KR20080059834A - A substrate convey track for wet process - Google Patents

Abstract

A substrate convey track for wet process is provided to prevent generation of scratches on a guide roller by increasing a contact area between a substrate and the guide roller. A bath includes a bottom surface and both sides to form an internal substrate processing space. A plurality of shafts are arranged in parallel in the internal substrate processing space. A plurality of rollers are installed on the shafts. A guide roller(140) is installed between the adjacent shafts. The guide roller rotates in one direction by the friction with the substrate while moving vertically. The guide roller includes a guide shaft(142), a guide roller(144) installed on the guide shaft, a protrusion(148) formed on the guide shaft, and a guide groove(146) formed on the inner surface of the guide roller.

Description

A substrate convey track for wet process

1 is a perspective view schematically showing a substrate transfer track used in a general wet process.

2 is a cross-sectional view schematically showing the cross section of FIG.

3 is a cross-sectional view schematically showing a track for transferring a substrate according to the present invention.

Figure 4 is a perspective cross-sectional view schematically showing a guide roller according to an embodiment of the present invention.

5a to 5b are cross-sectional views schematically showing the up and down movement of the guide roller.

<Description of the symbols for the main parts of the drawings>

140: guide roller

142: guide shaft

144: guide rotation roller

146: Guide groove

148: protrusion

The present invention relates to a substrate transfer track for a wet process, and more particularly, to a guide roller for guiding a substrate that is slidably moved in a bath where a wet process for manufacturing a flat panel display device is performed.

In line with the recent information age, the display field for displaying a large amount of data by various electric signals as a visual image has also been rapidly developed. As a display device (FPD), a liquid crystal display device (LCD), a plasma display device (PDP), a field emission display device (FED), an electroluminescence display device (Electro) luminescence display device (ELD) has been introduced to quickly replace the existing cathode ray tube (CRT).

These general flat panel display devices have a unique fluorescent or polarizing material layer between two side-by-side substrates, and most of the manufacturing processes are performed on a substrate, and thin film deposition is performed to form a predetermined thin film on the substrate surface. A process, a photolithography process that exposes a selected portion of the thin film, and an etching process that is patterned to remove the exposed portion of the thin film, is repeated several times. In addition, cleaning, bonding, and cutting are performed. Many processes, such as these, are involved.

In particular, a process of treating a substrate surface using a predetermined liquid in the manufacturing process of such a flat panel display device is called a wet process, and representative examples thereof include wet etching and cleaning.

1 is a perspective view schematically showing a substrate transfer track used in a general wet process, and FIG. 2 is a cross-sectional view schematically showing a cross section thereof.

As shown in the drawing, a wet process for manufacturing a flat panel display device is generally performed in a bath 30 which is a sealed reaction tank, and the substrate 30 is slid and moved in one direction in the bath 30. A substrate transfer track (hereinafter referred to simply as track: 50) is provided.

That is, the bath 30 generally includes both side surfaces 32 and bottom surfaces 34 to define a predetermined wet processing space therein, and the track 50 is installed to penetrate such a processing space. The track 50 is completed by arranging a plurality of rotatable shaft shafts 10 in parallel with each other, so that each of the shaft shafts 10 has a plurality of rotating rollers 20 having an annular shape to maintain a predetermined interval. It is mounted around.

And drive shafts such as a motor (not shown) are connected to both ends of each shaft shaft 10 to exert a rotating force, and a timing belt or the like is installed as necessary to share the rotating force with a neighboring shaft shaft 10.

Therefore, the substrate 2, which is the object to be processed, is mounted on the rotary rollers 20 mounted on the respective shaft shafts 10, and is moved in a sliding manner by the rotation of the shaft shafts 10 and the rotary rollers 20. The target wet process is performed by contacting an etchant or a cleaning liquid sprayed onto the surface of the substrate 2 through a spray nozzle (not shown) during the movement.

Meanwhile, in the process of performing the wet process, the track 50 is tilted to form a predetermined slope to prevent the etchant or the cleaning liquid sprayed onto the surface of the substrate 2 from accumulating on the substrate 2. In addition, the etchant or cleaning liquid sprayed on the substrate 2 sliding on the track 50 flows out of the substrate 2 naturally.

Therefore, since the substrate 2 seated and moved on the track 50 forming the inclined surface is also slidably moved in an inclined state by the inclined surface of the track 50, at this time, at one edge of the track 50 And a guide roller 40 for preventing the separation of (2).

The guide roller 40 is composed of a guide shaft 42 and a guide rotating roller 44 of a cylindrical shape rotatable around the guide shaft 42 and adjacent to each other on the lower side of the inclined surface of the track 50. It is comprised between the shaft axles 10.

Accordingly, the substrate 2 is supported by the guide roller 40 and is slidably moved without being separated from the track 50. The guide roller 40 has no additional rotational power, and the substrate 2 is moved. It is rotated by the frictional force in the moving process.

However, spots or linear scratches appear on the guide rotation roller 44 which is directly rubbed with the substrate 2. In particular, the scratches of the guide rotation roller 44 are prominent at a specific point, and a plurality of substrates are provided. (2) is seated on the track 50 in an inline manner and is slidably moved, so that the scratches of the guide rotary roller 44 are seated on the track 50 and slid as the number of substrates 2 slides. It is deeper.

In addition, scratches of the guide rotating roller 44 damaged by repeated friction with the substrate 2 cause interference with the substrate 2, which causes breakage of the substrate 2, in which case the guide roller is present. (40) Since the whole must be replaced, not only the resource part but also the waste of cost.

Accordingly, the present invention has been made in order to solve the above problems, to provide a guide roller that can stably support the substrate while minimizing damage to the substrate, and can maximize the process cost in replacement due to wear. It is intended as a first purpose.

It is also a second object of the present invention to provide a track for transporting a substrate that can greatly improve the reliability of substrate transport.

In order to achieve the above object, the present invention is provided with a bottom surface and both sides, and the substrate processing space defined therein; A plurality of shaft shafts arranged side by side in the substrate processing space, each of which has a plurality of rotating rollers; Comprising one side of the shaft shaft, comprising a guide roller between the adjacent shaft shaft, the guide roller is rotated in one direction by friction with the substrate, while the wet process characterized in that the vertical lifting To provide a substrate transfer track.

The guide roller is characterized in that it comprises a guide shaft, and a guide rotating roller rotatably mounted around the guide shaft, the guide shaft is configured with a predetermined end of the guide shaft, the guide on the inner surface of the guide rotating roller A groove is formed.

In addition, the guide groove is characterized in that the one end and the other end is formed in a spiral (螺 旋 形) meet each other along the inner surface of the guide rotary roller, the protruding end is inserted into the guide groove in a fixed state The guide rotation roller is characterized in that the lifting movement up and down through the guide groove.

At this time, the shaft shaft end is characterized in that the drive means such as a motor is connected, the guide shaft is configured with a guide groove, the guide rotating roller is characterized in that the projecting end of a predetermined shape is configured.

In addition, the guide groove is characterized in that the one end and the other end of the guide shaft is composed of a spiral (meet) each other.

Hereinafter, the present invention will be described in more detail with reference to the accompanying drawings.

3 is a cross-sectional view schematically showing a substrate transfer track according to the present invention.

As shown, the bath 130 is usually provided with both sides 132 and the bottom surface 134 to define a predetermined wet treatment space therein, the track 150 is installed to pass through such treatment space The track 150 is completed by arranging a plurality of rotatable shaft shafts 110 in parallel with each other, and each shaft shaft 110 has a plurality of rotating rollers 120 having an annular shape at regular intervals. It is fitted around to keep it.

And drive shafts such as a motor (not shown) are connected to both ends of each shaft shaft 110 to exert a rotational force, and a timing belt or the like is installed as necessary to share the rotational force with neighboring shaft shafts 110.

At this time, the track 150 is configured to be inclined to form a predetermined inclined surface, one side edge of the track 150 is composed of a guide shaft 142 and the guide rotation roller 144 to prevent the separation of the substrate 102 The guide roller 140 is provided.

Meanwhile, according to the purpose, a spray nozzle (not shown) may be provided at the upper end of the processing space to spray a predetermined liquid onto the surface of the substrate 102 which is slid by the track 150. In the case of etchant and washing, the washing liquid is sprayed.

Therefore, the substrate 102 to be processed is mounted on the rotary rollers 120 mounted on the respective shaft shafts 110 and moved in a sliding manner by the rotation of the shaft shafts 110 and the rotary rollers 120. The target wet process is performed by contacting an etchant or a cleaning liquid sprayed onto the surface of the substrate 102 through a spray nozzle (not shown) during the movement.

In this case, the track 150 is inclined to form a predetermined inclined surface, so that the etchant or cleaning liquid sprayed onto the surface of the substrate 102 that is seated on the inclined surface 150 and slides in an inclined state. It naturally flows out of the substrate 102 without accumulating on the 102.

In addition, the substrate 102 that is slidably moved in the inclined state is supported by one edge of the guide roller 140 so as not to be separated from the outside of the track 150. At this time, the guide rotating roller of the guide roller 140 144 rotates while freely moving up and down in contact with the substrate 102. This will be described in more detail with reference to FIG. 4.

Figure 4 is a perspective cross-sectional view schematically showing a guide roller according to an embodiment of the present invention.

As shown, the guide roller 140 is mounted around the guide shaft 142 and the guide shaft 142 and is composed of a rotatable cylindrical guide rotating roller 144, the guide rotating roller 144 is a substrate It is configured using a Teflon-based polymer material that does not damage the substrate (102 in FIG. 3) even when collided with (102 in FIG. 3).

At this time, the guide shaft 142 constitutes a protruding end 148 of a predetermined shape, and the protruding end 148 is freely inserted into an inner surface of the guide rotating roller 144 mounted around the guide shaft 142. The guide rotary roller 144 constitutes a guide groove 146 for inducing the vertical lifting movement.

The guide roller 140 operates similarly to the driving principle of a cylindrical cam that moves a driven joint inserted into it by making a flaw (or protrusion) on a surface of a rotating cylinder (following joint), that is, the protruding end. The guide shaft 142 configured as a guide shaft 142 is a fixed follower, and the guide shaft 142 is rotated by being mounted around the guide shaft 142 and the guide groove 146 including the guide groove 146 into which the protruding end 148 is inserted freely. The roller 144 is to be driven.

At this time, the guide groove 146 is composed of a spiral (one-shaped end) and the other end meets each other along the inner surface of the guide rotary roller 144, the protruding end 148 is fixed to the guide groove 146 is configured to be inserted freely.

For this reason, the guide rotary roller 144 having the protruding end 148 inserted into the guide groove 146 rotates in one direction by an external force and is moved up and down through the spiral guide groove 146. As the lifting and lowering movement, the guide groove 146 is configured in such a way that one end and the other end meet each other, the guide rotation roller 144 is to move up and down while rotating up and down.

Accordingly, the substrate (102 of FIG. 3) is supported by the guide roller 140 and is slidably moved without being separated on the track (130 of FIG. 3). Unlike the existing one, which was only rubbed on a specific portion of the roller 144, the contact area where the substrate (102 of FIG. 3) and the guide rotating roller 144 are in contact with each other by the vertical movement of the guide rotating roller 144 is widened. It can be formed.

This can prevent the occurrence of spot or line scratches on the guide rotating roller 144, and also prevent the damage of the substrate (102 in FIG. 3) due to the scratches. This, the up and down movement of the guide roller will be described in more detail with reference to Figures 5a to 5b.

5a to 5b are cross-sectional views schematically showing the up and down movement of the guide roller.

The guide roller 140 according to the present invention is rotated by the frictional force with the substrate (102 in Figure 3) in the process of moving the substrate (102 in Figure 3), without a separate rotational power.

Thus, in the process of being seated on the track 130 (FIG. 3) and moving the substrate 102 (FIG. 3), the substrate (102 of FIG. 3) and the guide shaft 142 of the guide roller 140 are surrounded. As the guide rotating roller 144 mounted is rubbed, the guide rotating roller 144 is rotated in the same direction as the moving direction of the substrate (102 of FIG. 3).

At this time, the protruding end 148 formed on the guide shaft 142 is inserted into the guide groove 146 of the spiral formed on the inner surface of the guide rotating roller 144, the fixed protruding end 148 Through the guide rotation roller 144 is rotated in the same direction as the moving direction of the substrate (102 in Figure 3), as shown in Figure 5a, it is to move up and down the guide shaft 142.

That is, when the guide rotary roller 144 is raised and lowered to the highest point of the guide shaft 142, the protruding end 148 is located at the lowest end of the guide groove 146 of the inner surface of the guide rotary roller 144. Will be done.

In addition, when the protruding end 148 is located at the lower end of the guide groove 146, one end and the other end of the guide groove 146 is configured to meet each other, as shown in Figure 5b, the guide rotation The roller 144 continues to rotate while lifting up and down the guide shaft 142.

In this case, the protruding end 148 is positioned at the upper end of the guide groove 146 of the guide rotating roller 144.

As such, while the guide rotation roller 144 continues to rotate about one direction with respect to the guide shaft 142, the lifting movement is repeated continuously up and down through the guide groove 146.

On the other hand, although not shown in the drawings, the position of the guide groove 146 and the protruding end 148 of the guide roller 140 may be configured to be opposite to each other, that is, the guide groove 146 on the guide shaft 142 Then, the protrusion end 148 is configured on the inner surface of the guide rotating roller 144.

Thus, when the positions of the guide groove 146 and the protruding end 148 are configured in reverse, the guide rotating roller 144 mounted around the guide shaft 142 rotates, and is configured in the guide rotating roller 144. The protruding end 148 moves up and down along the guide groove 146 formed on the guide shaft 142.

As described above, the guide rotation roller 144 of the guide roller 140 is provided freely up and down to prevent the separation of the substrate (102 in FIG. 3) at one edge of the track (130 in FIG. 3) configured to have an inclined surface. It is configured to rotate while raising and lowering, thereby forming a wide contact area where the substrate (102 in Fig. 3) and the guide rotation roller 144 is in contact, thereby the guide rotation roller 144 by the existing substrate (102 in Fig. 3) It is possible to prevent the occurrence of scratches in the form of dots or lines on the image, and to prevent the damage of the substrate (102 of FIG. 3) due to the scratches.

This also solves the problem that caused waste of cost by replacing the existing guide roller 140 to solve the above problems.

In addition, the reliability of transporting the substrate 102 (in FIG. 3) can be greatly improved.

The present invention is not limited to the above embodiments, and various modifications can be made without departing from the spirit of the present invention.

As described above, by rotating the guide rotation roller of the guide roller provided to prevent the separation of the substrate on one side edge of the track configured to have an inclined surface in accordance with the present invention while lifting freely up and down, the substrate and the guide rotation By forming a large contact area in contact with the roller, there is an effect of preventing the occurrence of spot or line scratches on the guide rotation roller by the existing substrate, and also to prevent damage to the substrate due to the scratch It is effective.

Therefore, the reliability of substrate transfer is greatly improved.

This has the effect of solving the problem that caused the waste of costs by replacing the existing guide roller, there is an effect that can greatly improve the reliability for substrate transfer.

Claims (8)

It is provided with the bottom surface and both sides, and the substrate processing space defined therein; A plurality of shaft shafts arranged side by side in the substrate processing space, each of which has a plurality of rotating rollers; Guide rollers are configured on one side of the shaft shaft, and configured between adjacent shaft shafts. Includes, The guide roller is a substrate transport track for a wet process, characterized in that while rotating in one direction by the friction with the substrate, and moving up and down. The method of claim 1, The guide roller is a guide shaft, the substrate transport track for a wet process, characterized in that consisting of a guide rotating roller rotatably mounted around the guide shaft. The method of claim 2, The guide shaft has a protruding end of a predetermined shape, and the guide groove is formed on the inner surface of the guide rotating roller, the substrate transfer track for a wet process. The method of claim 3, wherein The guide groove is a substrate transfer track for a wet process, characterized in that the one end and the other end is formed along the inner surface of the guide rotating roller in a spiral form (helical) meet each other. The method of claim 3, wherein The protruding end is inserted into the guide groove in a fixed state, and the guide rotation roller is a substrate transfer track for a wet process, characterized in that the lifting movement up and down through the guide groove. The method of claim 1, The shaft shaft end is a substrate transfer track for a wet process, characterized in that a drive means such as a motor is connected. The method of claim 2, The guide shaft is configured with a guide groove, and the guide rotating track is a substrate transfer track for a wet process, characterized in that the projecting end of a predetermined shape is configured. The method of claim 7, wherein The guide groove is a substrate transport track for a wet process, characterized in that the guide shaft is composed of a spiral (end) and the other end meet each other.

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