KR20050070972A - Substrate clamp assembly included sputter for manufacturing liquid crystal display device - Google Patents

Abstract

According to the present invention, a backing plate having a target fixed to an upright surface and a susceptor on which a transparent substrate is seated are fixed to an upper surface and pivoted about one edge parallel to a lower edge of the backing plate to face the transparent substrate and the target. Claims [1] A clamp assembly for holding a transparent substrate of a sputter for manufacturing a liquid crystal display device including a platen which is folded or unfolded as possible, comprising: a plurality of clamp holes penetrating the platen up and down along the susceptor edge; Supports penetrate the clamp holes freely and have a ring shape so that the upper end of the upper portion of the platen can press the edge of the transparent substrate, and the lower end of the lower portion of the platen is bent at a predetermined length toward the transparent substrate. A clamp bar forming a stage; A shaft penetrating freely through the middle of the clamp bar such that the upper and lower ends of the clamp bar are opposite to or close to the transparent substrate to perform a seesaw movement; A coil wound in one direction and a center type crossing the radial direction of both ends of the coil, and having one end hook fixed to the outer edge of the clamp hole at the bottom of the platen and the other end connected to the other end of the clamp bar; A tension coil spring comprising a hook; It characterized in that it comprises a liftable roller pin for pushing up the supporting end of the other end of the clamp bar to seesaw the clamp bar.

Description

Clamp assembly for holding a transparent substrate of a sputter for manufacturing a liquid crystal display device {substrate clamp assembly included sputter for manufacturing liquid crystal display device}

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sputter which is a manufacturing apparatus of a liquid crystal display device (LCD), and more particularly, a plurality of platelets having a susceptor fixed thereto are installed. The present invention relates to a clamp assembly for gripping a transparent substrate of a sputter for manufacturing a liquid crystal display device for fixing a transparent substrate on a susceptor.

Liquid crystal display devices (LCDs) have a pair of transparent insulating substrates each having an electric field generating electrode facing each other, and then a liquid crystal panel filled with liquid crystal therebetween is an essential component. By applying an appropriate voltage to each field generating electrode, an electric field is changed to artificially adjust the alignment direction of liquid crystal molecules having optical anisotropy and polarization.

In this case, various images are expressed using the change in the transmittance of light.

At this time, the two transparent substrates constituting the liquid crystal panel have a high density of various components such as a pixel, an electric field generating electrode, and a thin film transistor, and they are typically used for thin film deposition of an conductor, semiconductor, or non-conductor and etching thereof. Repeat this several times.

A manufacturing apparatus for a liquid crystal display device for implementing a double metal thin film is a sputter, which is simply a transparent substrate that is a deposition target and a target of a metal material facing the same, and the transparent substrate and the target are interposed therebetween. It includes a first electrode on the opposite side of the transparent substrate and a second electrode on the target side.

After forming a reaction region in which the transparent substrate and the target are mounted in a vacuum, injecting an inert gas such as argon (Ar) and applying positive and negative voltages to the first and second electrodes, respectively, the inert gas is in a plasma state. The double cation particles are accelerated toward the second electrode and collide with the target to scatter the metal particles from the base material, and the scattered metal particles are accelerated toward the first electrode and deposited on the surface of the transparent substrate.

Hereinafter, a detailed cross-sectional view of a sputter for manufacturing a general liquid crystal display will be described in more detail with reference to FIG. 1.

A typical sputter is a platen (4) serving as a table on which a susceptor (2) on which a transparent substrate is seated is fixed to a top surface, and a backing plate (upright) fixed to a metal target (6) on one side. 8), which are mounted in a chamber housing 10 which defines an isolated reaction environment of vacuum while closely paralleling one edge of each other.

At this time, the platen (4) can be rotated in a pivot (Pivot) method based on the one edge close to the backing plate (8), thereby helping to proceed smoothly by maintaining a horizontal during the import / export of the transparent substrate, and during the process The transparent substrate and the target 6 face each other in parallel with each other.

Therefore, when the transparent substrate is introduced into the vacuum chamber housing 10 and seated on the susceptor 2 of the platen 4, the platen 4 rotates to face the target 6, and then argon (Ar) As the gas is injected, metal particles of the target 6 are deposited on the transparent substrate through the above-described process, and the first electrode plays a role of the backing plate 8 to which the DC high voltage is applied. 2) is grounded to serve as a second electrode.

On the other hand, the platen 4 of the sputter for a general liquid crystal display device is provided with a plurality of clamp assembly for holding the substrate so that the transparent substrate remains firmly seated on the susceptor 2 despite the pivoting rotation. 2 is a plan view showing a platen 4 of a general sputter, and FIG. 3 is a cross-sectional view taken along the line III-III of FIG.

As shown, the susceptor 2, which is a seating position of the transparent substrate, is fixed to the upper surface of the platen 4, and a clamp assembly for holding the transparent substrate 1 is installed along the edge thereof. A plurality of clamp holes 12 penetrating the platen 4 up and down along the edge of the acceptor 2, each clamp hole so that one end is exposed to the upper platen 4 and the other end is located below the platen And a plurality of clamp bars 20 penetrating freely through 12.

Each clamp bar 20 is penetrated by the shaft 22 to be freely penetrated by a seesaw, and moves the seesaw movement so that one end and the other end thereof are far from or close to each other so as to be opposite to each other. The upper end 20a of the bar 20 has a ring shape that is bent toward the transparent substrate 1 so that the pressure can be applied to the susceptor 2 by walking the edge of the transparent substrate 1, and the clamp bar 20 The lower end 20b of the () is a flat support end of a predetermined length bent toward the transparent substrate (1).

In addition, the clamp assembly includes a tension coil spring 30 fixed to pull the lower end of the clamp bar 20 to the outside of the platen (4), so that the top of the clamp bar 20 is transparent if the external force is excluded The state inclined toward the substrate 1 is maintained.

In addition, the lower portion of the clamp bar 20 is provided with a roller pin 40 which can be lifted and lifted up and down by pushing the supporting end of the lower end of the clamp bar 20.

Therefore, when the roller pin 40 is raised to push up the supporting end of the lower end 20b of the clamp bar 20, the clamp bar 20 is seesawed relative to the shaft 22 so that the upper end 20a is a transparent substrate ( 1) is pulled away from the contrary, on the contrary, when the roller pin 40 is lowered, the lower end of the clamp bar 20 is pulled out of the platen 4 by the elasticity of the tension coil spring 30 so that the upper end 20a is The pressure is applied to the edge of the transparent substrate 1.

3 is a state where the clamp bar 20 releases the transparent substrate 1 for loading and unloading the transparent substrate 1, and the case where the solid bar indicates the clamp bar 20 during the process is shown. ) Is a state in which the transparent substrate 1 is fixed.

In this case, the resources of the tension coil spring 30 included in the clamp assembly for holding the transparent substrate of the sputter for manufacturing a general liquid crystal display device described above are shown in Table 1 below, and the specific shape thereof is the same as that of FIG. 4.

That is, the coil-shaped coil portion 32 wound in one direction so as to have a tensile restoring force with respect to the force pulled from both ends of the outside, and one end and the other end hooks (34, 36) which are positioned at both ends thereof and fixed to the outside, respectively In this case, one end and the other end hooks (34, 36) of the both end portions are each formed a so-called side type having a ring shape branched to both sides of the vertical from one outer peripheral point of the coil portion (32).

TABLE 1

Coil speed 8th Outer diameter 5.6 mm fairyland 1 mm Tensile load 5.53kgf

However, there are some problems when the process is performed using the clamp assembly for holding the transparent substrate of the sputter for manufacturing a general liquid crystal display device, one of which is frequent breakage of the tension coil spring (30).

That is, referring to the above description, the tension coil spring 30 is pulled for most of the time when the process is not in progress and maintains an increased tension, and during the process, it can be expected that an impact due to the tension change is applied. For this reason, the phenomenon that the impact is concentrated especially in the boundary part of the coil part 32, one end, and the other end hooks 32 and 34 is frequently observed.

In addition, when the tension coil spring 30 is broken, the transparent substrate 1 cannot be stably fixed on the susceptor 2, so that the transparent substrate 1 sags or falls during sputtering, and thus no further process can be performed. Therefore, the operation of the equipment is stopped until the replacement and repair thereof is inevitably followed by a process delay.

This greatly reduces the work yield.

In addition, when the tension coil spring 30 is broken, the corresponding clamp bar 20 loses control force and hits the edge portion thereof during loading and unloading of the transparent substrate 1 to cause cracks or cracks.

Accordingly, the present invention is to solve the above problems, by providing a clamp assembly for holding the transparent substrate of the sputter for manufacturing a liquid crystal display device with improved durability, minimizing work delay due to failure or substrate damage phenomenon, in particular tension coil spring Its purpose is to extend the service life of the equipment to increase the efficiency of the equipment and reduce the failure rate.

The present invention to achieve the above object,

5 is a cross-sectional view of a sputter having a clamp assembly according to the present invention, in which a platen plate on which the susceptor 102 is fixed and a backing plate 108 on which the target 106 is fixed are vacuum sealed. It is mounted into the chamber housing 110 to define the unique reaction environment.

At this time, the susceptor 102 is a portion on which the transparent substrate, which is the object to be processed, is seated, and the preton 104 fixing the upper surface of the susceptor 102 is pivotable about one edge, and the transparent substrate is brought into the susceptor 102. Or, when it is taken out, it is kept horizontal and stands up close to vertical during the process.

Next, the backing plate 108 has a substantially rectangular plate shape, and the lower edge thereof is proximate to be parallel to one edge of the platen 104, and the target 106 is fixed to one surface in a direction toward the susceptor 102. Maintain a vertical upright position. In this case, the target 106 includes a target material of a metal to be deposited as a thin film on the transparent substrate.

Accordingly, when the transparent substrate is seated on the susceptor 102 in a horizontal state in which the platen 104 is substantially extended away from the backing plate 108, the plate and the target 106 face each other by pivoting and pivoting. Inert gas such as argon (Ar) is introduced into the vacuum reaction environment of the chamber housing 110 to be ionized into the plasma state, and at the same time, a DC high voltage is applied to the backing plate 108 and the susceptor 102 is grounded.

The argon cationic particles accelerate and collide with the target 106 to scatter metal particles from the base material, and the metal particles are accelerated toward the susceptor 102 and deposited on the surface of the transparent substrate.

At this time, the platen 104 is provided with a plurality of clamp assembly for holding the transparent substrate to maintain a state in which the transparent substrate on the susceptor 102 in close contact with the pivot rotation, the specific form of the platen ( It will be described with reference to FIG. 6, which is a plan view of 104, and FIG. 7, which is a sectional view of the line VII-VII thereof.

As shown, the susceptor 102 is fixed on the platen 104 of the sputter for manufacturing a liquid crystal display device having a clamp assembly for holding the transparent substrate 1 according to the present invention, and a plurality of clamp holes are formed along the edge thereof. 112 is penetrated up and down. Preferably, the plurality of clamp holes 112 are provided with two or more upper and lower edges of the transparent substrate 1 when the platen 104 is upright. do.

In addition, the clamp bars 120 penetrate through the clamp holes 112, and one end 120a of the clamp bar 120 exposed to the upper portion of the double platen has a ring shape toward the transparent substrate 1. The other end 120b of the clamp bar 120, which is bent and positioned below the platen 104, also forms a flat support end branched a predetermined length in the direction of the transparent substrate 1.

In addition, the clamp bar 120 may be moved by the shaft portion 122 so that the upper and lower ends of the clamp bar 120 face each other in a direction opposite to each other. Specifically, the upper end 120a of the clamp bar 120 is When pressing the edge of the transparent substrate 1 to apply pressure in the direction of the susceptor 102, the lower end 120b is as far away from the transparent substrate 1 as the upper end 120a is opposite from the edge of the transparent substrate 1. The far end 120b is as close as possible to the transparent substrate 120b. At this time, although the shaft 122 is not shown, both ends are inserted into a pair of fixed ends respectively branched so as to face each other at the edge of the clamp hole 120 at the bottom of the platen 104 with the clamp bar 120 interposed therebetween. Can be fixed.

In addition, the clamp assembly for holding the transparent substrate 1 of the sputter for manufacturing a liquid crystal display device according to the present invention pulls the lower end of the clamp bar 120 to the outside of the platen 104, the upper end of the clamp bar 120 (120a) It includes a tension coil spring (130) for maintaining the state in which the transparent substrate (1) is folded to release, which is one end of the clamping hole (110) at the lower edge of the platen 104 branched at a predetermined position It is fixed to (138), the other end is connected to the lower end of the clamp bar (120).

And finally, a roller pin 140 that can be lifted and lowered to push up the flat base end portion of the lower end 120b of the clamp bar 120 below the clamp bar 120.

Therefore, when the transparent substrate 1 is loaded or unloaded on the susceptor 102 for the process to proceed, the roller pin 140 is raised to push up the supporting end of the lower end 120b of the clamp bar 120. As a result of the seesaw movement, the upper end 120a of the clamp bar 120 is pulled away from the transparent substrate 1, and the transparent substrate 1 may be smoothly loaded or unloaded on the susceptor 102.

In order to proceed with the process, the roller pin 140 is lowered, and thus the lower end 120b of the clamp bar 120 is pulled out of the platen 104 by the tension restoring force of the tension coil spring 130, and the upper end 120a is applied. The transparent substrate 1 is adhered to the susceptor 102 by applying pressure through the edge of the transparent substrate 1, and then the platen 104 is pivoted and then a full-scale thin film deposition process is performed.

Therefore, the case indicated by the dotted line in FIG. 7 is a state in which the clamp bar 120 releases the pressure on the transparent substrate 1 for loading and unloading the transparent substrate 1, and the case indicated by the solid line indicates that the clamp bar ( 120 is a state in which the transparent substrate 1 is fixed and pressed.

On the other hand, it is included in the clamp assembly for holding the transparent substrate of the sputter for manufacturing a liquid crystal display device according to the present invention that performs the above operation, is pulled to both sides for most of the time that the process does not proceed to maintain an increased tension state Tensile coil spring 130 is shown in perspective view in FIG.

As shown, the tension coil springs 130 of the clamp assembly according to the present invention each have a coil portion 132 of the main body spirally wound in one direction, and a hook-shaped end hook extending from both side ends thereof and caught by other elements. 134 and the other end hook 136, in particular, one end and the other end hook (134,136) is characterized in that the center type across the radial direction of the coil portion 132, respectively.

In addition, its most preferred resources are shown in Table 2 below.

TABLE 2

Coil speed 10 times Outer diameter 6.0mm fairyland 1.2 mm Tensile load 5.0 ㅁ 0.5kgf

Preferably, the tensile coil spring 130 has a coil rotational speed of 9 to 11 times, an outer diameter of more than 5.6 and 6.5 mm or less, a wire diameter of more than 1 and 1.5 mm or less, and a tensile load of 4.5 to 5.5 kgf or less. By having the configuration as described above, the tension state is maintained for most of the time, even when subjected to a non-uniform bidirectional tension, it is not easily broken or broken, it is possible to obtain a greatly improved effect.

The clamp assembly according to the present invention greatly improves the life and durability by modifying the specific resources of the tension coil spring and the shape of both end hooks, thereby minimizing the work delay or substrate damage caused by the failure of the clamp assembly for substrate holding. There is an advantage.

In addition, it can increase the operation rate of equipment and lower the incidence of defects.

That is, as mentioned above, the specifications of the tension coil spring, which maintain the tensioned state by tension for most of the time when the process does not proceed, are adjusted to be most suitable for the environment, and in particular, the tension in both directions that is not constant during the process. One point where the impact is concentrated by the center, that is, the connection portion of the hook and the coil portion as a center type bar, unlike the conventional has the advantage that can significantly reduce the breakage or breakage phenomenon.

This allows for better sputtering.

1 is a cross-sectional view of a sputter for manufacturing a general liquid crystal display device.

2 is a plan view of a platen of a sputter for manufacturing a general liquid crystal display device;

3 is a cross-sectional view taken along the line III-III of FIG. 2;

Figure 4 is a perspective view of the tension coil spring of the clamp assembly for transparent substrate gripping of a typical sputter.

5 is a cross-sectional view of a sputter for manufacturing a liquid crystal display device having a clamp assembly for holding a transparent substrate according to the present invention.

6 is a plan view of a platen of a sputter for manufacturing a liquid crystal display device having a clamp assembly for holding a transparent substrate according to the present invention;

FIG. 7 is a cross sectional view taken along the line VII-VII of FIG. 6; FIG.

8 is a perspective view of a tension coil spring of a clamp assembly for holding a transparent substrate of a sputter for manufacturing a liquid crystal display device according to the present invention;

<Description of the symbols for the main parts of the drawings>

1: transparent substrate 102: susceptor

104: platen 106: target

108: backing plate 110: chamber housing

112: clamp hole 120: clamp bar

122: shaft 130: tension coil spring

132: roller pin 130: tension coil spring

132: coil part 134,136: one end and the other end hook

138: locking step 140: roller pin

Claims (2)

The backing plate on which the target is fixed to an upright surface and the susceptor on which the transparent substrate is seated are fixed to the upper surface and pivoted about one edge parallel to the lower edge of the backing plate to fold so that the transparent substrate and the target face each other. Or as a clamp assembly for holding the transparent substrate of the sputter for manufacturing a liquid crystal display device comprising a platen spreading, A plurality of clamp holes penetrating the platen up and down along the susceptor edge; Supports penetrate the clamp holes freely and have a ring shape so that the upper end of the upper portion of the platen can press the edge of the transparent substrate, and the lower end of the lower portion of the platen is bent at a predetermined length toward the transparent substrate. A clamp bar forming a stage; A shaft penetrating freely through the middle of the clamp bar such that the upper and lower ends of the clamp bar are opposite to or close to the transparent substrate to perform a seesaw movement; A coil wound in one direction and a center type crossing the radial direction of both ends of the coil, and having one end hook fixed to the outer edge of the clamp hole at the bottom of the platen and the other end connected to the other end of the clamp bar; A tension coil spring comprising a hook; Clamp assembly for holding a transparent substrate of the sputter for manufacturing a liquid crystal display device, characterized in that it comprises a liftable roller pin for pushing the support end of the other end of the clamp bar to seesaw the clamp bar. The method of claim 1, The tension coil spring has 9 to 11 coil rotations, an outer diameter of more than 5.6 and up to 6.5 mm, a wire diameter of more than 1 and up to 1.5 mm and a tensile load of 4.5 to 5.5 kgf. Clamp assembly for holding transparent substrates.