KR20120025360A - Track for conveying substrate - Google Patents

Abstract

PURPOSE: A track for conveying a substrate is provided to use a guide rotating roller over a wide area by controlling the height of the guide rotating roller of a guide roller. CONSTITUTION: A track for conveying a substrate comprises a plurality of shaft axes and a guide roller(200). A plurality of rotation rollers are mounted on the shaft axis. The guide roller is arranged between the shaft axes and comprises a guide axis(210), a guide rotating roller(220), a pipe(230), and a height adjusting unit(240). The guide axis has a plurality of guide holes(211). The guide rotating roller is mounted on the guide axis. The pipe has a through hole(231). The height adjusting unit controls the height of the guide axis through the through hole and the guide hole.

Description

Track for conveying substrate

The present invention relates to a substrate transport track, and more particularly to a guide roller for guiding a substrate moved by the substrate transport track.

In line with the recent information age, the display field for displaying a large amount of data by various electrical signals in a visual image has also been rapidly developed. In response, a flat panel display device having advantages of light weight, thinness, and low power consumption has been developed. As a display device (FPD), a liquid crystal display device (LCD), a plasma display device (PDP), a field emission display device (FED), an electroluminescence display device (Electro) luminescence display device (ELD) has been introduced to quickly replace the existing cathode ray tube (CRT).

Here, the liquid crystal display device has a flat display panel in which a pair of transparent substrates are bonded to each other with a unique fluorescent or polarizing layer therebetween as an essential component. Such a panel forms a thin film of a predetermined material. The deposition process, the photolithography process, and the etching process are repeated several times. In addition, various different processes such as cleaning, bonding, and cutting are involved.

On the other hand, the manufacturing process of the liquid crystal display device consisting of a number of such unit processes are generally performed in a clean room, and a plurality of substrates completed by a specific process equipment inside the clean room is a transport board for transporting the substrate is a logistics transport system May be stored in a clean room or transferred to other process equipment.

1 is a perspective view schematically showing a general substrate transfer track.

As shown, the substrate transport track 10 arranges a plurality of rotatable shaft shafts 11 in parallel with each other, and each shaft shaft 11 has a plurality of rotating rollers 12 having an annular shape. It is mounted around to maintain a constant interval.

A driving means such as a motor (not shown) is connected to both ends of each shaft shaft 11 to exert rotational force, and a timing belt or the like is installed as necessary to share the rotational force with neighboring shaft shafts 11.

Therefore, the substrate 2, which is the object to be processed, is mounted on the rotary rollers 12 mounted on the respective shaft shafts 11, and is moved in a sliding manner by the rotation of the shaft shafts 11 and the rotary rollers 12. As shown in FIG.

In this case, guide rollers 20 are provided at both edges of the substrate transport track 10 to prevent separation of the substrate 2 in order to prevent the substrate 2 from being separated during the transfer of the substrate 2. .

The guide roller 20 is formed between the shaft shafts 11 while maintaining a constant interval in the direction in which the substrate 2 is transferred, and the guide rollers 20 are formed on the guide shaft 21 and the guide shaft 21. It is mounted around and consists of a rotatable cylindrical guide rotating roller 23.

Accordingly, the substrate 2 is supported by the guide roller 20 and is slidably moved without being separated from the track 10 for transporting the substrate. Such a guide roller 20 moves the substrate 2 without a separate rotational force. It is rotated by the frictional force in the process.

However, spots or linear scratches appear on the guide rotating roller 23 which is directly rubbed with the substrate 2. In particular, the scratches of the guide rotating roller 23 are prominent at a certain point, and the plurality of substrates 2 ) Is seated on the substrate transport track 10 in an inline manner and slidably moved, whereby the scratches of the guide rotating roller 23 are seated on the substrate transport track 10 and slid. The worse it gets.

In addition, scratches of the damaged guide rotation roller 23 due to repeated friction with the substrate 2 cause interference with the substrate 2, which causes the breakage of the substrate 2, in which case the guide rotation roller is present. (23) In a situation where it is difficult to replace separately, the entire guide roller 20 must be replaced, resulting in waste of resources as well as resources.

In addition, the process inconvenience caused by the replacement of the guide roller 20, and causes a problem of increased process time.

In particular, when friction occurs between the guide rotating roller 23 and the substrate 2, the substrate 2 is impacted by the guide rotating roller 23, which causes breakage of the substrate 2. Problems will arise.

The present invention is to solve the above problems, and to provide a guide roller that can minimize the damage to the substrate while supporting the substrate stably.

In addition, the second object is to provide a guide roller that can reduce the process cost in the replacement due to wear, and shorten the process time, through which a substrate that can greatly improve the reliability of substrate transfer It is a third object to provide a transport track.

In order to achieve the object as described above, the present invention is arranged side by side, each of the plurality of shaft shaft is equipped with a plurality of rotary rollers; Comprising between the shaft shafts adjacent to each other, the guide shaft with a plurality of guide holes formed in the longitudinal direction at intervals of a certain interval, and a guide rotating roller mounted around the guide shaft, and the guide shaft is inserted It provides a substrate transport track comprising a pipe formed with a through hole and a guide roller including a height adjusting means for adjusting the height of the guide shaft through the through hole and the guide hole.

At this time, the guide rotating roller is composed of an inner ring connected to the guide shaft, an outer ring formed on the outer circumferential surface of the inner ring, and a bearing interposed between the inner ring and the outer ring, and the outer ring of the outer ring and the substrate An abutting cap is formed, and a silicon rubber is interposed between the outer ring and the cap, and the cap is detachable from the guide rotating roller.

The guide shaft moves up and down along the longitudinal direction of the pipe, and a groove into which one end of the height adjusting means is inserted is formed on an inner surface of the pipe corresponding to the through hole.

In addition, the inlet of the through-hole in which the height adjusting means is inserted, the locking portion is configured, the height adjusting means is a pin shape having a head, the spring is fitted to the outer peripheral surface of the pin.

And, when the spring is applied by the external force to the height adjusting means and pulled out of the pipe, the spring is compressed by the locking portion, when the external force applied to the height adjusting means is removed by the elastic force of the spring Passing through the guide hole, the pipe is provided with a stop bolt, one end of the stop bolt exerts an external force on the guide shaft inserted into the pipe through the stop bolt hole provided in the pipe.

At this time, the area where the guide rotating roller and the substrate are in contact with each other is changed by the height of the guide shaft.

In addition, the present invention is arranged side by side, and each of the plurality of shaft shaft is equipped with a plurality of rotary rollers; Comprising between the shaft shafts adjacent to each other, the guide shaft formed in the longitudinal direction at a predetermined interval and mounted around the guide shaft, including a guide roller including a guide rotating roller mounted around the guide shaft The guide rotating roller provides a substrate transfer track including a cap having a top or a bottom in contact with a substrate by detachment.

At this time, the guide rotation roller is composed of an inner ring connected to the guide shaft, an outer ring formed on the outer circumferential surface of the inner ring, and a bearing interposed between the inner ring and the outer ring, the outer ring is integrated with the substrate on the outside And a cap contacting with the cap, wherein a silicon rubber is interposed between the outer ring and the cap, and a region where the cap contacts the cap through a fastening portion of the cap and the outer ring is changed.

In addition, a first protruding jaw is formed on an inner circumferential surface of the cap at an upper side in the longitudinal direction of the cap, and a second protruding jaw is formed at a lower side of the cap in a longitudinal direction, and a longitudinal direction of an outer circumferential surface of the outer ring is provided. A locking groove is formed in the lower side of the first projection jaw or the second projection jaw is inserted, when the first projection jaw of the cap is inserted into the locking groove of the outer ring, the area A of the cap Is located at the upper side, and when the second protruding jaw is inserted into the engaging groove of the outer ring, the region A of the cap is located at the lower side.

In addition, the inner peripheral surface of the cap has a first coupling groove is formed in the upper side of the longitudinal direction of the cap, the second coupling groove is formed in the lower side of the longitudinal direction of the cap, the longitudinal direction of the outer peripheral surface of the outer ring On the lower side of the protrusion is inserted into the first coupling groove or the second coupling groove is formed.

As described above, as described above according to the present invention, by adjusting the height of the guide roller of the guide roller, the guide roller can be used over a large area, it is possible to reduce the replacement cycle of the guide roller It works.

Through this, it is possible to reduce the waste of cost, thereby improving the efficiency of the process according to the guide roller replacement.

In addition, the silicon rubber is further provided between the cap and the rotating part of the guide rotating roller, thereby absorbing the shock generated by the collision between the guide rotating roller and the substrate, it is possible to prevent the shock is transmitted to the substrate.

In addition, it is possible to change the position of the cap of the guide rotating roller in contact with the substrate, there is an effect that can reduce the replacement cycle of the guide roller.

Through this, it is possible to reduce the waste of cost, thereby improving the efficiency of the process according to the guide roller replacement.

1 is a perspective view schematically showing a track for transferring a general substrate.
2 and 3 are perspective views schematically showing a part of the substrate transport track according to the embodiment of the present invention.
Figure 4a is a perspective view schematically showing a guide roller according to an embodiment of the present invention.
Figure 4b is an exploded perspective view schematically showing the guide rotating roller of Figure 4a.
4C is a schematic cross-sectional view of the assembled guide roller of FIGS. 4A and 4B.
5a to 5d are cross-sectional views schematically showing the height adjustment of the guide roller according to an embodiment of the present invention.

Hereinafter, embodiments according to the present invention will be described in detail with reference to the drawings.

- First Embodiment -

2 and 3 are perspective views schematically showing a part of the substrate transport track according to the first embodiment of the present invention.

As shown in FIG. 2, a plurality of rotatable shaft shafts 112 are arranged side by side in parallel with each other, and each shaft shaft 112 has a plurality of rotating rollers 114 having an annular shape to maintain a predetermined interval. It is mounted around.

At this time, driving means such as a motor (not shown) are connected to both ends of each shaft shaft 112 to exert a rotational force, and a timing belt or the like is installed as necessary to share the rotational force with a neighboring shaft shaft 112. do.

Therefore, the substrate 102 to be processed is mounted on the rotary rollers 114 mounted on the respective shaft shafts 112 and is moved in a sliding manner by the rotation of the shaft shafts 112 and the rotary rollers 114.

In this case, guide rollers 200 are provided at both edges of the substrate transport track 100 to prevent the substrate 102 from being separated in order to prevent the substrate 102 from being separated in the process of transferring the substrate 102. .

As shown in FIG. 3, the guide roller 200 is positioned between the shaft shafts 112 that are adjacent to each other, and are spaced apart at regular intervals in the direction in which the substrate 102 is conveyed, and when the substrate 102 is moved. The substrate 102 is positioned to be spaced apart from the substrate 102 so as to pass by.

At this time, the guide roller 200 of the present invention is made of a guide shaft 210 and the guide rotation roller 220, the guide shaft 210 is inserted into the pipe 230, the height of the guide rotation roller 220 Characterized in that can be adjusted.

Through this, it is possible to increase the replacement cycle of the guide rotation roller 220, can reduce the process cost by the guide roller 200, through which process inconvenience caused by the replacement of the guide roller 200 Can be prevented. The problem of an increase in processing time due to replacement can also be prevented.

This will be described in more detail with reference to FIGS. 4A to 4C below.

Figure 4a is a perspective view schematically showing a guide roller according to a first embodiment of the present invention, Figure 4b is an exploded perspective view schematically showing the guide rotating roller of Figure 4a.

4C is a cross-sectional view schematically illustrating a cross section of the combined guide roller of FIGS. 4A and 4B.

As shown in the drawing, the guide roller 200 includes a pipe 230, a guide shaft 210 inserted into the pipe 230, a guide shaft 210 mounted around the guide shaft 210, and a rotatable cylindrical guide rotating roller 220. do.

At this time, the guide rotating roller 220 mounted around the guide shaft 210 is free to rotate.

In particular, the guide rotary roller 220 of the present invention further includes a silicon rubber 225, thereby preventing the impact of the substrate (102 in Figure 3). This will be described in more detail with reference to FIGS. 4B to 4C, as shown in FIGS. 4B to 4C, the guide rotating roller 220 includes the rotating part 221 and the rotating part 221 connected to the guide shaft 210. The cap 223 is formed on the outer circumferential surface and directly contacts the substrate 102 (FIG. 3).

Here, the rotating part 221 is composed of a cylindrical inner ring 221a having a hole formed in the center and an outer ring 221b formed on the outer circumferential surface of the inner ring 221a, wherein the guide shaft 210 is formed in the through hole of the inner ring 221a. Is inserted.

A bearing 221c is interposed between the inner ring 221a and the outer ring 221b.

The outer ring 221b and the inner ring 221a are rotated independently of each other by the bearing 221c without being interfered with each other.

By the rotation of the inner ring 221a and the outer ring 221b, the guide rotating roller 220 is rotated based on the guide shaft 210.

In this case, lubricating oil (not shown) may be injected to prevent wear and thermal deformation due to friction between the inner ring 221a and the outer ring 221b.

Here, the bearing 221c between the outer ring 221b and the inner ring 221a is made of a ceramic material having a ball shape, and the substrate to which the guide rotating roller 220 is transferred by the bearing 221c (102 in FIG. 3). In the process of guiding the shock generated by the collision between the guide rotation roller 220 and the substrate (102 of FIG. 3) is transmitted to the substrate (102 of FIG. 3) as it is.

As a result, breakage of the substrate (102 in FIG. 3) may occur, and the present invention further includes a silicon rubber 225 between the cap 223 and the outer ring 221b that directly contact the substrate (102 in FIG. 3). This prevents damage to the substrate (102 in FIG. 3).

That is, the silicon rubber 225 absorbs the shock generated by the collision between the guide rotating roller 220 and the substrate (102 of FIG. 3), thereby preventing the impact from being transmitted to the substrate (102 of FIG. 3). do.

Therefore, it is possible to prevent the breakage of the substrate (102 in FIG. 3) by the guide rotating roller 220.

On the other hand, the guide rotation roller 220 may cause the shaking of the cap 223 due to the collision with the substrate (102 in Figure 3), through which the cap 223 can be easily separated from the rotating part 221. In order to solve this problem, it is preferable to prevent the detachment of the cap 223 using the snap ring 227. Accordingly, the cap 223 can be easily detached from the rotating part 221 by the mounting of the snap ring 227. Do. Through this, only the cap 223 can be removed and replaced, thereby reducing the maintenance cost of the guide roller 200.

That is, the cap 223 of the guide rotating roller 220 is made of a synthetic resin material such as polyether ether ketone (PEEK), as described above, since the cap is made of a synthetic resin material, the guide rotating roller 220 is a substrate ( It may be worn by contact with the substrate (102 in FIG. 3) when supporting the side of 102 in FIG.

In this case, the guide rotation roller 220 should be replaced periodically, the guide rotation roller 220 of the present invention is to replace only the cap 223 can be replaced.

In addition, in the conventional situation, it is difficult to replace only the guide rotating roller 220 separately, and thus, the entire guide roller 200 needs to be replaced, so that the present invention which can separate and replace only the cap 223 of the guide rotating roller 220 is Compared to the conventional one, it can effectively reduce the waste of resources as well as resources.

Thus, the efficiency of the process is improved.

In particular, the guide roller 200 of the present invention can adjust the height of the guide rotation roller 220, it is possible to use the guide rotation roller 220 over a larger area.

That is, the guide roller 200 of the present invention, the guide shaft 210 is formed in the shape of a cylinder (cylinder) together with the pipe 230, the guide shaft 210 vertically up and down along the longitudinal direction of the pipe 230 It is characterized by lifting and lifting.

Here, after adjusting the height of the guide shaft 210, a plurality of guide holes 211 is formed in the guide shaft 210 to fix the height of the adjusted guide shaft 210, the guide shaft 210 The height is fixed through the height adjusting means 240 penetrating the guide hole 211.

In more detail, a through hole 231 is formed at one side of the pipe 230, and a groove 233 is formed at the other inner surface of the pipe 230 corresponding to the through hole 231.

In addition, the guide shaft 210 inserted into the pipe 230 has a plurality of guide holes 211 penetrating the guide shaft 210 along the longitudinal direction of the guide shaft 210.

Thus, in the state in which the guide shaft 210 is inserted into the pipe 230, the guide hole 211 of the guide shaft 210 through the through hole 231 from the outside of the height adjusting means 240. By passing through, the end of the height adjusting means 240 is inserted into the groove 233 of the pipe 230, it is possible to fix the height of the guide shaft 210 in the pipe 230.

Here, the height of the guide shaft 210 may be adjusted by the number and spacing of the guide holes 211 formed in the guide shaft 210. We will discuss this in more detail later.

On the other hand, the height adjusting means 240 is made of a pin shape provided with a head, the outer circumferential surface of the pin is provided with a spring 250 for providing an elastic force, the height adjusting means 240 by the elastic force of the spring 250 The height adjustment means 240 can be easily inserted through the guide hole 211 of the guide shaft 210 without applying a separate pressure.

At this time, the engaging portion 236 is formed inside the through hole 231 of the pipe 230, and selectively provides elastic force to the spring 250 that is fitted to the outer circumferential surface of the pin of the height adjusting means 240.

That is, in order to adjust the height of the guide shaft 210, when the user pulls by applying an external force to the height adjusting means 240, the height adjusting means 240 is advanced to the outside of the pipe 230 and at the same time the spring 250 It is compressed by the locking portion 236 of the through hole 231.

After adjusting the guide shaft 210 in this state to the desired height and then match the guide hole 211 of the guide shaft 210 and the through hole 231 of the pipe 230 in a horizontal state, the height adjusting means ( When the external force applied to the 240 is removed, the height adjusting means 240, which is provided with the elastic force from the spring 250, retreats to the groove 233 side of the pipe 230 and passes through the guide hole 211 of the guide shaft 210. One end of the height adjusting means 240 is inserted into the groove 233 of the pipe 230.

Through this, the guide shaft 210 is fixed so as not to be raised and lowered by the height adjusting means 240.

At this time, one side of the pipe 230, in order to more stably support the fluidity of the guide shaft 210, it is preferable to have a stop bolt 260.

The stop bolt 260 is inserted into the stop bolt hole 235 formed in the pipe 230, and when the guide shaft 210 is adjusted to an appropriate height, one side of the guide shaft 210 does not have any fluidity at that position. Will be fixed.

At this time, the stop bolt 260 may be largely divided into a head portion and an annular shaft projecting toward the front thereof, the head is formed to have a butterfly shape so that the user can easily tighten or loosen, at least along the outer surface of the shaft One or more helical grooves are dug to form threads.

In addition, along the inner surface of the stop bolt hole 235, a screw groove is formed to engage with a thread formed on the outer surface of the shaft of the stop bolt 260.

Accordingly, the stop bolt 260 is inserted from the end of the shaft into the inside of the pipe 230 through the stop screw hole 235 from the outside of the pipe 230, so that the shaft exerts an external force on the guide shaft 210. .

Thus, the guide shaft 210 fixed in height is more stably supported by the stop bolt 260.

In this way, by adjusting the height of the guide shaft 210, the guide rotary roller 220 mounted around the guide shaft 210 can be used over a large area.

That is, the present invention guides the guide shaft 210 even if a scratch is generated at a specific point of the guide rotating roller 220 in the process of guiding the substrate (102 in FIG. 3) moving through the substrate transfer track (100 in FIG. 2). By adjusting the height of the guide rotation roller 220 that is not generated scratches can be guided to the substrate (102 of FIG. 3).

Thus, when a scratch is generated at a specific point of the guide rotating roller 220 in the process of transferring the substrate (102 in Figure 3), the present invention compared to the guide roller 200 had to replace the entire guide roller 200 Can reduce the replacement cycle.

Therefore, it is possible to reduce the waste of the cost, thereby improving the efficiency of the process according to the guide roller 200 replacement.

In particular, since only the cap 223 directly contacting the substrate (102 of FIG. 3) of the guide rotating roller 220 can be separated and replaced separately, the above effects can be further maximized.

5a to 5d are cross-sectional views schematically showing the height adjustment of the guide roller according to the first embodiment of the present invention.

As shown, the height of the guide rotation roller 220 in the first to fourth steps can be adjusted through the guide holes (211a, 211b, 211c, 211d) formed in the guide shaft 210.

That is, as shown in Figure 5a, by applying an external force to the height adjusting means 240 to remove the height adjusting means 240 to the outside of the pipe 230, the first guide hole (211a) of the guide shaft 210 After matching the through-hole 231 of the pipe 230 in a horizontal state, the external force applied to the height adjusting means 240 is removed so that the height adjusting means 240 is the first guide hole 211a of the guide shaft 210. One end of the height adjusting means 240 is inserted into the inner groove 233 of the pipe 230, thereby adjusting the guide rotating roller 220 to the height of the first step.

Thereafter, the stop bolt 260 is tightened to support the guide shaft 210.

At this time, the height adjusting means 240 easily penetrates through the first guide hole 211a without applying a separate pressure by the spring 250.

Therefore, in the guide roller 200 having the height adjusted in the first step, the first region A of the guide rotating roller 220 is in contact with the substrate 102 in the process of guiding the substrate 102.

Thereafter, when a point or line flaw is generated in the first area A of the guide rotating roller 220, as shown in FIG. 5B, the height adjusting means 240 is the second of the guide shaft 210. The guide rotating roller 220 is adjusted to the height of the second step by passing through the guide hole 211b.

At this time, the substrate 102 is in contact with the second region B of the guide rotating roller 220.

If a scratch occurs in the second region B of the guide rotating roller 220, as shown in FIGS. 5C to 5D, the guide rotating roller 220 is formed in the third and fourth guide holes 211c and 211d. By adjusting the height in the third and fourth steps through, the substrate 102 is in contact with the third region (C), the fourth region (D) of the guide rotary roller 220.

As described above, since the guide roller 200 of the present invention can adjust the height of the guide rotary roller 220, since the guide rotary roller 220 can be used over a larger area, the replacement of the guide roller 200 The cycle can be reduced.

Therefore, it is possible to reduce the waste of the cost, thereby improving the efficiency of the process according to the guide roller 200 replacement.

In addition, by further providing a silicon rubber 225 between the cap 223 and the rotating portion 221 of the guide rotating roller 220, the impact generated by the collision between the guide rotating roller 220 and the substrate 102 is reduced. By absorbing, the shock is prevented from being transmitted to the substrate 102.

In addition, only the cap 223 of the guide rotating roller 220 can be removed and replaced, thereby maximizing the above effects.

- Second Embodiment -

Figure 6a is an exploded perspective view schematically showing a guide rotary roller according to a second embodiment of the present invention, Figure 6b is a cross-sectional view schematically showing a cross section of the combined guide rotary roller of Figure 6a.

As shown, the guide rotary roller 320 is formed on the outer peripheral surface of the rotating part 321 and the rotating part 321 connected to the guide shaft 210 as a cap 323 directly in contact with the substrate (102 in Figure 3) Is done.

Here, the rotating part 321 is composed of a cylindrical inner ring 321a having a hole formed in the center and an outer ring 321b formed on the outer circumferential surface of the inner ring 321a, wherein the guide shaft 210 is formed in the through hole of the inner ring 321a. Is inserted.

A bearing 321c is interposed between the inner ring 321a and the outer ring 321b, and the outer ring 321b and the inner ring 321a are rotated independently of each other without being interfered with each other by the bearing 321c. .

By the rotation of the inner ring 321a and the outer ring 321b, the guide rotating roller 320 is rotated based on the guide shaft 210. In this case, lubricating oil (not shown) may be injected to prevent wear and thermal deformation due to friction between the inner ring 321a and the outer ring 321b.

Here, the bearing 321c between the outer ring 321b and the inner ring 321a is made of a ceramic material having a ball shape, and the substrate to which the guide rotating roller 320 is transferred by the bearing 321c (102 in FIG. 3). In the process of guiding the shock generated by the collision between the guide rotation roller 320 and the substrate (102 of FIG. 3) is transferred to the substrate (102 of FIG. 3) as it is.

As a result, breakage of the substrate (102 in FIG. 3) may occur, and the present invention further includes a silicon rubber 325 between the cap 323 and the outer ring 321b that directly contact the substrate (102 in FIG. 3). This prevents damage to the substrate (102 in FIG. 3).

That is, the silicon rubber 325 absorbs the shock generated by the collision between the guide rotation roller 320 and the substrate (102 of FIG. 3), thereby preventing the impact from being transmitted to the substrate (102 of FIG. 3). do.

Therefore, it is possible to prevent the breakage of the substrate (102 in FIG. 3) by the guide rotating roller 320.

On the other hand, the guide rotation roller 320 may be shaken of the cap 323 by the collision with the substrate (102 in Figure 3), through which the cap 323 can be easily separated from the rotating part 321. Therefore, in order to solve this problem, the cap 323 and the rotating part 321 may be provided with fastening parts 327a, 327b, 329a, 329b, 329c, and 329d for assembling and fastening each other.

In this case, the fastening parts 327a, 327b, 329a, 329b, 329c, and 329d according to the second embodiment of the present invention may include the first and second protruding jaws 329a and 329b and the first and second protrusions formed in the cap 323. The first and second locking grooves 327b and the cap 323, into which the first and second protruding jaws 329a and 329b of the cap 323 are inserted and inserted into the second coupling grooves 329c and 329d and the outer ring 321b. The protrusion 327a is inserted into the second coupling grooves 329c and 329d.

In more detail, on the inner circumferential surface of the cap 323 facing the outer ring 321b, the first and second protruding jaws 329a and 329b and the first and second are respectively located on the upper and lower sides along the longitudinal direction of the cap 323. Coupling grooves 329c and 329d are formed.

That is, the first projection jaw 329a and the first coupling groove 329c are formed on the upper side of the inner peripheral surface of the cap 323, and the second projection jaw 329b and the second coupling groove are formed on the lower side of the inner peripheral surface of the cap 323. 329d is formed.

Then, the lower side of the outer peripheral surface of the outer ring 321b in the longitudinal direction of the protrusion 327a and the cap 323 inserted into one of the first and second coupling grooves 329c and 329d formed on the inner circumferential surface of the cap 323. A locking groove 327b into which one of the first and second protruding jaws 329a and 329b formed on the inner circumferential surface is inserted is formed.

That is, the outer ring 321b and the cap 323 of the rotating part 321 may have the first and second protruding jaws of the cap 323 in the protrusion 327a and the locking groove 327b formed at the lower side of the outer ring 321b. By inserting one of the 329a and 329b and one of the first and the second coupling grooves 329c and 329d, respectively, it is assembled and fastened to each other.

Through this, the cap 323 is not easily separated from the rotating part 321 even if shaking occurs due to the collision between the guide rotating roller 320 and the substrate (102 of FIG. 3).

In particular, the guide rotary roller 320 according to the second embodiment of the present invention is the first and second protruding jaw (329a, 329b) and the first and second for fastening with the rotating part 321 in the upper and lower portions of the cap 323 By forming two coupling grooves 329c and 329d, the period of use of the guide rotating roller 320 can be increased.

That is, the cap 323 of the guide rotary roller 320 is made of a synthetic resin material such as polyether ether ketone (PEEK), as described above, because the cap 323 is made of a synthetic resin material, the track for transporting the substrate (Fig. In the process of guiding the substrate (102 of FIG. 3) moving through 100 of 2, the cap 323 of the guide rotating roller 320 supports the side surface of the substrate (102 of FIG. 3). May be worn by contact with 102).

In this case, the guide rotation roller 320 should be replaced periodically, the guide rotation roller 320 of the present invention can change the position of the cap 323 in contact with the substrate (102 in FIG. 3), the cap 323 ) Can increase the frequency of use.

That is, the first protruding jaw 329a and the first coupling groove 329c of the cap 323 of the guide rotating roller 320 and the protrusion 327a and the locking groove 327b of the outer ring 321b are assembled or fastened. Alternatively, the substrate (102 of FIG. 3) is formed by assembling and engaging the second protruding jaw 329b and the second coupling groove 329d of the cap 323 with the protrusion 327a and the locking groove 327b of the outer ring 321b. ) And the position where the cap 323 is in contact.

Therefore, the guide rotary roller 320 according to the second embodiment of the present invention can be used over a larger area, it is possible to reduce the replacement cycle of the guide roller 200.

7A to 7B, the protrusion 327a of the first protruding jaw 329a and the first coupling groove 329c and the outer ring 321b of the cap 323 is illustrated in FIG. 7A. And the locking groove 327b is assembled and fastened to guide the substrate (102 of FIG. 3) when the cap 323 is assembled and fastened to the rotating part 321 so that the S region of the cap 323 faces upward. In the process, the first region A ′ of the cap 323 is in contact with the substrate 102 of FIG. 3.

Subsequently, when a point or line flaw occurs in the first area A 'of the cap 323, as shown in FIG. 7B, the second protruding jaw 329b and the second coupling of the cap 323 are formed. By assembling and engaging the protrusion 327a and the locking groove 327b of the groove 329d with the outer ring 321b, the cap 323 is assembled with the rotary part 321 so that the S region of the cap 323 faces downward. do.

Therefore, in the process of guiding the substrate 102 of FIG. 3, the substrate 102 102 is in contact with the second region B ′ of the cap 323.

As described above, the guide roller 200 of the present invention can guide the substrate (102 of FIG. 3) by changing the position of the cap 323 in contact with the substrate (102 of FIG. 3). 320 can be used over a larger area, it is possible to reduce the replacement cycle of the guide roller 200.

Therefore, it is possible to reduce the waste of the cost, thereby improving the efficiency of the process according to the guide roller 200 replacement.

And, since the guide rotating roller 320 according to the second embodiment of the present invention can easily separate the cap 323 and the rotating part 321, it is possible to separate and replace only the worn cap 323, the guide Maintenance cost of the roller 200 can be reduced, thereby further maximizing the above effects. The invention is not limited to the above embodiments, and various modifications can be made without departing from the spirit of the invention.

200: guide roller, 210: guide shaft, 211: guide hole
220: guide rotating roller, 221: rotating part (221a: inner ring, 221b: outer ring, 221c: bearing)
223: cap, 225: silicon rubber
227 snap ring
230: pipe, 231: through hole, 233: groove, 235: stop bolt hole, 236: locking portion
240: height adjustment means, 250: spring, 260: stop bolt

Claims (16)

A plurality of shaft shafts arranged side by side and equipped with a plurality of rotary rollers, respectively;
Comprising between the shaft shafts adjacent to each other, the guide shaft with a plurality of guide holes formed in the longitudinal direction at intervals of a certain interval, and a guide rotating roller mounted around the guide shaft, and the guide shaft is inserted A guide roller including a height adjusting means for adjusting a height of the guide shaft through a pipe having a through hole and the through hole and the guide hole;
Substrate transfer track comprising a.
The method of claim 1,
The guide rotating roller is composed of an inner ring connected to the guide shaft, an outer ring formed on an outer circumferential surface of the inner ring, and a bearing interposed between the inner ring and the outer ring, and an outer cap of the outer ring which contacts the substrate. And a silicon rubber is interposed between the outer ring and the cap.
The method of claim 2,
The cap is a substrate transfer track detachable from the guide rotation roller.
The method of claim 1,
And the guide shaft moves up and down along the longitudinal direction of the pipe.
The method of claim 1,
And a groove into which one end of the height adjusting means is inserted in an inner surface of the pipe corresponding to the through hole.
The method of claim 1,
The substrate transfer track is configured with a locking portion at the inlet of the through hole into which the height adjustment means is inserted.
The method according to claim 6,
The height adjustment means is a pin-shaped with a head, the substrate transfer tracks are fitted with a spring on the outer peripheral surface of the pin.
The method of claim 7, wherein
The spring is squeezed by the locking part when the spring is pulled out of the pipe by applying external force to the height adjusting means, and when the external force applied to the height adjusting means is removed, the height adjusting means is guided by the elastic force of the spring. Track for transporting substrate through holes.
The method of claim 1,
The pipe is provided with a stop bolt, one end of the stop bolt is a substrate transfer track for applying an external force to the guide shaft inserted into the pipe through the stop bolt hole provided in the pipe.
The method of claim 1,
And a region for transferring the guide roller and the substrate in contact with each other by the height of the guide shaft.
A plurality of shaft shafts arranged side by side and equipped with a plurality of rotary rollers, respectively;
Guide rollers are formed between the adjacent shaft shafts, the guide shaft is formed around the guide shaft and the guide shaft formed in the longitudinal direction at intervals of a predetermined interval, and including a guide rotating roller mounted around the guide shaft.
And a guide rotating roller including a cap on which the upper or lower part is in contact with the substrate by detachment.
The method of claim 11,
The guide rotating roller is composed of an inner ring connected to the guide shaft, an outer ring formed on an outer circumferential surface of the inner ring, and a bearing interposed between the inner ring and the outer ring, and the outer ring is in contact with the substrate on the outside. And a cap, wherein a silicon rubber is interposed between the outer ring and the cap.
The method of claim 12,
The substrate transfer track, the area where the substrate and the cap is in contact with each other through the fastening portion of the cap and the outer ring.
The method of claim 12,
A first protruding jaw is formed on an inner circumferential surface of the cap in the upper side in the longitudinal direction of the cap, and a second protruding jaw is formed on a lower side in the longitudinal direction of the cap, and a lower portion in the longitudinal direction of the outer circumferential surface of the outer ring The substrate transport track is formed with a locking groove in which the first projection jaw or the second projection jaw is inserted.
The method of claim 13,
When the first protruding jaw of the cap is inserted into the locking groove of the outer ring, the A region of the cap is located on the upper side, and when the second protruding jaw is fitted into the locking groove of the outer ring, A region of the cap is a track for transporting the substrate located on the lower side.
The method of claim 12,
The inner peripheral surface of the cap has a first coupling groove is formed on the upper side in the longitudinal direction of the cap, the second coupling groove is formed on the lower side in the longitudinal direction of the cap, the lower portion in the longitudinal direction of the outer peripheral surface of the outer ring The substrate transfer track formed with a protrusion to be inserted into the first coupling groove or the second coupling groove on the side.

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