KR20020007484A - Wafer cassette supporting apparatus for transporter - Google Patents
Wafer cassette supporting apparatus for transporter Download PDFInfo
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- KR20020007484A KR20020007484A KR1020000040451A KR20000040451A KR20020007484A KR 20020007484 A KR20020007484 A KR 20020007484A KR 1020000040451 A KR1020000040451 A KR 1020000040451A KR 20000040451 A KR20000040451 A KR 20000040451A KR 20020007484 A KR20020007484 A KR 20020007484A
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- plate
- cassette
- support
- wafer cassette
- moving member
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
- B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
- B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
- B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
- F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
- F16H25/20—Screw mechanisms
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H7/00—Gearings for conveying rotary motion by endless flexible members
- F16H7/02—Gearings for conveying rotary motion by endless flexible members with belts; with V-belts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
Description
본 발명은 운송장치용 웨이퍼카세트 지지장치에 관한 것으로, 더욱 상세하게는 운송장치의 이동 중에 웨이퍼의 이탈방지를 위해 웨이퍼카세트를 기울여 적재할 수 있도록 한 운송장치용 웨이퍼카세트 지지장치에 관한 것이다.The present invention relates to a wafer cassette support device for a transport device, and more particularly, to a wafer cassette support device for a transport device that allows the wafer cassette to be loaded at an angle to prevent the wafer from being separated during movement of the transport device.
일반적으로 반도체 공장에서는 제조된 웨이퍼(Wafer)를 웨이퍼카세트에 적층시켜 보관하며, 이 웨이퍼카세트를 후 공정의 생산라인이나 다른 보관장소로 운송할 때에는 통상 공장 내부를 순회하는 무인반송차(AGV, Automatic Guided Vehicle)를 이용한다. 이를 위해 무인반송차에는 이 웨이퍼카세트를 적재하거나 내리기 위한 다관절 로봇이 마련되어 있고, 또한 무인반송차의 이동 중에 웨이퍼카세트를 안정적으로 지지하기 위한 지지장치가 마련되어 있다.In general, semiconductor factories stack and store manufactured wafers in wafer cassettes. When transporting these wafer cassettes to a production line or other storage location in a later process, an unmanned carrier (AGV, Automatic) is usually traversed inside the factory. Guided Vehicles. To this end, an unmanned carrier is provided with a multi-joint robot for loading or unloading the wafer cassette, and a support device for stably supporting the wafer cassette during the movement of the unmanned carrier is provided.
무인반송차에 장착되는 웨이퍼카세트 지지장치는 도 1에 도시된 바와 같이, 무인반송차의 상부에 설치되는 지지판(1)과, 지지판(1)의 상부에 설치되는 카세트안착판(2), 그리고 카세트안착판(2)과 지지판(1)사이에 마련되는 완충장치(3,4)를 포함한다. 이때 카세트안착판(2)은 일단의 두께가 얇고 타단의 두께가 두껍게 형성되어 웨이퍼카세트(5)가 안착되는 상부가 경사면(2a)을 이루도록 되어 있으며, 카세트안착판(2)의 상면에는 웨이퍼카세트(5)가 안착되는 다수의 지지블럭(6)이 설치되어 있다. 이러한 구성은 카세트안착판(2)에 안착되는 웨이퍼카세트(5)의 개구부(5a)가 상향경사를 이루어 무인반송차의 이동 중에 발생되는 진동과 충격 또는 급정거 등에 의해 웨이퍼(7)가 웨이퍼카세트(5)로부터 이탈하지 않도록 한 것이다.As shown in FIG. 1, the wafer cassette support apparatus mounted on the unmanned carrier includes a support plate 1 installed on the top of the unmanned carrier, a cassette seating plate 2 installed on the support plate 1, and And buffer devices 3 and 4 provided between the cassette seating plate 2 and the support plate 1. At this time, the cassette seating plate 2 is thin at one end and thick at the other end so that the upper portion on which the wafer cassette 5 is seated forms an inclined surface 2a, and a wafer cassette on the upper surface of the cassette seating plate 2. A plurality of support blocks 6 on which (5) is seated are provided. In this configuration, the opening 5a of the wafer cassette 5 seated on the cassette seating plate 2 is inclined upwardly so that the wafer 7 is moved to the wafer cassette due to vibration, shock or sudden stop generated during the movement of the unmanned vehicle. 5) do not escape from.
그런데, 이러한 구성의 종래 웨이퍼카세트 지지장치는 웨이퍼카세트(5)가 탑재되는 카세트안착판(2)의 상면이 경사면(2a)으로 구성되어 있기 때문에 카세트안착판(2)에 웨이퍼카세트(5)를 올리거나 내리기 어려울 뿐 아니라, 웨이퍼카세트(5)가 카세트안착판(2)에 안착된 상태에서 웨이퍼(7)를 웨이퍼카세트(5)에 끼우거나 빼기 어려운 문제점이 있었다.By the way, in the conventional wafer cassette support apparatus having such a configuration, since the upper surface of the cassette seating plate 2 on which the wafer cassette 5 is mounted is constituted by the inclined surface 2a, the wafer cassette 5 is placed on the cassette seating plate 2. Not only is it difficult to raise or lower, but there is a problem that the wafer 7 is difficult to be inserted into or removed from the wafer cassette 5 while the wafer cassette 5 is seated on the cassette seating plate 2.
또한 종래 웨이퍼카세트 지지장치는 경사면(2a)을 이루기 위해 두껍게 형성되는 카세트안착판(2)으로 인해 외부로 노출되는 지지장치의 부피가 큰 결점이 있었다.In addition, the conventional wafer cassette support device has a large defect in the volume of the support device exposed to the outside due to the cassette seat plate 2 is formed thick to form the inclined surface (2a).
본 발명은 이와 같은 문제점을 해결하기 위한 것으로, 본 발명의 목적은 웨이퍼카세트가 안착되는 카세트안착판의 경사를 자유롭게 조절할 수 있도록 함으로써 웨이퍼카세트를 적재하거나 내리기 용이할 뿐 아니라, 외부로 노출되는 지지장치의 부피가 작아지는 운송장치용 웨이퍼카세트 지지장치를 제공하는 것이다.The present invention is to solve such a problem, an object of the present invention is to facilitate the loading and unloading of the wafer cassette, as well as the support device exposed to the outside by being able to freely adjust the inclination of the cassette mounting plate on which the wafer cassette is seated It is to provide a wafer cassette support apparatus for a transportation device, the volume of which is small.
도 1은 종래 운송장치용 웨이퍼카세트 지지장치의 구성을 보인 측면도이다.1 is a side view showing the configuration of a wafer cassette support apparatus for a conventional transportation device.
도 2는 본 발명이 적용되는 운송장치로 무인반송차의 구성을 보인 도면이다.2 is a view showing the configuration of an unmanned transport vehicle as a transport apparatus to which the present invention is applied.
도 3은 본 발명에 따른 운송장치용 웨이퍼카세트 지지장치의 구성을 보인 사시도이다.3 is a perspective view showing the configuration of a wafer cassette support apparatus for a transport apparatus according to the present invention.
도 4는 본 발명에 따른 운송장치용 웨이퍼카세트 지지장치의 승강장치 구성을 보인 사시도이다.Figure 4 is a perspective view showing the configuration of the lifting device of the wafer cassette support apparatus for a transport apparatus according to the present invention.
도 5와 도 6은 본 발명에 따른 운송장치용 웨이퍼카세트 지지장치의 동작을 보인 측면도이다.5 and 6 are side views showing the operation of the wafer cassette support apparatus for a transport apparatus according to the present invention.
* 도면의 주요 부분에 대한 부호의 설명 *Explanation of symbols on the main parts of the drawings
12: 웨이퍼카세트, 20: 웨이퍼카세트 지지장치,12: wafer cassette, 20: wafer cassette support device,
21: 카세트안착판, 22: 지지판,21: cassette seat plate, 22: support plate,
24: 댐퍼, 25: 완충스프링,24: damper, 25: damping spring,
26: 이탈방지판, 29: 회동축,26: release prevention plate, 29: rotation shaft,
40: 승강장치, 41: 고정판,40: lifting device, 41: fixed plate,
42: 수평이송부재, 43: 나선이송축,42: horizontal feed member, 43: spiral feed shaft,
44: 구동모터, 46: 핀,44: drive motor, 46: pin,
47: 레일, 48: 승강부재,47: rail, 48: elevating member,
49: 경사홈, 52,53: 풀리,49: inclined groove, 52,53: pulley,
54: 벨트, 55,56: 감지센서.54: Belt, 55,56: sensor.
상기의 목적을 달성하기 위한 본 발명에 따른 운송장치용 웨이퍼카세트 지지장치는, 상면에 웨이퍼카세트가 안착되는 카세트안착판과, 상기 카세트안착판의 하부를 지지하도록 운송장치에 장착되는 지지판과, 상기 지지판과 상기 카세트안착판 사이에 마련되는 완충수단을 포함하는 운송장치용 웨이퍼카세트 지지장치에 있어서, 상기 지지판과 상기 카세트안착판의 경사를 조절할 수 있도록 상기 지지판의 일측이 상기 운송장치에 회동 가능하게 결합되고, 상기 지지판의 타측이 승강장치를 통해 승강 가능하게 된 것을 특징으로 한다.The wafer cassette support apparatus for a transport apparatus according to the present invention for achieving the above object includes a cassette seating plate on which a wafer cassette is seated on an upper surface, a support plate mounted on a transporting device to support a lower portion of the cassette seating plate, and the support plate. And a buffer means provided between the cassette seat plate and the cassette seat plate, wherein one side of the support plate is rotatably coupled to the transport device to adjust the inclination of the support plate and the cassette seat plate. , The other side of the support plate is characterized in that it is possible to lift through the lifting device.
또한 상기 승강장치는 상기 지지판의 하부에 횡방향으로 미끄럼운동 가능하게 설치되는 수평이동부재와, 상기 수평이동부재를 이동시키도록 상기 수평이동부재와 나사 결합되며 횡방향으로 길게 배치되는 나선이송축과, 상기 나선이송축을 회전시키는 구동모터와, 상기 수평이동부재의 운동에 의해 상기 지지판의 승강이 이루어지도록 상기 지지판에 결합되며 일측에 형성된 경사홈이 상기 수평이동부재에서 연장된 핀과 결합되는 승강부재를 포함하는 것을 특징으로 한다.In addition, the elevating device is a horizontal movable member which is installed to be slidably in the horizontal direction in the lower portion of the support plate, a spiral feed shaft is coupled to the horizontal movable member so as to move the horizontal movable member and disposed in the horizontal direction long; A driving motor for rotating the spiral feed shaft and an elevating member coupled to the support plate such that the support plate is lifted and lowered by a motion of the horizontal moving member, and an inclined groove formed at one side thereof coupled with a pin extending from the horizontal moving member. It is characterized by including.
또한 상기 지지판 하부에는 상기 수평이동부재, 상기 구동모터, 상기 나선이송축의 설치를 위한 고정판이 설치되고, 상기 고정판에는 상기 수평이동부재의 안내를 위한 레일이 설치되며, 레일의 양측에는 상기 수평이동부재의 위치를 감지하는 감지센서가 설치된 것을 특징으로 한다.In addition, a fixing plate for installing the horizontal moving member, the driving motor, and the spiral feed shaft is installed below the supporting plate, and the fixing plate is provided with a rail for guiding the horizontal moving member, and both sides of the rail are horizontally moved. Characterized in that the detection sensor for detecting the position of the member is installed.
또한 상기 구동모터와 상기 나선이송축의 연결부에는 회전속도의 감속을 위해 벨트와 복수의 풀리 또는 복수의 기어로 된 동력전달수단이 마련된 것을 특징으로 한다. 또한 본 발명은 상기 카세트안착판이 평판으로 이루어진 것을 특징으로한다.In addition, the drive motor and the spiral feed shaft connecting portion is characterized in that the power transmission means is provided with a belt and a plurality of pulleys or a plurality of gears to reduce the rotation speed. In another aspect, the present invention is characterized in that the cassette seat plate made of a flat plate.
이하에서는 본 발명에 따른 바람직한 실시 예를 첨부 도면을 참조하여 상세히 설명한다.Hereinafter, exemplary embodiments of the present invention will be described in detail with reference to the accompanying drawings.
본 발명이 적용되는 무인반송차(AGV)는 도 2에 도시된 바와 같이, 내부에 구동 및 제어장치가 내장된 본체(10)의 하단에 이동을 위한 휠(11)을 구비하고, 본체(10)의 상부에 웨이퍼카세트(12)를 적재하기 위한 지지장치(20)를 구비한다. 또 본체(10)의 일측 상부에는 웨이퍼카세트(12)를 집어 올려 상부의 지지장치(20)의 위에 싣거나 생산라인에 내려놓는 다관절 로봇아암(15)이 마련된다.As shown in FIG. 2, the unmanned vehicle (AGV) to which the present invention is applied includes a wheel 11 for movement at a lower end of the main body 10 having a driving and control device therein, and a main body 10. The support apparatus 20 for loading the wafer cassette 12 on the top of the () is provided. In addition, the upper side of the main body 10 is provided with a joint articulated robot arm 15 for picking up the wafer cassette 12 and mounting it on the support device 20 in the upper portion or on the production line.
여기서 본 발명에 따른 지지장치(20)는 도 3과 도 4에 도시된 바와 같이, 상부에 웨이퍼카세트(12)가 안착되는 카세트안착판(21), 카세트안착판(21)을 지지하도록 본체(10)의 상부에 회동 가능하게 장착되는 지지판(22), 지지판(22)과 카세트 안착판(21) 사이에 설치된 완충수단, 그리고 지지판(22)의 하부에서 지지판(22)의 일단을 승강시킴으로써 지지판(22)의 경사를 조절하는 승강장치(40)를 포함한다.Here, the support device 20 according to the present invention, as shown in Figure 3 and 4, the main body to support the cassette seating plate 21, the cassette seating plate 21, the wafer cassette 12 is seated on the top ( The support plate 22 which is rotatably mounted on the upper part of 10), the buffer means installed between the support plate 22 and the cassette seating plate 21, and the support plate 22 by elevating one end of the support plate 22 below the support plate 22. And a lift device 40 for adjusting the inclination of 22.
카세트안착판(21)은 소정의 두께를 가진 평판으로 이루어지며, 상면에는 웨이퍼카세트(12)를 안정적으로 지지하기 위한 다수의 지지블럭(23a,23b,23c)이 설치된다. 그리고 카세트안착판(21)의 하면과 지지판(22) 사이에 설치되어 충격과 진동을 감쇄시키는 완충수단은 내부에 완충액이 충진된 고무재로 이루어진 다수의 댐퍼(24)와, 두 판(21,22) 사이를 탄력 지지하는 다수의 완충스프링(25)으로 이루어진다. 이때 댐퍼(24)는 두 지지판(21,22) 사이의 네 모서리부에 배치되고, 완충스프링(25)은 각 댐퍼(24)의 사이에 배치된다. 또한 댐퍼(24)와 완충스프링(25)은카세트안착판(21)과 지지판(22) 사이에 개재되며 다수의 지지공(26a)이 형성된 이탈방지판(26)을 통해 지지되며, 카세트안착판(21)을 관통하여 체결되는 다수의 고정나사(27,28)를 통해 지지된다. 이때 완충스프링(25)을 지지하는 고정나사(27)가 카세트안착판(21)과 완충스프링(25)을 관통하여 지지판(22)에 체결됨으로써, 카세트안착판(21)과 지지판(22)이 결합상태를 유지시킨다.The cassette seating plate 21 is formed of a flat plate having a predetermined thickness, and a plurality of support blocks 23a, 23b, and 23c are installed on the upper surface to stably support the wafer cassette 12. In addition, the buffer means installed between the lower surface of the cassette seating plate 21 and the support plate 22 to dampen shock and vibration includes a plurality of dampers 24 made of a rubber material filled with a buffer solution, and two plates 21, 22) is composed of a plurality of buffer springs 25 to elastically support therebetween. At this time, the damper 24 is disposed at the four corners between the two support plates (21, 22), the buffer spring 25 is disposed between each damper (24). In addition, the damper 24 and the shock absorbing spring 25 are interposed between the cassette seating plate 21 and the support plate 22 and supported by the release preventing plate 26 formed with a plurality of support holes 26a, and a cassette seating plate. It is supported by a plurality of fixing screws (27, 28) fastened through the (21). At this time, the fixing screw 27 for supporting the shock absorbing spring 25 is fastened to the support plate 22 through the cassette seating plate 21 and the shock absorbing spring 25, whereby the cassette seating plate 21 and the support plate 22 are Maintain the state of engagement.
또한 지지판(22)은 하부 일측이 본체(10)의 상부에 결합되는 회동축(29)을 통해 회전 가능하게 결합되고, 타측이 상술한 승강장치(40)에 의해 상하로 승강하도록 마련되어 지지판(22)과 이에 결합되는 카세트안착판(21)의 경사를 자유롭게 조절할 수 있도록 구성된다.In addition, the support plate 22 is rotatably coupled via a pivot shaft 29 coupled to an upper portion of the lower portion of the main body 10, and the other side is provided to elevate up and down by the elevating device 40 described above. And it is configured to freely adjust the inclination of the cassette seat plate 21 coupled thereto.
승강장치(40)는 도 4에 도시된 바와 같이, 본체(10)의 내부에 고정되는 고정판(41) 상부에 횡방향으로 미끄럼 가능하게 설치되는 수평이송부재(42)와, 수평이송부재(42)와 결합되는 나선이송축(43), 나선이송축(43)을 정·역방향으로 회전시키는 구동모터(44)를 포함한다. 또한 승강장치(40)는 지지판(22)의 하부에 결합되며, 일측에 수평이송부재(42)와 연동하는 핀(46)이 결합되는 경사홈(49)이 형성된 승강부재(48)를 포함한다.As shown in FIG. 4, the lifting device 40 includes a horizontal conveying member 42 and a horizontal conveying member 42 which are slidably installed in a transverse direction on an upper portion of the fixed plate 41 fixed to the inside of the main body 10. ) And a drive motor 44 for rotating the spiral feed shaft 43 and the spiral feed shaft 43 coupled to each other in the forward and reverse directions. In addition, the elevating device 40 is coupled to the lower portion of the support plate 22, and includes an elevating member 48 is formed with an inclined groove 49 is coupled to the pin 46 to interlock with the horizontal transfer member 42 on one side. .
좀더 상세히 설명하면, 수평이송부재(42)는 고정판(41)의 상면에 횡방향으로 길게 마련된 레일(47)을 따라 수평왕복운동을 하도록 설치된다. 그리고 나선이송축(43)은 수평이송부재(42)와 나사결합을 이룬 상태로 레일(47)의 일측방에 레일(47)과 평행하게 배치되고, 양단이 고정판(41) 상면에서 돌출된 블록(50a,50b)에 회전 가능하게 지지된다.In more detail, the horizontal transfer member 42 is installed to perform a horizontal reciprocating motion along the rail 47 provided in the transverse direction on the upper surface of the fixing plate 41. And the spiral feed shaft 43 is disposed parallel to the rail 47 on one side of the rail 47 in a state of screwing the horizontal transfer member 42, both ends protruding from the upper surface of the fixing plate 41 It is rotatably supported by 50a, 50b.
또 구동모터(44)는 고정판(41)의 상면 일측에 고정되고, 구동모터(44)의 회전축(44a)과 나선이송축(43) 사이에는 동력전달을 위한 두 개의 풀리(52,53)와, 이 두 풀리(52,53)를 연결하는 벨트(54)로 이루어진 동력전달수단이 마련된다. 여기서 동력전달수단은 복수의 기어가 치합 구조를 이루도록 구성하여도 동일한 목적을 달성할 수 있다. 또한 레일(47)의 양단부 일측에는 레일(47)을 따라 이동하는 수평이송부재(42)의 위치를 감지하여 구동모터(44)의 회전을 제어하기 위한 감지센서(55,56)가 설치된다.In addition, the driving motor 44 is fixed to one side of the upper surface of the fixed plate 41, and between the rotation shaft 44a and the spiral feed shaft 43 of the drive motor 44 and two pulleys (52, 53) for power transmission A power transmission means comprising a belt 54 connecting the two pulleys 52 and 53 is provided. Here, the power transmission means can achieve the same object even if the plurality of gears are configured to form a meshing structure. In addition, the sensor 47 (55, 56) for controlling the rotation of the drive motor 44 by detecting the position of the horizontal transfer member 42 moving along the rail 47 is installed on one side of both ends of the rail (47).
이러한 구성들은 구동모터(44)와 함께 회전하는 나선이송축(43)을 통해 수평이송부재(42)가 횡방향으로 왕복운동을 하도록 한 것이고, 감지센서(55,56)를 통해 수평이송부재(42)의 위치를 감지하여 구동모터(44)의 구동 및 회전방향을 제어하기 위한 것이다.These configurations are such that the horizontal transfer member 42 reciprocates in the horizontal direction through the spiral feed shaft 43 rotating together with the drive motor 44, and the horizontal transfer member ( It is to control the driving and rotation direction of the drive motor 44 by sensing the position of 42).
또한 수평이송부재(42)에는 상술한 승강부재(48)와의 결합을 위해 상방향으로 연장된 수직연장부(42a)를 구비하고, 이 수직연장부(42a)의 상부에는 레일(47)과 교차하는 방향으로 연장되어 승강부재(48)의 경사홈(49)에 끼워지는 소정길이의 핀(46)이 마련된다.In addition, the horizontal transfer member 42 is provided with a vertical extension portion 42a extending upward for engagement with the elevating member 48 described above, and the upper portion of the vertical extension portion 42a intersects with the rail 47. A pin 46 of a predetermined length is provided to extend in the direction to fit in the inclined groove 49 of the elevating member 48.
그리고 승강부재(48)는 지지판(22)의 하면에 고정되는 고정부(48a)와, 고정부(48a)로부터 하부로 절곡되어 연장되는 연장부(48b)로 이루어지며, 이 연장부(48b)에 수평이송부재(42)와 연동하는 핀(46)이 끼워지는 경사홈(49)이 형성된다. 이때 경사홈(49)은 핀(46)의 외경에 상응하는 폭으로 연장부(48b)의 대각방향으로 경사지게 형성된다.And the elevating member 48 is composed of a fixing portion 48a which is fixed to the lower surface of the support plate 22, and an extension portion 48b which is bent downward from the fixing portion 48a and extends. An inclined groove 49 into which the pin 46 interlocks with the horizontal transfer member 42 is formed. At this time, the inclined groove 49 is formed to be inclined in the diagonal direction of the extension portion 48b in a width corresponding to the outer diameter of the pin 46.
다음은 이와 같이 구성된 본 발명에 따른 운송장치용 웨이퍼카세트 지지장치의 동작을 설명한다.The following describes the operation of the wafer cassette support apparatus for a transport apparatus according to the present invention configured as described above.
무인반송차가 웨이퍼카세트(12) 적재를 위해 정지한 상태에서는 도 5에 도시된 바와 같이, 지지판(22)이 수평상태를 유지한다. 즉 이때는 수평이송부재(42)가 "C"방향으로 이동하여 핀(46)이 경사홈(49)의 상측 "A"부에 위치한다.In the state where the unmanned carrier is stopped for loading the wafer cassette 12, as shown in FIG. 5, the support plate 22 maintains the horizontal state. That is, at this time, the horizontal transfer member 42 is moved in the "C" direction so that the pin 46 is located on the upper "A" portion of the inclined groove 49.
그리고 로봇아암(15)의 동작을 통해 카세트안착판(21)에 웨이퍼카세트(12)가 적재된 후에는 도 6에 도시된 바와 같이, 구동모터(44)의 구동으로 지지판(22)과 카세트안착판(21)이 소정 경사(θ)로 기울여진다. 이때는 구동모터(44)의 회전으로 나선이송축(43)이 회전되고, 나선이송축(43)의 회전에 의해 수평이송부재(42)가 레일(47)을 따라 "D"방향으로 이동된다. 또한 이때는 수평이송부재(42)에 결합된 핀(46)이 승강부재(48)의 경사홈(49) 상부 "A"에서 경사홈(49) 하부 "B"쪽으로 이동하므로, 승강부재(48)의 상승이 이루어지면서 지지판(22)이 소정의 경사로 기울여진다.After the wafer cassette 12 is loaded onto the cassette seating plate 21 through the operation of the robot arm 15, as shown in FIG. 6, the support plate 22 and the cassette seating are driven by the driving motor 44. The plate 21 is inclined at a predetermined inclination θ. At this time, the spiral feed shaft 43 is rotated by the rotation of the drive motor 44, the horizontal feed member 42 is moved along the rail 47 in the "D" direction by the rotation of the spiral feed shaft 43. In this case, since the pin 46 coupled to the horizontal transfer member 42 moves from the upper portion "A" of the inclined groove 49 of the elevating member 48 to the lower portion "B" of the inclined groove 49, the elevating member 48. While the rise of the support plate 22 is inclined at a predetermined inclination.
이 상태에서 무인반송차가 이동을 하면, 웨이퍼카세트(12)가 기울여져 개구부(12a)가 상방향을 향하게 되므로 이동 중에 소정의 진동과 충격이 발생하더라도 웨이퍼(13)의 이탈이 방지된다.When the unmanned carrier moves in this state, the wafer cassette 12 is tilted so that the opening 12a faces upward, so that the wafer 13 is prevented from being separated even if a predetermined vibration and shock occurs during the movement.
그리고 무인반송차가 목적지에 도착하여 웨이퍼카세트(12)를 내리기 위해 정지한 때에는 카세트안착판(21)과 지지판(22)이 다시 수평상태로 복원되어 웨이퍼카세트(12)를 내리기 용이한 상태가 된다. 즉 이때는 구동모터(44)에 의해 나선이송축(43)이 다시 역방향으로 회전하면서 수평이송부재(42)를 상술한 경우와 반대 방향("C"방향)으로 이송시켜, 핀(46)이 경사홈(49)의 상부("A"방향)로 이동하도록 함으로써 승강부재(48)를 하강시킨다.When the unmanned carrier arrives at the destination and stops to lower the wafer cassette 12, the cassette seating plate 21 and the support plate 22 are restored to the horizontal state again, and the wafer cassette 12 is easily lowered. That is, at this time, the spiral feed shaft 43 is rotated again by the drive motor 44, and the horizontal feed member 42 is transferred in the opposite direction ("C" direction) as described above, so that the pin 46 is inclined. The elevating member 48 is lowered by moving to the upper portion ("A" direction) of the groove 49.
이상에서 상세히 설명한 바와 같이, 본 발명에 따른 운송장치용 웨이퍼카세트 지지장치는 승강장치의 동작에 의해 카세트안착판의 경사가 자유롭게 조절되므로, 운송장치의 정지시에는 웨이퍼카세트가 수평상태를 유지하여 적재하거나 내리기 용이할 뿐만 아니라, 이동 중에는 웨이퍼카세트가 소정의 경사를 유지하여 웨이퍼의 이탈을 방지하는 효과가 있다.As described above in detail, since the inclination of the cassette seating plate is freely adjusted by the operation of the lifting device, the wafer cassette support apparatus for transporting apparatus according to the present invention can be loaded or unloaded while keeping the wafer cassette horizontal when the transporting apparatus is stopped. In addition to being easy, there is an effect that the wafer cassette maintains a predetermined inclination during movement to prevent the wafer from being separated.
또한 본 발명은 카세트안착판이 얇은 평판으로 구성되기 때문에 외부로 노출되는 지지장치의 부피가 작아지는 효과가 있다.In addition, the present invention has an effect that the volume of the support device exposed to the outside because the cassette seating plate is composed of a thin plate.
Claims (7)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020000040451A KR100358512B1 (en) | 2000-07-14 | 2000-07-14 | Wafer cassette supporting apparatus for transporter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020000040451A KR100358512B1 (en) | 2000-07-14 | 2000-07-14 | Wafer cassette supporting apparatus for transporter |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| KR20020007484A true KR20020007484A (en) | 2002-01-29 |
| KR100358512B1 KR100358512B1 (en) | 2002-10-30 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| KR1020000040451A KR100358512B1 (en) | 2000-07-14 | 2000-07-14 | Wafer cassette supporting apparatus for transporter |
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| Country | Link |
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| KR (1) | KR100358512B1 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20180043919A (en) * | 2016-10-21 | 2018-05-02 | 전북대학교산학협력단 | Cassette for preventing broken of wafer |
| CN110491815A (en) * | 2019-08-15 | 2019-11-22 | 东方环晟光伏（江苏）有限公司 | A kind of transmission device kept suitable for the transmission of the large scale gaily decorated basket and position |
| CN115108244A (en) * | 2022-06-22 | 2022-09-27 | 四川金域医学检验中心有限公司 | Equipment suitable for pathological slide dries in air piece and preserves |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR200461676Y1 (en) | 2010-11-10 | 2012-07-30 | 주식회사 라우텍 | Motor Base that is possible to adjust angle |
| KR102642971B1 (en) * | 2023-08-22 | 2024-03-04 | 신성델타테크 주식회사 | A Two Wheeled Robot Device |
-
2000
- 2000-07-14 KR KR1020000040451A patent/KR100358512B1/en not_active IP Right Cessation
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20180043919A (en) * | 2016-10-21 | 2018-05-02 | 전북대학교산학협력단 | Cassette for preventing broken of wafer |
| CN110491815A (en) * | 2019-08-15 | 2019-11-22 | 东方环晟光伏（江苏）有限公司 | A kind of transmission device kept suitable for the transmission of the large scale gaily decorated basket and position |
| CN115108244A (en) * | 2022-06-22 | 2022-09-27 | 四川金域医学检验中心有限公司 | Equipment suitable for pathological slide dries in air piece and preserves |
| CN115108244B (en) * | 2022-06-22 | 2024-01-26 | 四川金域医学检验中心有限公司 | Equipment suitable for pathological slide dries in air piece and preserves |
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| Publication number | Publication date |
|---|---|
| KR100358512B1 (en) | 2002-10-30 |
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