KR20050013108A - 금속막의 산화로 형성된 나노급 다공성기판상의 전해질 박막 - Google Patents
금속막의 산화로 형성된 나노급 다공성기판상의 전해질 박막Info
- Publication number
- KR20050013108A KR20050013108A KR10-2004-7018992A KR20047018992A KR20050013108A KR 20050013108 A KR20050013108 A KR 20050013108A KR 20047018992 A KR20047018992 A KR 20047018992A KR 20050013108 A KR20050013108 A KR 20050013108A
- Authority
- KR
- South Korea
- Prior art keywords
- thin film
- substrate
- deposition
- porous substrate
- continuous thin
- Prior art date
Links
- 239000010409 thin film Substances 0.000 title claims abstract description 105
- 239000000758 substrate Substances 0.000 title claims abstract description 94
- 239000003792 electrolyte Substances 0.000 title claims description 41
- 230000003647 oxidation Effects 0.000 title claims description 37
- 238000007254 oxidation reaction Methods 0.000 title claims description 37
- 239000010408 film Substances 0.000 title abstract description 24
- 229910052751 metal Inorganic materials 0.000 title description 14
- 239000002184 metal Substances 0.000 title description 14
- 239000000463 material Substances 0.000 claims abstract description 46
- 239000012528 membrane Substances 0.000 claims abstract description 24
- 239000012530 fluid Substances 0.000 claims abstract description 17
- 238000000151 deposition Methods 0.000 claims description 61
- 230000008021 deposition Effects 0.000 claims description 53
- 238000000034 method Methods 0.000 claims description 39
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 25
- 239000011148 porous material Substances 0.000 claims description 25
- 239000000446 fuel Substances 0.000 claims description 23
- 230000008569 process Effects 0.000 claims description 21
- 238000002834 transmittance Methods 0.000 claims description 12
- 239000001257 hydrogen Substances 0.000 claims description 11
- 229910052739 hydrogen Inorganic materials 0.000 claims description 11
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 9
- 230000035699 permeability Effects 0.000 claims description 9
- 239000007789 gas Substances 0.000 claims description 8
- 229910001233 yttria-stabilized zirconia Inorganic materials 0.000 claims description 4
- 150000002431 hydrogen Chemical class 0.000 claims description 2
- 238000002485 combustion reaction Methods 0.000 claims 1
- 239000002245 particle Substances 0.000 abstract description 30
- 239000000523 sample Substances 0.000 description 35
- 150000002500 ions Chemical class 0.000 description 18
- 238000010438 heat treatment Methods 0.000 description 17
- 239000007787 solid Substances 0.000 description 12
- 239000000203 mixture Substances 0.000 description 11
- 230000001965 increasing effect Effects 0.000 description 10
- 229910052782 aluminium Inorganic materials 0.000 description 9
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 9
- 239000013078 crystal Substances 0.000 description 9
- 238000005259 measurement Methods 0.000 description 9
- 230000001590 oxidative effect Effects 0.000 description 9
- 229910001093 Zr alloy Inorganic materials 0.000 description 8
- 239000001301 oxygen Substances 0.000 description 8
- 229910052760 oxygen Inorganic materials 0.000 description 8
- 229910000946 Y alloy Inorganic materials 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 238000001755 magnetron sputter deposition Methods 0.000 description 6
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 6
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 description 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 5
- 239000002131 composite material Substances 0.000 description 5
- 238000009792 diffusion process Methods 0.000 description 5
- 238000012360 testing method Methods 0.000 description 5
- 229910002080 8 mol% Y2O3 fully stabilized ZrO2 Inorganic materials 0.000 description 4
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 230000003071 parasitic effect Effects 0.000 description 4
- 230000002829 reductive effect Effects 0.000 description 4
- 238000000926 separation method Methods 0.000 description 4
- 239000000243 solution Substances 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- RVRKDGLTBFWQHH-UHFFFAOYSA-N yttrium zirconium Chemical compound [Y][Zr][Y] RVRKDGLTBFWQHH-UHFFFAOYSA-N 0.000 description 4
- 238000002441 X-ray diffraction Methods 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 238000011161 development Methods 0.000 description 3
- -1 oxygen ions Chemical class 0.000 description 3
- 239000008188 pellet Substances 0.000 description 3
- 230000006798 recombination Effects 0.000 description 3
- 238000005215 recombination Methods 0.000 description 3
- 239000011780 sodium chloride Substances 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- 229910052727 yttrium Inorganic materials 0.000 description 3
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 125000004429 atom Chemical group 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000007800 oxidant agent Substances 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- HEMHJVSKTPXQMS-UHFFFAOYSA-M sodium hydroxide Inorganic materials [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 2
- 238000005477 sputtering target Methods 0.000 description 2
- 238000007736 thin film deposition technique Methods 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 229910052688 Gadolinium Inorganic materials 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 150000004703 alkoxides Chemical class 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 229910000420 cerium oxide Inorganic materials 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000012295 chemical reaction liquid Substances 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000002001 electrolyte material Substances 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000013213 extrapolation Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- UIWYJDYFSGRHKR-UHFFFAOYSA-N gadolinium atom Chemical compound [Gd] UIWYJDYFSGRHKR-UHFFFAOYSA-N 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 229910001092 metal group alloy Inorganic materials 0.000 description 1
- 239000002105 nanoparticle Substances 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- BMMGVYCKOGBVEV-UHFFFAOYSA-N oxo(oxoceriooxy)cerium Chemical compound [Ce]=O.O=[Ce]=O BMMGVYCKOGBVEV-UHFFFAOYSA-N 0.000 description 1
- 230000036961 partial effect Effects 0.000 description 1
- 238000004838 photoelectron emission spectroscopy Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229910021426 porous silicon Inorganic materials 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 238000001878 scanning electron micrograph Methods 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
- 239000007785 strong electrolyte Substances 0.000 description 1
- 238000010345 tape casting Methods 0.000 description 1
- 238000011282 treatment Methods 0.000 description 1
- 239000011800 void material Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- RUDFQVOCFDJEEF-UHFFFAOYSA-N yttrium(III) oxide Inorganic materials [O-2].[O-2].[O-2].[Y+3].[Y+3] RUDFQVOCFDJEEF-UHFFFAOYSA-N 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Classifications
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- H01M8/10—Fuel cells with solid electrolytes
- H01M8/12—Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte
- H01M8/124—Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte characterised by the process of manufacturing or by the material of the electrolyte
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05D5/00—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures
- B05D5/12—Processes for applying liquids or other fluent materials to surfaces to obtain special surface effects, finishes or structures to obtain a coating with specific electrical properties
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- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
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- C04B41/52—Multiple coating or impregnating multiple coating or impregnating with the same composition or with compositions only differing in the concentration of the constituents, is classified as single coating or impregnation
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- C04B2111/00793—Uses not provided for elsewhere in C04B2111/00 as filters or diaphragms
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T29/00—Metal working
- Y10T29/49—Method of mechanical manufacture
- Y10T29/49002—Electrical device making
- Y10T29/49108—Electric battery cell making
- Y10T29/49115—Electric battery cell making including coating or impregnating
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Sustainable Development (AREA)
- Structural Engineering (AREA)
- Sustainable Energy (AREA)
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Immunology (AREA)
- General Health & Medical Sciences (AREA)
- Analytical Chemistry (AREA)
- General Physics & Mathematics (AREA)
- Molecular Biology (AREA)
- Pathology (AREA)
- Biochemistry (AREA)
- Composite Materials (AREA)
- Fuel Cell (AREA)
- Conductive Materials (AREA)
- Measuring Oxygen Concentration In Cells (AREA)
- Compositions Of Oxide Ceramics (AREA)
- Inert Electrodes (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
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US38438002P | 2002-05-29 | 2002-05-29 | |
US38437802P | 2002-05-29 | 2002-05-29 | |
US60/384,380 | 2002-05-29 | ||
US60/384,378 | 2002-05-29 | ||
PCT/US2003/017202 WO2003101629A1 (en) | 2002-05-29 | 2003-05-29 | Sub-micron electrolyte thin film on nano-porous substrate by oxidation of metal film |
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KR20050013108A true KR20050013108A (ko) | 2005-02-02 |
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Family Applications (1)
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KR10-2004-7018992A KR20050013108A (ko) | 2002-05-29 | 2003-05-29 | 금속막의 산화로 형성된 나노급 다공성기판상의 전해질 박막 |
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Families Citing this family (31)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7108813B2 (en) * | 2004-03-30 | 2006-09-19 | The Board Of Trustees Of The Leland Stanford Junior University | Gas/ion species selective membrane supported by multi-stage nano-hole array metal structure |
US20060008696A1 (en) * | 2004-06-30 | 2006-01-12 | Suk-Won Cha | Nanotubular solid oxide fuel cell |
US7655333B2 (en) * | 2004-06-30 | 2010-02-02 | The Board Of Trustees Of The Leland Stanford Junior University | Sub-micron solid oxide electrolyte membrane in a fuel cell |
US20060189142A1 (en) * | 2004-06-30 | 2006-08-24 | Yuji Saito | Method for making a sub-micron solid oxide electrolyte membrane |
JP4701695B2 (ja) * | 2004-12-08 | 2011-06-15 | トヨタ自動車株式会社 | 固体電解質およびその製造方法 |
JP5172076B2 (ja) * | 2005-03-18 | 2013-03-27 | 株式会社ニッカトー | 高導電性ジルコニア質焼結体 |
US7455722B2 (en) * | 2005-07-26 | 2008-11-25 | Honda Motor Co., Ltd | Ion irradiated electrolyte membrane, anode, and/or cathode |
CN1737846B (zh) * | 2005-09-02 | 2012-02-22 | 上海高智科技发展有限公司 | 一种从电子出版物在线网络平台获取在线电子出版物的方法 |
US20070072046A1 (en) * | 2005-09-26 | 2007-03-29 | General Electric Company | Electrochemcial cell structures and methods of making the same |
US7807231B2 (en) * | 2005-11-30 | 2010-10-05 | General Electric Company | Process for forming thermal barrier coating resistant to infiltration |
TWI295102B (en) * | 2006-01-13 | 2008-03-21 | Ind Tech Res Inst | Multi-functional substrate structure |
WO2007121032A2 (en) | 2006-03-23 | 2007-10-25 | The Research Foundation Of State University Of New York | Optical methods and systems for detecting a constituent in a gas containing oxygen in harsh environments |
US20080216132A1 (en) * | 2006-05-09 | 2008-09-04 | Shanghai Gaozhi Science And Technology Development Co., Ltd. | Method for establishing a network platform for renting the electronic publications |
US20130332945A1 (en) * | 2006-05-09 | 2013-12-12 | Shanghai Gaozhi Science And Technology Development Co. Ltd | Method for establishing a network platform for renting the electronic publications |
JP5198000B2 (ja) * | 2006-09-14 | 2013-05-15 | 本田技研工業株式会社 | 電解質・電極接合体及びその製造方法 |
US20080085430A1 (en) * | 2006-10-10 | 2008-04-10 | Macbain John A | Battery integration and control in an auxiliary power unit powered by a solid oxide fuel cell system |
US20100255387A1 (en) * | 2006-12-27 | 2010-10-07 | President And Fellows Of Harvard College | Photo-activation of solid oxide fuel cells and gas separation devices |
US8623301B1 (en) | 2008-04-09 | 2014-01-07 | C3 International, Llc | Solid oxide fuel cells, electrolyzers, and sensors, and methods of making and using the same |
JP5231080B2 (ja) * | 2008-04-30 | 2013-07-10 | 行政院原子能委員會核能研究所 | スパッタリング法による高性能固体酸化物形燃料電池膜電極接合体(sofc−mea)の電解質層の製造方法。 |
WO2010077945A2 (en) | 2008-12-17 | 2010-07-08 | Saint-Gobain Ceramics & Plastics, Inc. | Co-doped ysz eletrolytes for solid oxide fuel cell stacks |
KR101034706B1 (ko) | 2009-06-15 | 2011-05-17 | 한국생산기술연구원 | 고체산화물 연료전지의 전해질 복합체 및 그 제조방법 |
EP2534723A4 (en) * | 2010-02-10 | 2015-08-05 | Fcet Inc | LOW TEMPERATURE ELECTROLYTE FOR SOLID FUEL CELLS WITH HIGH ION CONDUCTIVITY |
JP2013179037A (ja) * | 2012-01-31 | 2013-09-09 | Nissan Motor Co Ltd | 燃料電池用電解質、固体酸化物形燃料電池及びその製造方法 |
DE102013008472A1 (de) | 2013-05-21 | 2014-11-27 | Plansee Composite Materials Gmbh | Mehrlagige Schichtanordnung für einen Festkörperelektrolyt |
WO2015009618A1 (en) | 2013-07-15 | 2015-01-22 | Fcet, Llc | Low temperature solid oxide cells |
FR3009217B1 (fr) | 2013-08-01 | 2016-10-28 | Quertech | Procede de traitement de poudre a base d'oxyde de cerium |
US20210276880A1 (en) * | 2019-03-08 | 2021-09-09 | Purdue Research Foundation | Methods of increasing the deformability of ceramic materials and ceramic materials made thereby |
KR20210102738A (ko) * | 2020-02-12 | 2021-08-20 | 삼성전자주식회사 | 복합 고체전해질, 그 제조방법 및 이를 포함하는 전기화학전지 |
CN112768704B (zh) * | 2021-01-12 | 2023-05-26 | 万华化学(四川)有限公司 | 一种基于质子传导型电解质的固态氧化物燃料电池及制备方法 |
DE102021130349A1 (de) | 2021-03-12 | 2022-09-15 | Technische Universität Darmstadt, Körperschaft des öffentlichen Rechts | Verfahren und Vorrichtung zur Herstellung von Keramiken und keramisches Produkt |
KR102624426B1 (ko) * | 2021-10-27 | 2024-01-12 | 한국표준과학연구원 | 가스 투과 측정용 표준 재료 |
Family Cites Families (36)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3348A (en) * | 1843-11-21 | Horatio allen | ||
US4069068A (en) * | 1976-07-02 | 1978-01-17 | International Business Machines Corporation | Semiconductor fabrication method for improved device yield by minimizing pipes between common conductivity type regions |
US4839019A (en) | 1986-11-20 | 1989-06-13 | Fuji Electric Co., Ltd. | Oxygen sensor |
US4851303A (en) * | 1986-11-26 | 1989-07-25 | Sri-International | Solid compositions for fuel cells, sensors and catalysts |
US4764491A (en) | 1987-05-11 | 1988-08-16 | General Motors Corporation | Low temperature sintering of yttria stabilized zirconia with lanthana borate additions |
US5310575A (en) * | 1987-11-03 | 1994-05-10 | Robert Bosch Gmbh | Method of making a porous ceramic protective layer on an electrode of an electrochemical sensor for exposure to hot gas |
JPH02181367A (ja) * | 1989-01-06 | 1990-07-16 | Yamaha Motor Co Ltd | 燃料電池用セパレータとその製造方法 |
US4888114A (en) | 1989-02-10 | 1989-12-19 | E. I. Du Pont De Nemours And Company | Sintered coating for porous metallic filter surfaces |
JPH02242566A (ja) * | 1989-03-15 | 1990-09-26 | Sanyo Electric Co Ltd | 固体電解質燃料電池 |
JPH0364087A (ja) | 1989-08-02 | 1991-03-19 | Mitsubishi Electric Corp | 半導体レーザ装置およびその製造方法 |
US5130210A (en) | 1989-08-25 | 1992-07-14 | Tonen Corporation | Stabilized zirconia solid electrolyte and process for preparation thereof |
JPH0821255B2 (ja) * | 1990-04-16 | 1996-03-04 | 松下電器産業株式会社 | 薄膜固体電解質の製造方法 |
US5106654A (en) * | 1990-07-20 | 1992-04-21 | Westinghouse Electric Corp. | Method of forming a dense, high temperature electronically conductive composite layer on a porous ceramic substrate |
GB9025236D0 (en) | 1990-11-20 | 1991-01-02 | Secr Defence | Silicon-on porous-silicon;method of production |
DE4117284A1 (de) | 1991-05-27 | 1992-12-03 | Studiengesellschaft Kohle Mbh | Verfahren zur herstellung von mikroporoesen keramikmembranen fuer die trennung von gas- und fluessigkeitsgemischen |
US5344549A (en) | 1991-10-11 | 1994-09-06 | The United States Of America As Represented By The United States Department Of Energy | Oxygen partial pressure sensor |
US5160618A (en) * | 1992-01-02 | 1992-11-03 | Air Products And Chemicals, Inc. | Method for manufacturing ultrathin inorganic membranes |
US5360635A (en) * | 1992-01-02 | 1994-11-01 | Air Products And Chemicals, Inc. | Method for manufacturing inorganic membranes by organometallic chemical vapor deposition |
JPH06283178A (ja) * | 1993-03-29 | 1994-10-07 | Nippon Telegr & Teleph Corp <Ntt> | 固体電解質型燃料電池の電解質膜製造方法 |
JP3333325B2 (ja) * | 1993-08-26 | 2002-10-15 | 株式会社東芝 | 半導体装置、半導体装置のシミュレーション方法、及び半導体装置のシミュレータ |
US5415891A (en) | 1994-01-10 | 1995-05-16 | Media And Process Technology Inc. | Method for forming metal-oxide-modified porous ceramic membranes |
US5534471A (en) | 1994-01-12 | 1996-07-09 | Air Products And Chemicals, Inc. | Ion transport membranes with catalyzed mixed conducting porous layer |
US5871650A (en) | 1994-07-08 | 1999-02-16 | Exxon Research And Engineering Company | Supported zeolite membranes with controlled crystal width and preferred orientation grown on a growth enhancing layer |
US5681373A (en) | 1995-03-13 | 1997-10-28 | Air Products And Chemicals, Inc. | Planar solid-state membrane module |
JPH08293310A (ja) * | 1995-04-20 | 1996-11-05 | Tokyo Gas Co Ltd | 固体電解質膜の製造方法 |
KR0158431B1 (ko) | 1995-06-23 | 1998-11-16 | 윤덕용 | 수소분리용 무기재료막의 제조방법 |
US5731097A (en) * | 1995-09-13 | 1998-03-24 | Kabushiki Kaisha Meidensha | Solid-electrolyte fuel cell |
US5753385A (en) * | 1995-12-12 | 1998-05-19 | Regents Of The University Of California | Hybrid deposition of thin film solid oxide fuel cells and electrolyzers |
US6152987A (en) | 1997-12-15 | 2000-11-28 | Worcester Polytechnic Institute | Hydrogen gas-extraction module and method of fabrication |
US6251473B1 (en) | 1999-05-12 | 2001-06-26 | The Trustees Of The University Of Pennsylvania | Preparation of ceramic thin films by spray coating |
US6465365B1 (en) * | 2000-04-07 | 2002-10-15 | Koninklijke Philips Electronics N.V. | Method of improving adhesion of cap oxide to nanoporous silica for integrated circuit fabrication |
US6514881B1 (en) | 2000-05-23 | 2003-02-04 | Texas Instruments Incorporated | Hybrid porous low-K dielectrics for integrated circuits |
US6437375B1 (en) * | 2000-06-05 | 2002-08-20 | Micron Technology, Inc. | PD-SOI substrate with suppressed floating body effect and method for its fabrication |
US6432308B1 (en) | 2000-09-25 | 2002-08-13 | Graver Technologies, Inc. | Filter element with porous nickel-based alloy substrate and metal oxide membrane |
ATE508488T1 (de) * | 2001-12-18 | 2011-05-15 | Univ California | Verfahren zur herstellung dichter dünnfilme |
US20030003348A1 (en) | 2002-07-17 | 2003-01-02 | Hanket Gregory M. | Fuel cell |
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2003
- 2003-05-29 CA CA002487859A patent/CA2487859A1/en not_active Abandoned
- 2003-05-29 CA CA2487611A patent/CA2487611C/en not_active Expired - Fee Related
- 2003-05-29 KR KR10-2004-7018992A patent/KR20050013108A/ko not_active Application Discontinuation
- 2003-05-29 EP EP03808387A patent/EP1514323A4/en not_active Withdrawn
- 2003-05-29 JP JP2004548275A patent/JP2006501626A/ja active Pending
- 2003-05-29 US US10/449,736 patent/US7179500B2/en not_active Expired - Fee Related
- 2003-05-29 WO PCT/US2003/017432 patent/WO2004040670A2/en active Application Filing
- 2003-05-29 AU AU2003301727A patent/AU2003301727A1/en not_active Abandoned
- 2003-05-29 EP EP03739011A patent/EP1513623B1/en not_active Expired - Fee Related
- 2003-05-29 US US10/449,709 patent/US7195833B2/en not_active Expired - Fee Related
- 2003-05-29 WO PCT/US2003/017202 patent/WO2003101629A1/en active Application Filing
- 2003-05-29 JP JP2004508971A patent/JP4216803B2/ja not_active Expired - Fee Related
- 2003-05-29 AU AU2003245372A patent/AU2003245372A1/en not_active Abandoned
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WO2004040670A3 (en) | 2004-10-21 |
EP1513623B1 (en) | 2012-09-12 |
AU2003301727A1 (en) | 2004-05-25 |
EP1513623A4 (en) | 2007-08-08 |
CA2487611C (en) | 2011-11-01 |
AU2003245372A1 (en) | 2003-12-19 |
WO2004040670A2 (en) | 2004-05-13 |
EP1514323A2 (en) | 2005-03-16 |
CA2487859A1 (en) | 2004-05-13 |
AU2003301727A8 (en) | 2004-05-25 |
CA2487611A1 (en) | 2003-12-11 |
JP4216803B2 (ja) | 2009-01-28 |
AU2003245372A8 (en) | 2003-12-19 |
US20040038106A1 (en) | 2004-02-26 |
EP1514323A4 (en) | 2006-01-11 |
WO2003101629A1 (en) | 2003-12-11 |
EP1513623A1 (en) | 2005-03-16 |
JP2005527370A (ja) | 2005-09-15 |
US7195833B2 (en) | 2007-03-27 |
US20040013924A1 (en) | 2004-01-22 |
US7179500B2 (en) | 2007-02-20 |
JP2006501626A (ja) | 2006-01-12 |
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