KR20060009804A - Apparatus for inspecting liquid crystal panel - Google Patents

Abstract

The liquid crystal panel inspection apparatus according to the present invention uses a pusher roller having a tapered surface to prevent the edge of the liquid crystal panel from being lifted up so that the liquid crystal panel can be reliably set on the work table. When the pusher roller 86 is moved in the direction of the arrow 134 by the air cylinder, the tapered surface 112 of the pusher roller 86 is connected to the third side 20 of the liquid crystal panel 10 on the work table 50. And press the third side 20 in the right direction and in the downward direction. Then, the 1st side 16 of the liquid crystal panel 10 contacts the stopper roller 118 of the 1st stopper 62, and the positioning of the liquid crystal panel 10 in the X direction is completed. In the same manner, the liquid crystal panel can be positioned in the Y direction. By using the pusher roller 86 provided with the taper surface 112, lifting of the 3rd side 20 and the 4th side of a liquid crystal panel can be prevented.

LCD panel, inspection device, tapered surface, pusher roller, work table

Description

Liquid crystal panel inspection device {Apparatus For Inspecting Liquid Crystal Panel}

BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a plan view of principal parts of an embodiment of a liquid crystal panel inspection device of the present invention.

FIG. 2 is a cross-sectional view taken along the line 2-2 of FIG.

3 is a plan view of the work table and the pusher device support frame.

4 is a cross-sectional view taken along the line 4-4 of FIG.

5 is a plan view of the first pusher device.

6 is a perspective view of the first pusher device.

7 is a cross-sectional view taken along line 7-7 of FIG.

8 is an enlarged cross-sectional view around the pusher roller.

9 is a sectional view taken along line 9-9 of FIG.

Fig. 10 is a front sectional view cut in a cross section including a pusher roller and a first stopper of the first pusher device.

FIG. 11 is a plan view when the first pusher device is in the state of FIG.

Fig. 12 is a front sectional view as in Fig. 10 when the setting operation of the liquid crystal panel is completed.

Fig. 13 is an enlarged sectional view showing a modification of the stopper roller.

Description of the main symbols in the drawings

10: liquid crystal panel 12: first probe base

14: second probe base 16: first side

18: second side 20: third side

22: fourth side 24: gate side probe unit

26: probe block 28: probe

30: data side probe unit 32: first camera

34: second camera 36: third camera

38: probe stage 40: inspection stage

42: X drive wheel 44: Y drive wheel

46: Z drive table 48: θ rotating table

50: work table 52: pusher device support frame

54: first support part 56: second support part

58: third support part 60: fourth support part

62: first stopper 64: second stopper

66: first recessed portion 68: second recessed portion

70: first pusher device 72: second pusher device

74: backlight 76: diffuser plate

78: work table base 80: rail

82: slider 84: pusher support

86: pusher roller 88: air cylinder

90: piston 92: arrow

94: slit plate 96: slit

98: bracket 100: light emitting element

102: light receiving element 104: photo-coupler

106: mounting shaft 108: bearing

110: collar 112: tapered surface

114: right direction 116: downward direction

118: stopper roller 120: mounting shaft

122: bearing 124: collar

126: upper glass plate 128: lower glass plate

130, 132: Chamfer 132: Arrows

134: arrow 136: arrow

138: stopper roller

Field of invention

The present invention relates to an inspection apparatus for inspecting the liquid crystal panel by contacting a probe with an electrode of the liquid crystal panel, and more particularly, to a liquid crystal panel inspection apparatus characterized by a structure for setting the liquid crystal panel on a work stage.

Background of the Invention

As a conventional liquid crystal panel inspection apparatus, what is described in Japanese Patent Laid-Open No. 11-14956 is known.

The conventional liquid crystal panel inspection apparatus discloses setting a liquid crystal panel at a predetermined position on a work table by using a stopper, a pressing device, and a vacuum adsorption device. In the above prior art, the liquid crystal panel is placed on the work table, and then the edge of the liquid crystal panel is pressed on the stopper by using the pressing device in the X direction. Thereby, the position of the X direction of a liquid crystal panel with respect to a work table is determined. Also in the Y direction, the position of the Y direction of a liquid crystal panel is determined using the same presser and stopper. A negative pressure is introduced into the suction groove of the work table, and the liquid crystal panel is sucked and fixed to the work table.

With the above-described liquid crystal panel inspection apparatus, the setting operation of the liquid crystal panel may not be completed. This point is described below. Since the central part of the liquid crystal panel needs to be illuminated from the back by the backlight, the backlight and the diffusion plate are arranged in the central part of the work table. Therefore, only the periphery of the liquid crystal panel is fixed to the work table, and the center portion is in the air. When the liquid crystal panel becomes large in size, the center portion of the liquid crystal panel is slightly stretched due to its own weight, and the edge of the liquid crystal panel is slightly lifted from the work table due to the influence thereof.

In the vacuum adsorption method, it detects that the pressure in the adsorption | suction groove of a work table fell below a predetermined value, and has signaled the adsorption completion. If the air leaks from the gap between the work table and the edge of the liquid crystal panel (air flows into the adsorption groove), the pressure in the adsorption groove does not drop below a predetermined value at any time, and the adsorption completion signal is not emitted. . If the edge of the liquid crystal panel is raised, the adsorption completion signal may not be emitted, in which case the setting operation of the liquid crystal panel is not completed. Moreover, if the edge of a liquid crystal panel is raised, inconvenience may arise when making a probe contact the electrode arrange | positioned along the side of a liquid crystal panel.

SUMMARY OF THE INVENTION The present invention has been made to solve the above problems, and an object thereof is to provide a liquid crystal panel inspection apparatus which prevents the edges of the liquid crystal panel from lifting and reliably set the liquid crystal panel on the work table.

The above and other objects of the present invention can be achieved by the present invention described below. Hereinafter, the content of the present invention will be described in detail.

The liquid crystal panel inspection device according to the present invention has the following structures (a) to (bar). (A) a first side, a second side adjacent to each other on the first side, a third side facing the first side, a fourth side facing the second side, and the third side A work table for supporting a rectangular flat panel display panel having a plurality of first electrodes arranged along and a plurality of second electrodes arranged along the fourth side. (B) A probe stage having a plurality of probes in contact with the first electrode and the second electrode. (C) A first stopper capable of contacting the first side. (D) A second stopper capable of contacting the second side. (E) A first pusher device capable of pushing down the third side in a direction toward the first stopper and simultaneously pushing down the third side in close contact with the work table. (F) A second pusher device capable of pushing down the fourth side in a direction toward the second stopper and simultaneously pushing down the fourth side in close contact with the work table.

The liquid crystal panel to which the present invention is applied is a rectangular liquid crystal panel having four sides as described above. And a plurality of electrodes are arranged along at least the third and fourth sides. The two pusher devices can push down the third side or the fourth side of the liquid crystal panel in the direction toward the first stopper or the second stopper and also in the direction in close contact with the work table. Thereby, lifting of the 3rd side and 4th side in which an electrode was formed can be prevented.

The liquid crystal panel inspection device of the present invention can further be provided with the following features. (G) The first stopper includes a first stopper roller free to rotate around a rotation centerline perpendicular to the surface of the work table, and its outer circumferential surface is in contact with the first side. (H) The said 2nd stopper is equipped with the 2nd stopper roller which can be rotated around the rotation center line perpendicular | vertical to the surface of the said work table, and the outer peripheral surface can contact the said 2nd edge | side. (I) The first pusher device includes a first pusher roller free to rotate around a rotation centerline perpendicular to the surface of the work table, wherein the first pusher roller has the liquid crystal panel on the surface of the work table. A first taper surface is tapered in the pressing direction, and the first taper surface is in contact with the third side. (D) The second pusher device includes a second pusher roller that is free to rotate around a rotation centerline perpendicular to the surface of the work table, and the second pusher roller has the liquid crystal panel on the surface of the work table. A second tapered surface is tapered in the pressing direction, and the second tapered surface is in contact with the fourth side.

The liquid crystal panel inspection device of the present invention can further have the following features (k) and (ta). (K) The first pusher device includes a drive mechanism for advancing and retracting the first pusher roller in a direction parallel to the second side, and a detection device for detecting that the first pusher roller has reached a predetermined pressing position. Equipped. (2) The second pusher device includes a drive mechanism for advancing and retracting the second pusher roller in a direction parallel to the first side, and a detection device for detecting that the second pusher roller has reached a predetermined pressing position. Equipped.

By having such a detection apparatus, completion of the setting operation of a liquid crystal panel can be judged based on the position of a pusher roller. Therefore, it is possible to avoid the inconvenience that the completion signal does not come out due to the leakage of the negative pressure without ending the set operation by the pressure in the suction groove.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a plan view of principal parts of an embodiment of a liquid crystal panel inspection device of the present invention. The said liquid crystal panel test | inspection apparatus is equipped with the probe stage with a probe, and the test | inspection stage which supports a liquid crystal panel, and an inspection stage is under a probe stage. 1 shows the main part of the probe stage from above. The liquid crystal panel 10 lying on the inspection stage is shown. The probe stage has a first probe base 12 and a second probe base 14. The first probe base 12 extends in the Y direction, and the second probe base 14 extends in the X direction. The X and Y directions are perpendicular to each other. The liquid crystal panel 10 has a rectangular shape, one short side of which is the first side 16, a second side 18 which is adjacent to each other, a side facing the first side and a third side 20, The side facing the second side 18 shall be called the fourth side 22. In the liquid crystal panel 10, a gate electrode (corresponding to the first electrode in the present invention) is arranged along the third side 20, and a data electrode (in the present invention) along the fourth side 22. Corresponds to the second electrode).

The gate probe unit 24 is mounted on the first probe base 12. A plurality of probe blocks 26 are fixed to the gate side probe unit 24. Each probe block 26 is provided with a plurality of probes 28. The data probe unit 30 is mounted on the second probe base 14. A plurality of probe blocks and a probe attached thereto are also provided in the data probe unit 30.

In the gate side probe unit 24, the 1st camera 32 and the 2nd camera 34 are arrange | positioned in the vicinity of the both ends. The third camera 36 is disposed in the data side probe unit 30 near the end portion away from the gate side probe unit 24. Those three cameras are used to align the liquid crystal panel.

FIG. 2 is a cross-sectional view taken along the line 2-2 of FIG. An inspection stage 40 is disposed below the probe stage 38. The inspection stage 40 is equipped with the X drive stand 42, the Y drive stand 44, the Z drive stand 46, the (theta) turntable 48, the work table 50, and the pusher apparatus support frame 52. As shown in FIG. The upper surface of the work table 50 can support the liquid crystal panel 10 as described later. The X drive table 42 may move the upper surface of the inspection stage in the X direction (the direction perpendicular to the ground of FIG. 2). The Y drive stage 44 can move the upper surface of the inspection stage in the Y direction. The Z driving base 46 can move the upper surface of the inspection stage in the Z direction (up and down direction). The θ rotary table 48 can rotate the upper surface of the inspection stage about the Z axis (the axis extending in the vertical direction). The backlight 74 is arrange | positioned inside the work table 50, and the diffuser plate 76 is arrange | positioned above it.

3 is a plan view of the work table 50 and the pusher device support frame 52. The work table 50 is a rectangular hollow frame, and can support the liquid crystal panel 10 at the upper end of its periphery. The upper end of the work table 50 is comprised by the 1st-4th support part. Two first stoppers 62 are provided on the first support portion 54 (corresponding to the first side 16 of the liquid crystal panel) of the work table 50. Two second stoppers 64 are also provided in the second support part 56 (corresponding to the second side 18 of the liquid crystal panel). Two first recesses 66 are formed in the third support portion 58 (corresponding to the third side 20 of the liquid crystal panel). Two second recesses 68 are also formed in the fourth support part 60 (corresponding to the fourth side 22 of the liquid crystal panel).

The pusher device support frame 52 is a rectangular hollow frame surrounding the work table 50. In the said pusher apparatus support frame 52, two 1st pusher apparatus 70 is provided in the position which faces the 2nd 1st recessed part 66 of the work table 50. As shown in FIG. In addition, two second pusher devices 72 are provided at positions facing the two second recesses 68 of the work table 50.

4 is a cross-sectional view taken along the line 4-4 of FIG. 3, showing the structure of the first pusher device 70. As shown in FIG. 5 is a plan view of the first pusher device 70, and FIG. 6 is a perspective view thereof. 7 is a sectional view taken along line 7-7 of FIG. Hereinafter, the structure of the first pusher device 70 will be described with reference to FIGS. 4 to 7.

In Fig. 4, the work table base 78 is fixed on the swivel table 48 (see Fig. 2), and the work table 50 and the pusher device support frame 52 are fixed thereon. The first recessed portion 66 is formed in the third support portion 58 of the work table 50. The first pusher device 70 is disposed to face the first recess 66. The diffusion plate 76 is fixed to the work table 50. The surface of the work table 50 can support the liquid crystal panel 10, and the liquid crystal panel 10 is located above the diffusion plate 76. The rail 80 is fixed to the pusher device support frame 52. A slider 82 is slidably coupled to the rail 80. The pusher support 84 is fixed to the upper surface of the slider 82. The pusher roller 86 is rotatably provided in the upper surface near one end (right end of the figure) of the pusher support 84. The piston 90 of the air cylinder 88 is fixed to the other end of the pusher support 84. The air cylinder 88 corresponds to the drive mechanism in the present invention. When the piston 90 of the air cylinder 88 is expanded and contracted, the pusher support 84 and the slider 82 advance and retreat along the rail 80 in the direction of the arrow 92 (ie, the X direction).

5, the slit plate 94 is fixed to the side of the pusher support 84. As shown in FIG. The slit plate 94 is composed of a horizontal plate and protrudes horizontally in a direction perpendicular to the advancing direction (the left and right direction in FIG. 5, that is, the X direction) of the pusher support 84 (that is, the Y direction). . The slit 96 is formed in the center part of the slit board 94 in the X direction. In this embodiment, the opening width of the slit 96 is 0.6 mm. On the other hand, as shown in the perspective view of Fig. 6, the upper surface of the pusher device support frame 52 is fixed to the U-shaped bracket 98, the light emitting element 100 and the light receiving element ( The photocoupler 104 made of 102 is fixed. The light receiving element 102 is positioned below the light emitting element 100. The slit plate 94 is located in the space between the light emitting element 100 and the light receiving element 102. The photocoupler 104 and the slit plate 94 constitute a detection device in the present invention. The detection device detects that the pusher roller 86 has reached a predetermined pressing position. In Fig. 6, the shapes of the rail 80, the pusher support 84, the pusher roller 86, and the air cylinder 88 are clearly shown. Moreover, the 1st recessed part 66 formed in the work table 50 is also shown. The recess 66 prevents the pusher roller 86 and the pusher support 84 from colliding with the work table 50 when the pusher roller 86 contacts the third side of the liquid crystal panel 10. Space is secured.

Returning to Fig. 5, when the slit 96 of the slit plate 94 comes directly under the light emitting element 100, light from the light emitting element 100 is received at the light receiving element, and a signal having a predetermined intensity or more is received. It is output from the device. At this time, the setting completion signal is output from the detection device. 6 shows a state in which the pusher roller 86 is in the set completion position.

7 is a cross-sectional view taken along line 7-7 of FIG. It is clearly shown that the slit plate 94 protrudes horizontally from the pusher support 84 and that the slit plate 94 is located in the space between the light emitting element 100 and the light receiving element 102. Moreover, the engagement state of the rail 80 and the slider 82 is also clearly shown.

8 is an enlarged cross-sectional view around the pusher roller 86. The pusher roller 86 is attached to the pusher support 84 by the installation shaft 106. A rolling bearing 108 is inserted between the outer circumferential surface of the mounting shaft 106 and the inner circumferential surface of the pusher roller 86, and the pusher roller 86 is free to rotate by the bearing 108. The center of rotation of the pusher roller 86 is perpendicular to the surface 51 of the work table 50. The mounting shaft 106 is screwed to the pusher support 84 with the collar 110 interposed therebetween. A tapered surface 112 is formed on the outer surface of the pusher roller 86. The tapered surface 112 is tapered in the direction in which the liquid crystal panel 10 is pressed against the surface 51 of the work table 50 (that is, bottom of FIG. 9). In this embodiment, the tapered surface 112 has an angle of 30 degrees with respect to the horizontal surface in its cross section. The diameter of the thinnest part of the tapered surface 112 is 10 mm, and the diameter of the thickest part is 20 mm. Moreover, the height position of the upper surface of the pusher roller 86 is set to the height within 2 mm from the upper surface of the liquid crystal panel 10.

The liquid crystal panel 10 is comprised from the upper glass plate 126 and the lower glass plate 128, and the liquid crystal is enclosed between them. The thickness of two glass plates is 0.7 mm, for example. The lower glass plate 128 protrudes outward from the upper glass plate 126, and chamfers 130 and 132 are formed above and below the end edge thereof to prevent the lower glass plate 128 from falling out. The chamfer has an angle of 30 degrees with respect to the horizontal plane. Accordingly, the tapered surface 112 of the pusher roller 86 is in contact with the upper chamfer 130 of the lower glass plate 128 of the liquid crystal panel 10. The tapered surface 112 of the pusher roller 86 does not necessarily have to match the inclination angle of the chamfer 130 of the end edge of the liquid crystal panel, but if they match, the tapered surface 112 causes the end edge of the liquid crystal panel 10 to be aligned. Can be contacted well.

FIG. 9 is an enlarged cross sectional view around the first stopper 62, and is a sectional view taken along line 9-9 of FIG. The first stopper 62 is provided with a stopper roller 118. The stopper roller 118 is provided on the bottom surface of the cylindrical recess 53 formed in the work table 50 by the mounting shaft 120. A rolling bearing 122 is inserted between the outer circumferential surface of the installation shaft 120 and the inner circumferential surface of the stopper roller 118, and the stopper roller 118 is free to rotate by the bearing 122. The center of rotation of the stopper roller 118 is perpendicular to the surface 51 of the work table 50. The mounting shaft 120 is screwed to the work table 50 with the collar 124 sandwiched therebetween. The outer circumferential surface of the stopper roller 118 is a cylindrical surface, which can contact the first side 16 of the liquid crystal panel 10. In this embodiment, the diameter of the stopper roller 118 is 10 mm. Moreover, the height position of the upper surface of the pusher roller 86 is set to the height within 2 mm from the upper surface of the liquid crystal panel 10.

Although the structure of the first pusher device 70 and the first stopper 62 has been described so far, the structure of the second pusher device 72 is the same as that of the first pusher device 70, and the second The structure of the stopper 64 is the same as that of the first stopper 62.

Next, the operation of setting the liquid crystal panel on the work table will be described. FIG. 10 is a front sectional view cut into a cross section including the pusher roller and the first stopper 62 of the first pusher device 70 (see FIG. 3), and the center portion of the liquid crystal panel 10 is omitted. In FIG. 10, first, the liquid crystal panel 10 is placed on the work table 50 by a conveyer not shown. At this time, the pusher roller 86 is in the retracted state in the direction of the arrow 132. The tapered surface 112 of the pusher roller 86 is located at a position away from the third side 20 of the liquid crystal panel 10. In addition, the first side 16 of the liquid crystal panel 10 is separated from the stopper roller 118 of the first stopper 62.

11 is a plan view showing the state of the first pusher device 72 at this time. The pusher support 84 is retracted in the direction of the arrow 132, and the slit 96 of the slit plate 94 is shifted leftward from the position immediately below the light emitting element 100. Therefore, the photocoupler is blocked by the slit plate 94 and is in a light shielding state.

Then, as shown in FIG. 12, the pusher roller 86 is moved to the arrow 134 direction by an air cylinder. Then, the tapered surface 112 of the pusher roller 86 is in contact with the third side 20 of the liquid crystal panel 10, and the third side 20 is directed in the right direction (ie, facing the first stopper 62). Direction) and downward (that is, the direction in which the third side 20 is in close contact with the work table 50). In the end, the first side 16 of the liquid crystal panel 10 contacts the stopper roller 118 of the first stopper 62, and the movement of the liquid crystal panel 10 in the X direction stops. At this time, as shown in Fig. 5, the slit 96 of the slit plate 94 comes directly under the light emitting element 100, and the setting completion signal in the X direction is output from the detection device.

Subsequently, setting operation in the Y direction is performed. In FIG. 3, the pusher roller of the second pusher device 72 is pressed down on the fourth side 22 of the liquid crystal panel 10. As a result, the liquid crystal panel 10 moves toward the second stopper 64. At this time, the first side 16 of the liquid crystal panel 10 is already in contact with the stopper roller of the first stopper 62, and the third side 20 of the liquid crystal panel 10 is already the first pusher device. It is in contact with the pusher roller of 70. Since the stopper roller and the pusher roller are free to rotate, the stopper roller and the pusher roller rotate while the first side 16 and the third side 20 of the liquid crystal panel 10 are in contact with the stopper roller and the pusher roller. The liquid crystal panel 10 moves toward the second stopper 64 with little resistance. Then, the 2nd side 18 of the liquid crystal panel 10 contacts the stopper roller of the 2nd stopper 64, and the movement of a Y direction stops. At this time, the setting completion signal in the Y direction is output from the second pusher device 72. When the setting completion signal is output from both the two first pusher devices 70 and the two second pusher devices 72, the setting work on the work table 50 of the liquid crystal panel 10 is completed. When the setting operation is completed, the alignment operation of the liquid crystal panel is executed, and then the probe is brought into contact with the electrodes of the liquid crystal panel to inspect the liquid crystal panel.

In the above description, for convenience of explanation, the setting operation in the Y direction is performed after the setting operation in the X direction, but in the actual apparatus, the setting operation in the X direction is performed after the setting operation in the Y direction. The setting work in the X direction and the setting work in the Y direction may be performed simultaneously. Since both the pusher roller and the stopper roller are free to rotate, even when each side of the liquid crystal panel contacts the pusher roller or the stopper roller at any timing, when the liquid crystal panel moves in the X direction or the Y direction, the liquid crystal panel has already been in contact with the stopper roller or the like. Does not become a resistance at the time of movement of a liquid crystal panel.

In FIG. 3, when the setting operation of the liquid crystal panel is completed, the third side 20 of the liquid crystal panel 10 is brought into close contact with the work table 50, and no lifting of the third side 20 occurs. Do not. Similarly, the fourth side 22 of the liquid crystal panel 10 is in a state of being in close contact with the work table 50, and the lifting of the fourth side 22 does not occur. The gate electrode is arranged on the third side 20 of the liquid crystal panel 10 and the data electrode is arranged on the fourth side, but since the lifting of these sides does not occur, the probe is brought into contact with the gate electrode and the data electrode. No disruption occurs.

By the way, since the outer peripheral surface of a stopper roller is a simple cylindrical surface, in the 1st side 16 and the 2nd side 18 of the liquid crystal panel 10, the force which tries to adhere these sides to the work table 50 does not work. Do not. Therefore, the first side 16 and the second side 18 may be slightly lifted from the work table 50 due to the warpage of the central portion due to the weight of the liquid crystal panel 10. However, since the electrodes to which a probe should contact are not arranged in the 1st edge | side 16 and the 2nd edge | side 18, this also does not have a problem in particular.

Next, the example of change of a stopper roller is demonstrated. Fig. 13 is an enlarged sectional view showing a modification of the stopper roller. The stopper roller 138 is formed with a tapered surface 140 like the pusher roller. The tapered surface 140 is tapered in the direction in which the liquid crystal panel 10 is pressed against the surface of the work table 50 (that is, the bottom of FIG. 13). When such a stopper roller 138 is used, the side of a liquid crystal panel can be prevented from lifting in the stopper side. If the electrodes are arranged on three or four sides of the liquid crystal panel, it is preferable to employ a stopper roller with such a tapered surface.

The present invention can also be used in combination with a vacuum adsorption mechanism. In the above-described embodiment, the liquid crystal panel is in close contact with the work table by its own weight and a pusher roller. However, in order to improve the adhesion function of the liquid crystal panel, a vacuum suction mechanism may be used in combination. In that case, in determining whether or not the setting operation of the liquid crystal panel is completed, the determination is made not by the pressure signal of the suction groove of the work table, but by the set completion signal from the detection device of the pusher device.

The present invention is not limited to the above embodiments, and various changes can be made without departing from the spirit thereof.

The liquid crystal panel inspection apparatus according to the present invention can prevent the lifting of the edges of the liquid crystal panel in the work of setting the liquid crystal panel on the work table, and has an effect of the invention that can reliably set the liquid crystal panel on the work table. Have

Simple modifications and variations of the present invention can be readily used by those skilled in the art, and all such variations or modifications can be considered to be included within the scope of the present invention.

Claims (3)

(A) a first side, a second side adjacent to each other on the first side, a third side facing the first side, a fourth side facing the second side, and the third side A work table holding a rectangular flat panel display panel having a plurality of first electrodes arranged along the plurality of second electrodes arranged along the fourth side; (B) a probe stage having a plurality of probes in contact with the first electrode and the second electrode; (C) a first stopper contactable with the first side; (D) a second stopper contactable with the second side; (E) a first pusher device capable of pushing down said third side in a direction toward said first stopper and simultaneously pushing down said third side in close contact with said work table; And (F) a second pusher device capable of pushing down said fourth side in a direction toward said second stopper and simultaneously pushing down said fourth side in close contact with said work table; Liquid crystal panel inspection apparatus comprising a. The said 1st stopper is equipped with the 1st stopper roller which can be rotated freely around the rotation center line perpendicular | vertical to the surface of the said work table, The outer peripheral surface is able to contact the said 1st edge | side, ; (H) The second stopper includes a second stopper roller free to rotate around a rotation centerline perpendicular to the surface of the work table, the outer peripheral surface of which is in contact with the second side; (I) The first pusher device includes a first pusher roller free to rotate around a rotation centerline perpendicular to the surface of the work table, wherein the first pusher roller has the liquid crystal panel on the surface of the work table. A first tapered surface tapering in the pressing direction, the first tapered surface being in contact with the third side; And (D) The second pusher device includes a second pusher roller that is free to rotate around a rotation centerline perpendicular to the surface of the work table, and the second pusher roller has the liquid crystal panel on the surface of the work table. And a second tapered surface having an end tapered in the pressing direction, wherein the second tapered surface is in contact with the fourth side. (C) The first pusher device includes a drive mechanism for advancing and retracting the first pusher roller in a direction parallel to the second side, and the first pusher roller reaching a predetermined pressing position. Having a detecting device for detecting the thing; And (2) The second pusher device includes a drive mechanism for advancing and retracting the second pusher roller in a direction parallel to the first side, and a detection device for detecting that the second pusher roller has reached a predetermined pressing position. Liquid crystal panel inspection apparatus characterized by having.

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