KR20030033484A - Tray transfer in handler for testing semiconductor devices - Google Patents

Abstract

PURPOSE: A tray transportation apparatus of a semiconductor device test handler is provided to slide a test tray from one side of a handler to the other side of the handler stably and rapidly. CONSTITUTION: A base plate is installed on one side of a test site. A guide member is installed horizontally along the base plate. A movement block slides along the guide member by being combined to the guide member. A spline(110) is parallel with the guide member and rotates centering on its axis. A holder base(121) is installed to be combined with the movement block. An operation member(122) is combined by a penetrating spline and is arranged on one side of the holder base, and rotates in a body with the spline. A holder member is installed to be linked to the operation member and the holder base, and is contacted/released to/from an edge of a tray as rotating up and down by the rotation of the operation member. A driving unit drives the above movement block. And a rotation unit rotates the spline.

Description

Tray transfer in handler for testing semiconductor devices

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a handler for testing semiconductor devices, and more particularly, to a tray transfer apparatus of a semiconductor device test handler configured to transversely transfer test trays equipped with a plurality of semiconductor devices from one side of a chamber to another. will be.

In general, devices such as a memory or non-memory semiconductor device, and modules that are appropriately configured on a single substrate, are shipped after undergoing various test procedures after production. Refers to the device being used to automatically test the same device and module.

In general, many of these handlers not only perform general performance tests at room temperature, but also create a high temperature and low temperature extreme temperature environment in an enclosed chamber through an electrothermal heater and a liquid nitrogen injection system. It is also capable of performing high and low temperature tests, which test whether they can function under extreme temperature conditions.

Meanwhile, FIG. 1 of the accompanying drawings shows a handler configuration for testing a device such as a memory semiconductor package, and as shown in FIG. 1, a customer tray including a plurality of devices to be tested is stored in the front part of the handler. The loading stacker 10 is installed, and one side of the loading stacker 10 is installed with an unloading stacker 20 in which the tested devices are classified according to the test result and stored in the customer tray.

In addition, buffer portions 40 for temporarily mounting the devices transferred from the loading stacker 10 are provided at both sides of the middle portion of the handler so as to be movable back and forth, and between the buffer portions 40 are buffered. An exchange unit 50 is installed to transfer the device to be tested of the unit 40 and to remount the device to the test tray T and to mount the tested device of the test tray to the buffer unit 40. have.

The linear movement in the XY axis is performed between the handler front part in which the loading stacker 10 and the unloading stacker 20 are disposed, and the middle part of the handler in which the exchange part 50 and the buffer part 40 are disposed. A first picker 31 and a second picker 32 for picking up and transporting them are installed, and the first picker 31 includes a loading stacker 10, an unloading stacker 20, and a buffer unit. The device picks up and transports the devices 40, and the second picker 32 moves between the buffer unit 40 and the exchange unit 50, and picks up and transfers the devices.

Then, at the rear of the handler, a test site for creating a high or low temperature environment in a plurality of sealed chambers and then sequentially transferring the test trays in which the device is mounted and testing the performance of the device under a predetermined temperature condition. 70 is located.

Here, the test site 70 transfers the test tray transferred from the exchange unit 50 step by step, from front to back, and heats or cools the devices to a predetermined temperature. 71 and a so-called high-fix (Hi-Fix) connected to one side of the preheating chamber 71 and connected to an external test equipment (not shown) for the devices of the test tray transferred through the preheating chamber 71 ( A test chamber 72 mounted on a test socket (not shown) of 85 to perform a test under a predetermined temperature, and a test tray installed at one side of the test chamber 72 and transferred through the test chamber 72; It consists of a defrosting chamber 73 which returns the tested device to the initial room temperature state while transferring step by step from the rear to the front.

In addition, each of the front and rear parts of the test site 70 has a front tray feeder 75 and a rear tray feeder 76 for transferring the test tray T from one chamber to another chamber position. Each of the tray feeders 75 and 76 is configured to be moved while pushing two test trays T at a time.

However, the tray feeders for the handlers are configured to slide and transport the test trays in an upright position in a very narrow space near the inner wall of the chamber. Conventional tray feeders are holder assemblies for holding and pushing the test trays. Since it should be configured not to get caught in other components of the handler or the test tray when returning to the original position after the tray transfer operation, the configuration is not only complicated, but also increases in size, which takes up a lot of installation space and has a high probability of malfunction.

Accordingly, the present invention has been made to solve the above problems, the tray transfer of the semiconductor device test handler to slide the test tray in a stable and rapid operation from one side of the handler to the other position in a compact size and configuration The object is to provide a device.

1 is a plan view schematically illustrating a configuration of a general semiconductor device test handler as a background art.

Figure 2 is a perspective view showing the overall shape of the tray transport apparatus according to the present invention

Figure 3 is a perspective view showing the configuration of the holder assembly of the tray transport apparatus of the present invention

4 and 5 are front views showing the operation of the holder assembly of FIG.

Figure 6 is a perspective view showing a part of the tray feeder of the present invention

Explanation of Reference Symbols in Major Parts of Drawings

101-Base Plate 102-LM Guide

103-Ballscrew 105-Moving Block

106-Servomotor 108-Belt

110-spline 112-cylinder

121-Holder Base 122-Operating Member

123-Spherical Joint 124, 125, 126-Part 1,2,3 Link Bar

130-Support Member 141-Stopper

In order to achieve the above object, the present invention is installed on one surface of the test site having a plurality of chambers to enable a set temperature test, horizontally from one chamber position in the test tray upright to another adjacent chamber position In the horizontal movement, the base plate which is installed in the left and right directions on one surface of the test site; A guide member horizontally installed horizontally along the base plate; A moving block coupled to the guide member to slide along the guide member; A bar-shaped spline parallel to the guide member and rotatably installed about an axis thereof; A holder base installed to be coupled to the moving block; An actuating member disposed on one side of the holder base and coupled to the spline to allow linear movement along the spline but not to rotate so that the spline is integrally rotated with the spline; The semiconductor device test handler, characterized in that it is installed to be linked to each other in the operating member and the holder base and comprises a holder member which rotates up and down in conjunction with the rotation of the operating member and contacting and releasing one edge of the tray. Provide a tray feeder.

Hereinafter, with reference to the accompanying drawings a preferred embodiment of the tray transfer apparatus according to the present invention will be described in detail.

As shown in FIG. 2, the tray feeder of the present invention includes a base plate 101 horizontally installed on one side, for example, a rear surface, of a test site 70 (see FIG. 1) of a handler, and the base plate ( The LM Guide 102 and the LM Block 102a horizontally installed laterally along the longitudinal direction of the 101 and the LM Guide 102 are fixedly installed on the LM Guide 102 to move along the LM Guide 102. Moving block 105 is provided.

One end of the base plate 101 is vertically installed mounting plate 101a located on the outer surface of the preheat chamber 71 of the taste site 70.

The upper side of the base plate 101, the ball screw 103 is installed in parallel with the LM guide 102, the movable block 105 is coupled to the ball housing 104 of the ball screw 103 ball screw ( By the movement of the ball housing 104 by the rotation of 103, it linearly moves to the side along the LM guide 102. As shown in FIG.

The ball screw 103 is connected and rotated by the belt 108 and the drive pulley 107 of the servo motor 106 is fixedly mounted to the mounting plate (101a) driven driven pulley 109 installed at its end.

In addition, the spline 110 is rotatably installed on the mounting plate 101a so as to be parallel to the LM guide 102. Referring to FIG. 6, the end of the spline 110 in the radial direction of the spline 110 The movable lever 111 is installed to the outside, and the movable lever 111 is linked with the cylinder 112 provided on the mounting plate 101a, so that the movable lever 111 is moved by the forward and backward operation of the cylinder 112. The spline 110 is made to reciprocate by rotating reciprocally within a predetermined angle range.

In addition, the spline 110 is coupled to the substantially hollow cylindrical operation member 122, the operation member 122 can be linearly moved along the spline 110, but the rotation with respect to the spline 110 It becomes impossible to rotate together with the spline 110 in rotation.

In addition, the movable block 105 and the operation member 122 is coupled to the holder assembly which is in contact with the one side edge of the test tray is released, the holder assembly as shown in detail in Figures 3 to 5, A holder base 121 fixedly coupled to the movable block 105 and positioned at one side of the operation member 122; A spherical joint 123 coupled to one side of the outer surface of the operating member to move in a normal direction with respect to the rotational direction of the operating member 122; In combination with the outer circumferential surface of the spherical joint 123 on one side is provided with a frame portion 124a of the rectangular frame shape for guiding the movement of the spherical joint 123, it is possible to rotate through the rotating shaft 124b to the operating member 122 A first link bar 124 coupled to each other; A second link bar 125 installed rotatably around the rotating shaft 125a on the holder base 121 to rotate up and down in a range of 90 ° to come into contact with and release one side of the test tray T; The third link bar 126 is connected to one end of the first link bar 124 and one side of the second link bar 125 to connect the first link bar 124 and the second link bar 125, respectively. It is composed.

The spherical joint 123 is rotatably coupled to the spherical fixing portion 123a coupled to the operating member 122 and the outer surface of the fixing portion 123a via a bearing (not shown). It consists of a ring portion 123b of the form, the ring portion 123b is movably coupled inside the frame portion 124a of the first link bar 124.

Therefore, as shown in FIGS. 4 and 5, when the operating member 122 is in an initial state as shown in FIG. 4 and the operating member 122 rotates in the direction of the arrow, the spherical joint 123 coupled thereto is connected. ), The spherical fixing portion 123a is moved together, and the ring portion 123b coupled to the outer surface of the fixing portion 123a moves while maintaining an initial posture while sliding with respect to the fixing portion 123a. That is, the spherical joint 123 moves in the normal direction with respect to the rotational trajectory of the operation member 122, and thus, the first link bar 124 rotates about the rotation shaft 124b.

As described above, as the spherical joint 123 and the first link bar 124 are moved by the rotation of the operating member 122, the third link bar 126 linked with the first link bar 124 becomes the second. While pushing the link bar 125 downward, the second link bar 125 is rotated downward by 90 ° about its rotation axis 125a. As a result, the second link bar 125 is connected to the first link bar 124. It will be in the unfolded form, and will be in contact with the test tray T.

At this time, the roller 136 of the support member 130 is always in a state of being in elastic contact with one surface of the third link bar 126 and the third link bar 126 in a direction opposite to the traveling direction of the tray Prevent rotation.

In order to release the contact between the second link bar 125 and the test tray T, the cylinder 112 is operated to rotate the spline 110 in reverse. In this case, the operation of each link bar of the holder assembly is described above. The process proceeds to the reverse of the process and returns to the folded state as shown in FIG. 4. In this folded state, the support member 130 continuously contacts and presses the one surface of the third link bar 126 to press the second portion. The link bar 125 is prevented from falling by gravity.

On the other hand, when the test tray is transferred to the holder assembly configured as described above, a predetermined torque is applied to the spline 110 during the tray transfer operation due to an assembly tolerance between parts, and the like, and accordingly, the second link bar 125 of the holder assembly is provided. Will receive the power to return to its original state.

Accordingly, in order to support the reaction force applied to the second link bar 125 by the torque generated during the tray transfer operation, the third link bar 126 is elastically disposed on one side of the holder base 121. The support member 130 is installed to support the bar, the support member 130 is a support frame 131 of the rectangular frame shape fixed to the holder base 121, and the first compression spring on one side of the support frame 131 A first support bar 132 installed to be elastically supported by 133, one end is supported in contact with the end of the first support bar 132, the other side is the second compression spring on the other side of the support frame 131 A second support bar 134 installed to support the ball through the 135 and a roller rotatably installed at an end of the second support bar 134 to support and support the second link bar 125; 136).

In addition, as shown in FIG. 6, the mounting plate 101a supports the movable lever 111 of the spline 110 at a predetermined position to stop the torque generated during the tray transfer operation. Is installed.

On the other hand, the operation member 122 and the holder assembly to simultaneously transport the test tray T located in the preheat chamber 71 (see Fig. 1) and the test chamber 72 (see Fig. 1) in one transfer operation. It is preferable that two having the same configuration are arranged at predetermined intervals.

The tray conveying operation by the tray conveying apparatus configured as described above is performed as follows.

In the test site 70 of the handler capable of temperature testing as described above in the prior art, three chambers, that is, the preheating chamber 71, the test chamber 72, and the defrost chamber 73 are arranged side by side, First, the test tray T, which moves inside the preheating chamber 71 and the device is preheated, is positioned at the rear of the preheating chamber 71 and is in a test standby state. In the test chamber 72, the test tray T is mounted on the test tray T. The devices are mounted in test sockets (not shown) to perform a predetermined test for a period of time.

When the transfer operation of the test tray is not performed, the holder assembly of the tray transfer device maintains the initial state as shown in FIG. 4.

When the test is finished, the devices are disconnected from the test socket, and the tray feeder causes the test trays of the test chamber 72 and the preheat chamber 71 to move to the lateral defrost chamber 73 and the test chamber 72, respectively. First, as described above, the spline 110 is rotated by the operation of the cylinder 112, so that each holder assembly is as shown in FIG. 5, and the second link bar 125 is preheated to the chamber 71. And side edge portions of the respective test trays T of the test chamber 72.

Subsequently, the ball housing 104 is moved along the ball screw 103 while the ball screw 103 is rotated by the operation of the servomotor 106, and thus the moving block 105 coupled with the ball housing 104 is provided. ) Moves along the LM guide 102, so that the test trays slide while the holder assembly coupled with the moving block 105 moves together.

When the test trays T are transferred to a desired position, the movement of the moving block 105 is stopped while the operation of the servomotor 106 is stopped, and then the cylinder 112 is operated to operate the spline 110 and the operating member coupled thereto. 122 is reversed to return the holder assembly to the state as shown in FIG.

When the holder assembly is brought into an initial state not in contact with the test tray T as shown in FIG. 4, the servomotor 106 is operated in reverse to move the moving block 105 and the holder assemblies coupled thereto in an initial position. The tray transfer operation is completed by returning to.

Meanwhile, in the above-described embodiment, the ball screw 103 and the servomotor 106 are rotated as the driving means for moving the moving block. In addition, the base plate 101 is parallel to the LM guide 102. It can also be driven using the installed linear motor.

According to the present invention as described above, since the holder assembly for transporting the test tray is made of a link structure that is simply operated by the rotation operation of the spline, the test tray is stable from one side of the handler to the other position with a compact size and configuration. It is possible to return after sliding movement in a rapid operation, thereby improving the test efficiency of the semiconductor device.

Claims (8)

In the test site provided with a plurality of chambers to enable a set temperature test, it is to horizontally move the test tray from one chamber position in the upright state to another chamber position in the vicinity, A base plate installed on one surface of the test site in a horizontal direction; A guide member horizontally installed horizontally along the base plate; A moving block coupled to the guide member to slide along the guide member; A bar-shaped spline parallel to the guide member and rotatably installed about an axis thereof; A holder base installed to be coupled to the moving block; An actuating member disposed on one side of the holder base and coupled to the spline to allow linear movement along the spline but not to rotate so that the spline is integrally rotated with the spline; A holder member installed to be linked to each other on the operation member and the holder base and rotating up and down by interlocking by the operation member, the holder member being in contact with and released from one corner of the tray; Driving means for driving the moving block; And a rotation means for rotating the spline. The method of claim 1, wherein the holder member is coupled to one side of the outer surface of the actuation member and the spherical (sphere) joint to move in the normal direction with respect to the rotation direction of the actuation member; A first link bar having a frame portion having a substantially rectangular frame shape coupled to an outer circumferential surface of the spherical joint on one side thereof, the first link bar being rotatably coupled to the operating member via a rotation shaft; A second link bar installed on the holder base to be rotatable about a rotation axis and rotating up and down in a range of 90 ° to contact and release one side of the tray; And a third link bar linked to one end of the first link bar and one side of the second link bar to connect the first link bar and the second link bar, respectively. . 3. The tray transfer apparatus of claim 2, wherein the second link bar further comprises a support member elastically supporting an end portion of the third link bar when the second link bar moves in contact with an edge of the tray. . According to claim 3, The support member is a support frame of the rectangular frame shape fixed to the holder base, a first support bar installed to be elastically supported by a first elastic member on one side of the support frame, one end is the first support The second support bar is supported in contact with the end of the bar and the other side is installed on the other side of the support frame to be elastically supported by the second elastic member, and is rotatably installed at the end of the second support bar to the second link. A tray conveying apparatus of a semiconductor device test handler, characterized in that it comprises a roller for contacting and supporting the end of the bar. According to claim 1, wherein the drive means, the ball screw is installed on the base plate to be parallel to the guide member, the ball housing is moved along the ball screw by the rotation of the ball screw coupled to the moving block, and And a servo motor installed at one end of the base plate to rotate the ball screw. The tray conveying apparatus of claim 1, wherein the driving means is a linear motor installed on the base plate to be parallel to the guide member and coupled to the moving block. 2. The rotating means according to claim 1, wherein the rotating means comprises a movable lever provided at one end of the spline so as to extend in a radially outward direction of the spline, and a cylinder linked with the movable lever to rotate the movable lever in a predetermined angle range. Tray feeder of semiconductor device test handler. 8. The tray conveying apparatus of claim 7, wherein a stopper for limiting rotation of the movable lever is provided at one end of the base plate.