KR20030043684A - Handler for tcp(tape carrier package) and method of illuminating tcp - Google Patents

Abstract

PURPOSE: To detect a detection object surely and highly accurately by acquiring a TCP image having high contrast. CONSTITUTION: In this handler for TCP, a test pad x4 of each TCP x1 is connected in contact with a measuring pin of a semiconductor integrated circuit testing device, while a TCP tape X having a plurality of articulated TCPs x1 is intermittently sent successively, and TCP images of each TCP x1 are imaged by receiving transmitted light from each TCP x1 acquired by irradiating the TCP tape X with illumination light, and transfer of the TCP tape X is controlled based on the TCP images. The handler is equipped with a light source for adjusting the illumination light corresponding to the detection object so as to acquire the TCP images having excellent contrast relative to each detection object on the TCP x1.

Description

Handler for TC and lighting method for TC 〈HANDLER FOR TCP (TAPE CARRIER PACKAGE) AND METHOD OF ILLUMINATING TCP}

The present invention relates to a TCP handler and a TCP lighting method for sequentially connecting a plurality of test pads of a tape carrier package (TCP) connected in succession to a tape shape to a measuring pin.

As is well known, TCP is a semiconductor chip mounted on a film by using TAB (tape automated bonding) technology. In the conveyance step before actually being mounted on a printed board, TCP is in the form of a tape connected in series. Japanese Laid-Open Patent Publication No. 7-86355 discloses that a test pad on each TCP is connected to a measuring pin of a semiconductor integrated circuit test apparatus (commonly referred to as an IC tester) while intermittently transferring such a tape type TCP (hereinafter referred to as TCP tape). A TAB test apparatus for connecting and performing an operation test is disclosed. The TAB test apparatus is a TCP handler (also referred to as a TAB handler) for contacting and connecting a test pad on each TCP to the measurement pins while intermittently transferring a TCP tape, and to exchange signals with a semiconductor chip through the measurement pins. This is composed of the IC tester main body which tests the operation of the semiconductor chip.

In the TAB test apparatus, a TCP (TAB) is photographed using an imaging camera and image processing of image data of the imaging camera is performed to accurately detect the presence or absence of a semiconductor chip and the presence of a mark hole, based on the detection result. The intermittent transfer of TCP tape is controlled. In this TAB test apparatus, a light source box which is arranged to face the imaging camera with the TCP interposed therebetween is used as illumination when the TCP is photographed using the imaging camera. The light source box has a light emitting surface that is sized to illuminate the entire TCP without bias. The imaging camera captures the image of TCP by receiving the transmitted light obtained by the illumination light emitted from the light source box passing through the TCP.

By the way, in the method of acquiring a TCP image (TCP image) by receiving the transmitted light from TCP as in the TAB test apparatus and detecting the presence or absence of a semiconductor chip or a mark hole, when the contrast of the TCP image is low, the semiconductor There is a problem in that the presence or absence of a chip or mark hole cannot be detected reliably and accurately.

The present invention has been made in view of the above-described problems, and an object thereof is to reliably and accurately detect a detection object by obtaining a TCP image with high contrast.

BRIEF DESCRIPTION OF THE DRAWINGS The principal part block diagram of the handler for TCP which concerns on one Embodiment of this invention.

2 is a front view of a TCP tape in one embodiment of the present invention.

3 is a perspective view of a two-color light source box in one embodiment of the present invention.

<Description of the symbols for the main parts of the drawings>

X: TCP tape x 1: TCP

x2: sprocket hole x3: semiconductor chip

x4: test pad x5: punch hole

1: supply reel 2: accommodating reel

3A, 3B: Sprocket 4: Pusher

5A to 5C: CCD camera 6A: Halogen lamp

6B, 6C: 2-color light source box (light source) 60: emitting surface

7: Punch Unit 8: Image Processing Unit

9: control unit 10: monitor TV

In order to achieve the above object, in the present invention, as the first means for the handler for TCP, the TCP test pads are in contact with the measuring pins of the semiconductor integrated circuit test apparatus while the TCP tapes are connected in series to each other. In the TCP handler which receives the transmitted light from each TCP obtained by irradiating an illumination light to a TCP tape, it captures the TCP image of each TCP, and controls transfer of a TCP tape based on the said TCP image. A means having a light source for adjusting illumination light in accordance with the detection target is employed to obtain a TCP image with good contrast for each detection target.

Further, as the second means for the handler for TCP, in the first means, the light source adopts a means for changing the color of the illumination light in accordance with the detection object.

As the third means for the handler for TCP, in the second means, when the semiconductor chip on the TCP is to be detected, a means for turning the illumination light to red is adopted.

As the fourth means related to the handler for TCP, in the second or third means, when the punch hole formed on the TCP is a detection object, a means for making the illumination light blue is adopted.

In the present invention, on the other hand, as a first means of the illumination method of TCP, a TCP image is obtained by receiving the transmitted light obtained by irradiating the illumination light to TCP, and detecting each detected object of the TCP image according to the TCP image. As an illumination method, a means for adjusting illumination light in accordance with a detection object is adopted so as to obtain a TCP image with good contrast.

Further, as the second means related to the illumination method of TCP, the first means employs means for adjusting the color of the illumination light in accordance with the detection object.

As a third means of the illumination method of TCP, in the said 2nd means, when making a semiconductor chip on TCP into a detection object, the means which makes illumination light red is employ | adopted.

As a fourth means of the illumination method of TCP, in the said 2nd or 3rd means, when making into a detection object the punch hole formed in TCP, the means which makes illumination light blue is employ | adopted.

As a 5th means regarding the illumination method of TCP, said 1st means WHEREIN: The means which adjusts the intensity of illumination light according to a detection object is employ | adopted.

Embodiment of the Invention

EMBODIMENT OF THE INVENTION Hereinafter, embodiment of the TCP handler and TCP illumination method which concerns on this invention with reference to drawings is demonstrated.

1 is a diagram showing the configuration of main parts of a handler for TCP according to the present embodiment. In this figure, X is a TCP tape, 1 is a supply reel, 2 is a reel, 3A, 3B is a sprocket, 4 is a pusher, 5A to 5C is a CCD camera, 6A is a halogen lamp, 6B and 6C is a two-color light box (Light source), 7 is a punch unit, 8 is an image processing unit, 9 is a control unit, and 10 is a monitor television.

As shown in Fig. 2, the TCP tape X is formed by connecting two or more TCPs (x1) in series, and at the same time, sprocket holes x2 are formed in a row. In each TCP (x1), a semiconductor chip (x3) is mounted in the center, and a plurality of test pads (x4) connected to each connection pad on the semiconductor chip (x3) through a lead pattern are provided. Further, a punch hole x5 is formed in each TCP (x1) in accordance with the result of the operation test. This punch hole x is a hole for identifying good and bad products for each TCP (x1).

The thus formed TCP tape X has a dark brown translucent resin as a base material. The semiconductor chip x3 is mounted on the base material, and the lead pattern and the test pad x4 are patterned. The semiconductor chip x3 and the punch hole x5 are the detection objects in this embodiment.

The supply reel 1 winds the TCP tape X several times and sequentially sends the TCP tape X in accordance with the rotation of the sprockets 3A and 3B. The accommodating reel 2 winds the TCP tape X sent from this supply reel 1. The sprockets 3A and 3B are provided on both sides of the pusher 4 and are driven to rotate under control by the control unit 9. Each sprocket 3A, 3B intermittently transfers the TCP tape X to the accommodating reel 2 side by engaging the protrusion formed in the circumferential surface with the sprocket hole x2. The pusher 4 connects the test pad x4 of each TCP (x1) to the measurement pin (not shown) of the IC tester main body by pressing the TCP tape X in the stopped state.

The CCD cameras 5B and 5C acquire images (TCP images) of each TCP (x1) by receiving the transmitted light of the illumination light irradiated onto the TCP tape X from the two-color light source boxes 6B and 6C, respectively. Output to the image processing unit 8. As shown in the figure, the TCP handler includes three CCD cameras 5A to 5C. Among these CCD cameras 5A to 5C, the CCD camera 5A acquires a TCP image which is a reflection image of the illumination light of the halogen lamp 6A at the position of the pusher 4, and the TCP (x1) to the measurement pin. (Exactly, test pad x4) is provided for positioning. On the other hand, CCD camera 5B, 5C is provided in order to detect the presence or absence of the semiconductor chip x3 and the punch hole x5 on TCP (x1).

The two-color light source boxes 6B and 6C are visible light sources having a two-color light emission function and emit red or blue light under the control of the control unit 9. Fig. 3 is a perspective view showing the external configuration of each of the two-color light source boxes 6B and 6C. As shown in this figure, the two-color light source boxes 6B and 6C are provided with the light emitting surface 60 of substantially the same size as TCP (x1) so as to illuminate TCP (x1) with uniform brightness. The two-color light source boxes 6B and 6C are arranged opposite to the CCD cameras 5B and 5C with the TCP tape X interposed therebetween, and uniformly illuminate the entire area of the TCP (x1).

The light emitting surface 60 is formed by densely arranging a plurality of LEDs (light emitting diodes), and more specifically, LEDs (red LEDs) emitting red light and LEDs (blue LEDs) emitting blue light are adjacent to each other. It is arranged alternately so as to form. The light emitting surface 60 emits red light with uniform brightness when only the red LEDs are driven, and emits light uniformly in blue when only the blue LEDs are driven.

The punch unit 7 operates under the control of the control unit 9, and forms a punch hole x5 in TCP (x1) in accordance with the result of the operation test of TCP (x1) by the IC tester main body. The image processing unit 8 detects the presence or absence of the semiconductor chip x3 or the punch hole x5 by image-processing the TCP image input from each CCD camera 5A to 5C, and controls this detection result. Output to (9). Based on the detection result of the image processing unit 8, the control unit 9 transfers the TCP tape X, that is, operations such as the sprockets 3A and 3B or the supply reel 1 and the accommodation reel 2, and the like. To control.

In addition, each CCD camera 5A-5C is connected with the monitor television 10, and changes the TCP image by each CCD camera 5A-5C. On the monitor television 10, a TCP image is confirmed.

Next, the operation of the TCP handler configured as described above will be described.

In this TCP handler, the position of TCP (x1) is detected by image-processing the TCP image acquired by CCD camera 5A with the image processing unit 8. Then, the control unit 9 controls the sprockets 3A, 3B and the like based on the position detection result, so that the test pad x4 on the TCP (x1) contacts the measuring pin of the IC tester body accurately. Position TCP (x1) to connect.

On the other hand, since the CCD camera 5B is located upstream of the CCD camera 5A in the conveying direction of the TCP tape X indicated by the arrow, the TCP image before the operation test is acquired. The image processing unit 8 detects the presence or absence of the semiconductor chip x3 by image processing the TCP image of the CCD camera 5B. The control unit 9 controls the transfer of the TCP tape X based on the detection result of the semiconductor chip x3, so that only the TCP (x1) on which the semiconductor chip x3 is mounted is pusher 4. The test is made by stopping at the position of. In this case, since the light emission color of the two-color light source box 6B facing the CCD camera 5B is automatically set to "red" by the control unit 9, the presence or absence of the semiconductor chip x3 is accurately detected.

Further, the CCD camera 5C is located downstream of the punch unit 7 in the conveying direction of the TCP tape X, and acquires a TCP image in which the punch hole x5 is formed by the punch unit 7. Then, the image processing unit 8 detects the presence or absence of the punch hole x5 by image processing the TCP image of the CCD camera 5C. Based on the detection result of this punch hole x5, the control unit 9 determines whether or not the punch hole x5 is reliably formed corresponding to the operation test result. In this case, since the light emission color of the two-color light source box 6C facing the CCD camera 5C is automatically set to "blue" by the control unit 9, the presence or absence of the punch hole x5 is accurately detected. .

According to this embodiment, the semiconductor chip x3 and the punch hole x5 are precisely and reliably set by automatically setting the illumination light to the red light having a high transmittance or the blue light having a low transmittance with respect to the dark brown base material of the TCP tape X. Can be detected. However, the present invention is not limited to the detection of the semiconductor chip x3 and the punch hole x5, but can be applied to detect various detection objects on TCP (x1).

In addition, since the present invention intends to set the light having high transmittance and the light having low transmittance with respect to the base material of the TCP tape X, the color of the illumination light is not limited to red and blue. For example, it is conceivable that light having a high transmittance and light having a low transmittance may be other colors other than red and blue due to the change of the base material.

In the detection of the semiconductor chip x3 and the punch hole x5 by the CCD cameras 5A to 5C, the operator confirms the detection area of the semiconductor chip x3 and the punch hole x5 on the monitor television 10. Then, it sets individually and detects the semiconductor chip x3 and the punch hole x5 by image processing or monitoring only of each detection area. In the operation for setting the detection area, since the operator designates the detection area while checking each TCP image of the CCD cameras 5A to 5C with a monitor, for example, when setting the detection area for the semiconductor chip x3. By turning the illumination light into red, the semiconductor chip x3 can be easily confirmed. In addition, when setting the detection area | region regarding punch hole x5, punch hole x5 can be confirmed easily by making illumination light blue.

In addition, changing the illumination light can also enable manual setting.

〔More details〕

In the above embodiment, by using the two-color light source boxes 6B and 6C having the two-color light emitting function as the light source, the color of the illumination light is changed to red / blue depending on the detection object, but the color of the illumination light is changed. In addition, or instead of changing the color of the illumination light, a TCP image with good contrast can be obtained for the semiconductor chip x3 and the punch hole x5 on TCP (x1) by optimizing the intensity of the illumination light. .

For example, in the case of using the two-color light source boxes 6B and 6C in the above embodiment, the emission color of the two-color light source box 6B is set to "red", and the intensity of this red light is set to the CCD camera ( The TCP image of the semiconductor chip x3 taken by 5B) is set to the intensity with the most contrast, and the emission color of the two-color light source box 6C is set to "blue", and the intensity of the blue light is set to CCD. The TCP image of the punch hole x5 photographed by the camera 5C is set to the intensity with the most contrast.

On the other hand, in the case of using the light sources 6B 'and 6C' that emit single color illumination light instead of the two color light source boxes 6B and 6C, the intensity of the illumination light of the light source 6B 'is measured by the CCD camera 5B. The TCP image of the semiconductor chip x3 to be photographed is set to the intensity with the highest contrast, and the TCP image of the punch hole x5 which the CCD camera 5C photographs the intensity of the illumination light of the light source 6C '. The intensity is set to the most contrast.

Such intensity adjustment of the illumination light sequentially changes the intensity of the illumination light emitted from the various light sources by the control unit 9, for example, and simultaneously converts the contrast of the TCP image at each intensity into the image processing unit 8. Detection is realized by detecting the intensity of the illumination light having the best contrast.

As described above, according to the present invention, the illumination light is adjusted in accordance with the detection object so as to obtain a TCP image with good contrast for each detection object on the TCP, so that various detection objects can be detected with high accuracy.

Claims (10)

TCP tape (X) by connecting the test pad (x4) of each TCP (x1) in contact with the measuring pin of the semiconductor integrated circuit test apparatus while intermittently transferring the TCP tape (X) to which TCP (x1) is connected in series. In the handler for TCP which receives the transmitted light from each TCP (x1) obtained by irradiating an illumination light, image | photographs the TCP image of each TCP (x1), and controls transfer of the TCP tape X according to the said TCP image, Light source 6B, 6C which adjusts illumination light according to detection object x3, x5 is provided so that the contrast image may be obtained with respect to each detection object x3, x5 on TCP (x1). Handler for TCP. The handler for TCP according to claim 1, wherein the light sources (6B, 6C) change the color of the illumination light in accordance with the detection object (x3, x5). The TCP handler according to Claim 2, wherein the illumination light is red when the semiconductor chip on TCP (x1) is a detection target. 4. The handler for TCP according to claim 2 or 3, wherein the illumination light is blue when the punch hole (x5) formed on TCP (x1) is a detection target. The handler for TCP according to claim 1, wherein the light sources (6B, 6C) change the intensity of the illumination light in accordance with the detection object (x3, x5). As an illumination method in the case of acquiring a TCP image by receiving the transmitted light obtained by irradiating TCP (x1) with illumination light, and detecting each detection object (x3, x5) on TCP (x1) based on this TCP image, The illumination method of TCP characterized by adjusting illumination light according to a detection object (x3, x5) so that a contrast-contrast TCP image may be obtained. 7. The method of claim 6, wherein the color of the illumination light is changed in accordance with the detection object (x3, x5). The illumination method of TCP according to claim 7, wherein the illumination light is red when the semiconductor chip on TCP (x1) is a detection target. The illumination method of TCP according to claim 7 or 8, wherein the illumination light is blue when the punch hole (x5) formed on TCP (x1) is the detection target. 7. The method according to claim 6, wherein the intensity of illumination light is changed in accordance with the detection object (x3, x5).