JP4901041B2 - 紫外線を生成する装置および方法 - Google Patents

紫外線を生成する装置および方法 Download PDF

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Publication number
JP4901041B2
JP4901041B2 JP2001526013A JP2001526013A JP4901041B2 JP 4901041 B2 JP4901041 B2 JP 4901041B2 JP 2001526013 A JP2001526013 A JP 2001526013A JP 2001526013 A JP2001526013 A JP 2001526013A JP 4901041 B2 JP4901041 B2 JP 4901041B2
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JP
Japan
Prior art keywords
microwave
pair
chamber
microwave chamber
plasma
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Expired - Fee Related
Application number
JP2001526013A
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English (en)
Japanese (ja)
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JP2003510773A (ja
JP2003510773A5 (enExample
Inventor
シュミットコンズ，ジェームズ，ダブリュ．
ボーサク，ジェームズ，エム．
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Nordson Corp
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Nordson Corp
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Publication of JP2003510773A5 publication Critical patent/JP2003510773A5/ja
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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
    • H01J65/044—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by a separate microwave unit
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electromagnetism (AREA)
  • Discharge Lamps And Accessories Thereof (AREA)
JP2001526013A 1999-09-20 2000-09-15 紫外線を生成する装置および方法 Expired - Fee Related JP4901041B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US15502899P 1999-09-20 1999-09-20
US60/155,028 1999-09-20
PCT/US2000/025282 WO2001022783A2 (en) 1999-09-20 2000-09-15 Apparatus and method for generating ultraviolet radiation

Publications (3)

Publication Number Publication Date
JP2003510773A JP2003510773A (ja) 2003-03-18
JP2003510773A5 JP2003510773A5 (enExample) 2007-11-08
JP4901041B2 true JP4901041B2 (ja) 2012-03-21

Family

ID=22553844

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001526013A Expired - Fee Related JP4901041B2 (ja) 1999-09-20 2000-09-15 紫外線を生成する装置および方法

Country Status (5)

Country Link
US (1) US7462978B1 (enExample)
JP (1) JP4901041B2 (enExample)
KR (1) KR20020033181A (enExample)
AU (1) AU7489500A (enExample)
WO (1) WO2001022783A2 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7087914B2 (en) * 2004-03-17 2006-08-08 Cymer, Inc High repetition rate laser produced plasma EUV light source
DE102007031628B4 (de) * 2007-07-06 2012-06-21 Eastman Kodak Co. UV-Strahlungsquelle
DE102007031629B3 (de) * 2007-07-06 2009-03-19 Eastman Kodak Co. Mit Mikrowellen angeregte Strahlungsquelle
DE102009018840A1 (de) * 2009-04-28 2010-11-25 Auer Lighting Gmbh Plasmalampe
GB2480451A (en) * 2010-05-18 2011-11-23 E2V Tech Electron tube rf output window
JP5904411B2 (ja) * 2012-09-26 2016-04-13 岩崎電気株式会社 マイクロ波無電極ランプ及びこれを使用した照射装置
JP6206703B2 (ja) * 2013-05-07 2017-10-04 岩崎電気株式会社 マイクロ波無電極ランプ及びこれを使用した光照射装置
US10002752B2 (en) * 2014-07-07 2018-06-19 Nordson Corporation Systems and methods for determining the suitability of RF sources in ultraviolet systems

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR3452E (fr) 1904-05-17 1904-11-17 Charles Garnier Chemise suspensoir
US3911318A (en) 1972-03-29 1975-10-07 Fusion Systems Corp Method and apparatus for generating electromagnetic radiation
US3872349A (en) 1973-03-29 1975-03-18 Fusion Systems Corp Apparatus and method for generating radiation
US4042850A (en) 1976-03-17 1977-08-16 Fusion Systems Corporation Microwave generated radiation apparatus
JPS56126250A (en) * 1980-03-10 1981-10-03 Mitsubishi Electric Corp Light source device of micro wave discharge
US4504768A (en) 1982-06-30 1985-03-12 Fusion Systems Corporation Electrodeless lamp using a single magnetron and improved lamp envelope therefor
JPS63224193A (ja) * 1987-03-11 1988-09-19 株式会社日立製作所 光源装置
JPH0621167Y2 (ja) 1987-08-07 1994-06-01 高橋 柾弘 マイクロ波励起による紫外線発生装置
JPH0637521Y2 (ja) 1988-10-05 1994-09-28 高橋 柾弘 マイクロ波励起による紫外線発生装置
JP2561902B2 (ja) * 1988-09-14 1996-12-11 ウシオ電機株式会社 マイクロ波励起型無電極発光管及びその製造方法
JPH0532889Y2 (enExample) * 1989-04-27 1993-08-23
EP0450131B1 (en) * 1990-04-06 1995-08-02 New Japan Radio Co., Ltd. Electrodeless microwave-generated radiation apparatus
JP3496033B2 (ja) * 1992-06-29 2004-02-09 ウシオ電機株式会社 無電極放電ランプおよび無電極放電ランプ発光装置
JPH06188085A (ja) * 1992-12-17 1994-07-08 Japan Storage Battery Co Ltd マイクロ波放電無電極光源装置
JP2604051Y2 (ja) * 1993-12-24 2000-04-10 新日本無線株式会社 エキシマ・ランプ放電装置
US5767626A (en) * 1995-12-06 1998-06-16 Fusion Systems Corporation Electrodeless lamp starting/operation with sources at different frequencies

Also Published As

Publication number Publication date
WO2001022783A2 (en) 2001-03-29
JP2003510773A (ja) 2003-03-18
WO2001022783A3 (en) 2001-09-07
AU7489500A (en) 2001-04-24
KR20020033181A (ko) 2002-05-04
US7462978B1 (en) 2008-12-09

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