KR20080035657A - Work loading/unloading system and conveyance device - Google Patents

Abstract

A work loading/unloading system has a conveyance device for supporting rectangular plate-like work from its lower surface side, in a substantially horizontal position, and conveying the work in a substantially horizontal direction; placement sections formed in multiple stages in the vertical direction, having an opening through which the conveyance device can pass, and on which the work is placed in the substantially horizontal position; a side section in which a loading/unloading opening for the work is formed; a bottom section in which an entrance through which the conveyance device can pass is formed; a receiving cassette placed above the conveyance device; and a lifting means for relatively vertically moving the receiving cassette and the conveyance device. Lifting and lowering operation of the lifting means causes the conveyance device to be advanced into the receiving cassette, and the conveyance device unloads the work on the placement section to the outside of the receiving cassette and loads the work from the outside of the receiving cassette on to the placement section. The conveyance device has conveyance sections arranged two-dimensionally and independently driven of each other. The conveyance sections are selectively driven based on the size of the work and on that position on the placement section which is the source or destination of the conveyance of the work.

Description

Work loading / unloading system and conveyance device

The present invention relates to a system for carrying out or carrying in a processing object such as a glass substrate from a storage cassette.

The object to be processed in a rectangular plate shape, such as a glass substrate used in the manufacture of a thin display, is stored in multiple stages in a storage cassette. At the time of processing the object to be processed, it is extracted one by one from the storage cassette and conveyed to the processing apparatus or the like, and the processed object is again brought into the storage cassette. In such a facility, a carry-in / out system which takes out a process object from a storage cassette and carries it in is needed.

As this kind of carry-in / out system, for example, as disclosed in Japanese Patent Application Laid-Open No. 2002-167038 or Japanese Patent Application Laid-Open No. 2004-155569, a roller conveyor is provided below the storage cassette, and the storage cassette is lifted, It is known to carry out a process object out of a storage cassette with a roller conveyor in order from a lower end side, and to carry in further.

However, in the conventional import and export system, only the workpieces of the same size can be handled, and in order to deal with the workpieces of different sizes, the system-wide modification is required.

An object of the present invention is to provide a loading / unloading system and a conveying apparatus capable of handling a plurality of kinds of processing objects.

According to the present invention, a conveying means for supporting a rectangular plate-shaped object to be processed in a substantially horizontal posture from its lower surface side and conveying the object in a substantially horizontal direction; A plurality of seating portions which are formed in multiple stages in the vertical direction and have openings through which the conveying means can pass, and at which the workpiece is seated in a substantially horizontal posture; A storage cassette provided with a bottom portion forming the passage opening, and provided above the conveying means; And elevating means for elevating the accommodating cassette and the conveying means up and down relatively, entering the conveying means into the accommodating cassette by an elevating operation by the elevating means, and placing the conveying means on the seating portion by the conveying means. A process object loading / unloading system for carrying out the object to be processed into and out of the storage cassette and from the outside of the storage cassette onto the seating portion, wherein a plurality of conveying portions driven independently of the conveying means are planarized. And the plurality of conveying units are selectively driven based on the size of the object to be conveyed and the position on the seating part which is the conveying source or conveying destination of the object to be processed. Is provided.

In the processing object carrying-in / out system of this invention, the said conveying means is comprised planarly provided with the some conveyance part which is driven independently, The said some conveyance part is the size of the said object to convey and the conveyance source of the said process object, or Since it is selectively driven based on the position on the seating portion, which is a conveying destination, it is possible to carry in and out objects of different sizes. Thus, a plurality of kinds of processing objects can be handled. In addition, it is also possible to mount a plurality of small objects to be processed on each seating portion of the storage cassette and to carry them in and out separately, thereby increasing the storage efficiency of the processing object of the storage cassette.

In a preferred embodiment of the present invention, the accommodating cassette has the other side portion facing the side portion forming the carry-on and exit, and the other side also forms the carry-in and out, and the conveying means includes the side portion and the other portion. It is possible to convey the object to be processed through each of the carry-in and out ports of the side portion, wherein the plurality of conveying parts are the size of the object to be conveyed, the position on the seating part which is the conveying source or the destination of the object, and the object to be processed. It is possible to adopt a configuration that is selectively driven based on the inlet and outlet through which the passage. According to this structure, the carry-out of a process object can be carried out from two carry-in ports, respectively, and the efficiency of carrying out of a process object can be improved.

Further, in a preferred embodiment of the present invention, the plurality of conveying portions includes a first conveying portion and a second conveying portion whose width in a direction orthogonal to the conveying direction of the object is approximately half of the width of the first conveying portion. The first conveying unit and the second conveying unit may adopt a configuration in which the two second conveying units are positioned between the two first conveying units in a direction orthogonal to the conveying direction of the workpiece. Can be. According to this structure, the processing object of at least 3 types of size can be handled with respect to the said width | variety.

Further, in a preferred embodiment of the present invention, the elevating means is to elevate the storage cassette up and down, the conveying means is fixedly installed, the accommodating cassette has a rectangular parallelepiped shape, the elevating means is between the storage cassette It is installed in each of the opposite sides of the storage cassette to each other so as to be placed, it can be adopted a configuration consisting of a pair of lifting unit for supporting the storage cassette cantilever. According to this structure, the installation space of the whole system can be made smaller, and the space for carrying in and out of the object to be processed and the conveying means can be secured more widely.

Further, in a preferred embodiment of the present invention, the elevating unit can adopt a configuration provided with detection means for detecting the deviation of the elevating height of each other. According to this structure, the said storage cassette can be prevented from tilting at the time of lifting, and it can raise and lower the said storage cassette more stably.

Further, according to the present invention, there is provided a conveying apparatus for supporting a rectangular plate-shaped object to be processed in a substantially horizontal posture from its lower surface side and conveying the object in a substantially horizontal direction; A plurality of seating portions formed in multiple stages in the vertical direction and having openings through which the conveying apparatus passes, and at which the workpiece is seated in a substantially horizontal posture; A storage cassette having a bottom portion defining an entry opening therethrough, the cassette being installed above the conveying apparatus; And elevating means for elevating the accommodating cassette and the conveying apparatus relatively up and down, and entering the conveying apparatus into the accommodating cassette by an elevating operation by the elevating means, and placing the conveying apparatus on the seating portion by the conveying apparatus. In the conveying apparatus constituting the object to be loaded and unloaded system which carries out the object to be processed into and out of the storage cassette and from the outside of the storage cassette onto the seating portion, a plurality of conveying units driven independently. The plurality of conveying units are selectively installed based on the size of the object to be conveyed and the position on the seating unit which is a conveying source or conveying destination of the object to be provided. do.

BRIEF DESCRIPTION OF THE DRAWINGS It is a top view which shows the layout of the processing object processing facility using the processing object carrying-in / out system A which concerns on one Embodiment of this invention.

2 is an external perspective view of the object loading / unloading system A. FIG.

3 is an external perspective view of the storage cassette 20 and a seating portion for one stage.

4 is a view showing a mounting state of glass substrates of different sizes.

5 is an external perspective view of the elevating device 30.

6 is an exploded perspective view of the elevator 30.

7 is an external perspective view of the transport apparatus 10.

8 is a block diagram showing the configuration of the control unit 40 of the object to be loaded and unloaded system A. FIG.

9 is an explanatory view of the operation of the object to be loaded and unloaded system A. FIG.

10 is an explanatory view of the operation of the object to be loaded and unloaded system A. FIG.

FIG. 11: is a figure which shows the top view of the empty storage cassette 20 and the conveying apparatus 10, and the number which specifies the position seen from the top of each roller conveyor unit 11, 12. As shown in FIG.

12 is an explanatory view of the operation when carrying out the glass substrate W of the largest size.

FIG. 13A is an explanatory view of the operation when the glass substrates W1 and W2 having a size of 1/2 of the glass substrate W are taken out.

FIG. 13B is an operation explanatory diagram when carrying out the glass substrates W1 and W2 having the size of 1/2 of the glass substrate W. FIG.

14A is an explanatory view of the operation when carrying out the glass substrates W1 to W4 having a size of 1/4.

14B is an explanatory view of the operation when carrying out the glass substrates W1 to W4 having a size of 1/4.

14C is an explanatory view of the operation when carrying out the glass substrates W1 to W4 having a size of 1/4.

15A is an explanatory view of the operation when carrying out the glass substrates W1 to W6 having a size of 1/6.

15B is an explanatory view of the operation when the glass substrates W1 to W6 having a size of 1/6 are taken out.

FIG. 16 is a view showing an example in which glass substrates of different sizes are seated on one seating portion.

17A is an explanatory view of the operation when the glass substrates W1 to W3, W4 and W5 having different sizes are taken out.

17B is an operation explanatory diagram when carrying out glass substrates W1 to W3, W4 and W5 having different sizes.

17C is an explanatory view of the operation in the case of carrying out the glass substrates W1 to W3, W4 and W5 having different sizes.

18A is an operation explanatory diagram when carrying out and carrying out a glass substrate simultaneously.

18B is an operation explanatory diagram when carrying out and carrying out a glass substrate simultaneously.

<Overall Configuration of Equipment>

1 is a plan view showing the layout of the object processing apparatus 100 using the object object loading-in / out system A according to the embodiment of the present invention. In each figure, X and Y represent a horizontal direction perpendicular to each other, and Z represents a vertical direction. The object processing apparatus 100 is a facility for processing a rectangular plate-shaped glass substrate as an object to be processed. The object object loading-in / out system A, the processing apparatus B, the belt conveyor C, and the transfer apparatus D ). In the present embodiment, the glass substrates W1 and W2 having different sizes can be handled by the same processing object processing facility 100. Further, the object to be processed is also applicable to objects other than glass substrates.

Two belt conveyors (C) are installed on each side in the X direction of the object loading / unloading system (A). A motor 2 for rotationally driving the drive pulley to which the belt 1 is wound, and a support part 3 rotatably supporting the driven pulley to which the endless belt 1 is wound, and having a + Y direction and a -Y direction. As a result, the upper portion of the endless belt 1 is controlled to reciprocate.

The object to be loaded and unloaded system (A) can carry in and out of a glass substrate in the X direction. In the present embodiment, the glass substrates can be brought in and out between each of the two sets of belt conveyors C, each of which is provided on each side of the X direction, and the glass substrates are brought in both the + X direction and the -X direction. I can ship it. The detail of the processing object carry-in / out system A is mentioned later. In the present embodiment, the processing apparatus B is installed on the -X side of the belt conveyor C, receives the glass substrate conveyed by the belt conveyor C, and performs a predetermined treatment before the belt conveyor C. Pass it. In FIG. 1, although the some processing apparatus B is shown, the process content of each processing apparatus B may be another content, and may be the same content.

The transfer device (D) is installed between the belt conveyor (C) and the processing object loading / unloading system (A) or the processing apparatus (B), respectively, between each endless belt (1) or the endless belt and the processing object loading / unloading system ( A plurality of lifting roller conveyor units 4a and 4b provided between A) and the processing apparatus B are comprised. Each roller conveyor unit 4a, 4b is the same structure as the roller conveyor unit 11, 12 which comprises the conveyance apparatus 10 of the processing object carrying-in / out system A mentioned later, and can control each independently, and a roller It is a unit capable of conveying the glass substrate in the + X direction and the -X direction by the rotation of, and also the unit capable of lifting in the Z direction by a lifting device (not shown). When the glass substrate is moved from the object loading / unloading system (A) or the processing apparatus (B) to the belt conveyor (C), the transfer apparatus (D) is raised to convey the glass substrate in the + X direction or the -X direction, and Then, it descends and seats a glass substrate on the endless belt 1. Thereafter, the belt conveyor C is operated to drive the endless belt 1 to convey the glass substrate. In addition, when the glass substrate is transferred from the belt conveyor (C) to the object loading / unloading system (A) or the processing device (B), the transfer device (D) is raised to lift the glass substrate on the endless belt (1), Thereafter, the glass substrate is conveyed in the + X direction or the -X direction to the object to be loaded in and out of the processing system A or the processing apparatus B.

In the object processing apparatus 10 having such a configuration, the unprocessed glass substrate is conveyed from the processing object loading / unloading system A to the processing apparatus B through the transfer device D and the belt conveyor C. The finished glass substrate is returned from the processing apparatus B to the processing object loading / unloading system A through the transfer apparatus D and the belt conveyor C.

<Configuration of Process Object Import and Export System (A)>

2 is an external perspective view of the object loading / unloading system A. FIG. The object to be loaded in / out of the system A includes a conveying apparatus 10, a storage cassette 20 provided above the conveying apparatus 10, and a lifting device 30.

<Storing cassette>

In FIG. 3, FIG. 3-1 is an external perspective view of the storage cassette 20. FIG. The storage cassette 20 is a cassette capable of storing a glass substrate in multiple stages in the vertical direction (Z direction). 2 and 3-1 show a state in which the glass substrate is not stored. In the present embodiment, the storage cassette 20 is constituted by a plurality of pillar members 21a and 21b and beam members 22a to 22g to form a substantially rectangular parallelepiped frame.

The pillar members 21b are provided in plural in the X direction and spaced apart in the Y direction, and are arranged in the same number, and the plurality of wires 23 at predetermined pitches in the vertical direction (Z direction) between the pillar members 21b in the Y direction. ) Is buried. The wire 23 forms a plurality of stages in which the glass substrate is mounted in a substantially horizontal posture in the vertical direction. 3-2 is a view showing a seating portion for one step. The seating portions at each stage are formed by the wires 23 provided in plural and spaced apart in the X direction at the same height. Between each wire 23 and the outer side of the wire 23 at both ends of X direction, the opening part 23a which the conveying apparatus 10 mentioned later respectively can pass is formed. In the present embodiment, the seating portion is formed of a wire, but other methods can of course be employed. However, by using wires, the distance between the substrates to be stored can be reduced, and the storage efficiency of the storage cassette 200 can be increased.

In Fig. 3, Fig. 3-2 shows an embodiment in which the glass substrate W (shown in broken lines) of the largest size that can accommodate the storage cassette 20 is seated on the wire 23. In this embodiment, A plurality of kinds of glass substrates can be mounted on one stage of mounting portion. 4 is a view showing a mounting state of glass substrates of different sizes. 4-1 shows a state in which the glass substrate W having a size of 1/2 of FIG. 3-2 is seated, and each glass substrate W is seated on two wires 23. FIG. 4-2 shows a state in which the glass substrate W having the size of 1/4 of FIG. 3-2 is seated, and each glass substrate W is seated on two wires 23. 4-3 shows a state in which the glass substrates W of size 1/6 of FIG. 3-2 are seated, and each glass substrate W is seated on two wires 23.

Returning to FIG. 3-1, both side portions of the storage cassette 20 facing each other in the X direction are opened by the beam member 22a and the pillar member 21a in a door shape, respectively, to open the inlet / outlet 24 of the glass substrate. Forming. In the present embodiment, both sides of the storage cassette 20 in the X direction are the inlet and outlets 24, and the glass substrates can be conveyed through the respective inlet and outlet, but only one side can be the inlet and outlet. Do. First of all, since the storage cassette 20 has two carrying in and out ports, it is possible to carry in and out of the glass substrate from each of the carrying in and out ports, and thus the efficiency of carrying in and out of the glass substrate can be improved. Next, the bottom portion of the storage cassette 20 is constituted by a pair of beam members 22d, a plurality of beam members 22b, and one beam member 22f, and a conveying apparatus described later between them. The entry port 25 through which the 10 can pass is formed.

Lifting device

5 is an external perspective view of the elevating device 30, and FIG. 6 is an exploded perspective view of the elevating device 30. The elevating device 30 is a device for elevating the storage cassette 20 and the conveying device 10 up and down relatively. In this embodiment, although the conveying apparatus 10 is fixed and the storage cassette 20 is lifted up and down, the structure which makes the storage cassette 20 fixed and raises and lowers the conveying apparatus 10 can also be employ | adopted.

In the present embodiment, the lifting device 30 is provided on both sides of the storage cassette 20 opposite to each other in the Y direction so as to sandwich the storage cassette 20, and a pair for cantilevering the storage cassette 20. The lifting unit 31 is composed of. According to this structure, the lifting unit 31 can be made thinner, and the installation space of the whole processing object carrying-in / out system A can be made smaller. In addition, it is possible to secure the space of the carrying in and out of the glass substrate and the conveying apparatus 10 more widely.

The lifting unit 31 includes a beam member 311 on which the beam members 22d at the bottom of the storage cassette 20 are seated. Each beam member 311 of each lifting unit 31 moves up and down in the up-down direction (Z direction) so that the storage cassette 20 is lifted. The elevating unit 31 includes a support 312 extending in the vertical direction, and a pair of rail members 313 and a rack 314 extending in the vertical direction are fixed to the inner surface of the support 312. Between each elevating unit 31 is a beam member 32 is installed on the upper end of the support (312).

The beam member 311 is fixedly supported on one side of the support plate 315 through a bracket 315a. Four slide members 316 movable along the rail member 313 are fixed to the other side of the support plate 315, and the beam member 311 and the support plate 315 are moved up and down by the guide of the rail member 313. Move. The drive unit 317 is composed of a motor 317a and a reduction gear 317b, and is fixed to and supported on one side of the support plate 318. The output shaft of the reducer 317b penetrates through the support plate 318 and is connected to the pinion 319a provided on the other side of the support plate 318.

The support plate 315 and the support plate 318 are fixed to each other at predetermined intervals, and pinions 319b to 319d are provided in the gaps between the support plate 315 and the support plate 318. The pinions 319b to 319d are rotatably supported between the support plate 315 and the support plate 318, and the pinion 319b and the pinion 319d follow the rotation of the pinion 419a to rotate. The pinion 319c rotates following the rotation of the pinion 319b. The pinions 319b to 319d are pinions of the same standard, and the two pinions 319c and 319d are engaged with the respective racks 314.

Therefore, when the drive unit 317 is driven, the pinion 319a rotates, and the drive unit 317, the support plates 315 and 318, the slide member 316 and the beam member 311 are integrally formed by the driving force. It moves upward or downward, and can raise and lower the storage cassette 20 seated on the beam member 311. Each lifting unit 31 is provided with a sensor 311a that detects the deviation of the lifting heights of the beam members 311 at each end of the beam member 311.

The sensor 311a is, for example, an optical sensor provided with a light emitting portion and a light receiving portion. As shown in FIG. 5, light is irradiated to each other in the Y direction to determine whether or not it has been received. In the case of receiving light, there is no deviation of the lifting heights of the beam members 311, and in the case of not receiving light, there is a deviation in the lifting height. When the deviation of the lifting height is detected by the sensor 311a, the deviation is controlled by the control of the motor 317a to eliminate the deviation. By providing the sensor 311a and controlling the deviation of the lifting height of the beam member 311, the storage cassette 20 can be prevented from tilting during the lifting and the lifting cassette 20 can be raised and lowered more stably.

The two sensors 311a provided in each beam member 311 may be configured to have either one of the light emitting portion and the light receiving portion, and the other having the other of the light emitting portion and the light receiving portion. In addition, not only an optical sensor but other sensors are also employable.

<Conveyor>

7 is an external perspective view of the transport apparatus 10. In the present embodiment, the conveying apparatus 10 is configured such that a plurality of roller conveyor units 11 and 12 constituting the conveying section driven independently are planarly installed on the X-Y plane. In the present embodiment, a roller conveyor system is employed, but another conveying system, for example, a belt conveyor system, may be used. Each roller conveyor unit 11 and 12 is rotatable between the drive boxes 11a and 12a, the bearing panels 11b and 12b, and the drive boxes 11a and 12a and the bearing panels 11b and 12b, respectively. A plurality of supported rollers 11c and 12c are provided. Each roller 11c, 12c consists of an axial part and a disk part, The axial direction is set to the Y direction orthogonal to the conveyance direction (X direction) of a glass substrate, and is rotated forward and reverse rotation about the axial center of a Y direction. .

The upper surface of the disc portion of each of the rollers 11c and 12c forms a conveying surface for conveying the glass substrate, supports the glass substrate from its lower surface side in a substantially horizontal position, and simultaneously rotates the glass substrate by the rotation thereof. In the embodiment, the process is carried out in the + X direction and -X direction). In the drive boxes 11a and 12a, a motor (not shown) and a power transmission mechanism for transmitting the driving force of the motor to the rollers 11c and 12c are incorporated. Moreover, the sensors 11a 'and 12a' which detect a glass substrate are provided in the X direction both ends of the upper surface of the drive boxes 11a and 12a. The sensors 11a 'and 12a' are, for example, reflective optical sensors, and the rotation of the rollers 11c and 12c is started based on the detection results of the glass substrates by the sensors 11a 'and 12a'. Or stopped.

Each roller conveyor unit 11, 12 is provided by providing the space | gap suitably so that it may not interfere with the storage box 20, respectively, and the storage box 20 is lowered by the lowering of the storage box 20 by the lifting device 30. As shown in FIG. It enters into the storage box 20 from the entrance port 25 of (), and passes through the opening part 23a of each seating part formed by the wire 23, and reaches the seating part of the stage used as a conveyance object.

In addition, the roller conveyor unit 12 has a width in the Y direction orthogonal to the conveying direction (X direction) of the glass substrate being set to approximately half of the width in the Y direction of the roller conveyor unit 11, and the roller conveyor unit ( 11 and the roller conveyor unit 12 are provided so that two roller conveyor units 12 may be located between the two roller conveyor units 11 in the Y direction orthogonal to the conveying direction (X direction) of the glass substrate. . When viewed in the + Y direction, it is an arrangement of the roller conveyor unit 11 ⇒ roller conveyor unit 12 ⇒ roller conveyor unit 12 ⇒ roller conveyor unit 11.

Thereby, as shown in FIGS. 3-2 and 4-1 to 4-3, glass substrates of various sizes having different widths in the Y direction can be conveyed by one conveying apparatus 10, and at least Three kinds of workpieces with width in the Y direction can be handled. That is, when all the roller conveyor units 11 and 12 are driven, the glass substrate of the width | variety of the Y direction shown to FIG. 3-2 or FIG. 4-1 can be conveyed. Next, by dividing into two in the Y direction and independently driven by two combinations of the roller conveyor units 11 and 12, the glass substrates having the width in the Y direction shown in Fig. 4-2 can be conveyed individually.

Moreover, when divided into three in the Y direction and driven independently by the roller conveyor unit 11, the two roller conveyor units 12, and the roller conveyor unit 11, respectively, the width of the Y direction shown in FIG. The glass substrate of can be conveyed individually. In addition, the number of rollers in contact with the glass substrate becomes the same, each glass substrate can be conveyed with an equal conveyance force, and each glass substrate can be conveyed stably.

<Control part>

8 is a block diagram showing the configuration of the control unit 40 of the object to be loaded and unloaded system A. FIG. The control part 40 provides the CPU 41 which is in charge of the control of the whole processing object carrying-in / out system A, the RAM 42 which provides a work area of the CPU 41, and stores variable data etc., and a control program And ROM 43 in which fixed data such as control data is stored. The RAM 42 and the ROM 43 can adopt other storage means.

The input interface (I / F) 44 is an interface between the CPU 41 and various sensors (sensors 311a, 11a ', 12a'), and the CPU 41 receives various inputs via the input I / F 44. Acquire the detection result of the sensor.

The output interface (I / F) 45 is an interface between the CPU 41 and various motors (motors 317a and motors in the drive boxes 11a and 12a), and the CPU (through the output I / F 45). 41 controls various motors.

Here, inverter control or servo control can be adopted for the rotational speed control of the rollers 11c and 12c of the roller conveyor units 11 and 12, ie the rotational speed control of the motor in the drive boxes 11a and 12a. By employing the inverter control or the servo control, it is possible to finely adjust the rotational speed of each motor, and the mechanical errors of the roller conveyor units 11 and 12 can be corrected by the control. Thereby, the rotation speed of the rollers 11c and 12c of the roller conveyor units 11 and 12 can be synchronously controlled more correctly.

In addition, the inverter speed control or the servo control can also be adopted for the rotational speed control of the motor 317a of the lifting unit 31. Since the pair of lifting units 31 require synchronous control to frequently stop and move synchronously with respect to a plurality of stop positions corresponding to the seating portions of the storage cassette 20, in particular, the space is continuously connected. It is preferable to adopt a control method (so-called continuous path control) that moves along a line. In the present embodiment, a motor is used as the driving source of the elevating unit 31, but an actuator operated by fluid pressure such as hydraulic pressure or air pressure may be used.

The communication interface (I / F) 46 is an interface between the host computer 5 and the CPU 41 that controls the entire processing object processing facility 100, and the CPU 41 commands from the host computer 5. According to the control of the object import and export system (A).

<Operation of Process Object Import and Export System (A)>

The carrying out operation of the glass substrate by the processing object carrying-in / out system A is demonstrated. First, the lifting operation of the storage cassette 20 by the lifting device 30 and the loading / unloading operation of the glass substrate by the conveying device 10 according to the lifting operation will be described. In this embodiment, the conveying apparatus 10 enters into the storage cassette 20 by the elevating operation by the elevating apparatus 30, and the conveying apparatus 10 is placed on the seating portion (that is, the wires 23 at each end). The glass substrate of the upper side) is carried in and out of the storage cassette 20 and from the outside of the storage cassette 20 onto the seating portion. 9-1 and 10 are explanatory diagrams of the operation of the object to be loaded and unloaded system A. FIG. Here, the carrying out operation of the glass substrate will be described. The carrying operation is generally performed in the reverse order.

9-1 shows a state where the storage cassette 20 is located above the transport apparatus 10 and the transport apparatus 10 has not yet entered the storage cassette 20. At each end of the storage cassette 20, a glass substrate W is mounted. The glass substrate W is carried out from the lower one. In the state of Fig. 9-1, the lowermost glass substrate W is first carried out.

Thus, the lifting device 30 lowers the storage cassette 20 as shown in Fig. 9-2 to enter the transport device 10 into the storage cassette 20, and the transport surface of the transport device 10 Position it slightly higher than the bottom seat. As a result, the lowermost glass substrate is lifted by the conveying apparatus 10 from the lowermost seating portion to be seated on the conveying apparatus 10. Thereafter, the rollers 11c and 12c of the conveying apparatus 10 are rotated to convey the glass substrate in a substantially horizontal position. 9-3 shows an embodiment of the glass substrate in the + X direction and FIG. 9-4 shows the glass substrate in the -X direction.

By the same procedure, the lowering of the storage cassette 20 and the carrying out of the glass substrate are repeated in each unit. FIG. 10-1 shows an embodiment in which the storage cassette 20 is lowered until the storage cassette 20 is repeatedly lowered and the glass substrate is repeatedly removed and the conveying apparatus 10 enters the intermediate position of the storage cassette 20. FIG. 10-2 shows an embodiment of the glass substrate in the -X direction at the position shown in FIG. 10-1.

10-3, the lowering of the storage cassette 20 and the carrying out of the glass substrate are further repeated so that the storage cassette 20 is lowered until the conveying apparatus 10 enters the upper position of the storage cassette 20. FIG. 10-4 shows the sun in the process of carrying out a glass substrate to + X direction at the position of FIG. 10-3. In this way, the topmost glass substrate is carried out. When the glass substrate is carried into the empty storage cassette 20, the glass substrates are carried in order from the topmost mounting portion, and the storage cassette 20 is raised in sequence.

Next, the operation at the time of carrying in and out of various glass substrates of different sizes will be described. In the present embodiment, each roller conveyor is based on the size of the glass substrate to be conveyed, the position on the seating part which is the conveying source (when carrying out) or the destination (when carrying) of the glass substrate, and the loading / exit opening through which the glass substrate passes. Units 11 and 12 are selectively driven. In the case where the carrying in and out ports are made into one place, each roller conveyor unit 11, based on the size of the glass substrate to be conveyed and the position on the seating part which is the conveying source (at the time of carrying out) or the destination (at the time of carrying) of the glass substrate, 12) is selectively driven.

Here, the carrying out operation of the glass substrate will be described. The carrying operation is generally performed in the reverse order. In FIG. 11, FIG. 11-1 is a top view of the empty storage cassette 20 and the conveying apparatus 10. In FIG. The position of the beam member 22c is the installation position of the wire 23 seen from above. For convenience of explanation, the roller conveyor units 11 and 12 are No. 11 to 16 (roller conveyor unit 11), No. 21 to 26 (roller conveyor unit 12), and No. 11 as shown in Fig. 11-2. 31-36 (roller conveyor unit 12) and No. 41-46 (roller conveyor unit 11) are provided, and each roller conveyor unit 11, 12 is specified as No. of FIG. 11-2 below. Will be explained.

12 is an explanatory view of the operation when carrying out the glass substrate W of the largest size. 12-1 shows a state where the glass substrate W is seated on a seating portion (wire 23) at one end. Since the glass substrate W is located on the roller conveyor units of all the numbers, all the roller conveyor units become a driving object for the carrying out. 12-2 shows the operation during conveyance in the case where the glass substrate W is taken out from the carrying in and out of the + X direction side, and FIG. 12-3 shows the glass substrate W taken out from the carrying in and out of the -X direction side. It shows the operation during conveyance in the case of. The rotation direction of the roller of the roller conveyor unit is determined along the conveyance direction. The roller conveyor unit through which the glass substrate W has passed may sequentially stop its driving. For example, in the case of Fig. 12-2, the roller conveyor units Nos. 11, 21, 31 and 41 can stop driving.

13A and 13B are explanatory views of the operation when carrying out the glass substrates W1 and W2 having the size of 1/2 of the glass substrate W shown in Fig. 12-1. In Fig. 13A, Fig. 13-1 shows a state where two glass substrates W1 and W2 are seated on a seating portion (wire 23) at one end, and the glass substrate W1 is the left half of the seating portion. At the position of, the glass substrate W2 is located in the position of the right half part of a mounting part, respectively. For this reason, glass substrate W1 is No.11-13, No.21-23, No.31-33, No.41-43, and the glass substrate W2 is No.14. It is located on the roller conveyor units of -16, No.24-26, No.34-36, No.44-46, respectively.

As a carrying out method, the glass substrates W1 and W2 are largely carried out separately in the inlet and outlet of the + X direction and the inlet and outlet of the -X direction (reverse conveyance), and the glass substrates W1 and W2, respectively. It is divided into a system (co-directional conveyance) which carries out from one carrying in and out. Moreover, it is divided into the system (sequential conveyance) which carries out glass substrate W1, W2 one by one, and the system (simultaneous conveyance) which carries out glass substrate W1, W2 simultaneously. These carrying out methods can be combined arbitrarily.

In FIG. 13A, FIG. 13-2 and FIG. 13-3 are reverse conveyance and are the figure which shows the example of sequential conveyance. In this case, first, any one of the glass substrates W1 and W2 is conveyed in any one direction (+ X direction, -X direction). In the example of Fig. 13-2, the roller conveyor units of Nos. 11 to 13, Nos. 21 to 23, Nos. 31 to 33, and Nos. 41 to 43 are selected as driving targets, and the glass substrate W1 is in the -X direction. Are being taken out. After the export of the glass substrate W1 is finished, as shown in the example of Fig. 13-3, the roller conveyor units of Nos. 14 to 16, Nos. 24 to 26, Nos. 34 to 36, and Nos. 44 to 46 are driven. Is selected, and the glass substrate W2 is carried out in the + X direction. When carrying out simultaneously, the roller conveyor units of No.11-13, No.21-23, No.31-33, No.41-43, No.14-16, No.24-26, No.34 The roller conveyor units of Nos. 36 and Nos. 44 to 46 are simultaneously driven, and the rotational direction of the rollers is reversed.

In FIG. 13B, FIGS. 13-4 and 13-5 are co-directional conveyances and are a figure which shows the example of sequential conveyance. In this case, first, any one of the glass substrates W1 and W2 is conveyed in any one direction (+ X direction, -X direction). In the example of Figs. 13-4, the roller conveyor units of Nos. 11 to 13, Nos. 21 to 23, Nos. 31 to 33, and Nos. 41 to 43 are selected as driving objects, and the glass substrate W1 is in the -X direction. Are being taken out. When carrying out of glass substrate W1 is complete | finished, as shown to the example of FIG. 13-5, the roller conveyor unit of No. 14-16, No. 24-26, No. 34-36, No. 44-46, and No. The roller conveyor units 11 to 13, Nos. 21 to 23, Nos. 31 to 33, and Nos. 41 to 43, that is, all the roller conveyor units are selected as driving objects, and the glass substrate W2 is also taken out in the -X direction. . When carrying out simultaneously, the roller conveyor units of No.11-13, No.21-23, No.31-33, No.41-43, No.14-16, No.24-26, No.34 The roller conveyor units of Nos. 36 and Nos. 44 to 46 are simultaneously driven and the rotation direction of the rollers is made the same.

14A to 14C are explanatory diagrams of the operation when the glass substrates W1 to W4 having the size of 1/4 of the glass substrate W shown in FIG. 12-1 are taken out. In Fig. 14A, Fig. 14-1 shows a state in which four glass substrates W1 to W4 are seated on a seating portion (wire 23) at one end, and the glass substrate W1 is in the upper left half of the seating portion. The glass substrate W2 is positioned at the lower left half of the mounting portion, the glass substrate W3 is positioned at the upper right half of the mounting portion, and the glass substrate W4 is positioned at the lower right half of the mounting portion. And the glass substrate W1 is on the roller conveyor units of Nos. 11-13 and No. 21-23, and the glass substrate W2 is on the roller conveyor units of Nos. 31-33, No. 41-43, Glass substrates W3 are positioned on roller conveyor units Nos. 14 to 16 and Nos. 24 to 26, and glass substrates W4 are positioned on roller conveyor units No. 34 to 36 and Nos. 44 to 46, respectively. .

As a carrying out method, there exist the above-mentioned back conveyance, the same direction conveyance, sequential conveyance, and simultaneous conveyance. Simultaneous conveyance is also classified into the case of conveying all four sheets simultaneously and the case of conveying two or three sheets simultaneously.

In FIG. 14A, FIG. 14-2 and FIG. 14-3 are reverse conveyance and are the figure which shows the example of two simultaneous conveyance. In this example, first, as shown in Fig. 14-2, the glass substrate W1 is unloaded from the inlet / outlet in the -X direction and the glass substrate W4 is carried out from the inlet / outlet in the + X direction. For this reason, roller conveyor units Nos. 11 to 13 and Nos. 21 to 23 are selected as driving targets, and the glass substrate W1 is in the -X direction, and Nos. 34 to 36 and Nos. 44 to 46 roller conveyors. The unit is selected as the driving target, and the glass substrate W4 is carried out in the + X direction, respectively.

Subsequently, as shown in Fig. 14-3, roller conveyor units Nos. 31 to 33 and Nos. 41 to 43 are selected as the driving targets, and the glass substrate W2 is in the -X direction, Nos. 14 to 16, No. A roller conveyor unit of .24 to 26 is selected as a driving target, and the glass substrates W3 are respectively taken out in the + X direction.

In FIG. 14B, FIG. 14-4 is a backward conveyance and is a figure which shows the example of four simultaneous conveyance. In this example, all the roller conveyor units are selected as the driving targets, and the roller conveyor units Nos. 11 to 13, Nos. 21 to 23, Nos. 31 to 33, and Nos. 41 to 43, and Nos. 14 to 16, In the roller conveyor units of Nos. 24 to 26, Nos. 34 to 36, and Nos. 44 to 46, the roller is driven to rotate in the reverse direction. The glass substrates W1 and W2 are carried out from the carry-in port on the side of -X direction, and the glass substrates W3 and W4 are carried out from the carry-in port on the side of + X direction.

14-5 of FIG. 14B and FIG. 14-6 of FIG. 14C are co-directional conveyances and are the figure which shows the example of sequential conveyance. In this example, the glass substrate W3 → glass substrate W4 → glass substrate W1 → glass substrate W2 is removed from the inlet / outlet on the side of the + X direction, and the glass substrate W1 is in the middle of the glass substrate W1. Carrying out of the board | substrate W2 is started. First, roller conveyor units Nos. 14 to 16 and Nos. 24 to 26 are selected as driving objects, and the glass substrate W3 is carried out. Next, roller conveyor units Nos. 34 to 36 and Nos. 44 to 46 are selected as driving objects, and the glass substrate W4 is carried out. Subsequently, roller conveyor units Nos. 11 to 13 and Nos. 21 to 23 and roller conveyor units Nos. 14 to 16 and Nos. 24 to 26 are selected as driving objects, and the glass substrate W1 is carried out. During the carrying out, roller conveyor units Nos. 31 to 33 and 41 to 43 and roller conveyor units Nos. 34 to 36 and 44 to 46 are selected as driving objects, and the glass substrate W2 is taken out. .

FIG. 14-7 of FIG. 14C is a diagram illustrating an example of two-way simultaneous conveyance in the same direction conveyance. In this example, the glass substrates W3 and W4 are ejected from the inlet and outlet of the + X direction in the order of the glass substrates W1 and W2. First, roller conveyor units Nos. 14 to 16 and Nos. 24 to 26 and roller conveyor units Nos. 34 to 36 and Nos. 44 to 46 are selected as driving objects, and the glass substrates W3 and W4 are selected. It is taken out at the same time. Subsequently, all the roller conveyor units are selected as driving objects, and the glass substrates W1 and W2 are carried out at the same time.

15A and 15B are explanatory views of the operation when the glass substrates W1 to W6 having the size of 1/6 of the glass substrate W shown in FIG. 12-1 are taken out. In Fig. 15A, Fig. 15-1 shows a state in which six glass substrates W1 to W6 are seated on a seating portion (wire 23) at one end, and the glass substrate W1 is placed on the upper left end of the seating portion. Position, the glass substrate W2 is in the position of the left end of the seating portion, the glass substrate W3 is in the position of the lower left end of the seating portion, the glass substrate W4 is in the position of the upper right end of the seating portion, and the glass substrate W5 is The glass substrate W6 is located in the position of the lower right end of a seating part, respectively.

The glass substrate W1 is on the roller conveyor units Nos. 11 to 13, the glass substrate W2 is on the roller conveyor units Nos. 21 to 23 and 31 to 33, and the glass substrate W3 is no. On the roller conveyor units 41 to 43, the glass substrate W4 is on the roller conveyor units Nos. 14 to 16, and the glass substrate W5 is on the roller conveyor units Nos. 24 to 26 and 34 to 36. Glass substrates W6 are located on roller conveyor units Nos. 44 to 46, respectively.

As a carrying out method, there exist the above-mentioned back conveyance, the same direction conveyance, sequential conveyance, and simultaneous conveyance. Simultaneous conveyance is further classified into the case of conveying all six sheets simultaneously and the case of conveying two to five sheets simultaneously.

In FIG. 15A, FIG. 15-2 is a reverse conveyance and is a figure which shows the example of two simultaneous conveyance. In this example, first, glass substrates W1 and W4 are transported, then glass substrates W2 and W5, and finally, two glass substrates W3 and W6 are simultaneously conveyed in the reverse direction. Therefore, first, the roller conveyor units Nos. 11 to 13 and the roller conveyor units Nos. 14 to 16 are selected as driving targets, so that the glass substrate W1 is in the -X direction and the glass substrate W4 is in the + X direction. Are each exported. Next, roller conveyor units Nos. 21 to 23 and Nos. 31 to 33 and roller conveyor units Nos. 24 to 26 and Nos. 34 to 36 are selected as driving targets so that the glass substrate W2 is moved in the -X direction. And glass substrates W5 are each carried out in the + X direction. Finally, roller conveyor units Nos. 41 to 43 and roller conveyor units Nos. 44 to 46 are selected as driving objects, so that the glass substrate W3 is in the -X direction and the glass substrate W6 is in the + X direction, respectively. It is taken out.

In FIG. 15B, FIG. 15-3 is a reverse conveyance and is a figure which shows the example of 6 simultaneous conveyance. In this example, the glass substrates W1 to W3 are simultaneously carried out in the -X direction and the glass substrates W4 to W6 are simultaneously carried out in the + X direction. For this reason, all roller conveyor units are selected as a drive object, and roller conveyor units No. 11-13, No. 21-23, No. 31-33, No. 41-43, No. 14-16, No. The rollers are rotated in the reverse direction by the roller conveyor units of 24-26, No. 34-36, No. 44-46.

In FIG. 15B, FIG. 15-4 is a co-directional conveyance and is a figure which shows the example of sequential conveyance. In this example, the glass substrate (W4) ⇒ glass substrate (W5) ⇒ glass substrate (W6) ⇒ glass substrate (W1) ⇒ glass substrate (W2) ⇒ glass substrate (W3) from the inlet and outlet of the + X direction side. Export of the next glass substrate is started in the middle of carrying out, and carrying out of the one glass substrate before.

Then, first, roller conveyor units Nos. 14 to 16 are selected as driving objects, and the glass substrate W4 is carried out. Next, roller conveyor units Nos. 24 to 26 and Nos. 34 to 36 are selected as driving objects, and the glass substrate W5 is carried out. Next, roller conveyor units Nos. 44 to 46 are selected as driving objects, and the glass substrate W6 is carried out. Subsequently, roller conveyor units Nos. 11 to 16 are selected as driving objects, and the glass substrate W1 is carried out. Next, roller conveyor units Nos. 21 to 26 and Nos. 31 to 36 are selected as driving objects, and the glass substrate W2 is carried out. Finally, roller conveyor units Nos. 41 to 46 are selected as driving objects, and the glass substrate W3 is carried out.

In Fig. 15B, Fig. 15-5 is a diagram showing an example of three simultaneous conveyances in the same direction conveyance. In this example, the glass substrates W4 to W6 are ejected from the inlet and outlet of the + X direction in the order of the glass substrates W1 to W3. First, roller conveyor units Nos. 14 to 16, Nos. 24 to 26, Nos. 34 to 36, and Nos. 44 to 46 are selected as driving objects, and the glass substrates W4 to W6 are simultaneously conveyed. Subsequently, all the roller conveyor units are selected as driving objects, and the glass substrates W1 to W3 are simultaneously conveyed.

Next, in each of the above examples, an example in which the same sized glass substrates are carried out to the one-stage mounting portion is shown. Alternatively, glass substrates of different sizes may be seated in the one-stage mounting portion and then carried out, respectively. FIG. 16 is a view showing an example in which glass substrates of different sizes are seated on one stage mounting portion, and FIGS. 16-1 to 16-3 show two types, and FIG. 16-4 shows three types.

In the example of FIG. 16-1, the glass substrates W1 to W3 having the size of 1/6 of the glass substrate W shown in FIG. 12-1, and the 1/4 size of the glass substrate W shown in FIG. 12-1. The glass substrates W4 and W6 are mixed and seated in one stage of mounting portion. In the example of FIG. 16-2, the glass substrates W1 to W3 having the size of 1/6 of the glass substrate W shown in FIG. 12-1, and the 1/2 size of the glass substrate W shown in FIG. 12-1. The glass substrate W4 of FIG. 2 is mixed and seated in one seating part. In the example of Fig. 16-3, the glass substrate W1 having a size 1/2 of the glass substrate W shown in Fig. 12-1 and the glass having a size 1/4 of the glass substrate W shown in Fig. 12-1. The board | substrates W2 and W3 are mixed and seated in the mounting part of 1st stage. In the example of Fig. 16-4, the glass substrate W1 of the size 1/6 of the glass substrate W shown in Fig. 12-1 and the glass of 1/4 size of the glass substrate W shown in Fig. 12-1. The board | substrate W2 and the glass substrate W3 of 1/2 size of the glass substrate W shown to FIG. 12-1 are mixed and seated in the mounting part of 1st stage.

Thus, the carrying out operation | movement at the time of mounting the glass substrate of a different size with respect to the 1st seating part is demonstrated with reference to FIGS. 17A-17C. Here, the case of Fig. 16-1 will be described as an example.

In Fig. 17A, as shown in Fig. 17-1, the glass substrate W1 is on the roller conveyor units Nos. 11 to 13, and the glass substrate W2 is Nos. 21 to 23 and Nos. 31 to 33 rollers. On the conveyor unit, the glass substrate W3 is placed on the roller conveyor units Nos. 41 to 43, and the glass substrate W4 is placed on the roller conveyor units Nos. 14 to 16 and Nos. 24 to 26. W5) is located on No. 34-36 and No. 44-46 roller conveyor units, respectively.

As a carrying out method, there exist the above-mentioned back conveyance, the same direction conveyance, sequential conveyance, and simultaneous conveyance. Simultaneous conveyance is further classified into the case of conveying all five sheets simultaneously and the case of conveying two to four sheets simultaneously.

In FIG. 17A, FIG. 17-2 is a figure showing reverse conveyance and an example of sequential conveyance. In this example, the glass substrates W1 to W3 are sequentially conveyed in the -X direction, and the glass substrates W4 and W5 are sequentially conveyed in the + X direction. In the roller conveyor unit selected as the driving target, the glass substrates W1 are Nos. 11 to 13, the glass substrates W2 are Nos. 21 to 23, Nos. 31 to 33, and the glass substrates W3 are Nos. 43, glass substrates W4 are Nos. 14 to 16, Nos. 24 to 26, and glass substrates W5 are Nos. 34 to 36 and Nos. 44 to 46.

In FIG. 17B, FIG. 17-3 is a backward conveyance and is a figure which shows the example of simultaneous conveyance. In this example, the glass substrates W1 to W3 are simultaneously conveyed in the -X direction, and the glass substrates W4 and W5 are simultaneously conveyed in the + X direction. In the roller conveyor unit selected as the driving target, the glass substrates W1 are Nos. 11 to 13, the glass substrates W2 are Nos. 21 to 23, Nos. 31 to 33, and the glass substrates W3 are Nos. 43, glass substrates W4 are Nos. 14 to 16, Nos. 24 to 26, and glass substrates W5 are Nos. 34 to 36 and Nos. 44 to 46.

In FIG. 17B, FIG. 17-4 is a co-directional conveyance and is a figure which shows the example of sequential conveyance. In this example, the glass substrate (W4) ⇒ glass substrate (W5) ⇒ glass substrate (W1) ⇒ glass substrate (W2) ⇒ glass substrate (W3) is taken out from the inlet and outlet on the + X direction side, Export of the next glass substrate is started in the middle of carrying out a glass substrate.

First, roller conveyor units Nos. 14 to 16 and 24 to 26 are selected as driving objects, and the glass substrate W4 is carried out. Next, roller conveyor units Nos. 34 to 36 and Nos. 44 to 46 are selected as driving objects, and the glass substrate W5 is carried out. Subsequently, roller conveyor units Nos. 11 to 16 are selected as driving objects, and the glass substrate W1 is carried out. Next, roller conveyor units Nos. 21 to 26 and Nos. 31 to 36 are selected as driving objects, and the glass substrate W2 is taken out. Finally, roller conveyor units Nos. 41 to 46 are selected as driving objects, and the glass substrate W3 is carried out.

In FIG. 17C, FIG. 17-5 is a co-direction conveyance and is a figure which shows the example of two or three simultaneous conveyances. In this example, the glass substrates W4 and W5 are ejected from the inlet and outlet ports in the + X direction in the order of the glass substrates W1 to W3. First, roller conveyor units Nos. 14 to 16, Nos. 24 to 26, Nos. 34 to 36, and Nos. 44 to 46 are selected as driving objects, and the glass substrates W4 and W5 are simultaneously conveyed. Subsequently, all the roller conveyor units are selected as driving objects, and the glass substrates W1 to W3 are simultaneously conveyed.

In FIG. 17C, FIG. 17-6 is a backward conveyance and is a figure which shows the example of four simultaneous conveyance. In this example, the glass substrates W1 to W3 and W5 are placed in the inlet and outlet of the -X direction, and the glass substrate W4 is to the + X direction in the order of the glass substrates W1 to W4 and the glass substrate W5. We are taking out from carrying in and out. First, roller conveyor units No. 11 to 13, No. 21 to 23, No. 31 to 33, and No. 41 to 43, and No. 14 to 16, No. 24 to 26 roller conveyor units are driven. It is selected as and glass substrates W1-W4 are conveyed. Subsequently, roller conveyor units Nos. 31 to 36 and Nos. 41 to 46 are selected as driving objects, and the glass substrate W5 is conveyed.

Thus, in the present embodiment, each roller conveyor unit 11, 12 is selectively selected based on the size of the glass substrate to be conveyed, the position on the seating portion which is the conveying source of the glass substrate, and the inlet / outlet through which the glass substrate passes. By driving with the glass substrate, glass substrates of various sizes can be carried out, and the conveying method can also be selected from various methods. Even when the glass substrate is brought into the storage cassette 20, when the size of the glass substrate, the position on the seat to be transported, and the entry / exit outlet are determined, the roller conveyor units 11 and 12 to pass through the glass substrate are determined. By selectively driving the determined roller conveyor units 11 and 12, it is possible to carry in glass substrates of various sizes.

Next, the case where carrying out and carrying out of a glass substrate is performed simultaneously is demonstrated. 18A and 18B are explanatory views of the operation when carrying out and carrying out a glass substrate simultaneously. Here, the glass substrate of 1/6 size of the glass substrate W shown in FIG. 12-1 is demonstrated as an example.

In Fig. 18A, Fig. 18-1 shows a glass substrate on which the glass substrates W4 to W6 are seated on the seating portion, and are carried out of the storage cassette 20 from the glass substrates W1 to W3. The embodiment carried in to the position of the left half part in the storage cassette 20 is shown.

Glass substrates W4 to W6 are mounted on roller conveyor units Nos. 14 to 16, Nos. 24 to 26, Nos. 34 to 36, and Nos. 44 to 46, respectively. Glass substrates W1 to W3 are loaded onto roller conveyor units Nos. 11 to 13, Nos. 21 to 23, and Nos. 31 to 33 and Nos. 41 to 43, respectively.

First, the case of conveying by simultaneous conveyance is demonstrated, and all the roller conveyor units are selected as a drive object, and it drives rotationally in the same direction. In FIG. 18A, FIG. 18-2 shows an aspect in which the glass substrates W4 to W6 are taken out and the glass substrates W1 to W3 are carried in by carrying the glass substrate in the + X direction. In FIG. 18A, FIG. 18-3 shows the aspect after conveyance, the glass substrates W4 to W6 are carried out of the storage cassette 20, and the glass substrates W1 to W3 are carried into the storage cassette 20. In FIG. .

In Fig. 18B, Figs. 18-4 and 18-5 show another example of operation when carrying out and carrying out the glass substrate at the same time. The glass substrates W1, W2, W4 and W6 are taken out and the glass substrate ( W3) is brought to the bottom left, and the glass substrate W5 is brought into the right middle.

In this example, in order to carry out the glass substrates W1, W2, W4, and W6, Nos. 11 to 13, Nos. 21 to 23, and Nos. 31 to 33, Nos. 14 to 16, and Nos. 44 to 46 The roller conveyor unit is selected as the drive target. Further, in order to carry in the glass substrates W3 and W5, roller conveyor units Nos. 41 to 43, Nos. 24 to 26, and Nos. 34 to 36 are selected as driving objects.

The glass substrates W1, W2, and W5 are conveyed in the -X direction, and the glass substrates W3, W4, and W6 are conveyed in the + X direction. As a result, the glass substrates W1 and W2 are carried out in the -X direction, and the glass substrates W4 and W6 are carried out in the + X direction. In addition, the glass substrates W3 and W5 are loaded into the lower left and right middle ends, respectively.

As described above, in the present embodiment, a plurality of roller conveyor units 11 and 12 in which the conveying apparatus 10 is driven independently are planarly arranged, and the plurality of roller conveyor units 11 and 12 are conveyed. Since it is selectively driven based on the size of the glass substrate and the position on the seating portion which is the transport source (when carrying out) or the transport destination (when carrying out) of the glass substrate, it is possible to carry in and out of glass substrates of different sizes. Thus, a plurality of kinds of processing objects can be handled. In addition, as shown in Figs. 4-1 to 4-3, each of the seating portions of the storage cassette 20 allows a plurality of small objects to be processed to be seated, and can be carried in and out individually. The storage efficiency of the glass substrate 20 can be improved.

Claims (6)

Conveying means for supporting a rectangular plate-shaped object to be processed in a substantially horizontal posture from its lower surface side and conveying the object in a substantially horizontal direction; A plurality of seating portions which are formed in multiple stages in the vertical direction and have openings through which the conveying means can pass, and at which the workpiece is seated in a substantially horizontal posture; A storage cassette provided with a bottom portion forming the passage opening, and provided above the conveying means; And elevating means for elevating the storage cassette and the conveying means up and down relatively, The conveying means enters into the storage cassette by the elevating operation by the elevating means, and the conveying means moves the object to be processed on the seating portion out of the storage cassette and from the outside of the storage cassette to the seating portion. In the processing object import and export system for carrying in and out the processing object, The conveying means, It is comprised by providing a plurality of conveyance parts driven independently, planarly, The plurality of carriers, The object object loading-in / out system of this invention is selectively driven based on the magnitude | size of the said object to convey and the position on the said mounting part which is a conveyance source or a destination of the said object. The method of claim 1, The storage cassette, At the same time as having the other side part which opposes the said side part which forms the said inlet / outlet, the other side also forms the said inlet / outlet, The conveying means is capable of conveying the object to be processed through the inlet and outlet of each of the side portion and the other side, The plurality of carriers, The object loading / unloading system, which is selectively driven based on the size of the object to be conveyed, the position on the seating portion which is the source or conveyance destination of the object, and the loading / exit opening through which the object is passed. . The method of claim 1, The plurality of carriers, The first conveying unit, The width | variety of the direction orthogonal to the conveyance direction of the said to-be-processed object contains the 2nd conveyance part which is about half of the width | variety of the said 1st conveyance part, The first conveying unit and the second conveying unit, A processing object carrying-in / out system according to claim 2, wherein two second transporting portions are disposed between two first transporting portions in a direction orthogonal to the conveying direction of the object. The method of claim 1, The elevating means is to elevate the storage cassette up and down, the conveying means is fixedly installed, The storage cassette has a rectangular parallelepiped shape, The lifting means, And a pair of lifting units which are respectively provided on opposite sides of the storage cassette so as to sandwich the storage cassette, and which cantilever the storage cassette. The method of claim 4, wherein And said elevating unit is provided with a detection means for detecting a deviation of the elevating height from each other. A conveying apparatus for supporting a rectangular plate-shaped object to be processed in a substantially horizontal posture from its lower surface side and conveying the object in a substantially horizontal direction; A plurality of seating portions formed in multiple stages in the vertical direction and having openings through which the conveying apparatus passes, and at which the workpiece is seated in a substantially horizontal posture; A storage cassette having a bottom portion defining an entry opening therethrough, the cassette being installed above the conveying apparatus; And elevating means for elevating the storage cassette and the conveying apparatus relatively up and down, The conveying apparatus enters into the storage cassette by the elevating operation by the elevating means, and the conveying apparatus moves the object to be processed on the seating portion out of the storage cassette and from the outer side of the storage cassette to the seating portion. In the said conveying apparatus which comprises the processing object carrying-in / out system which carries in and out the said processing object, It is comprised by providing a plurality of conveyance parts driven independently, planarly, The plurality of carriers, A conveying apparatus is selectively driven based on the size of the object to be conveyed and the position on the seating portion which is the conveying source or conveying destination of the object to be processed.

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