KR20010053279A - 터보 분자 펌프 - Google Patents

터보 분자 펌프 Download PDF

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Publication number
KR20010053279A
KR20010053279A KR1020007014987A KR20007014987A KR20010053279A KR 20010053279 A KR20010053279 A KR 20010053279A KR 1020007014987 A KR1020007014987 A KR 1020007014987A KR 20007014987 A KR20007014987 A KR 20007014987A KR 20010053279 A KR20010053279 A KR 20010053279A
Authority
KR
South Korea
Prior art keywords
vane
exhaust
pump
radial
screw groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
KR1020007014987A
Other languages
English (en)
Korean (ko)
Inventor
가와사키히로유키
Original Assignee
마에다 시게루
가부시키 가이샤 에바라 세이사꾸쇼
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 마에다 시게루, 가부시키 가이샤 에바라 세이사꾸쇼 filed Critical 마에다 시게루
Publication of KR20010053279A publication Critical patent/KR20010053279A/ko
Ceased legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/046—Combinations of two or more different types of pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/02—Selection of particular materials
    • F04D29/023—Selection of particular materials especially adapted for elastic fluid pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F04D29/544—Blade shapes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/10—Metals, alloys or intermetallic compounds
    • F05D2300/13—Refractory metals, i.e. Ti, V, Cr, Zr, Nb, Mo, Hf, Ta, W
    • F05D2300/133—Titanium
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/10—Metals, alloys or intermetallic compounds
    • F05D2300/17—Alloys
    • F05D2300/174—Titanium alloys, e.g. TiAl
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/20—Oxide or non-oxide ceramics
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/50—Intrinsic material properties or characteristics
    • F05D2300/516—Surface roughness
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
KR1020007014987A 1998-06-30 1999-06-30 터보 분자 펌프 Ceased KR20010053279A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP10-199668 1998-06-30
JP19966898 1998-06-30
PCT/JP1999/003524 WO2000000746A1 (en) 1998-06-30 1999-06-30 Turbo-molecular pump

Publications (1)

Publication Number Publication Date
KR20010053279A true KR20010053279A (ko) 2001-06-25

Family

ID=16411645

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020007014987A Ceased KR20010053279A (ko) 1998-06-30 1999-06-30 터보 분자 펌프

Country Status (6)

Country Link
US (1) US6409468B1 (https=)
EP (1) EP2140144A1 (https=)
JP (1) JP4086470B2 (https=)
KR (1) KR20010053279A (https=)
TW (1) TW504548B (https=)
WO (1) WO2000000746A1 (https=)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3777498B2 (ja) 2000-06-23 2006-05-24 株式会社荏原製作所 ターボ分子ポンプ
DE10046506A1 (de) * 2000-09-20 2002-03-28 Leybold Vakuum Gmbh Turbomolekularvakuumpumpe mit Rotorschaufelreihen und Statorschaufelreihen
US6503050B2 (en) * 2000-12-18 2003-01-07 Applied Materials Inc. Turbo-molecular pump having enhanced pumping capacity
JP2004263635A (ja) * 2003-03-03 2004-09-24 Tadahiro Omi 真空装置および真空ポンプ
JP2005042709A (ja) * 2003-07-10 2005-02-17 Ebara Corp 真空ポンプ
US7628577B2 (en) * 2006-08-31 2009-12-08 Varian, S.P.A. Vacuum pumps with improved pumping channel configurations
US8070419B2 (en) * 2008-12-24 2011-12-06 Agilent Technologies, Inc. Spiral pumping stage and vacuum pump incorporating such pumping stage
GB2498816A (en) 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
JP6228839B2 (ja) * 2013-12-26 2017-11-08 エドワーズ株式会社 真空排気機構、複合型真空ポンプ、および回転体部品
JP6586275B2 (ja) * 2015-01-30 2019-10-02 エドワーズ株式会社 真空ポンプ
JP6390478B2 (ja) * 2015-03-18 2018-09-19 株式会社島津製作所 真空ポンプ
CN105275834B (zh) * 2015-10-27 2018-05-11 上海华鼓鼓风机有限公司 一种低速多级垂直剖分筒型结构的三元流离心鼓风机
JP7357564B2 (ja) * 2020-02-07 2023-10-06 エドワーズ株式会社 真空ポンプ、及び、真空ポンプ構成部品

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3969039A (en) * 1974-08-01 1976-07-13 American Optical Corporation Vacuum pump
DE2654055B2 (de) * 1976-11-29 1979-11-08 Kernforschungsanlage Juelich Gmbh, 5170 Juelich Rotor- und Statorscheibe für Turbomolekularpumpe
JPS60139098U (ja) * 1984-02-24 1985-09-13 セイコ−精機株式会社 組合せ型軸流分子ポンプ
US4732529A (en) * 1984-02-29 1988-03-22 Shimadzu Corporation Turbomolecular pump
USRE33129E (en) * 1985-04-26 1989-12-12 Hitachi, Ltd. Vacuum pump
JPS6385290A (ja) * 1986-09-29 1988-04-15 Hitachi Ltd 真空ポンプ
JPS6385292A (ja) * 1986-09-29 1988-04-15 Hitachi Ltd 真空ポンプ
DE3922782A1 (de) * 1988-07-12 1990-02-08 Beijing Lab Of Vacuum Physics Molekularpumpe in kombinierter bauart
DE3885899D1 (de) * 1988-10-10 1994-01-05 Leybold Ag Pumpenstufe für eine Hochvakuumpumpe.
IT1241431B (it) 1990-03-09 1994-01-17 Varian Spa Pompa turbomolecolare perfezionata.
DE4314418A1 (de) * 1993-05-03 1994-11-10 Leybold Ag Reibungsvakuumpumpe mit unterschiedlich gestalteten Pumpenabschnitten
DE4410656A1 (de) * 1994-03-26 1995-09-28 Balzers Pfeiffer Gmbh Reibungspumpe
JP3510007B2 (ja) * 1995-06-13 2004-03-22 日本原子力研究所 分子ポンプ
JPH0914184A (ja) * 1995-06-28 1997-01-14 Daikin Ind Ltd ターボ分子ポンプ
JP3160504B2 (ja) * 1995-09-05 2001-04-25 三菱重工業株式会社 ターボ分子ポンプ
IT1281025B1 (it) * 1995-11-10 1998-02-11 Varian Spa Pompa turbomolecolare.

Also Published As

Publication number Publication date
EP2140144A1 (en) 2010-01-06
US6409468B1 (en) 2002-06-25
TW504548B (en) 2002-10-01
JP2002519575A (ja) 2002-07-02
WO2000000746A1 (en) 2000-01-06
JP4086470B2 (ja) 2008-05-14

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