KR20040071789A - Probe for manufacturing probe for testing flat pannel display, probe thereby, probe assembly having its - Google Patents

Abstract

PURPOSE: A method for manufacturing a probe for testing a flat panel display, a probe thereby, and a probe assembly having the probe are provided to reduce a time required for a manufacturing process by simplifying the manufacturing process. CONSTITUTION: A first protrusion(12) and a second protrusion(16) faced to each other on one side of an upper surface of a reinforcement plate(10) are formed. The first protrusion(12) and the second protrusion(16) are formed by forming a central groove(16) along a longitudinal direction. A plurality of slits are connected to the central groove and formed. A needle(20) having a predetermined length is installed such that both end parts of the slits and the central groove are protruded to an outside of the reinforcement plate(10). The needle(20) is fixed to the reinforcement plate(10) through adhesion.

Description

Method for manufacturing a probe for inspecting a flat panel display device, a probe and a probe assembly having the same according to the present invention {probe for manufacturing probe for testing flat pannel display, probe thereby, probe assembly having its}

The present invention relates to a method for manufacturing a probe for inspecting a flat panel display device, and a probe and a probe assembly having the same according to the present invention. More particularly, the present invention relates to a flat panel display device which can be easily inspected whether a flat panel display device is normally present. The present invention relates to a method for manufacturing a test probe, a probe, and a probe assembly having the same.

In general, TFT-LCD (Thin Film Transistor Liquid Crystal Display) is a kind of flat panel display, in which a myriad of thin film transistors (TFTs) and recovery electrodes are arranged, a lower plate having a predetermined size, a color filter for displaying color, and The common electrode is sequentially formed and has an upper plate spaced apart from the lower plate by a predetermined distance, and a liquid crystal filled in the space between the upper plate and the lower plate.

Such a TFT-LCD uses a capacitor region and an auxiliary charge region formed by a liquid crystal between a TFT, which is a switching element, and an upper and lower plates, and a gate driving electrode driving an on-off of the TFT and an external image signal. The predetermined screen (including a video) is turned on by the video signal electrode or the like to be applied.

After the manufacturing of such a flat panel display device such as a TFT-LCD, the electrode of the flat panel display device is contacted with the probe of the probe assembly and an electric signal is applied to confirm whether the flat display device is normal or not. We are in the process of removing the test early.

The test of the flat panel display device includes a probe assembly to which various types of probes are attached, such as a needle type, a blade type, a film type, and a MEMS type. It is made using a probing apparatus having a.

In addition, the MEMS type is "A manufacturing method of a probe for inspecting a flat panel display device, a probe according to the present invention, and a probe assembly having the same (application number: 10-2002-0082273) filed by the applicant on December 23, 2002" Posted in

However, the needle type, the blade type, the film type, and the MEMS type as described above have a problem in that the yield is lowered due to various kinds of defective factors due to the complicated manufacturing process.

In particular, the MEMS type has a good effect on aspects such as reproducibility and productivity, but there is an excessive problem of maintenance cost and product production cost of the production facility.

Disclosure of Invention An object of the present invention is to provide a method for manufacturing a probe for inspecting a flat panel display device, the probe according to the same, and a probe assembly having the same.

1A to 1E are perspective views illustrating a flat panel display inspection probe and a method of manufacturing the same according to an embodiment of the present invention.

2A and 2B are perspective views illustrating a probe for inspecting a flat panel display device and a method of manufacturing the same according to another embodiment of the present invention.

3A is a perspective view illustrating a probe for inspecting a flat panel display device and a method of manufacturing the same according to still another embodiment of the present invention, and FIG. 3B is a cross-sectional view.

4 is a perspective view illustrating a probe assembly having a probe for inspecting a flat panel display device according to an exemplary embodiment of the present invention.

5 is a cross-sectional view illustrating a probe assembly having a probe for inspecting a flat panel display device according to an exemplary embodiment of the present invention.

<Description of the symbols for the main parts of the drawings>

10, 30: reinforcement plate 12, 32, 52: first locking jaw

14, 34, 54: central groove 16, 36, 56: second locking jaw

18, 38, 58: Slit 20, 40, 60: Needle

22, 42, 62: epoxy

Method for manufacturing a flat panel display inspection probe according to the present invention for achieving the above object, the reinforcement by forming a central groove in the longitudinal direction from one side of the upper surface of the reinforcing plate of the rigid plate of the rectangular plate shape to the other side facing Forming a first projection jaw and a second projection jaw facing each other on the upper surface of the plate; Forming a plurality of slits connected to the central groove on the first protrusion jaw and the second protrusion jaw; Positioning a needle having a predetermined length so that both ends of the slit and the central groove protrude out of the reinforcing plate; And fixing the needle on the reinforcement plate by using an adhesive.

In this case, the center groove and the slit may be formed using a dicing saw, and the slit is formed horizontally with the center groove or deeper than the center groove so as to have a depth deeper than the center groove. The flatness of the needle positioned at may be determined by the flatness of the central groove.

The needle may be made of tungsten (W) or a tungsten alloy material, and may be used by sharply processing both ends of the needle, and epoxy may be used as the adhesive.

In addition, after the probe is manufactured, another probe is manufactured according to the manufacturing method and attached to each other by using an adhesive so that the needle of the upper probe and the needle of the lower probe cross each other vertically, and one end of the needle positioned at the top. It can be attached so that the total length of the upper and lower needles protruding outward and exposed to the outside than the end of the needle located in the lower portion is the same.

And forming the center groove, the first protrusion jaw and the second protrusion jaw, and the first slit and the second slit, and the first slit, the second slit, and the center of the lower surface of the reinforcing plate. Positioning the needle of a predetermined length so that both ends protrude out of the reinforcement plate in the groove and fixing the needle to the lower surface of the reinforcement plate using an adhesive.

In addition, the needle of the upper surface of the reinforcement plate and the needle of the lower surface cross each other, the end of one side of the needle located on the upper surface of the reinforcement plate protrudes outward than the end of the needle located on the lower surface of the upper and lower needles exposed to the outside It is preferable to attach so that the total length is the same.

The slits formed in the first protrusion jaw and the second protrusion jaw may be formed to be different from each other.

In the flat display device inspection probe according to the present invention, a plurality of contact members are arranged in a line with a plurality of contacts spaced apart at predetermined intervals by a bonding means under the reinforcing plate. A reinforcement plate made of a rigid material having a plate shape in which a central groove in a longitudinal direction is formed on an upper surface from one side to the other side facing the first side, and a first protrusion is formed at one periphery of the central groove, and a second protrusion is formed at the periphery of the central groove. ; A plurality of slits formed to be connected to the central groove on the first protrusion jaw and the second protrusion jaw; And a needle inserted into the slit and positioned to protrude to one side and the other side of the slit, and then the needle as the contact member fixed by an adhesive.

Here, the other probes are superimposed on the probes so that the needles of the upper probe and the needle of the lower probe vertically cross each other, and one end of the needle positioned at the upper portion protrudes to the outside than the end of the needle at the lower portion and is exposed to the outside. It is desirable that the total lengths of the upper and lower needles be the same.

The probe overlapping the probe may be formed of two or more layers, and the center groove, the first protruding jaw, the second protruding jaw, and the slit are further formed on the lower surface of the reinforcing plate of the probe, so that The needle inserted into the formed slit and the needle inserted into the slit formed on the upper surface of the reinforcing plate cross each other vertically, and one end of the needle positioned on the upper surface of the reinforcing plate is outward from the end of the needle located on the lower surface of the reinforcing plate. It is preferable to protrude.

In addition, the needle may be sharply processed at both ends by tungsten (W) or tungsten alloy material, and gaps between slits on the first protrusion and the second protrusion may be different from each other, and the reinforcement plate may be made of ceramic material. Can be.

In addition, the probe assembly for inspecting a flat panel display device according to the present invention, a probe block having a contact body in direct contact with the inspection region of the inspection object is fixed to the lower surface, a probe holder for fixing the probe block and the probe holder A probe assembly for inspecting a flat panel display device having a manipulator for connecting the probe block to a vertical force by a physical force, wherein the probe block has an inclined surface inclined at a predetermined angle therein. In the inclined surface of the probe block, a rectangular groove is formed on the upper surface of the central groove in the longitudinal direction from the one side to the other side facing from the one side, so that a first protruding jaw is formed at the periphery of the central groove and the second periphery at the other periphery of the central groove. On the reinforcement plate of the rigid material formed with a projection jaw and the first projection jaw and the second projection jaw And a probe having a plurality of slits connected to the central groove and needles as the contact bodies fixed in the slit and inserted into the slit and protruding toward one side of the reinforcing plate and fixed by an adhesive.

Here, the probe block and the probe may be bonded to each other by an adhesive or may be fixed to each other by a fixing screw, one needle of the probe is used as a contact and the other needle is a tape carrier package (TCP) and a guide film (Guide film) It can be connected to each other via a medium.

The probe attached to the probe block is formed of two or more layers, and the upper needle of the needle of the two or more layers of the probe is positioned to vertically intersect with the needle located below the probe. One end of the needle of the protruding in the horizontal direction than the end of the needle of the probe located in the lower portion is preferably configured so that the total length of the upper and lower needles exposed to the same.

In addition, the center groove, the first protruding jaw, the second protruding jaw and a slit are further formed on a lower surface of the reinforcing plate of the probe to be attached to the probe block, and the needle and the upper surface of the reinforcing plate are inserted into and attached to the slit formed on the lower surface of the reinforcing plate. Needles inserted into and attached to the slits formed in the slits vertically cross each other, and one end of the needle positioned on the upper surface of the reinforcement plate protrudes to the outside than the end of the needle positioned on the lower surface of the reinforcement plate and is exposed to the outside. Preferably, the lengths are configured to be the same.

Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.

1A to 1E are flowcharts illustrating a flat panel display inspection probe and a method of manufacturing the same according to an embodiment of the present invention.

The probe for inspecting a flat panel display device and a method of manufacturing the same according to the present invention, as shown in Figure 1a to prepare a reinforcing plate 10 of a rigid material such as ceramic (Ceramic). In addition, by forming the central groove 14 in the longitudinal direction from the one side of the upper surface of the reinforcing plate 10 to the other side facing each other, the first protruding jaw 12 and the second protrusion facing each other on the upper surface of the reinforcing plate 10 The jaw 16 is formed.

In this case, the center groove 124 may be formed using a dicing saw or the like.

Next, as shown in FIG. 1B, the central groove has a predetermined width and depth in which a plurality of needles may be inserted into the first and second locking jaws 12 and 16 on the reinforcing plate 10. A plurality of slots 18a connected to 14 are formed by using a dicing saw or the like.

At this time, each of the slots (18a, 18b) formed on the first engaging jaw 12 and the second engaging jaw 14 are formed at equal intervals as shown in Figure 1c, the first engaging jaw 12 The slot 18b formed in the slot 18b and the slot 18a formed in the second latching jaw 16 face each other, or the slot 18b formed in the first latching jaw 12 is densely formed and the second latching jaw ( The slot 18a formed in 16 may be jumpy, that is, formed coarse or vice versa.

In particular, the depth of formation of the slots 18a and 18b is preferably formed to be parallel to the center groove 14 or deeper than the center groove 14 to flatten the needles positioned in the slits 18a and 18b. Preferably, the degree is determined by the flatness of the central groove 14.

Subsequently, as shown in FIG. 1D, the predetermined lengths and diameters of which edges are sharply processed in the slots 18a and 18b formed in the first and second latching jaws 12 and 16 of the reinforcing plate 10 are provided. Place the needle 20.

In this case, the needle 20 has a predetermined length that can protrude to the outside of the reinforcing plate 10, one end is used as a contact directly in contact with the inspection portion of the flat panel display element and the other end is TCP (Tape Carrier Package) It is used as a connecting body. In addition, the needle 20 may be made of tungsten or a tungsten alloy material.

Lastly, as illustrated in FIG. 1E, epoxy is formed on the reinforcing plate 10 in which the needles 20 are positioned in the slots 18a and 18b formed in the first and second locking projections 12 and 16. : A needle 20 is attached to the reinforcing plate 10 by applying and curing an adhesive such as 22) to complete the probe.

2A and 2B are perspective views illustrating a flat panel display inspection probe and a method of manufacturing the same according to another embodiment of the present invention.

A probe for inspecting a flat panel display device and a method of manufacturing the same according to another embodiment of the present invention are manufactured by the same manufacturing method on the upper part of the reinforcing plate 10 of the probe according to the first embodiment as shown in FIG. 2A. The reinforcing plate 30 of the other probe.

In this case, the slit 38a connected to the central groove 34 on the first locking jaw 32 and the second locking jaw 36 by the same manufacturing process as that of the probe according to the first embodiment is also provided. , 38b) are formed, and the needle 40 is positioned inside the slits 38a and 38b, and is attached and fixed by an adhesive such as epoxy 42 or the like.

Finally, as shown in FIG. 2B, the lower probe and the upper probe are attached and overlapped with each other using an adhesive such as an epoxy (not shown).

At this time, the needle 40 of the upper probe and the needle 20 of the lower probe vertically cross each other, and one end of the needle 40 positioned at the upper portion protrudes outward from the end of the needle 20 positioned at the lower portion thereof. The total lengths of the upper and lower needles exposed to the outside are the same so that the electrical and physical characteristic conditions are the same. In addition, the needles 40 and 20 at one end are used as a contact member directly contacting the inspection portion of the flat panel display device, and used as a connector connected to a tape carrier package (TCP) at the other end.

In the present embodiment, the present invention is limited to overlapping, but it will be obvious that two or more layers can be manufactured according to the manufacturer.

In addition, the attachment overlap direction of the lower probe and the upper probe may be selectively attached to the reinforcement plate 30 of the upper probe directly on the reinforcement plate 10 of the lower probe by selectively selecting according to the manufacturer.

3A is a perspective view illustrating a probe for inspecting a flat panel display device and a method of manufacturing the same according to still another embodiment of the present invention, and FIG. 3B is a cross-sectional view.

A probe for inspecting a flat panel display device and a method of manufacturing the same according to another embodiment of the present invention, as shown in FIGS. 3A and 3B, also described above with respect to the bottom surface of the reinforcing plate 10 of the probe according to the first embodiment. Similarly to the first embodiment, the process of forming the central groove 54, the first projection jaw 52 and the second projection jaw 56 and the first slit 58b and the second slit 58a are not shown. ) And the lower needle 60 having a predetermined length so that both ends thereof protrude out of the reinforcing plate 10 in the first slit 58b, the second slit 58a, and the central groove 54. And the step of fixing the lower needle 60 to the lower surface of the reinforcing plate 10 by using an adhesive such as an epoxy 62.

At this time, the needle 20 of the upper surface of the reinforcing plate 10 and the needle 60 of the lower surface perpendicular to each other, the end of the one side needle 20 located on the upper surface of the reinforcing plate 10 is located on the lower surface The total length of the upper and lower needles 20, 60 exposed to the outside and is exposed to the outside than the end of the needle 60 is the same.

Figure 4 is a perspective view for explaining a probe assembly having a probe for inspecting a flat panel display device according to the present invention as described above, Figure 5 is a cross-sectional view thereof.

4 and 5, the probe assembly according to the present invention includes a reinforcement plate 30 of a first probe (not numbered) and a reinforcement plate of a second probe (not numbered) as shown in FIG. 2B. 10) is a multilayered probe consisting of a laminated structure is fixed to the inner surface of the probe block (Probe block: 110) having a predetermined angle inclined surface by fixing means such as adhesive.

In the multilayered probe having the stacked structure, as described above, the needle 40 of the upper probe and the needle 20 of the lower probe vertically cross each other, and one end of the needle 40 positioned on the upper portion is lowered. The total length of the upper and lower needles that protrude outward from the ends of the needles 20 positioned at and exposed to the outside so that the electrical and physical characteristic conditions are the same are overlapped.

In this case, the stacked structures of the probes may be fixed to each other by attachment fixing means such as fixing screws on the inclined surface of the probe block 110, and the probe blocks 110 may be transparent such as acrylic to secure transparency. It can also be made of materials.

In addition, a first interface board 112 is positioned on the probe block 110, and a probe holder 116 is positioned on the first interface board 112 and fastened to each other by a fixing screw 118. have.

At this time, the first interface board 112 and the probe holder 116 are fastened to each other by being fastened to each other by the fixing pin 122.

In addition, the second interface board 114 is fastened to the lower surface of the first interface board 112 in the probe block 110 by the fixing pin 120, and the second interface board 114 is fixed. TCP (Tape Carrier Package: 124) is attached and fixed to the lower side.

Here, the connection relationship between one end of the needles 20 and 40 of the multilayer probe attached to the inclined surface of the probe block 110 and the TCP 124 will be described in more detail, one end of the needles 20 and 40 of the multilayer probe. Guided through holes (not numbered) formed in the guide film 126 and connected to the pattern implemented in the TCP (124).

In addition, the probe holder 116 and the menu plater 128 are fastened to each other by the fixing screw 132, and the probe holder 116 connected to the menu plater 128 has a vertical force F of a test process. ) Can flow up and down.

In more detail, one side of the probe holder 116 and the other side of the menu plate 128 are fastened to each other by a guide rail 130, and the probe holder 116 and the upper and lower physical force F of the test process are fastened. The first interface board 112 and the probe block 110 connected to each other may flow upward and downward.

In particular, a spring 134 having a predetermined elastic force is installed in the periphery of the fixing screw 132 connecting the probe holder 116 and the menu plate 128 to flow up and down by the vertical force F of the test process. The first interface board 112 and the probe block 110 connected to the probe holder 116 are restored to their original positions by the elastic force of the spring 134.

Therefore, after the flat panel display device manufactured by performing a series of flat panel display device manufacturing processes is moved to the probing apparatus, the probe block 40 is moved up and down by other moving means, and the predetermined electrode pad of the flat panel display device is moved. Applying a physical force (F) to perform an electrical test process for the flat panel display device.

In this case, the needles 20 and 40 of the multilayer probe below the probe block 40 come into contact with the electrode pads of the flat panel display device, and the electrical signal applied from the probing apparatus is transmitted through a tape carrier package (TCP). It is applied to the electrode pad of the flat panel display device through the needle (20, 40) of the probe.

In this embodiment, the probe assembly according to the present invention has been described with reference to the multilayer probe shown in FIG. 2B. However, depending on the manufacturer, the probe according to the present invention shown in FIGS. 1 and 3 may be attached to the probe block. Yes it will be natural.

Advantageous Effects of Invention According to the present invention, a probe can be easily produced by a dicing saw, a needle attaching process, or the like on a rigid plate made of a rigid material.

Therefore, there is an effect that can increase the productivity by reducing the process time.

Although the present invention has been described in detail only with respect to the described embodiments, it will be apparent to those skilled in the art that various changes and modifications can be made within the spirit of the present invention, and it is obvious that such changes and modifications belong to the appended claims.

Claims (23)

Forming a first protruding jaw and a second protruding jaw facing each other on the upper surface of the reinforcing plate by forming a central groove in a longitudinal direction from one side of the upper surface of the reinforcing plate of the rigid plate having a rectangular plate shape to the other side thereof facing; Forming a plurality of slits connected to the central groove on the first protrusion jaw and the second protrusion jaw; Positioning a needle having a predetermined length so that both ends of the slit and the central groove protrude out of the reinforcing plate; Fixing the needle onto the reinforcement plate using an adhesive; Method of manufacturing a flat display device inspection probe comprising a. The method of claim 1, wherein the center groove and the slit are formed using a dicing saw. The method of claim 1, wherein the slit is formed to be parallel to the center groove or deeper than the center groove so that the flatness of the needle located inside the slit and the center groove by the flatness of the center groove Method of manufacturing a probe for inspecting flat panel display, characterized in that to be determined. The method of claim 1, wherein the needle is made of tungsten (W) or a tungsten alloy material, and the both ends of the needle are sharply processed. The method of manufacturing a probe for inspecting a flat panel display device according to claim 1, wherein epoxy is used as the adhesive. The method according to claim 1, wherein after the probe is manufactured, another probe is manufactured according to the manufacturing method and attached to each other using an adhesive so that the needle of the upper probe and the needle of the lower probe cross each other vertically, A method of manufacturing a flat panel display probe according to claim 1, wherein one end of the needle protrudes outward from the end of the needle positioned at the bottom and is attached such that the total length of the upper and lower needles exposed to the outside is the same. The method of claim 1, further comprising: forming the center groove, the first protrusion jaw, and the second protrusion jaw on the bottom surface of the reinforcing plate, the first slits and the second slits, and the first slits and the first slits. Positioning the needle of a predetermined length so that both ends are projected to the outside of the reinforcement plate in the slit and the center groove and fixing the needle to the lower surface of the reinforcement plate using an adhesive Method for manufacturing a device inspection probe. The needle of the upper surface of the reinforcement plate and the needle of the lower surface cross each other, the end of one side of the needle located on the upper surface of the reinforcement plate protrudes to the outside than the end of the needle located on the lower surface and exposed to the outside Method for manufacturing a flat panel display inspection probe characterized in that the total length of the upper and lower needles are attached to be the same. The method of claim 1, wherein the interval between the slits formed on the first projection jaw and the second projection jaw is different from each other. In the probe for inspecting flat panel display elements in which a plurality of contacts are attached to the lower part of the reinforcing plate by a bonding unit in a line at a predetermined interval. The probe, Reinforcement of the rigid material having a rectangular plate shape in which a central groove in the longitudinal direction is formed on the upper surface from one side to the other side facing the first side, and a first protrusion is formed at the periphery of the central groove and a second protrusion is formed at the periphery of the central groove. plate; A plurality of slits formed to be connected to the central groove on the first protrusion jaw and the second protrusion jaw; And A needle inserted into the slit and positioned to protrude to one side and the other of the reinforcing plate and fixed to the contact member by an adhesive; Probe for inspecting flat panel display element comprising a. The needle of claim 10, wherein the other probes are superimposed on the probes so that the needles of the needles of the upper probe and the needles of the lower probes cross each other perpendicularly, and one end of the needle located at the upper portion protrudes outward from the end of the needle at the lower portion. And the total length of the upper and lower needles exposed to the outside is the same. 12. The probe for inspecting a flat panel display device according to claim 11, wherein the probes overlapping the probes are formed of two or more layers. The needle of claim 10, wherein the center groove, the first protruding jaw, the second protruding jaw, and a slit are further formed on a lower surface of the reinforcing plate of the probe and inserted into and attached to a slit formed on the lower surface of the reinforcing plate. Needles inserted into and attached to the formed slit perpendicular to each other and one end of the needle positioned on the upper surface of the reinforcing plate protrudes outward than the end of the needle located on the lower surface of the reinforcing plate Probe. 12. The probe for inspecting a flat panel display device according to claim 10, wherein the needle is made of tungsten (W) or a tungsten alloy, and both ends thereof are sharply processed. 12. The probe for inspecting a flat panel display device according to claim 10, wherein intervals between the slits on the first projection jaw and the second projection jaw are different from each other. The probe of claim 10, wherein the reinforcing plate is made of a ceramic material. The probe having a contact body directly contacting the test part of the test object may be connected to the probe block fixed to the lower surface, the probe holder fixing the probe block and the probe holder, and the probe block may be vertically flowed by physical force. In the probe assembly for inspecting a flat panel display device having a manipulator (Manuplator), The probe block has an inclined surface that is inclined at a predetermined angle inward, and has a rectangular plate shape formed on the inclined surface of the probe block so that a central groove in a longitudinal direction is formed on the upper surface from the one side to the other side facing the first block. 1 protruding jaw is formed and the reinforcing plate of a rigid material formed with a second protruding jaw in the peripheral portion of the central groove and a plurality of slits connected to the central groove on the first protruding jaw and the second protruding jaw and inside the slit And a probe having a needle as the contact member which is inserted and positioned to protrude toward one side of the reinforcing plate, and fixed by an adhesive. 18. The probe assembly of claim 17, wherein the probe block and the probe are adhered to each other by an adhesive. 18. The probe assembly of claim 17, wherein the probe block and the probe are fixed to each other by a fixing screw. 18. The probe assembly of claim 17, wherein one needle of the probe is used as a contact and the other needle is connected to each other via a TCP (Tape Carrier Package) and a guide film. 18. The probe assembly of claim 17, wherein the probe attached to the probe block comprises two or more layers. The probe of claim 21, wherein an upper needle of the needle of the probe having two or more layers is positioned to vertically intersect with a needle positioned at a lower side, and one end of the needle of the probe located at an upper portion of the probe is located at a lower portion of the probe. A probe assembly for inspecting a flat panel display device, characterized in that the total length of the upper and lower needles projecting in a horizontal direction than the end of the needle and exposed to the outside is the same. The needle of claim 17, wherein the center groove, the first protruding jaw, the second protruding jaw, and a slit are further formed on a lower surface of the reinforcing plate of the probe to be attached to the probe block body, and the needle is inserted into and attached to the slit formed on the lower surface of the reinforcing plate. Needles inserted into and attached to slits formed on the slit formed on the upper surface of the reinforcing plate vertically cross each other, and one end of the needle positioned on the upper surface of the reinforcing plate protrudes outward from the end of the needle positioned on the lower surface of the reinforcing plate and protrudes outward. A probe assembly for inspecting a flat panel display device, characterized in that the total length of the upper and lower needles is the same.