KR20020033181A - 자외선 복사 발생 장치 및 방법 - Google Patents
자외선 복사 발생 장치 및 방법 Download PDFInfo
- Publication number
- KR20020033181A KR20020033181A KR1020027003570A KR20027003570A KR20020033181A KR 20020033181 A KR20020033181 A KR 20020033181A KR 1020027003570 A KR1020027003570 A KR 1020027003570A KR 20027003570 A KR20027003570 A KR 20027003570A KR 20020033181 A KR20020033181 A KR 20020033181A
- Authority
- KR
- South Korea
- Prior art keywords
- microwave
- chamber
- pair
- microwave chamber
- ultraviolet radiation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 230000005855 radiation Effects 0.000 title claims abstract description 42
- 238000000034 method Methods 0.000 title claims description 16
- 230000008878 coupling Effects 0.000 claims abstract description 22
- 238000010168 coupling process Methods 0.000 claims abstract description 22
- 238000005859 coupling reaction Methods 0.000 claims abstract description 22
- 230000003287 optical effect Effects 0.000 claims description 18
- 230000005284 excitation Effects 0.000 abstract description 4
- 238000010438 heat treatment Methods 0.000 description 6
- 230000008901 benefit Effects 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 239000011521 glass Substances 0.000 description 3
- 230000010363 phase shift Effects 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000007858 starting material Substances 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 239000000565 sealant Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
- H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
- H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
- H01J65/044—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by a separate microwave unit
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Electromagnetism (AREA)
- Discharge Lamps And Accessories Thereof (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US15502899P | 1999-09-20 | 1999-09-20 | |
| US60/155,028 | 1999-09-20 | ||
| PCT/US2000/025282 WO2001022783A2 (en) | 1999-09-20 | 2000-09-15 | Apparatus and method for generating ultraviolet radiation |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| KR20020033181A true KR20020033181A (ko) | 2002-05-04 |
Family
ID=22553844
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020027003570A Withdrawn KR20020033181A (ko) | 1999-09-20 | 2000-09-15 | 자외선 복사 발생 장치 및 방법 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US7462978B1 (enExample) |
| JP (1) | JP4901041B2 (enExample) |
| KR (1) | KR20020033181A (enExample) |
| AU (1) | AU7489500A (enExample) |
| WO (1) | WO2001022783A2 (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101118995B1 (ko) * | 2004-03-17 | 2012-03-12 | 사이머 인코포레이티드 | 고 반복율 레이저 발생 플라즈마 euv 광원 |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102007031628B4 (de) * | 2007-07-06 | 2012-06-21 | Eastman Kodak Co. | UV-Strahlungsquelle |
| DE102007031629B3 (de) * | 2007-07-06 | 2009-03-19 | Eastman Kodak Co. | Mit Mikrowellen angeregte Strahlungsquelle |
| DE102009018840A1 (de) * | 2009-04-28 | 2010-11-25 | Auer Lighting Gmbh | Plasmalampe |
| GB2480451A (en) * | 2010-05-18 | 2011-11-23 | E2V Tech | Electron tube rf output window |
| JP5904411B2 (ja) * | 2012-09-26 | 2016-04-13 | 岩崎電気株式会社 | マイクロ波無電極ランプ及びこれを使用した照射装置 |
| JP6206703B2 (ja) * | 2013-05-07 | 2017-10-04 | 岩崎電気株式会社 | マイクロ波無電極ランプ及びこれを使用した光照射装置 |
| US10002752B2 (en) * | 2014-07-07 | 2018-06-19 | Nordson Corporation | Systems and methods for determining the suitability of RF sources in ultraviolet systems |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR3452E (fr) | 1904-05-17 | 1904-11-17 | Charles Garnier | Chemise suspensoir |
| US3911318A (en) | 1972-03-29 | 1975-10-07 | Fusion Systems Corp | Method and apparatus for generating electromagnetic radiation |
| US3872349A (en) | 1973-03-29 | 1975-03-18 | Fusion Systems Corp | Apparatus and method for generating radiation |
| US4042850A (en) | 1976-03-17 | 1977-08-16 | Fusion Systems Corporation | Microwave generated radiation apparatus |
| JPS56126250A (en) * | 1980-03-10 | 1981-10-03 | Mitsubishi Electric Corp | Light source device of micro wave discharge |
| US4504768A (en) | 1982-06-30 | 1985-03-12 | Fusion Systems Corporation | Electrodeless lamp using a single magnetron and improved lamp envelope therefor |
| JPS63224193A (ja) * | 1987-03-11 | 1988-09-19 | 株式会社日立製作所 | 光源装置 |
| JPH0621167Y2 (ja) | 1987-08-07 | 1994-06-01 | 高橋 柾弘 | マイクロ波励起による紫外線発生装置 |
| JPH0637521Y2 (ja) | 1988-10-05 | 1994-09-28 | 高橋 柾弘 | マイクロ波励起による紫外線発生装置 |
| JP2561902B2 (ja) * | 1988-09-14 | 1996-12-11 | ウシオ電機株式会社 | マイクロ波励起型無電極発光管及びその製造方法 |
| JPH0532889Y2 (enExample) * | 1989-04-27 | 1993-08-23 | ||
| EP0450131B1 (en) * | 1990-04-06 | 1995-08-02 | New Japan Radio Co., Ltd. | Electrodeless microwave-generated radiation apparatus |
| JP3496033B2 (ja) * | 1992-06-29 | 2004-02-09 | ウシオ電機株式会社 | 無電極放電ランプおよび無電極放電ランプ発光装置 |
| JPH06188085A (ja) * | 1992-12-17 | 1994-07-08 | Japan Storage Battery Co Ltd | マイクロ波放電無電極光源装置 |
| JP2604051Y2 (ja) * | 1993-12-24 | 2000-04-10 | 新日本無線株式会社 | エキシマ・ランプ放電装置 |
| US5767626A (en) * | 1995-12-06 | 1998-06-16 | Fusion Systems Corporation | Electrodeless lamp starting/operation with sources at different frequencies |
-
2000
- 2000-09-15 JP JP2001526013A patent/JP4901041B2/ja not_active Expired - Fee Related
- 2000-09-15 KR KR1020027003570A patent/KR20020033181A/ko not_active Withdrawn
- 2000-09-15 AU AU74895/00A patent/AU7489500A/en not_active Abandoned
- 2000-09-15 WO PCT/US2000/025282 patent/WO2001022783A2/en not_active Ceased
- 2000-09-15 US US10/088,464 patent/US7462978B1/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101118995B1 (ko) * | 2004-03-17 | 2012-03-12 | 사이머 인코포레이티드 | 고 반복율 레이저 발생 플라즈마 euv 광원 |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2001022783A2 (en) | 2001-03-29 |
| JP2003510773A (ja) | 2003-03-18 |
| WO2001022783A3 (en) | 2001-09-07 |
| JP4901041B2 (ja) | 2012-03-21 |
| AU7489500A (en) | 2001-04-24 |
| US7462978B1 (en) | 2008-12-09 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PA0105 | International application |
Patent event date: 20020318 Patent event code: PA01051R01D Comment text: International Patent Application |
|
| PG1501 | Laying open of application | ||
| PC1203 | Withdrawal of no request for examination | ||
| WITN | Application deemed withdrawn, e.g. because no request for examination was filed or no examination fee was paid |