KR100305271B1 - Semiconductor device inspection device - Google Patents

Semiconductor device inspection device Download PDF

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Publication number
KR100305271B1
KR100305271B1 KR1019980042366A KR19980042366A KR100305271B1 KR 100305271 B1 KR100305271 B1 KR 100305271B1 KR 1019980042366 A KR1019980042366 A KR 1019980042366A KR 19980042366 A KR19980042366 A KR 19980042366A KR 100305271 B1 KR100305271 B1 KR 100305271B1
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semiconductor device
led
present
semiconductor
opaque material
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KR1019980042366A
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Korean (ko)
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KR20000025331A (en
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박성열
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김태진
주식회사 유브이티
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8806Specially adapted optical and illumination features
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/95Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/9515Objects of complex shape, e.g. examined with use of a surface follower device
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84Systems specially adapted for particular applications
    • G01N21/88Investigating the presence of flaws or contamination
    • G01N21/8806Specially adapted optical and illumination features
    • G01N2021/8809Adjustment for highlighting flaws

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  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Led Devices (AREA)

Abstract

본 발명은 반도체 소자 검사 장치에 관한 것으로, 특히 엘이디(LED)를 사용하여 반도체소자를 효과적으로 조명하여 줌으로써 반도체 소자의 핀의 이상여부를 용이하게 검사할 수 있도록 한 것이다.The present invention relates to an apparatus for inspecting a semiconductor device, and in particular, an LED (LED) is used to effectively illuminate the semiconductor device, thereby making it easy to inspect whether a pin of the semiconductor device is abnormal.

본 발명은 다수의 엘이디(1)가 내부에 내장되고, 상부에는 불투명소재(2)가 착탈 가능하게 결합되어 상기 엘이디(1) 점등시 상기 불투명소재(2)를 통하여 엘이디(1)의 광이 투과되도록 하는 사각형상의 조명수단(10)과, 상기 조명수단(10)의 상방에 위치되는 반도체 소자(20)와, 상기 반도체 소자(20)의 상방에 설치되어 반도체 소자의 핀을 촬영하여 모니터에 디스플레이하기 위한 CCD카메라(30)로 이루어져 엘이디의 점등으로 반도체소자의 이상여부를 정확하고도 간단하게 검사할 수 있도록 한 것이다.According to the present invention, a plurality of LEDs 1 are embedded therein, and an opaque material 2 is detachably coupled to the upper part so that light of the LED 1 is transmitted through the opaque material 2 when the LED 1 is turned on. Rectangular lighting means 10 to be transmitted, the semiconductor element 20 positioned above the lighting means 10, and the upper portion of the semiconductor element 20 is installed on the monitor to shoot the pins of the semiconductor element to the monitor It consists of a CCD camera 30 for displaying the LED to be able to accurately and simply check whether the semiconductor device abnormalities by lighting.

Description

반도체 소자 검사 장치Semiconductor device inspection device

본 발명은 반도체 소자 검사 장치에 관한 것으로, 특히 엘이디(LED)를 사용하여 반도체 소자를 효과적으로 조명하여 줌으로써 반도체 소자의 핀의 이상여부를 용이하게 검사할 수 있도록 한 것이다.The present invention relates to a device for inspecting a semiconductor device, and in particular, an LED (LED) is used to effectively illuminate the semiconductor device, thereby making it possible to easily inspect the abnormality of the pins of the semiconductor device.

최근, 자동화 기술의 발전과 더불어 전자 산업계에서는 자동 삽입기 또는 자동 장착기 등의 기계를 사용하여 인쇄 회로 기판에 반도체소자를 비롯한 각종 부품을 자동으로 장착하고, 생산성을 향상시키고 있다.In recent years, with the development of automation technology, the electronic industry has automatically mounted various components including semiconductor devices on printed circuit boards by using machines such as automatic inserters or automatic mounters, thereby improving productivity.

인쇄 회로 기판에 자동으로 소정의 부품을 장착하기 위해서는 각각의 부품에 부착되어 있는 핀을 정확히 절곡시켜야 된다.In order to automatically mount certain components on a printed circuit board, the pins attached to each component must be precisely bent.

특히 반도체소자는 점차 고집적화되고, 고집적화에 따라 핀의 크기가 보다 세밀화됨은 물론 핀들의 간격이 매우 좁으므로 인쇄 회로 기판에 자동으로 장착할 경우에 반도체소자의 핀이 잘못 부착되고, 이로 인하여 조립 완료된 인쇄 회로 기판의 불량 발생률이 매우 높게 된다.In particular, semiconductor devices are increasingly integrated, and the pin size becomes finer according to the higher integration, and the spacing of the pins is very narrow, so that the pins of the semiconductor devices are incorrectly attached when automatically mounted on a printed circuit board. The defective occurrence rate of a circuit board becomes very high.

따라서, 반도체소자를 생산할 경우에 먼저 반도체소자의 외주연부에 구비되어 있는 다수의 핀이 정확하게 절곡되어 있는 지를 확인하고 있다.Therefore, when producing a semiconductor device, it is first checked whether a plurality of pins provided at the outer periphery of the semiconductor device are correctly bent.

이를 위하여 종래에는 반도체소자의 제조 공정중 포밍(forming) 공정에서 작업자가 일일이 반도체소자를 손으로 잡고, 핀의 절곡상태를 눈으로 보면서 직접 확인하였다.To this end, in the prior art, during the forming process of a semiconductor device, an operator manually held the semiconductor device by hand and directly checked the bending state of the pin.

그러므로 작업자가 반도체소자의 핀의 절곡 상태를 잘못 확인하는 경우가 많고, 이로 인하여 조립된 인쇄 회로 기판의 불량률이 매우 높았으며, 작업자가 쉽게 피로함은 물론 이로 인하여 제품의 생산성이 저하되고, 생산 원가가 상승하게 되는 등의 여러 가지 문제점이 있었다.Therefore, the operator often checks the bending state of the pin of the semiconductor device incorrectly, and thus the defect rate of the assembled printed circuit board is very high, and the worker is easily fatigued, and the productivity of the product is lowered and the production cost is reduced. There were various problems such as rising.

본 발명은 이와같은 종래의 문제점을 해결하기 위하여 안출한 것으로, 다수의 엘이디를 사용한 조명수단을 통하여 반도체 소자를 하방에서 상방으로 효과적으로 조명하도록 함으로써 CCD카메라를 통하여 반도체소자의 이상여부를 용이하게 검사할 수 있도록 하는 반도체 소자 검사 장치를 제공하는데 그 목적이 있다.The present invention has been made to solve such a conventional problem, it is easy to check whether the semiconductor device abnormality through the CCD camera by effectively illuminating the semiconductor device from below through the lighting means using a plurality of LEDs. It is an object of the present invention to provide a semiconductor device inspection apparatus that allows.

도 1은 본 발명의 반도체 소자 검사장치의 전체적인 구성도,1 is an overall configuration diagram of a semiconductor device inspection device of the present invention;

도 2는 본 발명의 요부 단면도이다.2 is a cross-sectional view of main parts of the present invention.

〈도면의 주요 부분에 대한 부호의 설명〉<Explanation of symbols for main parts of drawing>

1:엘이디 2:불투명소재1: LED 2: Opaque material

10:조명수단 20:반도체소자10: lighting means 20: semiconductor element

30:CCD카메라30: CCD camera

상기와 같은 목적을 달성하기 위한 본 발명은, 검사하고자 하는 반도체소자의 하방에 엘이디를 가진 사각형상의 조명수단을 구비하여 엘이디를 점등시킨 상태에서 반도체소자의 핀을 CCD(Charge Coupled Device)카메라 등으로 촬영하고 이를 모니터에 확대 표시하여 작업자가 모니터를 보고, 반도체소자의 핀의 상태를 간단하고, 정확하게 확인할 수 있도록 하는 것을 특징으로 한다In order to achieve the above object, the present invention includes a rectangular lighting means having an LED under the semiconductor device to be inspected, and turns the pin of the semiconductor device into a charge coupled device (CCD) camera or the like while the LED is turned on. It is characterized in that the operator can look at the monitor and check the state of the pins of the semiconductor device simply and accurately by capturing and displaying it on the monitor.

이하, 본 발명의 실시예를 첨부된 도면을 참고로 하여 상세히 설명하면 다음과 같다.Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings.

도 1은 본 발명의 전체적인 구성도이고, 도 2는 본 발명의 요지인 조명수단의 사시도로, 다수의 엘이디(1)가 내부에 내장되고, 상부에는 불투명소재(2)가 착탈 가능하게 결합되어 상기 엘이디(1) 점등시 상기 불투명소재(2)를 통하여 엘이디(1)의 광이 투과되도록 하는 사각형상의 조명수단(10)과, 상기 조명수단(10)의 상방에 위치되는 반도체 소자(20)와, 상기 반도체 소자(20)의 상방에 설치되어 반도체 소자의 핀을 촬영하여 모니터에 디스플레이하기 위한 CCD카메라(30)를 포함하여 구성된 것이다.Figure 1 is an overall configuration of the present invention, Figure 2 is a perspective view of a lighting means which is the subject of the present invention, a plurality of LED (1) is embedded therein, the opaque material (2) is detachably coupled to the top Square lighting means 10 to transmit the light of the LED 1 through the opaque material 2 when the LED 1 is turned on, and the semiconductor element 20 positioned above the lighting means 10. And a CCD camera 30 provided above the semiconductor element 20 to display pins of the semiconductor element and display the same on a monitor.

이와같이 구성된 본 발명의 작용을 설명하면 다음과 같다.Referring to the operation of the present invention configured as described above is as follows.

먼저, 본 발명의 조명수단(10)은 내부에 다수의 엘이디(1)가 일정한 간격으로 내부를 꽉 채우도록 나란히 설치되어 있다.First, the lighting means 10 of the present invention is installed side by side so that a plurality of LEDs 1 to fill the inside at regular intervals.

따라서, 조명수단(10)에 전원이 인가될 경우 엘이디(1)가 모두 점등되므로 조명수단(10)의 상면에 설치된 불투명소재(2)를 통하여 골고루 조명된다.Therefore, when power is applied to the luminaire 10, the LEDs 1 are all turned on so that they are evenly illuminated through the opaque material 2 installed on the upper surface of the luminaire 10.

여기서, 상기 불투명 소재(2)는 조명수단(10)에 형성된 홈부를 통하여 용이하게 결합시키거나 또는 분리시킬 수 있도록 이루어져 있다.Here, the opaque material 2 is made to be easily coupled or separated through the groove portion formed in the lighting means (10).

이와같이 조명수단(10)의 엘이디(1)가 점등되어 조명이 이루어지고 있는 상태에서 검사하고자 하는 반도체소자(20)를 조명수단(10)의 상면(또는 상방)에 위치시키면 조명수단(10)의 불투명소재(2)를 통하여 나오는 엘이디광에 의하여 반도체소자(20)의 핀이 정확하게 보이게 된다.As such, when the LED 1 of the luminaire 10 is turned on to illuminate and the semiconductor device 20 to be inspected is placed on the upper surface (or upper side) of the luminaire 10, The LED of the semiconductor device 20 is accurately seen by the LED light emitted through the opaque material 2.

이와같은 상태에서 반도체소자(20)의 상방에 설치된 CCD카메라(30)를 통하여 반도체소자(20)를 촬영하여 모니터에 디스플레이하면, 작업자가 반도체소자(20)의 핀의 이상여부를 용이하게 확인할 수 있는 것이다.In such a state, when the semiconductor device 20 is photographed and displayed on the monitor through the CCD camera 30 installed above the semiconductor device 20, the operator can easily check whether the pin of the semiconductor device 20 is abnormal. It is.

이상 설명한 바와 같이 본 발명에 의하면, 반도체소자(20)를 조명하기 위한 조명수단(10)의 내부에 다수의 엘이디를 골고루 배치하여 엘이디 점등시 불투명소재(2)를 통하여 반도체소자(20)를 조명할 수 있도록 함으로써 반도체소자(20)의 이상여부를 정확하고도 간단하게 검사할 수 있는 효과가 있다.As described above, according to the present invention, the plurality of LEDs are evenly arranged inside the lighting means 10 for illuminating the semiconductor device 20 to illuminate the semiconductor device 20 through the opaque material 2 when the LED is turned on. By doing so, there is an effect that the abnormality of the semiconductor device 20 can be inspected accurately and simply.

Claims (1)

CCD카메라를 통하여 반도체소자를 촬영하고 이를 모니터에 디스플레이하여 반도체소자의 핀의 이상여부를 검사하는 장치에 있어서,In the device for photographing a semiconductor device through a CCD camera and displaying it on a monitor to check the abnormality of the pin of the semiconductor device, 상기 반도체 소자(20)의 하방에 위치하도록 설치함과 더불어, 다수의 엘이디(1)가 내부에 내장되고, 상부에는 불투명소재(2)가 착탈 가능하게 결합되어 상기 엘이디(1) 점등시 상기 불투명소재(2)를 통하여 엘이디(1)의 광이 투과되도록 하는 사각형상의 조명수단(10)을 포함하여 구성된 것을 특징으로 하는 반도체 소자 검사 장치.In addition to being installed below the semiconductor device 20, a plurality of LEDs 1 are embedded therein, and an opaque material 2 is detachably coupled to an upper portion thereof so that the opacity is turned on when the LEDs 1 are turned on. And a rectangular illumination means (10) for transmitting light of the LED (1) through the material (2).
KR1019980042366A 1998-10-10 1998-10-10 Semiconductor device inspection device KR100305271B1 (en)

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Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63103948A (en) * 1986-10-21 1988-05-09 Toshiba Corp Detecting method for external lead of resin sealed type semiconductor device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63103948A (en) * 1986-10-21 1988-05-09 Toshiba Corp Detecting method for external lead of resin sealed type semiconductor device

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