158 A KR 20090021158A KR 1020087029514 A KR1020087029514 A KR 1020087029514A KR 20087029514 A KR20087029514 A KR 20087029514A KR 20090021158 A KR20090021158 A KR 20090021158A
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KR
South Korea
Prior art keywords
cassette
mounting
tool
main body
mounting position
Prior art date
Application number
KR1020087029514A
Other languages
Korean (ko)
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KR101065346B1 (en
Inventor
마사히로 스즈키
Original Assignee
시바우라 메카트로닉스 가부시키가이샤
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Publication of KR20090021158A publication Critical patent/KR20090021158A/en
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Publication of KR101065346B1 publication Critical patent/KR101065346B1/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K20/00Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating
    • B23K20/02Non-electric welding by applying impact or other pressure, with or without the application of heat, e.g. cladding or plating by means of a press ; Diffusion bonding
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/321Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by conductive adhesives
    • H05K3/323Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by conductive adhesives by applying an anisotropic conductive adhesive layer over an array of pads
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2101/00Articles made by soldering, welding or cutting
    • B23K2101/36Electric or electronic devices
    • B23K2101/40Semiconductor devices
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K2201/00Indexing scheme relating to printed circuits covered by H05K1/00
    • H05K2201/10Details of components or other objects attached to or integrated in a printed circuit board
    • H05K2201/10613Details of electrical connections of non-printed components, e.g. special leads
    • H05K2201/10621Components characterised by their electrical contacts
    • H05K2201/10681Tape Carrier Package [TCP]; Flexible sheet connector

Abstract

A device for mounting an electronic part comprises a device body (1), a backup tool (6) installed in the device body and supporting the lower surface of a board at the portion to which a TCP is press-bonded, a pressing tool (7) vertically drivably disposed above the backup tool and pressing the TCP to press-bond it to the board, a cassette detachably positioned at the mounting position between the backup tool and the pressing tool in the device body and having a sheet interposed between the pressing tool and the TCP in the positioned state, and an elevator mechanism (21) installed at the front of the backup tool in the device body, having holding members (25a, 25b) detachably holding the cassette, and setting the heights of the holding members when a used cassette is recovered from the mounting position to one holding member and when an unused cassette held on the other holding member is mounted at the mounting position.

Description

Mounting device for electronic components {DEVICE FOR MOUNTING ELECTRONIC PART}

TECHNICAL FIELD This invention relates to the mounting apparatus of the electronic component which presses and compresses an electronic component to a board | substrate.

For example, TCP (Tape Carrier Package) which is an electronic component is crimped | bonded to the liquid crystal cell as a board | substrate through the anisotropic conductive member as an adhesive material. The said liquid crystal cell is comprised by bonding two glass plates at the predetermined space | interval through a sealing compound, these sealing a liquid crystal between glass plates, and adhering a polarizing plate to the outer surface of each glass plate, respectively. The tape-shaped anisotropic conductive member is attached to an upper surface of one side portion of the liquid crystal cell configured as described above, and the TCP is press-bonded on the anisotropic conductive member, followed by main compression.

The mounting apparatus for press-bonding or main-bonding TCP to a board | substrate contains an apparatus main body as well-known. The apparatus main body is provided with a backup tool and a pressing tool which can be driven in the vertical direction so as to face upward of the backup tool.

When the side lower surface of the substrate on which the TCP is pressed through the anisotropic conductive member is mounted on the upper surface of the backup tool, the pressing tool is driven in the downward direction. Accordingly, the TCP is pressed or main pressed on the substrate.

In the case of main compression of TCP on a substrate, the pressing tool is heated to a high temperature because the anisotropic conductive member is heated and melted by the pressing tool. Therefore, when TCP is pressurized and heated by the pressurizing tool, a part of the anisotropic conductive member melted by heating may come out of TCP and adhere to the pressurizing tool.

If the anisotropic conductive member is attached to the pressing tool, it is not preferable because the pressing tool may be unable to pressurize the TCP evenly by the pressing tool, or the anisotropic conductive member attached to the pressing tool may be transferred to TCP and cause contamination. not.

Thus, in the case of main compression of TCP, the molten anisotropic conductive member is prevented from adhering to the pressing tool when the TCP is pressurized and heated by interposing a heat resistant sheet formed of a silicone resin or a fluorine resin between the TCP and the pressing tool. I'm trying to.

As a means for interposing the sheet between the TCP and the pressing tool at the time of pressing, a cassette including the sheet is used. When the cassette is attached to the apparatus main body, the sheet provided in the cassette is interposed between the pressing tool and the backup tool. Therefore, when the pressing tool is driven in the downward direction, the TCP can be pressurized and heated by the pressing tool through the sheet. Such prior art is disclosed in Patent Document 1.

By the way, the board | substrate has enlarged in recent years. Therefore, as the size of the substrate increases, the width dimension of the sheet interposed between the TCP and the crimping head at the time of crimping also increases. The larger the width dimension of the sheet, the larger the cassette and the larger the weight.

When a large and heavy cassette is set in the apparatus main body, if the operator lifts and sets the cassette by himself, there is a possibility that the burden on the operator increases and workability becomes poor.

Thus, conventionally, a cart for delivering a cassette to the apparatus main body has been used. That is, after the used cassette is taken out from the main body of the apparatus to the upper surface of the trolley, the trolley is moved to a predetermined place, that is, the accumulation place of the cassette, and the cassette is unloaded, and then the unused cassette is mounted on the upper surface of the trolley. Then, the trolley was run to position the front side of the apparatus main body, and the cassette mounted on the upper surface of the trolley was attached to the apparatus main body.

[Patent Document 1] Japanese Patent Application Publication No. 2001-28382

In this way, when the balance is used, the burden on an operator can be reduced. However, the device cannot be operated until the cassette used is detached from the main body of the apparatus and the unused cassette is mounted on the main body of the apparatus, i. Therefore, it takes time to replace the cassette, and the operation rate of the apparatus is lowered.

The present invention provides a mounting apparatus for an electronic component that can reduce the burden on the operator and allow the cassette replacement work to be performed quickly without lowering the operation rate of the apparatus.

The present invention is a mounting apparatus for crimping electronic components on a substrate,

With the device body,

A backup tool installed in the main body of the apparatus and supporting a lower surface of the portion on which the electronic component of the substrate is pressed;

A pressurizing tool disposed above the backup tool so as to be driven in an up and down direction and pressurizing the electronic component to press the electronic component;

A cassette mounted to be detachable from the mounting position between the backup tool and the pressing tool of the apparatus main body, the cassette including a sheet interposed between the pressing tool and the electronic component in a mounted state;

A plurality of holding portions provided in front of the backup tool of the main body of the apparatus to hold the cassette so that the cassette can be detached, and when the used cassette is recovered from the mounting position to one holding portion, An elevator mechanism that sets the height of each holding portion, respectively, when the retained unused cassette is mounted in the mounting position.

It is a device for mounting an electronic component, characterized in that it comprises a.

1 is a side view showing a schematic configuration of a mounting apparatus of an embodiment of the present invention.

2 is a front view of the apparatus main body showing the elevator mechanism.

3 is a view schematically showing a cassette positioned at a mounting position.

4 is a block diagram showing a control system.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

1 shows a schematic configuration of a mounting apparatus, which includes an apparatus body 1. The mounting table 2 is provided in the apparatus main body 1. The mounting table 2 is driven by the table drive source 3 in the X direction and the Y direction, which are horizontal directions, and in the Z direction orthogonal to the horizontal direction.

To the mounting table 2, for example, a substrate W such as a liquid crystal cell is supplied in a state in which at least one side circumference located at the front side of the apparatus main body 1 from the peripheral circumference protrudes from the upper surface of the mounting table 2. And retained by means such as vacuum adsorption. As shown in FIG. 3, TCP 5 as an electronic component is press-bonded to one side circumferential portion of the substrate W through the anisotropic conductive member 4.

The apparatus main body 1 is provided with the backup tool 6 which supports the lower surface of the one peripheral part of the board | substrate W hold | maintained by the mounting table 2 with the upper end surface. The TCP 5 pressed against the periphery of the substrate W supported by the upper end surface of the backup tool 6 is placed on the pressure tool 7 provided so as to be able to be driven in the vertical direction to face upward of the backup tool 6. It pressurizes by heating and it is crimped | bonded by pressure.

The pressing tool 7 is provided on the lower surface of the pressing head 8. Since this pressurizing head 8 is slidably installed in a Z direction, ie, an up-down direction by the linear guide which is not shown in figure, it is driven in the Z direction by the Z drive source 9. This Z drive source 9 transmits the rotation of the motor 9a to the screw shaft 9b, and drives the press head 8 in the up-down direction by the screw shaft 9b. The Z drive source 9 may be a linear motor, a cylinder, or the like.

As shown in FIG. 1, a pair of rail members 11 (only one side) is provided at the height position slightly above the backup tool 6 at both ends in the width direction of the apparatus main body 1. Are installed horizontally along the front and rear directions of the. That is, the rail member 11 is provided along the front-back direction of the apparatus main body 1 above the backup tool 6.

In the apparatus main body 1, the cassette 12 can be attached or detached along the rail member 11. When the cassette 12 is attached to the apparatus main body 1, the front end surface of the cassette 12 abuts on the stopper 11a provided in the front end of the rail member 11 at a predetermined position. As a result, the cassette 12 is positioned.

In other words, the cassette 12 is arranged to be positioned between the backup tool 6 and the pressing tool 7. As shown in FIG. 1 and FIG. 3, this position is made into the mounting position 13 with respect to the apparatus main body 1 of the cassette 12. As shown in FIG.

The cassette 12 is formed in a rectangular frame shape having a width dimension equal to or greater than the length dimension of one circumferential portion of the substrate W. Inside the cassette 12, silicon is formed at the rear end in the front-rear direction crossing the width direction as shown in FIG. The feed reel 16 wound and mounted with a heat resistant sheet 15 made of resin or a fluororesin is rotatably provided, and a winding reel 17 for winding the sheet 15 is provided at the front end portion. The driven gear (not shown) is provided in the one end part which protruded to the width direction one side outer side of the cassette 12 of this winding reel 17. As shown in FIG.

When the cassette 12 is positioned in the mounting position 13, as shown in FIG. 3, the seat 15 provided between the feed reel 16 and the take-up reel 17 has a backup tool 6 and a pressurizing tool 7. Intervene in between. At the same time, driven gears provided at one end of the take-up reel 17 mesh with each other with a drive gear (not shown) that is rotationally driven by a drive source provided on the apparatus main body 1 side.

Accordingly, when the pressing tool 7 descends and pressurizes and heats the upper surface of one side circumference of the substrate W supported by the top surface of the backup tool 6, the pressing tool 7 is connected to the TCP 5 through the sheet 15. ) Under pressure heating. After the pressurization, the winding reel 17 is driven to rotate by the drive source, so that the sheet 15 is wound around the winding reel 17 by a predetermined length.

Therefore, when the TCP 5 is pressurized and heated by the pressing tool 7, the molten anisotropic conductive member 4 is not only prevented from being attached to the pressing tool 7, but also the sheet 15 is wound, By the pressurizing tool 7, it is possible to pressurize and heat the TCP 5 through the portion where the residue of the sheet 15 is not attached.

In the mounting position 13, a detection sensor 18 is provided opposite to the supply reel 16 of the cassette 12 positioned at the mounting position 13. This detection sensor 18 detects the end of the sheet | seat 15 discharged | emitted from the supply reel 16, and outputs this detection signal to the control apparatus 19 shown in FIG.

An elevator mechanism 21 is provided in front of the backup tool 6 of the apparatus main body 1. As shown in FIG. 2, the elevator mechanism 21 includes a pair of guide bodies 22 that are set up at both ends in the width direction of the apparatus main body 1. The movable member 23 is provided in the inner surface which these guide bodies 22 oppose each other so that a movement along an up-down direction is possible.

The upper holding member 25a and the lower holding member 25b are horizontally provided at the movable member 23 at predetermined intervals in the vertical direction, and the connecting member 26 is provided at the upper end. The rod 28 of the cylinder 27 as a drive source is connected to this connecting member 26.

Therefore, when the cylinder 27 is operated, the movable member 23 is driven in the up and down direction so that the positioning is possible at the raised position and the lowered position. When the movable member 23 is driven to the lowered position, the upper retaining member 25a can be positioned at the same height as the rail member 11 that supports the cassette 12 at the mounting position 13, and is driven to the raised position. In this case, the lower retaining member 25b can be positioned at the same height as the rail member 11.

In either of the left and right upper holding members 25a or the lower holding members 25b, an unused cassette 12, i.e., an unused sheet 15, is wound around the feed reel 16 and mounted therein ( 12) is held in engagement so that both ends of the width direction are removable, and the other side is empty.

The unused cassette 12 is mounted on the trolley 31 shown in FIG. 1 by an operator (not shown), moved to the front of the apparatus main body 1, and supplied to the elevator mechanism 21, and the supporting member 25a or 25b).

The cassette 12 is mounted and discharged by the cassette supply mechanism 33 with respect to the mounting position 13 of the apparatus main body 1. As shown in Fig. 1, the cassette supply mechanism 33 is positioned along the front-rear direction with the axis horizontally at both ends in the width direction of the apparatus main body 1 from the rear of the apparatus main body 1 than the mounting position 13. And a pair of cylinders 34 (only one shown) are installed. A chuck 36 is provided at the tip of the rod 35 of the cylinder 34.

Since the chuck 36 is provided with a pair of fingers 37 which open and close in the vertical direction, both ends in the width direction of the front and rear rear end portions of the cassette 12 positioned at the mounting position 13 by the fingers 37. And the cassette 12 is returned to any one of the support members 25a and 25b of the elevator mechanism 21 positioned at the same height as the rail member 11 of the mounting position 13. It is supposed to be.

In addition, the chuck 36 is an unused cassette 12 held by either of the support members 25a and 25b of the elevator mechanism 21, which is positioned at the same height as the rail member 11. Both ends of the rear end portion of the rear end portion are sandwiched, and the cassette 12 is pulled back from the front of the apparatus main body 1 to be held in the mounting position 13.

As shown in FIG. 4, the elevator mechanism 21 and the cassette supply mechanism 33 are driven to be controlled by the control device 19 based on the detection signal from the detection sensor 18.

In the mounting apparatus configured as described above, when the main body 5 is press-bonded to the upper surface of one side of the substrate W, the cassette 12 is held in the mounting position 13 of the apparatus main body 1. .

That is, as shown in FIG. 3, the sheet 15, which is ejected from the supply reel 16 of the cassette 12 and wound on the take-up reel 17, is interposed between the backup tool 6 and the pressing tool 7. In this state, the pressing tool 7 is driven in the downward direction to pressurize and heat the upper surface of the side portion on which the TCP 5 of the substrate W supported by the backup tool 6 is pressed.

As a result, the anisotropic conductive member 4 is heated and melted by the pressing tool 7, and the TCP 5 is pressed against the substrate W. At this time, since the heat-melted anisotropic conductive member 4 is prevented from adhering to the pressing tool 7 by the sheet 15, the main compression of the TCP 5 by the pressing tool 7 is assuredly and furthermore. This can be done without degrading the TCP (5).

Every time one TCP 5 is crimped | bonded, the sheet | seat 15 is wound by the winding reel 17 by predetermined length, and is sent out from the supply reel 16. As shown in FIG. When the remaining amount of the sheet 15 wound around the feed reel 16 becomes small, this is detected by the detection sensor 18. The detection signal of the detection sensor 18 is input to the control apparatus 19. Accordingly, when the main compression of the TCP 5 to the substrate W performed at this time is completed, the mounting table (eg, the substrate W is evacuated from the mounting position 13 between the backup tool 6 and the pressing tool 7). 2) is driven.

Then, the control device 19 raises the pressurizing tool 7 and then drives the rod 35 of the cylinder 34 of the cassette supply mechanism 33 in the protruding direction. Thus, the used cassette 12 held by the rail member 11 at the mounting position 13 is pushed out of the front of the apparatus main body 1 by the chuck 36 provided at the tip of the rod 35.

In the mounting position 13, one support member, for example, the upper retaining member 25a among the upper retaining members and lower retaining members 25a and 25b of the elevator mechanism 21, as shown in FIG. It is positioned at the same height as the rail member 11 of 13) and is waiting. As a result, the cassette 12 pushed out from the mounting position 13 toward the front side of the apparatus main body 1 is held by the upper holding member 25a as indicated by the broken line in FIG.

When the used cassette 12 is held by the upper holding member 25a, the finger 12 of the chuck 36 provided at the tip of the rod 35 of the cylinder 34 opens the used cassette 12.

Next, the cylinder 27 of the elevator mechanism 21 is operated to raise the movable member 23, to raise the upper retaining member 25a than the rail member 11, and to use the unused one shown by the solid line in FIG. The lower holding member 25b holding the cassette 12 is positioned at the same height as the rail member 11 in the mounting position 13.

When the lower retaining member 25b is positioned at the same height as the rail member 11, the finger 37 of the chuck 36 of the cassette supply mechanism 33 is driven in the open direction, and the lower retaining member 25b The rear end of the retained unused cassette 12 is sandwiched. In this state, the rod 35 is driven in the retraction direction. Thereby, the unused cassette 12 held by the lower holding member 25b is attracted to the mounting position 13, and is held and positioned by the rail member 11.

In this way, when the used cassette 12 is removed from the mounting position 13 and the unused cassette 12 is positioned at the mounting position 13, the TCP of the substrate W held by the mounting table 2 ( The one side to which 5) is pressed is determined as a supply position on the backup tool 6, and main compression of the above-mentioned TCP 5 is performed.

When the main crimping operation is resumed, the operator holds the unused cassette 12 prepared on the cart 31 in advance on the empty lower retaining member 25b of the elevator mechanism 21, and the upper retaining member 25a. The used cassette 12 collected and retained on the cart 31 is taken out on the cart 31, the cart 31 is driven to an accumulation place of the cassette 12, or the like to dispose of the used cassette 12, and then an unused cassette ( 12) is loaded and placed on the front side of the apparatus main body 1. As a result, the above-described replacement operation of the cassette 12 can be repeated.

Thus, since the elevator mechanism 21 is provided in front of the backup tool 6 of the apparatus main body 1, when replacing the used cassette 12 with the unused cassette 12, the apparatus main body 1 is carried out. The unused cassette 12 is recovered from one of the upper and lower support members, for example, the upper support member 25a of the elevator mechanism 21 from the mounting position 13 of the elevator mechanism 21, and then to the lower support member 25b. The unused cassette 12 supplied and held in advance can be held on the rail member 11 to determine the supply position at the mounting position 13.

That is, when replacing the cassette 12 whose mounting position is determined at the mounting position 13 of the apparatus main body 1, the operation | movement which removes the used cassette 12 from the mounting position 13, and an unused cassette The work for attaching (12) can be continuously performed by using the elevator mechanism 21.

That is, the replacement work of the cassette 12 can be performed quickly. Thereby, since the interruption | interruption time of the mounting operation which performs the main bonding of TCP5 to the board | substrate W performed by the apparatus main body 1 can be shortened, productivity can be improved by that much.

In addition, since the unused cassette 12 is supplied to the elevator mechanism 21 or the used cassette 12 is recovered using the cart 31, the operator does not have to carry the heavy cassette 12. do. This can reduce the burden on workers.

The used cassette 12 is recovered from the mounting position 13 to the upper holding member 25a of the elevator mechanism 21, or the unused cassette 12 held by the lower holding member 25b is mounted on the mounting position 13. The work to be supplied to the apparatus can be automatically performed by the cassette supply mechanism 33.

Therefore, by this, not only the burden on the operator can be reduced, but also the replacement work of the cassette 12 can be performed quickly.

In the above embodiment, two holding portions are provided in the elevator mechanism. However, the number of holding portions provided in the elevator mechanism is not limited to two, but may be three or more. That is, the support member which collect | recovers the used cassette and the support member which hold | maintains the unused cassette should just be included.

Moreover, although the cassette supply mechanism was provided in order to attach / detach a cassette with respect to a mounting position, an operator may supply and discharge a cassette with respect to a mounting position, without providing a cassette supply mechanism.

In addition, the means for driving the support member of the elevator mechanism in the vertical direction is not limited to the cylinder, but may be performed by a belt, a wire or a chain.

In addition, in the above embodiment, the case of supplying a sheet having heat resistance such as silicone resin or fluorine resin contained in the cassette when the main compression of TCP is described, but the sheet not only has heat resistance such as silicone resin or fluorine resin. Instead, it may be an anisotropic conductive member adhered to the substrate. That is, the present invention can also be applied to a case in which the anisotropic conductive member is housed in a cassette and the unused cassette is replaced with the cassette used by an elevator mechanism.

According to the present invention, since the cassette used by the elevator mechanism can be held or an unused cassette held in advance can be mounted on the main body of the apparatus, the cassette replacement operation can be performed quickly.

Claims (3)

As a mounting apparatus for crimping electronic components on a substrate, Device body; A backup tool installed in the apparatus main body to support a lower surface of a portion on which the electronic component of the substrate is pressed; A pressurizing tool disposed above the backup tool to be driven in a vertical direction and pressurizing the electronic component to press the electronic component; A cassette positioned to be detachable from a mounting position between the backup tool and the pressing tool of the apparatus main body, the cassette including a sheet interposed between the pressing tool and the electronic component in a positioned state; And A plurality of holding portions provided in front of the backup tool of the apparatus main body to hold the cassette so that the cassette can be detached and held, when the used cassette is recovered from the mounting position to one holding portion, and held in another holding portion; Elevator mechanism which sets the height of each said holding | maintenance part, respectively, when mounting the used unused cassette to the said mounting position Mounting device of the electronic component comprising a. The method of claim 1, And a trolley for receiving the used cassette recovered from the mounting portion to the holding portion from the holding portion. The method of claim 1, And a cassette supply mechanism for mounting the cassette from the elevator mechanism to the mounting portion and returning the cassette from the mounting portion to the elevator mechanism.
KR1020087029514A 2006-06-06 2007-04-20 Apparatus for bonding electronic parts KR101065346B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006157621A JP4643495B2 (en) 2006-06-06 2006-06-06 Electronic component mounting equipment
JPJP-P-2006-157621 2006-06-06

Publications (2)

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KR20090021158A true KR20090021158A (en) 2009-02-27
KR101065346B1 KR101065346B1 (en) 2011-09-16

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CN (1) CN101461049B (en)
TW (1) TWI392033B (en)
WO (1) WO2007141966A1 (en)

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KR20140009318A (en) 2011-02-02 2014-01-22 쓰리엠 이노베이티브 프로퍼티즈 컴파니 Patterned substrates with darkened mutlilayered conductor traces
CN102595820B (en) * 2012-03-11 2014-09-17 郑小玲 Photoelectric packaging mechanism
JP6244550B2 (en) * 2014-02-10 2017-12-13 パナソニックIpマネジメント株式会社 Method for replacing protective sheet in component mounting apparatus
CN110228681A (en) * 2019-06-25 2019-09-13 东莞市德速达精密设备有限公司 Open type multilayer loader

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JPH05310325A (en) * 1992-05-08 1993-11-22 Matsushita Electric Ind Co Ltd Multiple kind parts supplying device
JP3560706B2 (en) * 1995-11-06 2004-09-02 松下電器産業株式会社 Component mounting equipment
JP3459540B2 (en) 1997-06-05 2003-10-20 株式会社日立ハイテクインスツルメンツ Electronic component mounting device
EP1535143A4 (en) * 2002-06-19 2010-05-05 Brooks Automation Inc Automated material handling system for semiconductor manufacturing based on a combination of vertical carousels and overhead hoists
KR100496631B1 (en) * 2002-06-25 2005-06-20 미래산업 주식회사 Electronic Elements Feeding Method
KR100491161B1 (en) * 2002-11-26 2005-05-24 주식회사 테라세미콘 Semiconductor manufacturing system for thermal process
JP4262168B2 (en) * 2004-08-13 2009-05-13 芝浦メカトロニクス株式会社 Mounting device

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WO2007141966A1 (en) 2007-12-13
CN101461049B (en) 2010-09-29
JP2007329198A (en) 2007-12-20
CN101461049A (en) 2009-06-17
KR101065346B1 (en) 2011-09-16
TWI392033B (en) 2013-04-01
JP4643495B2 (en) 2011-03-02
TW200805516A (en) 2008-01-16

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