JPWO2007029401A1 - Work loading / unloading system and transfer device - Google Patents

Abstract

The workpiece loading / unloading system according to the present invention includes a conveying device that supports a rectangular plate-shaped workpiece from the lower surface side in a substantially horizontal posture and conveys the workpiece in a substantially horizontal direction, and is formed in multiple stages in the vertical direction. A plurality of placement portions on which the workpiece is placed in a substantially horizontal posture, a side portion that forms a loading / unloading port for the workpiece, and an entrance that allows the transfer device to pass therethrough. And a lifting / lowering means for moving the storage cassette and the transporting device up and down relatively up and down relative to each other. To move the work on the placement unit to the outside of the storage cassette and from the outside of the storage cassette to the placement unit. To carry out the work. The transport device is configured by arranging a plurality of transport units that are independently driven in a plane, and the plurality of transport units are determined by the size of the work to be transported and the transport source or transport destination of the work. It is selectively driven based on a certain position on the mounting portion.

Description

  The present invention relates to a system for carrying out a work such as a glass substrate from a storage cassette or carrying it into the storage cassette.

  A rectangular plate-like workpiece such as a glass substrate used for manufacturing a thin display is stored in multiple stages in a storage cassette. When the workpiece is processed, the workpieces are taken out one by one from the storage cassette and conveyed to a processing apparatus or the like, and the processed workpiece is again carried into the storage cassette. Such equipment requires a loading / unloading system for unloading and loading workpieces from the storage cassette.

  As this kind of loading / unloading system, for example, as described in Japanese Patent Application Laid-Open No. 2002-167038 and Japanese Patent Application Laid-Open No. 2004-15569, a roller conveyor is disposed below the storage cassette, and the storage cassette is moved up and down. Thus, it is known that workpieces are sequentially carried out of the storage cassette by a roller conveyor from the lower stage side and carried in.

  However, conventional loading / unloading systems can only handle workpieces of the same size, and in order to handle workpieces of different sizes, it is necessary to review the entire system.

  An object of the present invention is to provide a carry-in / out system and a transfer apparatus that can handle a plurality of types of workpieces.

  According to the present invention, the rectangular plate-like workpiece is supported from the lower surface side in a substantially horizontal posture, and the conveyance means for conveying the workpiece in the substantially horizontal direction is formed in multiple stages in the vertical direction so that the conveyance means can pass therethrough. A plurality of placement portions on which the workpiece is placed in a substantially horizontal posture, a side portion that forms a loading / unloading port for the workpiece, and a bottom portion that forms an entrance through which the transfer means can pass. And a storage cassette disposed above the transport means, and a lift means for moving the storage cassette and the transport means up and down relatively up and down. Means is moved into the storage cassette, and the work is transferred from the storage cassette to the exterior of the storage cassette and from the storage cassette to the storage section by the transport means. In the workpiece loading / unloading system, the conveying means is configured by arranging a plurality of independently driven conveying units in a plane, and the plurality of conveying units include the size of the workpiece to be conveyed, the workpiece A workpiece loading / unloading system is provided that is selectively driven based on the position on the placement unit, which is the transfer source or the transfer destination.

  In the workpiece carry-in / out system of the present invention, the conveying means is configured by arranging a plurality of independently driven conveying portions in a plane, and the plurality of conveying portions have a size of the workpiece to be conveyed, Since the workpiece is selectively driven on the basis of the position on the placement unit, which is the conveyance source or the conveyance destination of the workpiece, workpieces of different sizes can be loaded and unloaded. Therefore, a plurality of types of workpieces can be handled. In addition, a plurality of small-sized workpieces can be placed on each placement portion of the storage cassette and can be individually loaded and unloaded, thereby increasing the efficiency of storing the workpieces in the storage cassette.

  In a preferred embodiment of the present invention, the storage cassette has another side portion facing the side portion forming the carry-in / out port, and the other side portion also forms the carry-in / out port, The workpiece can be transported through the loading / unloading port of each of the side portion and the other side portion, and the plurality of transport portions can be determined by the size of the workpiece to be transported and the transport source or transport destination of the work. It is possible to employ a configuration that is selectively driven based on a certain position on the placement unit and the carry-in / out port through which the workpiece passes. According to this configuration, workpieces can be loaded / unloaded from the two loading / unloading ports, and the efficiency of workpiece loading / unloading can be increased.

  Further, in a preferred embodiment of the present invention, the plurality of transfer units have a width in a direction perpendicular to the first transfer unit and the transfer direction of the workpiece, and the width of the first transfer unit is substantially half. A second transfer unit, wherein the first transfer unit and the second transfer unit are disposed between the two first transfer units in a direction orthogonal to the transfer direction of the workpiece. It is possible to adopt a configuration in which the two second transport units are disposed. According to this configuration, it is possible to handle at least three types of workpieces with respect to the width.

  Further, in a preferred embodiment of the present invention, the elevating means elevates the storage cassette up and down, the conveying means is fixedly arranged, the storage cassette has a rectangular parallelepiped shape, and the elevating means It is possible to adopt a configuration including a pair of elevating units which are respectively disposed on opposite side portions of the storage cassette so as to sandwich the storage cassette and which cantilever-support the storage cassette. According to this configuration, it is possible to further reduce the installation space of the entire system, and it is possible to secure a wider space for the work loading / unloading port and the transfer means.

  In a preferred embodiment of the present invention, the elevating unit can employ a configuration including detection means for detecting a shift in the elevating height of each other. According to this configuration, it is possible to prevent the storage cassette from being tilted during lifting and lowering the storage cassette more stably.

  In addition, according to the present invention, a rectangular plate-shaped workpiece is supported from the lower surface side in a substantially horizontal posture and the workpiece is conveyed in a substantially horizontal direction, and the conveyance device is formed in multiple stages in the vertical direction. A plurality of mounting portions having an opening that can pass therethrough, and a plurality of mounting portions on which the workpiece is mounted in a substantially horizontal posture, a side portion that forms a loading / unloading port for the workpiece, and an entrance through which the transfer device can pass are formed. A storage cassette disposed above the transfer device, and an elevating means for moving the storage cassette and the transfer device up and down relatively, by an elevating operation by the elevating means. The transport device is advanced into the storage cassette, and the work on the placement unit is moved outside the storage cassette by the transport device, and the work is moved from the outside of the storage cassette to the placement unit. In the transfer device constituting the work loading / unloading system to be put in and out, a plurality of independently driven drive units are arranged in a plane, and the plurality of transfer units have a size of the work to be transferred, There is provided a transfer device that is selectively driven based on a position on the placement unit that is a transfer source or a transfer destination of the workpiece.

It is a top view which shows the layout of the workpiece processing facility using the workpiece carrying in / out system A which concerns on one Embodiment of this invention. It is an external appearance perspective view of the workpiece carrying in / out system A. It is an external appearance perspective view of the storage cassette 20, and a figure which shows the mounting part for 1 step | paragraph. It is a figure which shows the mounting state of the glass substrate of a different magnitude | size. 2 is an external perspective view of the lifting device 30. FIG. 3 is an exploded perspective view of the lifting device 30. FIG. 1 is an external perspective view of a transport device 10. FIG. It is a block diagram which shows the structure of the control part 40 of the workpiece carry-in / out system A. It is operation | movement explanatory drawing of the workpiece carrying in / out system A. FIG. It is operation | movement explanatory drawing of the workpiece carrying in / out system A. FIG. A plan view of the empty storage cassette 20 and the transfer device 10 and a No. for specifying a position of the roller conveyor units 11 and 12 in a plan view. FIG. It is operation | movement explanatory drawing in the case of carrying out the glass substrate W of the largest magnitude | size. It is operation | movement explanatory drawing in the case of carrying out the glass substrates W1 and W2 of a 1/2 size of the glass substrate W. FIG. It is operation | movement explanatory drawing in the case of carrying out the glass substrates W1 and W2 of a 1/2 size of the glass substrate W. FIG. It is operation | movement explanatory drawing in the case of carrying out the glass substrate W1 thru | or W4 of 1/4 magnitude | size. It is operation | movement explanatory drawing in the case of carrying out the glass substrate W1 thru | or W4 of 1/4 magnitude | size. It is operation | movement explanatory drawing in the case of carrying out the glass substrate W1 thru | or W4 of 1/4 magnitude | size. It is operation | movement explanatory drawing in the case of carrying out the glass substrate W1 thru | or W6 of a 1/6 magnitude | size. It is operation | movement explanatory drawing in the case of carrying out the glass substrate W1 thru | or W6 of a 1/6 magnitude | size. It is a figure which shows the example which mounted the glass substrate of a different magnitude | size on the 1 stage mounting part. It is operation | movement explanatory drawing in the case of carrying out the glass substrates W1 thru | or 3 from which a magnitude | size differs, and W4 and W5. It is operation | movement explanatory drawing in the case of carrying out the glass substrates W1 thru | or 3 from which a magnitude | size differs, and W4 and W5. It is operation | movement explanatory drawing in the case of carrying out the glass substrates W1 thru | or 3 from which a magnitude | size differs, and W4 and W5. It is operation | movement explanatory drawing in the case of carrying out a glass substrate and carrying in simultaneously. It is operation | movement explanatory drawing in the case of carrying out a glass substrate and carrying in simultaneously.

<Overall configuration of equipment>
FIG. 1 is a plan view showing a layout of a workpiece processing facility 100 using a workpiece loading / unloading system A according to an embodiment of the present invention. In each figure, X and Y indicate horizontal directions orthogonal to each other, and Z indicates a vertical direction. The workpiece processing facility 100 is a facility for processing a rectangular plate-like glass substrate as a workpiece, and includes a workpiece loading / unloading system A, a processing device B, a belt conveyor C, and a transfer device D. In the present embodiment, glass substrates W1 and W2 having different sizes can be handled by the same work processing facility 100. Moreover, it is applicable also about workpieces other than a glass substrate as a workpiece | work.

  Two belt conveyors C are arranged on both sides in the X direction of the work loading / unloading system A, and each belt conveyor C is wound with two endless belts 1 whose traveling direction is set in the Y direction and the endless belt 1. A motor 2 that rotates a drive pulley that is rotated, and a support portion 3 that rotatably supports a driven pulley around which the endless belt 1 is wound, and is provided on the upper side of the endless belt 1 in the + Y direction and the −Y direction. The part is controlled to reciprocate.

  The work loading / unloading system A can load / unload a glass substrate in the X direction. In the case of this embodiment, a glass substrate can be carried in and out of each of two sets of belt conveyors C disposed on both sides in the X direction, in both the + X direction and the −X direction. Glass substrate can be carried in and out. Details of the work loading / unloading system A will be described later. In the present embodiment, the processing device B is disposed on the −X side of the belt conveyor C, receives a glass substrate conveyed by the belt conveyor C, performs a predetermined process, and transfers it to the belt conveyor C. Although a plurality of processing apparatuses B are illustrated in FIG. 1, the processing contents of each processing apparatus B may be different contents or the same contents.

  The transfer device D is provided between the belt conveyor C and the workpiece loading / unloading system A or the processing device B, and between each endless belt 1 or between the endless belt and the workpiece loading / unloading system A and the processing device B. It comprises a plurality of elevating type roller conveyor units 4a and 4b. Each of the roller conveyor units 4a and 4b has the same configuration as that of the roller conveyor units 11 and 12 that constitute the transfer device 10 of the workpiece loading / unloading system A, which will be described later, and can be controlled independently. The unit can transport the glass substrate in the direction and the −X direction, and can be moved up and down in the Z direction by a lifting device (not shown). When the glass substrate is transferred from the work loading / unloading system A or the processing device B to the belt conveyor C, the transfer device D rises to convey the glass substrate in the + X direction or the −X direction, and then descends to move the endless belt. A glass substrate is placed on 1. Thereafter, the belt conveyor C is operated to run the endless belt 1, and the glass substrate is conveyed. Moreover, when transferring a glass substrate from the belt conveyor C to the workpiece carry-in / out system A or the processing device B, the transfer device D rises to lift the glass substrate on the endless belt 1, and then the workpiece carry-in / out system A or The glass substrate is transported to the processing apparatus B in the + X direction or the −X direction.

  In the workpiece processing equipment 100 having such a configuration, an unprocessed glass substrate is conveyed from the workpiece carry-in / out system A to the processing device B via the transfer device D and the belt conveyor C, and the processed glass substrate is processed into the processing device. B is returned to the work loading / unloading system A via the transfer device D and the belt conveyor C.

<Configuration of work loading / unloading system A>
FIG. 2 is an external perspective view of the workpiece carry-in / out system A. FIG. The workpiece carry-in / out system A includes a transfer device 10, a storage cassette 20 disposed above the transfer device 10, and an elevating device 30.

<Storage cassette>
3, FIG. 3A is an external perspective view of the storage cassette 20. The storage cassette 20 is a cassette capable of storing glass substrates in multiple stages in the vertical direction (Z direction). 2 and 3A show a state in which the glass substrate is not stored. In the case of this embodiment, the storage cassette 20 forms a substantially rectangular parallelepiped frame body by a plurality of column members 21a and 21b and beam members 22a to 22g.

  A plurality of column members 21b are arranged in the X direction, and are arranged in the same number apart from each other in the Y direction. A plurality of wires are arranged at a predetermined pitch in the vertical direction (Z direction) between the column members 21b in the Y direction. 23 is stretched. The wire 23 forms a plurality of stages in the vertical direction on which the glass substrate is placed in a substantially horizontal posture. FIG. 3B is a diagram illustrating the placement unit for one stage. Each stage mounting portion is formed by a plurality of wires 23 spaced apart in the X direction at the same height. The space between the wires 23 and the outside of the wires 23 at both ends in the X direction form an opening 23a through which the transfer device 10 described later can pass. In the present embodiment, the mounting portion is formed of a wire, but other methods can of course be employed. However, by using the wire, the interval between the substrates to be stored can be reduced, and the storage efficiency of the storage cassette 200 can be increased.

  3, FIG. 3-2 shows a mode in which a glass substrate W having a maximum size that can be stored in the storage cassette 20 (shown by a broken line) is placed on the wire 23. In this embodiment, FIG. A plurality of types of glass substrates can be placed per one stage of the placing portion. FIG. 4 is a diagram illustrating a state in which glass substrates having different sizes are placed. 4A shows a state in which a glass substrate W having a size half that of FIG. 3B is placed. Each glass substrate W is placed on two wires 23. FIG. FIG. 4B shows a state in which the glass substrate W having a size 1/4 of that in FIG. 3B is placed, and each glass substrate W is placed on the two wires 23. FIG. 4-3 shows a state in which the glass substrate W having a size 1/6 of FIG. 3-2 is placed, and each glass substrate W is placed on the two wires 23.

  Returning to FIG. 3A, both side portions of the storage cassette 20 facing each other in the X direction are opened in a gate shape by the tension members 22 a and the column members 21 a, respectively, to form a loading / unloading port 24 for the glass substrate. In the present embodiment, both sides in the X direction of the storage cassette 20 are used as the loading / unloading ports 24, and the glass substrate can be conveyed through each loading / unloading port. However, only one of the side portions can be used as the loading / unloading port. is there. However, since the storage cassette 20 has two loading / unloading ports, the glass substrate can be loaded / unloaded from each loading / unloading port, and the efficiency of loading / unloading the glass substrate can be improved. Next, the bottom of the storage cassette 20 is composed of a pair of beam members 22d, a plurality of beam members 22b, and one beam member 22f. Forming.

<Elevating device>
FIG. 5 is an external perspective view of the lifting device 30, and FIG. 6 is an exploded perspective view of the lifting device 30. The lifting device 30 is a device that moves the storage cassette 20 and the transport device 10 up and down relatively. In the present embodiment, the transport device 10 is fixed and the storage cassette 20 is moved up and down, but a configuration in which the storage cassette 20 is fixed and the transport device 10 is lifted and lowered can also be adopted.

  In the case of the present embodiment, the elevating device 30 includes a pair of elevating units 31 that are disposed on both sides of the storage cassette 20 facing each other in the Y direction so as to sandwich the storage cassette 20 and cantilever the storage cassette 20. Is done. According to this structure, the raising / lowering unit 31 can be made thinner, and the installation space of the workpiece carry-in / out system A as a whole can be further reduced. Further, it is possible to secure a wider space for the glass substrate loading / unloading port and the transfer device 10.

  The elevating unit 31 includes a beam member 311 on which the beam member 22d at the bottom of the storage cassette 20 is placed. The storage cassette 20 is moved up and down as the beam members 311 of the lift units 31 move in the vertical direction (Z direction) synchronously. The elevating unit 31 includes a column 312 extending in the vertical direction, and a pair of rail members 313 and a rack 314 extending in the vertical direction are fixed to the inner surface of the column 312. A beam member 32 is installed on the upper end of the column 312 between the elevating units 31.

  The beam member 311 is supported by being fixed to one side surface of the support plate 315 via a bracket 315a. Four slide members 316 movable along the rail member 313 are fixed to the other side surface of the support plate 315, and the beam member 311 and the support plate 315 move up and down by the guide of the rail member 313. The drive unit 317 includes a motor 317a and a speed reducer 317b, and is fixed to and supported by one side surface of the support plate 318. The output shaft of the speed reducer 317b passes through the support plate 318 and is connected to a pinion 319a disposed on the other side of the support plate 318.

  The support plate 315 and the support plate 318 are fixed to each other at a predetermined interval, and pinions 319b to 319d are disposed in the gap between the support plate 315 and the support plate 318. The pinions 319b to 319d are rotatably supported between the support plate 315 and the support plate 318, and the pinion 319b and the pinion 319d rotate following the rotation of the pinion 419a. The pinion 319c rotates following the rotation of the pinion 319b. The pinions 319b to 319d are pinions having the same specifications, and the two pinions 319c and 319d are engaged with each rack 314.

  Thus, when the drive unit 317 is driven, the pinion 319a rotates, and the drive unit 317, the support plates 315 and 318, the slide member 316, and the beam member 311 move together upward or downward by the drive force. As a result, the storage cassette 20 placed on the beam member 311 can be moved up and down. Each lifting / lowering unit 31 is provided with a sensor 311 a at the end of the beam member 311 for detecting a shift in the lifting height of the beam members 311.

  The sensor 311a is, for example, an optical sensor including a light emitting unit and a light receiving unit, and determines whether or not the light is received by mutually irradiating light in the Y direction as shown in FIG. When the light is received, there is no deviation in the elevation height of the beam members 311. When there is no light reception, there is a deviation in the elevation height. When the shift in the elevation height is detected by the sensor 311a, the control is performed so that the shift is eliminated by the control of the motor 317a. By providing the sensor 311a and controlling the shift in the elevation height of the beam member 311, it is possible to prevent the storage cassette 20 from being inclined during the elevation and to raise and lower the storage cassette 20 more stably.

  The two sensors 311a provided in each beam member 311 may have a configuration in which one of the light emitting unit and the light receiving unit is provided and the other has the other of the light emitting unit and the light receiving unit. Moreover, it is not restricted to an optical sensor, Other sensors are also employable.

<Conveyor>
FIG. 7 is an external perspective view of the transfer device 10. In the present embodiment, the transport apparatus 10 is configured by arranging a plurality of roller conveyor units 11 and 12 constituting a transport unit that is driven independently in a plane on the XY plane. In this embodiment, a roller conveyor system is adopted, but other transport systems such as a belt conveyor system may be used. Each roller conveyor unit 11, 12 includes a drive box 11a, 12a, a bearing panel 11b, 12b, and a plurality of rollers 11c rotatably supported between the drive box 11a, 12a and the bearing panel 11b, 12b, 12c. Each roller 11c, 12c is composed of a shaft part and a disk part, the axial direction of which is set to the Y direction orthogonal to the transport direction (X direction) of the glass substrate, and forward rotation about the axis in the Y direction. Reversed.

  The upper surface of the disk portion of each roller 11c, 12c forms a transport surface for transporting the glass substrate, supports the glass substrate from the lower surface side in a substantially horizontal posture, and rotates the glass substrate in a substantially horizontal direction (in this embodiment, + X direction, -X direction). The drive boxes 11a and 12a incorporate a motor (not shown) and a power transmission mechanism that transmits the driving force of the motor to the rollers 11c and 12c. Sensors 11a 'and 12a' for detecting glass substrates are provided at both ends in the X direction on the upper surfaces of the drive boxes 11a and 12a. The sensors 11a 'and 12a' are, for example, reflection type optical sensors, and the rotation of the rollers 11c and 12c is started or stopped in response to the detection result of the glass substrate by the sensors 11a 'and 12a'.

  Each roller conveyor unit 11, 12 is provided with an appropriate gap so as not to interfere with the storage box 20. The storage box 20 is moved from the entrance 25 of the storage box 20 by the lowering of the storage box 20 by the lifting device 30. 20 passes through the opening 23a of each placement portion formed by the wire 23 and reaches the placement portion of the stage to be transported.

  In the roller conveyor unit 12, the width in the Y direction orthogonal to the glass substrate transport direction (X direction) is set to approximately half the width in the Y direction of the roller conveyor unit 11, and the roller conveyor unit 11 and the roller conveyor unit 12, the two roller conveyor units 12 are disposed between the two roller conveyor units 11 in the Y direction orthogonal to the glass substrate transport direction (X direction). When viewed in the + Y direction, the arrangement is roller conveyor unit 11 ⇒ roller conveyor unit 12 ⇒ roller conveyor unit 12 ⇒ roller conveyor unit 11.

  Thereby, as shown in FIGS. 3-2 and FIGS. 4-1 to 4-3, glass substrates of various sizes having different widths in the Y direction can be transported by one transport device 10, and at least Three types of workpieces with a width in the Y direction can be handled. That is, if all the roller conveyor units 11 and 12 are driven, the glass substrate of the width | variety of the Y direction shown to FIGS. 3-2 and FIGS. 4-1 can be conveyed. Next, if the glass substrate is divided into two in the Y direction and driven independently by the two combinations of the roller conveyor units 11 and 12, the glass substrates having the width in the Y direction shown in FIG. .

  Furthermore, if the roller conveyor unit 11, the two roller conveyor units 12, and the roller conveyor unit 11 are driven independently by dividing into three in the Y direction, the Y direction shown in FIG. The width glass substrate can be individually conveyed. Moreover, the number of rollers which contact a glass substrate becomes the same, each glass substrate can be conveyed with uniform conveyance force, and each glass substrate can be conveyed stably.

<Control unit>
FIG. 8 is a block diagram showing the configuration of the control unit 40 of the workpiece carry-in / out system A. The control unit 40 provides a CPU 41 for overall control of the work loading / unloading system A, a work area for the CPU 41, a RAM 42 for storing variable data, and a fixed data such as a control program and control data. ROM 43 to be provided. The RAM 42 and the ROM 43 can employ other storage means.

  The input interface (I / F) 44 is an interface between the CPU 41 and various sensors (sensors 311a, 11a ', 12a'), and the CPU 41 acquires detection results of various sensors via the input I / F 44.

  The output interface (I / F) 45 is an interface between the CPU 41 and various motors (motors 317a, motors in the drive boxes 11a and 12a), and the CPU 41 controls various motors via the output I / F 45.

  Here, inverter control and servo control can be employed for the rotational speed control of the rollers 11c and 12c of the roller conveyor units 11 and 12, that is, the rotational speed control of the motors in the drive boxes 11a and 12a. By adopting inverter control or servo control, the rotational speed of each motor can be finely adjusted, and mechanical errors of the roller conveyor units 11 and 12 can be corrected by control. Thereby, the rotation speed of the rollers 11c and 12c of the roller conveyor units 11 and 12 can be synchronously controlled more accurately.

  In addition, inverter control and servo control can also be adopted for the rotational speed control of the motor 317a of the elevating unit 31. The pair of elevating units 31 is required to be synchronously controlled so as to frequently stop and move in a synchronized manner with respect to a plurality of stop positions corresponding to the respective placement portions of the storage cassette 20. It is desirable to employ a control method (so-called CP (Continuous Path) control) that moves along the path. In the present embodiment, a motor is used as a drive source for the elevating unit 31, but an actuator that operates with a fluid pressure such as hydraulic pressure or pneumatic pressure can also be used.

  A communication interface (I / F) 46 is an interface between the host computer 5 that controls the entire work processing facility 100 and the CPU 41, and the CPU 41 controls the work loading / unloading system A according to a command from the host computer 5. .

<Operation of work loading / unloading system A>
The glass substrate loading / unloading operation by the workpiece loading / unloading system A will be described. First, the raising / lowering operation | movement of the storage cassette 20 by the raising / lowering apparatus 30 and the carrying-in / out operation | movement of the glass substrate by the conveying apparatus 10 accompanying raising / lowering operation are demonstrated. In the present embodiment, the transport device 10 enters the storage cassette 20 by the lifting operation by the lift device 30, and the glass substrate on the placement portion (that is, on the wire 23 of each stage) is moved outside the storage cassette 20 by the transport device 10. And a glass substrate is carried in / out on the mounting part from the storage cassette 20 exterior. FIGS. 9-1 and 10 are operation explanatory views of the work carry-in / out system A. FIGS. Here, the glass substrate carry-out operation will be described, but the carry-in operation is generally the reverse procedure.

  FIG. 9A shows a state in which the storage cassette 20 is positioned above the transport device 10 and the transport device 10 has not yet entered the storage cassette 20. A glass substrate W is placed on each stage of the storage cassette 20. The glass substrate W is carried out from the lower one. In the case of FIG. 9A, the lowermost glass substrate W is first carried out.

  Accordingly, the storage device 20 is lowered as shown in FIG. 9-2 by the lifting device 30 to cause the transport device 10 to enter the storage cassette 20, and the transport surface of the transport device 10 is a position slightly higher than the lowermost mounting portion. To be located. As a result, the lowermost glass substrate is lifted by the transport device 10 from the lowermost mounting portion and placed on the transport device 10. Thereafter, the rollers 11c and 12c of the transport device 10 are rotated to transport the glass substrate in a substantially horizontal posture. Fig. 9-3 shows a state in the middle of unloading the glass substrate in the + X direction and Fig. 9-4 in the -X direction.

  By the same procedure, the lowering of the storage cassette 20 and the unloading of the glass substrate are repeated for each step. 10-1 shows a state in which the storage cassette 20 is lowered until the transport device 10 enters the middle position of the storage cassette 20 by repeatedly lowering the storage cassette 20 and carrying out the glass substrate. 2 shows an aspect in the middle of unloading the glass substrate in the -X direction at the position shown in FIG.

  10-3 shows a state in which the storage cassette 20 is lowered until the transport device 10 enters the position above the storage cassette 20 by further lowering the storage cassette 20 and carrying out the glass substrate. 10-4 shows the aspect in the middle of carrying out a glass substrate to + X direction in the position of FIG. 10-3. In this way, the uppermost glass substrate is carried out. When a glass substrate is carried into an empty storage cassette 20, the glass substrate is carried in order from the uppermost mounting portion, and the storage cassette 20 is sequentially raised.

  Next, the operation | movement at the time of carrying in / out of the various glass substrate from which a magnitude | size differs is demonstrated. In the present embodiment, the size of the glass substrate to be transported, the position on the mounting portion that is the transport source (at the time of unloading) or the transport destination (at the time of transport) of the glass substrate, the loading / unloading port through which the glass substrate passes, The roller conveyor units 11 and 12 are selectively driven based on the above. In addition, based on the size of the glass substrate to be transported when the carry-in / out port is one place, and the position on the placement unit that is the transport source (at the time of unloading) or the transport destination (at the time of transport) of the glass substrate, Each roller conveyor unit 11, 12 is selectively driven.

  Here, the glass substrate carry-out operation will be described, but the carry-in operation is generally the reverse procedure. 11, FIG. 11A is a plan view of the empty storage cassette 20 and the transfer device 10. In addition, the position of the beam member 22c is an arrangement position of the wire 23 in plan view. For convenience of explanation, each roller conveyor unit 11, 12 has a No. 11 to 16 (roller conveyor unit 11), No. 21-26 (Roller Conveyor Unit 12), No. 31-36 (roller conveyor unit 12), No. 41 to 46 (roller conveyor unit 11), and hereinafter, each of the roller conveyor units 11 and 12 is designated as No. 11 in FIG. And will be described in detail.

  FIG. 12 is an operation explanatory diagram when carrying out the glass substrate W having the maximum size. FIG. 12A shows a state in which the glass substrate W is placed on a placement unit (wire 23) at a certain stage. Glass substrates W are all No. Therefore, all of the roller conveyor units are driven for unloading. FIG. 12-2 shows the operation in the middle of carrying when the glass substrate W is carried out from the carry-in / out port on the + X direction side, and FIG. 12-3 shows the way in the middle of carrying the glass substrate W from the carry-in / out port on the -X direction side. Shows the operation. The rotation direction of the rollers of the roller conveyor unit is determined according to the conveying direction. The roller conveyor units through which the glass substrate W has passed can be stopped in sequence. For example, in the case of FIG. The roller conveyor units 11, 21, 31, and 41 can stop driving.

  FIG. 13A and FIG. 13B are operation explanatory diagrams when carrying out the glass substrates W1 and W2 that are ½ the size of the glass substrate W shown in FIG. In FIG. 13A, FIG. 13-1 shows a state in which two glass substrates W1 and W2 are placed on a placement unit (wire 23) at a certain stage, and the glass substrate W1 is the left half of the placement unit. The glass substrate W2 is located at the right half position of the placement portion. For this reason, the glass substrate W1 is No. 11-13, no. 21-23, no. 31-33, no. The glass substrate W2 is No. 41 on the roller conveyor units 41 to 43. 14-16, no. 24-26, no. 34-36, no. It is located on each of the roller conveyor units 44 to 46.

  As a carry-out method, either the glass substrate W1 or W2 is carried out separately at the + X direction side carry-in / out port and the −X direction side carry-in / out port (reverse direction conveyance), or the glass substrates W1 and W2 are either one. And a method of carrying out from the loading / unloading port (same direction conveyance). The glass substrates W1 and W2 are broadly divided into a method of carrying out the substrates one by one (sequential conveyance) and a method of carrying out the glass substrates W1 and W2 at the same time (simultaneous conveyance). These carry-out methods can be arbitrarily combined.

  In FIG. 13A, FIGS. 13-2 and 13-3 are diagrams illustrating an example of sequential conveyance in reverse direction conveyance. In this case, first, one of the glass substrates W1 and W2 is transported in any direction (+ X direction, -X direction). In the example of FIG. 11-13, no. 21-23, no. 31-33, no. The roller conveyor units 41 to 43 are selected as driving targets, and the glass substrate W1 is carried out in the −X direction. When the glass substrate W1 has been unloaded, as shown in the example of FIG. 14-16, no. 24-26, no. 34-36, no. The roller conveyor units 44 to 46 are selected as driving targets, and the glass substrate W2 is carried out in the + X direction. In case of simultaneous conveyance, no. 11-13, no. 21-23, no. 31-33, no. No. 41 to 43 roller conveyor units, 14-16, no. 24-26, no. 34-36, no. The roller conveyor units 44 to 46 are simultaneously driven and the rotation direction of the rollers is reversed.

  In FIG. 13B, FIGS. 13-4 and 13-5 are diagrams illustrating an example of sequential conveyance in the same direction. In this case, first, one of the glass substrates W1 and W2 is transported in any direction (+ X direction, -X direction). In the example of FIG. 11-13, no. 21-23, no. 31-33, no. The roller conveyor units 41 to 43 are selected as driving targets, and the glass substrate W1 is carried out in the −X direction. When the glass substrate W1 is unloaded, as shown in the example of FIG. 14-16, no. 24-26, no. 34-36, no. No. 44 to 46 roller conveyor units; 11-13, no. 21-23, no. 31-33, no. The roller conveyor units 41 to 43, that is, all the roller conveyor units are selected as driving targets, and the glass substrate W2 is also carried out in the -X direction. In case of simultaneous conveyance, no. 11-13, no. 21-23, no. 31-33, no. No. 41 to 43 roller conveyor units, 14-16, no. 24-26, no. 34-36, no. The roller conveyor units 44 to 46 are simultaneously driven, and the rotation directions of the rollers are made the same.

  FIG. 14A to FIG. 14C are operation explanatory diagrams when carrying out the glass substrates W1 to W4 having a quarter size of the glass substrate W shown in FIG. In FIG. 14A, FIG. 14-1 shows a state in which four glass substrates W1 to W4 are placed on a placement unit (wire 23) at a certain stage, and the glass substrate W1 is an upper left half of the placement unit. The glass substrate W2 is positioned at the lower left half position of the mounting portion, the glass substrate W3 is positioned at the upper right half position of the mounting portion, and the glass substrate W4 is positioned at the lower right half position of the mounting portion. ing. And the glass substrate W1 is No. 11-13, no. On the roller conveyor units 21 to 23, the glass substrate W2 is No. 31-33, no. On the roller conveyor units 41 to 43, the glass substrate W3 is No. 14-16, no. The glass substrate W4 is No. 24 on the roller conveyor units 24 to 26. 34-36, no. It is located on each of the roller conveyor units 44 to 46.

  As the carry-out method, there are the above-described reverse direction conveyance, same direction conveyance, sequential conveyance, and simultaneous conveyance. The simultaneous conveyance is further classified into a case where all four sheets are conveyed simultaneously and a case where two sheets or three sheets are conveyed simultaneously.

  In FIG. 14A, FIGS. 14-2 and 14-3 are diagrams illustrating an example of simultaneous conveyance of two sheets by reverse conveyance. In the case of this example, first, as shown in FIG. 14B, the glass substrate W1 is carried out from the carry-in / out port in the −X direction, and the glass substrate W4 is carried out from the carry-in / out port in the + X direction. For this reason, no. 11-13, no. The roller conveyor units Nos. 21 to 23 are selected as the objects to be driven, and the glass substrate W1 is moved in the -X direction. 34-36, no. The roller conveyor units 44 to 46 are selected as driving targets, and the glass substrates W4 are respectively carried out in the + X direction.

  Subsequently, as shown in FIG. 31-33, no. The roller conveyor units Nos. 41 to 43 are selected as the objects to be driven, and the glass substrate W2 is No. 14-16, no. The 24-26 roller conveyor units are selected as driving objects, and the glass substrates W3 are each carried out in the + X direction.

  In FIG. 14B, FIG. 14-4 is a diagram showing an example of simultaneous conveyance of four sheets in reverse direction conveyance. In this example, all roller conveyor units are selected as driving targets, and No. 11-13, no. 21-23, no. 31-33, no. No. 41 to 43 roller conveyor units, 14-16, no. 24-26, no. 34-36, no. With the roller conveyor units 44 to 46, the rollers are rotationally driven in the reverse direction. The glass substrates W1 and W2 are carried out from the carry-in / out port on the −X direction side, and the glass substrates W3 and W4 are carried out from the carry-in / out port on the + X direction side.

  14B of FIG. 14B and FIG. 14-6 of FIG. 14C are diagrams showing examples of sequential conveyance in the same direction. In this example, the glass substrate W3 → the glass substrate W4 → the glass substrate W1 → the glass substrate W2 is unloaded from the loading / unloading port on the + X direction side, and the unloading of the glass substrate W2 is started during the unloading of the glass substrate W1. First of all, 14-16, no. 24-26 roller conveyor units are selected as driving targets, and the glass substrate W3 is carried out. Next, no. 34-36, no. The roller conveyor units 44 to 46 are selected as driving targets, and the glass substrate W4 is carried out. Subsequently, no. 11-13, no. No. 21 to 23 roller conveyor units; 14-16, no. 24-26 roller conveyor units are selected as driving targets, and the glass substrate W1 is carried out. In the middle of carrying out, No. 31-33, no. No. 41 to 43 roller conveyor units, 34-36, no. The roller conveyor units 44 to 46 are selected as driving targets, and the glass substrate W2 is carried out.

  14C of FIG. 14C is a diagram illustrating an example of the simultaneous conveyance of two sheets in the same direction. In this example, the glass substrates W3 and W4 => glass substrates W1 and W2 are unloaded from the loading / unloading port on the + X direction side. First of all, 14-16, no. 24-26 roller conveyor units; 34-36, no. The roller conveyor units 44 to 46 are selected as driving targets, and the glass substrates W3 and W4 are carried out simultaneously. Subsequently, all the roller conveyor units are selected as driving targets, and the glass substrates W1 and W2 are carried out simultaneously.

  FIG. 15A and FIG. 15B are operation explanatory diagrams when carrying out the glass substrates W1 to W6 having a size 1/6 of the glass substrate W shown in FIG. In FIG. 15A, FIG. 15-1 shows a state where six glass substrates W1 to W6 are placed on a placement unit (wire 23) at a certain stage, and the glass substrate W1 is an upper left stage of the placement unit. The glass substrate W2 is in the middle left position of the mounting portion, the glass substrate W3 is in the lower left position of the mounting portion, the glass substrate W4 is in the upper right position of the mounting portion, and the glass substrate W5 is The glass substrate W6 is located at the lower right position of the placement section at the position of the middle right position of the placement section.

  And the glass substrate W1 is No. The glass substrate W2 is No. 11 on the roller conveyor units Nos. 11 to 13. On the roller conveyor units Nos. 21 to 23 and 31 to 33, the glass substrate W3 is No. On the roller conveyor units 41 to 43, the glass substrate W4 is No. The glass substrate W5 is No. 14 on the roller conveyor units 14 to 16. On the roller conveyor units 24 to 26 and 34 to 36, the glass substrate W6 is No. It is located on each of the roller conveyor units 44 to 46.

  As the carry-out method, there are the above-described reverse direction conveyance, same direction conveyance, sequential conveyance, and simultaneous conveyance. The simultaneous conveyance is further classified into a case where all six sheets are conveyed simultaneously and a case where two to five sheets are conveyed simultaneously.

  In FIG. 15A, FIG. 15B is a diagram illustrating an example of two-sheet simultaneous conveyance in the reverse direction conveyance. In the case of this example, first, the glass substrates W1 and W4, the glass substrates W2 and W5, and finally the glass substrates W3 and W6 are transported simultaneously in the opposite direction. For this reason, first of all, No. 11-13 roller conveyor units, 14 to 16 roller conveyor units are selected as driving targets, and the glass substrate W1 is unloaded in the −X direction and the glass substrate W4 is unloaded in the + X direction, respectively. Next, no. 21-23 and No. No. 31-33 roller conveyor units, 24-26 and no. The roller conveyor units 34 to 36 are selected as driving targets, and the glass substrate W2 is unloaded in the −X direction and the glass substrate W5 is unloaded in the + X direction. Finally, no. No. 41 to 43 roller conveyor units, The roller conveyor units 44 to 46 are selected as driving targets, and the glass substrate W3 is unloaded in the −X direction, and the glass substrate W6 is unloaded in the + X direction.

  In FIG. 15B, FIG. 15C is a diagram illustrating an example of simultaneous conveyance of six sheets by reverse conveyance. In this example, the glass substrates W1 to W3 are simultaneously carried out in the -X direction, and the glass substrates W4 to W6 are carried out simultaneously in the + X direction. For this reason, all roller conveyor units are selected as driving targets, and No. 11-13, no. 21-23, no. 31-33, no. No. 41 to 43 roller conveyor units, 14-16, no. 24-26, no. 34-36, no. With the roller conveyor units 44 to 46, the rollers are rotationally driven in the reverse direction.

  In FIG. 15B, FIG. 15-4 is a diagram showing an example of sequential conveyance in the same direction. In this example, the glass substrate W4⇒the glass substrate W5⇒the glass substrate W6⇒the glass substrate W1⇒the glass substrate W2⇒the glass substrate W3 are taken out from the loading / unloading port on the + X direction side, and the previous glass substrate is being carried out. Unloading of the next glass substrate has started.

  First of all, 14 to 16 roller conveyor units are selected as driving targets, and the glass substrate W4 is carried out. Next, no. 24-26 and no. The roller conveyor units 34 to 36 are selected as driving targets, and the glass substrate W5 is carried out. Next, no. The roller conveyor units 44 to 46 are selected as driving targets, and the glass substrate W6 is carried out. Subsequently, no. The roller conveyor units 11 to 16 are selected as driving targets, and the glass substrate W1 is carried out. Next, no. 21-26 and no. The roller conveyor units 31 to 36 are selected as objects to be driven, and the glass substrate W2 is carried out. Finally, no. The roller conveyor units 41 to 46 are selected as driving targets, and the glass substrate W3 is carried out.

  In FIG. 15B, FIG. 15-5 is a diagram illustrating an example of three-sheet simultaneous conveyance in the same direction conveyance. In this example, the glass substrates W4 to 6 => glass substrates W1 to W3 are unloaded from the loading / unloading port on the + X direction side. First of all, 14-16, no. 24-26, no. 34-36, no. The roller conveyor units 44 to 46 are selected as driving targets, and the glass substrates W4 to W6 are simultaneously conveyed. Subsequently, all the roller conveyor units are selected as driving targets, and the glass substrates W1 to W3 are simultaneously conveyed.

  Next, in each of the above examples, an example in which a glass substrate having the same size is carried out for each stage of the placement unit has been shown. You can also FIG. 16 is a diagram showing an example in which glass substrates of different sizes are placed on one stage of the placement unit, FIGS. 16-1 to 16-3 show two types, and FIG. 16-4 shows three types. Show.

  In the example of FIG. 16A, the glass substrates W1 to W3 having a size 1/6 of the glass substrate W shown in FIG. 12A and the size of 1/4 of the glass substrate W shown in FIG. Glass substrates W4 and W6 are mixedly placed on a single stage placement portion. In the example of FIG. 16-2, the glass substrates W1 to W3 having a size 1/6 of the glass substrate W illustrated in FIG. 12A and the size of 1/2 of the glass substrate W illustrated in FIG. Glass substrates W4 are placed together in a single stage. In the example of FIG. 16-3, a glass substrate W1 having a size that is 1/2 of the glass substrate W illustrated in FIG. 12A and a glass having a size that is 1/4 of the glass substrate W illustrated in FIG. The substrates W2 and W3 are mixedly placed on the one-stage placement portion. In the example of FIG. 16-4, a glass substrate W1 having a size of 1/6 of the glass substrate W shown in FIG. 12A and a glass having a size of 1/4 of the glass substrate W shown in FIG. A substrate W2 and a glass substrate W3 that is ½ the size of the glass substrate W shown in FIG. 12A are placed together in a single stage.

  The carry-out operation when the glass substrates having different sizes are placed on each stage of the placement portion will be described with reference to FIGS. 17A to 17C. Here, the case of FIG. 16-1 will be described as an example.

  In FIG. 17A, as shown in FIG. The glass substrate W2 is No. 11 on the roller conveyor units Nos. 11 to 13. 21-23, no. The glass substrate W3 is No. 31 on the roller conveyor units 31 to 33. On the roller conveyor units 41 to 43, the glass substrate W4 is No. 14-16, no. The glass substrate W5 is No. 24 on the roller conveyor units 24 to 26. 34-36, no. It is located on each of the roller conveyor units 44 to 46.

  As the carry-out method, there are the above-described reverse direction conveyance, same direction conveyance, sequential conveyance, and simultaneous conveyance. The simultaneous conveyance is further classified into a case where all five sheets are conveyed simultaneously and a case where two to four sheets are conveyed simultaneously.

  In FIG. 17A, FIG. 17-2 is a diagram illustrating an example of sequential conveyance in reverse direction conveyance. In this example, the glass substrates W1 to W3 are sequentially conveyed in the −X direction, and the glass substrates W4 and W5 are sequentially conveyed in the + X direction. As for the roller conveyor unit selected as the drive target, the glass substrate W1 is No. 11 to 13 and the glass substrate W2 is No. 21-23, no. 31-33 and the glass substrate W3 are No.3. 41-43 and the glass substrate W4 are No.4. 14-16, no. 24-26, the glass substrate W5 is No. 34-36, no. 44-46.

  In FIG. 17B, FIG. 17-3 is a diagram illustrating an example of simultaneous conveyance in reverse direction conveyance. In this example, the glass substrates W1 to W3 are simultaneously conveyed in the −X direction, and the glass substrates W4 and W5 are simultaneously conveyed in the + X direction. As for the roller conveyor unit selected as the drive target, the glass substrate W1 is No. 11 to 13 and the glass substrate W2 is No. 21-23, no. 31-33 and the glass substrate W3 are No.3. 41-43 and the glass substrate W4 are No.4. 14-16, no. 24-26, the glass substrate W5 is No. 34-36, no. 44-46.

  In FIG. 17B, FIG. 17-4 is a diagram illustrating an example of sequential conveyance in the same direction. In this example, glass substrate W4⇒glass substrate W5⇒glass substrate W1⇒glass substrate W2⇒glass substrate W3 is taken out from the loading / unloading exit on the + X direction side, and the next glass substrate is taken out while the previous glass substrate is being carried out. Unloading has started.

  First of all, The roller conveyor units 14-16 and 24-26 are selected as driving targets, and the glass substrate W4 is carried out. Next, no. 34-36 and no. The roller conveyor units 44 to 46 are selected as driving targets, and the glass substrate W5 is carried out. Subsequently, no. The roller conveyor units 11 to 16 are selected as driving targets, and the glass substrate W1 is carried out. Next, no. 21-26 and no. The roller conveyor units 31 to 36 are selected as objects to be driven, and the glass substrate W2 is carried out. Finally, no. The roller conveyor units 41 to 46 are selected as driving targets, and the glass substrate W3 is carried out.

  In FIG. 17C, FIG. 17-5 is a diagram showing an example of simultaneous conveyance of two or three sheets in the same direction. In the case of this example, the glass substrates W4 and 5 => glass substrates W1 to W3 are sequentially carried out from the carry-in / out port on the + X direction side. First of all, 14-16, no. 24-26, 34-36, no. The roller conveyor units 44 to 46 are selected as driving targets, and the glass substrates W4 and W5 are simultaneously conveyed. Subsequently, all the roller conveyor units are selected as driving targets, and the glass substrates W1 to W3 are simultaneously conveyed.

  In FIG. 17C, FIG. 17-6 is a diagram illustrating an example of four-sheet simultaneous conveyance in reverse direction conveyance. In the case of this example, the glass substrates W1 to 3 and W5 are unloaded from the loading / unloading port on the −X direction side and the glass substrate W4 is unloaded from the loading / unloading port on the + X direction side in the order of the glass substrates W1 to W4 → glass substrate W5. First of all, 11-13, no. 21-23, no. 31-33 and no. No. 41 to 43 roller conveyor units, 14-16, no. 24-26 roller conveyor units are selected as driving objects, and the glass substrates W1 to W4 are conveyed. Subsequently, no. 31-36 and no. The roller conveyor units 41 to 46 are selected as driving objects, and the glass substrate W5 is conveyed.

  Thus, in this embodiment, each roller conveyor is based on the size of the glass substrate to be transported, the position on the mounting portion that is the transport source of the glass substrate, and the loading / unloading port through which the glass substrate passes. By selectively driving the units 11 and 12, glass substrates of various sizes can be carried out, and various methods can be selected as the conveying method. Even when the glass substrate is carried into the storage cassette 20, if the size of the glass substrate, the position on the mounting portion serving as the transfer destination, and the carry-in / out port are determined, the roller conveyor units 11 and 12 through which the glass substrate should pass are determined. By determining and selectively driving the determined roller conveyor units 11 and 12, it is possible to carry in glass substrates of various sizes.

  Next, a case where the glass substrate is carried out and carried in at the same time will be described. 18A and 18B are operation explanatory views when carrying out and carrying in the glass substrate at the same time. Here, a glass substrate having a size 1/6 of the glass substrate W shown in FIG. 12A will be described as an example.

  In FIG. 18A, FIG. 18-1 shows the glass substrate on which the glass substrates W4 to W6 are placed on the placement portion and are then carried out of the storage cassette 20, and the glass substrates W1 to W3 are now in the storage cassette 20 The mode carried in to the position of the left half of is shown.

  The glass substrates W4 to W6 are respectively No. 14-16, no. 24-26 and no. 34-36, no. It is mounted on the roller conveyor units 44-46. The glass substrates W1 to W3 are respectively No. 11-13, no. 21-23 and No. 31-33, no. It is carried onto the roller conveyor units 41-43.

  First, the case of carrying by simultaneous conveyance will be described. All roller conveyor units are selected as driving targets and are driven to rotate in the same direction. In FIG. 18A, FIG. 18-2 shows a state in which the glass substrates W4 to W6 are unloaded and the glass substrates W1 to W3 are unloaded by conveying the glass substrate in the + X direction. In FIG. 18A, FIG. 18-3 shows a state after the conveyance, in which the glass substrates W4 to W6 are carried out of the storage cassette 20, and the glass substrates W1 to W3 are carried into the storage cassette 20.

  18B, FIG. 18-4 and FIG. 18-5 show another example of operation when carrying out and carrying in the glass substrate at the same time. The glass substrates W1, W2, W4 and W6 are carried out, and the glass substrate is taken out. W3 is carried into the lower left stage, and the glass substrate W5 is carried into the middle right stage.

  In the case of this example, in order to carry out the glass substrates W1, W2, W4 and W6, no. 11-13, no. 21-23 and No. 31-33, no. 14-16, no. 44 to 46 roller conveyor units are selected as driving targets. Further, in order to carry in the glass substrates W3 and W5, no. 41-43, no. 24-26 and no. 34 to 36 roller conveyor units are selected as driving targets.

  The glass substrates W1, W2, and W5 are transported in the −X direction, and the glass substrates W3, W4, and W6 are transported in the + X direction. Thereby, the glass substrates W1 and W2 are carried out in the −X direction, and the glass substrates W4 and W6 are carried out in the + X direction. Further, the glass substrates W3 and W5 are loaded into the lower left stage and the right middle stage, respectively.

  As described above, in this embodiment, the conveying device 10 is configured by arranging a plurality of independently driven roller conveyor units 11 and 12 in a plane, and the plurality of roller conveyor units 11 and 12 are configured to convey. Glass substrates of different sizes because they are selectively driven on the basis of the size of the glass substrate to be moved and the position on the mounting portion that is the transporting source (unloading) or transporting destination (loading) of the glass substrate Can be carried in and out. Therefore, a plurality of types of workpieces can be handled. In addition, a plurality of small-sized works can be placed on each placement portion of the storage cassette 20 as shown in FIG. 4A to FIG. The storage efficiency of the glass substrate of the cassette 20 can be increased.

Claims (6)

A conveying means for supporting the rectangular plate-like workpiece from the lower surface side in a substantially horizontal posture and conveying the workpiece in a substantially horizontal direction;
A plurality of mounting portions that are formed in multiple stages in the vertical direction, have openings through which the transfer means can pass, and on which the workpiece is mounted in a substantially horizontal posture, and side portions that form a loading / unloading port of the workpiece, A bottom portion forming an entrance through which the transfer means can pass, and a storage cassette disposed above the transfer means,
Elevating means for moving the storage cassette and the conveying means up and down relatively up and down,
The conveying means is caused to enter the storage cassette by the lifting and lowering operation by the lifting means, and the work on the placement section is moved to the outside of the storage cassette by the transport means and from the outside of the storage cassette to the placement section. In the workpiece loading / unloading system for loading and unloading the workpiece,
The conveying means is
A plurality of transport units that are driven independently are arranged in a plane,
The plurality of transport units are
A workpiece loading / unloading system which is selectively driven based on the size of the workpiece to be conveyed and the position on the placement unit which is the conveyance source or conveyance destination of the workpiece. The storage cassette is
While having the other side part that faces the side part that forms the carry-in / out port, the other side part also forms the carry-in / out port,
The transport means is capable of transporting the workpiece through the loading / unloading ports of the side part and the other side part,
The plurality of transport units are
It is selectively driven on the basis of the size of the workpiece to be transferred, the position on the placement unit which is the transfer source or transfer destination of the workpiece, and the loading / unloading port through which the workpiece passes. The workpiece carry-in / out system according to claim 1. The plurality of transport units are
A first transport unit;
A width in a direction orthogonal to the conveyance direction of the workpiece includes a second conveyance unit in which the width of the first conveyance unit is substantially half,
The first transport unit and the second transport unit are:
2. The two second transport units are disposed so as to be positioned between the two first transport units in a direction orthogonal to the transport direction of the workpiece. Work loading / unloading system. The elevating means elevates and lowers the storage cassette, and the conveying means is fixedly disposed.
The storage cassette has a rectangular parallelepiped shape,
The lifting means is
2. The workpiece according to claim 1, comprising a pair of elevating units respectively disposed on opposite sides of the storage cassette so as to sandwich the storage cassette and supporting the storage cassette in a cantilever manner. Carry-in / out system.   5. The work loading / unloading system according to claim 4, wherein the elevating unit includes detection means for detecting a shift in the elevating height of each other. A conveying device that supports a rectangular plate-shaped workpiece from the lower surface side in a substantially horizontal posture and conveys the workpiece in a substantially horizontal direction;
A plurality of mounting portions that are formed in multiple stages in the vertical direction and have openings through which the transfer device can pass and the workpieces are mounted in a substantially horizontal posture, and side portions that form loading / unloading ports of the workpieces, A bottom portion that forms an entrance through which the transport device can pass, and a storage cassette disposed above the transport device,
Elevating means for elevating the storage cassette and the transport device up and down relatively,
The conveying device is caused to enter the storage cassette by the lifting and lowering operation by the lifting means, and the work on the placement unit is moved to the outside of the storage cassette and from the outside of the storage cassette to the placement unit by the transport device. In the transfer device constituting the workpiece loading / unloading system for loading / unloading the workpiece,
A plurality of transport units that are driven independently are arranged in a plane,
The plurality of transport units are
A transport apparatus that is selectively driven based on the size of the work to be transported and the position on the placement unit that is the transport source or transport destination of the work.

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