KR20010036738A - A vacuum gauge - Google Patents

A vacuum gauge Download PDF

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Publication number
KR20010036738A
KR20010036738A KR1019990043864A KR19990043864A KR20010036738A KR 20010036738 A KR20010036738 A KR 20010036738A KR 1019990043864 A KR1019990043864 A KR 1019990043864A KR 19990043864 A KR19990043864 A KR 19990043864A KR 20010036738 A KR20010036738 A KR 20010036738A
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South Korea
Prior art keywords
gauge
measuring
measuring member
pressure
vacuum
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KR1019990043864A
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Korean (ko)
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윤용조
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윤종용
삼성전자 주식회사
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Priority to KR1019990043864A priority Critical patent/KR20010036738A/en
Publication of KR20010036738A publication Critical patent/KR20010036738A/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L21/00—Vacuum gauges
    • G01L21/30—Vacuum gauges by making use of ionisation effects
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R19/00—Arrangements for measuring currents or voltages or for indicating presence or sign thereof
    • G01R19/0092—Arrangements for measuring currents or voltages or for indicating presence or sign thereof measuring current only
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

PURPOSE: A vacuum gauge is provided to reduce the number of controllers by combining two gauges into a single gauge and to reduce an installation space of the gauge. CONSTITUTION: A vacuum gauge includes a first measuring member(12) for measuring a low vacuum state, a second measuring member(20) for measuring a high vacuum state, and a base(30) for mounting the first and second measuring members. The first measuring member is a converter gauge, which measures a thermal conductivity between a heated wire and the surroundings of the heated wire and detects pressure. The second measuring member is an ion gauge, which ionizes molecules inside gas, collects the ions, measures the electric current and detects the pressure.

Description

진공 게이지{A VACUUM GAUGE}Vacuum gauge {A VACUUM GAUGE}

본 발명은 진공 게이지에 관한 것으로, 보다 상세하게는 단일의 게이지에서 고진공과 저진공을 측정할 수 있도록 한 혼합 게이지에 관한 것이다.The present invention relates to a vacuum gauge, and more particularly, to a mixing gauge that enables the measurement of high and low vacuum in a single gauge.

반도체 제조 설비에는 용량, 속도, 진동, 온도, 압력, 열량, 길이등 양의 크기나 물리적 상태를 양적(수치)으로 포착하여 지시 또는 기록 표시하는 계기들이 설치된다.Semiconductor manufacturing facilities are equipped with instruments that capture, dictate, or record the quantity or physical state of quantities, such as capacity, speed, vibration, temperature, pressure, calorie, and length, in quantities.

이중 액체 또는 기체의 압력, 또는 중력에 의하여 생기는 압력을 측정하는 계기로써, 측정 가능한 압력 범위에 따라 고진공 게이지와 저진공 게이지로 나누어진다. 일반적으로 고진공 게이지로는 1m Torr에서 10-9Torr 까지의 압력을 측정할 수 있으며, 저진공으로는 760Torr에서 1m Torr까지의 압력을 측정할 수 있다.This instrument measures the pressure of double liquid or gas or the pressure caused by gravity. It is divided into high vacuum gauge and low vacuum gauge according to the measurable pressure range. In general, high vacuum gauges can measure pressures from 1m Torr to 10 -9 Torr, and low vacuum gauges from 760 Torr to 1m Torr.

이와 같이, 종래에는 공정이 진행되는 챔버에는 생산 품질과 안전을 위해 챔버내의 압력을 측정하기 위한 고진공 게이지와 저진공 게이지가 각각 따로 설치되었다. 그러다 보니, 저진공 게이지와 고진공 게이지를 따로 설치하기 위한 공간확보 및 작업의 비효율성 등의 문제점이 있다.As described above, in the conventional chamber, a high vacuum gauge and a low vacuum gauge for measuring the pressure in the chamber are separately installed in the chamber in which the process is performed. Therefore, there is a problem such as securing the space for installing the low vacuum gauge and the high vacuum gauge separately and inefficiency of the work.

본 발명은 이와 같은 종래의 문제점을 해결하기 위한 것으로, 그 목적은 단일의 게이지에서 고진공과 저진공을 동시에 측정할 수 있도록 한 새로운 형태의 혼합 게이지를 제공하는데 있다.The present invention is to solve such a conventional problem, an object of the present invention is to provide a new type of mixing gauge to be able to measure high and low vacuum at the same time in a single gauge.

도 1은 본 발명의 실시예에 따른 혼합 게이지를 개략적으로 보여주는 도면;1 shows schematically a mixing gauge according to an embodiment of the invention;

도 2는 본 발명의 실시예에 따른 혼합 게이지가 공정챔버에 설치된 것을 나타내는 부분 단면도이다.2 is a partial cross-sectional view showing that the mixing gauge is installed in the process chamber according to an embodiment of the present invention.

* 도면의 주요 부분에 대한 부호의 설명 *Explanation of symbols on the main parts of the drawings

12 : 제 1 측정부재 14 : 핫 필라민트12: first measuring member 14: hot filament

16 : 온도 보상기 20 : 제 2 측정부재16 temperature compensator 20 second measuring member

22 : 히터 플라민트 24 : 그릿22 heater flamin 24 grit

26 : 이온 콜렉터 30 : 베이스26 ion collector 30 base

상술한 목적을 달성하기 위한 본 발명의 특징에 의하면, 압력을 측정하기 위한 혼합 게이지는 저진공을 측정하는 제 1 측정부재와; 고진공을 측정하는 제 2 측정부재 및; 상기 제 1 측정부재와 제 2 측정부재가 설치되는 베이스를 포함한다.According to a feature of the present invention for achieving the above object, the mixing gauge for measuring the pressure and the first measuring member for measuring the low vacuum; A second measuring member for measuring high vacuum; And a base on which the first and second measuring members are installed.

이와 같은 장치에서 상기 제 1 측정부재는 가열된 선과 그 주변 사이의 열 전도율을 측정하여 압력을 감지하는 컨버터 게이지이고, 상기 제 2 측정부재는 가스내 분자들을 이온화시키고 그 이온들을 모아서 결과적인 전류를 측정하여 압력을 감지하는 이온 게이지로 이루어진다.In such a device, the first measuring member is a converter gauge that senses pressure by measuring the thermal conductivity between the heated line and its surroundings, and the second measuring member ionizes the molecules in the gas and collects the ions to obtain the resulting current. It consists of an ion gauge that measures the pressure.

이하, 본 발명의 실시예에 따른 혼합 게이지를 첨부된 도면 도 1 및 도 2에 의거하여 상세히 설명하며, 동일한 기능을 수행하는 구성요소에 대해서는 동일한 참조번호를 병기한다.Hereinafter, the mixing gauge according to an embodiment of the present invention will be described in detail with reference to the accompanying drawings, FIGS. 1 and 2, and the same reference numerals will be given for the components performing the same function.

도 1은 본 발명의 실시예에 따른 혼합 게이지를 개략적으로 보여주는 도면이고, 도 2는 본 발명에 따른 게이지가 공정챔버에 설치된 것을 보여주는 도면이다.1 is a view schematically showing a mixing gauge according to an embodiment of the present invention, Figure 2 is a view showing that the gauge according to the present invention is installed in the process chamber.

도 1 및 도 2를 참조하면, 본 발명에 따른 혼합 게이지(10)는 저진공을 측정할 수 있는 제 1 측정부재(12)와, 고진공을 측정할 수 있는 제 2 측정부재(20) 그리고 이들 측정부재들이 고정되어 설치되는 베이스(30)로 이루어진다.1 and 2, the mixing gauge 10 according to the present invention includes a first measuring member 12 capable of measuring low vacuum, a second measuring member 20 capable of measuring high vacuum, and these The measuring member is composed of a base 30 is fixed.

상기 제 1 측정부재(12)는 가열된 선과 그 주변 사이의 열 전도율을 측정하여 압력을 감지하는 컨버터(convector) 게이지로, 그 구성을 살펴보면, 측정할 진공에 노출되는 핫 필라민트(hot filament;14)와 게이지 내부에 있는 또 하나의 온도에 민감한 부분으로 브리지 회로에 연결되어서 브리지 온도가 정확한 측정을 위해 균형 잡히도록 하는 온도 보상기(temperature compensator;16)로 이루어진다. 상기 컨버터 게이지로는 760Torr에서 1m Torr까지의 압력을 측정할 수 있다.The first measuring member 12 is a converter (convector) gauge that senses the pressure by measuring the thermal conductivity between the heated line and its surroundings. Looking at its configuration, a hot filament exposed to a vacuum to be measured; 14) and another temperature-sensitive part inside the gauge, which is connected to the bridge circuit and consists of a temperature compensator (16) which allows the bridge temperature to be balanced for accurate measurements. The converter gauge may measure a pressure from 760 Torr to 1 m Torr.

한편, 상기 제 2 측정부재(20)는 가스내의 분자들을 이온화시키고 그 이온들을 모아서 결과적인 전류를 측정하여 압력을 감지하는 이온 게이지로, 그 구성을 살펴보면, 자유 전자들을 제어되어진 일정한 비율로 방출하여 낮은 압력에서 이온화가 진행되어지게 하는 히터 필라민트(heater filament;22)와, 가열된 필라민트(22)에서 방출되는 전자들을 끌어당기는 나선형의 양극인 그릿(grid;24)과, 생성된 모든 이온들을 끌어들이는 세 번째 전극인 이온 콜렉터(ion collector;26)로 이루어진다. 상기 이온 게이지로는 1m Torr에서 10-9Torr까지의 압력을 측정할 수 있다.On the other hand, the second measuring member 20 is an ion gauge that ionizes molecules in the gas, collects the ions, and measures the resulting current to sense the pressure. Heater filament (22), which allows ionization to proceed at low pressure, grid (24), a spiral anode that attracts electrons emitted from heated filament (22), and all generated ions It consists of an ion collector (ion collector) 26, the third electrode that attracts them. The ion gauge can measure a pressure from 1m Torr to 10 -9 Torr.

여기서 본 발명의 구조적인 특징은 고진공 게이지와 저진공 게이지를 하나의 혼합 게이지로 묶어 제작되는데 있다.The structural feature of the present invention is that the high vacuum gauge and the low vacuum gauge is produced by combining a single gauge.

이와 같은 구성을 갖는 고진공과 저진공을 측정하는 혼합 게이지(10)는 측정하고자 하는 공정챔버(40)에 설치되어, 그 공정 챔버내의 압력을 저진공에서부터 고진공까지 측정이 가능하게 된다.Mixing gauge 10 for measuring the high and low vacuum having such a configuration is installed in the process chamber 40 to be measured, it is possible to measure the pressure in the process chamber from low to high vacuum.

이와 같이 본 발명의 혼합 게이지를 하나만 설치하면 공정 챔버(40)내의 고진공과 저진공을 각각 측정할 수 있다. 따라서, 기존에 저진공 게이지와 고진공 게이지를 각각 설치하였던 것에 비하여 그 설치공간을 줄일 수 있다. 뿐만 아니라, 각각의 콘트롤러를 하나의 콘트롤러로 줄일 수 있고, 작업자는 하나의 혼합 계측기에서 고진공과 저진공을 점거할 수 있는 것이다.As such, if only one mixing gauge of the present invention is installed, the high vacuum and the low vacuum in the process chamber 40 can be measured. Therefore, the installation space can be reduced compared to the conventional low vacuum gauge and high vacuum gauge respectively installed. In addition, each controller can be reduced to one controller, and the operator can occupy high and low vacuum in a single mixing instrument.

이상에서, 본 발명에 따른 혼합 게이지의 구성 및 작용을 상기한 설명 및 도면에 따라 도시하였지만 이는 예를 들어 설명한 것에 불과하며 본 발명의 기술적 사상을 벗어나지 않는 범위 내에서 다양한 변화 및 변경이 가능함은 물론이다.In the above, the configuration and operation of the mixing gauge according to the present invention is shown in accordance with the above description and drawings, but this is only an example, and various changes and modifications are possible without departing from the spirit of the present invention. to be.

이와 같은 본 발명을 적용하면, 두 개의 게이지를 하나의 혼합 게이지로 묶어 제작해 사용함으로서 각각의 컨트롤러를 하나의 콘트롤러로 줄일 수 있고, 설비 제작시 게이지 설치공간을 효율적으로 사용할 수 있는 이점이 있다.Applying the present invention as described above, by combining the two gauges into one mixing gauge to use each controller can be reduced to a single controller, there is an advantage that can be used efficiently in the installation space of the gauge when manufacturing equipment.

Claims (2)

압력을 측정하기 위한 게이지에 있어서:In the gauge for measuring pressure: 저진공을 측정하는 제 1 측정부재와;A first measuring member for measuring low vacuum; 고진공을 측정하는 제 2 측정부재 및;A second measuring member for measuring high vacuum; 상기 제 1 측정부재와 제 2 측정부재가 설치되는 베이스를 포함하는 저진공과 고진공을 동시에 측정할 수 있는 혼합 게이지.A mixing gauge capable of simultaneously measuring a low vacuum and a high vacuum including a base on which the first measuring member and the second measuring member are installed. 제 1 항에 있어서,The method of claim 1, 상기 제 1 측정부재는 가열된 선과 그 주변 사이의 열 전도율을 측정하여 압력을 감지하는 컨버터 게이지이고,The first measuring member is a converter gauge for sensing the pressure by measuring the thermal conductivity between the heated line and its surroundings, 상기 제 2 측정부재는 가스내 분자들을 이온화시키고 그 이온들을 모아서 결과적인 전류를 측정하여 압력을 감지하는 이온 게이지로 이루어지는 것을 특징으로 하는 혼합 게이지.And the second measuring member comprises an ion gauge ionizing molecules in the gas and collecting the ions to measure the resulting current to sense pressure.
KR1019990043864A 1999-10-11 1999-10-11 A vacuum gauge KR20010036738A (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100447800B1 (en) * 2002-12-05 2004-09-08 주식회사 브이엠티 Cold Cathode Ionization Gauge
KR20170129919A (en) * 2015-03-23 2017-11-27 가부시키가이샤 알박 Triode-type ionization vacuum system

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100447800B1 (en) * 2002-12-05 2004-09-08 주식회사 브이엠티 Cold Cathode Ionization Gauge
KR20170129919A (en) * 2015-03-23 2017-11-27 가부시키가이샤 알박 Triode-type ionization vacuum system

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