KR20020033181A - 자외선 복사 발생 장치 및 방법 - Google Patents

자외선 복사 발생 장치 및 방법 Download PDF

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Publication number
KR20020033181A
KR20020033181A KR1020027003570A KR20027003570A KR20020033181A KR 20020033181 A KR20020033181 A KR 20020033181A KR 1020027003570 A KR1020027003570 A KR 1020027003570A KR 20027003570 A KR20027003570 A KR 20027003570A KR 20020033181 A KR20020033181 A KR 20020033181A
Authority
KR
South Korea
Prior art keywords
microwave
chamber
pair
microwave chamber
ultraviolet radiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
KR1020027003570A
Other languages
English (en)
Korean (ko)
Inventor
슈미트콘스제임스더블유.
보르숙제임스엠.
Original Assignee
토마스 엘. 무어헤드
노드슨 코포레이션
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 토마스 엘. 무어헤드, 노드슨 코포레이션 filed Critical 토마스 엘. 무어헤드
Publication of KR20020033181A publication Critical patent/KR20020033181A/ko
Withdrawn legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
    • H01J65/044Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by a separate microwave unit

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)
KR1020027003570A 1999-09-20 2000-09-15 자외선 복사 발생 장치 및 방법 Withdrawn KR20020033181A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US15502899P 1999-09-20 1999-09-20
US60/155,028 1999-09-20
PCT/US2000/025282 WO2001022783A2 (en) 1999-09-20 2000-09-15 Apparatus and method for generating ultraviolet radiation

Publications (1)

Publication Number Publication Date
KR20020033181A true KR20020033181A (ko) 2002-05-04

Family

ID=22553844

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020027003570A Withdrawn KR20020033181A (ko) 1999-09-20 2000-09-15 자외선 복사 발생 장치 및 방법

Country Status (5)

Country Link
US (1) US7462978B1 (enExample)
JP (1) JP4901041B2 (enExample)
KR (1) KR20020033181A (enExample)
AU (1) AU7489500A (enExample)
WO (1) WO2001022783A2 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101118995B1 (ko) * 2004-03-17 2012-03-12 사이머 인코포레이티드 고 반복율 레이저 발생 플라즈마 euv 광원

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007031628B4 (de) * 2007-07-06 2012-06-21 Eastman Kodak Co. UV-Strahlungsquelle
DE102007031629B3 (de) * 2007-07-06 2009-03-19 Eastman Kodak Co. Mit Mikrowellen angeregte Strahlungsquelle
DE102009018840A1 (de) * 2009-04-28 2010-11-25 Auer Lighting Gmbh Plasmalampe
GB2480451A (en) * 2010-05-18 2011-11-23 E2V Tech Electron tube rf output window
JP5904411B2 (ja) * 2012-09-26 2016-04-13 岩崎電気株式会社 マイクロ波無電極ランプ及びこれを使用した照射装置
JP6206703B2 (ja) * 2013-05-07 2017-10-04 岩崎電気株式会社 マイクロ波無電極ランプ及びこれを使用した光照射装置
US10002752B2 (en) * 2014-07-07 2018-06-19 Nordson Corporation Systems and methods for determining the suitability of RF sources in ultraviolet systems

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3452E (fr) 1904-05-17 1904-11-17 Charles Garnier Chemise suspensoir
US3911318A (en) 1972-03-29 1975-10-07 Fusion Systems Corp Method and apparatus for generating electromagnetic radiation
US3872349A (en) 1973-03-29 1975-03-18 Fusion Systems Corp Apparatus and method for generating radiation
US4042850A (en) 1976-03-17 1977-08-16 Fusion Systems Corporation Microwave generated radiation apparatus
JPS56126250A (en) * 1980-03-10 1981-10-03 Mitsubishi Electric Corp Light source device of micro wave discharge
US4504768A (en) 1982-06-30 1985-03-12 Fusion Systems Corporation Electrodeless lamp using a single magnetron and improved lamp envelope therefor
JPS63224193A (ja) * 1987-03-11 1988-09-19 株式会社日立製作所 光源装置
JPH0621167Y2 (ja) 1987-08-07 1994-06-01 高橋 柾弘 マイクロ波励起による紫外線発生装置
JPH0637521Y2 (ja) 1988-10-05 1994-09-28 高橋 柾弘 マイクロ波励起による紫外線発生装置
JP2561902B2 (ja) * 1988-09-14 1996-12-11 ウシオ電機株式会社 マイクロ波励起型無電極発光管及びその製造方法
JPH0532889Y2 (enExample) * 1989-04-27 1993-08-23
EP0450131B1 (en) * 1990-04-06 1995-08-02 New Japan Radio Co., Ltd. Electrodeless microwave-generated radiation apparatus
JP3496033B2 (ja) * 1992-06-29 2004-02-09 ウシオ電機株式会社 無電極放電ランプおよび無電極放電ランプ発光装置
JPH06188085A (ja) * 1992-12-17 1994-07-08 Japan Storage Battery Co Ltd マイクロ波放電無電極光源装置
JP2604051Y2 (ja) * 1993-12-24 2000-04-10 新日本無線株式会社 エキシマ・ランプ放電装置
US5767626A (en) * 1995-12-06 1998-06-16 Fusion Systems Corporation Electrodeless lamp starting/operation with sources at different frequencies

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101118995B1 (ko) * 2004-03-17 2012-03-12 사이머 인코포레이티드 고 반복율 레이저 발생 플라즈마 euv 광원

Also Published As

Publication number Publication date
WO2001022783A2 (en) 2001-03-29
JP2003510773A (ja) 2003-03-18
WO2001022783A3 (en) 2001-09-07
JP4901041B2 (ja) 2012-03-21
AU7489500A (en) 2001-04-24
US7462978B1 (en) 2008-12-09

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Legal Events

Date Code Title Description
PA0105 International application

Patent event date: 20020318

Patent event code: PA01051R01D

Comment text: International Patent Application

PG1501 Laying open of application
PC1203 Withdrawal of no request for examination
WITN Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid