JP2006285060A - Apparatus for inspecting liquid crystal panel - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To detect the floating of a peripheral part of a liquid crystal panel from a work table, without having to install a floating detection mechanism that is different from the work table, when a negative pressure suction system is not used. <P>SOLUTION: A panel floating sensor apparatus 68 detects that a vertical distance between the upper surface of a panel receiver 44 of the work table 40 and the lower surface of the peripheral part of the liquid crystal panel 10 has become a prescribed value and smaller. The panel floating sensor apparatus 68 is provided with a sensor dog 118 made to oscillate about a horizontal rotary shaft 128. The sensor dog 118 is provided with a panel contact part 130, projected from the upper surface of the panel receiver 44 and a light-shielding part 132. When the liquid panel 10 is set without floating from the panel receiver 44, the liquid crystal panel 10 oscillates the sensor dog 118 and the light-shielding part 132 shields the light from a photocoupler 148. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to an inspection apparatus for inspecting a liquid crystal panel by bringing a probe into contact with an electrode of the liquid crystal panel, and in particular, a liquid crystal panel inspection characterized by a structure for confirming that the liquid crystal panel is correctly set on a work table. It relates to the device.

As a conventional liquid crystal panel inspection apparatus, one disclosed in the following Patent Document 1 is known.
JP 2002-16127 A

  In this liquid crystal panel inspection apparatus disclosed in Patent Document 1, the peripheral portion of the liquid crystal panel is sucked and fixed to the work table by supplying negative pressure to the suction grooves formed on the upper surface of the work table (chuck top). Yes. In this negative pressure adsorption method, it is confirmed that the liquid crystal panel is correctly adsorbed to the work table by detecting that the pressure in the adsorption groove has dropped below a predetermined value. If the peripheral part of the liquid crystal panel is lifted from the work table, the suction groove pressure does not drop to a predetermined value, so that a set completion signal is not issued and the inspection operation stops there. In Patent Document 1, a peripheral portion of the liquid crystal panel is prevented from being lifted by using a pusher device that presses the liquid crystal panel downward toward the work table.

By the way, the invention of the present application is related to detecting the floating of the peripheral portion of the liquid crystal panel. However, in the technical field of the inspection device such as an electric circuit, it is not possible to detect the floating of the peripheral portion of the inspected substrate. It is disclosed in the following Patent Document 2.
JP 2001-343424 A

  This lift detection mechanism disclosed in Patent Document 2 is used to detect whether a substrate to be inspected placed on a substrate transfer base is lifted above a predetermined height in a substrate inspection device such as an in-circuit tester. It is detected by an extending rod-shaped contact. This bar-shaped contact can move back and forth elastically in the vertical direction. When the substrate to be inspected is lifted, the upper surface of the substrate to be inspected comes into contact with the bar-shaped contact, and the bar-shaped contact rises. It is detected with a non-contact sensor.

  In a relatively large liquid crystal panel, if the above-described negative pressure adsorption method is used, the peripheral portion of the liquid crystal panel is likely to be lifted, and a set completion signal may not be output. Therefore, in a relatively large liquid crystal panel, it is conceivable to hold the liquid crystal panel on the chuck top by its own weight in the vertical direction without using the negative pressure adsorption method. In this case, since the negative pressure adsorption method is not used, it is possible to avoid interruption of inspection work due to abnormal pressure in the adsorption groove. However, if the periphery of the liquid crystal panel is lifted from the work table, there is a risk that inconveniences such as breakage of the probe may occur. In addition, when performing alignment work by observing the alignment mark on the liquid crystal panel using a camera, the focus depth of the camera is about 300 μm. There is also a risk of observing the observation. Therefore, it is necessary to detect the lift above the predetermined value at the periphery of the liquid crystal panel by some means.

  In order to detect that the peripheral portion of the liquid crystal panel is lifted from the work table, it is conceivable to use the lift detection mechanism described in Patent Document 2 described above. However, it has the following problems. The lift detection mechanism of Patent Document 2 uses a contact that contacts the upper surface of the substrate to be inspected with respect to the substrate to be inspected placed on the substrate transport base. Therefore, it is necessary to install a floating detection mechanism above the substrate transport base separately from the substrate transport base. If such a lift detection mechanism is used to detect the lift from the work table at the periphery of the liquid crystal panel, it is necessary to install the lift detection mechanism above the work table separately from the work table. . Moreover, if it is detected that each of the four sides of a large liquid crystal panel is lifted, the frame that supports the lift detection mechanism must be approximately the same as the size of the liquid crystal panel, and the lift detection device must be very large. I must.

  SUMMARY OF THE INVENTION An object of the present invention is to provide a liquid crystal panel inspection apparatus that can detect the lifting from the work table in the periphery of the liquid crystal panel when the negative pressure adsorption method is not used. Another object of the present invention is to provide a liquid crystal panel inspection apparatus capable of detecting the lift of the liquid crystal panel without providing a lift detection mechanism separate from the work table.

  The liquid crystal panel inspection apparatus of the first invention has the following configurations (a) to (c). (A) A work table that holds the liquid crystal panel on the top surface. (A) A probe stage having a plurality of probes that can contact a plurality of electrodes of the liquid crystal panel. (C) A panel floating sensor device incorporated in the work table, wherein the vertical distance between the upper surface of the work table and the lower surface of the peripheral portion of the liquid crystal panel is detected to be a predetermined value or less. Panel float sensor device.

  The liquid crystal panel inspection apparatus of the second invention has the following configurations (a) to (c). (A) a first side, a second side adjacent to the first side, a third side facing the first side, and a fourth side facing the second side; A work table for holding a rectangular liquid crystal panel on the upper surface. (A) A probe stage having a plurality of probes that can contact a plurality of electrodes of the liquid crystal panel. (C) A panel floating sensor device incorporated in the work table, wherein the vertical distance between the upper surface of the work table and the lower surface of the peripheral portion of the liquid crystal panel is detected to be a predetermined value or less. A panel floating sensor device capable of detecting that the distance is less than or equal to a predetermined value in the vicinity of all of the first side, the second side, the third side, and the fourth side. . The second invention differs from the first invention in that a panel floating sensor device is provided in the vicinity of each of the four sides of the liquid crystal panel.

  A liquid crystal panel inspection apparatus according to a third aspect of the present invention has the following configurations (a) to (g). (A) a first side, a second side adjacent to the first side, a third side facing the first side, and a fourth side facing the second side; A work table for holding a rectangular liquid crystal panel on the upper surface. (A) A probe stage having a plurality of probes that can contact a plurality of electrodes of the liquid crystal panel. (C) A panel floating sensor device incorporated in the work table, wherein the vertical distance between the upper surface of the work table and the lower surface of the peripheral portion of the liquid crystal panel is detected to be a predetermined value or less. A panel floating sensor device capable of detecting that the distance is less than or equal to a predetermined value in the vicinity of all of the first side, the second side, the third side, and the fourth side. . (D) A first stopper device capable of contacting the third side. (E) A second stopper device capable of contacting the fourth side. (F) A first pusher device capable of pressing the first side in a direction toward the first stopper device. (G) A second pusher device capable of pressing the second side in a direction toward the second stopper device. The third invention differs from the first invention in that it includes a pusher device and a stopper device for positioning the liquid crystal panel in a horizontal plane.

  A liquid crystal panel inspection apparatus according to a fourth aspect of the present invention is the third aspect of the present invention, and further includes the following configurations (a) to (s). (H) The first stopper device includes a first stopper roller that is rotatable around a rotation center line perpendicular to the upper surface of the work table, and an outer peripheral surface thereof can contact the third side. It is. (G) The second stopper device includes a second stopper roller that is rotatable around a rotation center line perpendicular to the upper surface of the work table, and an outer peripheral surface thereof can contact the fourth side. It is. (K) The first pusher device includes a first pusher roller that is rotatable around a rotation center line perpendicular to the upper surface of the work table, and an outer peripheral surface thereof can contact the first side. It is. (Sa) The second pusher device includes a second pusher roller that is rotatable around a rotation center line perpendicular to the upper surface of the work table, and an outer peripheral surface thereof can contact the second side. It is. (F) The first pusher device has a drive mechanism for moving the first pusher roller back and forth in a direction parallel to the second side, and that the first pusher roller has reached a predetermined pressing position. And a detecting device for detecting. (2) The second pusher device is configured to cause the second pusher roller to advance and retract in a direction parallel to the first side, and that the second pusher roller has reached a predetermined pressing position. And a detecting device for detecting.

  In any of the above inventions, the panel floating sensor device may have the following configurations (A) to (C). (A) A sensor dog capable of swinging around a horizontal rotating shaft, comprising a panel contact portion projecting from the upper surface of the work table and a position representative portion representing the swing position of the sensor dog. (B) An elastic member that applies a rotational moment to the sensor dog in a direction in which the panel contact portion protrudes from the upper surface of the work table. (C) A position detector that detects the position of the position representative part of the sensor dog when the distance is equal to or less than the predetermined value.

  According to the present invention, in the operation of setting the liquid crystal panel on the work table, it is possible to detect the floating of the peripheral portion of the liquid crystal panel using the panel floating sensor device incorporated in the work table.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. FIG. 1 is a plan view of one embodiment of the liquid crystal panel inspection apparatus of the present invention. However, only the probe stage and the liquid crystal panel are shown. FIG. 2 is a cross-sectional view of the liquid crystal panel inspection apparatus cut at a position corresponding to line 2-2 in FIG. 2, the liquid crystal panel inspection apparatus includes a probe stage 38 having a probe, a work table 40 that holds the liquid crystal panel, and an alignment stage 42 that moves the work table 40. In FIG. 1, the probe stage 38 includes a first probe base 12 and a second probe base 14. The first probe base 12 extends in the Y direction, and the second probe base 14 extends in the X direction. The X direction and the Y direction are orthogonal to each other. The liquid crystal panel 10 has a rectangular shape, one short side of which is the first side 16, the side adjacent thereto is the second side 18, the side opposite to the first side is the third side 20, and the second side The side facing 18 is referred to as a fourth side 22. In the liquid crystal panel 10, gate electrodes are arranged along the first side 16, and data electrodes are arranged along the second side 18.

  A gate side probe unit 24 is mounted on the first probe base 12. A plurality of probe blocks 26 are fixed to the gate side probe unit 24. A plurality of probes 28 are attached to each probe block 26. A data probe unit 30 is mounted on the second probe base 14. The data side probe unit 30 is also provided with a plurality of probe blocks 26 and probes 28 attached thereto.

  The gate-side probe unit 24 is provided with a first camera 32 and a second camera 34 in the vicinity of both ends thereof. A third camera 36 is disposed in the data side probe unit 30 in the vicinity of the end away from the gate side probe unit 24. These three cameras are used for the alignment operation of the liquid crystal panel 10.

  In FIG. 2, the work table 40 includes a panel receiver 44 and a work table base 46. A diffusion plate 45 is fixed inside the panel receiver 44. The alignment stage 42 includes an upper base 48, a support 50, a backlight device 52, a lower base 54, and an XYZθ stage 56. The XYZθ stage 56 can move the lower base 54 in the X direction and the Y direction orthogonal to each other in the horizontal plane, and can further move in the Z direction (up and down direction), and is parallel to the Z direction. Theta can be rotated around the rotation axis. A backlight device 52 is fixed on the lower base 54. A plurality of support columns 50 stand on the lower base 54, and the upper base 48 is fixed to the upper ends of the support columns 50. A work table base 46 is fixed on the upper base 48.

  FIG. 3 is a plan view of the work table, and FIG. 4 is a perspective view of the work table. 3 and 4, a frame-shaped panel receiver 44 is fixed on a rectangular work table base 46. The panel receiver 44 having a rectangular outer shape as a whole includes a first support portion 58, a second support portion 60, a third support portion 62, and a fourth support portion 64. The first support portion 58 and the third support portion 62 constitute a rectangular short side, and the second support portion 60 and the fourth support portion 64 constitute a rectangular long side. The first support portion 58 includes one pusher device 66 and two panel floating sensor devices 68. The second support part 60 includes two pusher devices 66 and two panel floating sensor devices 68. The third support portion 62 includes two stopper devices 70 and two panel floating sensor devices 68. The fourth support portion 64 also includes two stopper devices 70 and two panel floating sensor devices 68. The correspondence between the structural requirements of the present invention and the embodiment will be described. The two stopper devices 70 provided in the third support portion 62 correspond to the first stopper device, and stopper rollers (described later) attached to the stopper device. ) Corresponds to the first stopper roller. The two stopper devices 70 provided on the fourth support portion 64 correspond to the second stopper device, and the stopper roller attached to the stopper device corresponds to the second stopper roller. One pusher device 66 provided on the first support portion 58 corresponds to the first pusher device 66, and a pusher roller (described later) attached to the pusher device corresponds to the first pusher roller. The two pusher devices 66 provided on the second support portion 60 correspond to the second pusher device, and the pusher roller attached to the pusher device corresponds to the second pusher roller.

  5 is a cross-sectional view taken along line 5-5 of FIG. 3, and shows the structure of the pusher device 66. As shown in FIG. 6 is a plan view when the pusher device 66 is in the retracted state, and FIG. 7 is a plan view when the pusher device 66 is in the operating state. FIG. 8 is a perspective view of the pusher device 66. 9 is a cross-sectional view taken along line 9-9 of FIG. FIG. 10 is an enlarged sectional view of the pusher roller 82. Hereinafter, the structure of the pusher device 66 will be described with reference to FIGS.

  In FIG. 5, a panel receiver 44 and a pusher device 66 are fixed on a work table base 46. A recess 72 is formed in the panel receiver 44. A pusher device 66 is disposed so as to face the recess 72. A diffusion plate 45 is fixed inside the panel receiver 44. The liquid crystal panel 10 can be supported on the upper surface of the panel receiver 44. The upper surface of the diffusion plate 45 is at a position slightly lowered from the upper surface of the panel receiver 44. The pusher device 66 includes a pusher base 74, and the pusher base 74 is fixed to the upper surface of the work table base 46. A rail 76 is fixed to the pusher base 74. A slider 78 is slidably coupled to the rail 76. A pusher support 80 is fixed to the upper surface of the slider 78. A pusher roller 82 is rotatably attached to the upper surface near one end (right end in the figure) of the pusher support 80. The pusher roller 82 is rotatable around a rotation center line perpendicular to the upper surface of the panel receiver 44. A piston 86 of an air cylinder 84 is fixed to the other end of the pusher support 80. When the piston 86 is expanded and contracted, the pusher support 80 and the slider 78 advance and retreat in the direction of the arrow 88 along the rail 76.

  In the plan view of FIG. 6, a slit plate 90 is fixed to the side surface of the pusher support 80. The slit plate 90 is formed of a horizontal plate and projects horizontally in a direction perpendicular to the forward / backward direction of the pusher support 80 (left-right direction in FIG. 6). A slit 92 is formed at the center of the slit plate 90. In this embodiment, the opening width of the slit 92 is 0.6 mm.

  On the other hand, as shown in the perspective view of FIG. 8, a bracket 94 having a U-shaped cross section is fixed to the upper surface of the pusher base 74, and a photocoupler 100 including a light emitting element 96 and a light receiving element 98 is attached to the bracket 94. It is fixed. The light receiving element 98 is located below the light emitting element 96. A slit plate 90 is located in the space between the light emitting element 96 and the light receiving element 98. The photocoupler 100 detects that the pusher roller 82 has reached a predetermined pressing position. FIG. 8 clearly shows the shapes of the rail 76, the pusher support 80, the pusher roller 82, and the air cylinder 84. A recess 72 formed in the panel receiver 44 is also shown. The recess 72 forms a space for preventing the pusher roller 82 and the pusher support 80 from colliding with the panel receiver 44 when the pusher roller 82 contacts the side surface of the liquid crystal panel.

  Returning to FIG. 6, when the slit 92 of the slit plate 90 comes directly under the light emitting element 96, the light from the light emitting element 96 is received by the light receiving element, and a signal having a predetermined intensity or more is output from the light receiving element. . At this time, a pressing completion signal is output. FIG. 7 shows a state where the pusher roller 82 is in the pressing completion position by pressing the side surface of the liquid crystal panel 10.

  9 is a cross-sectional view taken along line 9-9 of FIG. It is clearly shown that the slit plate 90 extends horizontally from the pusher support 80 and that the slit plate 90 is located in the space between the light emitting element 96 and the light receiving element 98. The engagement state between the rail 76 and the slider 78 is also clearly shown.

  FIG. 10 is an enlarged sectional view of the pusher roller 82. The pusher roller 82 is attached to the pusher support 80 by the attachment shaft 102. A rolling bearing 104 is inserted between the outer peripheral surface of the mounting shaft 102 and the inner peripheral surface of the pusher roller 82, and the pusher roller 82 is rotatable by this bearing 104. The rotation center line of the pusher roller 82 is perpendicular to the upper surface of the panel receiver 44. The attachment shaft 102 is fixed to the pusher support 80 with a screw portion with the collar 106 interposed therebetween. The outer peripheral surface of the pusher roller 82 is a cylindrical surface, and this cylindrical surface can contact the side surface of the liquid crystal panel 10. In this embodiment, the pusher roller 82 has a diameter of 20 mm. The upper surface of the pusher roller 82 is at a position about 2 mm higher than the upper surface of the liquid crystal panel 10 placed on the panel receiver 44.

  FIG. 11 is an enlarged sectional view in the vicinity of the stopper device 70, and corresponds to a sectional view taken along the line 11-11 in FIG. The stopper device 70 includes a stopper roller 108. The stopper roller 108 is attached to the bottom surface of a cylindrical recess 112 formed in the panel receiver 44 by an attachment shaft 110. A rolling bearing 114 is inserted between the outer peripheral surface of the mounting shaft 110 and the inner peripheral surface of the stopper roller 108, and the stopper roller 108 is rotatable by this bearing 114. The rotation center line of the stopper roller 108 is perpendicular to the upper surface of the panel receiver 44. Therefore, the stopper roller 108 is rotatable around a rotation center line perpendicular to the upper surface of the panel receiver 44. The mounting shaft 110 is fixed to the panel receiver 44 with a screw portion with the collar 116 interposed therebetween. The outer peripheral surface of the stopper roller 108 is a cylindrical surface, and this cylindrical surface can contact the side surface of the liquid crystal panel 10. In this embodiment, the diameter of the stopper roller 118 is 10 mm. Further, the upper surface of the stopper roller 108 is at a position about 2 mm higher than the upper surface of the liquid crystal panel 10 placed on the panel receiver 44.

  13 is a cross-sectional view taken along line 13-13 of FIG. 3, and shows the structure of the panel floating sensor device 68. FIG. This panel floating sensor device 68 is incorporated in the panel receiver 44 and is used to determine whether or not the liquid crystal panel 10 is correctly placed on the panel receiver 44. That is, it detects that the vertical distance between the upper surface of the panel receiver 44 and the lower surface of the peripheral portion of the liquid crystal panel 10 has become a predetermined value or less. The panel floating sensor device 68 includes a sensor dog 118, a stopper 120, a pressing spring 124, and a detection unit 126, which are housed in a casing 134. The casing 134 is fixed in a recess 136 formed in the panel receiver 44. The sensor dog 118 can swing around the rotation shaft 128. The pressing spring 124 is a compression coil spring, and applies a rotational moment to the sensor dog 118 so as to rotate the sensor dog 118 counterclockwise in FIG. The sensor dog 118 has its upper surface brought into contact with the lower end of the stopper 120 so that the rotation of the sensor dog 118 is stopped. A circular recess 140 is formed at the bottom of the casing 134, and the lower end of the support rod 122 is embedded in the recess 140. The pressing spring 124 is put on the support rod 122. The pressing spring 124 is held in a compressed state between the lower surface of the sensor dog 118 and the bottom surface of the recess 140.

  At one end (the right end in FIG. 13) of the sensor dog 118, there is a panel contact portion 130 extending substantially in the vertical direction, and at the other end is a light blocking portion 132 extending substantially in the horizontal direction. A space 138 exists between the right end of the casing 134 in FIG. 13 and the inner wall of the recess 136. A panel contact portion 130 is provided in the space 138, and the upper end of the panel contact portion 130 protrudes about 2 mm above the upper surface of the panel receiver 44. The upper surface of the panel receiver 44 corresponds to the “upper surface of the work table” in the present invention.

  FIG. 15 is a plan view of the panel floating sensor device 68 with the upper wall of the casing 134 removed. Near the left end of the casing 134 in FIG. The detection unit 126 includes a bracket 142 having a U-shaped cross section. A photocoupler 148 including a light emitting element 144 and a light receiving element 146 is fixed to the bracket 142. Below the space between the light emitting element 144 and the light receiving element 146, the tip of the light blocking portion 132 of the sensor dog 118 is located. The light blocking unit 132 represents the position of the sensor dog 118 with respect to the detection unit 126, and corresponds to the position representative unit in the present invention.

  In FIG. 13, when the liquid crystal panel 10 is correctly placed on the panel receiver 44 when the liquid crystal panel 10 is pressed against the stopper roller 108, as shown in FIG. 14, the liquid crystal panel 10 is subjected to the sensor dog 118 due to its own weight. When the upper end of the panel contact part 130 is pushed downward, the sensor dog 118 rotates clockwise in FIG. Then, the light blocking unit 132 of the sensor dog 118 blocks the light of the photocoupler 148, and the vertical setting completion signal is output from the detection unit 126. In this embodiment, when the lower surface of the liquid crystal panel 10 approaches within 1 mm from the upper surface of the panel receiver 44 (that is, the upper end of the panel contact portion 130 of the sensor dog 118 approaches within 1 mm from the upper surface of the panel receiver 44. The relative position relationship between the sensor dog 118 and the photocoupler 148 is determined so that a set completion signal is output from the detection unit 126.

  When a control device (not shown) receives a detection signal from the detection unit 126, it is confirmed that the liquid crystal panel 10 is correctly placed on the panel receiver 44. On the other hand, as shown in FIG. 13, if the liquid crystal panel 10 remains floating from the upper surface of the panel receiver 44, the detection completion signal is not output from the detection unit 126.

  FIG. 12 is a perspective view of the panel floating sensor device 68. The recess 136 of the panel receiver 44 and the casing 134, sensor dog 118, and detector 126 of the panel float sensor device 68 are clearly shown. The lower end of the stopper 120 is in contact with the upper surface of the sensor dog 118, and the pressing spring 124 is in contact with the lower surface of the sensor dog 118. The sensor dog 118 is rotatably supported by a rotating shaft 128.

  Next, the operation of setting the liquid crystal panel on the panel receiver 44 will be described. In FIG. 3, first, the liquid crystal panel 10 is placed on the panel receiver 44 by a conveying device (not shown). At this time, the pusher rollers 68 of the three pusher devices 66 are in the retracted position shown in FIG. The slit 92 of the slit plate 90 is shifted leftward from the position immediately below the light emitting element 96. Therefore, the photocoupler of the pusher device 66 is shielded by the slit plate 92. Next, as shown in FIG. 5, the pusher roller 82 is moved to the right in FIG. Then, the outer peripheral surface of the pusher roller 82 comes into contact with the side surface of the liquid crystal panel 10 and pushes the liquid crystal panel 10. The liquid crystal panel 10 comes into contact with a stopper roller located on the side facing the pusher roller and stops. At this time, as shown in FIG. 7, the slit 92 of the slit plate 90 comes directly below the light emitting element 96, and the pusher roller A set completion signal in the horizontal direction is output from the device 66.

  In FIG. 3, the pusher device 66 provided on the first support portion 58 pushes the first side 16 of the liquid crystal panel 10 to the right in FIG. 3, and the third side 20 of the liquid crystal panel 10 is the third support portion 62. The liquid crystal panel 10 is positioned in the X direction by contacting the stopper rollers of the two stopper devices 70 provided in the X direction. Similarly, the two pusher devices 66 provided on the second support part 60 push the second side 18 of the liquid crystal panel 10 downward in FIG. 3, and the fourth side 22 of the liquid crystal panel 10 is the fourth support part. The liquid crystal panel 10 is positioned in the Y direction in contact with the stopper rollers of the two stopper devices 70 provided at 64. When the liquid crystal panel 10 is correctly positioned in both the X and Y directions, horizontal set completion signals are output from the three pusher devices 66, respectively.

  Further, in all the panel floating sensor devices 68 shown in FIG. 3, as shown in FIG. 14, when the sensor dog 118 is pushed by the liquid crystal panel 10 and a vertical set completion signal is output from the detection unit 126, the liquid crystal It is confirmed that the panel 10 is correctly placed on the panel receiver 44 without lifting from the upper surface of the panel receiver 44 on all sides.

  When all the horizontal and vertical setting completion signals are output normally, the setting operation on the work table 50 of the liquid crystal panel 10 is completed. When the set operation is completed, the alignment operation of the liquid crystal panel is performed, and then the probe is brought into contact with the electrode of the liquid crystal panel to inspect the liquid crystal panel.

  If the setting completion signal is not output from either the pusher device 66 or the panel floating sensor device 68, the liquid crystal panel is not set correctly on the panel receiver, and the process shifts to the alignment operation of the liquid crystal panel. Instead, an alarm signal is issued to inform the operator that a set error has occurred.

  In the above-described embodiment, the photocoupler is used as the position detection unit of the pusher device and the detection unit of the panel floating sensor device. However, as long as the position detection unit can detect the position of the slit plate or the sensor dog, it is a non-contact type. Any position or contact type position sensor may be used. However, the non-contact type sensor is preferable because an extra force is not applied to the slit plate and the sensor dog. As the non-contact type sensor other than the photocoupler, for example, a magnetic sensor or an ultrasonic sensor can be used. .

It is a top view of one Example of the liquid crystal panel test | inspection apparatus of this invention. It is sectional drawing which cut | disconnected the liquid crystal panel test | inspection apparatus in the position corresponded to the 2-2 line of FIG. It is a top view of a work table. It is a perspective view of a work table. FIG. 5 is a sectional view taken along line 5-5 of FIG. It is a top view when a pusher apparatus is in a retracted state. It is a top view when a pusher apparatus is in an operation state. It is a perspective view of a pusher device. FIG. 9 is a cross-sectional view taken along line 9-9 in FIG. 7. It is an expanded sectional view of a pusher roller. FIG. 11 is a sectional view taken along line 11-11 in FIG. 3. It is a perspective view of a panel floating sensor apparatus. FIG. 13 is a cross-sectional view taken along line 13-13 in FIG. 3. It is sectional drawing similar to FIG. 13 when a panel floating sensor apparatus exists in an operation state. It is a top view of a panel floating sensor apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Liquid crystal panel 12 1st probe base 14 2nd probe base 16 1st edge | side 18 2nd edge | side 20 3rd edge | side 22 4th edge | side 24 Gate side probe unit 26 Probe block 28 Probe 30 Data side probe unit 32 First camera 34 Second camera 36 Third camera 38 Probe stage 40 Work table 42 Alignment stage 44 Panel holder 45 Diffuser plate 46 Work table base 48 Upper base 50 Support column 52 Backlight device 54 Lower base 56 XYZθ stage 58 First support Part 60 second support part 62 third support part 64 fourth support part 66 pusher device 68 panel floating sensor device 70 stopper device 72 recess 74 pusher base 76 rail 78 slider 80 pusher support 82 pusher Roller 90 air cylinder 86 piston 88 arrow 90 slit plate 92 slit 94 bracket 96 light emitting element 98 light receiving element 100 photocoupler 102 mounting shaft 104 bearing 106 collar 108 stopper roller 110 mounting shaft 112 recess 114 bearing 116 collar 118 sensor dog 120 stopper 122 support rod 124 Pressing spring 126 Detecting unit 128 Rotating shaft 130 Panel contact unit 132 Light blocking unit 134 Casing 136 Recess 138 Space 140 Recess 142 Bracket 144 Light emitting element 146 Light receiving element 148 Photocoupler

Claims (5)

A liquid crystal panel inspection apparatus having the following configuration.
(A) A work table that holds the liquid crystal panel on the top surface.
(A) A probe stage having a plurality of probes that can contact a plurality of electrodes of the liquid crystal panel.
(C) A panel floating sensor device incorporated in the work table, wherein the vertical distance between the upper surface of the work table and the lower surface of the peripheral portion of the liquid crystal panel is detected to be a predetermined value or less. Panel float sensor device. A liquid crystal panel inspection apparatus having the following configuration.
(A) a first side, a second side adjacent to the first side, a third side facing the first side, and a fourth side facing the second side; A work table for holding a rectangular liquid crystal panel on the upper surface.
(A) A probe stage having a plurality of probes that can contact a plurality of electrodes of the liquid crystal panel.
(C) A panel floating sensor device incorporated in the work table, wherein the vertical distance between the upper surface of the work table and the lower surface of the peripheral portion of the liquid crystal panel is detected to be a predetermined value or less. A panel floating sensor device capable of detecting that the distance is less than or equal to a predetermined value in the vicinity of all of the first side, the second side, the third side, and the fourth side. . A liquid crystal panel inspection apparatus having the following configuration.
(A) a first side, a second side adjacent to the first side, a third side facing the first side, and a fourth side facing the second side; A work table for holding a rectangular liquid crystal panel on the upper surface.
(A) A probe stage having a plurality of probes that can contact a plurality of electrodes of the liquid crystal panel.
(C) A panel floating sensor device incorporated in the work table, wherein the vertical distance between the upper surface of the work table and the lower surface of the peripheral portion of the liquid crystal panel is detected to be a predetermined value or less. A panel floating sensor device capable of detecting that the distance is less than or equal to a predetermined value in the vicinity of all of the first side, the second side, the third side, and the fourth side. .
(D) A first stopper device capable of contacting the third side.
(E) A second stopper device capable of contacting the fourth side.
(F) A first pusher device capable of pressing the first side in a direction toward the first stopper device.
(G) A second pusher device capable of pressing the second side in a direction toward the second stopper device. The liquid crystal panel inspection apparatus according to claim 3, comprising the following characteristics.
(H) The first stopper device includes a first stopper roller that is rotatable around a rotation center line perpendicular to the upper surface of the work table, and an outer peripheral surface thereof can contact the third side. It is.
(K) The second stopper device includes a second stopper roller that is rotatable around a rotation center line perpendicular to the upper surface of the work table, and an outer peripheral surface thereof can contact the fourth side. It is.
(K) The first pusher device includes a first pusher roller which is rotatable around a rotation center line perpendicular to the upper surface of the work table, and an outer peripheral surface thereof can contact the first side. It is.
(Sa) The second pusher device includes a second pusher roller which is rotatable around a rotation center line perpendicular to the upper surface of the work table, and an outer peripheral surface thereof can contact the second side. It is.
(F) The first pusher device has a drive mechanism for moving the first pusher roller back and forth in a direction parallel to the second side, and that the first pusher roller has reached a predetermined pressing position. And a detecting device for detecting.
(2) The second pusher device has a drive mechanism for moving the second pusher roller back and forth in a direction parallel to the first side, and that the second pusher roller has reached a predetermined pressing position. And a detecting device for detecting. 5. The liquid crystal panel inspection apparatus according to claim 1, wherein the panel floating sensor device has the following configuration.
(A) A sensor dog capable of swinging around a horizontal rotating shaft, comprising a panel contact portion projecting from the upper surface of the work table and a position representative portion representing the swing position of the sensor dog.
(B) An elastic member that applies a rotational moment to the sensor dog in a direction in which the panel contact portion protrudes from the upper surface of the work table.
(C) A position detector that detects the position of the position representative part of the sensor dog when the distance is equal to or less than the predetermined value.

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