KR20070019423A - Flat panel display manufacturing machine - Google Patents

Abstract

The present invention relates to a flat panel display device manufacturing apparatus, and more particularly, when a cluster type manufacturing apparatus is applied to an in-line type system, a flat panel applied to an in-line system having a load lock chamber stacked up and down. A display device manufacturing apparatus.

That is, the present invention is a flat panel display device manufacturing apparatus consisting of a load lock chamber, a transfer chamber, and a process chamber to perform a predetermined process on a substrate, wherein the load lock chamber is a plurality of stacked rods each stacked independently function A lock chamber, comprising a conveyor line for continuously loading and unloading the substrate into the load lock chamber, wherein the conveyor line is a substrate to the lower load lock chamber in front of the lower load lock chamber of the upper and lower load lock chambers. Import conveyor to supply the; A carry-out conveyor receiving a substrate at the rear of the lower load lock chamber; A lift conveyor provided at predetermined positions of the loading and unloading conveyors to lift and lower the substrate to a position of an upper load lock chamber; The lifting conveyor is provided in a state spaced apart from the load lock chamber by a predetermined distance to the flat display device manufacturing apparatus, characterized in that the buffer (Buffer) space is formed between the lifting conveyor and the load lock chamber will be.

Flat panel display device manufacturing apparatus, in-line, cluster, upper and lower load lock chamber, loading conveyor, exporting conveyor, lifting conveyor, lifting means, buffer space, blocking plate

Description

Flat panel display device manufacturing device {FLAT PANEL DISPLAY MANUFACTURING MACHINE}

1 is a schematic view showing a conventional flat panel display device manufacturing apparatus.

2 is a plan view illustrating a state in which a flat panel display device manufacturing apparatus according to an embodiment of the present invention is provided in a cluster type.

3 and 4 are side cross-sectional views and planar cross-sectional views showing a top and bottom load lock chamber and a substrate transfer device for transferring a substrate to each load lock chamber of the flat panel display device manufacturing apparatus.

5 and 6 are a plan view and a side view showing various embodiments of the stopper provided in the loading and unloading conveyor of the flat panel display device manufacturing apparatus.

7 and 8 are a plan view showing the operating state of the aligner for aligning the substrate in the loading and unloading conveyor.

9 and 10 are plan views showing the operating state of the aligner for aligning the substrate in the lifting conveyor provided in the loading and unloading conveyor.

11A to 11H are process diagrams illustrating a process of loading and unloading a substrate into upper and lower load lock chambers of the flat panel display device manufacturing apparatus.

<Description of Symbols for Main Parts of Drawings>

122, 124: upper and lower load lock chamber 125: blocking plate

130: horizontal movement means

132, 142a, 142b, 142c, 152 ', 162, 172: 1st, 2, 3, 4, 5, 6, 7 stopper

134: lift pin

140, 160: import and export conveyor

150, 170: front and rear lifting conveyor

156, 176: lifting means

150 ', 170': auxiliary carry-on, secondary carry-out conveyor

S, S ₁ , S ₂ , S ₃ , S ₄ , S ₅ : Substrate

The present invention relates to a flat panel display device manufacturing apparatus, and more particularly, when a cluster type manufacturing apparatus is applied to an in-line type system, a flat panel applied to an in-line system having a load lock chamber stacked up and down. A display device manufacturing apparatus.

In general, as a device for manufacturing a flat panel display (FPD), as shown in FIG. 1, the load lock chamber 20, the transfer chamber 22, and the process chamber 24 are sequentially connected. The flat panel display device manufacturing apparatuses 10a and 10b are frequently used.

At this time, the load lock chamber 20 is connected to the outside, and serves to bring in a new substrate to be processed from the outside, or to take out the substrate is processed in the flat panel display device manufacturing apparatus to the outside.

The inside of the load lock chamber 20 is in contact with the outside while repeatedly maintaining a vacuum state and an atmospheric pressure state. Therefore, a mounting table (not shown) for loading a substrate is provided therein, and one or more substrates (not shown in the drawing) may be stacked thereon.

The load lock chamber 20 is also provided with a pumping device (not shown) and a venting device (not shown) to change the interior of the load lock chamber 20 into a vacuum atmosphere and an atmospheric atmosphere.

In addition, the transfer chamber 22 is connected to the load lock chamber 20 and the process chamber 24, a transfer robot (not shown) is provided therein, the load lock chamber 20 and the process chamber It functions as an intermediate passage through which the substrates are brought in or taken out between the substrates 24, and is always maintained in a vacuum atmosphere so that the substrates inside the process chamber 24 can be loaded even when the substrates in the process chamber 24 are taken out or brought into the process chamber 24. The atmosphere can be maintained in a vacuum atmosphere.

In addition, the process chamber 24 is provided with a mounting table (not shown in the drawing) capable of mounting a substrate therein and a processing device (not shown in the drawing) capable of performing a predetermined process on the substrate. Etching or the like is performed on the substrate under the following conditions.

The flat panel display device manufacturing apparatuses 10a and 10b described above are provided in a clean room in order to prevent contamination of the substrate to be processed and to increase the precision of the processing on the substrate.

In the clean room, in the flat panel display device manufacturing apparatuses 10a and 10b, several devices are arranged in parallel. In this case, each of the flat panel display device manufacturing apparatuses 10a and 10b is connected to one external substrate supply unit 30 to form a single flat panel display device manufacturing system as a whole.

That is, at least two flat panel display device manufacturing apparatuses 10a and 10b are connected in parallel to form one flat panel display device manufacturing system. All flat panel display device manufacturing apparatuses 10a and 10b provided in one flat panel display device manufacturing system are driven independently.

Therefore, the external substrate supply robot 34 provided in one external substrate supply unit 30 moves along the moving rail 32 and is processed through the load lock chamber 20 of each of the flat panel display device manufacturing apparatuses 10a and 10b. Supplies the necessary substrates, stores the processed substrates, and transports them to the place where the next process is to be made.

In the above-described flat panel display device manufacturing apparatus (10a, 10b), the load lock chamber 20 is continuously pumped in and out of the atmospheric pressure and vacuum atmosphere, so that the pumping for forming the inside of the vacuum Various failures can occur if the device and the venting device to bring it back into the atmosphere are constantly operating.

In addition, as described above, since the substrates are sequentially supplied by the single supply robot 34 to the various flat panel display device manufacturing apparatuses 10a and 10b, it is difficult to delay the process completion time and transfer the substrates. In the process of supplying the substrate S to the upper load lock chamber 20, particles generated as process by-products fall into the lower substrate S, resulting in a process error.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and an object thereof is to provide a load lock chamber of a flat panel display device manufacturing apparatus stacked up and down, and to supply a substrate to a stacked upper and lower load lock chambers in a line. According to an aspect of the present invention, there is provided a flat panel display device manufacturing apparatus capable of providing a buffer space in which a substrate is waiting.

In order to achieve the above object, the present invention provides a flat panel display device manufacturing apparatus comprising a load lock chamber, a transfer chamber, and a process chamber to perform a predetermined process on a substrate, wherein a plurality of load lock chambers are stacked, respectively. A stacked load lock chamber that functions independently, and is provided with a conveyor line for continuously loading and unloading substrates into the load lock chamber, wherein the conveyor line is formed in front of the lower load lock chamber of the upper and lower load lock chambers. An import conveyor for supplying a substrate to the lower load lock chamber; A carry-out conveyor receiving a substrate at the rear of the lower load lock chamber; A lift conveyor provided at predetermined positions of the loading and unloading conveyors to lift and lower the substrate to a position of an upper load lock chamber; The lifting conveyor includes a buffer space between the lifting conveyor and the load lock chamber, provided to be spaced apart from the load lock chamber by a predetermined distance to supply substrates to the upper and lower load lock chambers, respectively. When carried out by the conveyor line easily, in this case, it is preferable to solve the particle drop problem for the lower substrate by the buffer space provided in the upper and lower load lock chamber.

In addition, in the present invention, the front and rear outer walls between the upper and lower load lock chambers adjacent to the loading and unloading conveyors are plate-shaped protruding in the horizontal direction, the area of which is larger than the substrate to block particles from falling from the upper substrate to the lower substrate. Since the lower side of the blocking plate becomes a buffer space by providing the blocking plate, the lower substrate can be waited regardless of particle effects by the buffer space.

In addition, the blocking plate in the present invention is provided on one side thereof, but is further provided with an exhaust means for exhausting the foreign matter remaining on the blocking plate to the outside, to exhaust the pollutants such as particles to the outside on the upper surface of the blocking plate It is preferable because it prevents contaminants from remaining.

In addition, in the present invention, it is preferable to further provide an auxiliary loading conveyor and an auxiliary loading conveyor for supplying and discharging the substrate lifted by the elevating conveyor to the upper load lock chamber on the upper side of the blocking plate which is the front and rear of the upper load lock chamber. Do.

In addition, in the present invention, the position of the substrate in the front position spaced apart by the length of the substrate at the end of the load lock chamber side loading conveyor, and the rear position spaced apart by the length of the substrate at the end of the transport conveyor upper and lower load lock chamber side front and rear It is preferable that each of the front and rear lifting conveyors to be raised or lowered to the position of the auxiliary loading conveyor and the auxiliary take-out conveyor provided in each.

Further, in the present invention, since an aligner for aligning the substrate is further provided at the rear end of the third stopper in the carry-on conveyor, it is preferable because the substrate can be aligned on the carry-on conveyor.

In addition, the front and rear lifting conveyor in the present invention is provided at the same height as the first loading and unloading conveyor, the rollers of the front and rear lifting conveyor are interposed so as not to interfere with the rollers of the loading and unloading conveyor, the lifting conveyor is When the substrate is located at the same height as the outer conveyor and placed on the loading and unloading conveyor on which the elevating conveyor is seated, it can be moved horizontally by the loading and unloading conveyor and can be elevated vertically by the elevating conveyor. Do.

In addition, it is formed on any one selected from the front lifting conveyor and the rear conveyor in the present invention, and are provided so as to be parallel to the frame for fixing both ends of the roller, respectively moved horizontally in the inward and outward direction into the upper load lock chamber or It is preferable to further include an aligner for aligning the taken-out substrate, so that the substrate alignment is performed before or after the carrying into the upper load lock chamber.

Hereinafter, an embodiment of the flat panel display device manufacturing apparatus of the present invention will be described with reference to the accompanying drawings.

A flat panel display device manufacturing apparatus according to an embodiment of the present invention is composed of a load lock chamber 122, 124, the transfer chamber 126 and a plurality of process chambers 128 stacked up and down as shown in FIG. It is made of a cluster type and has a structure in which each is arranged in an in-line form, and the import and export of the substrate S is also performed in an inline form.

First, the load lock chambers 122 and 124 are provided with a plurality of stacked up and down so that a plurality of substrates can be carried in or out as the vacuum state and the atmospheric pressure are circulated, respectively, and each of the substrates is transferred inside or outside. Function.

Next, the transfer chamber 126 transfers the substrate S from the upper and lower load lock chambers 122 and 124 sequentially while maintaining the inside thereof in a vacuum state, and transfers the substrate S to the adjacent process chamber 128. A robot (not shown) is provided and receives the substrate S from the adjacent process chamber 128 and sequentially delivers the substrate S to the stacked load lock chambers 122 and 124.

Next, the process chamber 128 is connected to the transfer chamber 126 but functions to perform a predetermined process on the substrate S loaded into the vacuum state, and at least one is provided.

The flat panel display device manufacturing apparatus 110 has the same structure and function as that of the related art, and thus detailed description thereof will be omitted.

Here, the upper and lower load lock chambers 122 and 124 are provided to be stacked in a plurality of vertical direction as shown in Figures 3 and 4, each of which is provided to be connected to and closed with the transfer chamber 126, this embodiment In Eh, the number is limited to two and the number may be increased or decreased.

A buffer space is provided between the upper and lower load lock chambers 122 and 124 so that the upper and lower spaces do not communicate with each other.

That is, the blocking plate 125 may be provided between the upper and lower load lock chambers 122 and 124 to form the above-described buffer space, but the blocking plate 125 may remain on the upper substrate S surface during the process. It serves to prevent the particles from falling to the lower substrate (S).

Here, the blocking plate 125 protrudes outwardly between the upper and lower load lock chambers 122 and 124 and has a plate shape having a horizontal direction while being wider than the area of the substrate S.

The blocking plate 125 is provided at at least one of the front and rear of the upper and lower load lock chamber (122, 124) and in this embodiment is provided in both the front and rear of the upper and lower load lock chamber (122, 124) To illustrate.

In addition, exhaust means (not shown in the drawing) are respectively provided on the outer and outer end surfaces of the blocking plate 125 so that the exhaust means is a particle that is a process by-product remaining on the upper and lower substrate surfaces when the substrate S enters. Exhaust to

In addition, upper and lower load lock chambers 122 and 124 are provided in front and rear of the upper and lower load lock chambers 122 and 124. The front and rear of the) is formed with a substrate entrance, which is a passage through which the substrate S moves, and a gate valve G for opening and closing the substrate entrance and exit is provided at the front and the rear, respectively.

Here, the conveyor line is a horizontal moving means 130 and the front and rear lifting up and down interposed rollers so as to overlap without interfering with the rollers of the carry-in, export conveyors 140, 160 and the carry-in, export conveyors 140, 160 The auxiliary loading conveyor 150 'and the auxiliary loading conveyor 170' which are provided in the spaces spaced apart from the front, rear, front and rear lifting conveyors 150 and 170 of the conveyors 150 and 170 and the upper load lock chamber 122 Collectively.

And the loading and unloading conveyors 140 and 160 in the longitudinal direction are provided at a position close to the gate valve G provided in front and rear of the lower load lock chamber 124. In addition, horizontally moving means 130, which is a roller conveyor, is disposed at the same line and the same height as the loading and unloading conveyors 140 and 160 in the lower direction of the lower load lock chamber 124, respectively.

Here, the horizontal movement means 130 provided in the upper load lock chamber 122 and the lower load lock chamber 124 respectively have the same structure and function, so only one of them will be described in detail.

The horizontal moving unit 130 is arranged such that a plurality of rollers are arranged at an appropriate interval between a pair of frames provided in parallel with a roller driving unit (not shown in the drawing) for driving each roller uniformly. Here, the horizontal moving means 130 is provided in a roller drive type to prevent the bottom surface of the substrate (S) from being damaged as the contact area with the substrate (S) is small.

In addition, a plurality of lift pins 134 are provided at a lower side of the horizontal moving means 130 in a vertical direction for each of the rollers arranged thereon, and each lift pin 134 is fixed to one plate. In addition, a separate driving means (not shown) is provided to provide a driving force to lift and lift the lift pin 134.

In addition, a first stopper 132 is provided at one side of the horizontal moving means 130, that is, the end of the direction in which the substrate S proceeds, and the first stopper 132 restricts the position of the substrate S. FIG. Function.

A first stopper 132 for limiting the position of the substrate is provided at an end of the horizontal moving means in which the substrate enters.

Here, the first stopper 132 is a lever type and is positioned in a state parallel to the advancing direction of the substrate S, and then rotates simultaneously in an opposite inner direction when the substrate S enters the substrate S. The position of S) is defined. 5 (a) (b)]

In addition, the first stopper 132a of another embodiment vertically lifts up to a position higher than the height of the loading and unloading of the substrate S to lift and lower the position of the substrate S. (See Fig. 6 (a) (b).)

 Meanwhile, any one of the first stoppers 132 and 132a is selected and used.

Although not shown in the drawing, the detector detects the presence of the substrate S at the lower side of the substrate S by using a laser displacement sensor, and detects the presence of the substrate S to operate the first stopper 132. do.

Here, the detector is integrally formed with a light emitting part and a light receiving part on one side thereof, and light is emitted from the light emitting part so that the emitted light is refracted by the light receiving part and is received by the light receiving part and outputs the received signal. . If the substrate S does not exist, the light emitted from the light emitting unit is not received by the light receiving unit, and at this time, a signal indicating that no light is received is output.

On the other hand, the detection unit is electrically connected to a control unit (not shown in the drawing), if it is determined that the substrate (S) is present according to the presence of the substrate (S) control the operation of the horizontal movement means 130 and the roller drive unit When the substrate S approaches the first stopper 132 according to the rotational speed control of the roller, the roller is rotated at a low speed to prevent the substrate S from being damaged by the collision.

3 and 4, the loading conveyor 140 is arranged such that a plurality of rollers have a proper distance between a pair of frames provided to be parallel to each other and have a proper length, and uniformly move each roller at a predetermined position. A roller driving unit (not shown in the figure) for driving in a state is provided.

Here, the carry-in conveyor 140 is provided by a roller drive type to prevent the bottom surface of the substrate (S) is damaged as the contact area with the substrate (S) is small.

The loading conveyor 140 is provided with second, third and fourth stoppers 142a, 142b and 142c for stopping the position of the substrate S, respectively.

The second stopper 142a is provided at a front position spaced apart from the third stopper 142b by the length of the substrate S. When the front substrate S is present according to the presence of the front substrate S, the rear substrate is provided. The standby position of (S) is limited to stop the substrate S.

The third stopper 142b is provided at a front position spaced apart from the fourth stopper 142c by the length of the substrate S, and functions to stop the substrate S by limiting the position of the substrate S to be elevated. .

The fourth stopper 142c is provided at an end adjacent to the lower load lock chamber 124 and functions to stop the substrate S by limiting the position of the substrate S.

The second, third and fourth stoppers 142a, 142b, and 142c are operated by a detector (not shown), respectively, as shown in FIGS. 5 and 6, and when the detection unit detects the presence of the substrate S, The output signal is transmitted to the second, third and fourth stoppers 142a, 142b and 142c, respectively, to operate the second, third and fourth stoppers 142a, 142b and 142c respectively.

Here, the second, third, and fourth stoppers 142a, 142b, and 142c are positioned in a state parallel to the advancing direction of the substrate S in a lever manner, and are simultaneously rotated in opposite inward directions when entering the substrate S. The position of the substrate S is defined. 5 (a) (b)]

The second, third, and fourth stoppers 142a, 142b, and 142c of another embodiment are vertically lifted to a position higher than a height of the loading and unloading of the substrate S to position the tip of the substrate S. FIG. Limit to stop. (See Fig. 6 (a) (b).)

Meanwhile, the second, third and fourth stoppers 142a, 142b, and 142c select one of the lever type and the lift type.

Although not shown in the drawing, the detection unit detects the presence or absence of the substrate S through the front end of the substrate S by using a laser displacement sensor and outputs a signal according to the presence or absence of the substrate S. When S) is detected as present, the second, third and fourth stoppers 142a, 142b and 142c are operated.

Here, the detector is integrally formed with a light emitting part and a light receiving part on one side thereof, and light is emitted from the light emitting part so that the emitted light is refracted by the light receiving part and is received by the light receiving part and outputs the received signal. . If the substrate S does not exist, the light emitted from the light emitting unit is not received by the light receiving unit, and at this time, a signal indicating that no light is received is output.

On the other hand, the detection unit is electrically connected to the control unit (not shown in the drawing), if the presence of the substrate (S) is detected according to the presence of the substrate (S), the operation of the loading conveyor 140 and the roller drive unit to the control unit When the substrate S approaches the second, third and fourth stoppers 142a, 142b, and 142c according to the rotational speed control of the roller, the roller is rotated at a low speed to prevent damage by collision.

That is, when the substrate S is detected by the detector, the controller controls the substrate S to be stopped by the operation of the second stopper 142a based on the detection signal of the detector, and the front lift When the conveyor 150 is raised to bring the substrate S into the upper load lock chamber 124 and then the lower substrate S is detected by the detector when the conveyor 150 descends, the lifting means 156 is controlled to not be driven.

In addition, the control unit may move the substrate S toward the upper load lock chamber 122, and when one of the detection units or the detection unit passes, the substrate S may be stopped based on a signal output from the detection unit or the detection unit. The third stopper 142b or the fourth stopper 142c may be operated so as to be operated.

The controller also controls the operation of the third stopper 142b and the elevating means 156 for elevating the front elevating conveyor 150.

That is, when the detection unit detects that the substrate S exists, the control unit stops the substrate S by the third stopper 142b and then loads the substrate S positioned on the front lifting conveyor 150. The control unit controls the lifting means 156 to raise and lower the front lifting conveyor 150 when entering the lock chamber 122 and then lowering the front lifting conveyor 150.

Therefore, the controller is raised in the state in which the substrate S is loaded on the front lifting conveyor 150, and then another substrate S is moved to the loading conveyor 140 perpendicular to the substrate S so that the substrate ( When the presence of S) is detected, the operation of the lifting means 156 and the loading conveyor 140 and the roller speed are controlled.

Furthermore, the substrate S may be positioned in a vertical line position on the rollers of the carry-in conveyor 140 and the front lift conveyor 150. The substrate S placed on the carry-in conveyor 140 may be elevated. The detector provided in the carry-on conveyor 140 also controls the driving of the lifting means 156 in case of being damaged by the lowering of the front lifting conveyor 150.

And an aligner for aligning the substrate S to a rear end of the loading conveyor 140, that is, a rear end of the third stopper 142b of the loading conveyor 140 having the front lifting conveyor 150 provided at the same height. Is further provided.

As shown in FIGS. 7 and 8, a plurality of the aligners are arranged to have a proper spacing on each of the frames provided at both ends of the rollers, so that the aligners are driven uniformly and rotate inward in a state parallel to the frames. 144 and a flexible contact member 146 coupled to the front end of the pivot member 144 to press both sides of the substrate S.

That is, a plurality of rotating members 144 fixed to the contact member 146 are provided at both ends of the frame and rotated in a uniform direction of the substrate S by a driving means (not shown). The circumferential surface of) is pressed to align both sides of the twisted substrate (S) in contact.

3 and 4, the take-out conveyor 160 is arranged such that a plurality of rollers have a proper distance between a pair of frames provided to be parallel and have a proper length, and uniformly move each roller at a predetermined position. It is provided with a roller drive unit for driving.

Here, the carrying-out conveyor 160 is provided in a roller-drive type to prevent the bottom surface of the substrate S from being damaged as the contact area with the substrate S is small.

In addition, a fifth stopper 162 for limiting a movement position of the substrate S may be provided at both ends of the substrate S at the front end of the carrying-out conveyor 160 by the length thereof.

The fifth stopper 162 is operated by a detector (not shown) as shown in FIGS. 5 and 6, and when the detection unit detects the presence of the substrate S, the output signal is output to the fifth stopper 162. ) And the fifth stopper 162 is operated by the transmitted signal.

Here, the fifth stopper 162 is a lever type, and is positioned in a state parallel to the advancing direction of the substrate S, and simultaneously rotates in an opposite inward direction when entering the substrate S to stop the substrate S. Let's do it. 5 (a) (b)]

The fifth stopper 162 according to another embodiment is vertically lifted up to a position higher than the height of the loading and unloading of the substrate S to stop the substrate S. FIG. (See Fig. 6 (a) (b).)

On the other hand, the fifth stopper 162 selects and uses either a lever type or a lift type.

Although not shown, the detector detects the presence of the substrate S at the lower side of the substrate S by using a laser displacement sensor and outputs the result as a signal.

Here, the detector is integrally formed with a light emitting part and a light receiving part on one side thereof, and light is emitted from the light emitting part so that the emitted light is refracted by the light receiving part and is received by the light receiving part and outputs the received signal. . If the substrate S does not exist, the light emitted from the light emitting unit is not received by the light receiving unit, and at this time, a signal indicating that light is not received is output.

On the other hand, the detection unit and the control unit are electrically connected to each other, if it is detected that the substrate (S) in accordance with the presence of the substrate (S) whether the operation of the fifth stopper 162 and the upper load lock chamber 122 The lifting means 176 for raising and lowering the rear lifting conveyor 170 in the vertical direction is controlled by the controller.

That is, the substrate S may be positioned in a vertical line position on the rollers of the export conveyor 160 and the rear lifting conveyor 170. The rear of the substrate S located on the export conveyor 160 is elevated. In case of being damaged by the lowering of the elevating conveyor 170, the control unit provided in the discharging conveyor 160 also controls the driving of the elevating means 176.

Unlike the loading conveyor 140, an aligner is not provided at the front end of the loading conveyor 160.

Front and rear lifting conveyors 150 and 170 are provided at the front and rear positions by the length of the substrate S at the rear and front ends of the loading and unloading conveyors 140 and 160. That is, the front position spaced apart by the length of the substrate (S) at the end of the top and bottom load lock chamber (122, 124) side loading conveyor 140, and the top and bottom load lock chamber (122, 124) side carrying conveyor 160 In the rear position spaced apart by the length of the substrate (S) at the end of the front and rear lifting conveyors (150, 170) are provided, respectively.

The front and rear lifting conveyors 150 and 170 move the position of the substrate S to positions of the auxiliary loading conveyor 150 'and the auxiliary loading conveyor 170' which are provided at the front and rear sides of the upper and lower load lock chambers 122 and 124. It functions to ascend or descend.

Here, the front and rear lifting conveyors 150 and 170 are initially provided at the same height as the loading and unloading conveyors 140 and 160, and the front and rear lifting conveyors between the rollers provided in the loading and unloading conveyors 140 and 160 ( The rollers 150 and 170 are interposed so as not to interfere with each other.

And elevating means 156 is provided at each of the centers of the bottom of both sides of the front elevating conveyor 150, and elevating means 176 is provided at each of the centers of the bottom of both of the bottom of the rear elevating conveyor 170. FIG.

That is, the lifting means so as to move the substrate (S) to the same height as the horizontal moving means 130 and the auxiliary carry-in, auxiliary carry-out conveyor (150 ', 170') provided in the upper load lock chamber 122 A function of raising and lowering by 156 and 176 is provided. The elevating means 156, 176 is controlled by the controller with a detection signal by the detector.

Here, the elevating means (156, 176) is provided with any one of a drive motor and a screw (Screw) for converting the pneumatic cylinder to the linear reciprocating motion or the rotational movement to the linear reciprocating motion, is provided in each of the bottom center of the frame.

And the front lifting conveyor 150 is further provided with an aligner for aligning the substrate (S) carried in the upper load lock chamber 122, as shown in Figure 9 and 10, the aligner is the front lifting conveyor The rollers of 150 are provided so as to be parallel to the frame fixed at both ends thereof, and are horizontally moved inward and outward so as to contact and contact the substrate S, and at the same time, the substrate S is aligned.

That is, the aligner is composed of a guide part 152 and a driving part 154, the guide part 152 is provided on both sides in parallel with the frame of the front elevating conveyor 150, the substrate (S) It is formed in a plate-like shape moving in the inner direction during the alignment and extending in the longitudinal direction in contact with both sides of the substrate (S).

In this case, the guide part 152 serves to guide the entering of the substrate S so as not to be misaligned. In particular, the guide part 152 may provide softness to a portion in contact with the substrate S, and the substrate S enters. Opposite sides of the inlet portion are formed to be inclined by an appropriate length or a curved surface is formed to prevent breakage when colliding with the substrate (S).

The driving unit 154 is fixed to at least one point of the outer wall of the guide unit 152 by a pneumatic cylinder to drive the guide unit 152 in the inner and outer direction and is fixed to the frame.

In addition, the rear lifting conveyor 170 is provided with a roller driving unit (not shown) for arranging a plurality of rollers at an appropriate interval between a pair of frames provided to be parallel and driving each roller uniformly.

In addition, unlike the front elevating conveyor 150, the rear elevating conveyor 170 is provided with a sixth stopper 172 at one end thereof, that is, in a direction in which the substrate S travels, and the sixth stopper 172 is provided with the sixth stopper 172. It serves to limit the position of the substrate (S).

Here, the sixth stopper 172 is a lever type, and is positioned in a state parallel to the advancing direction of the substrate S, and then simultaneously rotates in an opposite inward direction when the substrate S enters, thereby positioning the substrate S. FIG. To qualify. 5 (a) (b)]

In addition, the sixth stopper 172 of another embodiment vertically lifts to a position higher than the height of the loading and unloading of the substrate S, thereby defining the position of the substrate S. As shown in FIG. (See Fig. 6 (a) (b).)

On the other hand, the sixth stopper 172 selects and uses either a lever type or a lift type.

Although not shown in the drawing, the detection unit detects the presence or absence of the substrate S by using a laser displacement sensor and detects the presence of the substrate S to operate the sixth stopper 172. do.

Here, the detector is integrally formed with a light emitting part and a light receiving part on one side thereof, and light is emitted from the light emitting part so that the emitted light is refracted by the light receiving part and is received by the light receiving part and outputs the received signal. . If the substrate S does not exist, the light emitted from the light emitting unit is not received by the light receiving unit, and at this time, a signal indicating that no light is received is output.

On the other hand, the detection unit is electrically connected to a control unit (not shown in the drawing), if it is determined that the substrate (S) is present according to the presence of the substrate (S) operation of the auxiliary transport conveyor 170 'and the roller drive unit When the substrate S approaches the sixth stopper 172 under the control of the rotation speed of the roller by the controller, the roller is rotated at a low speed to prevent the substrate S from being damaged by the collision.

The auxiliary loading conveyor 150 'and the auxiliary loading conveyor 170' are upper side of the blocking plate 125 provided in front and rear of the upper and lower load lock chambers 122 and 124, as shown in FIG. , Between the upper load lock chamber 122 and the front elevating conveyor 150, and between the upper load lock chamber 122 and the rear elevating conveyor 170, respectively.

In addition, the auxiliary loading conveyor 150 'and the auxiliary loading conveyor 170' are arranged such that a plurality of rollers have an appropriate interval between a pair of frames provided to be parallel to each other, and a roller driving unit for driving each roller uniformly ( Not shown) is provided.

Here, the auxiliary loading conveyor 150 'and the auxiliary loading conveyor 170' are formed in a similar structure, but only the auxiliary loading conveyor 150 'includes a seventh stopper 152' and a detector.

That is, the driving of the auxiliary transport conveyor 170 ′ is performed to move the substrate S from the horizontal moving means 130 of the upper load lock chamber 122 to the elevated rear lifting conveyor 170 at the same time as the substrate S is taken out. It only functions to move the substrate (S) from the horizontal moving means 130 to the rear lifting conveyor (170).

In addition, the auxiliary loading conveyor 150 ′ is provided with a seventh stopper 152 ′ at an end in the direction in which the substrate S travels, and the sixth stopper 152 ′ limits the position of the substrate S. Function.

Here, the seventh stopper 152 ′ is a lever type, and is positioned in a state parallel to the advancing direction of the substrate S, and then rotates simultaneously in an opposite inward direction when the substrate S enters the substrate S. Define the location. 5 (a) (b)]

In addition, the seventh stopper 152 ′ of another embodiment vertically lifts up to a position higher than the height of the loading and unloading of the substrate S to limit the position of the substrate S. FIG. (See Fig. 6 (a) (b).)

On the other hand, the seventh stopper 152 ′ is used by selecting one of the lever type or lifting type.

Although not shown in the drawing, the detection unit detects the presence or absence of the substrate S by using a laser displacement sensor and detects the presence of the substrate S, thereby operating the seventh stopper 152 '. Do it.

Here, the detector is integrally formed with a light emitting part and a light receiving part on one side thereof, and light is emitted from the light emitting part so that the emitted light is refracted by the light receiving part and is received by the light receiving part and outputs the received signal. . If the substrate S does not exist, the light emitted from the light emitting unit is not received by the light receiving unit, and at this time, a signal indicating that no light is received is output.

On the other hand, the detection unit is electrically connected to a control unit (not shown in the drawing), if it is determined that the substrate (S) is present according to the presence of the substrate (S) operation of the auxiliary loading conveyor (150 ') and the roller drive unit When the substrate S approaches the seventh stopper 152 ′ under the control of the rotation speed of the roller by the controller, the roller is rotated at a low speed to prevent the substrate S from being damaged by the collision.

Therefore, the substrate loading and unloading process of the flat panel display device manufacturing apparatus of the present invention, as shown in Figure 11a, first, the substrate (S ₁ ) and the substrate sequentially by the roller driven by the roller drive unit of the loading conveyor 140 The substrate S ₁ in S ₂ is aligned with the aligner.

After detecting the substrate S ₁ , the detector detects the substrate S ₁ moving along the loading conveyor 140, which is an inlet of the lower load lock chamber 124, at the rear of the loading conveyor 140. The output signal is transmitted to the fourth stopper 142c, and the fourth stopper 142c is operated by the output signal to stop the substrate S ₁ .

Thereafter, the substrate S ₂ also moves along the loading conveyor 140 toward the substrate S ₁ and is detected by a detector provided on the same vertical line as the front blocking plate 125 and seated on the front lifting conveyor 150. It is stopped by the third stopper 142b in the stopped state.

In addition, the substrate S ₃ positioned behind the substrate S ₂ is also detected by a detector provided on the same vertical line as the front end of the front lifting conveyor 150 and thus cannot enter the front lifting conveyor 150. It is stopped by the second stopper 142a.

Next, referring to FIG. 11B, the substrate S ₂ waiting on the front elevating conveyor 150 is raised to the height of the upper load lock chamber 122 by the front elevating conveyor 150 and the elevating means 156. Let's do it.

Then, the substrate S ₂ seated on the front lifting conveyor 150 is aligned by the aligner provided in the front lifting conveyor 150.

The substrate S ₂ is prepared to be carried into the upper load lock chamber 122, and the substrate S ₁ is prepared to be carried into the lower load lock chamber 124.

Next, referring to FIG. 11C, the inlet of the lower load lock chamber 124 is opened, and then the substrate S ₁ is provided inside the lower load lock chamber 124 by driving the loading conveyor 140. Position is moved to the horizontal moving means 130.

In addition, the detector detects the substrate S ₁ moved by the horizontal moving unit 130 below and transmits an output signal to the first stopper 132. In operation, the horizontal movement means 130 is stopped.

Substrate S ₂ placed on the same horizontal line as the upper load lock chamber 122 by the front elevating conveyor 150 is moved by the driving of the auxiliary loading conveyor 150 ', and at this time, the auxiliary loading conveyor 150' The rear substrate S ₃ is also sensed by a detector provided at a lower side on the same vertical line as the front end of the front elevating conveyor 150 at the rear side of the rear panel S ₃ and thus cannot enter the front elevating conveyor 150, and thus the second stopper 142a. Stopped by

The inside of the lower load lock chamber 124 into which the substrate S ₁ is loaded is converted from an atmospheric pressure to a vacuum state.

The substrate S ₁ is moved into the process chamber by a transfer robot (not shown) provided in the transfer chamber 126 to process the plasma.

Next, referring to FIG. 11D, the inside of the upper load lock chamber 122 into which the substrate S ₂ is loaded is converted from the atmospheric pressure to the vacuum state.

The substrate S ₂ is moved into the process chamber by a transfer robot (not shown) provided in the transfer chamber 126 to process the plasma.

When the front elevating conveyor 150 is lowered and positioned at the same height as the carrying conveyor 140, the substrate S ₃ stopped by the detector and the second stopper 142a is positioned on the front elevating conveyor 150.

Next, referring to FIG. 11E, the processed substrate S ₁ is loaded into the horizontal moving means 130 of the lower load lock chamber 124 by a transport robot and then inside the lower load lock chamber 124. Is converted from vacuum to atmospheric pressure.

Then, the lower load lock chamber 124 is opened and the substrate S ₁ is transferred from the horizontal moving means 130 to the auxiliary transport conveyor 170 ′ by driving the horizontal moving means 130.

Then, the aligned substrate S ₃ moves toward the inlet of the lower load lock chamber 124. The detection unit provided at the lower side of the loading conveyor 140 senses this and transmits an output signal to the fourth stopper 142c. The fourth stopper 142c operates with this output signal to maintain the substrate S ₃ in the standby state at the rear end of the loading conveyor 140.

In addition, the rear substrate S ₄ is also detected at the rear side by a detection unit provided at a lower side on the same vertical line as the front end of the front elevating conveyor 150, and thus cannot enter the front elevating conveyor 150, but instead enters the second stopper 142a. By pausing.

Next, referring to FIG. 11F, the substrate S ₂ having been processed in the upper load lock chamber 122 is taken out by the driving of the horizontal moving unit 130 and moved to the auxiliary transport conveyor 170 ′. .

At the same time, the detection unit detects the substrate S ₃ , which is moved by the horizontal moving unit 130, by bringing the substrate S ₃ into the lower load lock chamber 124 while the substrate S ₂ is carried out. Then, the output signal is transmitted to the first stopper 132, and the first stopper 132 is operated by the output signal to stop the horizontal moving unit 130.

Next, referring to FIG. 11G, the substrate S ₄ , which is in a standby state, has an upper load lock on the substrate S ₄ by the front lifting conveyor 150 and the lifting means 156 of the loading conveyor 140. Raise to chamber 122 height.

The substrate S ₄ seated on the front lifting conveyor 150 is aligned by an aligner.

In addition, the rear lifting conveyor 170 of the carrying out conveyor 160 moves the rear lifting conveyor 170 to the horizontal load means 130 provided in the upper load lock chamber 122 by driving the lifting means 175. To the height of the

The substrate S ₂ is then carried out to the rear lifting conveyor 170 which is raised to the position of the upper load lock chamber 122.

Next, referring to FIG. 11H, the substrate S ₂ positioned on the rear lifting conveyor 170 is lowered and lowered to the same height as the unloading conveyor 160 by the operation of the lifting means 176. Move (S ₂ ) to the outside.

The substrate S ₃ having completed the process is moved from the transfer chamber 126 to the lower load lock chamber 124, and then the inside of the lower load lock chamber 124 is switched from a vacuum state to an atmospheric pressure state.

The aligned substrate S ₄ moves toward the inlet of the lower load lock chamber 124, and a detector provided at the lower side of the loading conveyor 140 senses this and transmits an output signal to the fourth stopper 142c. The fourth stopper 142c operates with this output signal to maintain the standby state at the rear end of the loading conveyor 140.

The rear substrate S ₅ is also detected at the rear side by a detection unit provided at a lower side on the same vertical line as the front end of the front elevating conveyor 150, and thus cannot enter the front elevating conveyor 150, but instead enters the second stopper 142a. By pausing.

Thereafter, the remaining substrates S _{4 and} S ₅ are also moved after the process in the same manner as described above.

Such a flat panel display device manufacturing apparatus of the present invention is provided with a load lock chamber stacked up and down, but the substrate supply is also carried out in an in-line form while taking the cluster-type manufacturing device in an in-line form, and each of the manufacturing device to the upper and lower load lock chamber The lifting conveyor of the outer conveyor that lifts and unloads the substrate has the effect of shortening the process time and reducing the charge space.

In addition, front and rear of the upper and lower load lock chambers are provided with blocking plates to form a buffer space, which is a standby space of the substrate, before entering the upper and lower load lock chambers, respectively, which are process by-products remaining on the upper substrate. It is effective to prevent particles from falling and to exhaust the contaminants by the exhaust means provided in the blocking plate to protect the substrate from the contaminants.

Claims (32)

In a flat panel display device manufacturing apparatus comprising a load lock chamber, a transfer chamber, and a process chamber to perform a predetermined process on a substrate, The load lock chamber is a stacked load lock chamber in which a plurality of stacked and functioning independently of each other, Conveyor lines are provided to continuously load and unload the substrate into the load lock chamber, The conveyor line, An input conveyor for feeding a substrate to a lower load lock chamber in front of the lower load lock chamber among the upper and lower load lock chambers; A carry-out conveyor receiving a substrate at the rear of the lower load lock chamber; A lift conveyor provided at predetermined positions of the loading and unloading conveyors to lift and lower the substrate to a position of an upper load lock chamber; Including; The elevating conveyor is provided in a state spaced apart from the load lock chamber by a predetermined distance, the display device manufacturing apparatus, characterized in that the buffer (Buffer) space is formed between the elevating conveyor and the load lock chamber. The method of claim 1, A front and rear outer wall between the upper and lower load lock chambers adjacent to the loading and unloading conveyors is provided with a blocking plate for preventing a particle from falling from the upper substrate to the lower substrate in the form of a plate protruding in the horizontal direction. Flat panel display device manufacturing apparatus characterized in that. The method of claim 2, wherein the blocking plate, Flat panel display device manufacturing apparatus characterized in that provided in at least one of the front or rear of the upper and lower load lock chamber. The method of claim 3, wherein the blocking plate, Flat panel display device manufacturing apparatus provided on one side, characterized in that the exhaust means for further exhausting the foreign matter remaining on the blocking plate to the outside is provided. The method of claim 4, wherein the load lock chamber, Flat panel display device manufacturing apparatus characterized in that the two are laminated. The method of claim 5, Substrate entrances and exits are formed on opposite sidewalls of the load lock chamber provided with the conveyor line, and a gate valve is provided to open and close the substrate entrance and exit, respectively. The method of claim 6, wherein the load lock chamber, A horizontal moving means interposed between the carrying-in conveyor and the carrying-out conveyor in the upper and lower sides of the substrate to move the substrate to receive the substrate before the process or to transfer the substrate to the outside after the process. Display device manufacturing device. The method of claim 7, wherein the horizontal movement means, Flat panel display device manufacturing apparatus characterized in that the roller conveyor. According to claim 8, The horizontal movement means, A plurality of flat panel display device manufacturing apparatus is provided with a plurality between each of the roller is arranged, the lift pin (Lift pin) is further provided in the load lock chamber to raise and lower the substrate to an appropriate height when the substrate is loaded or taken out. The method of claim 9, A flat panel display device further comprising: an auxiliary loading conveyor and an auxiliary loading conveyor for supplying and discharging the substrate lifted by the elevating conveyor to the upper load lock chamber on the upper side of the blocking plate that is before and after the upper load lock chamber. Manufacturing equipment. The method of claim 10, Auxiliary carry-in provided at the front and rear of the load lock chamber side at the front position spaced apart by the length of the substrate at the end of the load lock chamber side, and the rear position spaced apart by the length of the substrate at the end of the transport conveyor. Flat panel display device manufacturing apparatus characterized in that the front and rear lifting conveyors are further provided to raise or lower to the position of the conveyor and the auxiliary take-out conveyor. The method of claim 11, And a first stopper for limiting the position of the substrate at an end of the horizontal moving means in the direction in which the substrate enters. The method of claim 11, wherein the loading conveyor, A fourth stopper provided to limit the position of the substrate at an end adjacent to the load lock chamber, and a third position provided to limit the position of the substrate to be elevated at a front position spaced apart by the length of the substrate from the fourth stopper. A flat panel display comprising a stopper and a second stopper for limiting the standby position of the rear substrate when the front substrate exists in the front position spaced apart by the substrate length from the third stopper according to the presence of the front substrate. Device manufacturing apparatus. The method of claim 11, wherein the take-out conveyor, And a fifth stopper provided at a rear end spaced apart from the rear lock chamber by a length of the substrate to limit the position of the substrate. The method of claim 11, And a sixth stopper for limiting the position of the substrate at an end of the rear lifting conveyor in the direction in which the substrate enters. The method of claim 11, wherein the auxiliary loading conveyor, And a seventh stopper for limiting the position of the substrate at an end in the direction in which the substrate enters, among the auxiliary loading conveyors. The method according to any one of claims 12 to 16, And a roller drive unit for driving the plurality of rollers uniformly in a roller type in which the plurality of conveyor lines, the auxiliary loading conveyor and the auxiliary loading conveyor are arranged at appropriate intervals. The method of claim 17, The horizontal moving means, the loading and unloading conveyors, the front and rear lifting conveyors, the auxiliary loading and unloading conveyors, a roller drive unit for driving a plurality of rollers uniformly in a roller type in which a plurality are arranged at appropriate intervals. Flat panel display device manufacturing apparatus characterized in that further provided. The method of claim 18, wherein the first, second, third, fourth, fifth, sixth, seventh stoppers, And a lift type stopper which vertically rises to a position higher than the height of the substrate to stop the substrate. The method of claim 18, wherein the first, second, third, fourth, fifth, sixth, seventh stoppers, And a lever type stopper which is positioned in a state parallel to the advancing direction of the substrate and rotates in an opposite inward direction when entering the substrate to stop the substrate. The method according to claim 19 or 20, wherein the first, second, third, fourth, fifth, sixth, seventh stoppers, And a detection unit connected to each stopper and detecting a presence or absence of the substrate at the lower side of each stopper to output a signal according to the presence or absence of the substrate. The method of claim 21, wherein the detection unit, The light emitting unit and the light receiving unit is integrally formed, but the light is emitted from the light emitting unit is a laser displacement sensor that is refracted at the same time and the light is received at the light receiving unit and outputs a signal. The method of claim 22, And a control unit connected to the detection unit to control the operation of each of the first, second, third, fourth, fifth, sixth, and seventh stoppers by receiving a signal output from the detection unit. Device. The method of claim 23, wherein The control unit is further provided to be connected to the detection unit, the control unit, Receiving a signal output from the detection unit to control the operation of the first stopper, the second stopper, the fourth stopper, the sixth stopper and the seventh stopper, respectively, the third stopper and the third stopper 5. A flat panel display device manufacturing apparatus, comprising: controlling whether the stopper is operated and whether the substrate is elevated into the upper load lock chamber. The method of claim 24, And an aligner for aligning the substrate at a rear end of the third stopper of the loading conveyor. The method of claim 25, wherein the aligner, Arranged to be arranged at an appropriate interval on each of the frames provided on both ends of the roller are driven uniformly, and the rotation member is rotated inwardly in a state parallel to the frame, and coupled to the front end of the rotation member in contact with both sides of the substrate Flat panel display device manufacturing apparatus characterized in that consisting of a contact member. The method of claim 26, wherein the front and rear lifting conveyor, A flat panel display device manufacturing apparatus, wherein the rollers of the front and rear lifting conveyors are interposed so as not to interfere with the rollers of the loading and carrying conveyors. The method of claim 27, wherein the front and rear lifting conveyor, Flat panel display device manufacturing apparatus characterized in that the lifting means are provided in each of the central portion of the frame for fixing the roller provided on both sides to raise and lower the lifting conveyor to an appropriate height. The method of claim 28, wherein the lifting means, Flat panel display device manufacturing apparatus characterized in that the linear reciprocating cylinder. The method of claim 29, wherein the lifting means, Flat panel display device manufacturing apparatus characterized in that the drive motor and screw to convert the rotational movement to a linear reciprocating motion. The method of claim 30, Is formed on any one selected from the front elevating conveyor and the rear conveyor is provided so as to be parallel to the frame for fixing both ends of the roller, the horizontal movement in the inner and outer direction to align the substrate brought in or out into the upper load lock chamber Flat panel display device manufacturing apparatus characterized in that the aligner is further provided. 32. The apparatus of claim 31, wherein the aligner is A guide part provided at both sides in parallel with the frame and moved inward when the substrate is aligned to be in contact with both sides of the substrate, and coupled to at least one point of the outer wall of the guide part to drive the guide part inward and outward Flat panel display device manufacturing apparatus characterized in that made.

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