WO2023079882A1 - Overhead conveying vehicle - Google Patents

Overhead conveying vehicle Download PDF

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Publication number
WO2023079882A1
WO2023079882A1 PCT/JP2022/036970 JP2022036970W WO2023079882A1 WO 2023079882 A1 WO2023079882 A1 WO 2023079882A1 JP 2022036970 W JP2022036970 W JP 2022036970W WO 2023079882 A1 WO2023079882 A1 WO 2023079882A1
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WO
WIPO (PCT)
Prior art keywords
unit
container
opening
inclination
gripping
Prior art date
Application number
PCT/JP2022/036970
Other languages
French (fr)
Japanese (ja)
Inventor
誠 小林
Original Assignee
村田機械株式会社
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Filing date
Publication date
Application filed by 村田機械株式会社 filed Critical 村田機械株式会社
Publication of WO2023079882A1 publication Critical patent/WO2023079882A1/en

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B61RAILWAYS
    • B61BRAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
    • B61B13/00Other railway systems
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B61RAILWAYS
    • B61BRAILWAY SYSTEMS; EQUIPMENT THEREFOR NOT OTHERWISE PROVIDED FOR
    • B61B3/00Elevated railway systems with suspended vehicles
    • B61B3/02Elevated railway systems with suspended vehicles with self-propelled vehicles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G1/00Storing articles, individually or in orderly arrangement, in warehouses or magazines
    • B65G1/02Storage devices
    • B65G1/04Storage devices mechanical
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/07Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for semiconductor wafers Not used, see H01L21/677
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations

Definitions

  • One aspect of the present invention relates to an overhead transport vehicle.
  • An overhead transport vehicle is known that is provided with a traveling section that travels on a track laid on a ceiling or the like, and an elevating section that has a gripping section that transfers an article to a placement section such as a shelf or a load port.
  • the lifting section is suspended by a plurality of hanging members such as belts, and is raised and lowered by winding or unrolling the hanging members.
  • Patent Literature 1 discloses a conveying device that prevents an article from jumping out by arranging a stopper (contact member) that prevents the article from jumping out in front of an opening in the direction in which the article jumps out when the article is conveyed. .
  • An object of one aspect of the present invention is to provide an overhead transport vehicle capable of suppressing articles from jumping out of an opening during transport without arranging a stopper in front of the opening.
  • An overhead transport vehicle is an overhead transport vehicle that transports a container having an opening for loading and unloading of articles that opens in one direction, and the container is transported so that the opening direction of the opening faces the horizontal direction.
  • “suspended from the running portion” means that the moving portion may be directly suspended or may be suspended from another object that moves integrally with the running portion. .
  • the height position of the opening side of the container gripped by the gripping portion is relatively high in the container, in other words, the opening direction of the opening is in the horizontal direction.
  • the tilt of the lifting section is adjusted by controlling the lifting drive section so that the lifting section is tilted obliquely upward.
  • the possibility of the article jumping out of the opening of the container gripped by the gripping portion is reduced compared to the case where the opening direction of the opening of the container is horizontal. That is, it is possible to prevent the article from jumping out of the opening during transportation without arranging a stopper in front of the opening. As a result, higher speed transportation is also possible.
  • the overhead guided vehicle further includes a pulley around which the suspension member is wound, and a position change mechanism that moves the position of the pulley, and the control unit controls the movement of the lift drive unit and the position change mechanism.
  • the control unit controls the movement of the lift drive unit and the position change mechanism.
  • An overhead guided vehicle is provided with a gripping portion for gripping a container having an opening for loading and unloading of articles on the side thereof, and a gripping portion, and is suspended from a traveling portion by a plurality of suspension members.
  • the tilt of the lifting section is adjusted so that the container is in a relatively high pop-out prevention posture.
  • the height position of the opening side of the container gripped by the gripping portion is relatively high in the container, in other words, the opening direction of the opening is in the horizontal direction.
  • the tilt of the lifting section is adjusted so that the jump-out prevention posture is tilted obliquely upward.
  • the possibility of the article jumping out of the opening of the container gripped by the gripping portion is reduced compared to the case where the opening direction of the opening of the container is horizontal. That is, it is possible to prevent the article from jumping out of the opening during transportation without arranging a stopper in front of the opening.
  • the pulley is provided movably along the vertical direction, and the position changing mechanism may move the pulley along the vertical direction.
  • control unit may adjust the inclination of the elevation unit so that at least the traveling unit assumes the pop-out prevention posture during travel.
  • the control unit changes the posture of the container from the pop-out prevention posture to the horizontal direction in the downward movement before placing the container on the placement unit. You may adjust the inclination of an raising/lowering part so that it may change into the normal attitude
  • FIG. 1 is a side view of an overhead transport vehicle of one embodiment.
  • FIG. 2 is a front view of the holding unit as seen from the front.
  • FIG. 3 is a perspective view of a first cushioning mechanism and a second cushioning mechanism.
  • FIG. 4 is a front view of the lift drive unit.
  • FIG. 5 is a side view of the lift drive unit.
  • FIG. 6 is a front view showing the operation of the lift drive unit.
  • FIG. 7 is a side view showing the operation of the lift drive unit.
  • FIG. 8(A) is a front view showing a holding unit that holds a container in a normal posture (horizontal), and
  • FIG. 8(B) shows a holding unit that holds a container in a pop-out prevention posture. It is a front view showing.
  • FIG. 9 is a front view showing the downward movement of the holding unit.
  • the ceiling transport vehicle 1 of one embodiment travels along a track 20 laid near the ceiling of a clean room where semiconductor devices are manufactured.
  • the overhead transport vehicle 1 of one embodiment transports a container 200 containing a plurality of articles A such as semiconductor wafers (see FIGS. 8A and 8B) and performs various processes on the semiconductor wafers.
  • the container 200 is transferred to a load port (placement section) 300 or the like provided in the processing apparatus to be processed.
  • the container 200 that is transported in this embodiment has an opening 200a that opens in one direction, as shown in FIG.
  • the opening 200a is formed in a part of a side surface 200b that forms a plane orthogonal to the horizontal direction when the container 200 is placed on a horizontal placement surface such as the load port 300. As shown in FIG. That is, when the container 200 is placed on a horizontal placement surface such as the load port 300, the opening 200a opens horizontally.
  • the overhead transport vehicle 1 includes a frame unit (running section) 2, a running unit (running section) 3, a lateral unit 4, a sheeter unit 5, an elevation drive unit 6, and a holding unit. (elevating unit) 7 and a transport vehicle controller (control unit) 8 are provided.
  • the frame unit 2 has a center frame 15 , a front frame 16 and a rear frame 17 .
  • the front frame 16 extends downward from the front end of the center frame 15 (the front side in the running direction of the overhead transport vehicle 1).
  • the rear frame 17 extends downward from the rear end of the center frame 15 (the rear side in the running direction of the overhead transport vehicle 1).
  • the traveling unit 3 is arranged above the center frame 15 .
  • the traveling unit 3 travels along the track 20 by being supplied with electric power in a non-contact manner from, for example, a high-frequency current line laid along the track 20 .
  • the lateral unit 4 is arranged below the center frame 15 .
  • the lateral unit 4 moves the sheeter unit 5, the lifting drive unit 6, and the holding unit 7 in the lateral direction (sideways in the traveling direction of the overhead transport vehicle 1).
  • the theta unit 5 is arranged below the lateral unit 4 .
  • the sheeter unit 5 rotates the elevation drive unit 6 and the holding unit 7 in the horizontal plane.
  • the elevation drive unit 6 is arranged below the sheeter unit 5 .
  • the lifting drive unit 6 suspends the holding unit 7 with a plurality of belts B. As shown in FIG.
  • the lifting drive unit 6 lifts and lowers the holding unit 7 with respect to the lifting drive unit 6 which moves integrally with the traveling unit 3 by winding and unwinding the plurality of belts B.
  • the holding unit 7 is arranged below the elevation drive unit 6 .
  • the holding unit 7 holds the flange 201 of the container 200 .
  • the holding unit 7 has a base 11 , a pair of grippers (holding portions) 12 and 12 and a housing 13 .
  • a pair of grippers 12, 12 are supported by the base 11 so that they can be opened and closed along the horizontal direction.
  • the pair of grippers 12, 12 are opened and closed by a drive motor (not shown) and a link mechanism (not shown).
  • the height position of the holding unit 7 is adjusted so that the holding surface of the gripper 12 is below the height of the lower surface of the flange 201 when the pair of grippers 12, 12 are in the open state.
  • the holding surface of the gripper 12 advances below the lower surface of the flange 201, and by lifting the holding unit 7 in this state, the pair of grippers is closed.
  • the flange 201 is held (gripped) by 12, 12 and the container 200 is supported.
  • the pair of grippers 12, 12 are arranged so that the opening 200a faces the horizontal direction (the bottom 200c of the container 200 faces the horizontal direction when the holding unit 7 is not tilted with respect to the horizontal plane).
  • the container 200 can be held (in a horizontal position).
  • the first damping mechanism 50 and the second damping mechanism 40 are mechanisms that connect the belt B and the holding unit 7 (see FIG. 1). It is a mechanism for suppressing transmission to the container 200 .
  • the first cushioning mechanism 50 has an elastic member 58 that supports the base 11 vertically from below so as to be vertically movable. placed on one side.
  • the first buffer mechanism 50 is provided on the right side of the holding unit 7 in the left-right direction.
  • the first buffer mechanism 50 has a connection member 51, a swing member 53, a first body member 54, a second body member 56, and a pair of elastic members 58,58.
  • the left-right direction in this embodiment means the left-right direction when the ceiling guided vehicle 1 is viewed from the front in the traveling direction.
  • the connection member 51 is a member attached to the belt B.
  • the swinging member 53 is a member connected to the connecting member 51 .
  • the swinging member 53 is connected to the connecting member 51 via the pin member 52 so as to be bidirectionally rotatable.
  • the first body member 54 is a substantially L-shaped member, and the bottom portion thereof is formed to be flat.
  • the first body member 54 is connected to the swing member 53 .
  • the bottom of the first body member 54 is connected to the second body member 56 by bolts or the like.
  • the second body member 56 supports the elastic member 58 from below and the bottom of the first body member 54 .
  • the pair of elastic members 58, 58 are coil springs having a predetermined spring constant.
  • a pair of elastic members 58, 58 are supported by the second body member 56 and support the base 11 from below.
  • a lower end of the elastic member 58 is fixed to the second body member 56 .
  • the upper end of the elastic member 58 is not fixed to the base 11 and supports the base 11 by making contact. That is, when each of the pair of elastic members 58 and 58 is in a contracted state in contact with both the second body member 56 and the base 11, each of the elastic members 58 and 58 moves away from the second body member 56 and the base 11 from each other. energize.
  • the elastic member 58 has a role of reducing vibration transmitted between members in contact with each other.
  • the elastic member 58 may be fixed to the base 11 and provided to the second main body member 56 so as to be separable and contactable.
  • the second cushioning mechanism 40 has an elastic member 48 that supports the base 11 vertically from below so as to be vertically movable. It is arranged on the other side (the side opposite to the first buffer mechanism 50 in the width direction). In this embodiment, the second buffer mechanism 40 is provided on the left side of the holding unit 7 in the left-right direction.
  • the second buffer mechanism 40 has connection members 41, 41, a swing member 43, a third body member 45, a fourth body member 46, a regulation member 47, and a pair of elastic members 48, 48. are doing.
  • the connecting members 41, 41 are members to which the belts B, B are attached.
  • the swinging member 43 is a member that connects the pair of connection members 41 and 41 and the third main body member 45 .
  • the pair of connecting members 41 and 41 and the swinging member 43 are bidirectionally rotatably connected and connected via a pair of pin members 42 and 42 .
  • the rocking member 43 and the third main body member 45 are rotatably connected in both directions and connected via a pin member 44 .
  • the fourth body member 46 supports the elastic members 48, 48 from below.
  • the pair of elastic members 48, 48 are coil springs having a predetermined spring constant.
  • a pair of elastic members 48, 48 are supported by the fourth body member 46 and support the base 11 from below.
  • a lower end of the elastic member 48 is fixed to the fourth body member 46 .
  • the restricting member 47 restricts the base 11 from being separated from the fourth body member 46 by a predetermined distance or more. More specifically, the restricting member 47 locks the upper surface of the base 11 that is about to leave the fourth body member 46 by a predetermined distance or more.
  • the upper end of the elastic member 48 is not fixed to the base 11 and supports the base 11 by making contact.
  • each of the pair of elastic members 48 , 48 urges the fourth body member 46 and the base 11 away from each other when in contact with both the fourth body member 46 and the base 11 .
  • the elastic member 48 has a role of reducing vibration transmitted between members in contact with each other.
  • the elastic member 48 may be fixed to the base 11 and provided to the fourth main body member 46 so as to be separable and contactable.
  • the holding unit 7 connects the first damping mechanism 50 and the second damping mechanism 40, and the distance between the first damping mechanism 50 and the base 11 in the vertical direction.
  • a link mechanism may be provided that operates to reduce the distance between the second buffer mechanism 40 and the base 11 .
  • the elevation drive unit 6 includes a base 61, a support section 62, four (plural) winding drums 63, a drive motor (elevation drive section) 63A, and a first It has an idler pulley 65A, a second idler pulley (pulley) 65B, a third idler pulley 64, a direct acting mechanism (position changing mechanism) 67, and four (plural) belts B.
  • the base 61 supports the winding drum 63, the first idler pulley 65A and the third idler pulley 64 via the supporting portion 62.
  • the support portion 62 rotatably supports the four winding drums 63 .
  • the four winding drums 63 are arranged in the front-rear direction, and are driven by drive motors 63A to wind or unwind the four belts B, respectively.
  • the drive by the drive motor 63A is controlled by a transport vehicle controller (control section) 8.
  • Each winding drum 63 is rotatably attached to the base 61 via the support portion 62 .
  • the drive motor 63A is a drive source for rotating each winding drum 63 and is fixed to the base 61 .
  • the four winding drums 63 are driven by one drive motor 63A by being attached to a common rotating shaft (not shown) or linked by an interlocking mechanism (not shown).
  • each belt B is connected to the holding unit 7 and the other end of each belt B is connected to each winding drum 63 .
  • the four belts B are provided so as to suspend the holding unit 7 at three points. More specifically, the holding unit 7 is suspended by four belts B, and two of the four belts B are provided to swing with respect to the holding unit 7. Each of the remaining two of the four belts is connected to a member 43 (see FIG. 3) via a connecting member 41, and each of the two belts is provided to swing with respect to the holding unit 7. It is connected to each of the members 53 via the connection member 51 .
  • the belt B connected to the first buffer mechanism 50 is wound around the first idler pulley 65A and the second idler pulley 65B to guide the movement of the belt B.
  • the first idler pulley 65A is provided on the support portion 62 and does not move relative to the base 61 .
  • the second idler pulley 65B is provided movably relative to the base 61 .
  • the belt B connected to the second buffer mechanism 40 is wound around the third idler pulley 64 and guides the movement of the belt B.
  • the linear motion mechanism 67 mainly has a drive motor 67A, a screw shaft 67B, and a ball nut 67C, and is a mechanism that converts rotary motion of the drive motor 67A into linear motion.
  • the direct acting mechanism 67 is fixed to the base 61 via a bracket 66 .
  • a pulley support portion 68 that supports the second idler pulley 65B is attached to the ball nut 67C that moves along the screw shaft 67B by driving the drive motor 67A.
  • the pulley support portion 68 is provided with a through hole 68A through which the bracket 66 can be passed in plan view.
  • a linear guide 69 is provided between the bracket 66 passing through the pulley support portion 68 and the through hole 68A.
  • the linear guide 69 mainly has a guide rail 69A and a block portion 69B that can slide along the guide rail 69A.
  • a first opposing surface facing the bracket 66 is formed in the through hole 68A.
  • the bracket 66 is formed with a second opposing surface that faces the first opposing surface.
  • a guide rail 69A is arranged on one of the first opposing surface and the second opposing surface, and a block portion 69B is provided on the other of the first opposing surface and the second opposing surface.
  • the second idler pulley 65B is moved vertically by the linear guide 69 smoothly and stably.
  • the movement of the ball nut 67C along the screw shaft 67B causes the pulley support portion 68 to move.
  • the ball nut 67C and the pulley support portion 68 move vertically along the vertically extending screw shaft 67B, thereby moving the second idler pulley 65B vertically.
  • the linear motion mechanism 67 positions the second idler pulley 65B so that the connecting portion (one end of the belt B) of the belt B to the holding unit 7 (first buffer mechanism 50) moves in the vertical direction. move.
  • the left side of the holding unit 7 can be tilted upwards.
  • the jump-out preventing posture in which the height position of the opening 200a side of the container 200 gripped by the pair of grippers 12 is relatively high in the container 200. Become. That is, the inclination of the holding unit 7 with respect to the horizontal plane is adjusted so that the container 200 gripped by the pair of grippers 12, 12 is in the pop-out prevention posture.
  • the pop-out prevention posture of the container 200 refers to a posture in which the opening direction of the opening 200a is inclined upward by a predetermined angle ⁇ (for example, 2° to 30°) with respect to the horizontal plane.
  • the transport vehicle controller 8 is arranged on the center frame 15 .
  • the transport vehicle controller 8 is an electronic control unit composed of a CPU (Central Processing Unit), a ROM (Read only memory), a RAM (Random access memory), and the like.
  • the transport vehicle controller 8 controls each part of the overhead transport vehicle 1 .
  • the transport vehicle controller 8 of this embodiment controls the linear motion mechanism 67 to adjust the inclination of the holding unit 7 with respect to the horizontal plane. More specifically, the transport vehicle controller 8 controls the direct-acting mechanism 67 so that the container 200 gripped by the grippers 12, 12 assumes the pop-out prevention posture (see FIG. 8B), and the holding unit Adjust the tilt of 7 with respect to the horizontal plane.
  • the transport vehicle controller 8 adjusts the inclination of the holding unit 7 so that at least the traveling unit 3 is in the pop-out prevention posture while traveling.
  • the transport vehicle controller 8 controls the holding unit 7 so as to assume the pop-out preventing posture not only when the traveling unit 3 is traveling, but also when the container 200 is lowered and when the container 200 is raised. adjust the tilt of the Specifically, in the lowering operation before placing the container 200 on the load port 300, the transport vehicle controller 8 changes the posture of the container 200 from the pop-out preventing posture to the normal posture in which the opening direction of the opening 200a is oriented horizontally. The inclination of the holding unit 7 is adjusted so as to change to . Further, the transport vehicle controller 8 tilts the holding unit 7 so that the attitude of the container 200 changes from the normal attitude to the pop-out prevention attitude in the rising operation after gripping the container 200 placed on the load port 300 . to adjust.
  • the container 200 gripped by the pair of grippers 12, 12 has a height position on the side of the opening 200a of the container 200 that is relatively high in the jump-out prevention posture.
  • the inclination of the holding unit 7 is adjusted by controlling the movement mechanism 67 .
  • the possibility of the article A jumping out of the opening 200a is reduced. That is, it is possible to prevent the article A from jumping out of the opening 200a during transportation without arranging a stopper in front of the opening 200a.
  • the second idler pulley 65B is provided movably along the vertical direction, and the linear motion mechanism 67 makes the second idler pulley 65B movable along the vertical direction. Configure. This makes it possible to adjust the tilt of the holding unit 7 with a simple configuration.
  • the linear motion mechanism 67 is controlled.
  • one end of the belt B which is the connecting portion with the first buffer mechanism 50, is lowered.
  • the drive motor 63A is controlled to let out the belt B so that the side opposite to the opening 200a is relatively lowered, and the linear motion mechanism 67 is moved. may be controlled to be relatively high on the side of the opening 200a. In this case, variations in the height position of the container 200 can be reduced.
  • the transport vehicle controller 8 adjusts the inclination of the holding unit 7 so that the traveling unit 3 assumes the pop-out prevention posture while traveling. This can reduce the possibility that the article A will jump out of the opening 200a when the overhead transport vehicle 1 accelerates or decelerates or travels in a curve section.
  • the inclination of the holding unit 7 is adjusted so that the posture of the container 200 changes from the pop-out prevention posture to the normal posture during the downward movement before placing the container 200 on the load port 300. adjusting. This reduces the impact applied to the container 200 when the container 200 is placed on the load port 300 having a horizontal placement surface.
  • the two winding drums 63 to be wrapped around may be configured to be driven independently.
  • the drive motor 63A is controlled to move the container 200 to the right side of the holding unit 7 (first buffer mechanism 50).
  • the winding drum 63 around which the connected belt B is wound may be rotated in the feeding direction.
  • the winding drum 63 around which the belt B connected to the left side of the holding unit 7 (the second buffer mechanism 40) is wound may be rotated in the winding direction.
  • the winding drum 63 around which the belt B is wound, which is connected to the right side of the holding unit 7 (first buffer mechanism 50) is rotated in the unwinding direction, and the left side of the holding unit 7 (second buffer mechanism 40) is rotated.
  • the winding drum 63 around which the connected belt B is wound may be rotated in the winding direction.
  • Modification 2 In order to change the posture of the container 200 to the pop-out prevention posture, in the above-described embodiment, the inclination of the holding unit 7 is adjusted by controlling the linear motion mechanism 67, and in the above-described modified example 1, the drive motor 63A is controlled. Although an example of adjusting the inclination of the holding unit 7 is described above, the inclination of the holding unit 7 may be adjusted by controlling both the linear motion mechanism 67 and the drive motor 63A.
  • one end of the belt B is moved in the vertical direction by moving the position of the second idler pulley 65B in the vertical direction.
  • the second idler pulley 65B By moving the second idler pulley 65B in a direction other than the vertical direction, the one end of the belt B may be moved in the vertical direction.
  • the holding unit 7 of the above-described embodiment and modifications has been described as being connected to one end of the belt B via the first buffer mechanism 50 and the second buffer mechanism 40, it is directly connected to the holding unit 7.
  • the four belts B may be directly connected to the holding unit 7 as they are.
  • it may be connected to the holding unit 7 by three belts B. FIG.
  • the container 200 is gripped so that the opening 200a of the container 200 faces left has been described, but the container 200 may be gripped so that it faces right. Even in this case, the container 200 can be brought into the pop-out prevention posture by appropriately combining the control of the linear motion mechanism 67 and the control of the drive motor 63A as described above.
  • a gripping portion for gripping a container having an opening on the side for taking in and out articles; an elevating unit provided with the gripping unit and suspended from the traveling unit by a plurality of suspension members; an elevation driving unit that raises and lowers the elevation unit with respect to the traveling unit by winding and unwinding the plurality of hanging members; a pulley around which the suspension member is wound; a position changing mechanism for moving the position of the pulley; A control unit that controls the position changing mechanism to adjust the inclination of the lifting unit with respect to the horizontal plane, The control unit adjusts the inclination of the elevating unit so that a height position of the opening side of the container gripped by the gripping unit is in a pop-out prevention posture in which the container is relatively high.
  • the pulley is provided movably along the vertical direction, The overhead guided vehicle according to [2] or [3], wherein the position changing mechanism moves the pulley along the vertical direction.
  • the controller changes the posture of the container from the pop-out preventing posture to a normal posture in which the opening direction of the opening faces the horizontal direction in the lowering operation before placing the container on the placing portion.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Transportation (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Load-Engaging Elements For Cranes (AREA)
  • Carriers, Traveling Bodies, And Overhead Traveling Cranes (AREA)
  • Warehouses Or Storage Devices (AREA)

Abstract

This overhead conveying vehicle comprises: a gripping part (12) that grips a container (200) so that the opening direction of an opening (200a) is directed horizontally; a lifting part (7) which is provided with the gripping part (12) and which is suspended from a traveling part (3) by a plurality of suspension members (B); a lifting drive part (63A) that raises or lowers the lifting part (7) with respect to the traveling part (3) by winding up and feeding out the plurality of suspension members (B); and a control part (8) that adjusts the inclination of the lifting part (7) relative to the horizontal plane by controlling the winding-up amount or the feeding-out amount of each of the plurality of suspension members (B) in the lifting drive part (63A). The control part (8) adjusts the inclination of the lifting part (7) to assume a falling prevention pose in which the height on the opening (200a) side of the container (200) gripped by the gripping part (12) is positioned higher relative to the rest of the container (200).

Description

天井搬送車overhead carrier
 本発明の一側面は、天井搬送車に関する。 One aspect of the present invention relates to an overhead transport vehicle.
 天井等に敷設された軌道を走行する走行部と、棚又はロードポート等の載置部に物品を移載する把持部を有する昇降部と、が設けられた天井搬送車が知られている。昇降部は、ベルト等の複数の吊持部材によって吊り下げ保持されており、当該吊持部材を巻き取りないし繰り出しすることによって昇降される。 An overhead transport vehicle is known that is provided with a traveling section that travels on a track laid on a ceiling or the like, and an elevating section that has a gripping section that transfers an article to a placement section such as a shelf or a load port. The lifting section is suspended by a plurality of hanging members such as belts, and is raised and lowered by winding or unrolling the hanging members.
特開2012-64799号公報JP 2012-64799 A
 このような天井搬送車は、物品を出し入れするための開口部が側面に設けられている(水平方向に開口している)容器に収容した状態で物品を搬送することがある。しかしながら、この場合、例えば天井搬送車の加減速や、カーブ区間走行時の遠心力等に起因して、容器の開口部から物品が飛び出すおそれがある。例えば、特許文献1には、物品の搬送時に、物品の飛び出しを防止するストッパ(接触体)を開口部における飛び出し方向の前面に配置させることによって物品の飛び出しを防止する搬送装置が開示されている。 Such an overhead transport vehicle may transport an article in a container that has an opening on the side (opens horizontally) for loading and unloading the article. However, in this case, there is a risk that the articles may jump out of the opening of the container due to, for example, acceleration and deceleration of the overhead transport vehicle, centrifugal force during travel on a curve, or the like. For example, Patent Literature 1 discloses a conveying device that prevents an article from jumping out by arranging a stopper (contact member) that prevents the article from jumping out in front of an opening in the direction in which the article jumps out when the article is conveyed. .
 本発明の一側面の目的は、開口部の前面にストッパを配置することなく、搬送時における開口部からの物品の飛び出しを抑制できる天井搬送車を提供することにある。 An object of one aspect of the present invention is to provide an overhead transport vehicle capable of suppressing articles from jumping out of an opening during transport without arranging a stopper in front of the opening.
 本発明の一側面に係る天井搬送車は、物品の出し入れを行う開口部が一方向に開口する容器を搬送する天井搬送車であって、開口部の開口方向が水平方向に向くように容器を把持する把持部と、把持部が設けられると共に、複数の吊持部材によって走行部に吊り下げられる昇降部と、複数の吊持部材の巻き取り及び繰り出しを行うことによって走行部に対して昇降部を昇降させる昇降駆動部と、昇降駆動部における前記複数の吊持部材のそれぞれの巻き取り量又は繰り出し量を制御して、昇降部の水平面に対する傾きを調整する制御部と、を備え、制御部は、把持部によって把持される容器の開口部側の高さ位置が容器において相対的に高くなる飛出防止姿勢となるように、昇降部の傾きを調整する。 An overhead transport vehicle according to one aspect of the present invention is an overhead transport vehicle that transports a container having an opening for loading and unloading of articles that opens in one direction, and the container is transported so that the opening direction of the opening faces the horizontal direction. A gripping part for gripping; and a control unit that controls the winding amount or the extension amount of each of the plurality of hanging members in the lifting drive unit, and adjusts the inclination of the lifting unit with respect to the horizontal plane. adjusts the inclination of the lifting section so that the height position of the container gripped by the gripping section on the side of the opening is relatively high in the container to prevent the container from popping out.
 ここでいう「走行部に吊り下げられる」とは、走行部に直接吊り下げられてもよいし、走行部と一体的に移動する他の物体に吊り下げられてもよいことを意味している。この構成の天井搬送車は、把持部によって把持される容器の開口部側の高さ位置が容器において相対的に高くなる飛出防止姿勢、言い換えれば、開口部の開口方向が水平方向に対して斜め上方に傾く飛出防止姿勢となるように、昇降駆動部が制御されることによって昇降部の傾きが調整される。これにより、把持部によって把持される容器の開口部の開口方向が水平方向に向いている場合と比べて、開口部から物品が飛び出す可能性が低減される。すなわち、開口部の前面にストッパを配置することなく、搬送時における開口部からの物品の飛び出しを抑制できる。その結果として、より高速な搬送も可能となる。 Here, “suspended from the running portion” means that the moving portion may be directly suspended or may be suspended from another object that moves integrally with the running portion. . In the ceiling transport vehicle with this configuration, the height position of the opening side of the container gripped by the gripping portion is relatively high in the container, in other words, the opening direction of the opening is in the horizontal direction. The tilt of the lifting section is adjusted by controlling the lifting drive section so that the lifting section is tilted obliquely upward. As a result, the possibility of the article jumping out of the opening of the container gripped by the gripping portion is reduced compared to the case where the opening direction of the opening of the container is horizontal. That is, it is possible to prevent the article from jumping out of the opening during transportation without arranging a stopper in front of the opening. As a result, higher speed transportation is also possible.
 本発明の一側面に係る天井搬送車は、吊持部材が巻き掛けられるプーリと、プーリの位置を移動させる位置変更機構と、を更に備え、制御部は、昇降駆動部と位置変更機構との両方を制御して、把持部によって把持される容器が飛出防止姿勢となるように、昇降部の傾きを調整してもよい。この構成では、昇降駆動部と位置変更機構との両方を制御して、昇降部の傾きを調整するので、昇降部の傾きを調整するにあたり、調整量を大きくすることができ、また細かな調整も可能となる。 The overhead guided vehicle according to one aspect of the present invention further includes a pulley around which the suspension member is wound, and a position change mechanism that moves the position of the pulley, and the control unit controls the movement of the lift drive unit and the position change mechanism. By controlling both, the inclination of the lifting section may be adjusted so that the container gripped by the gripping section assumes the pop-out prevention posture. In this configuration, both the elevation drive section and the position change mechanism are controlled to adjust the inclination of the elevation section. is also possible.
 本発明の一側面に係る天井搬送車は、物品の出し入れを行う開口部が側面に設けられた容器を把持する把持部と、把持部が設けられると共に、複数の吊持部材によって走行部に吊り下げられる昇降部と、複数の吊持部材の巻き取り及び繰り出しを行うことによって走行部に対して昇降部を昇降させる昇降駆動部と、吊持部材が巻き掛けられるプーリと、プーリの位置を移動させる位置変更機構と、位置変更機構を制御して、昇降部の水平面に対する傾きを調整する制御部と、を備え、制御部は、把持部によって把持される容器の開口部側の高さ位置が容器において相対的に高くなる飛出防止姿勢となるように、昇降部の傾きを調整する。 An overhead guided vehicle according to one aspect of the present invention is provided with a gripping portion for gripping a container having an opening for loading and unloading of articles on the side thereof, and a gripping portion, and is suspended from a traveling portion by a plurality of suspension members. A lifting part to be lowered, a lifting drive part for lifting and lowering the lifting part with respect to the traveling part by winding and feeding a plurality of suspension members, a pulley around which the suspension member is wound, and moving the position of the pulley and a control unit that controls the position change mechanism to adjust the inclination of the elevating unit with respect to the horizontal plane. The tilt of the lifting section is adjusted so that the container is in a relatively high pop-out prevention posture.
 この構成の天井搬送車は、把持部によって把持される容器の開口部側の高さ位置が容器において相対的に高くなる飛出防止姿勢、言い換えれば、開口部の開口方向が水平方向に対して斜め上方に傾く飛出防止姿勢となるように、位置変更機構が制御されることによって昇降部の傾きが調整される。これにより、把持部によって把持される容器の開口部の開口方向が水平方向に向いている場合と比べて、開口部から物品が飛び出す可能性が低減される。すなわち、開口部の前面にストッパを配置することなく、搬送時における開口部からの物品の飛び出しを抑制できる。 In the ceiling transport vehicle with this configuration, the height position of the opening side of the container gripped by the gripping portion is relatively high in the container, in other words, the opening direction of the opening is in the horizontal direction. By controlling the position changing mechanism, the tilt of the lifting section is adjusted so that the jump-out prevention posture is tilted obliquely upward. As a result, the possibility of the article jumping out of the opening of the container gripped by the gripping portion is reduced compared to the case where the opening direction of the opening of the container is horizontal. That is, it is possible to prevent the article from jumping out of the opening during transportation without arranging a stopper in front of the opening.
 本発明の一側面に係る天井搬送車では、プーリは、鉛直方向に沿って移動可能に設けられており、位置変更機構は、鉛直方向に沿ってプーリを移動させてもよい。この構成では、簡易な構成で昇降部の傾きを調整することができる。 In the ceiling guided vehicle according to one aspect of the present invention, the pulley is provided movably along the vertical direction, and the position changing mechanism may move the pulley along the vertical direction. With this configuration, the inclination of the lifting section can be adjusted with a simple configuration.
 本発明の一側面に係る天井搬送車では、制御部は、少なくとも走行部が走行中に飛出防止姿勢となるように、昇降部の傾きを調整してもよい。この構成では、走行時(加減速時又はカーブ区間走行時)に、開口部から物品が飛び出す可能性を低減できる。 In the overhead guided vehicle according to one aspect of the present invention, the control unit may adjust the inclination of the elevation unit so that at least the traveling unit assumes the pop-out prevention posture during travel. With this configuration, it is possible to reduce the possibility that an article will jump out of the opening during travel (during acceleration or deceleration or travel on a curve section).
 本発明の一側面に係る天井搬送車では、制御部は、容器を載置部に載置する前の下降動作において、容器の姿勢が飛出防止姿勢から開口部における開口方向が水平方向を向いた通常姿勢に変更するように、昇降部の傾きを調整してもよい。この構成では、水平な載置面を有する載置部に容器を載置するときに容器に加わる衝撃を低減できる。 In the overhead guided vehicle according to one aspect of the present invention, the control unit changes the posture of the container from the pop-out prevention posture to the horizontal direction in the downward movement before placing the container on the placement unit. You may adjust the inclination of an raising/lowering part so that it may change into the normal attitude|position. With this configuration, it is possible to reduce the impact applied to the container when the container is placed on the placement portion having the horizontal placement surface.
 本発明の一側面によれば、開口部の前面にストッパを配置することなく、搬送時における開口部からの物品の飛び出しを抑制できる。 According to one aspect of the present invention, it is possible to prevent articles from jumping out of the opening during transportation without arranging a stopper in front of the opening.
図1は、一実施形態の天井搬送車の側面図である。FIG. 1 is a side view of an overhead transport vehicle of one embodiment. 図2は、保持ユニットを前方から見た正面図である。FIG. 2 is a front view of the holding unit as seen from the front. 図3は、第一緩衝機構及び第二緩衝機構の斜視図である。FIG. 3 is a perspective view of a first cushioning mechanism and a second cushioning mechanism. 図4は、昇降駆動ユニットの正面図である。FIG. 4 is a front view of the lift drive unit. 図5は、昇降駆動ユニットの側面図である。FIG. 5 is a side view of the lift drive unit. 図6は、昇降駆動ユニットの動作を示す正面図である。FIG. 6 is a front view showing the operation of the lift drive unit. 図7は、昇降駆動ユニットの動作を示す側面図である。FIG. 7 is a side view showing the operation of the lift drive unit. 図8(A)は、容器が通常姿勢(水平)となるように把持する保持ユニットを示す正面図であり、図8(B)は、容器が飛び出し防止姿勢となるように把持する保持ユニットを示す正面図である。FIG. 8(A) is a front view showing a holding unit that holds a container in a normal posture (horizontal), and FIG. 8(B) shows a holding unit that holds a container in a pop-out prevention posture. It is a front view showing. 図9は、保持ユニットの下降動作を示す正面図である。FIG. 9 is a front view showing the downward movement of the holding unit.
 以下、図面を参照して、本発明の一側面の好適な一実施形態について詳細に説明する。なお、図面の説明において、同一要素には同一符号を付し、重複する説明を省略する。 A preferred embodiment of one aspect of the present invention will be described in detail below with reference to the drawings. In the description of the drawings, the same elements are denoted by the same reference numerals, and overlapping descriptions are omitted.
 図1に示されるように、一実施形態の天井搬送車1は、半導体デバイスが製造されるクリーンルームの天井付近に敷設された軌道20に沿って走行する。一実施形態の天井搬送車1は、複数の半導体ウェハ等の物品A(図8(A)及び図8(B)参照)が収容された容器200の搬送、及び、半導体ウェハ等に各種処理を施す処理装置に設けられたロードポート(載置部)300等に対する容器200の移載を行う。 As shown in FIG. 1, the ceiling transport vehicle 1 of one embodiment travels along a track 20 laid near the ceiling of a clean room where semiconductor devices are manufactured. The overhead transport vehicle 1 of one embodiment transports a container 200 containing a plurality of articles A such as semiconductor wafers (see FIGS. 8A and 8B) and performs various processes on the semiconductor wafers. The container 200 is transferred to a load port (placement section) 300 or the like provided in the processing apparatus to be processed.
 本実施形態において搬送される容器200は、図9に示されるように、一方向に開口する開口部200aを有している。開口部200aは、容器200をロードポート300等の水平な載置面に載置したときに水平方向に直交する面を構成する側面200bの一部に形成されている。つまり、容器200がロードポート300等の水平な載置面に載置されると、開口部200aは水平方向に開口する。 The container 200 that is transported in this embodiment has an opening 200a that opens in one direction, as shown in FIG. The opening 200a is formed in a part of a side surface 200b that forms a plane orthogonal to the horizontal direction when the container 200 is placed on a horizontal placement surface such as the load port 300. As shown in FIG. That is, when the container 200 is placed on a horizontal placement surface such as the load port 300, the opening 200a opens horizontally.
 図1に示されるように、天井搬送車1は、フレームユニット(走行部)2と、走行ユニット(走行部)3と、ラテラルユニット4と、シータユニット5と、昇降駆動ユニット6と、保持ユニット(昇降部)7と、搬送車コントローラ(制御部)8と、を備えている。フレームユニット2は、センターフレーム15と、フロントフレーム16と、リアフレーム17と、を有している。フロントフレーム16は、センターフレーム15における前側(天井搬送車1の走行方向における前側)の端部から下側に延在している。リアフレーム17は、センターフレーム15における後側(天井搬送車1の走行方向における後側)の端部から下側に延在している。 As shown in FIG. 1, the overhead transport vehicle 1 includes a frame unit (running section) 2, a running unit (running section) 3, a lateral unit 4, a sheeter unit 5, an elevation drive unit 6, and a holding unit. (elevating unit) 7 and a transport vehicle controller (control unit) 8 are provided. The frame unit 2 has a center frame 15 , a front frame 16 and a rear frame 17 . The front frame 16 extends downward from the front end of the center frame 15 (the front side in the running direction of the overhead transport vehicle 1). The rear frame 17 extends downward from the rear end of the center frame 15 (the rear side in the running direction of the overhead transport vehicle 1).
 走行ユニット3は、センターフレーム15の上側に配置されている。走行ユニット3は、例えば、軌道20に沿って敷設された高周波電流線から非接触で電力の供給を受けることで、軌道20に沿って走行する。ラテラルユニット4は、センターフレーム15の下側に配置されている。ラテラルユニット4は、シータユニット5、昇降駆動ユニット6及び保持ユニット7を横方向(天井搬送車1の走行方向における側方)に移動させる。シータユニット5は、ラテラルユニット4の下側に配置されている。シータユニット5は、昇降駆動ユニット6及び保持ユニット7を水平面内において回動させる。 The traveling unit 3 is arranged above the center frame 15 . The traveling unit 3 travels along the track 20 by being supplied with electric power in a non-contact manner from, for example, a high-frequency current line laid along the track 20 . The lateral unit 4 is arranged below the center frame 15 . The lateral unit 4 moves the sheeter unit 5, the lifting drive unit 6, and the holding unit 7 in the lateral direction (sideways in the traveling direction of the overhead transport vehicle 1). The theta unit 5 is arranged below the lateral unit 4 . The sheeter unit 5 rotates the elevation drive unit 6 and the holding unit 7 in the horizontal plane.
 昇降駆動ユニット6は、シータユニット5の下側に配置されている。昇降駆動ユニット6は、複数のベルトBによって保持ユニット7を吊り下げている。昇降駆動ユニット6は、複数のベルトBの巻き取り及び繰り出しを行うことによって走行ユニット3と一体的に移動する昇降駆動ユニット6に対して保持ユニット7を昇降させる。保持ユニット7は、昇降駆動ユニット6の下側に配置されている。保持ユニット7は、容器200のフランジ201を保持する。 The elevation drive unit 6 is arranged below the sheeter unit 5 . The lifting drive unit 6 suspends the holding unit 7 with a plurality of belts B. As shown in FIG. The lifting drive unit 6 lifts and lowers the holding unit 7 with respect to the lifting drive unit 6 which moves integrally with the traveling unit 3 by winding and unwinding the plurality of belts B. As shown in FIG. The holding unit 7 is arranged below the elevation drive unit 6 . The holding unit 7 holds the flange 201 of the container 200 .
 次に、保持ユニット7の構成について詳細に説明する。図1及び図2に示されるように、保持ユニット7は、ベース11と、一対のグリッパ(把持部)12,12と、筐体13を有している。一対のグリッパ12,12は、水平方向に沿って開閉可能となるようにベース11によって支持されている。一対のグリッパ12,12は、駆動モータ(図示省略)及びリンク機構(図示省略)によって開閉させられる。 Next, the configuration of the holding unit 7 will be described in detail. As shown in FIGS. 1 and 2 , the holding unit 7 has a base 11 , a pair of grippers (holding portions) 12 and 12 and a housing 13 . A pair of grippers 12, 12 are supported by the base 11 so that they can be opened and closed along the horizontal direction. The pair of grippers 12, 12 are opened and closed by a drive motor (not shown) and a link mechanism (not shown).
 本実施形態では、一対のグリッパ12,12が開状態のときに、グリッパ12の保持面がフランジ201の下面の高さより下方となるように、保持ユニット7の高さ位置が調整される。そして、この状態で一対のグリッパ12,12が閉状態となることで、グリッパ12の保持面がフランジ201の下面の下方へ進出し、この状態で保持ユニット7を上昇させることにより、一対のグリッパ12,12によってフランジ201が保持(把持)され、容器200が支持される。図8(A)に示されるように、一対のグリッパ12,12は、保持ユニット7が水平面に対して傾きが無い状態において、開口部200aが水平方向を向くように(容器200の底部200cが水平を維持した姿勢で)容器200を保持することができる。 In this embodiment, the height position of the holding unit 7 is adjusted so that the holding surface of the gripper 12 is below the height of the lower surface of the flange 201 when the pair of grippers 12, 12 are in the open state. By closing the pair of grippers 12, 12 in this state, the holding surface of the gripper 12 advances below the lower surface of the flange 201, and by lifting the holding unit 7 in this state, the pair of grippers is closed. The flange 201 is held (gripped) by 12, 12 and the container 200 is supported. As shown in FIG. 8(A), the pair of grippers 12, 12 are arranged so that the opening 200a faces the horizontal direction (the bottom 200c of the container 200 faces the horizontal direction when the holding unit 7 is not tilted with respect to the horizontal plane). The container 200 can be held (in a horizontal position).
 図3に示されるように、本実施形態の保持ユニット7には、第一緩衝機構50及び第二緩衝機構40を介してベルトBの一端が接続される。ここで、第一緩衝機構50及び第二緩衝機構40について詳細に説明を行う。第一緩衝機構50及び第二緩衝機構40は、ベルトBと保持ユニット7(図1参照)とを連結する機構であり、走行ユニット3が走行するとき又は保持ユニット7が昇降するときの振動が容器200に伝わることを抑制する機構である。 As shown in FIG. 3, one end of the belt B is connected to the holding unit 7 of this embodiment via the first buffer mechanism 50 and the second buffer mechanism 40 . Here, the first damping mechanism 50 and the second damping mechanism 40 will be described in detail. The first damping mechanism 50 and the second damping mechanism 40 are mechanisms that connect the belt B and the holding unit 7 (see FIG. 1). It is a mechanism for suppressing transmission to the container 200 .
 第一緩衝機構50は、鉛直方向下方からベース11を鉛直方向に移動可能に支持する弾性部材58を有し、鉛直方向から見た平面視において天井搬送車1の走行方向に直交する幅方向の一方に配置される。本実施形態では、第一緩衝機構50は、左右方向において保持ユニット7の右側に設けられている。第一緩衝機構50は、接続部材51と、揺動部材53と、第一本体部材54と、第二本体部材56と、一対の弾性部材58,58と、を有している。なお、本実施形態における左右方向とは、天井搬送車1を走行方向前方から見たときの左右方向を意味する。 The first cushioning mechanism 50 has an elastic member 58 that supports the base 11 vertically from below so as to be vertically movable. placed on one side. In this embodiment, the first buffer mechanism 50 is provided on the right side of the holding unit 7 in the left-right direction. The first buffer mechanism 50 has a connection member 51, a swing member 53, a first body member 54, a second body member 56, and a pair of elastic members 58,58. The left-right direction in this embodiment means the left-right direction when the ceiling guided vehicle 1 is viewed from the front in the traveling direction.
 接続部材51は、ベルトBに取り付けられる部材である。揺動部材53は、接続部材51に連結される部材である。揺動部材53は、ピン部材52を介して接続部材51に双方向に回転可能に連結される。第一本体部材54は、略L字状の部材であり、その底部は、平坦となるように形成されている。第一本体部材54は、揺動部材53に接続されている。第一本体部材54は、底部が第二本体部材56にボルト等によって接続されている。第二本体部材56は、弾性部材58を下方から支持すると共に、第一本体部材54の底部を支持する。 The connection member 51 is a member attached to the belt B. The swinging member 53 is a member connected to the connecting member 51 . The swinging member 53 is connected to the connecting member 51 via the pin member 52 so as to be bidirectionally rotatable. The first body member 54 is a substantially L-shaped member, and the bottom portion thereof is formed to be flat. The first body member 54 is connected to the swing member 53 . The bottom of the first body member 54 is connected to the second body member 56 by bolts or the like. The second body member 56 supports the elastic member 58 from below and the bottom of the first body member 54 .
 一対の弾性部材58,58は、所定のバネ定数を有するコイルバネである。一対の弾性部材58,58は、第二本体部材56に支持されると共にベース11を下方から支持する。弾性部材58の下端は、第二本体部材56に固定されている。弾性部材58の上端は、ベース11には固定されておらず、接触することによってベース11を支持する。すなわち、一対の弾性部材58,58のそれぞれは、第二本体部材56とベース11との両方に接触した状態で縮んだ状態にあるとき、第二本体部材56とベース11とを互いに遠ざける方向に付勢する。弾性部材58は、互いに接触する部材間に伝わる振動を低減する役割を有する。なお、弾性部材58は、ベース11に固定され、第二本体部材56に離接可能に設けられてもよい。 The pair of elastic members 58, 58 are coil springs having a predetermined spring constant. A pair of elastic members 58, 58 are supported by the second body member 56 and support the base 11 from below. A lower end of the elastic member 58 is fixed to the second body member 56 . The upper end of the elastic member 58 is not fixed to the base 11 and supports the base 11 by making contact. That is, when each of the pair of elastic members 58 and 58 is in a contracted state in contact with both the second body member 56 and the base 11, each of the elastic members 58 and 58 moves away from the second body member 56 and the base 11 from each other. energize. The elastic member 58 has a role of reducing vibration transmitted between members in contact with each other. In addition, the elastic member 58 may be fixed to the base 11 and provided to the second main body member 56 so as to be separable and contactable.
 第二緩衝機構40は、鉛直方向下方からベース11を鉛直方向に移動可能に支持する弾性部材48を有し、鉛直方向から見た平面視において天井搬送車1の走行方向に直交する幅方向の他方(幅方向において第一緩衝機構50とは反対側)に配置される。本実施形態では、第二緩衝機構40は、左右方向において保持ユニット7の左側に設けられている。第二緩衝機構40は、接続部材41,41と、揺動部材43と、第三本体部材45と、第四本体部材46と、規制部材47と、一対の弾性部材48,48と、を有している。 The second cushioning mechanism 40 has an elastic member 48 that supports the base 11 vertically from below so as to be vertically movable. It is arranged on the other side (the side opposite to the first buffer mechanism 50 in the width direction). In this embodiment, the second buffer mechanism 40 is provided on the left side of the holding unit 7 in the left-right direction. The second buffer mechanism 40 has connection members 41, 41, a swing member 43, a third body member 45, a fourth body member 46, a regulation member 47, and a pair of elastic members 48, 48. are doing.
 接続部材41,41は、ベルトB,Bが取り付けられる部材である。揺動部材43は、一対の接続部材41,41と、第三本体部材45とを連結する部材である。一対の接続部材41,41と揺動部材43とは、双方向に回転可能に連結され、一対のピン部材42,42を介して連結される。揺動部材43と第三本体部材45とは、双方向に回転可能に連結され、ピン部材44を介して連結されている。第四本体部材46は、弾性部材48,48を下方から支持する。 The connecting members 41, 41 are members to which the belts B, B are attached. The swinging member 43 is a member that connects the pair of connection members 41 and 41 and the third main body member 45 . The pair of connecting members 41 and 41 and the swinging member 43 are bidirectionally rotatably connected and connected via a pair of pin members 42 and 42 . The rocking member 43 and the third main body member 45 are rotatably connected in both directions and connected via a pin member 44 . The fourth body member 46 supports the elastic members 48, 48 from below.
 一対の弾性部材48,48は、所定のバネ定数を有するコイルバネである。一対の弾性部材48,48は、第四本体部材46に支持されていると共にベース11を下方から支持する。弾性部材48の下端は、第四本体部材46に固定されている。規制部材47は、第四本体部材46に対してベース11が所定距離以上離れることを規制する。より詳細には、規制部材47は、第四本体部材46に対して所定距離以上離れようとするベース11の上面を係止する。弾性部材48の上端は、ベース11には固定されておらず、接触することによってベース11を支持する。すなわち、一対の弾性部材48,48のそれぞれは、第四本体部材46とベース11との両方に接触した状態にあるとき、第四本体部材46及びベース11を互いに遠ざける方向に付勢する。弾性部材48は、互いに接触する部材間に伝わる振動を低減する役割を有する。なお、弾性部材48は、ベース11に固定され、第四本体部材46に離接可能に設けられてもよい。 The pair of elastic members 48, 48 are coil springs having a predetermined spring constant. A pair of elastic members 48, 48 are supported by the fourth body member 46 and support the base 11 from below. A lower end of the elastic member 48 is fixed to the fourth body member 46 . The restricting member 47 restricts the base 11 from being separated from the fourth body member 46 by a predetermined distance or more. More specifically, the restricting member 47 locks the upper surface of the base 11 that is about to leave the fourth body member 46 by a predetermined distance or more. The upper end of the elastic member 48 is not fixed to the base 11 and supports the base 11 by making contact. That is, each of the pair of elastic members 48 , 48 urges the fourth body member 46 and the base 11 away from each other when in contact with both the fourth body member 46 and the base 11 . The elastic member 48 has a role of reducing vibration transmitted between members in contact with each other. In addition, the elastic member 48 may be fixed to the base 11 and provided to the fourth main body member 46 so as to be separable and contactable.
 なお、図示はしないが、保持ユニット7は、第一緩衝機構50と第二緩衝機構40とを連結すると共に、鉛直方向における第一緩衝機構50とベース11との間の距離と、鉛直方向における第二緩衝機構40とベース11との間の距離とを互いに近づけるように動作するリンク機構を備えていてもよい。 Although not shown, the holding unit 7 connects the first damping mechanism 50 and the second damping mechanism 40, and the distance between the first damping mechanism 50 and the base 11 in the vertical direction. A link mechanism may be provided that operates to reduce the distance between the second buffer mechanism 40 and the base 11 .
 次に、昇降駆動ユニット6の構成について詳細に説明する。図4及び図5に示されるように、昇降駆動ユニット6は、ベース61と、支持部62と、四つ(複数)の巻取ドラム63と、駆動モータ(昇降駆動部)63Aと、第一アイドラプーリ65Aと、第二アイドラプーリ(プーリ)65Bと、第三アイドラプーリ64と、直動機構(位置変更機構)67と、四本(複数)のベルトBと、を有している。 Next, the configuration of the elevation drive unit 6 will be described in detail. As shown in FIGS. 4 and 5, the elevation drive unit 6 includes a base 61, a support section 62, four (plural) winding drums 63, a drive motor (elevation drive section) 63A, and a first It has an idler pulley 65A, a second idler pulley (pulley) 65B, a third idler pulley 64, a direct acting mechanism (position changing mechanism) 67, and four (plural) belts B.
 ベース61は、支持部62を介して巻取ドラム63、第一アイドラプーリ65A及び第三アイドラプーリ64を支持している。支持部62は、四つの巻取ドラム63を回転可能に支持する。四つの巻取ドラム63は、前後方向に配列されており、駆動モータ63Aによる駆動によって四本のベルトBのそれぞれを巻き取り又は繰り出しする。駆動モータ63Aによる駆動は、搬送車コントローラ(制御部)8によって制御される。 The base 61 supports the winding drum 63, the first idler pulley 65A and the third idler pulley 64 via the supporting portion 62. The support portion 62 rotatably supports the four winding drums 63 . The four winding drums 63 are arranged in the front-rear direction, and are driven by drive motors 63A to wind or unwind the four belts B, respectively. The drive by the drive motor 63A is controlled by a transport vehicle controller (control section) 8. FIG.
 各巻取ドラム63は、支持部62を介してベース61に回転自在に取り付けられている。駆動モータ63Aは、各巻取ドラム63を回転させるための駆動源であり、ベース61に固定されている。四つの巻取ドラム63は、図示しない共通の回動軸に取り付けられることにより、あるいは図示しない連動機構で連結されることにより、一の駆動モータ63Aによって駆動される。 Each winding drum 63 is rotatably attached to the base 61 via the support portion 62 . The drive motor 63A is a drive source for rotating each winding drum 63 and is fixed to the base 61 . The four winding drums 63 are driven by one drive motor 63A by being attached to a common rotating shaft (not shown) or linked by an interlocking mechanism (not shown).
 各ベルトBの一端は保持ユニット7に接続されており、各ベルトBの他端は各巻取ドラム63に接続されている。本実施形態では、四本のベルトBは、保持ユニット7の三点を吊り下げるように設けられている。より詳細には、保持ユニット7は、四本のベルトBによって吊り下げられており、四本のうち二本のベルトBは、保持ユニット7に対して揺動可能に設けられた一つの揺動部材43(図3参照)に接続部材41を介して接続されており、四本のうち残りの二本のベルトのそれぞれは、保持ユニット7に対して揺動可能に設けられた二つの揺動部材53のそれぞれに接続部材51を介して接続されている。 One end of each belt B is connected to the holding unit 7 and the other end of each belt B is connected to each winding drum 63 . In this embodiment, the four belts B are provided so as to suspend the holding unit 7 at three points. More specifically, the holding unit 7 is suspended by four belts B, and two of the four belts B are provided to swing with respect to the holding unit 7. Each of the remaining two of the four belts is connected to a member 43 (see FIG. 3) via a connecting member 41, and each of the two belts is provided to swing with respect to the holding unit 7. It is connected to each of the members 53 via the connection member 51 .
 第一アイドラプーリ65A及び第二アイドラプーリ65Bは、第一緩衝機構50に接続されるベルトBが巻き掛けられ、ベルトBの移動を案内する。第一緩衝機構50に接続されるベルトBは二本あり、第一アイドラプーリ65A及び第二アイドラプーリ65Bは、それぞれのベルトBに対応して設けられる。第一アイドラプーリ65Aは支持部62に設けられており、ベース61に対して相対的に移動しない。第二アイドラプーリ65Bは、ベース61に対して相対的に移動可能に設けられている。第三アイドラプーリ64は、第二緩衝機構40に接続されるベルトBが巻き掛けられ、ベルトBの移動を案内する。第二緩衝機構40に接続されるベルトBは二本あり、第三アイドラプーリ64は、それぞれのベルトBに対応して設けられる。 The belt B connected to the first buffer mechanism 50 is wound around the first idler pulley 65A and the second idler pulley 65B to guide the movement of the belt B. There are two belts B connected to the first buffer mechanism 50, and the first idler pulley 65A and the second idler pulley 65B are provided corresponding to each belt B. As shown in FIG. The first idler pulley 65A is provided on the support portion 62 and does not move relative to the base 61 . The second idler pulley 65B is provided movably relative to the base 61 . The belt B connected to the second buffer mechanism 40 is wound around the third idler pulley 64 and guides the movement of the belt B. As shown in FIG. There are two belts B connected to the second buffer mechanism 40, and the third idler pulley 64 is provided corresponding to each belt B. As shown in FIG.
 直動機構67は、主に、駆動モータ67Aと、ネジ軸67Bと、ボールナット67Cと、を有しており、駆動モータ67Aの回転運動を直線運動に変換する機構である。直動機構67は、ブラケット66を介してベース61に固定されている。駆動モータ67Aの駆動により、ネジ軸67Bに沿って移動するボールナット67Cには、第二アイドラプーリ65Bを支持するプーリ支持部68が取り付けられている。プーリ支持部68には、平面視おいてブラケット66を貫通可能な貫通孔68Aが設けられている。プーリ支持部68を貫通するブラケット66と貫通孔68Aとの間には、リニアガイド69が設けられている。 The linear motion mechanism 67 mainly has a drive motor 67A, a screw shaft 67B, and a ball nut 67C, and is a mechanism that converts rotary motion of the drive motor 67A into linear motion. The direct acting mechanism 67 is fixed to the base 61 via a bracket 66 . A pulley support portion 68 that supports the second idler pulley 65B is attached to the ball nut 67C that moves along the screw shaft 67B by driving the drive motor 67A. The pulley support portion 68 is provided with a through hole 68A through which the bracket 66 can be passed in plan view. A linear guide 69 is provided between the bracket 66 passing through the pulley support portion 68 and the through hole 68A.
 リニアガイド69は、案内レール69Aと、案内レール69Aに沿って摺動可能なブロック部69Bとを主に有している。貫通孔68Aには、ブラケット66に対向する第一対向面が形成されている。また、ブラケット66には、第一対向面に対向する第二対向面が形成されている。第一対向面及び第二対向面の一方に案内レール69Aが配置され、第一対向面及び第二対向面の他方に、ブロック部69Bが設けられている。第二アイドラプーリ65Bは、リニアガイド69によってスムーズかつ安定的に鉛直方向に移動する。 The linear guide 69 mainly has a guide rail 69A and a block portion 69B that can slide along the guide rail 69A. A first opposing surface facing the bracket 66 is formed in the through hole 68A. Also, the bracket 66 is formed with a second opposing surface that faces the first opposing surface. A guide rail 69A is arranged on one of the first opposing surface and the second opposing surface, and a block portion 69B is provided on the other of the first opposing surface and the second opposing surface. The second idler pulley 65B is moved vertically by the linear guide 69 smoothly and stably.
 本実施形態では、ネジ軸67Bに沿ってボールナット67Cが移動することによりプーリ支持部68が移動し、当該プーリ支持部68の移動に伴い第二アイドラプーリ65Bがベース61に対して相対的に移動する。より詳細には、鉛直方向に延在するネジ軸67Bに沿ってボールナット67C及びプーリ支持部68が鉛直方向に移動することによって、第二アイドラプーリ65Bが鉛直方向に沿って移動する。このように、直動機構67は、ベルトBの保持ユニット7(第一緩衝機構50)への接続部分(ベルトBの一端)が昇降方向に移動するように、第二アイドラプーリ65Bの位置を移動させる。そして、このように第二アイドラプーリ65Bを鉛直方向(昇降方向)に移動させることによって、保持ユニット7の水平面に対する傾きを調整することができる。 In this embodiment, the movement of the ball nut 67C along the screw shaft 67B causes the pulley support portion 68 to move. Moving. More specifically, the ball nut 67C and the pulley support portion 68 move vertically along the vertically extending screw shaft 67B, thereby moving the second idler pulley 65B vertically. In this manner, the linear motion mechanism 67 positions the second idler pulley 65B so that the connecting portion (one end of the belt B) of the belt B to the holding unit 7 (first buffer mechanism 50) moves in the vertical direction. move. By moving the second idler pulley 65B in the vertical direction (lifting direction) in this manner, the inclination of the holding unit 7 with respect to the horizontal plane can be adjusted.
 例えば、図6及び図7に示されるように、両方の直動機構67を作動させて、第二アイドラプーリ65Bを下方に(ベース61に遠ざけるように)移動させれば、保持ユニット7の左側を上方に傾けることができる。これに伴い、図8(B)に示されるように、一対のグリッパ12,12によって把持される容器200の開口部200a側の高さ位置が容器200において相対的に高くなる飛出防止姿勢となる。すなわち、保持ユニット7は、一対のグリッパ12,12によって把持される容器200が飛出防止姿勢となるように、水平面に対する傾きが調整される。容器200における飛出防止姿勢とは、開口部200aの開口方向が水平面に対して斜め上方に所定角度α(例えば2°~30°)傾いた姿勢をいう。 For example, as shown in FIGS. 6 and 7, by operating both linear motion mechanisms 67 to move the second idler pulley 65B downward (away from the base 61), the left side of the holding unit 7 can be tilted upwards. Along with this, as shown in FIG. 8B, the jump-out preventing posture in which the height position of the opening 200a side of the container 200 gripped by the pair of grippers 12 is relatively high in the container 200. Become. That is, the inclination of the holding unit 7 with respect to the horizontal plane is adjusted so that the container 200 gripped by the pair of grippers 12, 12 is in the pop-out prevention posture. The pop-out prevention posture of the container 200 refers to a posture in which the opening direction of the opening 200a is inclined upward by a predetermined angle α (for example, 2° to 30°) with respect to the horizontal plane.
 搬送車コントローラ8は、センターフレーム15に配置されている。搬送車コントローラ8は、CPU(Central Processing Unit)、ROM(Read only memory)及びRAM(Random access memory)等によって構成された電子制御ユニットである。搬送車コントローラ8は、天井搬送車1の各部を制御する。本実施形態の搬送車コントローラ8は、直動機構67を制御して、保持ユニット7の水平面に対する傾きを調整する。より詳細には、搬送車コントローラ8は、グリッパ12,12によって把持される容器200が飛出防止姿勢(図8(B)参照)となるように、直動機構67を制御して、保持ユニット7の水平面に対する傾きを調整する。 The transport vehicle controller 8 is arranged on the center frame 15 . The transport vehicle controller 8 is an electronic control unit composed of a CPU (Central Processing Unit), a ROM (Read only memory), a RAM (Random access memory), and the like. The transport vehicle controller 8 controls each part of the overhead transport vehicle 1 . The transport vehicle controller 8 of this embodiment controls the linear motion mechanism 67 to adjust the inclination of the holding unit 7 with respect to the horizontal plane. More specifically, the transport vehicle controller 8 controls the direct-acting mechanism 67 so that the container 200 gripped by the grippers 12, 12 assumes the pop-out prevention posture (see FIG. 8B), and the holding unit Adjust the tilt of 7 with respect to the horizontal plane.
 搬送車コントローラ8は、少なくとも走行ユニット3が走行中に飛出防止姿勢となるように、保持ユニット7の傾きを調整する。本実施形態では、搬送車コントローラ8は、走行ユニット3が走行中だけでなく、容器200を下降させる動作時及び容器200を上昇させる動作時にも、飛出防止姿勢となるように、保持ユニット7の傾きを調整する。詳細には、搬送車コントローラ8は、容器200をロードポート300に載置する前の下降動作において、容器200の姿勢が飛出防止姿勢から開口部200aにおける開口方向が水平方向を向いた通常姿勢に変更するように、保持ユニット7の傾きを調整する。また、搬送車コントローラ8は、ロードポート300に載置された容器200を把持した後の上昇動作において、容器200の姿勢が通常姿勢から飛出防止姿勢に変更するように、保持ユニット7の傾きを調整する。 The transport vehicle controller 8 adjusts the inclination of the holding unit 7 so that at least the traveling unit 3 is in the pop-out prevention posture while traveling. In this embodiment, the transport vehicle controller 8 controls the holding unit 7 so as to assume the pop-out preventing posture not only when the traveling unit 3 is traveling, but also when the container 200 is lowered and when the container 200 is raised. adjust the tilt of the Specifically, in the lowering operation before placing the container 200 on the load port 300, the transport vehicle controller 8 changes the posture of the container 200 from the pop-out preventing posture to the normal posture in which the opening direction of the opening 200a is oriented horizontally. The inclination of the holding unit 7 is adjusted so as to change to . Further, the transport vehicle controller 8 tilts the holding unit 7 so that the attitude of the container 200 changes from the normal attitude to the pop-out prevention attitude in the rising operation after gripping the container 200 placed on the load port 300 . to adjust.
 上記実施形態の天井搬送車1における作用効果について説明する。上記実施形態の天井搬送車1では、一対のグリッパ12,12によって把持される容器200の開口部200a側の高さ位置が容器200において相対的に高くなる飛出防止姿勢となるように、直動機構67が制御されることによって保持ユニット7の傾きが調整される。これにより、保持ユニット7によって把持される容器200の開口部200aの開口方向が水平方向に向いている場合(通常姿勢)と比べて、開口部200aから物品Aが飛び出す可能性が低減される。すなわち、開口部200aの前面にストッパを配置することなく、搬送時における開口部200aからの物品Aの飛び出しを抑制できる。 The effects of the overhead guided vehicle 1 of the above embodiment will be described. In the overhead transport vehicle 1 of the above-described embodiment, the container 200 gripped by the pair of grippers 12, 12 has a height position on the side of the opening 200a of the container 200 that is relatively high in the jump-out prevention posture. The inclination of the holding unit 7 is adjusted by controlling the movement mechanism 67 . As a result, compared to the case where the opening direction of the opening 200a of the container 200 held by the holding unit 7 is oriented horizontally (normal posture), the possibility of the article A jumping out of the opening 200a is reduced. That is, it is possible to prevent the article A from jumping out of the opening 200a during transportation without arranging a stopper in front of the opening 200a.
 上記実施形態の天井搬送車1では、第二アイドラプーリ65Bは、鉛直方向に沿って移動可能に設けられており、直動機構67は、鉛直方向に沿って第二アイドラプーリ65Bを移動可能に構成している。これにより、簡易な構成で保持ユニット7の傾きの調整を可能としている。 In the ceiling guided vehicle 1 of the above embodiment, the second idler pulley 65B is provided movably along the vertical direction, and the linear motion mechanism 67 makes the second idler pulley 65B movable along the vertical direction. Configure. This makes it possible to adjust the tilt of the holding unit 7 with a simple configuration.
 上記実施形態の天井搬送車1では、開口部200a側を容器200において相対的に高くするために、開口部200a側と反対側を相対的に低くする制御、すなわち直動機構67を制御して、第一緩衝機構50との接続部分であるベルトBの一端を下降させている。なお、開口部200a側を容器200において相対的に高くするためには、駆動モータ63Aを制御してベルトBを繰り出し、開口部200a側と反対側を相対的に低くしつつ、直動機構67を制御して開口部200a側相対的に高くしてもよい。この場合には、容器200の高さ位置の変動を小さくできる。 In the ceiling transport vehicle 1 of the above-described embodiment, in order to make the opening 200a side relatively high in the container 200, control is performed to relatively lower the side opposite to the opening 200a side, that is, the linear motion mechanism 67 is controlled. , one end of the belt B, which is the connecting portion with the first buffer mechanism 50, is lowered. In addition, in order to make the opening 200a relatively higher in the container 200, the drive motor 63A is controlled to let out the belt B so that the side opposite to the opening 200a is relatively lowered, and the linear motion mechanism 67 is moved. may be controlled to be relatively high on the side of the opening 200a. In this case, variations in the height position of the container 200 can be reduced.
 上記実施形態の天井搬送車1では、搬送車コントローラ8は、走行ユニット3が走行中に飛出防止姿勢となるように、保持ユニット7の傾きを調整している。これにより、天井搬送車1が加減速時又はカーブ区間走行時に、開口部200aから物品Aが飛び出す可能性を低減できる。 In the ceiling transport vehicle 1 of the above embodiment, the transport vehicle controller 8 adjusts the inclination of the holding unit 7 so that the traveling unit 3 assumes the pop-out prevention posture while traveling. This can reduce the possibility that the article A will jump out of the opening 200a when the overhead transport vehicle 1 accelerates or decelerates or travels in a curve section.
 上記実施形態の天井搬送車1では、容器200をロードポート300に載置する前の下降動作において、容器200の姿勢が飛出防止姿勢から通常姿勢に変更するように、保持ユニット7の傾きを調整している。これにより、水平な載置面を有するロードポート300に容器200を載置するときに容器200に加わる衝撃を低減できる。 In the ceiling guided vehicle 1 of the above embodiment, the inclination of the holding unit 7 is adjusted so that the posture of the container 200 changes from the pop-out prevention posture to the normal posture during the downward movement before placing the container 200 on the load port 300. adjusting. This reduces the impact applied to the container 200 when the container 200 is placed on the load port 300 having a horizontal placement surface.
 以上、一実施形態について説明したが、本発明の一側面は、上記実施形態に限られない。発明の一側面の趣旨を逸脱しない範囲で種々の変更が可能である。 Although one embodiment has been described above, one aspect of the present invention is not limited to the above embodiment. Various modifications are possible without departing from the gist of one aspect of the invention.
(変形例1)
 上記実施形態では、容器200の姿勢を飛出防止姿勢にするにあたり、直動機構67を制御することによって保持ユニット7の傾きを調整する例を挙げて説明したが、これに限定されない。例えば、容器200の姿勢を飛出防止姿勢にするにあたり、保持ユニット7を吊り下げる四つのベルトBの巻き取り量又は繰り出し量を制御することによって保持ユニット7の傾きを調整してもよい。この場合、上記実施形態のように四つの巻取ドラム63の回転が一つの駆動モータ63Aによって駆動される構成ではなく、例えば、四つの巻取ドラム63のそれぞれが対応する駆動モータ63Aによって回転される構成としてもよい。あるいは、保持ユニット7の左側(第二緩衝機構40)に接続されるベルトBに巻き掛けられる二つの巻取ドラム63と保持ユニット7の右側(第一緩衝機構50)に接続されるベルトBに巻き掛けられる二つの巻取ドラム63とがそれぞれ独立して駆動される構成としてもよい。
(Modification 1)
In the above-described embodiment, an example in which the inclination of the holding unit 7 is adjusted by controlling the direct-acting mechanism 67 when the posture of the container 200 is changed to the pop-out prevention posture has been described, but the present invention is not limited to this. For example, when setting the posture of the container 200 to the pop-out prevention posture, the inclination of the holding unit 7 may be adjusted by controlling the amount of winding or feeding out of the four belts B suspending the holding unit 7 . In this case, unlike the configuration in which the rotation of the four winding drums 63 is driven by one drive motor 63A as in the above embodiment, for example, each of the four winding drums 63 is rotated by the corresponding drive motor 63A. It may be configured to be Alternatively, the two winding drums 63 wound around the belt B connected to the left side of the holding unit 7 (second buffer mechanism 40) and the belt B connected to the right side of the holding unit 7 (first buffer mechanism 50) The two winding drums 63 to be wrapped around may be configured to be driven independently.
 このような変形例1に係る構成の天井搬送車1では、容器200の姿勢を飛出防止姿勢にするにあたり、駆動モータ63Aを制御して、保持ユニット7の右側(第一緩衝機構50)に接続されるベルトBが巻き掛けられた巻取ドラム63を繰り出し方向に回転させてもよい。あるいは、保持ユニット7の左側(第二緩衝機構40)に接続されるベルトBが巻き掛けられた巻取ドラム63を巻き取り方向に回転させてもよい。また、保持ユニット7の右側(第一緩衝機構50)に接続されるベルトBが巻き掛けられた巻取ドラム63を繰り出し方向に回転させると共に、保持ユニット7の左側(第二緩衝機構40)に接続されるベルトBが巻き掛けられた巻取ドラム63を巻き取り方向に回転させてもよい。 In the ceiling transport vehicle 1 having the configuration according to Modification 1, in order to change the posture of the container 200 to the pop-out prevention posture, the drive motor 63A is controlled to move the container 200 to the right side of the holding unit 7 (first buffer mechanism 50). The winding drum 63 around which the connected belt B is wound may be rotated in the feeding direction. Alternatively, the winding drum 63 around which the belt B connected to the left side of the holding unit 7 (the second buffer mechanism 40) is wound may be rotated in the winding direction. Further, the winding drum 63 around which the belt B is wound, which is connected to the right side of the holding unit 7 (first buffer mechanism 50), is rotated in the unwinding direction, and the left side of the holding unit 7 (second buffer mechanism 40) is rotated. The winding drum 63 around which the connected belt B is wound may be rotated in the winding direction.
(変形例2)
 容器200の姿勢を飛出防止姿勢にするにあたり、上記実施形態では、直動機構67を制御することによって保持ユニット7の傾きを調整し、また、上記変形例1では、駆動モータ63Aを制御することによって保持ユニット7の傾きを調整する例を挙げて説明したが、直動機構67と駆動モータ63Aとの両方を制御して、保持ユニット7の傾きを調整してもよい。
(Modification 2)
In order to change the posture of the container 200 to the pop-out prevention posture, in the above-described embodiment, the inclination of the holding unit 7 is adjusted by controlling the linear motion mechanism 67, and in the above-described modified example 1, the drive motor 63A is controlled. Although an example of adjusting the inclination of the holding unit 7 is described above, the inclination of the holding unit 7 may be adjusted by controlling both the linear motion mechanism 67 and the drive motor 63A.
(その他の変形例)
 上記実施形態及び変形例の一部では、ベルトBの一端を昇降方向に移動させるために第二アイドラプーリ65Bの位置を移動させるための位置変更機構として直動機構67を採用した例を挙げて説明したが、これに代えて、同様の機能を有するカム機構又は揺動機構を採用してもよい。
(Other modifications)
In some of the above-described embodiments and modifications, an example is given in which the linear motion mechanism 67 is employed as a position changing mechanism for moving the position of the second idler pulley 65B in order to move one end of the belt B in the vertical direction. Although described, a cam mechanism or an oscillating mechanism having similar functions may be employed instead.
 上記実施形態の天井搬送車1では、第二アイドラプーリ65Bの位置を鉛直方向に移動させることにより、ベルトBの一端を昇降方向に移動させる例を挙げて説明したが、例えば、水平方向に移動させる等、鉛直方向以外に第二アイドラプーリ65Bを移動させることによって、ベルトBの一端を昇降方向に移動させる構成としてもよい。 In the overhead transport vehicle 1 of the above embodiment, an example has been described in which one end of the belt B is moved in the vertical direction by moving the position of the second idler pulley 65B in the vertical direction. By moving the second idler pulley 65B in a direction other than the vertical direction, the one end of the belt B may be moved in the vertical direction.
 上記実施形態及び変形例の保持ユニット7は、第一緩衝機構50及び第二緩衝機構40を介してベルトBの一端と接続されている例を挙げて説明したが、保持ユニット7に直接接続されてもよい。また、四本のベルトBが、そのまま直接保持ユニット7に接続されてもよい。また、三本のベルトBによって保持ユニット7に接続されてもよい。 Although the holding unit 7 of the above-described embodiment and modifications has been described as being connected to one end of the belt B via the first buffer mechanism 50 and the second buffer mechanism 40, it is directly connected to the holding unit 7. may Alternatively, the four belts B may be directly connected to the holding unit 7 as they are. Also, it may be connected to the holding unit 7 by three belts B. FIG.
 上記実施形態及び変形例では、容器200の開口部200aが左側を向くように把持される例を上げて説明したが、右側を向くように把持されてもよい。この場合であっても、上述したような、直動機構67の制御、駆動モータ63Aの制御を適宜組み合わせれば、容器200を飛出防止姿勢とすることができる。 In the above embodiment and modified example, an example in which the container 200 is gripped so that the opening 200a of the container 200 faces left has been described, but the container 200 may be gripped so that it faces right. Even in this case, the container 200 can be brought into the pop-out prevention posture by appropriately combining the control of the linear motion mechanism 67 and the control of the drive motor 63A as described above.
 本発明の一側面の技術主題は以下のとおりに記載され得る。
[1]
 物品の出し入れを行う開口部が一方向に開口する容器を搬送する天井搬送車であって、
 前記開口部の開口方向が水平方向に向くように前記容器を把持する把持部と、
 前記把持部が設けられると共に、複数の吊持部材によって走行部に吊り下げられる昇降部と、
 前記複数の吊持部材のそれぞれを巻き取り及び繰り出しを行うことによって前記走行部に対して前記昇降部を昇降させる昇降駆動部と、
 前記昇降駆動部における前記複数の吊持部材のそれぞれの巻き取り量又は繰り出し量を制御して、前記昇降部の水平面に対する傾きを調整する制御部と、を備え、
 前記制御部は、前記把持部によって把持される前記容器の前記開口部側の高さ位置が前記容器において相対的に高くなる飛出防止姿勢となるように、前記昇降部の前記傾きを調整する、天井搬送車。
[2]
 前記吊持部材が巻き掛けられるプーリと、
 前記プーリの位置を移動させる位置変更機構と、を更に備え、
 前記制御部は、前記昇降駆動部と前記位置変更機構との両方を制御して、前記把持部によって把持される前記容器が前記飛出防止姿勢となるように、前記昇降部の前記傾きを調整する、[1]に記載の天井搬送車。
[3]
 物品の出し入れを行う開口部が側面に設けられた容器を把持する把持部と、
 前記把持部が設けられると共に、複数の吊持部材によって走行部に吊り下げられる昇降部と、
 前記複数の吊持部材の巻き取り及び繰り出しを行うことによって前記走行部に対して前記昇降部を昇降させる昇降駆動部と、
 前記吊持部材が巻き掛けられるプーリと、
 前記プーリの位置を移動させる位置変更機構と、
 前記位置変更機構を制御して、前記昇降部の水平面に対する傾きを調整する制御部と、を備え、
 前記制御部は、前記把持部によって把持される前記容器の前記開口部側の高さ位置が前記容器において相対的に高くなる飛出防止姿勢となるように、前記昇降部の前記傾きを調整する、天井搬送車。
[4]
 前記プーリは、鉛直方向に沿って移動可能に設けられており、
 前記位置変更機構は、鉛直方向に沿って前記プーリを移動させる、[2]又は[3]に記載の天井搬送車。
[5]
 前記制御部は、少なくとも前記走行部が走行中に前記飛出防止姿勢となるように、前記昇降部の傾きを調整する、[1]~[4]の何れかに記載の天井搬送車。
[6]
 前記制御部は、前記容器を載置部に載置する前の下降動作において、前記容器の姿勢が前記飛出防止姿勢から前記開口部における開口方向が水平方向を向いた通常姿勢に変更するように、前記昇降部の傾きを調整する[1]~[5]の何れかに記載の天井搬送車。
The technical subject matter of one aspect of the present invention can be described as follows.
[1]
An overhead transport vehicle for transporting a container having an opening for loading and unloading of articles that opens in one direction,
a gripping part that grips the container so that the opening direction of the opening is horizontal;
an elevating unit provided with the gripping unit and suspended from the traveling unit by a plurality of suspension members;
an elevation drive unit that raises and lowers the elevation unit with respect to the traveling unit by winding and feeding each of the plurality of hanging members;
a control unit that controls the winding amount or the extension amount of each of the plurality of hanging members in the lifting drive unit to adjust the inclination of the lifting unit with respect to the horizontal plane;
The control unit adjusts the inclination of the elevating unit so that a height position of the opening side of the container gripped by the gripping unit is in a pop-out prevention posture in which the container is relatively high. , overhead carrier.
[2]
a pulley around which the suspension member is wound;
further comprising a position changing mechanism for moving the position of the pulley,
The control unit controls both the elevation driving unit and the position changing mechanism, and adjusts the inclination of the elevation unit so that the container gripped by the gripping unit assumes the pop-out prevention posture. The overhead transport vehicle according to [1].
[3]
a gripping portion for gripping a container having an opening on the side for taking in and out articles;
an elevating unit provided with the gripping unit and suspended from the traveling unit by a plurality of suspension members;
an elevation driving unit that raises and lowers the elevation unit with respect to the traveling unit by winding and unwinding the plurality of hanging members;
a pulley around which the suspension member is wound;
a position changing mechanism for moving the position of the pulley;
A control unit that controls the position changing mechanism to adjust the inclination of the lifting unit with respect to the horizontal plane,
The control unit adjusts the inclination of the elevating unit so that a height position of the opening side of the container gripped by the gripping unit is in a pop-out prevention posture in which the container is relatively high. , overhead carrier.
[4]
The pulley is provided movably along the vertical direction,
The overhead guided vehicle according to [2] or [3], wherein the position changing mechanism moves the pulley along the vertical direction.
[5]
The overhead guided vehicle according to any one of [1] to [4], wherein the control unit adjusts the inclination of the lifting unit so that at least the traveling unit assumes the pop-out prevention posture during traveling.
[6]
The controller changes the posture of the container from the pop-out preventing posture to a normal posture in which the opening direction of the opening faces the horizontal direction in the lowering operation before placing the container on the placing portion. (2) the overhead transport vehicle according to any one of [1] to [5], wherein the inclination of the lifting section is adjusted;
 1…天井搬送車、3…走行ユニット(走行部)、6…昇降駆動ユニット、7…保持ユニット(昇降部)、8…搬送車コントローラ(制御部)、12…グリッパ(把持部)、40…第二緩衝機構、50…第一緩衝機構、63…巻取ドラム、63A…駆動モータ(昇降駆動部)、65B…第二アイドラプーリ(プーリ)、67…直動機構(位置変更機構)、200…容器、200a…開口部、200b…側面、200c…底部、300…ロードポート(載置部)、A…物品、B…ベルト。 DESCRIPTION OF SYMBOLS 1... Ceiling carrier, 3... Traveling unit (traveling part), 6... Elevating drive unit, 7... Holding unit (elevating part), 8... Transport vehicle controller (control part), 12... Gripper (gripping part), 40... Second cushioning mechanism 50 First cushioning mechanism 63 Winding drum 63A Drive motor (elevating drive unit) 65B Second idler pulley (pulley) 67 Linear motion mechanism (position changing mechanism) 200 Container 200a Opening 200b Side 200c Bottom 300 Load port (placement part) A Article B Belt

Claims (6)

  1.  物品の出し入れを行う開口部が一方向に開口する容器を搬送する天井搬送車であって、
     前記開口部の開口方向が水平方向に向くように前記容器を把持する把持部と、
     前記把持部が設けられると共に、複数の吊持部材によって走行部に吊り下げられる昇降部と、
     前記複数の吊持部材を巻き取り及び繰り出しを行うことによって前記走行部に対して前記昇降部を昇降させる昇降駆動部と、
     前記昇降駆動部における前記複数の吊持部材のそれぞれの巻き取り量又は繰り出し量を制御して、前記昇降部の水平面に対する傾きを調整する制御部と、を備え、
     前記制御部は、前記把持部によって把持される前記容器の前記開口部側の高さ位置が前記容器において相対的に高くなる飛出防止姿勢となるように、前記昇降部の前記傾きを調整する、天井搬送車。
    An overhead transport vehicle for transporting a container having an opening for loading and unloading of articles that opens in one direction,
    a gripping part that grips the container so that the opening direction of the opening is horizontal;
    an elevating unit provided with the gripping unit and suspended from the traveling unit by a plurality of suspension members;
    an elevation drive unit that raises and lowers the elevation unit with respect to the traveling unit by winding and feeding the plurality of suspension members;
    a control unit that controls the winding amount or the extension amount of each of the plurality of hanging members in the lifting drive unit to adjust the inclination of the lifting unit with respect to the horizontal plane;
    The control unit adjusts the inclination of the elevating unit so that a height position of the opening side of the container gripped by the gripping unit is in a pop-out prevention posture in which the container is relatively high. , overhead carrier.
  2.  前記吊持部材が巻き掛けられるプーリと、
     前記プーリの位置を移動させる位置変更機構と、を更に備え、
     前記制御部は、前記昇降駆動部と前記位置変更機構との両方を制御して、前記把持部によって把持される前記容器が前記飛出防止姿勢となるように、前記昇降部の前記傾きを調整する、請求項1記載の天井搬送車。
    a pulley around which the suspension member is wound;
    further comprising a position changing mechanism for moving the position of the pulley,
    The control unit controls both the elevation driving unit and the position changing mechanism, and adjusts the inclination of the elevation unit so that the container gripped by the gripping unit assumes the pop-out prevention posture. 2. The overhead transport vehicle according to claim 1.
  3.  物品の出し入れを行う開口部が側面に設けられた容器を把持する把持部と、
     前記把持部が設けられると共に、複数の吊持部材によって走行部に吊り下げられる昇降部と、
     前記複数の吊持部材の巻き取り及び繰り出しを行うことによって前記走行部に対して前記昇降部を昇降させる昇降駆動部と、
     前記吊持部材が巻き掛けられるプーリと、
     前記プーリの位置を移動させる位置変更機構と、
     前記位置変更機構を制御して、前記昇降部の水平面に対する傾きを調整する制御部と、を備え、
     前記制御部は、前記把持部によって把持される前記容器の前記開口部側の高さ位置が前記容器において相対的に高くなる飛出防止姿勢となるように、前記昇降部の前記傾きを調整する、天井搬送車。
    a gripping portion for gripping a container having an opening on the side for taking in and out articles;
    an elevating unit provided with the gripping unit and suspended from the traveling unit by a plurality of suspension members;
    an elevation driving unit that raises and lowers the elevation unit with respect to the traveling unit by winding and unwinding the plurality of hanging members;
    a pulley around which the suspension member is wound;
    a position changing mechanism for moving the position of the pulley;
    A control unit that controls the position changing mechanism to adjust the inclination of the lifting unit with respect to the horizontal plane,
    The control unit adjusts the inclination of the elevating unit so that a height position of the opening side of the container gripped by the gripping unit is in a pop-out prevention posture in which the container is relatively high. , overhead carrier.
  4.  前記プーリは、鉛直方向に沿って移動可能に設けられており、
     前記位置変更機構は、鉛直方向に沿って前記プーリを移動させる、請求項2又は3記載の天井搬送車。
    The pulley is provided movably along the vertical direction,
    4. The overhead transport vehicle according to claim 2, wherein said position changing mechanism moves said pulley along a vertical direction.
  5.  前記制御部は、少なくとも前記走行部が走行中に前記飛出防止姿勢となるように、前記昇降部の傾きを調整する、請求項1又は3記載の天井搬送車。 The overhead guided vehicle according to claim 1 or 3, wherein the control unit adjusts the inclination of the lifting unit so that at least the traveling unit assumes the jump-out prevention posture during travel.
  6.  前記制御部は、前記容器を載置部に載置する前の下降動作において、前記容器の姿勢が前記飛出防止姿勢から前記開口部における開口方向が水平方向を向いた通常姿勢に変更するように、前記昇降部の傾きを調整する、請求項1又は3記載の天井搬送車。 The controller changes the posture of the container from the pop-out preventing posture to a normal posture in which the opening direction of the opening faces the horizontal direction in the lowering operation before placing the container on the placing portion. 4. The overhead transport vehicle according to claim 1 or 3, wherein the inclination of said lifting section is adjusted.
PCT/JP2022/036970 2021-11-05 2022-10-03 Overhead conveying vehicle WO2023079882A1 (en)

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08188375A (en) * 1995-01-04 1996-07-23 Tsubakimoto Chain Co Tilting mechanism of cassette for work conveying
JPH08288360A (en) * 1995-04-12 1996-11-01 Sony Corp Wet substrate processing device, cassette, and wet substrate processing method
JP2001068522A (en) * 1999-08-27 2001-03-16 Hitachi Kokusai Electric Inc Substrate processor
JP2007314331A (en) * 2006-05-29 2007-12-06 Murata Mach Ltd Hoist and overhead traveling vehicle using the same
WO2018179369A1 (en) * 2017-03-31 2018-10-04 平田機工株式会社 Conveying device
WO2021100297A1 (en) * 2019-11-20 2021-05-27 村田機械株式会社 Ceiling carrier

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08188375A (en) * 1995-01-04 1996-07-23 Tsubakimoto Chain Co Tilting mechanism of cassette for work conveying
JPH08288360A (en) * 1995-04-12 1996-11-01 Sony Corp Wet substrate processing device, cassette, and wet substrate processing method
JP2001068522A (en) * 1999-08-27 2001-03-16 Hitachi Kokusai Electric Inc Substrate processor
JP2007314331A (en) * 2006-05-29 2007-12-06 Murata Mach Ltd Hoist and overhead traveling vehicle using the same
WO2018179369A1 (en) * 2017-03-31 2018-10-04 平田機工株式会社 Conveying device
WO2021100297A1 (en) * 2019-11-20 2021-05-27 村田機械株式会社 Ceiling carrier

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