JPH10332518A - Characteristic measuring instrument for pressure sensor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide the instrument which suppresses the generation of mechanical stress and can measure characteristics with high precision. SOLUTION: This instrument is a characteristic measuring instrument for measuring pressure characteristics of a pressure sensor and equipped with a pressure applying jig 2 which has a hollow part 21 inside and also has pressure intake holes 22 connected to the hollow part 21 and having pressure intake pipes 17 inserted and a cylindrical or columnar socket 4 which has grooves 42 formed in the peripheral surface and projection tape electrode parts 43 formed at specific places in the grooves 42 and is pivoted rotatably on a rotary shaft 41. A pressure intake pipe 17 is inserted into a pressure intake hole 22 of the pressure applying jig 2 and the socket 4 is rotated on the rotary shaft 41 to press an electrode part 43 into contact with an external terminal 18; and pressure is admitted to a pressure sensor main body 1 from the hollow part 21 of the pressure applying jig 2 through the pressure intake pipe 17 and an electric signal generated corresponding to the flexure of a diaphragm generated with the admitted pressure is led out of the external terminal 18 through the electrode part 43.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a characteristic measuring device for measuring a pressure characteristic of a pressure sensor.

[0002]

2. Description of the Related Art A pressure sensor chip having a diaphragm structure utilizes a piezo effect, and as shown in FIG. 5, a piezo resistor 12, a field oxide film 13, An electrode wiring 15 for extracting an electrode from the silicon nitride film 14 and the piezoresistor 12 is formed.
A diaphragm 16 is formed. Then, these are covered with a cover to form a pressure sensor main body. A pressure sensor is composed of the pressure sensor main body and an external terminal connected to a pressure introducing pipe and electrode wiring 15 described later. Reference numeral 19 denotes an electrode pad that is in ohmic connection with the electrode wiring 15. The principle of operation of this pressure sensor is that when the diaphragm 16 bends under pressure, a stress corresponding to the amount of deflection is generated in the piezoresistor 12. The resistance value of the piezoresistor 12 changes according to this stress, and this is detected as a change in an electric signal.

[0003] The characteristics of this pressure sensor are that it uses silicon, so that it is smaller and more sensitive than the conventional Bourdon tube type, and it has good reproducibility and high reliability. can give.

[0004] Measuring equipment for measuring the pressure characteristics of such a pressure sensor generally includes a pressure generator, a constant voltage power supply or a constant current power supply, a voltmeter or an ammeter, a thermostat, and automatic control of these. And the like. Then, the pressure sensor to be measured is incorporated in a pressure applying jig for applying pressure, and is put in a constant temperature bath together with an output extracting unit for outputting a signal indicating a pressure characteristic from the pressure sensor to the outside. Various characteristics are measured in the temperature state.

Here, as shown in FIG. 6, the pressure applying jig 2 is made of metal such as aluminum and has a hollow portion 21 therein.
It has a plurality of pressure introduction holes 22 connected to the hollow portion 21 and corresponding to the pressure introduction pipe 17 for introducing pressure to the diaphragm 16 in the pressure sensor main body 1. As the output take-out unit, a unit in which a plurality of IC sockets 31 are mounted on the wiring board 3 is used.

[0006] An external terminal 18 for taking out an electric signal of the pressure sensor to be measured to the outside is inserted into the IC socket 31 of the wiring board 3 so that the pressure introducing pipe 17 faces in the opposite direction to the wiring board 3 side. Next, the pressure applying jig 2 is mounted so that the pressure introducing pipe 17 fits into the pressure introducing hole 22. At this time, a stopper 32 as a spacer between the wiring board 3 and the pressure applying jig 2 is interposed therebetween. The stopper 32 is fixed to the wiring board 3 in advance, and the pressure applying jig 2 and the stopper 32 are fixed with the screw 23. The pressure applying jig 2 is provided with a pressure pipe 24, pressure is introduced from the pressure pipe 24 into the pressure introducing hole 22 through the hollow portion 21, and furthermore, the pressure sensor main body through the pressure introducing pipe 17. 1 to be introduced into the diaphragm 16.

[0007]

However, in the above-described method of measuring the pressure characteristics of the pressure sensor, the method for measuring the pressure characteristics of the pressure sensor is described as follows. When the positional displacement occurs in the direction, a stress mainly in the horizontal direction is applied to the pressure introducing pipe 17 by the pressure applying jig 2. This stress is applied to the diaphragm 16 in the pressure sensor main body 1, and the pressure characteristic changes. Further, since the pressure applying jig 2 is formed integrally so as to measure the characteristics of a plurality of pressure sensors with one pressure applying jig 2, the displacement of one pressure sensor becomes the whole displacement, Stress will also be applied to other pressure sensors.

Further, when the pressure applying jig 2 is fixed by a plurality of screws 23 and the tightening torque of the screws 23 varies, the pressure applying jig 2 slightly tilts and warps, There is a problem that the same stress as described above is applied to the pressure introducing pipe 17 of the sensor, and the pressure characteristics fluctuate.

The present invention has been made in view of the above points, and an object of the present invention is to provide a pressure sensor characteristic measuring device capable of suppressing the occurrence of mechanical stress and measuring characteristics with high accuracy. It is in.

[0010]

According to the first aspect of the present invention,
Pressure of a pressure sensor having a pressure sensor main body, a pressure introducing pipe for introducing pressure to a diaphragm in the pressure sensor main body, and an external terminal for taking out an electric signal output according to the deflection of the diaphragm to the outside. A characteristic measuring device for measuring a characteristic, wherein a pressure applying jig having a hollow portion therein and having a plurality of pressure introducing holes connected to the hollow portion and inserting the pressure introducing tube, and a groove formed on a peripheral side surface A convex or concave electrode portion is formed at a predetermined position in the groove, and has a cylindrical or cylindrical socket rotatably supported about a rotational axis. The pressure introducing tube of the pressure sensor is inserted into the pressure introducing hole of the tool, and the socket is rotated around a rotation axis to press and contact the electrode portion with the external terminal, thereby forming the hollow portion of the pressure applying jig. Through the pressure inlet pipe Introducing a pressure force sensor body, it is characterized in that an electrical signal generated in response to deflection of the diaphragm caused by the pressure introduced they were taken out through the electrode portion from the external terminal.

According to a second aspect of the present invention, in the first aspect of the present invention, the external terminal is provided by disposing the socket inside between the external terminals and rotating the socket about a rotation axis. Characterized in that the electrode portion is pressed and brought into contact with the inside of the electrode.

According to a third aspect of the present invention, in the first aspect of the present invention, a plurality of the sockets are provided, each socket is arranged outside the external terminal, and the socket is rotated about a rotation axis. Accordingly, the electrode portion is pressed and contacted from outside the external terminal.

[0013]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to the drawings. FIG. 1 is a schematic diagram illustrating a cross section of a pressure sensor characteristic measuring device according to an example of an embodiment of the present invention. The pressure sensor characteristic measuring device according to the present embodiment includes a socket 4 for holding a pressure sensor and extracting an electric signal to the outside, and a pressure applying jig 2 for introducing pressure to a diaphragm 16 in the pressure sensor main body 1. Have. The socket 4 is formed of a cylindrical or column-shaped rotating body that is rotatably supported on a rotating shaft 41. A concave groove 42 is formed on the peripheral side surface. A convex electrode portion 43 is formed. The diameter of the socket 4 is set slightly larger than the distance between the external terminals 18 on both sides. The groove 42 has a width sufficient to fit the external terminal 18, and as shown in FIG. 2, the external terminal 1 on one side of the external terminal 18 protruding from the pressure sensor main body 1.
The number corresponding to the number 8 is formed. And each groove 4
The protruding electrode portions 43 are formed at the opposite ends of each of the two.

To mount the pressure sensor on the characteristic measuring device, first, the external terminal 18 of the pressure sensor is fitted into the groove 42 of the socket 4 and the socket 4 is turned around the turning shaft 41, as shown in FIG. As described above, the rotation is stopped in a state where the external terminal 18 is in contact with the electrode unit 43. Here, since the diameter of the socket 4 is set to be slightly larger than the distance between the external terminals 18 on both sides, the external terminals 18 are pressed outward by the socket 4.

The pressure applying jig 2 has a hollow portion 21 and is made of, for example, aluminum. Further, a pressure applying jig 2
Is formed with a pressure introducing hole (opening) 22 for connecting the pressure introducing pipe 17 of the pressure sensor. Although only one pressure introducing hole 22 is shown in FIG. 1, a plurality of pressure introducing holes 22 are formed so that the characteristics of a plurality of pressure sensors can be measured.

When the characteristic is measured by the pressure sensor characteristic measuring device of the present embodiment, first, the pressure introducing pipe 17 of the pressure sensor is inserted into the pressure introducing hole 22 of the pressure applying jig 2. Next, the pressure sensor is mounted on the socket 4 as described above. In this state, when pressure is introduced through the hollow portion 21 of the pressure applying jig 2, the pressure is applied to the diaphragm 16 in the pressure sensor main body 1 via the pressure introducing pipe 17 of the pressure sensor. By extracting an electric signal output from the external terminal 18 in accordance with the pressure applied to the diaphragm 16 through the electrode portion 43 connected to the external terminal 18, the pressure characteristics can be measured.

According to the present embodiment, since the pressing of the external terminal 18 by the rotating body 4 is performed at the curved portion of the socket 4 on which the electrode portion 43 is formed, the external force is applied by the mechanical stress applied to the pressure sensor main body 1. Even if the terminal 18 fluctuates, the electrode portion 43
Is absorbed by sliding between and the mechanical stress is relieved. When the pressure sensor is mounted on the characteristic measuring device, the socket 4 is rotated while the external terminal 18 is fitted in the groove 42 of the socket 4.
8 does not come off from the socket 4 and can be securely attached.
The measurement can be reliably performed without deviating from the above.

FIG. 3 is a schematic view showing a cross section of a pressure sensor characteristic measuring apparatus according to another embodiment of the present invention. The pressure sensor characteristic measuring device of the present embodiment is the same as that of the above-described embodiment except that the sockets 4a and 4b are installed on both sides of the external terminal 18. Sockets 4a, 4b
The groove 42a, like the socket 4 of the above-described embodiment,
42b is formed, and is rotatably supported on the rotating shafts 41a and 41b. In the case of the present embodiment, the groove 42
The electrode portions 43a and 43b formed in the a
It suffices that there is only one location for one of a and 42b.

In mounting the pressure sensor of the present embodiment on the characteristic measuring device, the external terminals 18 on both sides are fitted into the grooves 42a and 42b of the sockets 4a and 4b, respectively, and the sockets 4a and 4b are connected to the rotating shafts 41a and 41b. As shown in FIG. 3, the external terminal 18 is
a) Rotation is stopped in a state of contact with a, 43b. The sockets 4a, 4b are, as shown in FIG.
b is closer to the external terminals 18 on both sides.
Set up slightly smaller than the distance between them. In addition,
FIG. 4 is a schematic view showing a planar state in which the pressure sensors are mounted on the sockets 4a and 4b. The grooves 42a and 42b have a width sufficient to fit the external terminals 18.

In this embodiment, the same effects as those of the above-described embodiment can be obtained.

[0021]

As described above, according to the first to third aspects of the present invention, the pressure sensor main body, the pressure introducing pipe for introducing pressure to the diaphragm in the pressure sensor main body, and the deflection of the diaphragm. And an external terminal for taking out an electric signal output according to the external device, a pressure measuring device for measuring the pressure characteristics of the pressure sensor, having a hollow portion inside, connected to the hollow portion A pressure application jig having a plurality of pressure introduction holes into which the pressure introduction pipes are inserted, a groove formed on a peripheral side surface, a convex electrode portion formed at a predetermined position in the groove, and a rotation about a rotation axis; A cylindrical or cylindrical socket which is rotatably supported, and a pressure introducing pipe of a pressure sensor is inserted into a pressure introducing hole of the pressure applying jig, and the socket is rotated about a rotational axis. The external terminal is connected to the Part is pressed and brought into contact, pressure is introduced into the pressure sensor main body from the hollow part of the pressure applying jig via the pressure introducing pipe, and an electric signal generated in accordance with the deflection of the diaphragm caused by the introduced pressure is transmitted to the external part. Since the terminal is taken out from the terminal via the electrode part, even if a position shift or the like occurs between the pressure supply pipe and the pressure sensor, mechanical stress is maintained between the electrode part of the socket and the external terminal. The characteristics can be measured with high accuracy by suppressing the generation of mechanical stress, and the external terminals are fitted into the grooves. A pressure sensor characteristic measuring device that does not detach the terminal can be provided.

[Brief description of the drawings]

FIG. 1 is a schematic diagram illustrating a cross-sectional state of a schematic configuration of a pressure sensor characteristic measuring device according to an embodiment of the present invention.

FIG. 2 is a schematic diagram showing a side view of the above.

FIG. 3 is a schematic diagram showing a cross-sectional state of a schematic configuration of a pressure sensor characteristic measuring device according to another embodiment of the present invention.

FIG. 4 is a schematic diagram showing a planar state of the above.

FIG. 5 is a schematic view showing a cross section of a pressure sensor chip.

FIG. 6 is a schematic diagram showing a schematic configuration of a conventional pressure sensor characteristic measuring device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Pressure sensor main body 2 Pressure application jig 4, 4a, 4b socket 16 Diaphragm 17 Pressure introduction pipe 18 External terminal 21 Hollow part 22 Pressure introduction hole 41, 41a, 41b Rotation shaft 42, 42a, 42b Groove 43, 43a, 43b Electrode section

Claims (3)

[Claims] 1. A pressure sensor having a pressure sensor main body, a pressure introduction pipe for introducing pressure to a diaphragm in the pressure sensor main body, and an external terminal for taking out an electric signal output in accordance with the deflection of the diaphragm. A pressure measuring jig for measuring pressure characteristics of a pressure sensor, comprising: a pressure applying jig having a hollow portion therein, and having a plurality of pressure introducing holes connected to the hollow portion and into which the pressure introducing tube is inserted; A groove is formed on the side surface, a convex electrode portion is formed at a predetermined position in the groove, and a cylindrical or column-shaped socket rotatably supported about a rotation axis. The pressure application pipe of the pressure sensor is inserted into the pressure introduction hole of the pressure application jig, and the socket is turned around a rotation axis to press and contact the electrode portion with the external terminal, thereby applying the pressure. Pressure guide from hollow part of jig A pressure is introduced into the pressure sensor main body through the inlet pipe, and an electric signal generated in accordance with the deflection of the diaphragm caused by the introduced pressure is taken out from the external terminal through the electrode portion. Sensor characteristic measuring device. 2. The method according to claim 1, wherein the socket is arranged inside the external terminal, and the socket is rotated about a rotation axis so that the electrode portion is pressed and contacted from inside the external terminal. The pressure sensor characteristic measuring device according to claim 1, wherein: 3. A plurality of said sockets are provided, each of said sockets is arranged outside said external terminal, and said electrode part is pressed from outside said external terminal by rotating said socket about a rotation axis. 2. The pressure sensor characteristic measuring device according to claim 1, wherein the pressure sensor is brought into contact.