KR20030059159A - 전극구조, 박막 구조체의 제조방법 - Google Patents

전극구조, 박막 구조체의 제조방법 Download PDF

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Publication number
KR20030059159A
KR20030059159A KR10-2003-7004514A KR20037004514A KR20030059159A KR 20030059159 A KR20030059159 A KR 20030059159A KR 20037004514 A KR20037004514 A KR 20037004514A KR 20030059159 A KR20030059159 A KR 20030059159A
Authority
KR
South Korea
Prior art keywords
wiring
insulating film
film
hole portion
selectively
Prior art date
Application number
KR10-2003-7004514A
Other languages
English (en)
Korean (ko)
Inventor
호리카와마키오
이시바시키요시
오쿠무라미카
Original Assignee
미쓰비시덴키 가부시키가이샤
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 미쓰비시덴키 가부시키가이샤 filed Critical 미쓰비시덴키 가부시키가이샤
Publication of KR20030059159A publication Critical patent/KR20030059159A/ko

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L28/00—Passive two-terminal components without a potential-jump or surface barrier for integrated circuits; Details thereof; Multistep manufacturing processes therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00023—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems without movable or flexible elements
    • B81C1/00095—Interconnects
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/03—Static structures
    • B81B2203/0307—Anchors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0102—Surface micromachining
    • B81C2201/0105—Sacrificial layer
    • B81C2201/0109—Sacrificial layers not provided for in B81C2201/0107 - B81C2201/0108
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
KR10-2003-7004514A 2001-07-30 2001-07-30 전극구조, 박막 구조체의 제조방법 KR20030059159A (ko)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2001/006566 WO2003012859A1 (fr) 2001-07-30 2001-07-30 Structure d'electrode et procede de fabrication d'une structure a film mince

Publications (1)

Publication Number Publication Date
KR20030059159A true KR20030059159A (ko) 2003-07-07

Family

ID=11737601

Family Applications (1)

Application Number Title Priority Date Filing Date
KR10-2003-7004514A KR20030059159A (ko) 2001-07-30 2001-07-30 전극구조, 박막 구조체의 제조방법

Country Status (7)

Country Link
US (1) US6812568B2 (de)
JP (1) JP4540983B2 (de)
KR (1) KR20030059159A (de)
CN (1) CN100355057C (de)
DE (1) DE10196677B4 (de)
TW (1) TW511162B (de)
WO (1) WO2003012859A1 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4857883B2 (ja) * 2006-04-18 2012-01-18 三菱化学株式会社 窒化物半導体発光素子
DE102007020263B4 (de) * 2007-04-30 2013-12-12 Infineon Technologies Ag Verkrallungsstruktur
DE102007063842B3 (de) * 2007-04-30 2015-10-22 Infineon Technologies Ag Verankerungsstruktur
US9076821B2 (en) 2007-04-30 2015-07-07 Infineon Technologies Ag Anchoring structure and intermeshing structure
JP5092167B2 (ja) * 2009-03-24 2012-12-05 三菱電機株式会社 半導体圧力センサおよびその製造方法
JP2014033335A (ja) 2012-08-03 2014-02-20 Seiko Epson Corp Ｍｅｍｓ素子、電子機器、およびｍｅｍｓ素子の製造方法
JP2016046454A (ja) * 2014-08-26 2016-04-04 太陽誘電株式会社 薄膜電子部品
US20190113811A1 (en) * 2016-03-29 2019-04-18 Sharp Kabushiki Kaisha Liquid crystal display device
JP6866623B2 (ja) * 2016-12-07 2021-04-28 セイコーエプソン株式会社 物理量センサー、物理量センサーデバイス、電子機器および移動体

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5788763A (en) 1980-11-21 1982-06-02 Hitachi Ltd Semiconductor device
JPS61245549A (ja) * 1985-04-24 1986-10-31 Hitachi Ltd 多層配線構造体
JPS63161648A (ja) * 1986-12-25 1988-07-05 Nec Corp 半導体装置
JPH02224336A (ja) * 1989-02-27 1990-09-06 Nec Corp 半導体装置の製造方法
JPH0689893A (ja) * 1991-11-11 1994-03-29 Nec Corp 半導体装置
JPH07297371A (ja) * 1994-04-26 1995-11-10 Nippon Precision Circuits Kk 半導体集積回路装置のコンタクトホール
JPH0878524A (ja) 1994-09-06 1996-03-22 Toshiba Microelectron Corp 半導体素子の接続パターン
US5661081A (en) * 1994-09-30 1997-08-26 United Microelectronics Corporation Method of bonding an aluminum wire to an intergrated circuit bond pad
US5550090A (en) * 1995-09-05 1996-08-27 Motorola Inc. Method for fabricating a monolithic semiconductor device with integrated surface micromachined structures
JPH11218543A (ja) * 1998-02-02 1999-08-10 Denso Corp 加速度センサ
JP3441358B2 (ja) * 1998-02-26 2003-09-02 日本電信電話株式会社 微小構造体の製造方法
DE19819456B4 (de) * 1998-04-30 2011-06-09 Robert Bosch Gmbh Verfahren zur Herstellung eines mikromechanischen Bauelements
US6187673B1 (en) * 1998-09-03 2001-02-13 Micron Technology, Inc. Small grain size, conformal aluminum interconnects and method for their formation
WO2003012853A1 (en) * 2001-07-26 2003-02-13 Mitsubishi Denki Kabushiki Kaisha Substrate and method for producing the same, and thin film structure

Also Published As

Publication number Publication date
DE10196677B4 (de) 2014-03-13
CN1466775A (zh) 2004-01-07
US20030190817A1 (en) 2003-10-09
US6812568B2 (en) 2004-11-02
JP4540983B2 (ja) 2010-09-08
JPWO2003012859A1 (ja) 2004-11-25
DE10196677T5 (de) 2004-04-22
CN100355057C (zh) 2007-12-12
WO2003012859A1 (fr) 2003-02-13
TW511162B (en) 2002-11-21

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E902 Notification of reason for refusal
E601 Decision to refuse application