ATE508488T1 - Verfahren zur herstellung dichter dünnfilme - Google Patents

Verfahren zur herstellung dichter dünnfilme

Info

Publication number
ATE508488T1
ATE508488T1 AT02805216T AT02805216T ATE508488T1 AT E508488 T1 ATE508488 T1 AT E508488T1 AT 02805216 T AT02805216 T AT 02805216T AT 02805216 T AT02805216 T AT 02805216T AT E508488 T1 ATE508488 T1 AT E508488T1
Authority
AT
Austria
Prior art keywords
techniques
structures
substrates
substrate
electrolyte
Prior art date
Application number
AT02805216T
Other languages
English (en)
Inventor
Steven Visco
Jonghe Lutgard De
Craig P Jacobson
Original Assignee
Univ California
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ California filed Critical Univ California
Application granted granted Critical
Publication of ATE508488T1 publication Critical patent/ATE508488T1/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/10—Fuel cells with solid electrolytes
    • H01M8/12—Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte
    • H01M8/1213—Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte characterised by the electrode/electrolyte combination or the supporting material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/10—Fuel cells with solid electrolytes
    • H01M8/12—Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte
    • H01M8/1213—Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte characterised by the electrode/electrolyte combination or the supporting material
    • H01M8/1226—Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte characterised by the electrode/electrolyte combination or the supporting material characterised by the supporting layer
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/86—Inert electrodes with catalytic activity, e.g. for fuel cells
    • H01M4/90—Selection of catalytic material
    • H01M4/9041—Metals or alloys
    • H01M4/905—Metals or alloys specially used in fuel cell operating at high temperature, e.g. SOFC
    • H01M4/9066—Metals or alloys specially used in fuel cell operating at high temperature, e.g. SOFC of metal-ceramic composites or mixtures, e.g. cermets
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/10—Fuel cells with solid electrolytes
    • H01M8/12—Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte
    • H01M8/124—Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte characterised by the process of manufacturing or by the material of the electrolyte
    • H01M8/1246—Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte characterised by the process of manufacturing or by the material of the electrolyte the electrolyte consisting of oxides
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30—Hydrogen technology
    • Y02E60/50—Fuel cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Life Sciences & Earth Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Sustainable Development (AREA)
  • Sustainable Energy (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Fuel Cell (AREA)
  • Inert Electrodes (AREA)
  • Glass Compositions (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Cell Electrode Carriers And Collectors (AREA)
  • Secondary Cells (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Compositions Of Oxide Ceramics (AREA)
AT02805216T 2001-12-18 2002-12-18 Verfahren zur herstellung dichter dünnfilme ATE508488T1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US34329401P 2001-12-18 2001-12-18
PCT/US2002/040703 WO2003051529A1 (en) 2001-12-18 2002-12-18 A process for making dense thin films

Publications (1)

Publication Number Publication Date
ATE508488T1 true ATE508488T1 (de) 2011-05-15

Family

ID=23345496

Family Applications (1)

Application Number Title Priority Date Filing Date
AT02805216T ATE508488T1 (de) 2001-12-18 2002-12-18 Verfahren zur herstellung dichter dünnfilme

Country Status (6)

Country Link
US (1) US6921557B2 (de)
EP (1) EP1455952B1 (de)
AT (1) ATE508488T1 (de)
AU (1) AU2002357341A1 (de)
DE (1) DE60239956D1 (de)
WO (1) WO2003051529A1 (de)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7163713B2 (en) * 1999-07-31 2007-01-16 The Regents Of The University Of California Method for making dense crack free thin films
AU2003301727A1 (en) * 2002-05-29 2004-05-25 Honda Giken Kogyo Kabushiki Kaisha Solid oxide electrolyte with ion conductivity enhancement by dislocation
WO2004033061A2 (en) * 2002-10-04 2004-04-22 The Regents Of The University Of California Fluorine separation and generation device
US7910158B2 (en) * 2002-10-10 2011-03-22 General Electric Company Method for fabricating an array of electrode and electrolyte materials for use in solid oxide fuel cells
US8514168B2 (en) * 2003-10-07 2013-08-20 Sipix Imaging, Inc. Electrophoretic display with thermal control
EP1997182A1 (de) * 2006-03-14 2008-12-03 Pirelli & C. S.p.A. ELEKTROCHEMISCHE EINRICHTUNG UND PROZEß ZUM HERSTELLEN EINER ELEKTROCHEMISCHEN EINRICHTUNG
DE102007026233A1 (de) * 2007-05-31 2008-12-04 Deutsches Zentrum für Luft- und Raumfahrt e.V. Verfahren zur Herstellung einer gasdichten Festelektrolytschicht und Festelektrolytschicht
US20090194223A1 (en) * 2008-02-06 2009-08-06 Battelle Memorial Institute Low-temperature sintering of lanthanum strontium manganite-based contact pastes for sofcs
JP4960903B2 (ja) * 2008-02-27 2012-06-27 本田技研工業株式会社 積層体の検査方法、検査装置及び検査プログラム
US8623301B1 (en) 2008-04-09 2014-01-07 C3 International, Llc Solid oxide fuel cells, electrolyzers, and sensors, and methods of making and using the same
DE102008049608A1 (de) * 2008-09-30 2010-04-01 Siemens Aktiengesellschaft Verfahren zur Herstellung eines Interkonnektors für Hochtemperatur-Brennstoffzellen, zugehörige Hochtemperatur-Brennstoffzelle sowie damit aufgebaute Brennstoffzellenanlage
FR2938270B1 (fr) * 2008-11-12 2013-10-18 Commissariat Energie Atomique Substrat en metal ou alliage metallique poreux, son procede de preparation, et cellules d'eht ou de sofc a metal support comprenant ce substrat
FR2948821B1 (fr) 2009-08-03 2011-12-09 Commissariat Energie Atomique Cellule electrochimique a metal support et son procede de fabrication
US20110111309A1 (en) * 2009-11-10 2011-05-12 Point Source Power, Inc. Fuel cell system
EP2534723A4 (de) 2010-02-10 2015-08-05 Fcet Inc Niedrigtemperatur-elektrolyte für festbrennstoffzellen mit hoher ionenleitfähigkeit
WO2013082110A1 (en) * 2011-12-02 2013-06-06 Bio2Electric, Llc Reactor, process, and system for the oxidation of gaseous streams
US9452475B2 (en) * 2012-03-01 2016-09-27 Bloom Energy Corporation Coatings for SOFC metallic interconnects
CN104956532B (zh) * 2012-12-18 2018-04-10 圣戈本陶瓷及塑料股份有限公司 用于固体氧化物燃料电池中的层的粉末混合物
WO2015009618A1 (en) 2013-07-15 2015-01-22 Fcet, Llc Low temperature solid oxide cells
US11211613B2 (en) 2019-02-01 2021-12-28 Ford Global Technologies, Llc Electrodes with active material particles having mixed ionic and electronic conducting layers thereon
CN114086198B (zh) * 2021-12-15 2022-11-08 中国科学院大连化学物理研究所 一种固体氧化物电解池膜电极的制备方法
CN114583226B (zh) * 2022-03-31 2024-07-12 电堆科技(合肥)有限公司 一种金属支撑质子导体固体氧化物电池及其制备方法

Family Cites Families (56)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US48699A (en) * 1865-07-11 Improved method of forming blank clips for single-trees
CA941643A (en) 1971-03-25 1974-02-12 Union Carbide Corporation Metal porous abradable seals
US4279974A (en) * 1977-09-02 1981-07-21 Ngk Spark Plug Co., Ltd. Solid electrolytic material and use thereof
US4440836A (en) 1982-12-14 1984-04-03 Union Carbide Corporation Nonaqueous cell employing an anode having a boron-containing surface film
CA2017243C (en) 1989-05-25 2003-09-30 Terry J. Mazanec Novel solid multi-component membranes, electrochemical reactor and use of membranes and reactor for oxidation reactions
US5648487A (en) * 1989-11-15 1997-07-15 Ciba-Geigy Corporation Process for the preparation of aminotriazine derivatives
DE4002951A1 (de) * 1990-02-01 1991-08-08 Medicoat Ag Niederrohrdorf Festelektrolyt - brennstoffzelle und verfahren zu ihrer herstellung
US5286580A (en) * 1990-02-09 1994-02-15 Osaka Gas Company Limited Fuel electrode for solid electrolyte fuel cells and a method for manufacture of the electrode
US5035962A (en) * 1990-03-21 1991-07-30 Westinghouse Electric Corp. Layered method of electrode for solid oxide electrochemical cells
US5366770A (en) * 1990-04-17 1994-11-22 Xingwu Wang Aerosol-plasma deposition of films for electronic cells
JP2572883B2 (ja) 1990-09-04 1997-01-16 日本碍子株式会社 固体電解質膜及びこれを有する固体電解質型燃料電池、並びにこれらの製造方法
US5169811A (en) * 1991-01-22 1992-12-08 Allied-Signal Inc. Beneficiated lanthanum chromite for low temperature firing
JP2719049B2 (ja) 1991-01-28 1998-02-25 日本碍子株式会社 ランタンクロマイト膜の製造方法及び固体電解質型燃料電池用インターコネクターの製造方法
JPH05135787A (ja) 1991-03-28 1993-06-01 Ngk Insulators Ltd 固体電解質膜の製造方法及び固体電解質型燃料電池の製造方法
US5342703A (en) 1991-07-19 1994-08-30 Ngk Insulators, Ltd. Solid electrolyte type fuel cell and method for producing the same
US5219673A (en) * 1991-08-23 1993-06-15 Kaun Thomas D Cell structure for electrochemical devices and method of making same
US5286322A (en) * 1991-10-18 1994-02-15 Allied-Signal, Inc. Rapid thermal processing of multilayer tapes for fuel cell applications
US5160618A (en) * 1992-01-02 1992-11-03 Air Products And Chemicals, Inc. Method for manufacturing ultrathin inorganic membranes
CA2096386A1 (en) * 1992-05-18 1993-11-19 Masahiro Kamauchi Lithium secondary battery
US5338625A (en) * 1992-07-29 1994-08-16 Martin Marietta Energy Systems, Inc. Thin film battery and method for making same
US5240480A (en) * 1992-09-15 1993-08-31 Air Products And Chemicals, Inc. Composite mixed conductor membranes for producing oxygen
JPH06103990A (ja) * 1992-09-18 1994-04-15 Ngk Insulators Ltd 固体電解質型燃料電池及びその製造方法
DE4331912A1 (de) * 1992-10-28 1995-03-23 Siemens Ag Verfahren zum Dichten von Hochtemperatur-Brennstoffzellen
CA2110097C (en) 1992-11-30 2002-07-09 Soichiro Kawakami Secondary battery
US5368667A (en) * 1993-01-29 1994-11-29 Alliedsignal Inc. Preparation of devices that include a thin ceramic layer
US5312582A (en) * 1993-02-04 1994-05-17 Institute Of Gas Technology Porous structures from solid solutions of reduced oxides
US5356730A (en) * 1993-03-26 1994-10-18 Alliedsignal Inc. Monolithic fuel cell having improved interconnect layer
US5342710A (en) * 1993-03-30 1994-08-30 Valence Technology, Inc. Lakyer for stabilization of lithium anode
US5342705A (en) * 1993-06-04 1994-08-30 Allied-Signal, Inc. Monolithic fuel cell having a multilayer interconnect
JPH0768172A (ja) * 1993-07-20 1995-03-14 Sakai Chem Ind Co Ltd 窒素酸化物接触還元用触媒及び方法
US5589285A (en) * 1993-09-09 1996-12-31 Technology Management, Inc. Electrochemical apparatus and process
US5314765A (en) * 1993-10-14 1994-05-24 Martin Marietta Energy Systems, Inc. Protective lithium ion conducting ceramic coating for lithium metal anodes and associate method
DE4344061C1 (de) * 1993-12-23 1995-03-30 Mtu Muenchen Gmbh Bauteil mit Schutzanordnung gegen Alitieren oder Chromieren beim Gasdiffusionsbeschichten und Verfahren zu seiner Herstellung
DE69434357T2 (de) * 1993-12-27 2006-03-09 Kabushiki Kaisha Toyota Chuo Kenkyusho Legierung auf Stahlbasis mit hohem Modul und Verfahren zu deren Herstellung
US5569520A (en) * 1994-01-12 1996-10-29 Martin Marietta Energy Systems, Inc. Rechargeable lithium battery for use in applications requiring a low to high power output
US5814420A (en) * 1994-11-23 1998-09-29 Polyplus Battery Company, Inc. Rechargeable positive electrodes
US6025094A (en) * 1994-11-23 2000-02-15 Polyplus Battery Company, Inc. Protective coatings for negative electrodes
US5686201A (en) * 1994-11-23 1997-11-11 Polyplus Battery Company, Inc. Rechargeable positive electrodes
US5725965A (en) 1995-04-25 1998-03-10 Gas Research Institute Stable high conductivity functionally gradient compositionally layered solid state electrolytes and membranes
US6123797A (en) 1995-06-23 2000-09-26 The Dow Chemical Company Method for coating a non-wetting fluidizable and material onto a substrate
US5670270A (en) * 1995-11-16 1997-09-23 The Dow Chemical Company Electrode structure for solid state electrochemical devices
US5993986A (en) * 1995-11-16 1999-11-30 The Dow Chemical Company Solide oxide fuel cell stack with composite electrodes and method for making
DE59604956D1 (de) * 1996-02-02 2000-05-18 Sulzer Hexis Ag Winterthur Hochtemperatur-Brennstoffzelle mit einem Dünnfilm-Elektrolyten
US5938822A (en) * 1997-05-02 1999-08-17 Praxair Technology, Inc. Solid electrolyte membrane with porous catalytically-enhancing constituents
US6228520B1 (en) * 1997-04-10 2001-05-08 The Dow Chemical Company Consinterable ceramic interconnect for solid oxide fuel cells
US6051173A (en) * 1998-01-15 2000-04-18 International Business Machines Corporation Method of making a solid oxide fuel cell with controlled porosity
US6051330A (en) * 1998-01-15 2000-04-18 International Business Machines Corporation Solid oxide fuel cell having vias and a composite interconnect
US5993985A (en) * 1998-04-09 1999-11-30 Siemens Westinghouse Power Corporation Fuel cell tubes and method of making same
AU731430B2 (en) * 1998-05-20 2001-03-29 Nippon Shokubai Co., Ltd. Porous ceramic sheet, process for producing the same, and setter for use in the process
US6458170B1 (en) * 1998-12-03 2002-10-01 The Regents Of The University Of California Method for making thin, flat, dense membranes on porous substrates
US6358567B2 (en) * 1998-12-23 2002-03-19 The Regents Of The University Of California Colloidal spray method for low cost thin coating deposition
US6248468B1 (en) * 1998-12-31 2001-06-19 Siemens Westinghouse Power Corporation Fuel electrode containing pre-sintered nickel/zirconia for a solid oxide fuel cell
US6368383B1 (en) * 1999-06-08 2002-04-09 Praxair Technology, Inc. Method of separating oxygen with the use of composite ceramic membranes
US6605316B1 (en) * 1999-07-31 2003-08-12 The Regents Of The University Of California Structures and fabrication techniques for solid state electrochemical devices
DK174654B1 (da) 2000-02-02 2003-08-11 Topsoe Haldor As Faststofoxid brændselscelle og anvendelser heraf
GB2368450B (en) 2000-10-25 2004-05-19 Imperial College Fuel cells

Also Published As

Publication number Publication date
EP1455952A4 (de) 2009-02-25
US6921557B2 (en) 2005-07-26
DE60239956D1 (de) 2011-06-16
AU2002357341A1 (en) 2003-06-30
US20030175439A1 (en) 2003-09-18
EP1455952B1 (de) 2011-05-04
WO2003051529A1 (en) 2003-06-26
EP1455952A1 (de) 2004-09-15

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