KR20040105766A - 보강된 화학 기계적인 평탄화벨트 - Google Patents

보강된 화학 기계적인 평탄화벨트 Download PDF

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Publication number
KR20040105766A
KR20040105766A KR10-2004-7014272A KR20047014272A KR20040105766A KR 20040105766 A KR20040105766 A KR 20040105766A KR 20047014272 A KR20047014272 A KR 20047014272A KR 20040105766 A KR20040105766 A KR 20040105766A
Authority
KR
South Korea
Prior art keywords
belt
polymer layer
cmp
polymer
layer
Prior art date
Application number
KR10-2004-7014272A
Other languages
English (en)
Korean (ko)
Inventor
린지빙
히메스다이안제이.
Original Assignee
램 리서치 코포레이션
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/097,337 external-priority patent/US6666326B2/en
Priority claimed from US10/112,447 external-priority patent/US20030186630A1/en
Application filed by 램 리서치 코포레이션 filed Critical 램 리서치 코포레이션
Publication of KR20040105766A publication Critical patent/KR20040105766A/ko

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G15/00—Conveyors having endless load-conveying surfaces, i.e. belts and like continuous members, to which tractive effort is transmitted by means other than endless driving elements of similar configuration
    • B65G15/30—Belts or like endless load-carriers
    • B65G15/32—Belts or like endless load-carriers made of rubber or plastics
    • B65G15/34—Belts or like endless load-carriers made of rubber or plastics with reinforcing layers, e.g. of fabric
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/005—Control means for lapping machines or devices
    • B24B37/013—Devices or means for detecting lapping completion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/205—Lapping pads for working plane surfaces provided with a window for inspecting the surface of the work being lapped
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D11/00—Constructional features of flexible abrasive materials; Special features in the manufacture of such materials
    • B24D11/02—Backings, e.g. foils, webs, mesh fabrics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D29/00—Producing belts or bands
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G15/00—Conveyors having endless load-conveying surfaces, i.e. belts and like continuous members, to which tractive effort is transmitted by means other than endless driving elements of similar configuration
    • B65G15/30—Belts or like endless load-carriers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2305/00—Condition, form or state of the layers or laminate
    • B32B2305/08—Reinforcements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B32—LAYERED PRODUCTS
    • B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B2413/00—Belts

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Belt Conveyors (AREA)
KR10-2004-7014272A 2002-03-12 2003-03-10 보강된 화학 기계적인 평탄화벨트 KR20040105766A (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US10/097,337 2002-03-12
US10/097,337 US6666326B2 (en) 2002-03-12 2002-03-12 Reinforced chemical mechanical planarization belt
US10/112,447 2002-03-29
US10/112,447 US20030186630A1 (en) 2002-03-29 2002-03-29 Reinforced chemical mechanical planarization belt
PCT/US2003/007389 WO2003078859A2 (en) 2002-03-12 2003-03-10 Reinforced chemical mechanical planarization belt

Publications (1)

Publication Number Publication Date
KR20040105766A true KR20040105766A (ko) 2004-12-16

Family

ID=28044136

Family Applications (1)

Application Number Title Priority Date Filing Date
KR10-2004-7014272A KR20040105766A (ko) 2002-03-12 2003-03-10 보강된 화학 기계적인 평탄화벨트

Country Status (7)

Country Link
EP (1) EP1483182A4 (ja)
JP (1) JP2005520335A (ja)
KR (1) KR20040105766A (ja)
CN (1) CN1639034A (ja)
AU (1) AU2003213823A1 (ja)
TW (1) TW586158B (ja)
WO (1) WO2003078859A2 (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8491360B2 (en) * 2007-10-26 2013-07-23 Innopad, Inc. Three-dimensional network in CMP pad
TWI713526B (zh) * 2016-05-20 2020-12-21 智勝科技股份有限公司 基底層、具有基底層的研磨墊及研磨方法
KR20220027186A (ko) * 2019-08-01 2022-03-07 베른도르프 이노베이션즈 운트 테크놀로지 게엠베하 엔드리스 벨트 제조 방법
CN111168503B (zh) * 2020-01-17 2021-02-19 三峡大学 一种刚度可调的打磨装置及使用方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5234551A (en) * 1981-09-24 1993-08-10 Dutt William H Extended nip press belt having an interwoven base fabric and an impervious impregnant
RU2014990C1 (ru) * 1991-11-06 1994-06-30 Иван Николаевич Щербина Бесконечная полировальная лента
US5906269A (en) * 1994-08-12 1999-05-25 Habasit Globe, Inc. Conveyor belting and method of manufacture
AU719570B2 (en) * 1996-07-02 2000-05-11 Yokohama Rubber Co., Ltd., The Conveyor belt
JPH10120137A (ja) * 1996-10-21 1998-05-12 Mitsuboshi Belting Ltd 搬送用ベルトおよび同ベルトの製造方法
AT404741B (de) * 1997-03-11 1999-02-25 Huyck Austria Textiler gurt
US6736714B2 (en) * 1997-07-30 2004-05-18 Praxair S.T. Technology, Inc. Polishing silicon wafers

Also Published As

Publication number Publication date
AU2003213823A8 (en) 2003-09-29
EP1483182A2 (en) 2004-12-08
WO2003078859A2 (en) 2003-09-25
TW200304180A (en) 2003-09-16
JP2005520335A (ja) 2005-07-07
CN1639034A (zh) 2005-07-13
WO2003078859A3 (en) 2004-03-25
TW586158B (en) 2004-05-01
EP1483182A4 (en) 2007-04-25
AU2003213823A1 (en) 2003-09-29

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